Quartz gyroscope

Abstract

The present invention provides a quartz gyroscope, which comprises: a quartz tuning fork, a cover plate and a base; wherein the inner surface of the cover plate is provided with a raised isolation structure, the base comprises a containing space, the quartz tuning fork is fixed in the containing space, the cover plate is placed on the containing space, the raised isolation structure is located in a gap between a driving electrode and a detection electrode of the quartz tuning fork, and does not contact the quartz tuning fork; the electrostatic coupling error elimination effect can be improved, and the gyroscope accuracy can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a quartz gyroscope. Background Art

[0002] There is parasitic capacitance between the quartz gyroscope drive signal and the detection electrode (including leads and traces), which causes the drive signal to be directly coupled to the detection preamplifier through the parasitic capacitance to generate output, thereby generating electrostatic coupling error.

[0003] In the related art, the electrostatic coupling error introduced by the distributed capacitance between the quartz gyroscope driving electrode and the detection electrode is eliminated as much as possible by designing a compensation circuit. However, the compensation range and compensation accuracy of the circuit are limited, which affects the device performance. Summary of the invention

[0004] 1. Technical issues to be resolved The present invention provides a quartz gyroscope, which is used to solve the defect of poor electrostatic coupling error elimination effect in the prior art and improve the electrostatic coupling error elimination effect.

[0005] (II) Technical solution The present invention provides a quartz gyroscope, characterized in that it comprises: a quartz tuning fork, a cover plate and a base; Among them, the inner surface of the cover plate is provided with a raised isolation structure, the base includes a accommodating space, the quartz tuning fork is fixed in the accommodating space, the cover plate is placed on the accommodating space, and the raised isolation structure is located in the gap between the driving electrode and the detection electrode of the quartz tuning fork and does not contact the quartz tuning fork.

[0006] In some embodiments, a raised fixing platform is present on the inner bottom surface of the accommodating space, and the fixing area on the lower surface of the quartz tuning fork is connected and fixed to the raised fixing platform by bonding.

[0007] In some embodiments, the vertical distance between the upper surface of the quartz tuning fork and the inner surface of the cover is H1, the protrusion height of the isolation structure is H2, H1 is greater than H2, and the difference between H1 and H2 is greater than a preset distance difference.

[0008] In some embodiments, the preset distance difference ranges from 60um to 200um.

[0009] In some embodiments, four test pins are arranged in the accommodating cavity, a pair of driving electrodes of the quartz tuning fork are arranged correspondingly at a first pair of lead points on the surface of the fixed area, a detection electrode and a ground electrode of the quartz tuning fork are arranged correspondingly at a second pair of lead points on the surface of the fixed area, and the first pair of lead points and the second pair of lead points are connected one-to-one to the four test pins through gold wire bonding.

[0010] In some embodiments, the isolation structure is a strip-shaped protrusion, the long side of which is parallel to the straight line where the driving electrode and the detection electrode are located; the width of the strip-shaped protrusion is S1, and the width of the fixed area on the lower surface of the quartz tuning fork is S2, wherein S2 is greater than S1.

[0011] In some embodiments, S1 is greater than or equal to a preset width threshold.

[0012] In some embodiments, the preset width threshold is 5 um.

[0013] In some embodiments, the length of the long side of the isolation structure is smaller than the length of the interior of the accommodating space.

[0014] In some embodiments, the cover plate, the isolation structure and the base are made of the same material.

[0015] (III) Beneficial effects The inner surface of the cover plate of the quartz gyroscope provided by the present invention is provided with a raised isolation structure, and the raised isolation structure is located in the gap between the driving electrode and the detection electrode of the quartz tuning fork, thereby reducing the parasitic capacitance generated between the two, solving the defect of poor electrostatic coupling error elimination effect in the prior art, improving the electrostatic coupling error elimination effect, and improving the gyroscope accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a quartz gyroscope provided by the present invention; Figure 2 It is a structural schematic diagram of the cover plate provided by the present invention; Figure 3 It is a structural schematic diagram of the base provided by the present invention; Figure 4 It is a schematic diagram of the assembly of various structures of the quartz gyroscope provided by the present invention; Figure 5 This is one of the structural schematic diagrams of the quartz tuning fork provided by the present invention; Figure 6 This is the second structural schematic diagram of the quartz tuning fork provided by the present invention; Figure 7 is a perspective view of the quartz gyroscope provided by the present invention after being assembled; Figure 8 The figure is a side view of the quartz gyroscope provided by the present invention after being assembled.

