Loading platform of substrate loader

Abstract

The invention belongs to the technical field of substrate conveying, and particularly relates to a loading platform of a substrate loading machine. Comprising a loading table, a moving platform, linear guide rails, adjusting mechanisms and a clamping mechanism, the linear guide rails are arranged on the two sides of the loading table in the front-back direction, the moving platform is arranged above the loading table, and the two sides of the moving platform are slidably connected with the two linear guide rails through the adjusting mechanisms correspondingly; the mounting position of the movable platform relative to the loading platform can be adjusted through the adjusting mechanism; the clamping mechanism is arranged on the moving platform and used for clamping the substrate conveying box placed on the moving platform. The loading platform is designed to be of a single-layer structure, the adjusting mechanism serves as a connecting structure of the loading platform and the substrate loading machine, the number of needed structures is reduced, and the convenience of the adjusting process is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of substrate transmission, and in particular relates to a loading platform of a substrate loader. Background Art

[0002] In the semiconductor manufacturing process, FOUP (front-opening wafer pod) is a special container used to protect, transport and temporarily store substrates, which can store a certain number of circular substrates. In wafer-level packaging processes using circular substrates, most of the circular substrates are cut into rectangles, and the edge of the circular substrate cannot be used, resulting in a lot of waste. The square substrates used in the panel-level packaging process can avoid this problem, reduce waste and reduce costs. The size and weight of the Panel FOUP (panel-level front-opening wafer pod) used to store square substrates are significantly increased compared to FOUP. The substrate loader is a special automated equipment for opening and closing the Panel FOUP in the semiconductor manufacturing process. The main function of the equipment is to unlock and open the door of the Panel FOUP before substrate processing, so that the processing equipment of the next process can take out and process the substrate. The loading platform is an important structure on the substrate loader for loading the Panel FOUP. It is provided with a clamping mechanism to fix the Panel FOUP on the loading platform to ensure the stability of the position of the pod during the opening process. At present, the traditional clamping mechanism mainly adopts a one-sided clamping method to clamp the FOUP, which has poor stability and the one-sided clamping force can easily cause structural damage or movement. For Panel FOUPs that are larger and heavier than FOUPs, this method cannot guarantee the stability of clamping. In addition, the loading platform is equipped with an adjustment structure to ensure that the substrate loader has a good door opening and closing effect. The existing loading platform adopts a double-layer structure, with the lower positioning platform used to adjust the position and the upper motion platform used to carry the FOUP, but this solution has a complex structure, occupies a large space, and has high requirements for installation and manufacturing. Summary of the invention

[0003] In view of the above problems, the purpose of the present invention is to provide a loading platform for a substrate loader, which can solve the problems of the existing loading platform having a complex double-layer structure, occupying a large space, having high requirements for installation and manufacturing, and the problem that the single-sided clamping state is unstable and easily leads to structural damage and movement.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] The present invention provides a loading platform of a substrate loader, comprising a loading platform, a moving platform, a linear guide rail, an adjustment mechanism and a clamping mechanism, wherein linear guide rails are arranged on both sides of the loading platform along the front-rear direction, the moving platform is arranged above the loading platform, and both sides are slidably connected to the two linear guide rails through the adjustment mechanism, and the installation position of the moving platform relative to the loading platform can be adjusted through the adjustment mechanism; the clamping mechanism is arranged on the moving platform, and is used to clamp the substrate conveying box placed on the moving platform.

[0006] The clamping mechanism comprises two groups of clamping assemblies which are installed opposite to each other below the moving platform, and the two groups of clamping assemblies clamp the substrate conveying box at two clamping operation holes provided on the moving platform respectively.

[0007] The clamping assembly includes a clamping drive element and a rocker arm, wherein the clamping drive element is hinged at the bottom of the mobile platform, and the output end is hinged to one end of the rocker arm, and the rocker arm is rotatably installed in the clamping operation hole of the mobile platform. When the clamping drive element drives the rocker arm to rotate, the other end of the rocker arm can be protruded from the clamping operation hole to realize the clamping function.

[0008] The adjustment mechanism includes two groups of front adjustment components and two groups of rear adjustment components;

[0009] The two groups of front adjustment components are respectively connected to both sides of the front end of the mobile platform, and the two groups of rear adjustment components are respectively connected to both sides of the rear end of the mobile platform.

