A fixture and method for laser interferometer beam collimation

Abstract

This invention discloses a fixture and method for laser interferometer beam collimation, comprising: a worktable, a workpiece stage, a vacuum cavity, a laser interferometry measuring device, and an adjustment device. The vacuum cavity is disposed on the worktable, the workpiece stage is disposed within the vacuum cavity, and the laser interferometry measuring device is fixedly disposed on the worktable for high-precision displacement measurement of the workpiece stage within the vacuum cavity. The adjustment device is movably disposed on the worktable for optical path collimation. This invention utilizes a universal fixture to complete the collimation of all optical paths, significantly reducing costs, improving the versatility and operability of the collimation method, and facilitating its widespread adoption.

Description

Technical Field

[0001] This invention belongs to the field of instrumentation technology, specifically relating to a tooling and method for laser interferometer beam collimation. Background Technology

[0002] Laser interferometers, as high-precision measuring instruments, are widely used in precision testing, metrology, precision machining, microelectronics, and other fields. The workpiece stage, as a supporting component of electron beam equipment, features a large stroke, high precision, and a special working environment (vacuum cleanliness, non-magnetic, thermal stability, and low vibration). Furthermore, ultra-high precision position and orientation monitoring of the workpiece stage is required throughout the entire process. Therefore, a dual-frequency laser interferometer outside the vacuum cavity is typically used to monitor the position and orientation of the workpiece stage within the vacuum cavity.

[0003] Establishing the relative positional relationship between the laser and the end of the workpiece stage is helpful for collimating the measurement beam. There are generally two methods: Method 1 relies on machining positioning references to determine the relative position; Method 2 involves designing and adjusting fixtures for auxiliary positioning. While both methods are theoretically feasible, in practice, the connection between the end of the workpiece stage and the laser involves multiple components connected in series, and there are many types of corresponding mirror groups, making adjustment difficult and reliability poor. Method 1 suffers from difficulties in establishing a reference system, high machining costs for the components involved in reference transfer, and the accumulation of errors in machining and assembly, resulting in unreliable collimation of the measurement beam. Method 2 faces challenges in unifying the adjustment reference, designing difficult and costly fixtures, and the dedicated fixtures have poor versatility. Furthermore, the plane mirror, directly involved in the measurement on the workpiece stage, has a reflection surface quality that directly affects the accuracy of the measurement system. Traditional contact-based adjustment methods easily cause scratches and damage to the reflection surface, further increasing the difficulty of assembling and adjusting the laser interferometry system. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to address the shortcomings of existing laser interferometry systems, such as high difficulty in assembly and adjustment, high cost, poor versatility, and limited accuracy. The invention provides a compact, simple, stable, and highly accurate tooling and method for laser interferometer beam collimation that is suitable for laser interferometer beam collimation.

[0005] To achieve the above objectives, the present invention may adopt the following technical solutions:

[0006] A fixture for beam collimation in a laser interferometer includes: a worktable, a workpiece stage, a vacuum cavity, a laser interferometric measuring device, and a debugging device; the vacuum cavity is disposed on the worktable, the workpiece stage is disposed inside the vacuum cavity, and the laser interferometric measuring device is fixedly disposed on the worktable for displacement measurement of the workpiece stage inside the vacuum cavity; the debugging fixture is movably disposed on the worktable for optical path collimation.

