Moisture-resistant gas sensor for detecting marine ammonia fuel and preparation method of moisture-resistant gas sensor

Abstract

The invention relates to a moisture-resistant gas sensor for marine ammonia fuel detection and a preparation method of the moisture-resistant gas sensor. The moisture-resistant gas sensor comprises an electrode substrate and a gas sensitive part arranged on the electrode substrate, the gas sensitive part is a PrOx / In2O3 / WO3 composite film with a heterostructure and specifically comprises a WO3 film, an In2O3 film and a PrOx film which are sequentially attached to the electrode substrate; the surface of the PrOx / In2O3 / WO3 composite film is formed by arranging nano-particles, and gaps for gas adsorption and diffusion exist among the nano-particles. The preparation method comprises the following steps: sequentially carrying out magnetron sputtering on the surface of an electrode substrate to obtain a Pr / In2O3 / WO3 composite film, and then carrying out annealing treatment; and welding the annealed electrode substrate on a sensor base to obtain the moisture-resistant gas sensor. Compared with the prior art, the gas sensor prepared by the invention has excellent gas-sensitive selectivity on ammonia gas, excellent cycling stability, ideal repeatability and moisture resistance.

Description

Technical Field

[0001] The invention belongs to the technical field of gas sensors, and in particular relates to a moisture-resistant gas sensor for detecting marine ammonia fuel and a preparation method thereof. Background Art

[0002] The shipping industry is an important pillar of my country's national economy and plays a key role in the country's economic development. However, the shipping industry is also one of the main sources of greenhouse gas emissions worldwide. Traditional ships generally use heavy oil as the main fuel, resulting in a large amount of carbon oxides, sulfur oxides and nitrogen oxides being emitted into the atmosphere. In order to protect the environment and achieve sustainable economic development, the shipping industry is accelerating its transformation towards the use of clean energy.

[0003] Ammonia fuel is an important candidate for clean energy. Due to its convenience in transportation and storage, it has gradually become an ideal new marine fuel. However, ammonia is a volatile compound. The leakage of ammonia fuel may pose a serious safety threat to the human body. Long-term exposure to ammonia may cause discomfort symptoms such as coughing, chest tightness and difficulty breathing. In addition, ammonia is also explosive, and its lower explosion limit is 15%. Therefore, monitoring ammonia in the environment during fueling or navigation is of great significance to ensure the safe application of marine ammonia fuel. It is worth noting that the humidity and salinity in ports and offshore areas are high, and existing gas sensors are prone to corrosion and usually cannot meet the needs of practical applications. There is an urgent need to develop ammonia sensors for ports and offshore areas.

[0004] Gas sensors based on metal oxide semiconductors (MOS) have the characteristics of fast response, low power consumption, high stability, easy integration and corrosion resistance, and are widely considered to be a favorable choice for ammonia detection. However, the detection performance of MOS-based sensors is easily interfered by water vapor in the air. Especially in high humidity environments, the detection accuracy of the sensor will be significantly reduced, and it may even cause it to fail to work properly, seriously affecting the stability and reliability of MOS-based sensors. In addition, the gas composition in the port environment is complex, and multiple gases coexist in the air. In order to avoid missed alarms or false alarms, MOS-based gas sensors need to have excellent anti-interference capabilities for gases other than ammonia, which puts strict requirements on the selectivity of MOS-based sensors.

[0005] In summary, MOS-based ammonia sensors are usually easily interfered by water vapor in the environment and show poor humidity tolerance; at the same time, their cross-response characteristics to different gases lead to low selectivity. These problems seriously limit the practical application of MOS-based ammonia sensors in ports, docks and offshore areas.

[0006] Therefore, there is an urgent need to develop an ammonia sensor with good moisture resistance and high selectivity to detect the leakage of marine ammonia fuel, thereby ensuring the personal safety of terminal workers and crew members. Summary of the invention

[0007] The purpose of the present invention is to overcome the defects of existing MOS-based ammonia sensors that it is difficult to have both moisture resistance and high selectivity, and to provide a moisture-resistant gas sensor for detecting marine ammonia fuel and a preparation method thereof, so as to achieve efficient detection of marine ammonia fuel leakage.

