Detection device and detection method of detection device

Abstract

The invention discloses a detection device and a detection method of the detection device. The detection device comprises a rack; the moving platform is arranged on the rack and comprises a first moving assembly and a second moving assembly, the first moving assembly can move in the first direction relative to the rack, the second moving assembly is arranged on the first moving assembly and can move in the second direction relative to the first moving assembly, and the second direction is perpendicular to the first direction; the second moving assembly is suitable for placing a to-be-measured object; the defect detection parts are arranged on the rack, and the defect detection parts are arranged on at least one side of the moving platform in the third direction at intervals so as to detect surface defects of the object to be detected. Therefore, the defect detection piece is arranged to perform surface defect detection on the to-be-detected object, and the mobile platform is arranged to drive the to-be-detected object to move on the plane parallel to the first direction and the second direction, so that the automation of defect detection of the to-be-detected object can be realized, the detection efficiency can be improved, and the labor cost can be reduced.

Description

Technical Field

[0001] The present invention relates to the field of detection technology, and in particular to a detection device and a detection method thereof. Background Art

[0002] In the semiconductor industry, an ingot is a columnar crystal material. In the semiconductor production process, defects are inevitable in the ingot. When the defective ingot flows into the next process, it will cause a waste of production resources and costs. Therefore, timely detection of defective ingots is of great significance to reducing the cost of semiconductor production.

[0003] In the prior art, the inspection of ingots is basically based on manual visual inspection. Each inspector has different experience and attention, and the efficiency is low, which does not meet the requirements of large-scale mass production of ingots. Therefore, an efficient and consistent defect detection method is needed. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a detection device, which can improve the defect detection efficiency of the object to be detected.

[0005] The present invention further provides a detection method for a detection device.

[0006] According to an embodiment of the present invention, the detection device includes: a frame; a mobile platform, which is arranged on the frame and includes a first mobile component and a second mobile component, the first mobile component can move along a first direction relative to the frame, the second mobile component is arranged on the first mobile component and can move along a second direction relative to the first mobile component, the second direction is perpendicular to the first direction, and the second mobile component is suitable for placing an object to be detected; a defect detection component, which is arranged on the frame, and the defect detection component is spaced apart on at least one side of the third direction of the mobile platform to detect surface defects of the object to be detected.

[0007] Therefore, by setting up a defect detection component to perform surface defect detection on the object to be tested, and setting up a mobile platform to drive the object to be tested to move on a plane parallel to the first direction and the second direction, the automation of defect detection of the object to be tested can be achieved, the detection efficiency can be improved, and the labor cost can be reduced.

[0008] According to some embodiments of the present invention, the defect detection component includes a first image sensor, which is disposed on the frame and spaced apart at a first side of the mobile platform in a third direction.

[0009] According to some embodiments of the present invention, the defect detection component further includes a second image sensor, which is disposed on the frame and spaced apart at a second side of the mobile platform in the third direction.

[0010] According to some embodiments of the present invention, the detection device further includes a light source, which is disposed on the frame and located between the mobile platform and the first image sensor; and / or the light source is located between the mobile platform and the second image sensor.

[0011] According to some embodiments of the present invention, the detection device further includes a controller, and the controller is signal-connected to the first moving component, the second moving component, the first image sensor, the second image sensor, and the light source.

[0012] According to some embodiments of the present invention, the first moving component includes a first platform member and a first driving member, the frame is provided with a first slide rail extending in a first direction, the first platform member is slidably matched with the first slide rail, and the first driving member is located on the frame and is transmission-connected to the first platform member.

[0013] According to some embodiments of the present invention, the second moving component includes a second platform member and a second driving member, the first platform member is provided with a second slide rail extending in a second direction, the second platform member is slidably matched with the second slide rail, and the second driving member is located on the first platform member and is transmission-connected to the second platform member.

[0014] According to some embodiments of the present invention, a supporting member is provided on the second movable assembly. There are multiple supporting members, and the multiple supporting members are circumferentially spaced apart on the second movable assembly to form a placement area, and the placement area is suitable for placing the object to be measured.

[0015] The detection method of the detection device according to the embodiment of the present invention is applicable to the detection device described above, and includes the following steps: placing the object to be detected on the second moving component; controlling the first moving component to operate, and / or controlling the second moving component to operate, so that the object to be detected moves to the image acquisition point of the first image sensor; controlling the first image sensor to acquire an image of the first side of the third direction of the object to be detected; controlling the first moving component to operate, and / or controlling the second moving component to operate, so that the object to be detected moves to the image acquisition point of the second image sensor; controlling the second image sensor to acquire an image of the second side of the third direction of the object to be detected; and judging the surface defect result of the object to be detected based on the images on both sides of the third direction of the object to be detected.

[0016] According to some embodiments of the present invention, the step of controlling the first moving component to operate, and / or controlling the second moving component to operate, so that the object to be measured moves to the image acquisition point of the first image sensor also includes: controlling the first moving component to operate, and / or controlling the second moving component to operate, so that the object to be measured tracks along a preset path, and at the same time controlling the first image sensor to collect a contour image of the first side of the object to be measured in the third direction through interpolation.

[0017] According to some embodiments of the present invention, the step of controlling the first moving component to operate, and / or controlling the second moving component to operate, so that the object to be measured moves to the image acquisition point of the second image sensor also includes: controlling the first moving component to operate, and / or controlling the second moving component to operate, so that the object to be measured follows a preset path, and at the same time controlling the second image sensor to collect the contour image of the second side of the object to be measured in the third direction through interpolation.

