Hemispherical resonant gyroscope

Abstract

The invention provides a hemispherical resonator gyroscope which comprises a hemispherical resonator, a driving electric substrate and a detection electric substrate, the hemispherical resonator is of a hemispherical structure, the driving electric substrate is of a flat plate type structure, and the detection electric substrate is of an inner spherical surface structure. A first conductive film layer is arranged on the inner surface of the hemispherical harmonic oscillator, a second conductive film layer is arranged on the end face of the lip edge, the detection electric substrate is provided with a detection electrode, and the driving electric substrate is provided with a potential electrode and a driving electrode. The detection electrode and the first conductive film layer form a detection capacitor, and the driving electrode and the second conductive film layer form a driving capacitor. The detection electrode and the driving electrode are separately arranged, so that the coupling of the driving signal and the detection signal can be reduced. The detection electric substrate is of an inner spherical surface structure, so that the area of a detection capacitor formed by the detection electrode and the first conductive film layer can be increased, and the intensity of a detection signal is improved. The driving electric substrate is of a flat plate type structure, and the potential electrode and the driving electrode are arranged on the driving electric substrate, so that the processing and assembling difficulty can be reduced.

Description

Technical Field

[0001] The present application relates to the technical field of gyroscopes, and in particular to a hemispherical resonant gyroscope. Background Art

[0002] The hemispherical resonant gyroscope is a vibrating gyroscope that uses the precession of the vibration standing wave of the hemispherical resonant structure along the circumferential direction to measure the rotation of the shell. It has the advantages of few parts, low power consumption, small size, low cost and long life.

[0003] When the hemispherical resonant gyroscope is working, it is necessary to apply a driving signal through the excitation electrode and obtain a vibration signal through the detection electrode. In the related art, the hemispherical resonant gyroscope has the problem of coupling between the driving signal and the detection signal, and the detection signal strength is low, which reduces the signal-to-noise ratio of the hemispherical resonant gyroscope and causes the detection accuracy of the hemispherical resonant gyroscope to decrease. Summary of the invention

[0004] The present application provides a hemispherical resonant gyroscope to solve at least some of the problems in the related art.

[0005] The hemispherical resonant gyroscope provided by the present application comprises:

[0006] A hemispherical resonator is a hemispherical structure, comprising an inner surface, an outer surface and a lip end surface connected between the inner and outer surfaces, wherein the inner surface is provided with a first conductive film layer, and the lip end surface is provided with a second conductive film layer;

[0007] The driving mechanism comprises a driving electric substrate, which is a flat plate structure and is located on a side of the hemispherical resonator close to the lip end surface. A potential electrode and a driving electrode are arranged on the side of the driving electric substrate facing the hemispherical resonator. The potential electrode is electrically connected to both the first conductive film layer and the second conductive film layer. The driving electrode and the second conductive film layer form a driving capacitor for driving the hemispherical resonator to vibrate.

[0008] The detection mechanism includes a detection electric substrate, which is located in the hemispherical resonator and is arranged close to the driving electric substrate. The detection electric substrate is an inner spherical structure. The detection electric substrate is provided with a detection electrode. The detection electrode and the first conductive film layer form a detection capacitor for detecting the vibration of the hemispherical resonator.

[0009] Optionally, the driving electrical substrate is provided with a connecting electrode, the connecting electrode is electrically connected to the detection electrode, and the potential electrode, the connecting electrode and the driving electrode are respectively connected to the other side of the driving electrical substrate by way of conductive vias.

[0010] Optionally, the hemispherical resonator includes a hemispherical shell and a support column arranged in the hemispherical shell, the hemispherical shell includes the inner surface, the outer surface and the lip edge end surface, the inner surface is provided with the first conductive film layer, the outer surface of the support column is provided with a third conductive film layer, and the first conductive film layer, the second conductive film layer and the third conductive film layer are electrically connected;

[0011] The position of the support column is set corresponding to the position of the potential electrode, and the third conductive film layer is connected to the potential electrode to provide the first conductive film layer and the second conductive film layer with the same potential.

[0012] Optionally, the detection electrical substrate is provided with a through hole, the position of the through hole is arranged corresponding to the position of the support column, and the support column is inserted and fixed in the through hole; and / or

[0013] The outer wall of the hemispherical shell near the lip end surface is provided with a fourth conductive film layer, and the fourth conductive film layer is electrically connected to the second conductive film layer.

[0014] Optionally, the potential electrode is a high voltage electrode; and / or

[0015] The hemispherical resonator, the driving electric substrate and the detecting electric substrate are made of the same material; and / or

[0016] The hemispherical resonator, the driving electric substrate and the detecting electric substrate are all made of fused quartz;

[0017] Optionally, the number of the driving electrodes is 8n, the number of the detecting electrodes is 8n, the number of the connecting electrodes is 8n, and the number of the driving electrodes, the number of the detecting electrodes, and the number of the connecting electrodes are the same;

[0018] The plurality of driving electrodes are distributed in a circular shape on the side of the driving electrical substrate facing the hemispherical resonator, the plurality of detecting electrodes are distributed in a circular shape on the side edge of the detecting electrical substrate facing the inner wall of the hemispherical resonator, and the plurality of connecting electrodes are distributed in a circular shape on the side of the driving electrical substrate facing the hemispherical resonator.

[0019] Optionally, the potential electrode is located at the center of a side of the driving electrical substrate facing the hemispherical resonator; and the connecting electrode is located between the potential electrode and the driving electrode.

