Reflection type confocal microscope based on perovskite detector

Abstract

The invention relates to the technical field of microscopes, in particular to a reflective confocal microscope based on a perovskite detector. The reflective confocal microscope comprises a laser, a polarizer, a polarization splitting prism, a galvanometer, a lens unit, a reflector, a sample display unit, a focusing lens and a perovskite detector. The laser, the polarizer, the polarization splitting prism, the galvanometer, the lens unit, the reflector and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the reflector, the lens unit, the galvanometer, the polarization splitting prism, the focusing lens and the perovskite detector are sequentially connected to form a reflected light channel. Compared with a traditional confocal microscope, the confocal microscope has the advantages of being high in detection sensitivity, low in cost and high in response speed.

Description

Technical Field

[0001] The present application relates to the field of microscope technology, and in particular to a reflective confocal microscope based on a perovskite detector. Background Art

[0002] In microscopic imaging technology, confocal microscopy is widely used in biomedicine, material science and other fields because of its high resolution, three-dimensional imaging capabilities and strong background noise suppression capabilities. Traditional confocal microscopes mainly rely on silicon-based detectors or other semiconductor detectors to capture the reflection or fluorescence signals of samples. However, these detectors have limitations in performance, especially in terms of detection sensitivity, photoelectric conversion efficiency, response speed and cost control, which affects the imaging effect and application range of the microscope.

[0003] First, traditional silicon-based detectors have low absorption and photoelectric conversion efficiency for light signals, especially under weak light conditions, which can easily lead to a decrease in the signal-to-noise ratio, thus affecting the imaging quality. In addition, the wide band gap of silicon-based detectors leads to insufficient response in the visible and near-infrared bands, limiting the ability of multi-band confocal imaging. To improve imaging sensitivity, some high-end microscopes use special semiconductor materials or cooling devices, but these methods significantly increase the manufacturing cost and complexity of the equipment, increasing the economic burden of the application.

[0004] Secondly, the response speed of traditional detectors is relatively slow, making it difficult to achieve the desired effect in fast imaging or real-time observation. Especially when scanning samples, the insufficient response speed will cause image blur and dynamic delay, limiting its application in the field of dynamic observation and fast imaging. Summary of the invention

[0005] The present application provides a reflective confocal microscope based on a perovskite detector to solve one or more technical problems existing in the prior art and at least provide a beneficial choice or create conditions.

[0006] Other features and advantages of the present application will become apparent from the following detailed description, or may be learned in part by the practice of the present application.

[0007] According to one aspect of an embodiment of the present application, a reflective confocal microscope based on a perovskite detector is provided, comprising a laser, a polarizer, a polarization beam splitter prism, a galvanometer, a lens unit, a reflector, a sample display unit, a focusing lens and a perovskite detector; the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the lens unit, the reflector and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the reflector, the lens unit, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form a reflected light channel;

[0008] Wherein, in the incident light channel, the laser is used to output a laser signal, the polarizer is used to modulate the laser signal into vertical linear polarized light, and the polarization beam splitter is used to reflect the vertical linear polarized light into the galvanometer, and pass through the galvanometer, the lens unit and the reflector to irradiate the surface of the sample to be tested placed on the sample display unit, so as to form a sample image light signal;

[0009] In the reflected light channel, the sample image light signal reflected by the reflector is two-dimensionally scanned by the galvanometer or three-dimensionally scanned by the sample display unit and the galvanometer to obtain a sample scanning signal, and the sample scanning signal is transmitted to the perovskite detector through the polarization beam splitter prism and the focusing lens, so as to generate a confocal image of the sample to be tested according to the sample scanning signal.

[0010] In one embodiment of the present application, based on the above scheme, the lens unit includes a scanning lens, a tube lens and a quarter wave plate, and the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the scanning lens, the tube lens, the quarter wave plate, the reflector and the sample display unit are sequentially connected to form the incident light channel; the sample display unit, the reflector, the quarter wave plate, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel;

[0011] Among them, the scanning lens and the tube lens are both positive lenses, the focal length of the scanning lens is 39mm, and the distance between the scanning lens and the galvanometer is 39mm; the focal length of the tube lens is 180mm, and the distance between the tube lens and the scanning lens is 219mm, and the tube lens and the scanning lens constitute a 4f optical system.