[0010] The front adjustment assembly includes a front slider, a front connecting member, a front adapter, a front upper connecting member and a front lower connecting member, wherein the front adapter is slidably matched with the linear guide rail through the front slider; the upper end of the front connecting member is connected to the moving platform through the front upper connecting member, and the lower end of the front connecting member is connected to the front adapter through the front lower connecting member;

[0011] The installation position of the mobile platform is adjusted by the front upper connecting component and the front lower connecting component.

[0012] The front upper connecting component includes a front upper top screw and a front screw, wherein the front upper top screw is connected to the movable platform, and the lower end portion abuts against the upper end surface of the front connecting member, and the relative position between the front end of the movable platform and the front connecting member can be adjusted by rotating the front upper top screw, and then the front end of the movable platform and the front connecting member are locked and fixed by the front screw.

[0013] The front lower connecting component includes a front positioning module and a lower top screw, wherein the lower top screw is connected to the lower end of the front adapter, and the lower top screw abuts against the lower end surface of the front connecting component;

[0014] The lower end of the front connecting piece is provided with a front waist-shaped hole in a direction perpendicular to the linear guide rail. The front positioning module locks the front connecting piece on the front adapter at the front waist-shaped hole. The height position of the front connecting piece can be adjusted by rotating the lower top screw.

[0015] The rear adjustment assembly includes a rear connecting member, a rear adapter, a rear slider, a rear upper connecting member and a rear positioning module, wherein the rear adapter is slidably matched with the linear guide rail via the rear slider, the upper end of the rear connecting member is connected to the mobile platform via the rear upper connecting member, the lower end of the rear connecting member is connected to the rear adapter via the rear positioning module, and the installation position of the mobile platform can be adjusted via the rear upper connecting member.

[0016] The rear upper connecting component includes a rear upper top screw and a rear screw, wherein the rear upper top screw is connected to the rear end of the mobile platform, and the lower end surface of the rear upper top screw abuts against the upper end surface of the rear connecting member. The relative position between the rear end of the mobile platform and the rear connecting member in the height direction can be adjusted by rotating the rear upper top screw, and then the rear end of the mobile platform and the rear connecting member are locked and fixed by the rear screw.

[0017] The advantages and beneficial effects of the present invention are as follows: the loading platform of a substrate loader provided by the present invention is suitable for Panel FOUP, the loading platform is designed as a single-layer structure, and the adjustment mechanism is used as the connection structure between the loading platform and the substrate loader, thereby reducing the number of required structures and improving the convenience of the adjustment process. The mobile platform can be adjusted in a wide range and in all directions by adjusting the four upper top screws respectively. The position of the mobile platform can be finely adjusted by adjusting the lower top screw located at the front adapter.

[0018] The present invention uses two sets of clamping structures with opposite working directions to achieve bidirectional clamping of the substrate transfer box, ensure the stability of the clamping state, and avoid structural damage or movement caused by unilateral clamping force. The double clamping structure can provide a larger bidirectional clamping force and improve the stability of the clamping state. Based on this advantage, this solution can be used as a clamping solution for Panel FOUP to ensure the stability of the clamping state of Panel FOUP. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a loading platform of a substrate loader of the present invention;

[0020] Figure 2 A side view of a loading platform of a substrate loader of the present invention;

[0021] Figure 3 It is a structural schematic diagram of the clamping mechanism in the present invention;

[0022] Figure 4It is a partial structural schematic diagram of the adjustment mechanism in the present invention;

[0023] Figure 5 The present invention is a schematic diagram of the installation position of a loading platform of a substrate loader.

[0024] In the figure: 1, substrate loader, 2, substrate transfer box, 3, loading platform, 4, mobile platform, 5, linear guide rail, 6, front slider, 7, clamping drive element, 8, rocker arm, 9, shaft, 10, shaft seat, 11, front connecting piece, 12, front adapter, 13, front positioning module, 14, lower top screw, 15, rear connecting piece, 16, rear positioning module, 17, rear adapter, 18, front upper top screw, 19, front screw, 20, rear upper top screw, 21, rear screw, 22, rear slider. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] See also Figures 1 to 5 As shown, the present invention provides a loading platform of a substrate loader, which is located at the front side of the substrate loader 1, and the substrate conveying box 2 is placed above the loading platform. The loading platform of the substrate loader includes a loading platform 3, a moving platform 4, a linear guide rail 5, an adjustment mechanism and a clamping mechanism, wherein the loading platform 3 is a square frame structure, and the linear guide rails 5 are arranged on both sides of the loading platform 3 along the front-back direction, the moving platform 4 is arranged above the loading platform 3, and the two sides are respectively slidably connected with the two linear guide rails 5 through the adjustment mechanism, and the installation position of the moving platform 4 relative to the loading platform 3 can be adjusted through the adjustment mechanism; the clamping mechanism is arranged on the moving platform 4, and is used to clamp the substrate conveying box 2 placed on the moving platform 4.

