Transmission control method and system of FOUP transmission system and industrial personal computer

Abstract

The invention discloses a conveying control method and system of an FOUP conveying system and an industrial personal computer. The conveying control method comprises the steps that whether an FOUP is placed in each conveying device used for being in butt joint with a crown block and / or in butt joint with a material storage device or not is determined in real time; when it is determined that the FOUP is placed in the conveying equipment, the conveying equipment is defined as a starting point; when the starting point is the conveying device used for being in butt joint with the crown block or the material storage device, an optimal conveying path is determined according to the attribute of object configuration corresponding to the conveying device in a two-dimensional map so that the FOUP can be conveyed to the conveying device used for being in butt joint with the material storage device or the crown block; and according to the determined optimal transmission path, controlling the transmission equipment on the optimal transmission path to work so as to enable the FOUP to be transmitted to the end point of the optimal transmission path. According to the method, different control programs do not need to be developed for different scenes, the development cost is greatly reduced, and the equipment universality is improved.

Description

Technical Field

[0001] The present invention relates to the field of automatic handling equipment, in particular to a conveying control method, system and industrial computer of a FOUP conveying system. Background Art

[0002] In semiconductor processing, a FOUP transfer system is installed between an OHT (Overhead Hoist Transport) and a stocker to automatically transfer the FOUP (Overhead Hoist Transport) between the OHT and the stocker.

[0003] The FOUP conveying system realizes the conveying of FOUPs through a series of conveying equipment arranged according to predetermined needs, and usually uses PLC as the main control to control each conveyor. Due to the limitation of PLC's process-oriented programming concept, the layout of conveying equipment will be different for different on-site environments. Therefore, PLC needs to develop different control programs to meet the control requirements, which greatly increases the time and labor costs of development and reduces the on-site application efficiency of the equipment. Summary of the invention

[0004] The purpose of the present invention is to solve the above problems existing in the prior art and to provide a transport control method, system and industrial computer for a FOUP transport system.

[0005] The purpose of the present invention is achieved through the following technical solutions: The transmission control method of the FOUP transmission system is controlled by an industrial computer, and the transmission control method includes the following steps: Determine in real time whether each conveying device for docking with the overhead crane is placed with a FOUP by the overhead crane and / or whether each conveying device for docking with the material storage device is placed with a FOUP by the material storage device; When it is determined that a FOUP is placed on a conveying device for docking with an overhead crane by the overhead crane and / or a FOUP is placed on a conveying device for docking with a storage device by the storage device, the conveying device for docking with the overhead crane or the storage device is defined as the starting point; when the starting point is the conveying device for docking with the overhead crane, an optimal conveying path is determined according to the coordinates of each conveying device in a one-dimensional matrix map and the attributes of the object configuration corresponding to each conveying device in the one-dimensional map to convey the FOUP from the starting point to a conveying device for docking with a storage device; when the starting point is the conveying device for docking with a storage device, an optimal conveying path is determined according to the attributes of the object configuration corresponding to each conveying device in the one-dimensional map to convey the FOUP from the starting point to a conveying device for docking with an overhead crane; According to the determined optimal transport path, the transport equipment on the optimal transport path is controlled to operate so that the FOUP is transported to the end point of the optimal transport path.

[0006] Preferably, in the conveying control method of the FOUP conveying system, each of the conveying devices is provided with an input detection sensor located at its input end, an output detection sensor located at its output end, and a presence / absence detection sensor located between the output detection sensor and the input detection sensor.

[0007] Preferably, in the conveying control method of the FOUP conveying system, when an input detection sensor on a conveying device detects a FOUP and a conveying device upstream of the conveying device is conveying, the conveying device starts to convey; When the input detection sensor on a conveying device switches from being able to detect FOUP to being unable to detect FOUP, the conveying device is controlled to stop conveying, and it is determined whether the next conveying device on the optimal conveying path meets the conveying conditions. If so, the conveying device is controlled to convey, and if not, it waits; When an output detection sensor of a conveying device switches from being able to detect a FOUP to being unable to detect a FOUP, the conveying device stops conveying.

[0008] Preferably, in the transport control method of the FOUP transport system, the attributes to be configured for each object include: number, whether enabled, corresponding transport equipment type, whether the corresponding transport equipment has horizontal rotation function, and storage and warehousing mode of the corresponding transport equipment.

[0009] Preferably, in the transport control method of the FOUP transport system, the number includes the X coordinate and Y coordinate of the object in the two-dimensional map.

[0010] Preferably, in the transport control method of the FOUP transport system, the two-dimensional map includes M*N objects distributed in a matrix, and M and N are integers not less than 5.