[0020] Optionally, a first shielding electrode is arranged between the multiple driving electrodes, a second shielding electrode is arranged between the multiple connecting electrodes, a third shielding electrode is arranged between the driving electrode and the connecting electrode, and the first shielding electrode and the second shielding electrode are electrically connected through the third shielding electrode; a fourth shielding electrode is arranged between the multiple detection electrodes; the second shielding electrode and the fourth shielding electrode are electrically connected; the first shielding electrode and the second shielding electrode are respectively connected to a side of the driving electrical substrate away from the hemispherical resonator through conductive vias.

[0021] Optionally, the detection electrode includes a first detection electrode and a second detection electrode, the first detection electrode is located on the outer wall of the detection electrical substrate, and forms a detection capacitor with the first conductive film layer; the second detection electrode is located on the side of the detection electrical substrate facing the driving electrical substrate, and the second detection electrode is electrically connected to the first detection electrode and the connecting electrode.

[0022] Optionally, a side of the detection electric substrate facing the driving electric substrate is provided with an annular step, and the annular step extends from a side of the driving electric substrate close to the hemispherical resonator to a side away from the hemispherical resonator;

[0023] The detection electrode further includes a third detection electrode, which is disposed on the surface of the annular step and is electrically connected to both the first detection electrode and the second detection electrode.

[0024] The hemispherical resonator gyroscope provided by the present application includes a hemispherical resonator, a driving mechanism and a detection mechanism, wherein the driving mechanism includes a driving electric substrate, and the detection mechanism includes a detection electric substrate. The hemispherical resonator is a hemispherical structure, the driving electric substrate is a flat structure, and the detection electric substrate is an inner spherical structure. A first conductive film layer is arranged on the inner surface of the hemispherical resonator, and a second conductive film layer is arranged on the lip end surface, the detection electric substrate is provided with a detection electrode, and the driving electric substrate is provided with a potential electrode and a driving electrode. The detection electrode and the first conductive film layer form a detection capacitor. The driving electrode and the second conductive film layer form a driving capacitor.

[0025] Compared with the related art, by setting the driving electrode on the driving electric substrate and setting the detection electrode on the detection electric substrate, the detection electrode and the driving electrode can be separated and set, so that the coupling of the driving signal and the detection signal can be reduced. By making the detection electric substrate an inner spherical structure, and forming a detection capacitor with the first conductive film layer set on the inner surface of the detection electrode and the hemispherical resonator, the area of ​​the detection capacitor can be increased, the intensity of the detection signal can be enhanced, and the signal-to-noise ratio of the hemispherical resonator gyroscope can be improved. By making the driving electric substrate a flat plate structure, and providing the potential electrode and the driving electrode on the driving electric substrate, compared with setting a three-dimensional electrode, the difficulty of processing and assembly can be reduced, thereby reducing the assembly defect rate and improving the quality of the hemispherical resonator. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0027] Figure 1 The figure is a schematic diagram of the structure of a hemispherical resonant gyroscope in the related art.

[0028] Figure 2 The figure is a schematic diagram of the structure of another hemispherical resonant gyroscope in the related art.

[0029] Figure 3 It is a schematic diagram of the structure of another hemispherical resonant gyroscope in the related art.

[0030] Figure 4 A three-dimensional schematic diagram of a hemispherical resonant gyroscope provided in accordance with an embodiment of the present application.

[0031] Figure 5 for Figure 4 An exploded schematic diagram of a hemispherical resonant gyroscope is shown.

[0032] Figure 6 for Figure 4 The cross-sectional view of the hemispherical resonator gyroscope along the AA direction is shown.

[0033] Figure 7 for Figure 4 A schematic structural diagram of an implementation of a driving mechanism in a hemispherical resonant gyroscope is shown.

[0034] Figure 8 for Figure 4 A structural schematic diagram of an implementation of a detection mechanism in a hemispherical resonant gyroscope is shown.

[0035] Fig. 9 for Figure 4 A schematic structural diagram of another embodiment of a driving mechanism in a hemispherical resonant gyroscope is shown.

[0036] Fig.10 for Figure 4 Schematic diagram of the structure of the conductive hole in the driving mechanism of the hemispherical resonant gyroscope shown.

[0037] Fig.11 for Figure 4 A schematic structural diagram of another implementation of a detection mechanism in a hemispherical resonant gyroscope is shown.

[0038] Figure numerals: hemispherical resonator gyroscope 1, hemispherical resonator 10, inner surface 11, first conductive film layer 101, outer surface 12, lip end surface 13, second conductive film layer 102, hemispherical shell 14, support column 15, third conductive film layer 103, fourth conductive film layer 104, driving mechanism 20, driving electrical substrate 21, potential electrode 22, driving electrode 23, connecting electrode 24, conductive hole 25, first conductive hole 251, second conductive hole 252, third conductive hole 253, fourth conductive hole 254, fifth conductive hole 255, first shielding electrode 26, second shielding electrode 27, fourth shielding electrode 28, detection mechanism 30, detection electrical substrate 31, detection electrode 32, through hole 33, fourth shielding electrode 34, first detection electrode 321, second detection electrode 322, annular step 35, third detection electrode 323. DETAILED DESCRIPTION

[0039] The present application provides a hemispherical resonant gyroscope. The hemispherical resonant gyroscope of the present application is described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments and implementations can be combined with each other.

[0040] The embodiment of the present application provides a hemispherical resonant gyroscope, comprising:

[0041] The hemispherical resonator is a hemispherical structure, comprising an inner surface, an outer surface and a lip end surface connected between the inner and outer surfaces, the inner surface is provided with a first conductive film layer, and the lip end surface is provided with a second conductive film layer.

[0042] The driving mechanism includes a driving electric substrate, which is a flat plate structure and is located on the side of the hemispherical resonator close to the lip end face. A potential electrode and a driving electrode are provided on the side of the driving electric substrate facing the hemispherical resonator. The potential electrode is electrically connected to the first conductive film layer and the second conductive film layer. The driving electrode and the second conductive film layer form a driving capacitor for driving the hemispherical resonator to vibrate.