[0027] See also Figure 1 , Figure 5 As shown, in the embodiment of the present invention, the clamping mechanism includes two sets of clamping components oppositely mounted below the mobile platform 4, and the two sets of clamping components cooperate at two clamping operation holes provided on the mobile platform 4 to clamp the substrate transfer box 2. In this embodiment, the substrate transfer box 2 is a Panel FOUP.

[0028] See also Figure 1 , Figure 3 As shown, in an embodiment of the present invention, the clamping assembly includes a clamping drive element 7 and a rocker arm 8, wherein the clamping drive element 7 is hinged at the bottom of the mobile platform 4, and the output end is hinged to one end of the rocker arm 8, and the rocker arm 8 is rotatably installed in the clamping operation hole of the mobile platform 4. When the clamping drive element 7 drives the rocker arm 8 to rotate, the other end of the rocker arm 8 can be protruded from the clamping operation hole to realize the clamping function.

[0029] Specifically, a rotating shaft seat 10 is provided in the clamping operation hole of the mobile platform 4, the swing rod 8 is a bent structure, and the middle part is connected to the rotating shaft seat 10 through the rotating shaft 9, and the swing rod 8 can rotate up and down around the rotating shaft 9. In this embodiment, the clamping drive element 7 is a cylinder, the tail of the cylinder is hinged to the bottom of the mobile platform 4, the cylinder rod of the cylinder is hinged to the rear end of the swing rod 8, and the front end of the swing rod 8 can extend or retract in the clamping operation hole of the mobile platform 4. The swing rods 8 in the two sets of clamping assemblies rotate in opposite directions, and the two swing rods 8 work together to clamp the substrate conveying box 2.

[0030] In an embodiment of the present invention, the adjustment mechanism includes two groups of front adjustment components and two groups of rear adjustment components; the two groups of front adjustment components are respectively connected to both sides of the front end of the mobile platform 4, and the two groups of rear adjustment components are respectively connected to both sides of the rear end of the mobile platform 4.

[0031] See also Figure 4 As shown, in an embodiment of the present invention, the front adjustment component includes a front slider 6, a front connecting member 11, a front adapter 12, a front upper connecting member and a front lower connecting member, wherein the front adapter 12 is slidably matched with the linear guide 5 through the front slider 6; the upper end of the front connecting member 11 is connected to the mobile platform 4 through the front upper connecting member, and the lower end of the front connecting member 11 is connected to the front adapter 12 through the front lower connecting member; the installation position of the mobile platform 4 is adjusted through the front upper connecting member and the front lower connecting member.

[0032] See also Figure 2 As shown, in an embodiment of the present invention, the front upper connecting component includes a front upper top screw 18 and a front screw 19, wherein the front upper top screw 18 is connected to the mobile platform 4, and the lower end portion abuts against the upper end surface of the front connecting member 11, and the relative position between the front end of the mobile platform 4 and the front connecting member 11 in the height direction can be adjusted by rotating the front upper top screw 18. After adjustment, the front end of the mobile platform 4 is locked and fixed to the front connecting member 11 by the front screw 19.

[0033] See also Figure 4 As shown, in an embodiment of the present invention, the front lower connecting component includes a front positioning module 13 and a lower top screw 14, wherein the lower top screw 14 is connected to the lower end of the front adapter 12, and the lower top screw 14 abuts against the lower end surface of the front connecting member 11; the lower end portion of the front connecting member 11 is provided with a front waist-shaped hole in a direction perpendicular to the linear guide rail 5, and the front positioning module 13 locks the front connecting member 11 on the front adapter 12 at the front waist-shaped hole, and the height position of the front connecting member 11 can be adjusted by rotating the lower top screw 14.

