Acrylate copolymer, pressure sensitive adhesive tape for cmp polishing pad and preparation method thereof

Abstract

The present disclosure relates to an acrylate copolymer, a pressure sensitive adhesive tape for CMP polishing pad and a preparation method thereof. The acrylate copolymer comprises azobenzene acrylate monomer repeating units, the azobenzene acrylate monomer repeating units have the structure shown below, wherein R1 is H or a methyl group, R2 is a C 2~12 alkyl group, R3 is a C 2~16 fluorine-containing alkyl group, and n is any integer from 1 to 3. The acrylate copolymer can make the pressure sensitive adhesive tape have high shear resistance and easy-to-peel characteristics after light exposure, while making the pressure sensitive adhesive tape have hydrophobicity and high chemical corrosion resistance, further improving the performance and service life of the pressure sensitive adhesive tape, and meeting the use requirements of the pressure sensitive adhesive tape in chemical mechanical polishing.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of high molecular materials, in particular, to an acrylate copolymer, a pressure-sensitive adhesive tape for CMP polishing pad and a preparation method thereof. BACKGROUND

[0002] Pressure-sensitive adhesive is an adhesive sensitive to pressure, which can realize close bonding with the surface of the adherend through finger pressure. There are various types of pressure-sensitive adhesive, and the most widely used at present is acrylate pressure-sensitive adhesive. This type of pressure-sensitive adhesive is copolymerized by various acrylate monomers, including copolymer, additional additives (such as initiator, crosslinking agent, tackifying resin and emulsifier, etc.), medium (such as water and solvent, etc.) in the polymerization process and residual monomer. Although acrylate pressure-sensitive adhesive performs excellently in many applications, it still has obvious shortcomings in some special environments. For example, traditional acrylate pressure-sensitive adhesive often shows insufficient bonding performance, low shear resistance, poor chemical resistance and difficulty in peeling. These shortcomings limit its use in application occasions requiring high performance and specific functions.

[0003] Chemical mechanical polishing (CMP) technology is an indispensable part of the semiconductor manufacturing process, and its unique surface planarization capability provides strong support for the miniaturization and performance improvement of semiconductor devices. Compared with traditional mechanical polishing, CMP technology effectively reduces surface damage and improves planarization degree through the dual action of chemistry and mechanics, thereby providing reliable guarantee for high-precision, high-density semiconductor device manufacturing. In the CMP process, the role of polishing material is crucial. The design and material selection of polishing pad directly affect the effect of CMP technology. The polishing pad not only needs to carry the polishing liquid and remove the polishing waste, but also must maintain stable performance in a high-pressure and high-speed rotating environment. Therefore, the bonding technology of polishing pad has become an important research field in CMP technology. Due to the special environmental requirements in the CMP process, the bonding layer of the polishing pad must have high strength, chemical corrosion resistance and easy-to-control peeling performance, which puts very high requirements on the selection of pressure-sensitive adhesive. The application of pressure-sensitive adhesive in CMP technology needs to form a firm bond between the polishing pad and the polishing table, while being able to resist mechanical pressure and chemical corrosion during polishing, and finally realize controlled peeling under specified conditions. This means that the pressure-sensitive adhesive must have high bonding performance, high shear resistance, high chemical corrosion resistance and easy peeling, etc. Although some researches have modified the pressure-sensitive adhesive to have certain specific excellent performance, there is still no pressure-sensitive adhesive that simultaneously has all the above characteristics. SUMMARY

[0004] The purpose of the present disclosure is to provide an acrylate copolymer, a pressure sensitive adhesive tape for CMP polishing pad and a preparation method, which can make the pressure sensitive adhesive tape have higher shear resistance and easy-to-peel characteristics after light exposure, while making the pressure sensitive adhesive tape have hydrophobicity and high chemical corrosion resistance, further improving the performance and service life of the pressure sensitive adhesive tape, and meeting the use requirements of the pressure sensitive adhesive tape in chemical mechanical polishing.

[0005] To achieve the above-mentioned purpose, the first aspect of the present disclosure provides an acrylate copolymer, which comprises azobenzene acrylate monomer repeating units, the azobenzene acrylate monomer repeating units have the structure shown as follows,

[0006] ,

[0007] wherein R1 is H or a methyl group, R2 is a C 2~12 alkyl group, R3 is a C 2~16 fluorine-containing alkyl group, and n is any integer from 1 to 3.

[0008] Optionally, R2 is a C 2~10 linear alkyl group, preferably one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl; and / or,

[0009] R3 is a C 2~12 perfluoroalkyl group; preferably, R3 is a C2, C4, C6, C8, C 10 or C 12 perfluoroalkyl group.

[0010] Optionally, the acrylate copolymer further comprises acrylate soft monomer repeating units, acrylate hard monomer repeating units, carboxyl acrylate monomer repeating units and hydroxyl acrylate monomer repeating units.

[0011] The content of the acrylate hard monomer repeating units is 5-60 parts by weight, the content of the carboxyl acrylate monomer repeating units is 1-20 parts by weight, the content of the hydroxyl acrylate monomer repeating units is 1-30 parts by weight, and the content of the azobenzene acrylate monomer repeating units is 5-50 parts by weight, relative to 100 parts by weight of the acrylate soft monomer repeating units.

[0012] Optionally, the content of the acrylate hard monomer repeating units is 10-40 parts by weight, the content of the carboxyl acrylate monomer repeating units is 1-10 parts by weight, the content of the hydroxyl acrylate monomer repeating units is 3-15 parts by weight, and the content of the azobenzene acrylate monomer repeating units is 15-30 parts by weight, relative to 100 parts by weight of the acrylate soft monomer repeating units.

[0013] Optionally, the acrylic ester soft monomer repeating unit is derived from an acrylic ester soft monomer selected from one or more of ethyl acrylate, n-propyl acrylate, n-butyl acrylate, n-hexyl acrylate, iso-octyl acrylate and lauryl methacrylate.

[0014] The acrylic ester hard monomer repeating unit is derived from an acrylic ester hard monomer selected from one or more of methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate, isobornyl methacrylate.

[0015] The hydroxyl acrylic ester monomer repeating unit is derived from a hydroxyl acrylic ester monomer, which is a hydroxyl-containing acrylic ester monomer with a hydroxyl functionality of 1. Preferably, the hydroxyl acrylic ester monomer is selected from one or more of hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate and hydroxypropyl methacrylate.