[0043] The detection mechanism includes a detection electric substrate, which is located in the hemispherical resonator and close to the driving electric substrate. The detection electric substrate is an inner spherical structure. The detection electric substrate is provided with a detection electrode. The detection electrode and the first conductive film layer form a detection capacitor for detecting the vibration of the hemispherical resonator.

[0044] The hemispherical resonator gyroscope provided by the present application includes a hemispherical resonator, a driving mechanism and a detection mechanism, wherein the driving mechanism includes a driving electric substrate, and the detection mechanism includes a detection electric substrate. The hemispherical resonator is a hemispherical structure, the driving electric substrate is a flat structure, and the detection electric substrate is an inner spherical structure. A first conductive film layer is provided on the inner surface of the hemispherical resonator, and a second conductive film layer is provided on the lip end surface. The detection electric substrate is provided with a detection electrode, and the driving electric substrate is provided with a potential electrode and a driving electrode. The detection electrode and the first conductive film layer form a detection capacitor. The driving electrode and the second conductive film layer form a driving capacitor.

[0045] Compared with the related art, by setting the driving electrode on the driving electric substrate and setting the detection electrode on the detection electric substrate, the detection electrode and the driving electrode can be separated and set, so that the coupling of the driving signal and the detection signal can be reduced. By making the detection electric substrate an inner spherical structure, and forming a detection capacitor with the first conductive film layer set on the inner surface of the detection electrode and the hemispherical resonator, the area of ​​the detection capacitor can be increased, the intensity of the detection signal can be enhanced, and the signal-to-noise ratio of the hemispherical resonator gyroscope can be improved. By making the driving electric substrate a flat plate structure, and providing the potential electrode and the driving electrode on the driving electric substrate, compared with setting a three-dimensional electrode, the difficulty of processing and assembly can be reduced, thereby reducing the assembly defect rate and improving the quality of the hemispherical resonator.

[0046] Please refer to Figures 1 to 3 , Figure 1 The figure is a schematic diagram of the structure of a hemispherical resonant gyroscope in the related art. Figure 2 The figure is a schematic diagram of the structure of another hemispherical resonant gyroscope in the related art. Figure 3 It is a schematic diagram of the structure of another hemispherical resonant gyroscope in the related art.

[0047] exist Figure 1 In the related art shown, the hemispherical resonator gyroscope includes three parts: a hemispherical resonator A1, an excitation cover A2 and a sensitive base A3. The hemispherical resonator A1 is a hemispherical thin shell with a central support rod, including a hemispherical structure A1-2 and a support rod A1-1.

[0048] The excitation cover A2 is mainly composed of excitation electrodes, which are divided into discrete excitation electrodes A2-1 and annular excitation electrodes A2-2. The discrete excitation electrode A2-1 is used to excite the resonator vibration and perform error correction, and the annular electrode A2-2 is used for parameter excitation. The working gap between the hemispherical resonator A1 and the excitation cover A2 is generally hundreds of microns.

[0049] The sensitive base A3 is composed of 8 spherical signal detection electrodes A3-1, which are used to detect the vibration signal of the hemispherical resonator and obtain the rotation angle signal and the error signal required for control through demodulation. The working gap between the hemispherical resonator A1 and the sensitive base A3 is generally hundreds of microns.

[0050] By nesting multiple groups of electrodes, including discrete excitation electrodes A2-1, annular excitation electrodes A2-2, and signal detection electrodes A3-1, independent operation of electrodes with different functions is achieved, thereby allowing isolation of the drive signal from the detection signal in terms of mechanical structure and reducing the coupling between the drive signal and the detection signal. However, this solution requires extremely high assembly accuracy, especially coaxiality, and involves complex assembly lines, which brings difficulties to production and assembly.

[0051] exist Figure 2 In the related technology shown, the main components of the hemispherical resonator gyroscope are reduced to two, including the hemispherical resonator B1 and the electrode base B2. The electrode base B1 only retains the inner spherical electrode B2-1, and the eight inner spherical electrodes are used in conjunction with the circuit design to realize the electrical functions of driving, detection, and error correction.

[0052] Figure 2 In the related art shown in the figure, a single three-dimensional electrode, that is, a spherical electrode, is used, which is difficult to assemble. Figure 1 The hemispherical resonant gyroscope shown in the figure has been reduced, but because the number of electrodes is reduced, the same electrode needs to realize multiple functions of driving and detecting at the same time, which inevitably reduces the number of driving and detecting electrodes, reducing the gyroscope signal-to-noise ratio.

[0053] Since the driving and detection electrodes are directly adjacent to each other, electrical signal coupling is easily caused between the electrodes. It is also necessary to avoid the coupling of the driving signal and the detection signal by means of electrode frequency division multiplexing (the output signal of the detection electrode is the resonant frequency, and the excitation signal of the driving electrode is the doubled or divided frequency signal of the resonant frequency) or time division multiplexing (the same electrode acts as a driving electrode or a detection electrode at different working times).

[0054] exist Figure 3 In the related technology shown, the hemispherical resonator gyroscope mainly includes two parts: a hemispherical resonator C1 and an electrode base C2. The electrode base C2 is in the form of a planar electrode, and an electrode C2-1 is arranged on the flat electrode. The simplified structure greatly reduces the manufacturing and assembly costs. However, there is still the problem of easy coupling of driving and detection signals. In addition, the effective area of ​​the capacitor in this scheme is greatly reduced due to the influence of the wall thickness of the hemispherical resonator, which greatly reduces the strength of the detection signal, which is very unfavorable to improving the gyro signal-to-noise ratio.