[0034] See also Figure 4As shown, in an embodiment of the present invention, the rear adjustment assembly includes a rear connecting member 15, a rear adapter 17, a rear slider 22, a rear upper connecting component and a rear positioning module 16, wherein the rear adapter 17 is slidably matched with the linear guide 5 through the rear slider 22, the upper end of the rear connecting member 15 is connected to the mobile platform 4 through the rear upper connecting component, and the lower end of the rear connecting member 15 is connected to the rear adapter 17 through the rear positioning module 16, and the installation position of the mobile platform 4 can be adjusted through the rear upper connecting component.

[0035] See also Figure 2 As shown, in an embodiment of the present invention, the rear upper connecting component includes a rear upper top screw 20 and a rear screw 21, wherein the rear upper top screw 20 is connected to the rear end of the mobile platform 4, and the lower end surface of the rear upper top screw 20 abuts against the upper end surface of the rear connecting member 15, and the relative position between the rear end of the mobile platform 4 and the rear connecting member 15 in the height direction can be adjusted by rotating the rear upper top screw 20. After adjustment, the rear end of the mobile platform 4 and the rear connecting member 15 are locked and fixed by the rear screw 21.

[0036] Specifically, the front positioning module 13 and the rear positioning module 16 both include gaskets and positioning locking bolts, and locking and fixing are achieved by the positioning locking bolts.

[0037] The present invention provides a loading platform of a substrate loader, and its action implementation process is as follows:

[0038] When the clamping mechanism performs the clamping action, the two clamping drive elements 7 push the rocker 8 to rotate around the rotating shaft 9. The movement directions of the two rocker 8 are opposite. When the rocker 8 moves to the limit position, the double-sided clamping action is completed. Compared with the single-sided clamping movement, the double-sided clamping structure can avoid damage or movement caused by single-sided clamping. The loading platform uses a double clamping structure. The two sets of clamping structures clamp in opposite directions. When working, the double-sided clamping structure can completely clamp the substrate transfer box 2. The rocker 8 and the rotating shaft 9 are combined into a lever structure. The rotating clamping method can obtain a greater clamping force and a more reliable clamping state.

[0039] When adjusting the position of the mobile platform 4, the relative position between the mobile platform 4 and the front connecting member 11 and the rear connecting member 15 is first adjusted for rough adjustment; then the relative position between the front connecting member 11 and the front adapter 12 is adjusted for fine adjustment.

[0040] Specifically, loosen the front screw 19 and the rear screw 21 on the mobile platform 4 for fixing the front connecting member 11 and the rear connecting member 15. Rotate the two front upper top screws 18 to adjust the distance between the two front connecting members 11 and the front end of the mobile platform 4 respectively, and rotate the two rear upper top screws 20 to adjust the distance between the two rear connecting members 15 and the rear end of the mobile platform 4 respectively. After moving the mobile platform 4 to the target position, tighten the front screw 19 and the rear screw 21 on the mobile platform 4 to fix the front connecting member 11 and the rear connecting member 15, so that the position of the mobile platform 4 can be determined by four-point adjustment, and the rough adjustment of the mobile platform 4 can be achieved. Rotate the lower top screw 14 to change the relative position of the front connecting member 11 and the front adapter 12. After the adjustment is completed, tighten the positioning locking bolt of the front positioning module 13 to achieve fine adjustment of the mobile platform 4. This method can achieve rough and fine adjustment of the mobile platform 4, and the four-point adjustment determines the position of the mobile platform 4, realizing a large range and all-round adjustment of the mobile platform 4. In addition, the single-layer structure of the loading platform reduces the number of parts, improves the convenience of the adjustment process, and realizes the combination of the movement and adjustment functions of the loading platform.

[0041] Although the above embodiments have been described, once those skilled in the art know the basic creative concepts, they can make additional changes and modifications to these embodiments. Therefore, the above are only embodiments of the present invention and do not limit the patent protection scope of the present invention. All equivalent structures or equivalent process changes made using the contents of the present invention specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A loading platform of a substrate loader, characterized in that: The invention comprises a loading platform (3), a moving platform (4), a linear guide rail (5), an adjustment mechanism and a clamping mechanism, wherein the linear guide rails (5) are arranged on both sides of the loading platform (3) along the front-rear direction, the moving platform (4) is arranged above the loading platform (3), and the two sides are respectively slidably connected to the two linear guide rails (5) through the adjustment mechanism, and the installation position of the moving platform (4) relative to the loading platform (3) can be adjusted through the adjustment mechanism; the clamping mechanism is arranged on the moving platform (4) and is used to clamp the substrate conveying box (2) placed on the moving platform (4).