[0016] The carboxyl acrylic ester monomer repeating unit is derived from a carboxyl acrylic ester monomer, which is a carboxyl-containing acrylic ester monomer with a carboxyl functionality of 1. Preferably, the carboxyl acrylic monomer is selected from acrylic acid and / or methacrylic acid.

[0017] Optionally, the acrylic ester copolymer has a glass transition temperature of -45 to -20°C.

[0018] The second aspect of the present disclosure provides a method for preparing a pressure-sensitive adhesive tape, the method comprising:

[0019] The acrylic ester copolymer, tackifying resin and curing agent of the first aspect of the present disclosure are mixed with a fourth organic solvent to obtain a glue; the glue is coated on a substrate, and then a curing treatment is performed.

[0020] Optionally, the method further comprises, after the curing treatment, combining the glue layer with a release paper.

[0021] Optionally, the release paper has a thickness of 0.10-0.18 mm.

[0022] The curing treatment has a temperature of 50-100°C and a time of 1-5 h.

[0023] Optionally, relative to 100 parts by weight of the acrylic ester copolymer, the tackifying resin has a content of 5-30 parts by weight, the curing agent has a content of 0.5-3 parts by weight, and the fourth organic solvent has a content of 20-100 parts by weight; wherein the method satisfies one of the following conditions:

[0024] (a) the fourth organic solvent is selected from ethyl acetate and / or toluene.

[0025] (b) the tackifying resin is selected from one or more of a rosin resin, a rosin resin derivative, a terpene resin, a terpene phenolic resin, a styrene terpene resin, a C5 petroleum resin, and a C9 petroleum resin;

[0026] (c) the curing agent is an isocyanate-based curing agent with a functionality of isocyanate groups of 2 or more, selected from one or more of a diisocyanate, a diphenylmethane diisocyanate, a xylylene diisocyanate, a toluene diisocyanate, and an isophorone diisocyanate;

[0027] (d) the solid content of the sizing agent is 20-50 wt%, and the viscosity of the sizing agent at 25°C is 500-4000 cP;

[0028] (e) the substrate comprises polyethylene terephthalate and / or polypropylene, preferably polyethylene terephthalate; and the thickness of the substrate is 0.01-0.1 mm.

[0029] The third aspect of the present disclosure provides a pressure-sensitive adhesive tape prepared by the method of the second aspect of the present disclosure.

[0030] The fourth aspect of the present disclosure provides a use of the pressure-sensitive adhesive tape of the third aspect of the present disclosure in chemical mechanical polishing.

[0031] Through the above technical solution, the acrylate copolymer of the present disclosure comprises azobenzene acrylate monomer repeating units, the azobenzene acrylate monomer comprises an easily polymerizable acrylate group and a flexible alkyl group, when the polymer is formed, the azobenzene group is more likely to undergo isomerization transition on the side chain of the polymer, and such a polymer can make the pressure-sensitive adhesive tape have higher shear resistance and easy-to-peel characteristics after illumination when used to prepare the pressure-sensitive adhesive tape. In addition, the tail group of the azobenzene acrylate monomer repeating units of the acrylate copolymer of the present disclosure comprises a fluorine-containing alkyl chain, and the pressure-sensitive adhesive tape prepared using the copolymer has hydrophobicity and high chemical corrosion resistance, which can further improve the performance and service life of the pressure-sensitive adhesive tape, and meet the use requirements of the pressure-sensitive adhesive tape in the chemical mechanical polishing pad.

[0032] Other features and advantages of the present disclosure will be described in detail in the following specific embodiments section. DETAILED DESCRIPTION

[0033] The specific embodiments of the present disclosure are described in detail below. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present disclosure, and are not used to limit the present disclosure.

[0034] The first aspect of the present disclosure provides an acrylate copolymer comprising azobenzene acrylate monomer repeating units having the structure shown below,

[0035] ,

[0036] wherein R1 is H or a methyl group, R2 is a C 2~12 alkyl group, R3 is a C 2~16 fluorine-containing alkyl group, and n is any integer from 1 to 3.

[0037] The acrylate copolymer of the present disclosure comprises azobenzene acrylate monomer repeating units, the azobenzene acrylate monomer comprises an acrylate group that is easy to polymerize and a flexible alkyl group, when the polymer is formed, the azobenzene group is more likely to undergo isomerization transition on the side chain of the polymer, and such a polymer can make the pressure sensitive adhesive tape have higher shear resistance and easy-to-peel characteristics after light exposure when used to prepare the pressure sensitive adhesive tape. In addition, the tail group of the azobenzene acrylate monomer repeating units of the acrylate copolymer of the present disclosure comprises a fluorine-containing alkyl chain, and the pressure sensitive adhesive tape prepared using the copolymer has hydrophobicity and high chemical corrosion resistance, which can further improve the performance and service life of the pressure sensitive adhesive tape and meet the use requirements of the pressure sensitive adhesive tape in the chemical mechanical polishing pad.

[0038] In the present disclosure, represents a chemical bond.

[0039] The inventors of the present application found that the azobenzene group in the azobenzene acrylate monomer exists in two isomers, namely the rod-shaped trans isomer and the elbow-shaped cis isomer. The trans isomer is planar, while the benzene ring of the cis isomer is perpendicular to the C-N=N plane, making the entire molecule have an elbow-shaped structure. The ground state energy level of the trans isomer is 50 kJ / mol lower than that of the cis isomer, which is the stable conformation in thermodynamics, so the trans isomer is more stable than the cis isomer. Due to the π-π stacking effect of azobenzene in the trans isomer, aggregates can be formed, and the type of aggregate depends on the angle (θ) between the transition dipole of the group coplane and the direction of the connecting axis. When θ > 54.7° (critical angle θ c ), H aggregates can be formed; when θ < 54.7°, J aggregates can be formed. By utilizing the strong supramolecular interaction between the trans isomer azobenzene aggregates, the pressure sensitive adhesive tape can have stronger shear resistance.

[0040] Further, the azobenzene group is an optically active group, which can undergo trans-cis or cis-trans isomerization under the action of light or heat. Under the irradiation of light with a wavelength of about 365 nm, the trans-azobenzene can be converted into the cis-isomer; under the irradiation of light with a wavelength of about 530 nm, the cis-isomer can be converted back into the trans-isomer. The cis-azobenzene cannot form aggregates due to its non-coplanar structure, and the intermolecular interaction is weakened, resulting in a decrease in the viscosity of the pressure-sensitive adhesive system. By utilizing this characteristic, the pressure-sensitive adhesive tape can be made to have the characteristic of easy peeling after ultraviolet light irradiation.