[0055] In order to solve the problems of great assembly difficulty, coupling of drive signal and detection signal, low detection signal strength, etc. existing in the related art of hemispherical resonant gyroscope, the present application provides a hemispherical resonant gyroscope, which solves the electrical signal coupling problem existing in the current hemispherical resonant gyroscope without increasing the difficulty of assembly and circuit design; at the same time, it improves the gyroscope detection signal strength and optimizes the gyroscope signal-to-noise ratio.

[0056] The present application embodiment provides a hemispherical resonant gyroscope, please refer to Figures 4 to 6 , Figure 4 A three-dimensional schematic diagram of a hemispherical resonant gyroscope provided in accordance with an embodiment of the present application. Figure 5 for Figure 4 An exploded schematic diagram of a hemispherical resonant gyroscope is shown. Figure 6 for Figure 4 The cross-sectional view of the hemispherical resonator gyroscope along the AA direction is shown.

[0057] like Figure 4-6 As shown, the present application provides a hemispherical resonator gyroscope 1 including a hemispherical resonator 10, a driving mechanism 20 and a detection mechanism 30. The hemispherical resonator 10 is a hemispherical structure, and the hemispherical resonator 10 includes an inner surface 11, an outer surface 12 and a lip end surface 13 connected between the inner and outer surfaces 12, the inner surface 11 is provided with a first conductive film layer 101, and the lip end surface 13 is provided with a second conductive film layer 102.

[0058] Specifically, the hemispherical resonator 10 is a hemispherical thin shell structure with a certain wall thickness. Its common processing materials include high-purity, non-magnetic, low-expansion coefficient metals, alloy materials, such as beryllium bronze alloys and fused quartz. Among them, fused quartz is more used in the processing of high-precision hemispherical resonator gyroscopes because of its low expansion coefficient and internal friction coefficient. This hemispherical structure not only has a high degree of symmetry, but also enables the resonator to generate a stable resonant frequency when working.

[0059] When the hemispherical resonator 10 is subjected to external excitation, such as an electrical signal or mechanical vibration, it will begin to vibrate at its natural resonant frequency. The vibration is usually manifested as a small deformation of the hemispherical shell, which can be monitored and measured by precision sensors.

[0060] In this embodiment, the hemispherical resonator 10 is made of fused quartz. Fused quartz has an extremely high quality factor and has excellent vibration stability and frequency response characteristics. The thermal expansion coefficient of fused quartz is very low, so that it can maintain a stable size and shape when the temperature changes. The excellent thermal stability and extremely high quality factor of fused quartz enable the hemispherical resonator 10 to maintain high precision and stability under various environments. Fused quartz is a brittle and hard material. Although the processing difficulty is relatively high, the desired shape and size can be achieved through precise processing technology. At the same time, its surface is easy to be metallized, which provides a basis for electrostatic excitation and capacitance detection vibration.

[0061] The driving mechanism 20 includes a driving electrical substrate 21. The driving electrical substrate 21 is a flat plate structure and is located on the side of the hemispherical resonator 10 close to the lip end surface 13. The driving electrical substrate 21 is provided with a potential electrode 22 and a driving electrode 23 on the side facing the hemispherical resonator 10. The potential electrode 22 is electrically connected to the first conductive film layer 101 and the second conductive film layer 102. The driving electrode 23 and the second conductive film layer 102 form a driving capacitor for driving the hemispherical resonator 10 to vibrate.

[0062] By providing a potential electrode 22 on the side of the driving electrical substrate 21 facing the hemispherical resonator 10, the potential electrode 22 is electrically connected to both the first conductive film layer 101 and the second conductive film layer 102, so that the same potential can be provided for the first conductive film layer 101 and the second conductive film layer 102. By providing a driving electrode 23 on the side of the driving electrical substrate 21 facing the hemispherical resonator 10, the driving electrode 23 and the second conductive film layer 102 form a driving capacitor, and when a driving signal is applied to the driving electrode 23, the hemispherical resonator 10 can be driven to vibrate.

[0063] The detection mechanism 30 includes a detection electrical substrate 31, which is located in the hemispherical resonator 10 and is arranged close to the driving electrical substrate 21. The detection electrical substrate 31 is an inner spherical structure. The detection electrical substrate 31 is provided with a detection electrode 32. The detection electrode 32 and the first conductive film layer 101 form a detection capacitor for detecting the vibration of the hemispherical resonator 10.

[0064] Specifically, the detection electrode 32 is arranged corresponding to the first conductive film layer 101, but they are not in contact with each other and have a certain spacing to form a capacitor structure. When the hemispherical resonator 10 is externally excited and starts to vibrate, a slight deformation will occur on its surface. This deformation will cause the distance between the plates between the detection electrode 32 and the first conductive film layer 101 to change. Since the size of the capacitor is inversely proportional to the distance between the plates, the change in this spacing will cause the capacitance value of the detection capacitor to change. By measuring the capacitance value of the detection capacitor and converting it into an electrical signal output, processing and analyzing this electrical signal, the vibration signal of the hemispherical resonator 10, such as the vibration waveform and frequency parameters of the hemispherical resonator 10, can be obtained.

[0065] The hemispherical resonator gyroscope 1 provided in the embodiment of the present application can be provided with a driving electrode 23 on the driving electrical substrate 21 and a detection electrode 32 on the detection electrical substrate 31, so that the detection electrode 32 and the driving electrode 23 can be provided separately, thereby reducing the coupling between the driving signal and the detection signal. By making the detection electrical substrate 31 an inner spherical structure, and forming a detection capacitor with the detection electrode 32 and the first conductive film layer 101 provided on the inner surface 11 of the hemispherical resonator 10, the area of ​​the detection capacitor can be increased, the strength of the detection signal can be enhanced, and the signal-to-noise ratio of the hemispherical resonator 1 can be improved. By making the driving electrical substrate 21 a flat plate structure, and providing the potential electrode 22 and the driving electrode 23 on the driving electrical substrate 21, compared with providing a three-dimensional electrode, the difficulty of processing and assembly can be reduced, thereby reducing the assembly defect rate and improving the quality of the hemispherical resonator 10.