[0018] According to some embodiments of the present invention, the preset path is spiral; or the preset path includes multiple first straight line paths, multiple first straight line paths are staggered with each other, and the intersection of the multiple first straight line paths is the center of the object to be measured; or the preset path includes multiple concentric circle paths, multiple concentric circle paths are radially spaced, and the center of the multiple concentric circle paths is the center of the object to be measured; or the preset path includes multiple second straight line paths and multiple zigzag paths, multiple second straight line paths extend in the first direction, multiple second straight line paths are spaced from each other in the second direction, the zigzag path is connected between one end of two adjacent second straight line paths in the first direction, and two adjacent zigzag paths are spaced from each other in the second direction and are relatively arranged in the first direction.

[0019] According to some embodiments of the present invention, before the step of controlling the first image sensor to capture the image of the first side of the object to be measured in the third direction, the step further includes: adjusting the light intensity and wavelength of the light source.

[0020] According to some embodiments of the present invention, before the step of controlling the second image sensor to capture the image of the second side of the object to be measured in the third direction, the step further includes: adjusting the light intensity and wavelength of the light source.

[0021] According to some embodiments of the present invention, the method of judging the surface defect result of the object to be tested based on the images on both sides of the third direction of the object to be tested also includes: analyzing the surface image data of the first side of the third direction and the second side of the third direction of the object to be tested; modeling the data analysis results in a visual manner and displaying them on a billboard system.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0024] Figure 1 is a schematic diagram of a detection device according to an embodiment of the present invention;

[0025] Figure 2 is a partial schematic diagram of a detection device according to an embodiment of the present invention;

[0026] Figure 3 is a schematic diagram of a preset path according to a first embodiment of the present invention;

[0027] Figure 4 is a schematic diagram of a preset path according to a second embodiment of the present invention;

[0028] Figure 5 is a schematic diagram of a preset path according to a third embodiment of the present invention;

[0029] Figure 6 is a schematic diagram of a preset path according to a fourth embodiment of the present invention;

[0030] Figure 7 is a partial flow chart of a detection method of a detection device according to an embodiment of the present invention;

[0031] Figure 8 is a flow chart of a detection method of a defect detection module of a detection device according to an embodiment of the present invention;

[0032] Fig. 9 is a flow chart of a detection method of a surface fitting module of a detection device according to an embodiment of the present invention.

[0033] Reference numerals:

[0034] 100. detection device; 200. object to be detected;

[0035] 10. Rack; 11. First slide rail;

[0036] 20. Mobile platform;

[0037] 21, first moving assembly; 211, first platform member; 2111, second slide rail; 212, first driving member; 213, first screw member;

[0038] 22. second moving assembly; 221. second platform member; 222. second driving member; 223. supporting member; 224. placement area; 225. second screw member;

[0039] 30. Defect detection member; 31. First image sensor; 32. Second image sensor;

[0040] 40. Light source components;

[0041] 50. Preset path; 51. First straight line path; 52. Concentric circle path; 53. Second straight line path; 54. Broken line path. DETAILED DESCRIPTION

[0042] Embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. Embodiments of the present invention are described in detail below.

[0043] Reference below Figure 1-Figure 2 The detection device 100 according to an embodiment of the present invention is described. The detection device 100 of the present invention is configured with a detection method of the detection device 100 .

[0044] Combination Figure 1-Figure 2 As shown, the detection device 100 according to the embodiment of the present invention may mainly include: a frame 10, a mobile platform 20 and a defect detection member 30, wherein the mobile platform 20 is arranged on the frame 10, and includes a first moving component 21 and a second moving component 22. Specifically, the frame 10 can provide support for the mobile platform 20, and can ensure that the mobile platform 20 runs stably on the frame 10. The second moving component 22 in the mobile platform 20 can be used to place the object to be detected 200, so that the object to be detected 200 and the second moving component 22 can move simultaneously.

[0045] Further, the second moving component 22 is arranged on the first moving component 21, and can move along the second direction relative to the first moving component 21, so that the object to be measured 200 can be driven to move along the second direction, and the first moving component 21 can move along the first direction relative to the frame 10, so that the first moving component 21 can drive the second moving component 22 to move along the first direction, and then the object to be measured 200 can be moved along the first direction. In addition, the second direction is perpendicular to the first direction, and such a setting can make the object to be measured 200 move on a plane parallel to the first direction and the second direction.

[0046] Furthermore, the defect detection member 30 is arranged on the frame 10, so that the frame 10 can provide stable and reliable support for the defect detection member 30, and can ensure the structural stability and working reliability of the defect detection member 30 in the detection device 100. The defect detection member 30 is arranged at intervals on at least one side of the third direction of the mobile platform 20 to detect surface defects of the object to be detected 200. Specifically, in an embodiment of the present invention, the third direction is perpendicular to the first direction and the second direction. When the object to be detected 200 is placed on a plane parallel to the first direction and the second direction, the defect detection member 30 can perform defect detection on the first side or the second side of the third direction of the object to be detected 200, which will not interfere with the movement of the object to be detected 200 on the plane parallel to the first direction and the second direction, and can facilitate the detection device 100 to detect surface defects of the object to be detected 200.

[0047] Therefore, an embodiment of the present invention provides a detection device 100, on which a defect detection component 30 is arranged to perform surface defect detection on an object to be detected 200, and a mobile platform 20 is arranged to drive the object to be detected 200 to move on a plane parallel to the first direction and the second direction, thereby replacing the manual visual inspection method of semiconductor ingots in the prior art, which is conducive to realizing the automation of ingot defect detection. Such a setting can not only reduce labor costs and improve the standardization of material defect detection, but also improve the detection efficiency to meet the requirements of large-scale mass production of ingots.