[0011] Preferably, in the transport control method of the FOUP transport system, when determining the optimal transport path, the length of each feasible transport path is determined according to the following formula: L=|X 起 -X 终 |+|Y 起 - Y 终 |+N 旋 ; Where L is the length of a feasible transmission path; X 起 is the X coordinate of the starting point; 终 is the X coordinate of the end point; Y 起is the Y coordinate of the starting point; 终 is the Y coordinate of the end point; N 旋 It is the number of times the FOUP needs to rotate from the starting point to the end point.

[0012] Preferably, in the transport control method of the FOUP transport system, when it is determined that the FOUP is transported to a transport device with a horizontal rotation function, it is determined whether the transport device next to the transport device with a horizontal rotation function in the optimal transport path is idle, When it is determined that the next conveying device is idle, the FOUP is transported to the next conveying device; when it is determined that the next conveying device is not idle, the optimal conveying path of the FOUP is re-determined, and the FOUP is transported to the destination according to the re-determined optimal conveying path.

[0013] The conveying control system of the FOUP conveying system is arranged in the industrial computer, and the conveying control system comprises: A FOUP in-place detection unit is used to determine in real time whether a FOUP is placed on each conveying device for docking with the overhead crane by the overhead crane and / or whether a FOUP is placed on each conveying device for docking with the material storage device by the material storage device; A path determination unit, for, when it is determined that a FOUP is placed on a conveying device for docking with an overhead crane by the overhead crane and / or a FOUP is placed on a conveying device for docking with a material storage device by the material storage device, defining the conveying device for docking with the overhead crane or the material storage device as a starting point; when the starting point is the conveying device for docking with the overhead crane, determining an optimal conveying path according to the coordinates of each conveying device in a one-two-dimensional matrix map and the attributes of the object configuration corresponding to each conveying device in the one-two-dimensional map to convey the FOUP from the starting point to a conveying device for docking with a material storage device; when the starting point is the conveying device for docking with the material storage device, determining an optimal conveying path according to the attributes of the object configuration corresponding to each conveying device in the one-two-dimensional map to convey the FOUP from the starting point to a conveying device for docking with an overhead crane; The transport unit is used to control the transport equipment on the optimal transport path according to the determined optimal transport path so as to transport the FOUP to the end point of the optimal transport path.

[0014] An industrial computer comprises a memory and a processor, wherein the memory stores a program executable by the processor, and when the program is executed, any of the above-mentioned transmission control methods is implemented.

[0015] The advantages of the technical solution of the present invention are mainly reflected in: The method of the present invention adopts an industrial computer for control, adopts an object-oriented concept for program development, predefines a two-dimensional map including M*N configurable objects distributed in a matrix in the industrial computer, and performs standardized design on all objects. In actual use, the configuration information of the transmission equipment according to different application scenarios can be loaded into the attributes of each object in the two-dimensional map, thereby meeting the transmission control requirements of different application scenarios, and there is no need to develop different control programs for different scenarios, which greatly reduces the development cost and improves the versatility of the equipment.

[0016] The calculation method of the optimal transmission path of the present invention can be determined according to the coordinates of the object, and the calculation is convenient and easy to implement.

[0017] During the transmission process of the present invention, the route can be dynamically adjusted according to the operating conditions of the transmission equipment on the path, so that the transmission can be more flexible and more efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the FOUP conveying system of the present invention in cooperation with the overhead crane and the material storage equipment; Figure 2 is a top view of a first conveying device of the present invention; Figure 3 is a schematic diagram of an in-place sensor of the present invention; Figure 4 It is a top view of the conveying device of the present invention provided with two in-position sensors; Figure 5 It is a schematic diagram of the connection between the transmission equipment of the present invention and the industrial computer; Figure 6 is a schematic diagram of a two-dimensional map of the present invention; Figure 7 is a top view of an example of a FOUP transfer system of the present invention; Figure 8 is a flow chart of the method of the present invention; Fig. 9 It is a schematic diagram of objects involved in a specific transmission example of the present invention. DETAILED DESCRIPTION

[0019] The purpose, advantages and features of the present invention will be illustrated and explained by the non-limiting description of the following preferred embodiments. These embodiments are only typical examples of the application of the technical solution of the present invention, and any technical solution formed by equivalent replacement or equivalent transformation falls within the scope of protection claimed by the present invention.

[0020] In the description of the scheme, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0021] Example 1 The following is an explanation of the transport control method of the FOUP transport system disclosed by the present invention in conjunction with the accompanying drawings. Figure 1 As shown, the FOUP conveying system includes a group of conveying equipment 100, and the conveying equipment 100 is arranged in a certain manner to enable FOUP 400 to be conveyed between the storage device 200 and the overhead crane 300. The specific layout of the conveying equipment 100 can be designed according to different environmental needs and is not limited here. The specific structure of the overhead crane and the storage device is a known technology, which is not an innovation of the present invention and will not be described here.