[0066] Please continue to refer to Figure 6 In the hemispherical resonant gyroscope 1 provided in the embodiment of the present application, a driving electrical substrate 21 is provided with a connecting electrode 24, the connecting electrode 24 is electrically connected to the detection electrode 32, and the potential electrode 22, the connecting electrode 24 and the driving electrode 23 are respectively connected to the other side of the driving electrical substrate 21 by means of conductive vias.

[0067] The connection electrode 24, the potential electrode 22 and the driving electrode 23 are connected to the other side of the driving electric substrate 21 by means of conductive vias. Specifically, conductive holes 25 corresponding to the connection electrode 24, the potential electrode 22 and the driving electrode 23 are provided on the driving electric substrate 21, and the conductive holes 25 include a first conductive hole 251, a second conductive hole 252 and a third conductive hole 253. The conductive hole 25 penetrates the driving electric substrate 21, and a conductive film is provided on the inner wall of the conductive hole 25. Electrodes connected to the connection electrode 24, the potential electrode 22 and the driving electrode 23 are provided on the other side of the driving electric substrate 21, and the connection with the connection electrode 24, the potential electrode 22 and the driving electrode 23 is achieved through the conductive hole 25.

[0068] By providing a connecting electrode 24 on the driving electrical substrate 21, the connecting electrode 24 is electrically connected to the detection electrode 32. The capacitance signal on the detection electrode 32 located inside the hemispherical resonator gyroscope 1 can be transmitted to the connecting electrode 24. The connecting electrode 24 is located on the side of the driving electrical substrate 21 facing the hemispherical resonator 10, and the connecting electrode 24 is connected to the other side of the driving electrical substrate 21 through the second conductive hole 252 by way of a conductive via. It is convenient to electrically connect the connecting electrode 24 to the detection circuit outside the hemispherical resonator gyroscope 1, and the capacitance signal on the detection electrode 32 is processed by the detection circuit outside the hemispherical resonator gyroscope 1 to obtain the vibration information of the hemispherical resonator 10.

[0069] The potential electrode 22 and the driving electrode 23 are also located on the side of the driving electric substrate 21 facing the hemispherical resonator 10, and the potential electrode 22 is respectively connected to the other side of the driving electric substrate 21 through the first conductive hole 251 by way of conductive vias. It is convenient to apply a potential to the potential electrode 22 on the other side of the driving electric substrate 21, so that the potential electrode 22 provides the same potential to the first conductive film layer 101 and the second conductive film layer 102 through the third conductive film layer 103.

[0070] The driving electrode 23 is connected to the other side of the driving electrical substrate 21 through the third conductive hole 253 by means of conductive vias, so as to apply a driving signal to the driving electrode 23 on the other side of the driving electrical substrate 21, so that the driving electrode 23 drives the hemispherical resonator 10 to vibrate.

[0071] like Figure 6 As shown, the hemispherical resonator 10 includes a hemispherical shell 14 and a support column 15 disposed in the hemispherical shell 14. The hemispherical shell 14 includes an inner surface 11, an outer surface 12 and a lip end surface 13. The inner surface 11 is provided with a first conductive film layer 101, and the outer surface 12 of the support column 15 is provided with a third conductive film layer 103. The first conductive film layer 101, the second conductive film layer 102 and the third conductive film layer 103 are electrically connected. The position of the support column 15 is set corresponding to the position of the potential electrode 22, and the third conductive film layer 103 is connected to the potential electrode 22 to provide the same potential to the first conductive film layer 101 and the second conductive film layer 102. The potential electrode 22 is electrically connected to the first conductive film layer 101 and the second conductive film layer 102 through the third conductive film layer 103 disposed on the surface of the support column 15.

[0072] The diameter of the hemispherical resonator 10 is 8-30 mm, and in some embodiments, it can be 10 mm or 20 mm. The thickness of the sphere wall can be 0.4-1 mm, and the outer diameter of the support column 15 can be 2-5 mm. The first conductive film layer 101, the second conductive film layer 102 and the third conductive film layer 103 can be made of chromium, platinum or gold.

[0073] By setting the support column 15, the hemispherical shell 14 can be fixedly supported, so that the lip end surface 13 located at the hemispherical shell 14 is at a certain distance from the driving electric substrate 21, and the hemispherical shell 14 is prevented from being directly placed on the driving electric substrate 21. The second conductive film layer 102 located at the lip end surface 13 and the driving electrode 23 bracket located at the driving electric substrate 21 have a certain distance to form a driving capacitor. In this embodiment, the support column 15 is located at the center of the hemispherical shell 14, which can well support the hemispherical shell 14, so that the structure of the hemispherical resonator 10 is symmetrical, and the position of the support column 15 is set corresponding to the position of the potential electrode 22, and the potential electrode 22 is located at the center of the driving electric substrate 21 on the side facing the hemispherical resonator 10.

[0074] The detection electric substrate 31 is provided with a through hole 33, the position of the through hole 33 is set corresponding to the position of the support column 15, and the support column 15 is inserted and fixed in the through hole 33. Specifically, the support column 15 and the through hole 33 are fixed by welding a conductive sheet, bonding with a conductive adhesive, etc.