[0048] Combination Figure 1 As shown, the defect detection member 30 includes a first image sensor 31, which is arranged on the frame 10 and is spaced apart on the first side of the third direction of the mobile platform 20. Specifically, the frame 10 can provide stable and reliable support for the first image sensor 31, and can ensure the structural stability and working reliability of the first image sensor 31 in the detection device 100. The first image sensor 31 is located on the first side of the third direction of the mobile platform 20, so that the first image sensor 31 can capture images of the first side of the third direction of the object to be tested 200, so as to perform defect detection on the surface of the first side of the third direction of the object to be tested 200. In an embodiment of the present invention, the first side of the third direction of the object to be tested 200 can be any one side surface of the first side or the second side of the object to be tested 200.

[0049] Combination Figure 1As shown, the defect detection member 30 further includes a second image sensor 32, which is disposed on the frame 10 and spaced apart on the second side of the third direction of the mobile platform 20. Specifically, the frame 10 can provide a stable and reliable support for the second image sensor 32, which can ensure the structural stability and working reliability of the second image sensor 32 in the detection device 100, thereby facilitating the improvement of the acquisition accuracy of the second image sensor 32. The second image sensor 32 is located on the second side of the third direction of the mobile platform 20, so that the second image sensor 32 can acquire images of the second side of the third direction of the object 200 to be tested, so as to perform defect detection on the surface of the second side of the third direction of the object 200 to be tested. In an embodiment of the present invention, the second side of the third direction of the object 200 to be tested can be any one side surface of the first side or the second side of the object 200 to be tested.

[0050] Combination Figure 1 As shown, the detection device 100 also includes a light source 40 , which is disposed on the frame 10 , and is located between the mobile platform 20 and the first image sensor 31 ; and / or between the mobile platform 20 and the second image sensor 32 .

[0051] Specifically, the light source 40 can emit illumination light to illuminate the surface of the object to be tested 200, so that the first image sensor 31 and the second image sensor 32 can capture clearer images of the surface of the object to be tested 200, which is beneficial to improving the accuracy of the detection device 100 in detecting surface defects of the object to be tested 200.

[0052] According to some embodiments of the present invention, the light source 40 is located between the mobile platform 20 and the first image sensor 31, so that the light source 40 can illuminate the first side surface of the object to be measured 200 in the third direction, thereby making the first image sensor 31 able to capture the image of the first side surface of the object to be measured 200 in the third direction clearer and more accurate.

[0053] According to some other embodiments of the present invention, the light source 40 is located between the mobile platform 20 and the second image sensor 32, so that the light source 40 can illuminate the second side surface of the object to be measured 200 in the third direction, thereby making the second image sensor 32 able to capture the image of the second side surface of the object to be measured 200 in the third direction clearer and more accurate.

[0054] According to some further embodiments of the present invention, the light source component 40 is located between the mobile platform 20 and the first image sensor 31, and the light source component 40 is also located between the mobile platform 20 and the first image sensor 31. In this way, the light source component 40 can illuminate the surfaces of the first side and the second side of the third direction of the object to be measured 200, thereby making the first image sensor 31 able to capture the image of the first side surface of the third direction of the object to be measured 200 clearer and more accurate, and making the second image sensor 32 able to capture the image of the second side surface of the third direction of the object to be measured 200 clearer and more accurate.

[0055] According to an embodiment of the present invention, the detection device 100 further comprises a controller, which is connected to the first moving assembly 21, the second moving assembly 22, the first image sensor 31, the second image sensor 32 and the light source 40 by signals. Specifically, the controller can receive and send signals to control the working state of the devices connected thereto. In an embodiment of the present invention, the controller is connected to the first moving assembly 21 by signals, so that the controller can send a control signal to the first moving assembly 21 and receive a feedback signal from the first moving assembly 21, so that the controller can control the first moving assembly 21 to move relative to the frame 10 along the first direction.

[0056] Furthermore, the controller is signal-connected to the second movable component 22 , so that the controller can send a control signal to the second movable component 22 and receive a feedback signal from the second movable component 22 , thereby enabling the controller to control the second movable component 22 to move in a second direction relative to the first movable component 21 .

[0057] In this way, the controller can be connected to the first moving component 21 and the second moving component 22 by signals, so that the object to be measured 200 can move freely on a plane parallel to the first direction and the second direction.

[0058] Furthermore, the controller is signal-connected to the first image sensor 31, so that the controller can send a control signal to the first image sensor 31 and receive a feedback signal from the first image sensor 31. In this way, the controller can control the first image sensor 31 to capture images of the first side surface of the object to be tested 200 in the third direction, and the first image sensor 31 can transmit the captured image data to the controller through a signal, so that the detection device 100 can collect and organize the image data of the first side surface of the object to be tested 200 in the third direction.

[0059] Furthermore, the controller is connected to the second image sensor 32 by signal, so that the controller can send a control signal to the second image sensor 32 and receive a feedback signal from the second image sensor 32. In this way, the controller can control the second image sensor 32 to capture images of the second side surface of the object to be measured 200 in the third direction, and the second image sensor 32 can transmit the captured image data to the controller through a signal, so that the detection device 100 can collect and organize the image data of the second side surface of the object to be measured 200 in the third direction.

[0060] Furthermore, the controller is also connected to the light source 40 by a signal, so that the controller can send a control signal to the light source 40, so that the wavelength and intensity of the light emitted by the light source 40 can be adjusted by the controller, so that the first image sensor 31 and / or the second image sensor 32 can clearly and accurately collect surface image data on both sides of the third direction of the object to be measured 200 in different light environments.