[0022] The specific structure of the conveying device 100 can be designed as needed to cooperate with the fork-taking mechanism of the storage device 200, as shown in the attached Figure 1 , Attachment Figure 2 As shown, the conveying device 100 includes two conveying assemblies 110 with a gap set on a frame (not shown in the figure), and the conveying assembly 110 is preferably a belt conveying assembly. At the same time, the driving rollers 111 of the two conveying assemblies 110 can be coaxially set on the same rotating shaft, and the rotating shaft can be rotatably set on the frame and connected to a driving motor (not shown in the figure) that drives it to rotate, so that the two conveying assemblies 110 can be driven by a power source. Of course, the two conveying assemblies 110 can also have power sources respectively, for example, the driving rollers 111 of the two conveying assemblies 110 are both electric rollers.

[0023] In order to ensure the reliability of the conveying of the conveying assembly, the conveying assembly 110 further includes a set of support rollers 113 located between the driving roller 111 and the driven roller 112, and the support rollers 113 are used to support the upper belt segment of the conveyor belt 114, thereby effectively reducing the load-bearing deformation of the conveyor belt to ensure the stability of the conveying. At the same time, the conveying assembly 110 also includes a tensioning roller 115 for adjusting the tension of the conveyor belt.

[0024] Furthermore, part or all of the conveying device 100 includes a rotation drive assembly 120 that drives the frame to rotate, so that the conveying device 100 can rotate the FOUP on it horizontally by 90° to switch the conveying direction of the FOUP. The rotation drive assembly 120 can be, for example, a known servo turntable, and its specific structure is a known technology and will not be described in detail here.

[0025] At least one of the conveying devices 100 is used to dock with the overhead traveling vehicle 300 so that the FOUP 400 can be transferred between the conveying device 100 and the overhead traveling vehicle 300. The specific number and position of the conveying devices 100 docked with the overhead traveling vehicle 300 can be set as required and are not limited here. For the convenience of subsequent description, the type of conveying device 100 docked with the overhead traveling vehicle 300 is determined as the first conveying device 101. Figure 2 As shown, the first conveying device 101 is provided with an E84 photoelectric communication sensor 130 for communicating with the overhead crane 300, and at the same time, the first conveying device 101 is also provided with an in-position sensor 140 for detecting whether the FOUP 400 is accurately and reliably placed on the first conveying device 101. The first conveying device 101 is also provided with a fixture detection sensor 150 for detecting the fixture of the overhead crane 300. In addition, the first conveying device 101 is provided with an input detection sensor 160 located at its input end, an output detection sensor 170 located at its output end, and a presence detection sensor 180 located between the output detection sensor 170 and the input detection sensor 160. The input detection sensor 160 is used to detect whether a FOUP is input from the input end of the first conveying device, and the output detection sensor 170 is used to detect whether a FOUP 400 is transported from its output end to the first conveying device 101 and to determine whether the FOUP 400 has completely entered the first conveying device 101. The output detection sensor is used to determine whether the FOUP 400 entering the first conveying device 101 is output from the first conveying device 101, and the presence detection sensor 180 is used to determine whether there is a FOUP 400 on the first conveying device 101. The in-position sensor 140, the fixture detection sensor 150, the input detection sensor 160, the output detection sensor 170, and the presence detection sensor 180 can be known proximity switches. Of course, the input detection sensor 160, the output detection sensor 170, and the presence detection sensor 180 can also be a through-beam sensor, a mirror reflection sensor, etc., which is not limited here.

[0026] Furthermore, in order to ensure that the FOUP is reliably placed on the conveying device before being conveyed, in a more preferred embodiment, the in-position sensor 140 may adopt the following structure: As attached Figure 3As shown, the in-position sensor 140 includes a connecting seat 141, and the connecting seat 141 includes a first member 142 and a second member 143. The first member can be arranged on the frame with an adjustable installation height; the second member can be arranged on the first member to adjust the position along the axial direction of the rotating shaft 144 relative to the first member. Specifically, a waist-shaped hole extending in the height direction is provided on the side plate of the frame of the conveying device, and a screw hole is provided on the side of the first member facing the side plate, and the first member is fixed to the side plate by a bolt that is penetrated in the waist-shaped hole and connected to the screw hole of the first member. In addition, a supporting bolt supported at the bottom of the first member can also be provided below the first member, and the supporting bolt is threadedly connected to the fixing plate on the side plate. At the same time, a guide groove is provided on the top surface of the first member, and the second member is movably arranged in the guide groove, and a strip hole extending along the axial direction of the rotating shaft 144 is provided at the guide groove, and a screw hole is provided on the bottom surface of the second member, and the second member and the first member are fixed by a bolt that is penetrated from the bottom of the strip hole and screwed into the screw hole at the bottom of the second member.