[0012] In one embodiment of the present application, based on the above scheme, the sample display unit includes a piezoelectric lifting platform, an objective lens and a stage, the sample to be tested is placed on the stage, the piezoelectric lifting platform can be precisely moved in the vertical direction, and the piezoelectric lifting platform is used to scan the sample image light signal of the sample to be tested and realize electric focusing;

[0013] The laser, the polarizer, the polarization beam splitter, the galvanometer, the scanning lens, the tube lens, the reflector, the piezoelectric lift table, the objective lens and the stage are sequentially connected to form the incident light channel;

[0014] The stage, the objective lens, the piezoelectric lifting platform, the reflector, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel.

[0015] In one embodiment of the present application, based on the above scheme, the galvanometer includes an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are used to scan the X-axis and Y-axis of the sample image light signal respectively, and the piezoelectric lifting platform is used to scan the Z-axis of the sample image light signal;

[0016] The X axis of the sample image light signal and the Y axis of the sample image light signal correspond to the two-dimensional coordinate axes of the horizontal plane where the sample to be tested is located, and the Z axis of the sample image light signal is perpendicular to the horizontal plane where the sample to be tested is located.

[0017] In one embodiment of the present application, based on the above scheme, the reflective confocal microscope further includes a data acquisition card, which is used to drive the X-axis galvanometer and the Y-axis galvanometer, and collect signals obtained by scanning the X-axis galvanometer and the Y-axis galvanometer;

[0018] The X-axis galvanometer is driven by a high-frequency triangle wave signal emitted by the data acquisition card, and the Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card.

[0019] In one embodiment of the present application, based on the above-mentioned solution, the mirror angles of the X-axis galvanometer and the Y-axis galvanometer can be adjusted.

[0020] In one embodiment of the present application, based on the aforementioned solution, a pinhole is further provided between the focusing lens and the perovskite detector, the pinhole is 100 mm away from the focusing lens, and the light transmission diameter of the pinhole is 50 μm, and the pinhole is used for spatial filtering of the confocal sample scanning signal.

[0021] In one embodiment of the present application, based on the above solution, the focal length of the focusing lens is 100 mm, so as to focus the sample scanning signal.

[0022] In one embodiment of the present application, based on the aforementioned scheme, the perovskite detector is used to convert the sample scanning signal into a voltage signal, and read the voltage signal through the data acquisition card to generate a confocal two-dimensional image or a confocal three-dimensional image.

[0023] The beneficial effects of the present application are as follows: by dividing the polarization beam splitter prism into an incident light channel and a reflected light channel, the laser signal emitted by the laser can be irradiated on the surface of the sample to be tested through the incident light channel to form a sample image light signal, and then the sample image light signal is deflected and scanned by driving the galvanometer to obtain a two-dimensional sample scanning signal, and at the same time, a three-dimensional sample scanning signal can be obtained by combining the two-dimensional scanning of the galvanometer through a sample display unit, and finally the sample scanning signal is detected by a perovskite detector and converted into a voltage signal and collected by a data acquisition card, finally forming a confocal two-dimensional image or a three-dimensional image; it is obvious that this method has high detection sensitivity, and at the same time does not require expensive device costs, and can quickly perform confocal imaging on the imaged sample to be tested through a reflector and a reflected light channel. Therefore, compared with the traditional confocal microscope, the confocal microscope of the present application has the effects of detection sensitivity, low cost and fast response speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following is a brief description of the drawings required for use in the description of the embodiments. Obviously, the drawings described are only part of the embodiments of the present application, not all of the embodiments, and those skilled in the art can also obtain other design solutions and drawings based on these drawings without creative work.

[0025] Figure 1 is an overall structural diagram of a reflective confocal microscope based on a perovskite detector according to an embodiment of the present application;

[0026] Figure 2 A schematic diagram of driving and scanning a galvanometer according to an embodiment of the present application;

[0027] Figure 3 A comparison diagram of confocal images collected by a perovskite detector and a silicon-based detector according to an embodiment of the present application;

[0028] Figure 4 Schematic diagram of the X-axis and Y-axis of the galvanometer according to an embodiment of the present application;

[0029] Figure 5 An optical path diagram of a laser signal transmitted in an incident light channel according to an embodiment of the present application;

[0030] Figure 6 An optical path diagram of a sample scanning signal transmitted in a reflected light channel according to an embodiment of the present application;

[0031] Figure 7 A diagram of materials for preparing a perovskite detector according to an embodiment of the present application.