[0061] Combination Figure 2 As shown, the first moving component 21 includes a first platform member 211 and a first driving member 212. A first slide rail 11 extending in a first direction is provided on the frame 10. The first platform member 211 is slidably matched with the first slide rail 11. The first driving member 212 is located on the frame 10 and is transmission-connected to the first platform member 211.

[0062] Specifically, the rack 10 can provide stable and reliable support for the first slide rail 11, and can ensure the structural reliability of the first slide rail 11 on the rack 10. The first platform member 211 is disposed on the rack 10, and the first platform member 211 is slidably matched with the first slide rail 11, so that the first platform member 211 can slide on the first slide rail 11, and the first slide rail 11 extends along the first direction, so that the first slide rail 11 can limit the first platform member 211 to slide relative to the rack 10 along the first direction.

[0063] In an embodiment of the present invention, there are at least two first slide rails 11, and the two first slide rails 11 are spaced apart from each other in the second direction, so that the two first slide rails 11 can provide stable and reliable support for the first platform member 211, thereby ensuring the stability and reliability of the first platform member 211 when sliding relative to the frame 10 along the first direction, thereby facilitating ensuring the stability of the object to be measured 200 on the mobile platform 20.

[0064] Furthermore, the frame 10 can also provide stable and reliable support for the first driving member 212, and can ensure the reliability of the setting of the first driving member 212 on the detection device 100. The first driving member 212 is connected to the first platform member 211 in a transmission manner, so that the power output by the first driving member 212 can be transmitted to the first platform member 211, so as to drive the first platform member 211 to slide along the first direction relative to the frame 10 on the first slide rail 11, so that the mobile platform 20 can drive the object to be tested 200 to slide along the first direction on the detection device 100, so that the object to be tested 200 can be moved to the image acquisition point of the defect detection member 30, so that the first image sensor 31 and the second image sensor 32 can capture the surface images of both sides of the object to be tested 200 in the third direction.

[0065] In an embodiment of the present invention, the first driving member 212 and the first platform member 211 can be transmitted through the first screw member 213, and the first screw member 213 includes but is not limited to a ball screw. In this way, the first platform member 211 can be automatically moved without manual operation, which can save labor costs, and the moving distance can be accurately controlled.

[0066] Combination Figure 2 As shown, the second moving component 22 includes a second platform member 221 and a second driving member 222. The first platform member 211 is provided with a second slide rail 2111 extending in the second direction. The second platform member 221 slides with the second slide rail 2111. The second driving member 222 is located on the first platform member 211 and is transmission-connected to the second platform member 221.

[0067] Specifically, the first platform member 211 can provide stable and reliable support for the second slide rail 2111, and can ensure the structural reliability of the second slide rail 2111 on the first platform member 211. The second platform member 221 is disposed on the first platform member 211, and the second platform member 221 and the second slide rail 2111 are slidably matched, so that the second platform member 221 can slide on the second slide rail 2111, and the second slide rail 2111 extends along the second direction, so that the second slide rail 2111 can limit the second platform member 221 to slide relative to the first platform member 211 along the second direction.

[0068] In an embodiment of the present invention, there are at least two second slide rails 2111, and the two second slide rails 2111 are spaced apart from each other in the first direction, so that the two second slide rails 2111 can provide stable and reliable support for the second platform member 221, thereby ensuring the stability and reliability of the second platform member 221 when sliding relative to the first platform member 211 along the second direction, thereby facilitating ensuring the stability of the setting of the object to be measured 200 on the mobile platform 20.

[0069] Furthermore, the first platform member 211 can also provide stable and reliable support for the second driving member 222, and can ensure the reliability of the second driving member 222 on the detection device 100. The second driving member 222 is connected to the second platform member 221 in a transmission manner, so that the power output by the second driving member 222 can be transmitted to the second platform member 221, so as to drive the second platform member 221 to slide along the second direction on the second slide rail 2111 relative to the first platform member 211, so that the mobile platform 20 can drive the object to be tested 200 to slide along the second direction on the detection device 100, so that the object to be tested 200 can be moved to the image acquisition point of the defect detection member 30, so that the first image sensor 31 and the second image sensor 32 can capture images of the two side surfaces of the object to be tested 200 in the third direction.

[0070] In an embodiment of the present invention, the second driving member 222 and the second platform member 221 can be transmitted through the second screw member 225, and the second screw member 225 includes but is not limited to a ball screw. In this way, the second platform member 221 can be automatically moved without manual operation, which can save labor costs, and the moving distance can be accurately controlled.

[0071] Combination Figure 2 As shown, a support member 223 is provided on the second moving assembly 22, and there are multiple support members 223. The multiple support members 223 are circumferentially spaced on the second moving assembly 22 to form a placement area 224, and the placement area 224 is suitable for placing the object to be tested 200. Specifically, the support member 223 is located on the second moving assembly 22, and can be used to support and fix the object to be tested 200. When detecting surface defects of the object to be tested 200, the object to be tested 200 can be placed on the support member 223 of the second moving assembly 22 first, and the object to be tested 200 can be tightened by the support member 223, so that the structural stability of the object to be tested 200 during the movement process can be ensured.