[0027] As attached Figure 3 As shown, the second component of the connecting seat 141 is rotatably connected to the rotating shaft 144 through a bearing, and the rotating shaft 144 is fixedly connected to the gravity balance rod 145, and the rotating shaft 144 is connected to the middle position of the gravity balance rod 145, and the gravity balance rod is connected to the outer end of the rotating shaft, and the two are screwed and fixed.

[0028] The shape of the gravity balance bar can be designed as required. Figure 3 As shown, the gravity balance bar is generally L-shaped as a whole, and includes a main body 146. When the gravity balance bar is in a balanced position, the main body 146 is tilted, and the extension direction of the main body forms an acute angle with the horizontal input direction of the conveying assembly.

[0029] The upper end of the main body 146 is rotatably connected to the roller 147, and the portion of the gravity balance bar below the rotating shaft 144 is provided with a counterweight 148 for keeping the gravity balance bar in a normal state. The counterweight 148 is specifically connected to a shorter portion 149 of the gravity balance bar, and the counterweight 148 can be fixed to the short portion 149 by screwing.

[0030] As attached Figure 3 As shown, a stopper 14a is provided on the connection seat 141 to limit the gravity balance rod at a balanced position. The stopper 14a may be a bolt connected to the second component.

[0031] The balance bar detection sensor 14b can be a known proximity switch, a through-beam sensor, etc., and preferably, the balance bar detection sensor is a known slot-type sensor. Furthermore, when the gravity balance bar is in a balanced position, the balance bar detection sensor 14b can detect the gravity balance bar, and when the gravity balance bar rotates until the roller 147 moves below the conveying surface, the balance bar detection sensor 14b cannot detect the gravity balance bar. Preferably, in order to ensure the reliability of triggering, the balance bar detection sensor 14b cannot detect the gravity balance bar when the gravity balance bar is in a balanced position, and the balance bar detection sensor 14b can detect the self-balancing swing bar when the roller 147 moves below the conveying surface.

[0032] During operation, when the FOUP is placed vertically downward on the conveying device, the left and right sides of the bottom surface of the FOUP will press against the top of the two rollers 147, so that the gravity balance bar rotates so that the top of the roller 147 is just flush with the conveying surface of the conveyor belt. At this time, the gravity balance bar will trigger the balance bar detection sensor 14b, indicating that the FOUP is in place. Since the scheme of detecting both sides of the bottom surface of the FOUP is adopted, the conveying trigger signal can only be generated when both sides of the FOUP are in place, which effectively ensures the safety of the conveying control. After the FOUP is in place, the conveying device starts to transport the FOUP horizontally. Since the rollers 147 are in contact with the bottom of the FOUP, the horizontal transportation of the FOUP will not be interfered. In addition, when the FOUP is transported back to the conveying device in the reverse direction, since the angle between the rocker mechanism and the bottom of the FOUP is an acute angle, there will be no obvious impact vibration between the FOUP transported back in the reverse horizontal direction and the in-place sensor 140.

[0033] As attached Figure 4 As shown, the in-place sensors 140 are two and are respectively close to a conveying component of a conveying device.

[0034] At least one of the conveying devices 100 is used for docking with the storage device 200 so that the FOUP 400 can be transferred between the conveying device 100 and the storage device 200. The specific number and position of the conveying device 100 for docking with the storage device 200 can be set as needed and are not limited here. For the convenience of subsequent description, the type of conveying device 100 used for docking with the overhead crane 300 is defined as the second conveying device 102. The storage device includes at least one fork mechanism, and the fork mechanism can be translated to cooperate with multiple second conveying devices, or the fork mechanism is multiple, and each fork mechanism corresponds to a second conveying device. The second conveying device 102 is provided with an E84 photoelectric communication sensor 130 for communicating with the storage device 200. The second conveying device 102 is provided with an in-place sensor 140, an input detection sensor 160, an output detection sensor 170 and a presence detection sensor 180 like the first conveying device 101.

[0035] The type of conveying device 100 located between the first conveying device 101 and the second conveying device 102 is defined as an intermediate conveying device 100, and the input detection sensor 160, the output detection sensor 170 and the presence / absence detection sensor 180 are arranged at the intermediate conveying device 100.

[0036] During the FOUP 400 transfer process, the process of transferring the FOUP 400 from the overhead crane 300 to the storage device 200 for storage is defined as the storage process; the process of transferring the FOUP 400 at the storage device 200 to the overhead crane 300 via the FOUP transfer system is defined as the storage process.