[0041] In addition, the fluorine atom has high electronegativity and small atomic radius, and the mutual repulsion between adjacent fluorine atoms makes the fluorine atoms spiral along the carbon chain and tightly wrap the carbon chain, making it difficult for other atoms to be embedded. Therefore, the fluorinated alkyl chain does not react with most known strong chemical reagents, strong acids and strong bases, and has good chemical corrosion resistance. At the same time, due to the high electronegativity and small atomic radius of the fluorine atom, the surface energy of the fluorine-containing material is very low, and it exhibits excellent hydrophobic performance. The inventors of the present application make the tail group of the azobenzene acrylate monomer a fluorinated alkyl chain, so that the pressure-sensitive adhesive tape has hydrophobic and chemical corrosion resistance.

[0042] According to an embodiment of the present disclosure, the R2 is a linear alkyl group, preferably one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl. 2~10 The above embodiment is advantageous for the azobenzene acrylate monomer to undergo cis-trans isomerization more easily on the side chain of the acrylate copolymer after polymerization, and less constrained by the main chain, further making the pressure-sensitive adhesive tape have better easy-peeling characteristics.

[0043] According to an embodiment of the present disclosure, R3 is a perfluoroalkyl group. 2~12 Preferably, R3 is a perfluoroalkyl group of C2, C4, C6, C8, C 10 or C 12 The above embodiment is advantageous for the pressure-sensitive adhesive tape to have hydrophobic and chemical corrosion resistance.

[0044] In an embodiment, the method for preparing the azobenzene acrylate monomer comprises:

[0045] S1, subjecting a fluorinated alkyl alcohol to a first esterification reaction with a dicarboxy azobenzene to obtain a first fluorinated product;

[0046] S2, subjecting the first fluorinated product to a second esterification reaction with an alkyl diol to obtain a second product;

[0047] S3, subjecting the second product to a substitution reaction with an acyl chloride;

[0048] The fluoroalkyl alcohol has the structure shown in formula (1), the alkyl diol has the structure shown in formula (2), the acyl chloride has the structure shown in formula (3), and the dicarboxylated azobenzene has the structure shown in formula (4).

[0049] ,

[0050] ,

[0051] Wherein, R1 is H or an alkyl group of CH3, and R2 is C. 2~12 Alkyl group, R3 is C 2~16 Fluorinated alkyl groups, where n is any integer from 1 to 3.

[0052] According to one embodiment of this disclosure, R2 is C 2~10 The linear alkyl group is preferably one or more selected from n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl, and n-decyl; R3 is C 2~12 The perfluoroalkyl chain; preferably, R3 is C2, C4, C6, C8, C 10 Or C 12 Perfluoroalkyl chains.

[0053] According to one embodiment of this disclosure, step S1 is carried out in a first organic solvent in the presence of a first dehydrating agent and a first catalyst; the first dehydrating agent and the first catalyst can be of types well known to those skilled in the art, for example, the first dehydrating agent can be selected from N,N'-dicyclohexylcarbodiimide, and the first catalyst can be selected from 6-dimethylaminopurine; the molar ratio of the dicarboxylated azobenzene, the fluoroalkyl alcohol, the N,N'-dicyclohexylcarbodiimide and the 6-dimethylaminopurine is (2~15):(1~3):(1~3):(1~3); the first organic solvent may include one or more of dichloromethane, acetone, butanone and N,N-dimethylformamide.

[0054] According to one embodiment of this disclosure, the conditions for the first esterification reaction include: a reaction temperature of 20-40°C and a reaction time of 8-24 hours. This embodiment is advantageous for preparing azophenyl acrylate monomers.

[0055] According to an embodiment of the present disclosure, step S2 is performed in a second organic solvent in the presence of a second dehydrating agent and a second catalyst; the second dehydrating agent and the second catalyst can be of a kind known to those skilled in the art, for example, the second dehydrating agent can be selected from N,N'-dicyclohexyl carbodiimide, and the second catalyst can be selected from 6-dimethylaminopurine; the molar ratio of the alkyl glycol, the first fluorinated product, the N,N'-dicyclohexyl carbodiimide, and the 6-dimethylaminopurine is (2-15):(1-3):(1-3):(1-3); and the second organic solvent includes one or more of dichloromethane, acetone, butanone, and N,N-dimethylformamide. The above-mentioned embodiment is advantageous for preparing the azobenzene acrylate monomer.

[0056] According to an embodiment of the present disclosure, the conditions of the second esterification reaction include a reaction temperature of 20-40°C and a reaction time of 8-24 h. The above-mentioned embodiment is advantageous for preparing the azobenzene acrylate monomer.

[0057] According to an embodiment of the present disclosure, in step S3, the molar ratio of the second product to the acyl chloride is 1:(3-5); and the conditions of the substitution reaction can include a reaction temperature of 20-40°C and a reaction time of 8-24 h. The substitution reaction of the present disclosure is a conventional technique in the art, and the present disclosure does not make specific limitations, for example, including contacting the second product and triethylamine in anhydrous organic solvent, and adding acyl chloride under ice water bath conditions to perform the substitution reaction; the water content of the anhydrous organic solvent is 100 ppm or less, and the temperature of the ice water bath is 0°C or less. The above-mentioned embodiment is advantageous for preparing the azobenzene acrylate monomer.

[0058] According to an embodiment of the present disclosure, the acrylate copolymer further comprises one or more of an acrylate soft monomer repeating unit, an acrylate hard monomer repeating unit, a carboxyl acrylate monomer repeating unit, and a hydroxyl acrylate monomer repeating unit.

[0059] According to an embodiment of the present disclosure, the acrylate copolymer further comprises an acrylate soft monomer repeating unit, an acrylate hard monomer repeating unit, a carboxyl acrylate monomer repeating unit, and a hydroxyl acrylate monomer repeating unit; relative to 100 parts by weight of the acrylate soft monomer repeating unit, the content of the acrylate hard monomer repeating unit is 5-60 parts by weight, the content of the carboxyl acrylate monomer repeating unit is 1-20 parts by weight, the content of the hydroxyl acrylate monomer repeating unit is 1-30 parts by weight, and the content of the azobenzene acrylate monomer repeating unit is 5-50 parts by weight. The above-mentioned embodiment is advantageous for making the prepared acrylate copolymer have a strong shear resistance, easy peeling property, hydrophobicity, and chemical corrosion resistance when used in a pressure-sensitive adhesive tape.