[0072] Furthermore, in an embodiment of the present invention, there are multiple support members 223, and they are all circumferentially spaced apart on the second movable component 22, so that the object to be measured 200 can be fixed and clamped in the placement area 224 of the second movable component 22 by multiple support members 223, which can not only improve the position stability of the object to be measured 200 on the mobile platform 20, but also facilitate the controller of the detection device 100 to confirm the position of the object to be measured 200, so as to improve the structural accuracy of the detection device 100 in detecting surface defects of the object to be measured 200.

[0073] Combine the following Figure 3-Figure 9 The detection method of the detection device 100 according to the embodiment of the present invention is described. The detection method of the detection device 100 according to the embodiment of the present invention is applicable to the detection device 100. The detection method of the detection device 100 according to the embodiment of the present invention comprises the following steps:

[0074] S1, placing the object to be tested 200 on the second moving component 22;

[0075] S2, controlling the first moving component 21 to operate, and / or controlling the second moving component 22 to operate, so that the object to be measured 200 moves to the image acquisition point of the first image sensor 31;

[0076] S4, controlling the first image sensor 31 to capture an image of a first side of the object to be measured 200 in the third direction;

[0077] S5, controlling the first moving component 21 to operate, and / or controlling the second moving component 22 to operate, so that the object to be measured 200 moves to the image acquisition point of the second image sensor 32;

[0078] S7, controlling the second image sensor 32 to collect an image of the second side of the object to be measured 200 in the third direction;

[0079] S8. Determine the surface defect result of the object 200 to be tested based on the images on both sides of the object 200 to be tested in the third direction.

[0080] Specifically, when using the detection device 100 to detect surface defects of the object to be detected 200, it is necessary to first place the object to be detected 200 in the placement area 224 on the second movable component 22. In order to reduce labor costs, in an embodiment of the present invention, an external auxiliary handling system (including but not limited to a robotic arm) is used to place the object to be detected 200 on the mobile platform 20, and multiple support members 223 clamp and fix the object to be detected 200.

[0081] In one embodiment of the present invention, when the detection method of the detection device 100 runs step S2, the controller sends an instruction to at least one of the first moving component 21 and the second moving component 22 to make the first moving component 21 slide along the first direction relative to the frame 10, and / or make the second moving component 22 slide along the second direction relative to the first moving component 21, so that the mobile platform 20 can drive the object to be tested 200 to move on a plane parallel to the first direction and the second direction until the object to be tested 200 moves to the image acquisition point of the first image sensor 31.

[0082] Further, the controller sends an instruction to the first image sensor 31 so that the first image sensor 31 captures images of the surface of the first side in the third direction of the object to be tested 200, including capturing defects on the surface of the first side in the third direction of the object to be tested 200, and the first image sensor 31 transmits the captured image data to the controller.

[0083] In another embodiment of the present invention, step S2 further includes:

[0084] S2-1, control the first moving component 21 to operate, and / or control the second moving component 22 to operate, so that the object to be measured 200 follows the preset path 50, and at the same time control the first image sensor 31 to collect the contour image of the first side of the object to be measured 200 in the third direction through interpolation.

[0085] Specifically, in an embodiment of the present invention, the first image sensor 31 can also use a tracking and interpolation method to collect the surface image of the first side of the third direction of the object to be measured 200. When the first image sensor 31 collects the image of the first side surface of the third direction of the object to be measured 200, the controller can send instructions to the first moving component 21 and / or the second moving component 22 to make the first moving component 21 slide along the first direction relative to the frame 10, and / or make the second moving component 22 slide along the second direction relative to the first moving component 21, so that the mobile platform 20 can drive the object to be measured 200 to move on a plane parallel to the first direction and the second direction, so that the object to be measured 200 can be tracked according to the preset path 50 of the controller.

[0086] At the same time, the first image sensor 31 interpolates and samples points on the preset path 50 to collect the contour image of the first side of the third direction of the object 200 to be tested until the tracking of the object 200 to be tested is completed. The first image sensor 31 stops collecting. A highly realistic image of the first side surface of the third direction of the object 200 to be tested can be obtained through tracking and interpolation, so that the detection device 100 can judge the defects of the first side surface of the third direction of the object 200 to be tested.

[0087] It should be noted that, in the detection method of the detection device 100, when the first image sensor 31 is used to capture images of the surface of the first side of the third direction of the object 200 to be detected, step S2-1 can be selectively executed, and the surface contour of the first side of the third direction of the object 200 to be detected can be fitted through step S2-1.

[0088] In one embodiment of the present invention, when the detection method of the detection device 100 runs step S5, the controller sends an instruction to at least one of the first movable component 21 and the second movable component 22 to make the first movable component 21 slide along the first direction relative to the frame 10, and / or make the second movable component 22 slide along the second direction relative to the first movable component 21, so that the mobile platform 20 can drive the object to be measured 200 to move on a plane parallel to the first direction and the second direction until the object to be measured 200 moves to the image acquisition point of the second image sensor 32.

[0089] Furthermore, the controller sends an instruction to the second image sensor 32 so that the second image sensor 32 captures images of the surface of the second side in the third direction of the object to be tested 200, including capturing defects on the surface of the second side in the third direction of the object to be tested 200, and the second image sensor 32 transmits the captured image data to the controller.

[0090] Furthermore, after the controller receives the image data transmitted from the first image sensor 31 and the image data transmitted from the second image sensor 32 , the surface of the object to be tested 200 can be detected and judged based on the received image data to obtain the surface defect result of the object to be tested 200 .

[0091] In another embodiment of the present invention, step S5 further includes:

[0092] S5-1, control the first moving component 21 to operate, and / or control the second moving component 22 to operate, so that the object to be measured 200 follows the preset path 50, and at the same time control the second image sensor 32 to collect the contour image of the second side of the object to be measured 200 in the third direction through interpolation.