[0032] Reference numerals

[0033] Laser 1, polarizer 2, polarization beam splitter prism 3, galvanometer 4, scanning lens 5, tube lens 6, quarter wave plate 7, reflector 8, piezoelectric lift 9, objective lens 10, stage 11, focusing lens 12, pinhole 13, perovskite detector 14. DETAILED DESCRIPTION

[0034] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this application will be more comprehensive and complete and fully convey the concept of the example embodiments to those skilled in the art.

[0035] In addition, described feature, structure or characteristic can be combined in one or more embodiments in any suitable manner. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present application. However, those skilled in the art will appreciate that the technical scheme of the present application can be put into practice without one or more of the specific details, or other methods, components, devices, steps, etc. can be adopted. In other cases, known methods, devices, realizations or operations are not shown or described in detail to avoid blurring the various aspects of the application.

[0036] The block diagrams shown in the accompanying drawings are merely functional entities and do not necessarily correspond to physically independent entities. That is, these functional entities may be implemented in software form, or in one or more hardware modules or integrated circuits, or in different networks and / or processor devices and / or micro-control node devices.

[0037] The flowcharts shown in the accompanying drawings are only exemplary and do not necessarily include all the contents and operations / steps, nor must they be executed in the order described. For example, some operations / steps can be decomposed, and some operations / steps can be combined or partially combined, so the actual execution order may change according to actual conditions.

[0038] It should be noted that the "multiple" mentioned in this article refers to two or more. "And / or" describes the association relationship of the associated objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the associated objects before and after are in an "or" relationship.

[0039] The following is a detailed introduction to the background technology of the embodiments of the present application:

[0040] This application aims to solve the technical defects of the detectors in the existing confocal microscope system in terms of detection sensitivity, imaging resolution and cost. Traditional confocal microscopes usually rely on detectors made of silicon or other semiconductor materials. These materials are limited in response speed and photoelectric conversion efficiency, resulting in limited detection sensitivity and imaging quality, especially when imaging in low light intensity environments. The problem of low signal-to-noise ratio is prone to occur. In addition, the manufacturing process of these detectors is complex, the cost is high, and they perform poorly in multi-band imaging; at the same time, these devices are active devices that require external power supply.

[0041] In response to these problems, the present application proposes to use perovskite materials as the core element of the detector to construct a reflective confocal microscope based on a perovskite detector. Perovskite materials have excellent light absorption and photoelectric conversion properties, and have a fast response speed to visible light and near-infrared light, which can significantly improve the sensitivity of the detector, thereby obtaining a higher imaging resolution. The preparation process of perovskite materials is relatively simple and low-cost, making the detector highly economical and scalable. Therefore, the technology of the present application can reduce costs while maintaining high sensitivity and resolution, and is suitable for multi-band imaging applications, and is expected to promote the widespread application of confocal microscopy technology in scientific research and industrial detection.

[0042] In microscopic imaging technology, confocal microscopy is widely used in biomedicine, material science and other fields because of its high resolution, three-dimensional imaging capabilities and strong background noise suppression capabilities. Traditional confocal microscopes mainly rely on silicon-based detectors or other semiconductor detectors to capture the reflection or fluorescence signals of samples. However, these detectors have limitations in performance, especially in terms of detection sensitivity, photoelectric conversion efficiency, response speed and cost control, which affects the imaging effect and application range of the microscope.

[0043] First, traditional silicon-based detectors have low absorption and photoelectric conversion efficiency for light signals, especially under weak light conditions, which can easily lead to a decrease in the signal-to-noise ratio, thus affecting the imaging quality. In addition, the wide band gap of silicon-based detectors leads to insufficient response in the visible and near-infrared bands, limiting the ability of multi-band confocal imaging. To improve imaging sensitivity, some high-end microscopes use special semiconductor materials or cooling devices, but these methods significantly increase the manufacturing cost and complexity of the equipment, increasing the economic burden of the application.

[0044] Secondly, the response speed of traditional detectors is relatively slow, making it difficult to achieve the desired effect in fast imaging or real-time observation. Especially when scanning samples, the insufficient response speed will cause image blur and dynamic delay, limiting its application in the field of dynamic observation and fast imaging.

[0045] Based on the limitations of the above background technology, this application proposes a reflective confocal microscope based on a perovskite detector and explains the preparation method of the detector. Perovskite materials, due to their excellent light absorption characteristics and photoelectric conversion efficiency, can significantly improve the signal-to-noise ratio and response speed of the detector under low light conditions, thereby significantly improving the imaging quality and resolution of the confocal microscope without increasing costs. This innovative technology is expected to solve the shortcomings of traditional microscope detectors in terms of sensitivity, response speed and multi-band imaging, and promote the widespread application of microscopic imaging technology in multidisciplinary fields.