[0017] Description of reference numerals: 1: quartz tuning fork; 2: cover plate; 3: base; 4: lower surface of the fixing area of ​​the quartz tuning fork; 5: isolation structure. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0020] Figure 1 Schematic diagram of the structure of the quartz gyroscope provided by the present invention, such as Figure 1 As shown, the quartz gyroscope comprises: a quartz tuning fork 1, a cover plate 2 and a base 3; Figure 2 Schematic diagram of the structure of the cover plate provided by the present invention, such as Figure 2 As shown, the inner surface of the cover plate is provided with a raised isolation structure; Figure 5 1 is one of the structural schematic diagrams of the quartz tuning fork provided by the present invention, such as Figure 5 As shown, the quartz tuning fork structure includes a driving fork finger, a detecting fork finger, a driving end hammer, a detecting end hammer, a fixing area, a coupling beam, a driving beam, a detecting beam, etc.; Figure 6 This is the second structural schematic diagram of the quartz tuning fork provided by the present invention, such as Figure 6 As shown, the two driving beams are arranged with driving electrodes (driving ends), which have two lead-out points (a first pair of lead-out points) on the upper surface of the fixed area; the two detecting beams are arranged with detecting electrodes (detecting ends) and ground electrodes (grounding ends), and the two electrodes are respectively arranged with a lead-out point (a second pair of lead-out points) on the upper surface of the fixed area; the above four lead-out points are connected to the test pins of the base by gold wire bonding, so as to lead out the signal.

[0021] Figure 3 It is a structural schematic diagram of the base provided by the present invention, such as Figure 3 As shown, the base includes a receiving space; four test pins are arranged in the receiving cavity, and the first pair of lead points and the second pair of lead points are connected to the four test pins one by one through gold wire bonding.

[0022] Figure 4 Schematic diagram of the assembly of the various structures of the quartz gyroscope provided by the present invention, such as Figure 4 As shown, the quartz tuning fork is fixed in the accommodation space, and the cover plate is placed on the accommodation space. Figure 7 is a perspective view of the quartz gyroscope provided by the present invention after being assembled. Figure 8 FIG. 1 is a side view of the assembled quartz gyroscope provided by the present invention. Figure 7 and Figure 8 As shown, the raised isolation structure is located in the gap between the driving electrode and the detection electrode of the quartz tuning fork and does not contact the quartz tuning fork. Figure 6 The rectangle between the driving end and the detecting end shown is the projection position corresponding to the isolation structure.

[0023] In some embodiments, Figure 3 As shown, there is a raised fixing platform on the inner bottom surface of the accommodating space, and the fixing area on the lower surface of the quartz tuning fork is connected and fixed to the raised fixing platform by bonding.

[0024] In some embodiments, the base and the cover are interconnected by welding.

[0025] The present invention arranges an isolation structure on the cover plate to isolate the driving electrode and the detection electrode, thereby reducing the parasitic capacitance generated between the two, thereby effectively reducing the electrostatic coupling error of the quartz gyroscope and improving the precision of the gyroscope.

[0026] In some embodiments, the vertical distance between the upper surface of the quartz tuning fork and the inner surface of the cover is H1, the protrusion height of the isolation structure is H2, H1 is greater than H2, and the difference between H1 and H2 is greater than a preset distance difference.

[0027] In some embodiments, the preset distance difference ranges from 60 um to 200 um.

[0028] In some embodiments, the isolation structure is a strip-shaped protrusion, the long side of which is parallel to the straight line where the driving electrode and the detection electrode are located; the width of the strip-shaped protrusion is S1, and the width of the fixed area on the lower surface of the quartz tuning fork is S2, wherein S2 is greater than S1.

[0029] In some embodiments, S1 is greater than or equal to a preset width threshold.

[0030] In some embodiments, the preset width threshold is 5 um.