[0007] As a further improvement of the present invention, the laser interferometric measurement device includes an interferometer assembly, a plane mirror, a laser, a first right-angle mirror, a second right-angle mirror, a 33% beam splitter, and a 50% beam splitter. The interferometer assembly includes a first interferometer, a second interferometer, and a third interferometer. The laser is disposed outside the vacuum cavity, and orthogonally distributed plane mirrors are provided on both sides of the workpiece stage. The first, second, and third interferometers are arranged orthogonally on both sides of the vacuum cavity, with the second and third interferometers located on the same side of the vacuum cavity. The first right-angle mirror, the second right-angle mirror, the 33% beam splitter, and the third interferometer are arranged orthogonally on both sides of the vacuum cavity. The optical mirror and the 50% beam splitter are positioned on the same side of the vacuum cavity. The first right-angle mirror, the 33% beam splitter, the 50% beam splitter, and the second interferometer are arranged side by side in sequence. The second right-angle mirror and the third interferometer are arranged side by side. The laser emits a beam, which is transmitted through the first right-angle mirror to the 33% beam splitter and split into two beams. One beam is guided into the first interferometer, and the other beam is split into two beams by the 50% beam splitter. One beam is guided into the second interferometer, and the other beam is guided into the third interferometer through the second right-angle mirror. The interferometer assembly reflects the measurement light, which is then reflected back to the interferometer assembly by the plane mirror, thereby measuring the displacement of the workpiece stage along the optical path.

[0008] As a further improvement of the present invention, the plane mirror is perpendicular or parallel to the motion axis of the workpiece stage, and the measuring beam is perpendicular to the plane mirror.

[0009] As a further improvement of the present invention, the debugging device includes a laser head, a beam splitter, a sliding target, and a square gauge; the laser head is mounted on a tripod and located on the side of the worktable; the sliding target includes a magnetic base, a target, and a guide rail slider; the beam splitter and the guide rail slider are both set on the worktable; the magnetic base is slidably set on the guide rail slider; the target is detachably set on the magnetic base; and the square gauge is set on the worktable.

[0010] As a further improvement of the present invention, the bottom of the workpiece stage is provided with support feet around the perimeter to adjust the height of the workpiece stage.

[0011] As a further improvement of the present invention, the workbench is made of marble.

[0012] As a general technical concept, the present invention also provides a laser interferometer beam collimation method based on the above-mentioned tooling, comprising the following steps:

[0013] Step S1: Adjust the workpiece stage and the worktable to be parallel;

[0014] Step S2: Adjust the reflecting plane to be perpendicular to the motion axis;

[0015] Step S3: Adjust the measurement beam to be parallel to the motion axis to complete the collimation of the measurement beam.

[0016] As a further improvement of the present invention, step S1 further includes:

[0017] Step S11: Fix the slide rail target on the worktable so that the light spot emitted by the laser head falls on the target. Move the target back and forth along the guide rail slider and adjust the position of the laser head until the position of the light spot is stable, so that the laser head emitted light is parallel to the worktable.

[0018] Step S12: Place the workpiece stage inside the vacuum chamber, place the vacuum chamber on the worktable, fix the target on the workpiece stage, and adjust the height of the laser head so that the light spot emitted by the laser head falls on the target.

[0019] Step S13: Move the target back and forth along the X-axis of the workpiece stage. If the spot moves up and down, adjust the height of the support feet at the bottom of the workpiece stage. If the spot moves left and right, adjust the position of the laser head until the spot position is stable.

[0020] Step S14: Move the target back and forth along the Y-axis of the workpiece stage. If the spot moves up and down, adjust the height of the support feet at the bottom of the workpiece stage. If the spot moves left and right, adjust the position of the laser head until the spot position is stable.

[0021] Step S15, repeat steps S13 and S14 to achieve parallelism between the workpiece stage and the worktable.

[0022] As a further improvement of the present invention, step S2 further includes:

[0023] Step S21: Place the plane mirror on the workpiece stage, adjust the height of the laser head so that the light spot falls on the plane mirror, and fix the laser head;

[0024] Step S22: Fix the beam splitter between the laser head and the plane mirror, place the sliding target on the worktable, and make the reference spot of the interferometer fall on the target.

[0025] Step S23: Move the target back and forth along the guide rail slider, adjust the position of the guide rail slider to stabilize the position of the reference spot, and fix the guide rail target.

[0026] Step S24: Adjust the position and orientation of the plane mirror until the distance between the reflected light spot and the reference light spot is stable, so that the reflecting surface of the plane mirror is perpendicular to the axis of motion.