[0046] The following is a detailed introduction to the embodiments of the present application:

[0047] According to one aspect of an embodiment of the present application, a reflective confocal microscope based on a perovskite detector is provided, comprising a laser 1, a polarizer 2, a polarization beam splitter prism 3, a galvanometer 4, a lens unit, a reflector 8, a sample display unit, a focusing lens 12 and a perovskite detector 14; the laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the lens unit, the reflector 8 and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the reflector 8, the lens unit, the galvanometer 4, the polarization beam splitter prism 3, the focusing lens 12 and the perovskite detector 14 are sequentially connected to form a reflected light channel;

[0048] Wherein, in the incident light channel, the laser 1 is used to output a laser signal, the polarizer 2 is used to modulate the laser signal into a vertical linear polarized light, and the polarization beam splitter prism 3 is used to reflect the vertical linear polarized light into the galvanometer 4, and pass through the galvanometer 4, the lens unit and the reflector 8 to irradiate the surface of the sample to be tested placed on the sample display unit, so as to form a sample image light signal;

[0049] In the reflected light channel, the sample image light signal reflected by the reflector 8 is two-dimensionally scanned by the galvanometer 4 or three-dimensionally scanned by the sample display unit and the galvanometer 4 to obtain a sample scanning signal, and the sample scanning signal is transmitted to the perovskite detector 14 through the polarization beam splitter prism 3 and the focusing lens 12, so that the perovskite detector 14 generates a confocal image of the sample to be tested according to the sample scanning signal.

[0050] Specifically, after the laser 1 emits the laser signal, it can be divided into two channels for transmission. The first channel is the incident light channel. The specific optical path diagram of the incident light channel can be found in Figure 5As shown, the laser signal passes through the laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the lens unit and the reflector 8 and finally reaches the sample display unit, so that the sample to be tested placed in the sample display unit can be imaged and generate a sample image light signal.

[0051] The second path is the reflected light channel. For the specific optical path diagram of the reflected light channel, please refer to Figure 6 As shown, the generated sample image light signal passes through the sample display unit, the reflector 8, and the lens unit in sequence, and the sample image light signal can be deflected under the drive of the galvanometer 4. Since the galvanometer 4 has vibrations in the X-axis and Y-axis directions, the sample image light signal can be scanned in two dimensions. Then, the sample scanning signal generated at this time can be detected by the perovskite detector 14, and finally converted into a voltage signal, and these voltage signals collected by the data acquisition card are analyzed to finally generate a confocal image. Among them, the sample display unit can also scan the Z-axis direction of the sample image light signal, that is, the vertical direction. At this time, the sample scanning signal generated is a three-dimensional signal, and the final confocal image is also a three-dimensional image.

[0052] In one embodiment of the present application, the lens unit includes a scanning lens 5, a tube lens 6 and a quarter wave plate 7; the laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the scanning lens 5, the tube lens 6, the quarter wave plate 7, the reflector 8 and the sample display unit are sequentially connected to form the incident light channel; the sample display unit, the reflector 8, the quarter wave plate 7, the tube lens 6, the scanning lens 5, the galvanometer 4, the polarization beam splitter prism 3, the focusing lens 12 and the perovskite detector 14 are sequentially connected to form the reflected light channel;

[0053] Among them, the scanning lens 5 and the tube lens 6 are both positive lenses, the focal length of the scanning lens 5 is 39 mm, and the distance between the scanning lens 5 and the galvanometer 4 is 39 mm; the focal length of the tube lens 6 is 180 mm, and the distance between the tube lens 6 and the scanning lens 5 is 219 mm, and the tube lens 6 and the scanning lens 5 constitute a 4f optical system.

[0054] Specifically, a 4f optical system (the 4f optical system is used to enlarge the light spot) can be formed by the scanning lens 5 and the tube lens 6, and the fast axis direction of the quarter-wave plate 7 is 45°, thereby converting the incident vertical linear polarized light into circular polarized light, and the sample image light signal (circular polarized light) reflected back through the reflected light channel is further converted into parallel linear polarized light.