[0075] The support column 15 is inserted and fixed in the through hole 33, which can not only connect the hemispherical resonator 10 located on one side of the detection electric substrate 31 and the driving electric substrate 21 located on the other side of the detection electric substrate 31, but also fix the detection electric substrate 31 so that there is a certain distance between the detection electric substrate 31 and the first conductive film layer 101 to form a detection capacitor. In this embodiment, the support column 15 is located at the center of the hemispherical shell 14, and the through hole 33 is located at the center of the detection electric substrate 31.

[0076] In some embodiments, the potential electrode 22 is a high-voltage electrode, which can provide a high-voltage potential for the first conductive film layer 101 and the second conductive film layer 102. From the perspective of driving the hemispherical resonator 10, the driving capacitance between the driving electrode 23 and the lip edge end face 13 requires a high-voltage signal to generate sufficient electrostatic force, thereby effectively exciting the resonator. The high-voltage electrode can provide sufficient voltage to ensure that the resonator can be stably and effectively excited, thereby generating the desired vibration mode. From the perspective of vibration detection of the hemispherical resonator 10, the vibration frequency of the hemispherical resonator 10 is relatively high, and the vibration displacement is in the micron level. The use of a high-voltage electrode can improve the sensitivity of the signal detection unit, so that it can more accurately detect the vibration signal of the resonator. It helps to achieve high-resolution, contactless vibration signal detection, thereby further improving the accuracy and performance of the hemispherical resonator gyroscope.

[0077] In this embodiment, the outer wall of the hemispherical shell 14 near the lip end surface 13 is provided with a fourth conductive film layer 104, and the fourth conductive film layer 104 is electrically connected to the second conductive film layer 102. The potential electrode 22 can provide the same potential for the first conductive film layer 101, the second conductive film layer 102 and the fourth conductive film layer 104 through the third conductive film layer 103. In this way, on the one hand, part of the fourth conductive film layer 104 and the driving electrode 23 are arranged relative to each other, which makes more effective use of space and increases the area of ​​the plate of the driving capacitor. On the other hand, the potential of the first conductive film layer 101 and the second conductive film layer 102 can be fixed to avoid the potential deviation of the first conductive film layer 101 and the second conductive film layer 102.

[0078] The hemispherical resonator 10, the driving electrical substrate 21 and the detecting electrical substrate 31 are made of the same material. The hemispherical resonator 10, the driving electrical substrate 21 and the detecting electrical substrate 31 are all made of fused quartz. By making the hemispherical resonator 10, the driving electrical substrate 21 and the detecting electrical substrate 31 of the same material, the thermal expansion coefficients are made the same. When the temperature changes, the dimensional changes of the hemispherical resonator 10, the driving electrical substrate 21 and the detecting electrical substrate 31 will remain consistent, thereby reducing the mechanical stress or deformation caused by the difference in thermal expansion, which is conducive to maintaining the stability and accuracy of the system. In addition, the hemispherical resonator 10, the driving electrical substrate 21 and the detecting electrical substrate 31 are made of the same material, so that the physical and chemical properties have better consistency, and electromagnetic interference or noise that may be generated between different materials can be avoided.

[0079] The driving electrical substrate 21 and the detecting electrical substrate 31 are both made of fused quartz. Fused quartz has excellent electrical insulation. In electronic systems, good electrical insulation can ensure the correct transmission and distribution of current while preventing current leakage and short circuit. The high thermal stability of fused quartz enables the driving electrical substrate 21 and the detecting electrical substrate 31 to maintain stable performance in a high temperature environment. Fused quartz has good corrosion resistance to a variety of chemical substances, allowing it to maintain stable performance in harsh chemical environments. Fused quartz has sufficient hardness and strength to withstand certain mechanical stresses and pressures. This enables the driving electrical substrate 21 and the detecting electrical substrate 31 to maintain a stable shape and size during manufacturing and use.

[0080] Please refer to Figure 7 and Figure 8 , Figure 7 for Figure 4 A schematic structural diagram of an implementation manner of a driving mechanism 20 in the hemispherical resonant gyroscope 1 is shown. Figure 8 for Figure 4 A schematic structural diagram of an implementation manner of a detection mechanism 30 in the hemispherical resonant gyroscope 1 is shown.

[0081] like Figure 7 and Figure 8 As shown, the number of driving electrodes 23 is 8n, the number of detecting electrodes 32 is 8n, and the number of connecting electrodes 24 is 8n. The number of driving electrodes 23, the number of detecting electrodes 32, and the number of connecting electrodes 24 are the same.

[0082] exist Figure 7 and Figure 8 In the illustrated embodiment, the number of the driving electrodes 23, the detecting electrodes 32 and the connecting electrodes 24 are all 8. In some other embodiments, the number of the driving electrodes 23, the detecting electrodes 32 and the connecting electrodes 24 may be 16 or 24, which is not limited in the present application.

[0083] By making the number of driving electrodes 23 8n, the number of detecting electrodes 32 8n, and the number of connecting electrodes 24 8n, the 8n driving electrodes 23 can apply driving forces of different directions and types, thereby more effectively exciting the resonator to vibrate. The 8n detecting electrodes 32 can detect vibration signals at different angles, which helps to more comprehensively understand the vibration state of the resonator and provide a basis for precise control. A plurality of driving electrodes 23 are distributed in a circular shape on the side of the driving electrical substrate 21 facing the hemispherical resonator 10, a plurality of detecting electrodes 32 are distributed in a circular shape on the side edge of the detecting electrical substrate 31 facing the inner wall of the hemispherical resonator 10, and a plurality of connecting electrodes 24 are distributed in a circular shape on the side of the driving electrical substrate 21 facing the hemispherical resonator 10. The driving electrodes 23, the detecting electrodes 32, and the connecting electrodes 24 can be evenly distributed around the hemispherical resonator 10, thereby improving the driving accuracy and detection accuracy of the hemispherical resonator 10.