[0060] According to an embodiment of the present disclosure, the content of the acrylic ester hard monomer repeating unit is 10-40 parts by weight, the content of the carboxyl acrylic monomer repeating unit is 1-10 parts by weight, the content of the hydroxyl acrylic ester monomer repeating unit is 3-15 parts by weight, and the content of the azobenzene acrylic ester monomer repeating unit is 15-30 parts by weight, relative to 100 parts by weight of the acrylic ester soft monomer repeating unit. The above embodiment is advantageous in that the prepared acrylic ester copolymer has strong shear resistance, easy peeling characteristics, hydrophobicity and chemical corrosion resistance when used in a pressure-sensitive adhesive tape.

[0061] According to an embodiment of the present disclosure, the acrylic ester soft monomer repeating unit is derived from an acrylic ester soft monomer, which is a conventional type in the art and is not specifically limited in the present disclosure. For example, the acrylic ester soft monomer can be an acrylic ester soft monomer having a glass transition temperature of a homopolymer of the acrylic ester soft monomer of 0°C or less, and can be selected from one or more of acrylic acid ethyl ester, acrylic acid n-propyl ester, acrylic acid n-butyl ester, acrylic acid n-hexyl ester, acrylic acid iso-octyl ester, and methacrylic acid lauryl ester. In the present disclosure, when the acrylic ester soft monomer repeating unit includes a plurality of monomer repeating units, the proportions of the respective monomer repeating units are not specifically limited in the present disclosure, and a person skilled in the art can adjust the glass transition temperature of the acrylic ester copolymer to be within a desired target temperature range according to conventional technical means.

[0062] According to an embodiment of the present disclosure, the acrylic ester hard monomer repeating unit is derived from an acrylic ester hard monomer, which is a conventional type in the art and is not specifically limited in the present disclosure. For example, the acrylic ester hard monomer can be an acrylic ester hard monomer having a glass transition temperature of a homopolymer of the acrylic ester hard monomer of 25°C or more, and can be selected from one or more of methacrylic acid methyl ester, methacrylic acid ethyl ester, methacrylic acid isopropyl ester, methacrylic acid isobutyl ester, methacrylic acid cyclohexyl ester, and methacrylic acid isobornyl ester. In the present disclosure, when the acrylic ester hard monomer repeating unit includes a plurality of monomer repeating units, the proportions of the respective monomer repeating units are not specifically limited in the present disclosure, and a person skilled in the art can adjust the glass transition temperature of the acrylic ester copolymer to be within a desired target temperature range according to conventional technical means.

[0063] According to an embodiment of the present disclosure, the hydroxyl acrylic ester monomer repeating unit is derived from a hydroxyl acrylic ester monomer, which can be a hydroxyl-functional hydroxyl acrylic ester monomer having a hydroxyl functionality of 1, and can be selected from one or more of hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate, and hydroxypropyl methacrylate.

[0064] According to an embodiment of the present disclosure, the carboxyl acrylate monomer repeating unit is derived from a carboxyl acrylate monomer, which can be a carboxyl-containing acrylate monomer with a carboxyl functionality of 1, for example, can be selected from acrylic acid and / or methacrylic acid.

[0065] In an embodiment, the method for preparing the acrylate copolymer of the first aspect of the present disclosure comprises polymerizing the acrylate soft monomer, the acrylate hard monomer, the carboxyl acrylate monomer, the hydroxyl acrylate monomer and the azobenzene acrylate monomer.

[0066] According to an embodiment of the present disclosure, the polymerization is carried out in a third organic solvent, and the conditions of the polymerization include: the solid content of the polymerization system is 20-50 wt% in the presence of an initiator; the temperature of the polymerization is 50-100°C, and the time of the polymerization is 4-12 h. The above-mentioned embodiment is conducive to obtaining the acrylate copolymer.

[0067] According to an embodiment of the present disclosure, the content of the initiator is 0.5-1 parts by weight with respect to 100 parts by weight of the acrylate soft monomer. The initiator can be a conventional free radical initiator in the art, and can be selected from one of azobisisobutyronitrile, benzoyl peroxide and cumene hydroperoxide. The third organic solvent is a good solvent for various acrylates, for example, can be selected from ethyl acetate and / or toluene.

[0068] According to an embodiment of the present disclosure, the glass transition temperature of the acrylate copolymer is -45 to -20°C. The above-mentioned embodiment can improve the initial tack of the pressure-sensitive adhesive tape.

[0069] The second aspect of the present disclosure provides a method for preparing a pressure-sensitive adhesive tape, the method comprising:

[0070] Mixing the acrylate copolymer of the first aspect of the present disclosure, the tackifying resin, the curing agent and a fourth organic solvent to obtain a glue; coating the glue on a substrate, and then performing a curing treatment.

[0071] According to an embodiment of the present disclosure, the content of the tackifying resin is 5-30 parts by weight, the content of the curing agent is 0.5-3 parts by weight, and the content of the fourth organic solvent is 20-100 parts by weight with respect to 100 parts by weight of the acrylate copolymer; and the fourth organic solvent is selected from ethyl acetate and / or toluene. The above-mentioned embodiment is conducive to preparing a pressure-sensitive adhesive tape with strong shear resistance, easy peeling characteristics, hydrophobicity, oleophobicity and chemical corrosion resistance.

[0072] According to an embodiment of the present disclosure, the conditions of the curing treatment include that the temperature of the curing treatment is 50-100°C, and the time of the curing treatment is 1-5h. The above-mentioned embodiment is advantageous to prepare the pressure-sensitive adhesive tape with stronger shear resistance, easy peeling property, hydrophobicity, oleophobicity and chemical corrosion resistance.

[0073] According to an embodiment of the present disclosure, the tackifying resin can be selected from one or more of rosin resin, rosin resin derivative, terpene resin, terpene phenolic resin, styrene terpene resin, C5 petroleum resin and C9 petroleum resin.

[0074] According to an embodiment of the present disclosure, the curing agent can be an isocyanate curing agent with a functionality of isocyanate of 2 or more, selected from one or more of hexamethylene diisocyanate, diphenylmethane diisocyanate, xylylene diisocyanate, toluene diisocyanate and isophorone diisocyanate.

[0075] According to an embodiment of the present disclosure, the solid content of the size is 20-50wt%, and the viscosity of the size at 25°C is 500-4000cP.

[0076] According to an embodiment of the present disclosure, the substrate includes polyethylene terephthalate and / or polypropylene, preferably polyethylene terephthalate; and the thickness of the substrate is 0.01-0.1mm.

[0077] According to an embodiment of the present disclosure, the method further includes compounding the size layer after the curing treatment with a release paper.