[0055] In one embodiment of the present application, the sample display unit includes a piezoelectric lifting platform 9, a galvanometer 10 and a stage 11, the sample to be tested is placed on the stage 11, the piezoelectric lifting platform 9 can be precisely moved in the vertical direction, and the piezoelectric lifting platform 9 is used to scan the sample image light signal of the sample to be tested and realize electric focusing;

[0056] The laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the scanning lens 5, the tube lens 6, the reflector 8, the piezoelectric lift table 9, the galvanometer 10 and the stage 11 are sequentially connected to form the incident light channel;

[0057] The stage 11, the galvanometer 10, the piezoelectric lifting platform 9, the reflector 8, the tube lens 6, the scanning lens 5, the galvanometer 4, the polarization beam splitter prism 3, the focusing lens 12 and the perovskite detector 14 are sequentially connected to form the reflected light channel.

[0058] Specifically, the piezoelectric lifting platform 9 can drive the galvanometer 10 to move precisely in the vertical direction through piezoelectric ceramics, with a stroke of 100 μm and a minimum step resolution of 10 nm, thereby realizing confocal three-dimensional scanning imaging and electric focusing;

[0059] The galvanometer 10 is installed under the piezoelectric lifting platform 9 to realize microscopic observation of the sample to be tested. The galvanometer 10 can switch different magnifications and model parameters to realize imaging of the sample to be tested at different magnifications and resolutions;

[0060] The stage 11 is used to place and fix the sample to be tested. At the same time, the X-axis and Y-axis of the stage 11 can be fine-tuned by a knob, that is, the position and posture of the sample to be tested can be fine-tuned.

[0061] In one embodiment of the present application, the galvanometer 4 includes an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are used to scan the X-axis and Y-axis of the sample image light signal respectively, and the piezoelectric lifting platform 9 is used to scan the Z-axis of the sample image light signal;

[0062] The X axis of the sample image light signal and the Y axis of the sample image light signal correspond to the two-dimensional coordinate axes of the horizontal plane where the sample to be tested is located, and the Z axis of the sample image light signal is perpendicular to the horizontal plane where the sample to be tested is located.

[0063] The reflective confocal microscope also includes a data acquisition card, which is used to drive the X-axis galvanometer and the Y-axis galvanometer, and collect signals obtained by scanning the X-axis galvanometer and the Y-axis galvanometer;

[0064] The X-axis galvanometer is driven by a high-frequency triangle wave emitted by the data acquisition card, and the Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card. The mirror angles of the X-axis galvanometer and the Y-axis galvanometer are adjustable.

[0065] Specifically, Figure 2 As shown, the confocal imaging of the entire reflective confocal microscope is achieved by two-dimensionally scanning the sample image light signal (the laser beam reflected by the reflected light channel) by the galvanometer 4 . Figure 2 The waveform diagram of the voltage signal used to control the galvanometer 4 and the frame trigger is shown in FIG. The X-axis galvanometer is driven by a high-frequency triangle wave emitted by the data acquisition card for fast axis scanning. The Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card. The frame trigger uses a constant high transistor-transistor logic (TTL) voltage through the data acquisition card to enable data acquisition for one frame of imaging, and uses a low TTL voltage to disable data acquisition when the yY axis flies back. The signal of each pixel is acquired according to the pixel clock time. The model of the data acquisition card is NI-6218.

[0066] Furthermore, in a reflective confocal microscope, e.g. Figure 4 As shown, Figure 4 The X-axis galvanometer and Y-axis galvanometer (also called galvanometer 4) shown are key components for controlling the laser signal to scan the surface of the sample to be measured. The imaging principle of the reflective confocal microscope mainly relies on the laser signal (i.e., the laser signal emitted by the laser 1) to scan the sample and obtain the image by detecting the reflected signal (sample image light signal) or the fluorescence signal. The function of the X-axis galvanometer and the Y-axis galvanometer is to achieve the purpose of obtaining high-resolution two-dimensional or three-dimensional images by accurately controlling the scanning position of the laser signal.

[0067] The laser signal of the confocal microscope is scanned by the galvanometer 4. The galvanometer 4 is usually composed of two high-speed mirrors 8, one for controlling the X-axis direction (horizontal scanning) and the other for controlling the Y-axis direction (vertical scanning).

[0068] The galvanometer 4 quickly adjusts the mirror angle through electromagnetic drive or other methods, so that the laser beam repeatedly scans along the X-axis and Y-axis directions.

[0069] The X-axis galvanometer and the Y-axis galvanometer usually work together in an orthogonal manner to ensure that the laser beam can cover the entire two-dimensional scanning area (sample surface). By quickly changing the movement path of the laser beam, the galvanometer 4 can excite fluorescence or detect reflected signals at different positions of the sample. It should be noted that the following laser beam is the laser signal described in the embodiment of the present application, in which the vertical linear polarized light, circularly polarized light and parallel linear polarized light merely describe the polarization state of the laser signal. In essence, the nature of the laser signal has not changed. From the laser 1 to the focusing on the surface of the sample to be tested, it is all a laser signal (laser beam).