[0084] exist Figure 7 and Figure 8 In the embodiment shown, the detection electrode 32 is located inside the hemispherical resonator 10, the drive electrode 23 is located on one side of the lip end surface 13 of the hemispherical resonator 10, and the drive electrode 23 is located outside the hemispherical resonator gyroscope 1 relative to the detection electrode 32. The connection electrode 24 is connected to the detection electrode 32, so the connection electrode 24 is located between the potential electrode 22 and the drive electrode 23.

[0085] Please also refer to Figures 9 to 11 , Fig. 9 for Figure 4 A schematic structural diagram of another embodiment of a driving mechanism in a hemispherical resonant gyroscope is shown. Fig.10 for Figure 4 Schematic diagram of the structure of the conductive hole in the driving mechanism of the hemispherical resonant gyroscope shown. Fig.11 for Figure 4 A schematic structural diagram of another implementation of a detection mechanism in a hemispherical resonant gyroscope is shown.

[0086] like Fig. 9 As shown, a first shielding electrode 26 is disposed between the plurality of driving electrodes 23, and a second shielding electrode 27 is disposed between the plurality of connecting electrodes 24. The first shielding electrode 26 can shield the signal interference between the plurality of driving electrodes 23, and the second shielding electrode 27 can shield the signal interference between the plurality of connecting electrodes 24.

[0087] A third shielding electrode 28 is provided between the driving electrode 23 and the connecting electrode 24 . The first shielding electrode 26 and the second shielding electrode 27 are connected via the third shielding electrode 28 , so as to shield signal interference between the connecting electrode 24 and the driving electrode 23 .

[0088] In some embodiments, the first shielding electrode 26 and the second shielding electrode 27 may be grounded, and in other embodiments, the first shielding electrode 26 and the second shielding electrode 27 may be connected to a DC potential. In this embodiment, the first shielding electrode 26 and the second shielding electrode 27 are respectively connected to a side of the driving electrical substrate 21 away from the hemispherical resonator 10 by means of conductive vias, so as to facilitate the first shielding electrode 26 and the second shielding electrode 27 to be grounded, or to facilitate the first shielding electrode 26 and the second shielding electrode 27 to be connected to a DC potential.

[0089] Please refer to Fig.10 , Fig.10 for Figure 1 The schematic diagram of the structure of the conductive hole 25 in the driving mechanism 20 of the hemispherical resonator gyroscope 1 shown in the figure, in addition to the first conductive hole 251, the second conductive hole 252, and the third conductive hole 253, the conductive hole 25 also includes a fourth conductive hole 254 and a fifth conductive hole 255. The fourth conductive hole 254 is the conductive hole 25 of the first shielding electrode 26, and the fifth conductive hole 255 is the conductive hole 25 of the second shielding electrode 27. The first shielding electrode 26 is connected to the other side of the driving electrical substrate through the fourth conductive hole 254, and the second shielding electrode 27 is connected to the other side of the driving electrical substrate 21 through the fifth conductive hole 255. The hemispherical resonator gyroscope 1 can be fixed and electrically connected to the packaging shell through the bottom of the driving electrical substrate 21, further simplifying the difficulty of circuit design and assembly.

[0090] like Fig.11 As shown, a fourth shielding electrode 34 is provided between the plurality of detection electrodes 32. The fourth shielding electrode 34 can shield the signal interference between the plurality of detection electrodes, and the second shielding electrode 27 and the fourth shielding electrode 34 are electrically connected. The second shielding electrode 27 and the fourth shielding electrode 34 can jointly shield the signal interference between the plurality of detection electrodes 32 and the connection electrode 24, and the fourth shielding electrode 34 is grounded or connected to a DC potential through the second shielding electrode 27.

[0091] Please also refer to Figure 8 and Fig.11 ,like Figure 8 and Fig.11 As shown, the detection electrode 32 includes a first detection electrode 321 and a second detection electrode 322. The first detection electrode 321 is located on the outer side wall of the detection electric substrate 31 and forms a detection capacitor with the first conductive film layer 101. The second detection electrode 322 is located on the side of the detection electric substrate 31 facing the driving electric substrate 21. The second detection electrode 322 is electrically connected to the first detection electrode 321 and the connection electrode 24. Specifically, the second detection electrode 322 and the connection electrode 24 are fixedly connected and conductively connected by welding conductive sheet, bonding conductive adhesive, etc. In this way, the electrical connection between the detection electrode 32 and the connection electrode 24 is facilitated.

[0092] A ring step 35 is provided on the side of the detection electric substrate 31 facing the driving electric substrate 21, and the ring step 35 extends from the side of the driving electric substrate 21 close to the hemispherical resonator 10 to the side away from the hemispherical resonator 10. The detection electrode 32 also includes a third detection electrode 323, which is provided on the surface of the ring step 35 and is electrically connected to the first detection electrode 321 and the second detection electrode 322. In this way, the distance between the second detection electrode 322 and the driving electrode 23 can be increased, so as to avoid the distance between the second detection electrode 322 and the driving electrode 23 being too close to increase the coupling between the driving signal and the detection signal.

[0093] The height of the annular step 35 cannot be set too large. If the height of the annular step 35 is set too large, the area of ​​the detection capacitor formed between the first detection electrode 321 plate and the first conductive film layer 101 will be reduced, thereby reducing the strength of the detection signal. The height of the annular step 35 cannot be set too small. If the height of the annular step 35 is set too small, the second detection electrode 322 plate and the drive electrode 23 will be too close, which cannot effectively reduce the coupling between the detection signal and the drive signal. The height of the annular step 35 can be set to 1-3mm. In this embodiment, the height of the annular step 35 is set to 1.5mm, which can strike a balance between enhancing the strength of the detection signal and reducing the coupling between the detection signal and the drive signal, thereby improving the signal-to-noise ratio of the hemispherical resonant gyroscope 1.