[0078] According to an embodiment of the present disclosure, the release paper can be selected from one of copper plate release paper, double adhesive release paper, yellow silicon paper, white card release paper, embossed silicon oil paper, cowhide silicon oil paper, writing paper release paper, glassine release paper and CCK release paper; and the thickness of the release paper can be 0.10-0.18mm.

[0079] The third aspect of the present disclosure provides a pressure-sensitive adhesive tape prepared by the method of the second aspect of the present disclosure.

[0080] The fourth aspect of the present disclosure provides a use of the pressure-sensitive adhesive tape of the third aspect of the present disclosure in a chemical mechanical polishing pad.

[0081] The present disclosure is described in detail below in combination with specific embodiments. The following embodiments will help those skilled in the art to further understand the present disclosure, but do not limit the present disclosure in any form.

[0082] As used herein, reagents are commercially available unless otherwise specified. In the examples of the present disclosure, the viscosity of the sizing agent is tested by a Brookfield instrument, model TR-100EU-C. The glass transition temperature of the acrylate copolymer is tested by a differential scanning calorimeter (DSC), model Mettler Toledo DSC 3.

[0083] Preparation Example 1

[0084] S1: Fluorinated alkyl alcohol, N,N'-dicyclohexyl carbodiimide (DCC) and 6-dimethyl amino purine (DMAP) were weighed respectively and dissolved in a dry first organic solvent, dicarboxy azobenzene was added under ice-salt bath condition, and reacted at 25°C for 12h. After the reaction was completed, filtration was performed, dichloromethane was added to dilute the reaction system in the filtrate, deionized water was added for washing, and the organic phase was taken to obtain the first fluorinated product after drying. The molar ratio of dicarboxy azobenzene, fluorinated alkyl alcohol, N,N'-dicyclohexyl carbodiimide and 6-dimethyl amino purine was 5:1:1:1. The first organic solvent was dichloromethane.

[0085] S2: Alkyl diol, N,N'-dicyclohexyl carbodiimide (DCC) and 6-dimethyl amino purine (DMAP) were weighed respectively and dissolved in a dry second organic solvent, the first fluorinated product was added under ice-salt bath condition, and reacted at 25°C for 12h. After the reaction was completed, filtration was performed, dichloromethane was added to dilute the reaction system in the filtrate, deionized water was added for washing, and the organic phase was taken to obtain the second product after drying. The molar ratio of alkyl diol, the second product, N,N'-dicyclohexyl carbodiimide and 6-dimethyl amino purine was 5:1:1:1. The second organic solvent was dichloromethane.

[0086] S3: The second product and triethylamine were dissolved in anhydrous dichloromethane, and acyl chloride was added dropwise under ice-water bath condition. After the addition was completed, the reaction was carried out at 25°C for 24h. The organic phase was collected and dried, and then purified by silica gel column chromatography to obtain azobenzene acrylate monomer. The water content of the anhydrous organic solvent was less than 100ppm. The ice-water bath condition was below 0°C. The molar ratio of the second product to acyl chloride was 1:2.

[0087] In the present preparation example, the fluorinated alkyl alcohol has a structure as shown in formula (1), R3 is a C6 perfluoroalkyl group, and n is 2; the alkyl diol has a structure as shown in formula (2), R2 is a linear alkyl group of C 10 ; the acyl chloride has a structure as shown in formula (3), R1 is a methyl group; and the dicarboxy azobenzene has a structure as shown in formula (4).

[0088] ,

[0089] ;

[0090] The prepared azobenzene acrylate monomer has the structure shown below.

[0091] ,

[0092] wherein R1 is methyl, R2 is C 10 , R3 is C6 perfluoroalkyl, and n is 2.

[0093] Comparative Preparation Example 1

[0094] S1: The linear alkyl alcohol, N,N'-dicyclohexyl carbodiimide (DCC) and 6-dimethyl amino purine (DMAP) were weighed respectively and dissolved in a dry first organic solvent, dicarboxy azobenzene was added under ice salt bath condition, and reacted at 25°C for 12h. After the reaction was completed, filtration was performed, dichloromethane was added to dilute the reaction system in the filtrate, deionized water was added for washing, the organic phase was taken, and after drying, a first fluorinated product was obtained; wherein the molar ratio of dicarboxy azobenzene, linear alkyl alcohol, N,N'-dicyclohexyl carbodiimide and 6-dimethyl amino purine was 5:1:1:1; the first organic solvent was dichloromethane;

[0095] S2: The alkyl diol, N,N'-dicyclohexyl carbodiimide (DCC) and 6-dimethyl amino purine (DMAP) were weighed respectively and dissolved in a dry second organic solvent, the first fluorinated product was added under ice salt bath condition, and reacted at 25°C for 12h. After the reaction was completed, filtration was performed, dichloromethane was added to dilute the reaction system in the filtrate, deionized water was added for washing, the organic phase was taken, and after drying, a second product was obtained; wherein the molar ratio of the second product, alkyl diol, N,N'-dicyclohexyl carbodiimide and 6-dimethyl amino purine was 1:5:1:1; the second organic solvent was dichloromethane;

[0096] S3: The second product and triethylamine were dissolved in anhydrous dichloromethane, and acyl chloride was added dropwise under ice water bath condition. After the addition was completed, the reaction was carried out at 25°C for 24h. The organic phase was collected, dried, and then purified by silica gel column chromatography to obtain the azobenzene acrylate monomer. The water content of the anhydrous organic solvent was less than 100ppm. The ice water bath condition was at a temperature of 0°C or below. The molar ratio of the second product to acyl chloride was 1:2.

[0097] In the present preparation example, the linear alkyl alcohol has the structure shown in formula (1), R3' is C8 linear alkyl, and n is 2; the alkyl diol has the structure shown in formula (2), R2 is n-decyl; the acyl chloride has the structure shown in formula (3), R1 is methyl; and the dicarboxy azobenzene has the structure shown in formula (4).

[0098] ,

[0099] ;

[0100] The prepared azobenzene acrylate monomer has the following structure,

[0101] ,

[0102] wherein R1 is methyl, R2 is n-decyl, R3' is a linear alkyl group of C8, and n is 2.

[0103] Example 1

[0104] The acrylate copolymer of this example 1 is prepared by copolymerization of azobenzene acrylate monomer, acrylate soft monomer, acrylate hard monomer, hydroxy acrylate monomer, and carboxyl acrylate monomer; wherein the azobenzene acrylate monomer is the azobenzene acrylate monomer prepared in Preparation Example 1; the acrylate soft monomer is selected from isooctyl acrylate and n-butyl acrylate, the acrylate hard monomer is selected from methyl methacrylate, the hydroxy acrylate monomer is selected from hydroxyethyl acrylate, and the carboxyl acrylate monomer is selected from acrylic acid.