[0027] As a further improvement of the present invention, step S3 further includes:

[0028] Step S31: Fix the laser head, place the slide rail target on the worktable, so that the light spot emitted by the laser head falls on the target, move the target back and forth along the guide rail slider, adjust the position of the guide rail slider until the position of the light spot is stable, so that the light emitted by the laser head is parallel to the guide rail slider.

[0029] Step S32: Align the square gauge with the guide rail slider and fix the square gauge;

[0030] Step S33: Fix the guide rail slider along the direction of the light emitted from the collimated component, with the slide rail target aligned with it.

[0031] Step S34: Use the magnetic base to change the target pose so that the light spot emitted by the collimated part falls on the target. The target moves back and forth along the guide rail slider to adjust the pose of the collimated part until the position of the light spot is stable, so that the measurement beam is parallel to the motion axis.

[0032] Step S35, repeat steps S33 and S34 to achieve collimation of all measurement beams.

[0033] Compared with the prior art, the advantages of the present invention are as follows:

[0034] This invention relates to a fixture and method for laser interferometer beam collimation. By setting up a universal debugging fixture, the collimation of all optical paths is completed, greatly reducing costs and improving the versatility and operability of the collimation method. It eliminates the need for designing dedicated debugging fixtures and avoids relying on an installation reference to establish the relative pose relationship between the workpiece stage and the measurement system, thus reducing the development difficulty of the workpiece stage. The conversion of the installation reference is achieved through a single universal debugging fixture, simplifying the structure while avoiding error accumulation and ensuring beam collimation accuracy. It changes the traditional contact-based reference transfer method, realizing spatial conversion of the installation reference and achieving the goal of non-destructive high-precision collimation of the plane mirror. Utilizing laser collimation and reference system conversion principles, the operation method is simple and easy to learn, requiring low knowledge and has a low barrier to entry, making it easy to promote. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the structural principle of the tooling for laser interferometer beam collimation in a specific embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of the arrangement of the intermediate mirror group in a specific embodiment of the present invention;

[0037] Figure 3 This is a schematic diagram of the laser head leveling process in a specific embodiment of the present invention;

[0038] Figure 4 This is a schematic diagram of the workpiece table leveling process in a specific embodiment of the present invention; where n is used to measure the number of leveling operations.

[0039] Figure 5 This is a schematic diagram of the plane mirror leveling process in a specific embodiment of the present invention;

[0040] Figure 6 This is a schematic diagram of the process for measuring beam collimation in a specific embodiment of the present invention;

[0041] Figure 7 This is a schematic diagram illustrating the principle of laser collimation and reference frame conversion in a specific embodiment of the present invention;

[0042] Figure 8 This is a schematic diagram illustrating the principle of adjusting the pose of a plane mirror using a beam splitter in a specific embodiment of the present invention;

[0043] Legend: 1. Worktable; 2. Laser head; 3. Beam splitter; 4. Interferometer assembly; 41. First interferometer; 42. Second interferometer; 43. Third interferometer; 5. Workpiece stage; 6. Plane mirror; 7. Vacuum cavity; 8. Laser; 9. Support foot; 10. Magnetic base; 11. Target; 12. Guide rail slider; 13. Square gauge; 14. Tripod; 151. First right-angle mirror; 152. Second right-angle mirror; 161. 33% beam splitter; 162. 50% beam splitter. Detailed Implementation

[0044] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0045] In the description of this invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more unless otherwise explicitly specified.

[0047] Example

[0048] like Figure 1 and Figure 2 As shown, the fixture for laser interferometer beam collimation of the present invention includes: a worktable 1, a workpiece stage 5, a vacuum cavity 7, a laser interferometry measuring device, and an adjustment device. The worktable 1 is made of marble, possessing good flatness for easy leveling. The vacuum cavity 7 is mounted on the worktable 1, the workpiece stage 5 is disposed within the vacuum cavity 7, and the laser interferometry measuring device is fixedly mounted on the worktable 1 for measuring the displacement of the workpiece stage 5 within the vacuum cavity 7. The adjustment fixture is movably mounted on the worktable 1 for optical path collimation. In this embodiment, the relative position of the laser interferometry measuring device is fixed, while the relative position of the adjustment device is not fixed.