[0037] In one embodiment, all the conveying devices 100 in the FOUP conveying system can be used for both storage and outbound storage. In a more preferred embodiment, some conveying devices 100 can be used exclusively for storage and some conveying devices 100 can be used exclusively for outbound storage. In addition, the input end and output end of each conveying device are determined according to whether it is used for outbound storage or storage.

[0038] As attached Figure 5As shown, the conveying devices 100 are all connected to the controller 500, and the controller 500 is an industrial personal computer (IPC). The industrial personal computer collects the signals of each sensor of each conveying device 100 in real time through the EtherCAT technology and controls the conveying component 110 and the rotating drive component of each conveying device 100. The corresponding technology is a known technology and is not described here. Of course, the industrial personal computer can also communicate with each conveying device in other feasible wired or wireless communication methods, which is not limited here. At the same time, the controller 500 is connected to the touch screen 600 through a connecting line, and the industrial personal computer is configured with a control program to achieve corresponding control.

[0039] When the controller 500 controls the operation of each of the transport devices 100, it is necessary to first configure each object 710 in the two-dimensional map 700 configured in the control program according to the actual layout of all the transport devices 100 in the FOUP transport system, their types and other information. Figure 6 As shown, the two-dimensional map 700 includes M*N objects 710 distributed in a matrix, where M and N are integers not less than 5, and can be specifically configured as needed. For example, each time the control program is started, a two-dimensional map 700 including 10*10 configurable objects 710 will be generated by default, and then the pre-edited map configuration file can be loaded into the properties of the 100 objects 710 of the map, so that a two-dimensional map 700 that conforms to the actual FOUP transmission system can be obtained. The map configuration file can be pre-edited according to the actual layout of all the transmission equipment 100 of the FOUP transmission system, the type of each transmission equipment, and other information, and stored in the system for loading when the program is started. Of course, the properties of each object 710 can also be manually configured and changed at the human-computer interaction interface.

[0040] The attributes to be configured for each object 710 include: number, whether it is enabled, the type of corresponding conveying equipment, whether the corresponding conveying equipment 100 has a horizontal rotation function, and the storage mode of the corresponding conveying equipment 100. Of course, the attributes configured for each object 710 can also include the numbers of other conveying equipment 100 around it.

[0041] The number includes the X coordinate and Y coordinate of the object 710 in the two-dimensional map 700. Preferably, the number includes 4 digits, the first two digits are used to represent the X coordinate, and the last two digits are used to represent the Y coordinate. The X coordinate is the column number of each object 710 in the two-dimensional map 700, and the Y coordinate is the row number of each object 710 in the two-dimensional map 700. When determining the column number, for example, count from left to right, and when determining the row number, for example, count from bottom to top.

[0042] The enabling or not refers to whether the object 710 has a corresponding transmission device 100. When an object 710 does not have a corresponding transmission device 100, the object 710 is not enabled. On the contrary, when an object has a corresponding transmission device 100, the object 710 is enabled.

[0043] The corresponding conveying equipment type is a conveying equipment type corresponding to each enabled object 710. For example, if the conveying equipment 100 corresponding to an enabled object 710 is used to dock with the overhead crane 300, then the conveying equipment type corresponding to the object 710 is the first conveying equipment 101; or, if the conveying equipment 100 corresponding to an enabled object is used to dock with the storage equipment 200, then the conveying equipment type corresponding to the object 710 is the second conveying equipment 102.

[0044] Whether the corresponding conveying device 100 has the horizontal rotation function is determined according to the actual function of the conveying device 100 corresponding to each enabled object 710. When the conveying device 100 corresponding to an object 710 has the horizontal rotation function, the conveying device 100 corresponding to the object 710 has the horizontal rotation function. Otherwise, the conveying device 100 corresponding to the object 710 does not have the horizontal rotation function.

[0045] The storage entry and exit mode of the corresponding conveying device 100 refers to whether the conveying device 100 corresponding to each enabled object 710 is used for storage entry or storage exit.

[0046] For example, as attached Figure 7 As shown, the FOUP conveying system includes 11 conveying devices 100 for warehousing, and the 11 conveying devices 100 for warehousing are distributed in a small H shape, and the upper three conveying devices 100 are the first conveying devices 101, and the lower two conveying devices are the second conveying devices 102.

[0047] At the same time, the FOUP conveying system also includes 10 conveying devices 100 for outbound delivery. The 10 conveying devices 100 for outbound delivery are distributed in a small H shape, and the top three conveying devices 100 are the first conveying devices 101, and the bottom two conveying devices are the second conveying devices 102.

[0048] Each conveying device 100 located at the intersection of the two paths has a horizontal rotation function and is defined as a turning conveying device 104 .