[0105] The content of methyl methacrylate is 20 parts by weight, the content of azobenzene acrylate monomer is 25 parts by weight, the content of acrylic acid is 8 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight, relative to 100 parts by weight of acrylate soft monomer; wherein the acrylate soft monomer includes 80 parts by weight of isooctyl acrylate and 20 parts by weight of n-butyl acrylate.

[0106] The acrylate copolymer is prepared by weighing the above-mentioned monomers in proportion, adding 1 part by weight of initiator azobis isobutyronitrile and 430 parts by weight of ethyl acetate, and stirring and heating at 60°C under nitrogen protection to carry out polymerization reaction for 8 hours.

[0107] The acrylate copolymer includes the following structure,

[0108] ,

[0109] R1 is methyl, R2 is a linear alkyl group of C 10 , R3 is a perfluoroalkyl group of C6, and n is 2; and the glass transition temperature of the acrylate copolymer is -38°C.

[0110] Preparation of pressure sensitive adhesive tape: the prepared acrylic ester copolymer, tackifying resin rosin resin, curing agent diphenyl methane diisocyanate (MDI-50), the fourth organic solvent ethyl acetate are mixed to obtain a glue, the solid content of the glue is 30wt%, the viscosity at 25°C is 2500cP; coated on the PET substrate with a thickness of 50μm, placed at 65°C for 2h, the cured adhesive layer is compounded with release paper, the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylic ester copolymer, the content of the curing agent is 0.5 parts by weight, the tackifying resin is 30 parts by weight, and the fourth organic solvent is 70 parts by weight.

[0111] Example 2

[0112] The acrylic ester copolymer of this example 2 is obtained by copolymerization of azobenzene acrylate monomer, acrylic ester soft monomer, acrylic ester hard monomer, hydroxy acrylate monomer and carboxyl acrylate monomer; wherein the azobenzene acrylate monomer is the azobenzene acrylate monomer obtained in preparation example 1; the acrylic ester soft monomer is selected from isooctyl acrylate, n-butyl acrylate, the acrylic ester hard monomer is selected from methyl methacrylate, the hydroxy acrylate monomer is selected from hydroxyethyl acrylate, and the carboxyl acrylate monomer is selected from acrylic acid;

[0113] The content of methyl methacrylate is 30 parts by weight, the content of azobenzene acrylate monomer is 15 parts by weight, the content of acrylic acid is 8 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight, relative to 100 parts by weight of the acrylic ester soft monomer; wherein the acrylic ester soft monomer includes 80 parts by weight of isooctyl acrylate and 20 parts by weight of n-butyl acrylate.

[0114] Preparation of acrylic ester copolymer: the monomers of the above components are weighed according to the proportion, 1 part by weight of initiator benzoyl peroxide and 310 parts by weight of ethyl acetate are added, and the polymerization reaction is carried out under nitrogen protection at 70°C with heating and stirring for 7h. The glass transition temperature of the acrylic ester copolymer is -32°C.

[0115] Preparation of pressure sensitive adhesive tape: the prepared acrylic ester copolymer, tackifying resin rosin resin, curing agent diphenyl methane diisocyanate (MDI-50), the fourth organic solvent ethyl acetate are mixed to obtain a glue, the solid content of the glue is 30wt%, the viscosity at 25°C is 2500cP; coated on the PET substrate with a thickness of 50μm, placed at 65°C for 2h, the cured adhesive layer is compounded with release paper, the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylic ester copolymer, the content of the curing agent is 0.5 parts by weight, the tackifying resin is 30 parts by weight, and the fourth organic solvent is 70 parts by weight.

[0116] Example 3

[0117] The acrylic ester copolymer of this embodiment 3 is obtained by copolymerization of azobenzene acrylic ester monomer, acrylic ester soft monomer, acrylic ester hard monomer, hydroxy acrylic ester monomer, carboxyl acrylic ester monomer; wherein the azobenzene acrylic ester monomer is azobenzene acrylic ester monomer obtained in preparation example 1; the acrylic ester soft monomer is selected from isooctyl acrylate, n-butyl acrylate, the acrylic ester hard monomer is selected from methyl methacrylate, the hydroxy acrylic ester monomer is selected from hydroxyethyl acrylate, the carboxyl acrylic ester monomer is selected from acrylic acid;

[0118] The content of methyl methacrylate is 30 parts by weight, the content of azobenzene acrylic ester monomer is 25 parts by weight, the content of acrylic acid is 5 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight, with respect to 100 parts by weight of the acrylic ester soft monomer; wherein the acrylic ester soft monomer includes 75 parts by weight of isooctyl acrylate and 25 parts by weight of n-butyl acrylate.

[0119] The acrylic ester copolymer is prepared: the monomers of the above components are weighed according to the proportion, 0.5 parts by weight of initiator azobisisobutyronitrile and 380 parts by weight of ethyl acetate are added, and the polymerization reaction is carried out under nitrogen protection at 55°C with heating and stirring for 10h, and the glass transition temperature of the acrylic ester copolymer is -27°C.

[0120] The pressure-sensitive adhesive tape is prepared: the prepared acrylic ester copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and the fourth organic solvent ethyl acetate are mixed to obtain a glue, the solid content of the glue is 31wt%, and the viscosity at 25°C is 2700cP; the glue is coated on a PET substrate with a thickness of 50μm, and is cured at 65°C for 2.5h, and the glue layer after curing is combined with release paper, and the release paper is yellow silicon paper; wherein the content of the curing agent is 1 part by weight, the content of the tackifying resin is 20 parts by weight, and the content of the fourth organic solvent is 45 parts by weight, with respect to 100 parts by weight of the acrylic ester copolymer.

[0121] Embodiment 4

[0122] The acrylic ester copolymer of this embodiment 4 is obtained by copolymerization of azobenzene acrylic ester monomer, acrylic ester soft monomer, acrylic ester hard monomer, hydroxy acrylic ester monomer, carboxyl acrylic ester monomer; wherein the azobenzene acrylic ester monomer is azobenzene acrylic ester monomer obtained in preparation example 1; the acrylic ester soft monomer includes isooctyl acrylate, lauryl methacrylate, n-butyl acrylate, the acrylic ester hard monomer includes isobutyl acrylate, the carboxyl acrylic ester monomer is selected from acrylic acid, and the hydroxy acrylic ester monomer is selected from hydroxyethyl acrylate;

[0123] The content of isobornyl methacrylate is 30 parts by weight, the content of azobenzene acrylate monomer is 20 parts by weight, the content of acrylic acid is 5 parts by weight, and the content of hydroxyethyl acrylate is 8 parts by weight, relative to 100 parts by weight of the acrylate soft monomer; wherein the acrylate soft monomer comprises 50 parts by weight of isooctyl acrylate, 30 parts by weight of lauryl methacrylate, and 20 parts by weight of n-butyl acrylate.