[0008] The purpose of the present invention can be achieved by the following technical solutions:

[0009] The present invention provides a moisture-resistant gas sensor for detecting marine ammonia fuel, comprising an electrode substrate and a gas-sensitive portion arranged on the electrode substrate, wherein the gas-sensitive portion is a PrO2 having a heterogeneous structure. x / In2O3 / WO3 composite film, which specifically includes WO3 film, In2O3 film and PrO x film;

[0010] The PrO x The surface of the / In2O3 / WO3 composite film is composed of arranged nanoparticles, and there are gaps between the nanoparticles for gas adsorption and diffusion.

[0011] Furthermore, the PrO x Pr (praseodymium) oxides, which specifically include Pr2O3 and Pr6O 11 .

[0012] Furthermore, the PrO x The thickness of the film is 10-30nm.

[0013] Furthermore, the operating temperature of the moisture resistant gas sensor is 220-320°C.

[0014] Furthermore, the electrode substrate includes a gold electrode, a platinum wire, an alumina substrate and a heating electrode in sequence from top to bottom.

[0015] The present invention also provides a method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel, comprising the following steps:

[0016] S1: magnetron sputtering is performed on the surface of the electrode substrate using a WO3 target to deposit a WO3 thin film;

[0017] S2: magnetron sputtering is performed on the surface of WO3 film using In2O3 target to deposit In2O3 / WO3 composite film;

[0018] S3: magnetron sputtering is performed on the surface of the In2O3 / WO3 composite film using a Pr target to deposit a Pr / In2O3 / WO3 composite film;

[0019] S4: Annealing the electrode substrate with the Pr / In2O3 / WO3 composite film attached to obtain PrO x / In2O3 / WO3 composite film;

[0020] S5: The annealed electrode substrate is welded to the sensor base to obtain a PrO x / In2O3 / WO3 composite film is a moisture-resistant gas sensor with the gas sensitive part.

[0021] Furthermore, the WO3 target, In2O3 target and Pr target are all magnetron sputtered in an inert gas atmosphere.

[0022] Furthermore, the inert gas is argon.

[0023] Furthermore, the flow rate of the inert gas is 30-40 sccm.

[0024] Furthermore, in step S1, the sputtering power of the WO3 target is 75-85 W, preferably 80 W; the sputtering time is 15-25 min, preferably 20 min.

[0025] Furthermore, in step S2, the sputtering power of the In2O3 target is 45-55 W, preferably 50 W; the sputtering time is 5-15 min, preferably 10 min.

[0026] Furthermore, in step S3, the sputtering power of the Pr target is 25-35W, preferably 30W.

[0027] Furthermore, in step S3, the sputtering time of the Pr target is 1-9 min.

[0028] Furthermore, in step S4, the annealing temperature is 350-450° C., preferably 400° C.; the annealing time is 3-5 h, preferably 4 h.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] (1) The present invention prepares PrO by magnetron sputtering x The / In2O3 / WO3 composite film is a moisture-resistant gas sensor with excellent gas-sensitive selectivity for ammonia, reliable cycle stability, ideal repeatability and outstanding moisture resistance.

[0031] (2) The moisture-resistant gas sensor of the present invention improves the moisture resistance of the sensor by introducing the rare earth element praseodymium. The deposition of Pr gives the composite film surface an ideal hydrophobicity, thereby effectively improving the sensor's ammonia detection capability in a high relative humidity environment.

[0032] (3) PrO of the present invention x A heterostructure is formed between In2O3 and WO3 films, which significantly improves the sensitivity, selectivity, response speed and detection range of the gas sensor to ammonia and reduces the detection limit of the sensor to ammonia.

[0033] (4) PrO prepared by the present invention x The / In2O3 / WO3 composite film is composed of irregularly shaped nanoparticles connected to each other. There are a large number of gaps and cracks between the particles. These cracks provide channels for the diffusion of gas molecules in the sensitive film, which helps to improve the gas-sensitive detection performance of the sensor.

[0034] (5) The moisture-resistant gas sensor of the present invention has a lower detection limit. x The sensor of / In2O3 / WO3 composite film can detect 0.5ppm ammonia and has excellent selectivity for ammonia, which improves the accuracy of ammonia monitoring in practical applications.