[0070] Specific steps of the work process

[0071] 1. Laser signal emission and preliminary focusing: The laser signal is first emitted from laser 1, collimated by an optical system (such as a collimating lens) to form a thin beam, which passes through the X-axis and Y-axis galvanometers, and then through the incident light channel of the reflective confocal microscope, and finally focused on the surface of the sample to be tested.

[0072] 2. The working principle of the X-axis galvanometer and the Y-axis galvanometer is similar to the electron beam scanning in the traditional scanning display (such as CRT display), but they control the deflection of the laser beam through the angle of the reflector 8. When the galvanometer 4 controls its angle through the electrical signal, they will change the position of the laser beam on the surface of the sample to be tested, thereby achieving excitation at different positions on the surface of the sample to be tested.

[0073] 3. Scanning mode: The scanning of the galvanometer 4 is usually carried out in a certain order. The common scanning modes are:

[0074] Point scanning mode (Raster scan): The laser beam scans each pixel of the sample in sequence according to the scanning frame (horizontally scan one row, vertically scan row by row), such as Figure 2 As shown, the entire scanning area is eventually covered. At each scanning position, the laser excites fluorescence (or reflected light) when irradiating the sample. This part of fluorescence or reflected light is collected by the microscope's detection system.

[0075] 4. Since the confocal microscope uses a diaphragm to limit the light acceptance angle, only the light from the laser focus can pass through the diaphragm, so a clearer and higher resolution image can be obtained. The diaphragm blocks stray light outside the focus, thereby improving the contrast of the image.

[0076] 5. After the laser scans a series of positions on the sample surface, the collected signals are converted into electrical signals and processed by a computer to generate an image. The scanning trajectories of the X-axis and Y-axis, as well as the light intensity or reflection intensity at each position, are finally spliced ​​into a two-dimensional image. If three-dimensional imaging is required, the system will scan the layers of the sample to be tested at different depths by changing the focal length (Z-axis scanning), that is, the position of the piezoelectric lifting platform 9, and then use these scanning signals to reconstruct the three-dimensional image.

[0077] The following are specific components of the embodiment of the present application: Figure 1 As shown, from the light source to the image side, there are:

[0078] Laser 1, which is a semiconductor single-mode spatial light collimation laser with a wavelength of 405nm and an output spot diameter of 2mm. Laser 1 is used as a light source for confocal imaging, and outputs vertical linear polarized light with a power stability within 1%, an output power of 0-20mW, an adjustable range, and an adjustment accuracy of 0.1%. It emits parallel light to illuminate the next device, namely polarizer 2;

[0079] Polarizer 2, whose polarization direction is vertical, the light of the laser beam (laser signal) after passing through polarizer 2 is vertical linear polarized light;

[0080] The polarization beam splitter prism 3 divides the laser beam into two paths, an excitation path and a detection path, according to the polarization direction. The excitation path represents the incident light channel described in the present application, and the detection path represents the reflected light channel described in the present application. All the vertically polarized light incident on the polarization beam splitter prism 3 is reflected into the next device, namely, the galvanometer 4;

[0081] The galvanometer mirror 4 has two axes, X and Y, a lens size of 5 mm, a lens type of silver mirror, and is on the front focal plane of the scanning lens 5;

[0082] Scanning lens 5, which has a focal length of 39 mm and is a positive lens, is located 39 mm behind the galvanometer 4;

[0083] Tube lens 6, which has a focal length of 180 mm and is also a positive lens, is located 219 mm behind the scanning lens 5 and together with the scanning lens 5 forms a 4f optical system;

[0084] A quarter wave plate 7, the fast axis direction of the wave plate is 45 degrees, so that the incident vertical linear polarized light is converted into circular polarized light, and further converted into parallel linear polarized light after being reflected back by the sample, and the position is located after the tube lens 6;

[0085] The reflector 8 mainly reflects the laser beam in a direction perpendicular to the tabletop, so as to facilitate the upright observation of the sample to be tested;

[0086] The piezoelectric lifting platform 9 drives the galvanometer 10 to move precisely in the vertical direction through piezoelectric ceramics, with a stroke of 100 μm and a minimum step resolution of 10 nm, thereby realizing confocal three-dimensional scanning imaging and electric focusing;