2. The loading platform of the substrate loader according to claim 1, characterized in that: The clamping mechanism comprises two groups of clamping components which are mounted opposite to each other below the mobile platform (4), and the two groups of clamping components clamp the substrate transport box (2) at two clamping operation holes provided on the mobile platform (4) respectively.

3. The loading platform of the substrate loader according to claim 2, characterized in that: The clamping assembly comprises a clamping drive element (7) and a rocker (8), wherein the clamping drive element (7) is hinged at the bottom of the mobile platform (4), and the output end is hinged to one end of the rocker (8), and the rocker (8) is rotatably mounted in a clamping operation hole of the mobile platform (4). When the clamping drive element (7) drives the rocker (8) to rotate, the other end of the rocker (8) can be protruded from the clamping operation hole to realize the clamping function.

4. The loading platform of the substrate loader according to claim 1, characterized in that: The adjustment mechanism includes two groups of front adjustment components and two groups of rear adjustment components; The two groups of front adjustment components are respectively connected to both sides of the front end of the mobile platform (4), and the two groups of rear adjustment components are respectively connected to both sides of the rear end of the mobile platform (4).

5. The loading platform of the substrate loader according to claim 4, characterized in that: The front adjustment component comprises a front slider (6), a front connecting member (11), a front adapter (12), a front upper connecting member and a front lower connecting member, wherein the front adapter (12) is slidably matched with the linear guide rail (5) through the front slider (6); the upper end of the front connecting member (11) is connected to the movable platform (4) through the front upper connecting member, and the lower end of the front connecting member (11) is connected to the front adapter (12) through the front lower connecting member; The installation position of the mobile platform (4) is adjusted by means of the front upper connecting component and the front lower connecting component.

6. The loading platform of the substrate loader according to claim 5, characterized in that: The front upper connecting component comprises a front upper top screw (18) and a front screw (19), wherein the front upper top screw (18) is connected to the movable platform (4), and the lower end portion abuts against the upper end surface of the front connecting member (11), and the relative position between the front end of the movable platform (4) and the front connecting member (11) can be adjusted by rotating the front upper top screw (18), and then the front end of the movable platform (4) and the front connecting member (11) are locked and fixed by the front screw (19).

7. The loading platform of the substrate loader according to claim 5, characterized in that: The front lower connecting component comprises a front positioning module (13) and a lower top screw (14), wherein the lower top screw (14) is connected to the lower end of the front adapter (12), and the lower top screw (14) abuts against the lower end surface of the front connecting member (11); The lower end of the front connecting member (11) is provided with a front waist-shaped hole in a direction perpendicular to the linear guide rail (5); the front positioning module (13) locks the front connecting member (11) on the front adapter (12) at the front waist-shaped hole; and the height position of the front connecting member (11) can be adjusted by rotating the lower top screw (14).

8. The loading platform of the substrate loader according to claim 4, characterized in that: The rear adjustment assembly comprises a rear connecting member (15), a rear adapter (17), a rear slider (22), a rear upper connecting member and a rear positioning module (16), wherein the rear adapter (17) is slidably matched with the linear guide rail (5) through the rear slider (22), the upper end of the rear connecting member (15) is connected to the mobile platform (4) through the rear upper connecting member, and the lower end of the rear connecting member (15) is connected to the rear adapter (17) through the rear positioning module (16), and the installation position of the mobile platform (4) can be adjusted through the rear upper connecting member.

9. The loading platform of the substrate loader according to claim 8, characterized in that: The rear upper connecting component comprises a rear upper top screw (20) and a rear screw (21), wherein the rear upper top screw (20) is connected to the rear end of the mobile platform (4), and the lower end surface of the rear upper top screw (20) abuts against the upper end surface of the rear connecting member (15), and the relative position between the rear end of the mobile platform (4) and the rear connecting member (15) in the height direction can be adjusted by rotating the rear upper top screw (20), and then the rear end of the mobile platform (4) and the rear connecting member (15) are locked and fixed by the rear screw (21).

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