[0094] The hemispherical resonant gyroscope 1 provided in the embodiment of the present application can reduce the coupling of the gyroscope drive and detection signals and improve the strength of the gyroscope detection signal under the condition of strong process feasibility, high process precision and simple circuit scheme, thereby obtaining a hemispherical resonant gyroscope with a strong error signal and a high signal-to-noise ratio, which has important application value for improving the performance indicators of the hemispherical resonant gyroscope.

[0095] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the application disclosed herein. The present application is intended to cover any variations, uses or adaptations of the present application, which follow the general principles of the present application and include common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims.

[0096] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A hemispherical resonant gyroscope, characterized in that: include: A hemispherical resonator is a hemispherical structure, comprising an inner surface, an outer surface and a lip end surface connected between the inner and outer surfaces, wherein the inner surface is provided with a first conductive film layer, and the lip end surface is provided with a second conductive film layer; The driving mechanism comprises a driving electric substrate, which is a flat plate structure and is located on a side of the hemispherical resonator close to the lip end surface. A potential electrode and a driving electrode are arranged on the side of the driving electric substrate facing the hemispherical resonator. The potential electrode is electrically connected to both the first conductive film layer and the second conductive film layer. The driving electrode and the second conductive film layer form a driving capacitor for driving the hemispherical resonator to vibrate. The detection mechanism includes a detection electric substrate, which is located in the hemispherical resonator and is arranged close to the driving electric substrate. The detection electric substrate is an inner spherical structure. The detection electric substrate is provided with a detection electrode. The detection electrode and the first conductive film layer form a detection capacitor for detecting the vibration of the hemispherical resonator.

2. The hemispherical resonant gyroscope according to claim 1, characterized in that: The driving electrical substrate is provided with a connecting electrode, the connecting electrode is electrically connected to the detection electrode, and the potential electrode, the connecting electrode and the driving electrode are respectively connected to the other side of the driving electrical substrate by means of conductive vias.

3. The hemispherical resonator gyroscope according to claim 1, characterized in that: The hemispherical resonator comprises a hemispherical shell and a support column arranged in the hemispherical shell, the hemispherical shell comprises the inner surface, the outer surface and the lip edge end surface, the outer surface of the support column is provided with a third conductive film layer, and the first conductive film layer, the second conductive film layer and the third conductive film layer are electrically connected; The position of the support column is set corresponding to the position of the potential electrode, and the third conductive film layer is connected to the potential electrode to provide the first conductive film layer and the second conductive film layer with the same potential.

4. The hemispherical resonator gyroscope according to claim 3, characterized in that: The detection electric substrate is provided with a through hole, the position of the through hole is arranged corresponding to the position of the support column, and the support column is inserted and fixed in the through hole; and / or The outer wall of the hemispherical shell near the lip end surface is provided with a fourth conductive film layer, and the fourth conductive film layer is electrically connected to the second conductive film layer.

5. The hemispherical resonant gyroscope according to claim 1, characterized in that: The potential electrode is a high voltage electrode; and / or The hemispherical resonator, the driving electric substrate and the detecting electric substrate are made of the same material; and / or The hemispherical resonator, the driving electric substrate and the detecting electric substrate are all made of fused quartz.

6. The hemispherical resonator gyroscope according to claim 2, characterized in that: The number of the driving electrodes is 8n, the number of the detecting electrodes is 8n, the number of the connecting electrodes is 8n, and the number of the driving electrodes, the number of the detecting electrodes, and the number of the connecting electrodes are the same; The plurality of driving electrodes are distributed in a circular shape on the side of the driving electrical substrate facing the hemispherical resonator, the plurality of detecting electrodes are distributed in a circular shape on the side edge of the detecting electrical substrate facing the inner wall of the hemispherical resonator, and the plurality of connecting electrodes are distributed in a circular shape on the side of the driving electrical substrate facing the hemispherical resonator.

7. The hemispherical resonator gyroscope according to claim 6, characterized in that: The potential electrode is located at the center of the side of the driving electrical substrate facing the hemispherical resonator; and the connecting electrode is located between the potential electrode and the driving electrode.

8. The hemispherical resonator gyroscope according to claim 6, characterized in that: A first shielding electrode is arranged between the multiple driving electrodes, a second shielding electrode is arranged between the multiple connecting electrodes, a third shielding electrode is arranged between the driving electrode and the connecting electrode, and the first shielding electrode and the second shielding electrode are electrically connected through the third shielding electrode; a fourth shielding electrode is arranged between the multiple detection electrodes; the second shielding electrode and the fourth shielding electrode are electrically connected; the first shielding electrode and the second shielding electrode are respectively connected to a side of the driving electrical substrate away from the hemispherical resonator through conductive vias.

9. The hemispherical resonator gyroscope according to claim 2, characterized in that: The detection electrode includes a first detection electrode and a second detection electrode. The first detection electrode is located on the outer wall of the detection electrical substrate and forms a detection capacitor with the first conductive film layer. The second detection electrode is located on the side of the detection electrical substrate facing the driving electrical substrate, and the second detection electrode is electrically connected to the first detection electrode and the connecting electrode.

10. The hemispherical resonator gyroscope according to claim 9, characterized in that: A ring-shaped step is provided on one side of the detection electric substrate facing the driving electric substrate, and the ring-shaped step extends from a side of the driving electric substrate close to the hemispherical resonator to a side away from the hemispherical resonator; The detection electrode further includes a third detection electrode, which is disposed on the surface of the annular step and is electrically connected to both the first detection electrode and the second detection electrode.

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