[0124] Preparation of the acrylate copolymer: the monomers of the above components are weighed in proportion, 1 part by weight of the initiator azobisisobutyronitrile and 490 parts by weight of ethyl acetate are added, and the polymerization reaction is carried out under nitrogen protection at 60°C with heating and stirring for 10 hours. The glass transition temperature of the acrylate copolymer is -25°C.

[0125] Preparation of the pressure-sensitive adhesive tape: the prepared acrylate copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and the fourth organic solvent ethyl acetate are mixed to obtain a sizing material, the solid content of the sizing material is 25 wt%, and the viscosity at 25°C is 1500 cP; the sizing material is coated on a PET substrate with a thickness of 55 μm, and is cured at 65°C for 2.5 hours; the sizing layer after curing is combined with release paper, and the release paper is yellow silicon paper; wherein the content of the curing agent is 0.7 parts by weight, the content of the tackifying resin is 10 parts by weight, and the content of the fourth organic solvent is 30 parts by weight, relative to 100 parts by weight of the acrylate copolymer.

[0126] Example 5

[0127] This example 5 is the same as example 1, except that the content of azobenzene acrylate monomer is 10 parts by weight. The glass transition temperature of the acrylate copolymer is -40°C.

[0128] Example 6

[0129] This example 6 is the same as example 1, except that the content of acrylic acid is 12 parts by weight, and the content of hydroxyethyl acrylate is 16 parts by weight. The glass transition temperature of the acrylate copolymer is -30°C.

[0130] Example 7

[0131] This example 7 is the same as example 1, except that the content of azobenzene acrylate monomer is 35 parts by weight. The glass transition temperature of the acrylate copolymer is -28°C.

[0132] Comparative Example 1

[0133] The acrylic ester copolymer of the present comparative example 1 is obtained by copolymerization of acrylic ester soft monomers, acrylic ester hard monomers, hydroxy acrylic ester monomers and carboxyl acrylic ester monomers; wherein the acrylic ester soft monomers are selected from isooctyl acrylate and n-butyl acrylate, the acrylic ester hard monomers are selected from methyl methacrylate, the hydroxy acrylic ester monomers are selected from hydroxyethyl acrylate, and the carboxyl acrylic ester monomers are selected from acrylic acid;

[0134] The content of methyl methacrylate is 35 parts by weight, the content of acrylic acid is 8 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight, relative to 100 parts by weight of the acrylic ester soft monomers; the acrylic ester soft monomers include 80 parts by weight of isooctyl acrylate and 20 parts by weight of n-butyl acrylate.

[0135] Preparation of the acrylic ester copolymer: the monomers of the above components are weighed according to the proportion, 1 part by weight of the initiator azobisisobutyronitrile and 460 parts by weight of ethyl acetate are added, and the polymerization reaction is carried out under nitrogen protection at 60°C with heating and stirring for 8 hours.

[0136] Preparation of the pressure-sensitive adhesive tape: the prepared acrylic ester copolymer, tackifying resin rosin resin, curing agent methylene dianiline diisocyanate (MDI-50) and fourth organic solvent ethyl acetate are mixed to obtain a glue, the solid content of the glue is 25 wt%, and the viscosity at 25°C is 2500 cP; the glue is coated on a PET substrate with a thickness of 50 μm, and is cured at 65°C for 2 hours; the glue layer after curing is combined with a release paper, and the release paper is yellow silicon paper; wherein the content of the curing agent is 0.5 parts by weight, the content of the tackifying resin is 30 parts by weight, and the content of the fourth organic solvent is 90 parts by weight, relative to 100 parts by weight of the acrylic ester copolymer.

[0137] Comparative example 2

[0138] The present comparative example 2 is the same as example 1, except that the azobenzene acrylate monomer is the monomer prepared in comparative preparation example 1.

[0139] Test example

[0140] The pressure-sensitive adhesive tapes prepared in examples 1-7 and comparative examples 1-2 are tested for peel strength, shear strength, water contact angle, chemical resistance, polishing life and failure mode analysis, and the results are shown in tables 1-2.

[0141] The test methods are as follows:

[0142] Peel strength test: the peel strength before and after ultraviolet light irradiation is tested according to GB / T 2792-2014.

[0143] Tensile shear strength test: the tensile shear strength before and after ultraviolet light irradiation is tested according to GB / T 7124-2008.

[0144] Contact angle test: The contact angle of the pressure sensitive adhesive layer was tested according to ASTM D7334-08.

[0145] Test of the change rate of chemical resistance:

[0146] The polishing solution was poured into a glass container, and the sample to be tested was placed in it, ensuring that the polishing solution could completely immerse the sample. The container cover was closed to be completely sealed, and the sample was soaked for 40 h. The polishing solution remaining on the surface of the sample was washed off with water and dried. The peel strength and tensile shear strength of the sample were tested using the above method, and the change rate of chemical resistance was calculated using the following formula: Δδ = (δ0-δ) / δ0x 100%,

[0147] In the formula: Δδ - the change rate of chemical resistance of the pressure sensitive adhesive (%),

[0148] δ0 - the average value of the initial peel strength or tensile shear strength,

[0149] δ - the average value of the peel strength or tensile shear strength after immersion in the polishing solution.

[0150] Polishing life and failure analysis:

[0151] The polishing pad and the polishing table were bonded using the pressure sensitive adhesive tape, and the service life and failure mode of the polishing pad were tested.

[0152] Ultraviolet light irradiation experiment: A 365 nm ultraviolet lamp was used for irradiation, with a light intensity of 200 mW / cm 2 , and the irradiation time was 5 min.

[0153] Table 1

[0154]

[0155] Table 2

[0156]

[0157] According to the data in Tables 1 and 2, the easy-to-peel property and the hydrophobic property of the pressure sensitive adhesive tape of the present disclosure after irradiation can indicate that the prepared acrylate copolymer contains azobenzene acrylate monomer repeating units, which contain azobenzene groups and fluorine-containing tail groups. The azobenzene acrylate monomer provided by the present disclosure has a specific structure, which is used to prepare a pressure sensitive adhesive tape, so that the pressure sensitive adhesive tape has strong shear resistance, is easy to peel after irradiation, has high chemical corrosion resistance, and the pressure sensitive adhesive tape has hydrophobic properties, thereby improving the service life of the pressure sensitive adhesive tape. The chemical resistance of the adhesive layer of the pressure sensitive adhesive tape of the present application is better, and the adhesive layer of the comparative pressure sensitive adhesive tape fails before the polishing layer fails.