[0049] Correspondingly, after performing map configuration according to the map configuration file edited by the FOUP transport system in the above example, the obtained two-dimensional map is as shown in the attached figure. Figure 6As shown, the two-dimensional map 700 includes 100 objects 710, among which the black boxes represent unactivated objects 710, the red boxes represent objects 710 corresponding to the 11 activated conveying devices 100 for storage, and the green boxes represent objects 710 corresponding to the 10 activated conveying devices 100 for storage. In the properties of the objects 710 represented by the three red boxes at the top, the corresponding conveying device type is the first conveying device 101, and in the properties of the objects 710 represented by the two red boxes at the bottom, the corresponding conveying device type is the second conveying device 102. In the properties of the objects 710 represented by the three green boxes at the top, the corresponding conveying device type is the first conveying device 101, and in the properties of the objects 710 represented by the two green boxes at the bottom, the corresponding conveying device type is the second conveying device 102. At the same time, in the properties of the objects represented by the two red boxes and the two green boxes corresponding to the four steering conveying devices 104, the corresponding conveying devices 100 have the horizontal rotation function.

[0050] After completing the configuration of the two-dimensional map 700, the industrial computer can automatically control according to the configured two-dimensional map 700. Figure 8 As shown, the transmission control method comprises the following steps: The industrial computer collects signals from sensors of the conveying device 100 used for docking with the overhead crane 300 and the conveying device 100 used for docking with the material storage device 200 .

[0051] Determine in real time whether a FOUP is placed on a conveying device (first conveying device) for docking with an overhead crane by the overhead crane and / or whether a FOUP is placed on a conveying device (second conveying device) for docking with a storage device by the storage device.

[0052] When it is determined that a FOUP is placed on a conveying device for docking with an overhead crane by the overhead crane and / or a FOUP is placed on a conveying device for docking with a storage device by the storage device, the conveying device 100 for docking with the overhead crane 300 or for docking with the storage device 200 is defined as the starting point; when the starting point is the conveying device 100 for docking with the overhead crane 300, an optimal conveying path is determined according to the attributes of the object configuration corresponding to each conveying device in the one-dimensional map to convey the FOUP from the starting point to a conveying device for docking with a storage device; when the starting point is the conveying device for docking with a storage device, an optimal conveying path is determined according to the attributes of the object configuration corresponding to each conveying device in the one-dimensional map to convey the FOUP from the starting point to a conveying device for docking with an overhead crane.

[0053] According to the determined optimal conveying path, the conveying device 100 on the optimal conveying path is controlled to operate so that the FOUP 400 is conveyed to the end point of the optimal conveying path, that is, the conveying device 100 docking with the storage device 200 or the conveying device 100 docking with the overhead crane 300.

[0054] The following is an example of the specific conveying process. When it is determined that there is no FOUP 400 at the first conveying device 101 for warehousing, the first conveying device 101 waits for the docking of the overhead crane 300. When the overhead crane 300 docks with the first conveying device 101 through E84 communication and places a FOUP 400 thereon, the presence detection sensor 180 of the first conveying device 101 detects the FOUP 400. At this time, the industrial computer determines the optimal conveying path for the FOUP 400 to enter the warehouse. When determining the optimal conveying path, the length of each feasible conveying path is determined according to the following formula: L=|X 起 -X 终 |+|Y 起 - Y 终 |+N 旋 ; Where L is the length of a feasible transmission path; X 起 is the X coordinate of the starting point; 终 is the X coordinate of the end point; Y 起 is the Y coordinate of the starting point; 终 is the Y coordinate of the end point; N 旋 The number of times FOUP400 needs to rotate from the starting point to the end point.

[0055] When the FOUP transport system includes multiple second transport devices 102, the feasible transport path includes the feasible paths from the starting point to each second transport device 102. After determining the length of each feasible transport path, the feasible transport path with the shortest length is selected as the optimal transport path.

[0056] After the optimal conveying path is determined, it is determined whether the next conveying device 100 located downstream of the first conveying device 101 where the FOUP 400 is currently located on the optimal conveying path is idle. When the next conveying device 100 is idle, the first conveying device 101 where the FOUP 400 is currently located is started to transport the FOUP 400 to the next conveying device 100. When it is determined that the movement of the FOUP 400 triggers the output detection sensor 170 of the first conveying device 101 where it is currently located, the next conveying device 100 starts to cooperate in the transportation; when the FOUP 400 stops triggering the output detection sensor 170 of the first conveying device 101 where it is currently located, the first conveying device 101 where it is currently located stops transporting and waits for re-docking with the overhead crane 300. When the FOUP 400 stops triggering the input detection sensor 160 of the next conveying device 100, it is determined that the FOUP 400 has completely entered the next conveying device 100, the next conveying device 100 stops conveying, and it is determined whether the next conveying device 100 of the optimal conveying path is idle, and then the above process is repeated until the FOUP 400 is conveyed to the second conveying device 102 at the end point.