[0093] Specifically, in an embodiment of the present invention, the second image sensor 32 can also use a tracking and interpolation method to collect the surface image of the second side of the third direction of the object to be measured 200. When the second image sensor 32 collects the image of the second side surface of the third direction of the object to be measured 200, the controller can send a command to the first moving component 21 and / or the second moving component 22 to make the first moving component 21 slide along the first direction relative to the frame 10, and / or make the second moving component 22 slide along the second direction relative to the first moving component 21, so that the mobile platform 20 can drive the object to be measured 200 to move on a plane parallel to the first direction and the second direction, so that the object to be measured 200 can be tracked according to the preset path 50 of the controller.

[0094] At the same time, the second image sensor 32 interpolates and samples points on the preset path 50 to collect the contour image of the second side of the third direction of the object 200 to be tested until the tracking of the object 200 to be tested is completed. The second image sensor 32 stops collecting. A highly realistic image of the second side surface of the third direction of the object 200 to be tested can be obtained through tracking and interpolation, so that the detection device 100 can judge the defects of the second side surface of the third direction of the object 200 to be tested.

[0095] It should be noted that, in the detection method of the detection device 100, when the second image sensor 32 is used to capture images of the surface of the second side of the third direction of the object 200 to be detected, step S5-1 can be selectively executed, and the surface contour of the second side of the third direction of the object 200 to be detected can be fitted through step S5-1.

[0096] In the detection method of the detection device 100, the surface defect detection of the object to be detected 200 can be completed automatically, which can avoid the tedious manual operation in the manual visual inspection method, significantly improve the detection efficiency, and reduce the detection cost.

[0097] According to a first embodiment of the present invention, Figure 3 As shown, when executing step S2-1 or S5-1, the preset path 50 is spiral. Specifically, in the embodiment of the present invention, the preset path 50 can be an Archimedean spiral, that is, a constant velocity spiral, and the defect detection component 30 uses the Archimedean spiral equation as the interpolation path to collect images of the surface of the object to be tested 200. This method starts from the initial position and gradually moves away from the initial position as the angle changes. The asymmetry and continuity of its distribution are conducive to fitting the surface contour of the object to be tested 200.

[0098] According to a second embodiment of the present invention, Figure 4 As shown, when running step S2-1 or S5-1, the preset path 50 includes a plurality of first straight line paths 51, and the plurality of first straight line paths 51 are staggered with each other, and the intersection of the plurality of first straight line paths 51 is the center of the object to be measured 200, so that the plurality of first straight line paths 51 are radial. The preset path 50 in this embodiment is relatively simple, and the defect detection part 30 can scan most of the contours of the surface of the object to be measured 200, but it takes a long time.

[0099] According to a third embodiment of the present invention, Figure 5 As shown, when running step S2-1 or S5-1, the preset path 50 includes a plurality of concentric circle paths 52, and the plurality of concentric circle paths 52 are radially spaced apart, and the center of the plurality of concentric circle paths 52 is the center of the object to be tested 200. In this way, the defect detection part 30 can use the concentric circle as the preset path 50 to interpolate and sample points for the object to be tested 200, especially for the cylindrical object to be tested 200, its surface contour can be better obtained.

[0100] According to a fourth embodiment of the present invention, Figure 6 As shown, when running step S2-1 or S5-1, the preset path 50 includes a plurality of second straight line paths 53 and a plurality of fold line paths 54, the plurality of second straight line paths 53 are extended in the first direction, the plurality of second straight line paths 53 are spaced apart from each other in the second direction, a fold line path 54 is connected between one end of two adjacent second straight line paths 53 in the first direction, and two adjacent fold line paths 54 are spaced apart from each other in the second direction and are arranged relative to each other in the first direction.

[0101] In another embodiment of the embodiments of the present invention, the preset path 50 includes a plurality of second straight line paths 53 and a plurality of fold line paths 54, the plurality of second straight line paths 53 are extended in the second direction, the plurality of second straight line paths 53 are spaced apart from each other in the first direction, a fold line path 54 is connected between one end of two adjacent second straight line paths 53 in the second direction, and two adjacent fold line paths 54 are spaced apart from each other in the first direction and are arranged relative to each other in the second direction.

[0102] With such a configuration, the preset path 50 in this embodiment may be an arcuate broken line interpolation route, which can reduce useless movement while capturing the surface contour of the object to be measured 200, thereby reducing the image capture time.

[0103] It should be noted that the preset path 50 can be selected and set according to the actual detection requirements of the object to be detected 200. The preset path 50 of the controller of the detection device 100 in the present invention includes but is not limited to the above four embodiments.

[0104] Combination Figure 7 As shown, before step S4, it also includes:

[0105] S3. Adjust the light intensity and wavelength of the light source 40.

[0106] Specifically, the light source 40 can emit illumination light to illuminate the surface of the object to be measured 200. The controller can issue instructions to the light source 40 to adjust the illumination light to a suitable wavelength and intensity, so that the first image sensor 31 can capture an image of the first side of the object to be measured 200 in the third direction.

[0107] Combination Figure 7 As shown, before step S7, the following steps are also included:

[0108] S6. Adjust the light intensity and wavelength of the light source 40.

[0109] Specifically, the light source 40 can emit illumination light to illuminate the surface of the object to be measured 200. The controller can issue instructions to the light source 40 to adjust the illumination light to a suitable wavelength and intensity, so that the second image sensor 32 can capture the image of the second side of the object to be measured 200 in the third direction.