[0049] like Figure 1 and Figure 2 As shown, the laser interferometry apparatus includes an interferometer assembly 4, a plane mirror 6, a laser 8, a first right-angle mirror 151, a second right-angle mirror 152, a 33% beam splitter 161, and a 50% beam splitter 162. The interferometer assembly 4 includes a first interferometer 41, a second interferometer 42, and a third interferometer 43. The laser 8 is disposed outside the vacuum chamber 7; the workpiece stage 5 is provided with orthogonally distributed plane mirrors 6 on both sides, the plane mirrors 6 being perpendicular or parallel to the motion axis of the workpiece stage 5, and the measurement beam being perpendicular to the plane mirrors 6; the first interferometer 41, the second interferometer 42, and the third interferometer 43 are disposed on both sides of the vacuum chamber 7 in an orthogonal direction, and the second interferometer 42 and the third interferometer 43 are located on the same side of the vacuum chamber 7. The first right-angle reflector 151, the second right-angle reflector 152, the 33% beam splitter 161, and the 50% beam splitter 162 are arranged on the same side of the vacuum cavity 7. The first right-angle reflector 151, the 33% beam splitter 161, the 50% beam splitter 162, and the second interferometer 42 are arranged side-by-side in sequence. The second right-angle reflector 152 and the third interferometer 43 are arranged side-by-side. The laser 8 emits a beam, which passes through the first right-angle reflector 151 and enters the 33% beam splitter 161, where it is split into two beams. One beam is guided to the first interferometer 41, and the other beam is split into two beams by the 50% beam splitter 162. One beam is guided to the second interferometer 42, and the other beam is guided to the third interferometer 43 via the second right-angle reflector 152. The measurement light reflected by the interferometer assembly 4 is reflected back to the interferometer assembly 4 by the plane reflector 6, thereby measuring the displacement of the workpiece stage 5 along the optical path. Figure 1As shown, the debugging device includes a laser head 2, a beam splitter 3, a sliding target, and a square gauge 13. Further, the laser head 2 is mounted on a tripod 14 and located on the side of the worktable 1. The sliding target includes a magnetic base 10, a target 11, and a guide rail slider 12. Both the beam splitter 3 and the guide rail slider 12 are mounted on the worktable 1. The magnetic base 10 is slidably mounted on the guide rail slider 12, and the target 11 is detachably mounted on the magnetic base 10. The magnetic base 10 has a universal adjustment function to facilitate the adjustment of the target 11's position and orientation. Using the target 11 for beam spot observation is simple and intuitive. The guide rail slider 12 has good straightness to improve the accuracy of the target 11's movement. The square gauge 13 is mounted on the worktable 1 and located on the side of the guide rail slider 12. The square gauge 13 has good perpendicularity to facilitate beam collimation.

[0050] In this embodiment, support feet 9 are provided around the bottom of the workpiece stage 5 to adjust the height of the workpiece stage 5.

[0051] In this embodiment, the conversion of the installation reference is achieved by using only a general-purpose debugging optical device. The reference transfer chain is shortened, the system structure is simplified, and the introduction of errors is reduced, thus ensuring the installation accuracy. The installation reference is converted in a non-contact spatial manner, which makes it easy for the plane mirror to achieve non-destructive high-precision collimation, and finally establishes an accurate relative pose relationship between the laser head 2 and the workpiece stage 5.

[0052] In this embodiment, a laser interferometer beam collimation method based on the above-mentioned tooling is also provided, including the following steps:

[0053] Step S1: Adjust the workpiece stage 5 to be parallel to the worktable 1. For example... Figure 4 As shown, the specific leveling operation is as follows: Step S11, fix the slide rail target on the worktable 1 so that the light spot emitted by the laser head 2 falls on the target 11, move the target 11 back and forth along the guide rail slider 12, and adjust the position of the laser head 2 until the position of the light spot is stable, so that the light emitted from the laser head 2 is parallel to the worktable 1, as shown. Figure 3 As shown in the image.