[0087] The objective lens 10 is installed under the piezoelectric lifting platform 9 to realize microscopic observation of the sample to be tested. The objective lens 10 can switch different magnifications and model parameters to realize sample imaging at different magnifications and resolutions;

[0088] The stage 11 is used to place and fix the sample to be tested, and the X-axis and Y-axis of the stage 11 can be fine-tuned by a knob;

[0089] A focusing lens 12, whose focal length is 100 mm, is used to focus and collect the sample scanning signal and enter the detector;

[0090] The pinhole 13 has a light-transmitting diameter of 50 μm and is located at the focus of the focusing lens 12 at a distance of 100 mm, and is used for spatial filtering of the confocal sample scanning signal;

[0091] The perovskite detector 14 is used to collect the detected sample scanning signal and is located closely behind the pinhole 13; the collected photoelectric signal (sample scanning signal) is converted into a voltage signal, which is read by a computer data acquisition card and finally generates a confocal image.

[0092] According to another aspect of the embodiment of the present application, the preparation method of the perovskite detector 14 is as follows:

[0093] The preparation of the perovskite detector 14 is mainly divided into two parts, namely perovskite thin film deposition and electrode mask design.

[0094] The perovskite film deposition includes but is not limited to solution spin coating and vapor deposition processes.

[0095] Taking the solution method as an example, the specific experimental steps for the deposition of perovskite thin films are as follows:

[0096] 1. A precursor is formed by dissolving stoichiometric ratios of MAI and PbI2 into an organic solvent.

[0097] 2. The precursor solution is then deposited on an ITO or FTO substrate by spin coating (wherein the spin coating speed and anti-solvent drop processing technology can be specifically optimized).

[0098] 3. Then the substrate is annealed at 100 degrees Celsius to complete the preparation of the perovskite film. The chemical elements of the precursor can be replaced to achieve the regulation of the quality and composition of the perovskite film.

[0099] Design and development of perovskite detectors14:

[0100] 1. According to the specific structure and requirements of the confocal microscope, the effective area and region of the device are limited to guide the design of the shape and size of the device electrode.

[0101] 2. Process the electrode mask through laser cutting technology.

[0102] 3. Electrode deposition is performed on the perovskite film using a thermal evaporation process combined with a mask. In addition, the device's responsiveness can be improved by adding an interface layer, such as an electron and hole transport layer.

[0103] 4. Solder the device on the circuit board and organically connect it to the amplification circuit and the collection port to form a complete perovskite photodetector module.

[0104] like Figure 7 As shown, the perovskite photodetector is prepared from bottom to top as glass (gl ass), indium tin oxide (ITO), hole transport layer (HTL), perovskite layer (PVK), electron transport layer (ETL), and silver (AG).

[0105] In summary, the reflective confocal microscope based on perovskite detector proposed in this application has the following effects:

[0106] 1. Improve detection sensitivity

[0107] Perovskite materials, as the core of the detector, have excellent photoelectric properties. Perovskite detectors can effectively absorb and detect light of different wavelengths, so when used in confocal microscopes, they can greatly improve the sensitivity of detection signals. This means that more reflected signals can be captured, and even weaker reflected light can be accurately detected. Figure 3 Shown is a comparison of confocal images collected by a perovskite detector and a silicon-based detector. The results show that the image sensitivity response of the perovskite detector at the same position is higher.

[0108] 2. Enhance signal selectivity and contrast

[0109] Perovskite materials have good response characteristics at different wavelengths. By precisely adjusting the working wavelength range of the detector, the detection effect of reflected light can be optimized and the contrast of the image can be improved. This helps to distinguish different structural features or material components in complex biological tissues or samples, and improve the clarity and visualization of microscopic imaging.

[0110] 3. Improve the response speed of the detector

[0111] Perovskite detectors usually have a fast response time, which is very important for real-time imaging and dynamic monitoring of confocal microscopy. Especially in experiments that require high temporal resolution, perovskite detectors can effectively reduce the delay in the imaging process, thereby improving experimental efficiency.

[0112] 4. Self-driving devices

[0113] Perovskite detectors are usually self-driven and do not require external voltage power supply compared to silicon-based detectors, which greatly simplifies the circuit of the detector device and enables small-volume packaging.

[0114] 5. Reduce costs

[0115] Compared with traditional high-performance detectors such as CCD or CMOS, perovskite materials are relatively cheap and easy to manufacture. Therefore, reflective confocal microscopy using perovskite detectors may significantly reduce production costs, making this technology more widely used in laboratory and clinical applications.