[0158] Compared with Example 5 and Example 7, the content of the azobenzene acrylate monomer repeating unit in Example 1 is within the preferred range of the present disclosure, the shear resistance, easy peeling and chemical corrosion resistance of the prepared pressure-sensitive adhesive tape are more excellent, the pressure-sensitive adhesive tape has hydrophobic characteristics, and the service life of the pressure-sensitive adhesive tape is longer.

[0159] Compared with Example 6, the content of the carboxyl acrylate monomer repeating unit and the hydroxyl acrylate monomer repeating unit in Example 1 is within the preferred content range of the present disclosure, the shear resistance, easy peeling and chemical corrosion resistance of the prepared pressure-sensitive adhesive tape are more excellent, the pressure-sensitive adhesive tape has hydrophobic characteristics, and the service life of the pressure-sensitive adhesive tape is longer.

[0160] The above describes the preferred embodiments of the present disclosure, but the present disclosure is not limited to the specific details in the above-described embodiments, and various simple modifications can be made to the technical solutions of the present disclosure within the technical concept of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

[0161] In addition, it should be noted that each specific technical feature described in the above-described specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0162] In addition, various different embodiments of the present disclosure can also be combined in any manner, as long as it does not deviate from the idea of the present disclosure, and it should also be considered as disclosed by the present disclosure.

Claims

1. An acrylate copolymer, characterized in that, The acrylate copolymer comprises azobenzene acrylate monomer repeating units having the structure shown below, ， wherein R1is H or a methyl group, R2is a C 2~12 alkyl group, R3is a C 2~16 fluorine-containing alkyl group, and n is any integer from 1 to 3.

2. The acrylate copolymer of claim 1, wherein, said R2is a C 2~10 a straight-chain alkyl group; and / or, R3is C 2~12 perfluoroalkyl of the formula 3. The acrylate copolymer of claim 2, wherein, R2 is one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl; and / or, R3is a C2, C4, C6, C8, C 10 or C 12 perfluoroalkyl group.

4. The acrylate copolymer of claim 1, wherein, The acrylate copolymer further comprises acrylate soft monomer repeating units, acrylate hard monomer repeating units, carboxyl acrylate monomer repeating units and hydroxyl acrylate monomer repeating units; The content of the acrylate hard monomer repeating units is 5-60 parts by weight, the content of the carboxyl acrylate monomer repeating units is 1-20 parts by weight, the content of the hydroxyl acrylate monomer repeating units is 1-30 parts by weight, and the content of the azobenzene acrylate monomer repeating units is 5-50 parts by weight, relative to 100 parts by weight of the acrylate soft monomer repeating units.

5. The acrylate copolymer of claim 4, wherein, The content of the acrylate hard monomer repeating units is 10-40 parts by weight, the content of the carboxyl acrylate monomer repeating units is 1-10 parts by weight, the content of the hydroxyl acrylate monomer repeating units is 3-15 parts by weight, and the content of the azobenzene acrylate monomer repeating units is 15-30 parts by weight, relative to 100 parts by weight of the acrylate soft monomer repeating units.

6. The acrylate copolymer of claim 4, wherein, The acrylate soft monomer repeating units are derived from acrylate soft monomers selected from one or more of ethyl acrylate, n-propyl acrylate, n-butyl acrylate, n-hexyl acrylate, isooctyl acrylate and lauryl methacrylate; The acrylate hard monomer repeating units are derived from acrylate hard monomers selected from one or more of methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate and isobornyl methacrylate; The hydroxyl acrylate monomer repeating units are derived from hydroxyl acrylate monomers, which are hydroxyl-containing acrylate monomers with a hydroxyl functionality of 1. The carboxyl acrylate monomer repeating units are derived from carboxyl acrylate monomers, which are carboxyl-containing acrylate monomers with a carboxyl functionality of 1.

7. The acrylate copolymer according to claim 6, wherein, The hydroxyl acrylate monomer is selected from one or more of hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate and hydroxypropyl methacrylate.

8. The acrylate copolymer of claim 6, wherein, The carboxyl acrylate monomer is selected from acrylic acid and / or methacrylic acid.

9. The acrylate copolymer of claim 1, wherein, The glass transition temperature of the acrylate copolymer is -45 to -20°C.

10. A method of making a pressure sensitive adhesive tape, characterized by, The method comprises: The acrylate copolymer, tackifying resin, curing agent and fourth organic solvent are mixed to obtain a sizing material; the sizing material is coated on a substrate, and then a curing treatment is performed.

11. The method of claim 10, wherein, The method further comprises: after the curing treatment, the sizing layer is combined with a release paper. The curing treatment is performed at a temperature of 50-100°C for 1-5h.

12. The method of claim 11, wherein, The thickness of the release paper is 0.10-0.18mm.

13. The method of claim 10, wherein, The tackifying resin is present in an amount of 5 to 30 parts by weight, the curing agent is present in an amount of 0.5 to 3 parts by weight, and the fourth organic solvent is present in an amount of 20 to 100 parts by weight, relative to 100 parts by weight of the acrylic ester copolymer; wherein the method satisfies one of the following conditions: (a) the fourth organic solvent is selected from ethyl acetate and / or toluene; (b) the tackifying resin is selected from one or more of rosin resin, rosin resin derivative, terpene resin, terpene phenol resin, styrene terpene resin, C5 petroleum resin, and C9 petroleum resin; (c) the curing agent is an isocyanate-based curing agent having a functionality of isocyanate groups of 2 or more, and is selected from one or more of hexamethylene diisocyanate, toluene diisocyanate, xylene diisocyanate, isophorone diisocyanate; (d) the size has a solid content of 20 to 50 wt%, and a viscosity of 500 to 4000 cP at 25°C; (e) the substrate comprises polyethylene terephthalate and / or polypropylene; and the substrate has a thickness of 0.01 to 0.1 mm.

14. The method of claim 13, wherein, The substrate comprises polyethylene terephthalate.

15. The pressure-sensitive adhesive tape prepared by the method of any one of claims 10 to 14.

16. Use of the pressure-sensitive adhesive tape of claim 15 in chemical mechanical polishing.

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