[0057] When the FOUP400 is transferred to the second conveying device 102 at the end point, the second conveying device 102 waits for the docking of the storage device 200. After the storage device 200 docks with the second conveying device 102 through E84 communication, the storage device 200 takes the FOUP400 on the second conveying device 102 and transfers it to the storage device 200, and the second conveying device 102 waits for transfer and docking again.

[0058] Further, when it is determined that the FOUP400 is transported to a conveying device 100 with a horizontal rotation function, it is determined whether the next conveying device 100 of the conveying device 100 with a horizontal rotation function in the optimal conveying path is idle. When it is determined that there is no FOUP400 at the next conveying device 100 and its operating status is normal, it is determined that the next conveying device 100 is idle. Conversely, when it is determined that there is a FOUP400 or an abnormality at the next conveying device 100, it is determined that the next conveying device 100 is not idle.

[0059] When it is determined that the next conveying device 100 is idle, the FOUP 400 is transported to the next conveying device 100; when it is determined that the next conveying device 100 is not idle, the optimal conveying path of the FOUP 400 is re-determined, and the FOUP 400 is transported to the destination according to the re-determined optimal conveying path.

[0060] For example, as shown in the attached Fig. 9As shown, when a FOUP 400 is placed on the first conveying device 101 corresponding to the object 710 numbered 0103 by an overhead crane, it is determined that the optimal transmission path of the FOUP 400 is to be transmitted from the first conveying device 101 corresponding to the object 710 numbered 0103 to the third conveying device 100 corresponding to the object 710 numbered 0102, and then to the second conveying device corresponding to the object 710 numbered 0101. At the same time, the two third conveying devices 100 corresponding to the objects 710 numbered 0102 and 0202 are conveying devices 100 with horizontal rotation function.

[0061] Therefore, when FOUP400 is transferred from the first transfer device 101 corresponding to the object 710 numbered 0103 to the third transfer device 100 corresponding to the object 710 numbered 0102, if it is determined that there is FOUP400 at the second transfer device 102 corresponding to the object 710 numbered 0101, the new optimal transfer route is determined to be first transferred to the third transfer device 100 corresponding to the object 710 numbered 0202, and then transferred to the second transfer device corresponding to the object 710 numbered 0201.

[0062] The process of FOUP 400 being shipped out of the storage device 200 via the FOUP transport system is the reverse process of the above-mentioned storage process, and will not be described in detail here.

[0063] Example 2 This embodiment discloses a conveying control system of a FOUP conveying system, which is arranged in an industrial computer, and the conveying control system includes: A FOUP in-place detection unit is used to determine in real time whether a FOUP is placed on each conveying device for docking with the overhead crane by the overhead crane and / or whether a FOUP is placed on each conveying device for docking with the material storage device by the material storage device; A path determination unit, for, when it is determined that a FOUP is placed on a conveying device for docking with an overhead crane by the overhead crane and / or a FOUP is placed on a conveying device for docking with a material storage device by the material storage device, defining the conveying device for docking with the overhead crane or the material storage device as a starting point; when the starting point is the conveying device for docking with the overhead crane, determining an optimal conveying path according to the coordinates of each conveying device in a one-two-dimensional matrix map and the attributes of the object configuration corresponding to each conveying device in the one-two-dimensional map to convey the FOUP from the starting point to a conveying device for docking with a material storage device; when the starting point is the conveying device for docking with the material storage device, determining an optimal conveying path according to the attributes of the object configuration corresponding to each conveying device in the one-two-dimensional map to convey the FOUP from the starting point to a conveying device for docking with an overhead crane; The transport unit is used to control the transport equipment on the optimal transport path according to the determined optimal transport path so as to transport the FOUP to the end point of the optimal transport path.

[0064] Example 3 This embodiment discloses an industrial computer, including a memory and a processor, wherein the memory stores a program executable by the processor, and when the program is executed, any of the above-mentioned transmission control methods is implemented.

[0065] There are many implementation methods of the present invention, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of the present invention.