[0110] Combination Figure 7 As shown, step 8 also includes:

[0111] S8-1, analyzing the surface image data of the first side of the third direction and the second side of the third direction of the object to be measured 200;

[0112] S8-2. Model the data analysis results in a visual way and display them on the dashboard system.

[0113] Specifically, the controller analyzes the image data on both sides of the third direction of the object 200 to be tested collected by the first image sensor 31 and the second image sensor 32, models it in a visual manner, and displays it on the billboard system, so that the detection results can be visualized and can be easily viewed with the naked eye.

[0114] In an embodiment of the present invention, the controller includes a defect detection module, which can automatically determine the surface defects on both sides of the third direction of the object 200 to be tested. The controller also includes a surface fitting module, which can fit the surface image on both sides of the third direction of the object 200 to be tested according to the image data collected by the second image sensor 32, and automatically count and record the defects, and then output the analysis results.

[0115] According to an embodiment of the present invention, the controller can monitor whether the placement area 224 on the mobile platform 20 is empty through a sensor, and if there is still an object 200 to be tested on the placement area 224, the controller controls the system to wait. When the controller detects that the placement area 224 is empty, the scheduling system of the controller sends a signal to the external auxiliary handling system to enable the robot arm to automatically place the object 200 to be tested in the placement area 224.

[0116] Furthermore, the controller simultaneously sends instructions to the first moving component 21, the second moving component 22, the light source 40, the first image sensor 31 and the second image sensor 32, so that the first moving component 21, the second moving component 22, the light source 40, the first image sensor 31 and the second image sensor 32 can work in coordination, and then the surface of the object 200 to be tested is imaged, and the image data collected are respectively input into the defect detection module and the surface fitting module, and the surface fitting module fits the surface contour of the object 200 to be tested, and the defect detection module marks the defects of the object 200 to be tested, and outputs the detection results, and finally the visualization module summarizes the data of the defect detection module and the surface fitting module, and displays the processed image data in a visual manner on the interface of the billboard system for analysis. At the same time, the detection device 100 can save and manage the detection results and the contour data of the object 200 to be tested.

[0117] Combination Figure 8 As shown, the detection method of the defect detection module in the embodiment of the present invention is as follows:

[0118] S9, using the image of the first side of the object to be measured 200 in the third direction captured by the first image sensor 31 as module data;

[0119] S10, cleaning and preprocessing the data, including but not limited to denoising, contrast enhancement and normalization, to enhance the image to facilitate subsequent defect extraction;

[0120] S11. Mark and extract features that are helpful in distinguishing defects from normal ones from the preprocessed images;

[0121] S12, using the extracted features as a training set, training the defect detection module through deep learning and neural network methods;

[0122] S13. Take out some untrained data, input them into the trained model after preprocessing, and compare and verify with the results of manual judgment. If the effect is good, it can be packaged as an automatic judgment model. If the effect is not good enough, return to modify the parameters and retrain;

[0123] S14. Apply the trained model to the hardware system of the instance, identify and locate defects in the actually collected images, analyze the detected defects, and output the type of defects.

[0124] Combination Fig. 9 As shown, the detection method of the surface fitting module in the embodiment of the present invention is as follows:

[0125] S15, using the contour data of the second side of the third direction of the object to be measured 200 collected by the second image sensor 32 as input data of the module;

[0126] S16, cleaning and screening the data collected by the second image sensor 32, including but not limited to removing noise points, flying points and data points with large errors in the data;

[0127] S17, select a suitable interpolation model for plane fitting, which may be the least squares method, moving least squares method, robust regression method or radial basis function method;

[0128] S18, estimating various parameters of the entire plane function according to the selected model, for example, using the least squares method to obtain the plane equation z=ax+by+c, it is necessary to find the parameter value that minimizes the sum of the vertical distances of all points to the plane;

[0129] S19. Display the fitted plane equation on the system interface and perform surface profile analysis.

[0130] The detection method of the detection device 100 of the embodiment of the present invention is suitable for the automated detection of multiple surface defects of the object 200 to be tested of different materials and sizes. Through the coordinated work of various modules, the full process automation of workstation vacancy detection, automatic material discharge, image acquisition, automatic defect detection, contour fitting and data visualization can be realized. At the same time, the detection device 100 is not limited to the structure shown in this application, and has significant technical effects and practical value.

[0131] In addition, through the detection device 100 and the detection method of the detection device 100 of the embodiment of the present invention, not only can the surface defect detection standard of the object to be tested 200 be unified, the consistency of the production process can be ensured, and the production efficiency can be improved, but also past data can be traced, so that problems in the previous process can be easily and quickly found and improved and optimized, which can solve the problems of loss and waste caused by the traditional method of saving meter reading record data.

[0132] Based on the innovative improvements of the above technologies, the present invention can realize the automation of the entire process from sampling, image acquisition, defect detection and contour modeling, and can perform visual analysis and detection of the system operation status and detection results, which can not only reduce costs and improve efficiency, but also provide a reference for subsequent production process improvements.

[0133] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0134] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A detection device, characterized in that: include: Frame (10); A mobile platform (20), the mobile platform (20) being arranged on the frame (10) and comprising a first mobile component (21) and a second mobile component (22), the first mobile component (21) being movable along a first direction relative to the frame (10), the second mobile component (22) being arranged on the first mobile component (21) and being movable along a second direction relative to the first mobile component (21), the second direction being perpendicular to the first direction, and the second mobile component (22) being suitable for placing an object to be measured (200); A defect detection piece (30) is arranged on the frame (10), and the defect detection piece (30) is arranged at intervals on at least one side of the third direction of the mobile platform (20) to detect surface defects of the object to be detected (200).