[0035] (6) The preparation method of the moisture-resistant gas sensor of the present invention is simple to operate, safe and reliable, and has strong reproducibility, and is suitable for large-scale mass production.

[0036] (7) The moisture-resistant gas sensor prepared by the present invention effectively solves the problems of poor humidity tolerance and poor selectivity of existing MOS-based ammonia sensors. It is suitable for high relative humidity areas such as ports, docks and seas, and can realize the detection of marine ammonia fuel leakage, thereby effectively protecting the personal safety of dock workers and crew members. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 The PrO x Flow chart of the preparation method of / In2O3 / WO3 composite thin film gas sensor.

[0038] Figure 2 It is a schematic structural diagram of the moisture-resistant gas sensor of the present invention.

[0039] Figure 3 PrO prepared in Example 2 x Surface SEM (Scanning electron microscope) image of / In2O3 / WO3 composite film.

[0040] Figure 4This is a selectivity test graph of the sensors prepared in the comparative example and Examples 1-3 of the present invention to 100 ppm of ammonia, acetone, xylene, dichloromethane, methanol, ethanol and isopropanol.

[0041] Figure 5 This is a test graph of the response-recovery time of the sensor prepared in the comparative example and Example 2 of the present invention to 100 ppm ammonia at 280°C.

[0042] Figure 6 This is the 30-cycle response curve of the gas sensor of Example 2 of the present invention to 100 ppm ammonia.

[0043] Figure 7 This is a test diagram of the detection range of ammonia gas at 280°C for the sensor prepared in the comparative example of the present invention.

[0044] Figure 8 This is a test diagram of the detection range of ammonia gas at 280° C. for the gas sensor of Example 2 of the present invention.

[0045] Fig. 9 The figures are the moisture resistance test graph of the sensor prepared in the comparative example of the present invention and the contact angle test graph of the In2O3 / WO3 composite film.

[0046] Fig.10 The moisture resistance test diagram of the gas sensor of Example 2 of the present invention and the PrO x Contact angle test diagram of / In2O3 / WO3 composite film.

[0047] Description of the markings in the figure:

[0048] 1-PrO x film, 2-In2O3 film, 3-WO3 film, 4-gold electrode sheet, 5-alumina ceramic substrate, 6-platinum wire, 7-heating electrode, 8-sensor base. DETAILED DESCRIPTION

[0049] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process, but the protection scope of the present invention is not limited to the following embodiments.

[0050] Unless otherwise specified, the reagents, methods, instruments and equipment used in the present invention are conventional reagents, methods, instruments and equipment in the art. Unless otherwise specified, the reagents and materials used in the following examples are commercially available.

[0051] The planar electrode substrates in the following examples and comparative examples were purchased from Suzhou Myms Sensing Technology Co., Ltd., which include a gold electrode, a platinum wire, an alumina substrate and a heating electrode from top to bottom. Figure 2.

[0052] Embodiment 1:

[0053] This embodiment provides a moisture-resistant gas sensor for detecting marine ammonia fuel, such as Figure 1 As shown, the preparation method is as follows:

[0054] (1) Clean the surface of the planar electrode substrate with anhydrous ethanol and acetone to remove impurities on the surface of the planar electrode substrate, and let it stand and dry naturally after cleaning.

[0055] (2) The planar electrode substrate obtained in step (1) was pasted on an alumina substrate and fixed on the base of the chamber of a JCP350 high vacuum magnetron sputtering coating machine. A WO3 target (purity 99.99%) was used to sputter a WO3 film. The sputtering parameters were as follows: vacuum degree 8.0×10 -4 Pa, the high-purity argon gas flow rate is 33 sccm, the chamber sputtering pressure is 2.2 Pa, the sputtering power is 80 W, and the sputtering time is 20 min.

[0056] (3) Using an In2O3 target (purity 99.99%), an In2O3 film was sputtered on the surface of the planar electrode prepared in step (2), and the sputtering power was changed to 50 W and the sputtering time was changed to 10 min.

[0057] (4) Pr film was sputtered on the surface of the planar electrode prepared in step (3) using a Pr target (purity 99.9%), and the sputtering power was changed to 30 W and the sputtering time was changed to 1 min.