Claims

1. A method for controlling the transport of a FOUP transport system, characterized in that: The transmission control method adopts an industrial computer for control, and comprises the following steps: Determine in real time whether each conveying device for docking with the overhead crane is placed with a FOUP by the overhead crane and / or whether each conveying device for docking with the material storage device is placed with a FOUP by the material storage device; When it is determined that a FOUP is placed on a conveying device for docking with an overhead crane by the overhead crane and / or a FOUP is placed on a conveying device for docking with a storage device by the storage device, the conveying device for docking with the overhead crane or the storage device is defined as a starting point; when the starting point is a conveying device for docking with an overhead crane, an optimal conveying path is determined according to the attributes of the object configuration corresponding to each conveying device in a one-dimensional map to convey the FOUP from the starting point to a conveying device for docking with a storage device; When the starting point is a conveying device for docking with a material storage device, an optimal conveying path is determined according to the attributes of the object configuration corresponding to each conveying device in the one-dimensional map to convey the FOUP from the starting point to a conveying device for docking with an overhead traveling crane; According to the determined optimal transport path, the transport equipment on the optimal transport path is controlled to operate so that the FOUP is transported to the end point of the optimal transport path.

2. The method for controlling the FOUP transport system according to claim 1, wherein: Each of the conveying devices is provided with an input detection sensor located at its input end, an output detection sensor located at its output end, and a presence detection sensor located between the output detection sensor and the input detection sensor.

3. The method for controlling the FOUP transport system according to claim 1, wherein: When an input detection sensor on a conveying device detects a FOUP and a conveying device upstream of the conveying device is conveying, the conveying device starts conveying; When the input detection sensor on a conveying device switches from being able to detect FOUP to being unable to detect FOUP, the conveying device is controlled to stop conveying, and it is determined whether the next conveying device on the optimal conveying path meets the conveying conditions. If so, the conveying device is controlled to convey, and if not, it waits; When an output detection sensor of a conveying device switches from being able to detect a FOUP to being unable to detect a FOUP, the conveying device stops conveying.

4. The method for controlling the FOUP transport system according to claim 1, wherein: The properties that need to be configured for each object include: number, whether it is enabled, the corresponding type of conveying equipment, whether the corresponding conveying equipment has the horizontal rotation function, and the storage mode of the corresponding conveying equipment.

5. The method for controlling the FOUP transport system according to claim 4, wherein: The number includes the X coordinate and the Y coordinate of the object in the two-dimensional map.

6. The method for controlling the FOUP transport system according to claim 5, wherein: The two-dimensional map includes M*N objects distributed in a matrix, where M and N are integers not less than 5.

7. The method for controlling the FOUP transport system according to claim 4, wherein: When determining the optimal transmission path, the length of each feasible transmission path is determined according to the following formula: L=|X 起 - X 终 |+|And 起 - AND 终 |+N 旋 ; Where L is the length of a feasible transmission path; X 起 is the X coordinate of the starting point; 终 is the X coordinate of the end point; Y 起 is the Y coordinate of the starting point; 终 is the Y coordinate of the end point; N 旋 It is the number of times the FOUP needs to rotate from the starting point to the end point.

8. The method for controlling the FOUP transport system according to claim 1, wherein: When it is determined that the FOUP is transported to a transport device with a horizontal rotation function, it is determined whether the next transport device of the transport device with a horizontal rotation function in the optimal transport path is idle. When it is determined that the next conveying device is idle, the FOUP is transported to the next conveying device; when it is determined that the next conveying device is not idle, the optimal conveying path of the FOUP is re-determined, and the FOUP is transported to the destination according to the re-determined optimal conveying path.

9. A conveying control system for a FOUP conveying system, characterized in that: Set in an industrial computer, the transmission control system includes: A FOUP in-place detection unit is used to determine in real time whether a FOUP is placed on each conveying device for docking with the overhead crane by the overhead crane and / or whether a FOUP is placed on each conveying device for docking with the material storage device by the material storage device; A path determination unit, for, when it is determined that a FOUP is placed on a conveying device for docking with an overhead crane by the overhead crane and / or a FOUP is placed on a conveying device for docking with a material storage device by the material storage device, defining the conveying device for docking with the overhead crane or the material storage device as a starting point; when the starting point is the conveying device for docking with the overhead crane, determining an optimal conveying path according to the coordinates of each conveying device in a one-two-dimensional matrix map and the attributes of the object configuration corresponding to each conveying device in the one-two-dimensional map to convey the FOUP from the starting point to a conveying device for docking with a material storage device; when the starting point is the conveying device for docking with the material storage device, determining an optimal conveying path according to the attributes of the object configuration corresponding to each conveying device in the one-two-dimensional map to convey the FOUP from the starting point to a conveying device for docking with an overhead crane; The transport unit is used to control the transport equipment on the optimal transport path according to the determined optimal transport path so as to transport the FOUP to the end point of the optimal transport path.

10. An industrial computer, comprising a memory and a processor, wherein the memory stores a program executable by the processor, wherein: When the program is executed, the transmission control method according to any one of claims 1 to 8 is implemented.

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