[0116] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be performed without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A reflective confocal microscope based on a perovskite detector, characterized in that: include: Laser, polarizer, polarization beam splitter, galvanometer, lens unit, reflector, sample display unit, focusing lens and perovskite detector; The laser, the polarizer, the polarization beam splitter, the galvanometer, the lens unit, the reflector and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the reflector, the lens unit, the galvanometer, the polarization beam splitter, the focusing lens and the perovskite detector are sequentially connected to form a reflected light channel; Wherein, in the incident light channel, the laser is used to output a laser signal, the polarizer is used to modulate the laser signal into vertical linear polarized light, and the polarization beam splitter is used to reflect the vertical linear polarized light into the galvanometer, and pass through the galvanometer, the lens unit and the reflector to irradiate the surface of the sample to be tested placed on the sample display unit, so as to form a sample image light signal; In the reflected light channel, the sample image light signal reflected by the reflector is two-dimensionally scanned by the galvanometer or three-dimensionally scanned by the sample display unit and the galvanometer to obtain a sample scanning signal, and the sample scanning signal is transmitted to the perovskite detector through the polarization beam splitter prism and the focusing lens, so as to generate a confocal image of the sample to be tested according to the sample scanning signal.

2. The reflective confocal microscope based on perovskite detector according to claim 1, characterized in that: The lens unit comprises a scanning lens, a tube lens and a quarter wave plate; the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the scanning lens, the tube lens, the quarter wave plate, the reflector and the sample display unit are sequentially connected to form the incident light channel; the sample display unit, the reflector, the quarter wave plate, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel; Among them, the scanning lens and the tube lens are both positive lenses, the focal length of the scanning lens is 39mm, and the distance between the scanning lens and the galvanometer is 39mm; the focal length of the tube lens is 180mm, and the distance between the tube lens and the scanning lens is 219mm, and the tube lens and the scanning lens constitute a 4f optical system.

3. The reflective confocal microscope based on perovskite detector according to claim 2, characterized in that: The sample display unit comprises a piezoelectric lifting platform, an objective lens and a stage, the sample to be tested is placed on the stage, the piezoelectric lifting platform can be precisely moved in the vertical direction, and the piezoelectric lifting platform is used to scan the sample image light signal of the sample to be tested and realize electric focusing; The laser, the polarizer, the polarization beam splitter, the galvanometer, the scanning lens, the tube lens, the reflector, the piezoelectric lift table, the objective lens and the stage are sequentially connected to form the incident light channel; The stage, the objective lens, the piezoelectric lifting platform, the reflector, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel.

4. The reflective confocal microscope based on perovskite detector according to claim 3, characterized in that: The galvanometer includes an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are used to scan the X-axis and Y-axis of the sample image light signal respectively, and the piezoelectric lifting platform is used to scan the Z-axis of the sample image light signal; The X axis of the sample image light signal and the Y axis of the sample image light signal correspond to the two-dimensional coordinate axes of the horizontal plane where the sample to be tested is located, and the Z axis of the sample image light signal is perpendicular to the horizontal plane where the sample to be tested is located.

5. The reflective confocal microscope based on perovskite detector according to claim 4, characterized in that: The reflective confocal microscope also includes a data acquisition card, which is used to drive the X-axis galvanometer and the Y-axis galvanometer, and collect signals obtained by scanning the X-axis galvanometer and the Y-axis galvanometer; The X-axis galvanometer is driven by a high-frequency triangle wave signal emitted by the data acquisition card, and the Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card.

6. The reflective confocal microscope based on perovskite detector according to claim 5, characterized in that: The mirror angles of the X-axis galvanometer and the Y-axis galvanometer can be adjusted.

7. The reflective confocal microscope based on perovskite detector according to claim 6, characterized in that: A pinhole is further provided between the focusing lens and the perovskite detector. The distance between the pinhole and the focusing lens is 100 mm, and the light transmission diameter of the pinhole is 50 μm. The pinhole is used for spatial filtering of the confocal sample scanning signal.

8. The reflective confocal microscope based on perovskite detector according to claim 7, characterized in that: The focal length of the focusing lens is 100 mm, so as to focus the sample scanning signal.

9. The reflective confocal microscope based on perovskite detector according to claim 8, characterized in that: The perovskite detector is used to convert the sample scanning signal into a voltage signal, and read the voltage signal through the data acquisition card to generate a confocal two-dimensional image or a confocal three-dimensional image.

Images