[0058] (5) annealing the planar electrode with the Pr / In2O3 / WO3 composite film obtained in step (4) at a temperature of 400°C for 4 hours in an air atmosphere, and allowing the electrode to cool naturally to room temperature after the annealing is completed to obtain PrO x / In2O3 / WO3 composite film.

[0059] (6) The PrO x The planar electrode substrate of the PrO / In2O3 / WO3 composite film is welded on the sensor base. x / In2O3 / WO3 composite film as a gas sensor with sensitive material.

[0060] Embodiment 2:

[0061] The method of this embodiment is basically the same as that of Embodiment 1, except that the sputtering time of the Pr target is 5 minutes.

[0062] Embodiment 3:

[0063] The method of this embodiment is basically the same as that of Embodiment 1, except that the sputtering time of the Pr target is 9 minutes.

[0064] Comparative Example:

[0065] This comparative example is a gas sensor whose gas sensing part is an In2O3 / WO3 composite film, and its preparation method is as follows:

[0066] (1) Clean the surface of the planar electrode substrate with anhydrous ethanol and acetone to remove impurities on the surface of the planar electrode substrate, and let it stand and dry naturally after cleaning.

[0067] (2) The planar electrode substrate obtained in step (1) was pasted on an alumina substrate and fixed on the base of the chamber of a JCP350 high vacuum magnetron sputtering coating machine. A WO3 target (purity 99.99%) was used to sputter a WO3 film. The sputtering parameters were as follows: vacuum degree 8.0×10 -4 Pa, the high-purity argon gas flow rate is 33 sccm, the chamber sputtering pressure is 2.2 Pa, the sputtering power is 80 W, and the sputtering time is 20 min.

[0068] (3) Using an In2O3 target (purity 99.99%), an In2O3 film was sputtered on the surface of the planar electrode prepared in step (2), and the sputtering power was changed to 50 W and the sputtering time was changed to 10 min.

[0069] (3) Annealing the planar electrode with the In2O3 / WO3 composite film obtained in step (4) at a temperature of 400°C for 4 hours in an air atmosphere, and allowing the electrode to cool naturally to room temperature after the annealing is completed.

[0070] (4) Welding the planar electrode substrate with the In2O3 / WO3 composite film obtained in step (3) onto the sensor base to obtain a gas sensor with the In2O3 / WO3 composite film as the sensitive material.

[0071] The present invention performs the following tests on Examples 1-3 and Comparative Examples:

[0072] (1) Morphology characterization: Scanning electron microscopy (SEM) was used to characterize the PrO x The surface morphology of / In2O3 / WO3 composite films was characterized.

[0073] (2) Ammonia response test: The performance test of the gas sensor is completed using the CGS-8 intelligent gas sensitive analysis system (Beijing Elite Technology Co., Ltd.). Ammonia water is injected into the evaporating dish inside the sealed box through a micro-liquid inlet, and is quickly volatilized by heating. Under the action of the built-in fan, the ammonia will quickly diffuse throughout the sealed box and fully react with the sensitive film. The sensitivity of the tested sensor can be calculated using the formula Ra / Rg. Ra is the resistance of the sensor in air, and Rg is the resistance of the sensor in ammonia. Repeating the above operations can complete the cyclic response test of the sensor. The response recovery time of the gas sensor is defined as the time required for the sensor resistance change to reach 90% after the introduction and discharge of ammonia.

[0074] (3) Gas selectivity test: The selectivity test of the gas sensor is completed by measuring the sensitivity of the sensor to ammonia and reference gases (acetone, xylene, dichloromethane, methanol, ethanol and isopropanol).

[0075] (4) Contact angle test: The contact angle (WCA) test was obtained by dropping deionized water on the composite film using a contact angle meter.

[0076] (5) Moisture resistance test: The moisture resistance test of the gas sensor is completed by changing the relative humidity (RH) in the sealed box. The relative humidity in the sealed box is changed by a humidifier and a dehumidifier, and is detected in real time by a hygrometer. When the relative humidity in the test box reaches the target value, humidification is stopped and ammonia water is injected. Ammonia gas is discharged after the test time is reached.

[0077] Figure 3 The PrO x Surface SEM image of Pr / In2O3 / WO3 composite film. It can be seen from the figure that the Pr / In2O3 / WO3 composite film is composed of many irregularly shaped nanoparticles connected to each other, and there are a large number of gaps and cracks between the particles. These cracks provide channels for the diffusion of gas molecules in the sensitive film, which helps to improve the gas-sensitive detection performance.