[0031] In some embodiments, the length of the long side of the isolation structure is smaller than the length of the interior of the accommodating space.

[0032] by Figure 1For example, the quartz gyroscope structure includes: a quartz tuning fork 1, a cover plate 2, and a base 3, wherein the lower surface 4 of the fixed area of ​​the quartz tuning fork is connected to the base by bonding, and the cover plate is connected to the base by sealing welding. The isolation structure 5 on the cover plate does not contact the upper surface of the tuning fork, the height between the upper surface of the tuning fork and the inner surface of the cover plate is set to H1, and the height of the cover plate isolation structure is set to H2, wherein H1-H2≥100um, so as to ensure that the tuning fork vibration is not affected, and installation errors are allowed, the width of the isolation structure on the cover plate is set to S1, the width of the quartz tuning fork fixed area is set to S2, and the width of the electrode lead-out point is set to S3, wherein 5um≤S1≤S2-S3, leaving enough space for the gold wire bonding of the four electrode lead-out points of the tuning fork. The length of the long side of the isolation structure is less than the internal length of the base, and the short side of the isolation structure is shorter than the gap width between the driving electrode and the detection electrode, reserving installation space.

[0033] In some embodiments, the cover plate, the isolation structure and the base are made of the same material, which can reduce the impact of mismatched thermal expansion coefficients between multiple materials.

[0034] For example, the cover plate, the isolation structure and the base may all be made of Kovar alloy.

[0035] The inner surface of the cover plate of the quartz gyroscope provided by the present invention is provided with a raised isolation structure, and the raised isolation structure is located in the gap between the driving electrode and the detection electrode of the quartz tuning fork, thereby reducing the parasitic capacitance generated between the two, solving the defect of poor electrostatic coupling error elimination effect in the prior art, and improving the electrostatic coupling error elimination effect.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A quartz gyroscope, characterized in that: include: quartz tuning forks, covers and bases; Among them, the inner surface of the cover plate is provided with a raised isolation structure, the base includes a accommodating space, the quartz tuning fork is fixed in the accommodating space, the cover plate is placed on the accommodating space, and the raised isolation structure is located in the gap between the driving electrode and the detection electrode of the quartz tuning fork and does not contact the quartz tuning fork.

2. The quartz gyroscope according to claim 1, characterized in that: A raised fixing platform is provided on the inner bottom surface of the accommodation space, and the fixing area on the lower surface of the quartz tuning fork is connected and fixed to the raised fixing platform by bonding.

3. The quartz gyroscope according to claim 2, characterized in that: The vertical distance between the upper surface of the quartz tuning fork and the inner surface of the cover plate is H1, the protrusion height of the isolation structure is H2, H1 is greater than H2, and the difference between H1 and H2 is greater than the preset distance difference.

4. The quartz gyroscope according to claim 3, characterized in that: The preset distance difference has a value range of 60um to 200um.

5. The quartz gyroscope according to claim 2, characterized in that: Four test pins are arranged in the accommodating cavity, a pair of driving electrodes of the quartz tuning fork are arranged on the surface of the fixed area corresponding to a first pair of lead points, a detection electrode and a ground electrode of the quartz tuning fork are arranged on the surface of the fixed area corresponding to a second pair of lead points, and the first pair of lead points and the second pair of lead points are connected to the four test pins one by one through gold wire bonding.

6. The quartz gyroscope according to claim 5, characterized in that: The isolation structure is a strip-shaped protrusion, the long side of which is parallel to the straight line where the driving electrode and the detection electrode are located; the width of the strip-shaped protrusion is S1, and the width of the fixed area on the lower surface of the quartz tuning fork is S2, wherein S2 is greater than S1.

7. The quartz gyroscope according to claim 6, characterized in that: S1 is greater than or equal to a preset width threshold.

8. The quartz gyroscope according to claim 7, characterized in that: The preset width threshold is 5um.

9. The quartz gyroscope according to claim 6, characterized in that: The length of the long side of the isolation structure is smaller than the length of the interior of the accommodation space.

10. The quartz gyroscope according to any one of claims 1 to 9, characterized in that: The cover plate, the isolation structure and the base are made of the same material.

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