[0054] Step S12: Place the workpiece stage 5 inside the vacuum chamber 7, place the vacuum chamber 7 on the worktable 1, fix the target 11 on the workpiece stage 5, and adjust the height of the laser head 2 so that the light spot emitted by the laser head 2 falls on the target 11.

[0055] Step S13: Move the target 11 back and forth along the X-axis of the workpiece stage 5. If the light spot moves up and down, adjust the height of the support foot at the bottom of the workpiece stage 5. If the light spot moves left and right, adjust the position of the laser head 2 until the position of the light spot is stable.

[0056] Step S14: Move the target 11 back and forth along the Y-axis of the workpiece stage 5. If the light spot moves up and down, adjust the height of the support foot 9 at the bottom of the workpiece stage 5. If the light spot moves left and right, adjust the position of the laser head 2 until the position of the light spot is stable.

[0057] Step S15, repeat steps S13 and S14 twice to make the workpiece stage 5 parallel to the worktable 1.

[0058] Step S2: Adjust the reflecting plane to be perpendicular to the axis of motion. For example... Figure 5 As shown, the specific operation process is as follows: Step S21: Place the plane mirror 6 on the workpiece stage 5, adjust the height of the laser head 2 so that the light spot falls on the plane mirror 6, and fix the laser head 2.

[0059] Step S22: Fix the beam splitter 3 between the laser head 2 and the plane mirror 6, place the sliding target on the worktable 1, and make the reference spot of the interferometer 4 fall on the target 11.

[0060] Step S23: Move the target 11 back and forth along the guide rail slider 12, adjust the position of the guide rail slider 12 to stabilize the position of the reference spot, and fix the guide rail target.

[0061] Step S24: Adjust the position and orientation of the plane mirror 6 until the distance between the reflected light spot and the reference light spot is stable, so that the reflecting surface of the plane mirror 6 is perpendicular to the axis of motion.

[0062] Step S3: Adjust the measuring beam to be parallel to the motion axis to complete the collimation of the measuring beam. For example... Figure 6 As shown, the specific operation process is as follows: Step S31: Fix the laser head 2, place the slide rail target on the worktable 1, so that the light spot emitted by the laser head 2 falls on the target 11, move the target 11 back and forth along the guide rail slider 12, adjust the position of the guide rail slider 12 until the position of the light spot is stable, so that the emitted light of the laser head 2 is parallel to the guide rail slider 12.

[0063] Step S32: Align the square gauge 13 with the guide rail slider 12 and fix the square gauge 13.

[0064] Step S33: Fix the guide rail slider 12 along the direction of the light emitted from the collimated component, with the slide rail target aligned with it. The collimated component can be either a laser or a beam splitter 3.

[0065] Step S34: Use the magnetic base 10 to change the position of the target 11 so that the light spot emitted by the collimated component falls on the target 11. The target 11 moves back and forth along the guide rail slider 12 to adjust the position of the collimated component until the position of the light spot is stable, so that the measurement beam is parallel to the motion axis.

[0066] Step S35, repeat steps S33 and S34 to achieve collimation of all measurement beams.

[0067] like Figure 7 As shown, in this embodiment, the principle of laser collimation and reference frame transformation is as follows:

[0068] A light beam propagates in a straight line. By capturing the position of the light spot, the object is guided along the beam. When the beam propagates along a solid line, the light spot moves vertically as the target moves. At this point, fixing the target and adjusting the orientation of the emitted light (or fixing the emitted light and adjusting the target's direction of movement) ensures that the light spot position does not change with the target's movement, thus making the beam parallel to the target's direction of movement. Since the light beam is not a concrete object, the target guide rail serves as an intermediate step to establish the relationship between the beam and other reference frames.