2. The detection device according to claim 1, characterized in that: The defect detection component (30) comprises a first image sensor (31), wherein the first image sensor (31) is arranged on the frame (10) and is spaced apart on a first side of the third direction of the mobile platform (20).

3. The detection device according to claim 2, characterized in that: The defect detection component (30) further comprises a second image sensor (32), wherein the second image sensor (32) is arranged on the frame (10) and is spaced apart on a second side of the third direction of the moving platform (20).

4. The detection device according to claim 3, characterized in that: It also includes a light source component (40), which is arranged on the frame (10), and the light source component (40) is located between the mobile platform (20) and the first image sensor (31); and / or the light source component (40) is located between the mobile platform (20) and the second image sensor (32).

5. The detection device according to claim 4, characterized in that: It also includes a controller, which is signal-connected to the first moving component (21), the second moving component (22), the first image sensor (31), the second image sensor (32) and the light source component (40).

6. The detection device according to claim 1, characterized in that: The first moving component (21) comprises a first platform member (211) and a first driving member (212); a first slide rail (11) extending in a first direction is arranged on the frame (10); the first platform member (211) is slidably matched with the first slide rail (11); and the first driving member (212) is located on the frame (10) and is drivingly connected to the first platform member (211).

7. The detection device according to claim 6, characterized in that: The second moving component (22) comprises a second platform component (221) and a second driving component (222); a second slide rail (2111) extending in a second direction is provided on the first platform component (211); the second platform component (221) is slidably matched with the second slide rail (2111); and the second driving component (222) is located on the first platform component (211) and is transmission-connected to the second platform component (221).

8. The detection device according to claim 1, characterized in that: The second moving component (22) is provided with a supporting member (223), wherein the supporting member (223) is in plurality, and the plurality of supporting members (223) are circumferentially spaced apart on the second moving component (22) to form a placement area (224), wherein the placement area (224) is suitable for placing the object (200) to be measured.

9. A detection method for a detection device, applicable to the detection device (100) according to any one of claims 1 to 8, characterized in that: The following steps are involved: Placing the object to be tested (200) on the second moving assembly (22); Controlling the first moving component (21) to operate, and / or controlling the second moving component (22) to operate, so that the object to be measured (200) moves to an image acquisition point of the first image sensor (31); Controlling the first image sensor (31) to collect an image of a first side of the object to be measured (200) in a third direction; Controlling the first moving component (21) to operate, and / or controlling the second moving component (22) to operate, so that the object to be measured (200) moves to an image acquisition point of a second image sensor (32); controlling the second image sensor (32) to capture an image of a second side of the object to be measured (200) in a third direction; The surface defect result of the object to be tested (200) is judged based on the images on both sides of the object to be tested (200) in the third direction.

10. The detection method of the detection device according to claim 9, characterized in that: The step of controlling the first moving component (21) to operate, and / or controlling the second moving component (22) to operate, so as to move the object to be measured (200) to the image acquisition point of the first image sensor (31) further comprises: The first moving component (21) is controlled to operate, and / or the second moving component (22) is controlled to operate, so that the object to be measured (200) tracks along a preset path (50), and the first image sensor (31) is controlled to collect a contour image of a first side of the object to be measured (200) in a third direction through interpolation.

11. The detection method of the detection device according to claim 10, characterized in that: The step of controlling the first moving component (21) to operate, and / or controlling the second moving component (22) to operate, so as to move the object to be measured (200) to an image acquisition point of the second image sensor (32) further comprises: The first moving component (21) is controlled to operate, and / or the second moving component (22) is controlled to operate, so that the object to be measured (200) tracks along a preset path (50), and the second image sensor (32) is controlled to collect a contour image of the second side of the object to be measured (200) in a third direction through interpolation.

12. The detection method of the detection device according to claim 11, characterized in that: The preset path (50) is spiral; or The preset path (50) comprises a plurality of first straight paths (51), the plurality of first straight paths (51) are arranged in an interlaced manner, and the intersection of the plurality of first straight paths (51) is the center of the object to be measured (200); or The preset path (50) comprises a plurality of concentric circular paths (52), the plurality of concentric circular paths (52) are radially spaced apart, and the center of the plurality of concentric circular paths (52) is the center of the object to be measured (200); or The preset path (50) comprises a plurality of second straight line paths (53) and a plurality of folded line paths (54); the plurality of second straight line paths (53) are extended in the first direction; the plurality of second straight line paths (53) are spaced apart from each other in the second direction; the folded line path (54) is connected between one end of two adjacent second straight line paths (53) in the first direction; and the two adjacent folded line paths (54) are spaced apart from each other in the second direction and are arranged opposite to each other in the first direction.

13. The detection method of the detection device according to claim 9, characterized in that: Before the step of controlling the first image sensor (31) to collect an image of the first side of the object to be measured (200) in the third direction, the step further includes: The light intensity and wavelength of the light source (40) are adjusted.

14. The detection method of the detection device according to claim 9, characterized in that: Before the step of controlling the second image sensor (32) to collect an image of the second side of the object to be measured (200) in the third direction, the step further includes: The light intensity and wavelength of the light source (40) are adjusted.

15. The detection method of the detection device according to claim 9, characterized in that: The step of judging the surface defect result of the object to be tested (200) based on the images on both sides of the third direction of the object to be tested (200) further comprises: Analyzing surface image data of a first side in a third direction and a second side in a third direction of the object to be measured (200); The data analysis results are modeled in a visual way and displayed on the dashboard system.

Images