[0078] Figure 4The selectivity test results of the sensors prepared in the comparative examples and examples 1-3 of the present invention to 100 ppm of ammonia, acetone, xylene, dichloromethane, methanol, ethanol and isopropanol at an operating temperature of 280°C. The operating temperature is only the surface temperature of the electrode substrate and does not affect the ambient temperature during actual use. It can be seen that the sensitivity of the sensors prepared in the comparative examples and examples 1-3 to ammonia is significantly higher than that to other reference gases, and the sensitivity of the sensor prepared in example 2 to ammonia (20.95) is significantly higher than that of other examples and comparative examples (comparative example: 6.91, example 1: 15.02, example 3: 9.00), indicating that the sensor prepared in the present invention has excellent selectivity to ammonia.

[0079] Figure 5 PrO prepared in the comparative example of the present invention x / In2O3 / WO3 sensor and PrO prepared in Example 2 x The response recovery curve of the PrO / In2O3 / WO3 sensor to 100ppm ammonia at an operating temperature of 280℃. x The response / recovery rate of the / In2O3 / WO3 sensor is significantly higher than that of PrO x / In2O3 / WO3 sensor, which indicates that the deposition of Pr helps to enhance the adhesion of ammonia molecules in PrO x / In2O3 / WO3 composite film surface, thereby reducing the response-recovery time of the sensor.

[0080] Figure 6 The PrO prepared in Example 2 of the present invention x 30 cycles of response recovery curve of Pr / In2O3 / WO3 sensor to 100ppm ammonia at an operating temperature of 280℃. It can be seen from the figure that the sensitivity of the Pr / In2O3 / WO3 sensor did not show an obvious attenuation trend within 30 cycles, which indicates that it has good cycle response-recovery characteristics.

[0081] Figure 7The dynamic response-recovery curve of the In2O3 / WO3 sensor prepared in the comparative example of the present invention to 0.5-500ppm ammonia. It can be seen that the In2O3 / WO3 sensor is not sensitive to 0.5 and 1ppm ammonia. When detecting 3ppm ammonia, the In2O3 / WO3 sensor shows an obvious response signal, which indicates that the detection limit of the In2O3 / WO3 sensor to ammonia is 3ppm. In addition, with the increase of ammonia concentration, the sensitivity of the In2O3 / WO3 sensor shows a significant upward trend. When the ammonia concentration exceeds 200ppm, the sensitivity of the In2O3 / WO3 sensor increases slowly, which indicates that the adsorption sites on the surface of the In2O3 / WO3 composite film are close to saturation.

[0082] Figure 8 The PrO prepared in Example 2 of the present invention x Dynamic response-recovery curve of PrO / In2O3 / WO3 sensor to 0.5-500ppm ammonia. x The / In2O3 / WO3 sensor showed a clear response signal to 0.5ppm (sensitivity was 1.237), which indicated that PrO x / In2O3 / WO3 sensor can detect ammonia as low as 0.5ppm in actual detection applications. It is worth noting that even in a high concentration of ammonia atmosphere (greater than 200ppm), PrO x The sensitivity of the / In2O3 / WO3 sensor can still increase with the increase of ammonia concentration, which indicates that PrO x / In2O3 / WO3 sensor has a wider detection range.

[0083] Fig. 9 The moisture resistance test diagram of the In2O3 / WO3 sensor prepared in the comparative example of the present invention and the contact angle test diagram of the In2O3 / WO3 composite film. It can be seen that when the relative humidity rises from 50% to 90%, the sensitivity of the In2O3 / WO3 sensor decreases significantly, and the attenuation rate is 44.9%, which indicates that the In2O3 / WO3 sensor does not have moisture resistance. From the contact angle test results of the In2O3 / WO3 composite film, it can be seen that the contact angle of the surface of the In2O3 / WO3 composite film is 36.2°, showing hydrophilicity. In an environment with high relative humidity, water vapor in the air is easily adsorbed on the surface of the In2O3 / WO3 composite film in large quantities, reducing the sensitivity. Therefore, the In2O3 / WO3 sensor does not have moisture resistance.