[0069] like Figure 8 As shown, in this embodiment, the principle of adjusting the pose of the plane mirror using a beam splitter is as follows:

[0070] A laser beam (incident light) propagates from bottom to top, and a beam splitter divides it into two. One beam is reflected by a cornerstone and exits from the right side of the beam splitter as a reference beam. The other beam is reflected by a plane mirror and exits from the right side of the beam splitter as a reflected beam (the direction of the reference beam is fixed once the beam splitter is fixed). When the plane mirror is at an angle of (90°-α) to the incident light, the reflected beam forms an angle of 2α with the reference beam. Both beams are captured by a target, and the distance between the beams changes with the target position. When the plane mirror is perpendicular to the incident light, the reference beam and the reflected beam are parallel, and both beams are captured by the target. The distance between the beams does not change with the target position.

[0071] In this embodiment, by setting up a universal debugging fixture, the collimation of all optical paths is completed, which greatly reduces costs and improves the versatility and operability of the collimation method. There is no need to design a special debugging fixture, nor is it necessary to rely on the installation reference to establish the relative pose relationship between the workpiece stage and the measurement system, thus reducing the development difficulty of the workpiece stage. The conversion of the installation reference is realized through a single universal debugging fixture, which simplifies the structure, avoids error accumulation, and ensures the accuracy of beam collimation. It changes the traditional contact-type reference transfer method, realizes the spatial conversion of the installation reference, and achieves the goal of non-destructive high-precision collimation of the plane mirror. Utilizing the laser collimation and reference system conversion principle, the operation method is simple and easy to learn, requires low knowledge and has a low threshold, and is easy to promote.

[0072] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments, without departing from the spirit and technical essence of the invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. A fixture suitable for beam collimation in a laser interferometer, characterized in that, include: The equipment includes a worktable (1), a workpiece stage (5), a vacuum chamber (7), a laser interferometry measuring device, and a debugging device. The vacuum chamber (7) is set on the worktable (1), the workpiece stage (5) is set inside the vacuum chamber (7), and the laser interferometry measuring device is fixedly set on the worktable (1) for displacement measurement of the workpiece stage (5) inside the vacuum chamber (7). The debugging device is movably set on the worktable (1) for optical path collimation. The laser interferometric measurement device includes an interferometer assembly (4), a plane mirror (6), a laser (8), a first right-angle mirror (151), a second right-angle mirror (152), a 33% beam splitter (161), and a 50% beam splitter (162). The interferometer assembly (4) includes a first interferometer (41), a second interferometer (42), and a third interferometer (43). The laser (8) is located outside the vacuum cavity (7). The workpiece stage (5) is provided with orthogonally distributed plane mirrors (6) on both sides. The first interferometer (41), the second interferometer (42), and the third interferometer (43) are arranged orthogonally on both sides of the vacuum cavity (7), and the second interferometer (42) and the third interferometer (43) are located on the same side of the vacuum cavity (7). The first right-angle mirror (151), the second right-angle mirror (152), the 33% beam splitter (161), and the 50% beam splitter (162) are all located on the same side of the vacuum cavity (7). 61) and 50% beam splitter (162) are set on the same side of vacuum cavity (7). The first right-angle mirror (151), 33% beam splitter (161), 50% beam splitter (162) and second interferometer (42) are arranged side by side in sequence. The second right-angle mirror (152) and third interferometer (43) are arranged side by side. The laser (8) emits a beam, which is transmitted to the 33% beam splitter (161) through the first right-angle mirror (151) and split into two beams. One beam is introduced into the first interferometer (41), and the other beam is split into two beams through the 50% beam splitter (162). One beam is introduced into the second interferometer (42), and the other beam is introduced into the third interferometer (43) through the second right-angle mirror (152). The interferometer assembly (4) reflects the measurement light, which is reflected back to the interferometer assembly (4) by the plane mirror (6), and then the displacement of the workpiece stage (5) along the optical path is measured. The plane mirror (6) is perpendicular or parallel to the motion axis of the workpiece stage (5), and the measuring beam is perpendicular to the plane mirror (6). The debugging device includes a laser head (2), a beam splitter (3), a sliding target, and a square gauge (13); the laser head (2) is mounted on a tripod (14) and located on the side of the workbench (1); the sliding target includes a magnetic base (10), a target (11), and a guide rail slider (12); the beam splitter (3) and the guide rail slider (12) are both set on the workbench (1); the magnetic base (10) is slidably set on the guide rail slider (12); the target (11) is detachably set on the magnetic base (10); and the square gauge (13) is set on the workbench (1).