[0084] Fig.10 The PrO prepared in Example 2 of the present invention x / In2O3 / WO3 sensor moisture resistance test chart and PrOx Contact angle test diagram of / In2O3 / WO3 composite film. Obviously, compared with the film without PrO deposition, x In2O3 / WO3 sensor, PrO x / In2O3 / WO3 sensor has better moisture resistance. When the relative humidity rises from 50% to 90%, the PrO x The attenuation of the PrO / In2O3 / WO3 sensor was significantly suppressed, with the attenuation rate being only 17.3%. x / In2O3 / WO3 composite film contact angle test diagram shows that PrO x The contact angle of the PrO / In2O3 / WO3 composite film is 115.9°, showing ideal hydrophobic properties. x The surface of the / In2O3 / WO3 composite film has a relatively small sensitivity attenuation. x / In2O3 / WO3 sensors have excellent humidity tolerance.

[0085] In summary, the present invention prepares PrO on a planar electrode substrate by magnetron sputtering. x / In2O3 / WO3 composite film, and finally a gas sensor with excellent gas sensing performance is obtained conveniently and quickly. x The / In2O3 / WO3 sensor has excellent gas-sensitive selectivity, excellent stability and ideal moisture resistance for ammonia. The unique microstructure of the film surface and the increase in oxygen vacancy concentration effectively improve the sensitivity, selectivity, moisture resistance and cycle stability of the sensor of the present invention. In addition, the preparation method of the present invention is simple and reliable, has strong reproducibility, and is suitable for large-scale production.

[0086] The above description of the embodiments is to facilitate the understanding and use of the invention by those skilled in the art. It is obvious that those skilled in the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without creative work. Therefore, the present invention is not limited to the above embodiments, and improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the present invention should be within the scope of protection of the present invention.

Claims

1. A moisture-resistant gas sensor for detecting marine ammonia fuel, comprising an electrode substrate and a gas-sensitive portion disposed on the electrode substrate, characterized in that: The gas sensing part is PrO with a heterostructure x / In2O3 / WO3 composite film, which specifically includes WO3 film, In2O3 film and PrO x film; The PrO x The surface of the / In2O3 / WO3 composite film is composed of arranged nanoparticles, and there are gaps between the nanoparticles for gas adsorption and diffusion.

2. A moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 1, characterized in that: The PrO x The thickness of the film is 10-30nm.

3. A moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 1, characterized in that: The operating temperature of the moisture resistant gas sensor is 220-320°C.

4. The moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 1, characterized in that: The electrode substrate comprises a gold electrode, a platinum wire, an alumina substrate and a heating electrode in sequence from top to bottom.

5. A method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel according to any one of claims 1 to 4, characterized in that: The following steps are involved: S1: magnetron sputtering is performed on the surface of the electrode substrate using a WO3 target to deposit a WO3 thin film; S2: magnetron sputtering is performed on the surface of WO3 film using In2O3 target to deposit In2O3 / WO3 composite film; S3: magnetron sputtering is performed on the surface of the In2O3 / WO3 composite film using a Pr target to deposit a Pr / In2O3 / WO3 composite film; S4: Annealing the electrode substrate with the Pr / In2O3 / WO3 composite film attached to obtain PrO x / In2O3 / WO3 composite film; S5: The annealed electrode substrate is welded to the sensor base to obtain a PrO x / In2O3 / WO3 composite film is a moisture-resistant gas sensor with the gas sensitive part.

6. The method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 5, characterized in that: The WO3 target, In2O3 target and Pr target are all magnetron sputtered in an inert gas atmosphere, and the flow rate of the inert gas is 30-40 sccm.

7. The method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 5, characterized in that: In step S1, the sputtering power of the WO3 target is 75-85W, and the sputtering time is 15-25min.

8. The method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 5, characterized in that: In step S2, the sputtering power of the In2O3 target is 45-55W, and the sputtering time is 5-15min.

9. The method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 5, characterized in that: In step S3, the sputtering power of the Pr target is 25-35 W, and the sputtering time is 1-9 min.

10. The method for preparing a moisture-resistant gas sensor for detecting marine ammonia fuel according to claim 5, characterized in that: In step S4, the annealing temperature is 350-450° C., and the annealing time is 3-5 hours.

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