2. The fixture for laser interferometer beam collimation according to claim 1, characterized in that, The workpiece stage (5) is provided with support feet (9) around its bottom to adjust the height of the workpiece stage (5).

3. The fixture for laser interferometer beam collimation according to claim 1, characterized in that, The workbench (1) is made of marble.

4. A laser interferometer beam collimation method based on the tooling described in any one of claims 1 to 3, characterized in that, Includes the following steps: Step S1: Adjust the workpiece stage (5) to be parallel to the worktable (1); Step S2: Adjust the reflecting plane to be perpendicular to the motion axis; Step S3: Adjust the measurement beam to be parallel to the motion axis to complete the collimation of the measurement beam.

5. The laser interferometer beam collimation method according to claim 4, characterized in that, Step S1 further includes: Step S11: Fix the slide rail target on the worktable (1) so that the light spot emitted by the laser head (2) falls on the target (11). Move the target (11) back and forth along the guide rail slider (12) and adjust the position of the laser head (2) until the position of the light spot is stable, so that the light emitted by the laser head (2) is parallel to the worktable (1). Step S12: Place the workpiece stage (5) inside the vacuum chamber (7), place the vacuum chamber (7) on the worktable (1), fix the target (11) on the workpiece stage (5), adjust the height of the laser head (2) so that the light spot emitted by the laser head (2) falls on the target (11); Step S13: Move the target (11) back and forth along the X-axis of the workpiece stage (5). If the spot moves up and down, adjust the height of the support foot (9) at the bottom of the workpiece stage (5). If the spot moves left and right, adjust the position of the laser head (2) until the spot position is stable. Step S14: Move the target (11) back and forth along the Y-axis of the workpiece stage (5). If the spot moves up and down, adjust the height of the support foot (9) at the bottom of the workpiece stage (5). If the spot moves left and right, adjust the position of the laser head (2) until the spot position is stable. Step S15, repeat steps S13 and S14 to achieve parallelism between the workpiece stage (5) and the worktable (1).

6. The laser interferometer beam collimation method according to claim 5, characterized in that, Step S2 further includes: Step S21: Place the plane mirror (6) on the workpiece stage (5), adjust the height of the laser head (2) so that the light spot falls on the plane mirror (6), and fix the laser head (2). Step S22: Fix the beam splitter (3) between the laser head (2) and the plane mirror (6), place the sliding target on the worktable (1), and make the reference spot of the interferometer assembly (4) fall on the target (11); Step S23: Move the target (11) back and forth along the guide rail slider (12), adjust the position of the guide rail slider (12) to stabilize the position of the reference spot, and fix the guide rail target. Step S24: Adjust the position of the plane mirror (6) until the distance between the reflected spot and the reference spot is stable, so that the reflecting surface of the plane mirror (6) is perpendicular to the axis of motion.

7. The laser interferometer beam collimation method according to claim 6, characterized in that, Step S3 further includes: Step S31: Fix the laser head (2), place the slide rail target on the worktable (1), so that the light spot emitted by the laser head (2) falls on the target (11), move the target (11) back and forth along the guide rail slider (12), adjust the position of the guide rail slider (12) until the position of the light spot is stable, so that the emitted light of the laser head (2) is parallel to the guide rail slider (12). Step S32: Align the square gauge (13) with the guide rail slider (12) and fix the square gauge (13). Step S33: Fix the guide rail slider (12) along the direction of the light emitted from the collimated component by positioning the slide rail target. Step S34: Use the magnetic base (10) to change the position of the target (11) so that the light spot emitted by the collimated component falls on the target (11). The target (11) moves back and forth along the guide rail slider (12) to adjust the position of the collimated component until the position of the light spot is stable, so that the measurement beam is parallel to the motion axis. Step S35, repeat steps S33 and S34 to achieve collimation of all measurement beams.

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