Electrostatic chuck facilitating wafer adsorption

Abstract

The invention discloses an electrostatic chuck facilitating wafer adsorption, and relates to the field of wafer processing. The electrostatic chuck comprises a base plate, an insulating layer is fixed to the surface of the base plate, an electrostatic electrode is arranged in the base plate, a mounting hole is formed in the base plate, a lifting ejector pin is arranged on the mounting hole, and the end of the ejector pin is lower than the surface of the insulating layer. The substrate is provided with a cooling liquid circulation channel used for allowing cooling liquid to flow in and out. The bearing assembly is arranged on the ejector pin, when the ejector pin is in the ascending stage, the bearing assembly is unfolded to be flush with the top surface of the ejector pin, and when the ejector pin is in the descending stage, the bearing assembly is contracted; the plurality of adjusting assemblies can assist in temperature adjustment, and the adjusting assemblies are distributed at equal intervals along the cooling liquid circulation channel in the substrate. The contact area of the ejector pin and the wafer is increased through the expandable bearing assembly, and the possibility of damage to the wafer is reduced when the ejector pin is ejected or retracted. The local temperature of the electrostatic chuck can be further adjusted in an auxiliary mode through the adjusting assembly.

Description

Technical Field

[0001] The invention relates to the field of wafer processing, and in particular to an electrostatic chuck for facilitating wafer adsorption. Background Art

[0002] An electrostatic chuck is a device that uses electrostatic force to grab and hold objects. Electrostatic chucks are often used to handle wafers during semiconductor manufacturing and processing.

[0003] Electrostatic chucks are crucial in semiconductor processing and have the following advantages: (1) Uniform adsorption force; (2) Less pollution; (3) Can work in vacuum environment.

[0004] The key and difficulty of the electrostatic chuck is temperature control.

[0005] Take dry etching as an example. Dry etching requires the wafer to be controlled at a certain temperature between 100℃ and -70℃ to maintain certain etching characteristics. It mainly relies on the following two methods: (1) Increase gas convection between the wafer surface and the electrostatic chuck surface to dissipate heat (the cooling gas usually used in semiconductor processes is helium); (2) Heat is dissipated through heat conduction on the surface of the electrostatic chuck.

[0006] In some high-precision processing and testing equipment, the coordinated work of the ejector pin and the electrostatic chuck can ensure the stability and positioning accuracy of the wafer throughout the entire process, providing a positioning effect through the lifting of the ejector pin.

[0007] Generally speaking, it is inconvenient to fix the top end surface area of ​​the ejector pin. In order to ensure that the surface of the electrostatic chuck has sufficient adsorption area, the diameters of the ejector pin and its mounting hole are relatively small. However, when a small-diameter ejector pin is used to support a wafer, the contact area with the wafer is too small, resulting in excessive contact voltage between the wafer and the top surface of the ejector pin, which may damage the wafer.

[0008] Therefore, in order to solve the above problems, an electrostatic chuck which is convenient for adsorbing wafers is provided. Summary of the invention

[0009] The present invention provides an electrostatic chuck that is convenient for adsorbing wafers in order to solve the problem that it is difficult to gently adjust the local temperature of a traditional electrostatic chuck during operation, and to solve the problem that the contact area between the ejector pin and the wafer is too small to cause damage to the wafer.

[0010] The present invention solves the above technical problems through the following technical solutions: The present invention provides an electrostatic chuck for absorbing wafers, comprising a substrate, an insulating layer fixed on the surface of the substrate, an electrostatic electrode arranged inside the substrate, a mounting hole provided on the substrate, a lift pin which can be raised and lowered is arranged on the mounting hole, the end of the lift pin can be lower than the surface of the insulating layer, and a coolant circulation channel for entering and exiting the coolant is provided on the substrate; A supporting assembly, wherein the supporting assembly is arranged on the ejector pin, the supporting assembly is unfolded to be flush with the top surface of the ejector pin during the ascending stage of the ejector pin, and the ejector pin is retracted during the descending stage; It also includes a plurality of regulating components that can assist in temperature regulation, and the regulating components are distributed at equal intervals along the cooling liquid circulation channel inside the substrate.

[0011] The supporting assembly includes a driving portion and a plurality of unfolding portions, wherein the unfolding portions are arranged on the top of the ejector pin, and the unfolding portions are flush with the top surface of the ejector pin; The driving part is fixed on the inner wall of the mounting hole, and the driving part is arranged on the surface of the first driving unit that drives the ejector pin to rise and fall; The driving part is in driving connection with the unfolding part, and the driving part drives the unfolding part to unfold or retract. The unfolding parts are distributed on the top of the ejector pin in a ring array.

[0012] In the technical solution, the unfolding portion includes a first supporting plate, the first supporting plate is fixedly connected to the top side wall of the ejector pin, the outer end of the first supporting plate is rotatably connected to the second supporting plate, the other end of the second supporting plate is rotatably connected to the third supporting plate, and the top surfaces of the first supporting plate, the second supporting plate and the third supporting plate can be flush with the top surface of the ejector pin; A driving limit portion is provided at the connection between the first supporting plate and the second supporting plate and at the connection between the second supporting plate and the third supporting plate. The driving limit portion supports or contracts the connection between the first supporting plate, the second supporting plate and the third supporting plate, and the driving limit portion is connected to the driving portion.

[0013] In the technical solution, the driving limit portion includes a connecting shell and a limit hose, the connection between the first supporting plate and the second supporting plate and the connection between the second supporting plate and the third supporting plate are both fixed with a connecting shell, the connection between the first supporting plate and the second supporting plate and the connection between the second supporting plate and the third supporting plate are connected and communicated with each other through a plurality of limit hoses, and the driving limit portions between the connection between the first supporting plate and the second supporting plate and between the second supporting plate and the third supporting plate are independent of each other, that is, they are not communicated with each other; Coil springs are provided at the connection between the first supporting plate and the second supporting plate and at the connection between the second supporting plate and the third supporting plate, and the first supporting plate, the second supporting plate and the third supporting plate are placed in a contracted state through the coil springs.

[0014] Further, the driving part includes a bearing shell, the bearing shell is an annular structure, the bearing shell is fixed to the inner wall of the mounting hole through a connecting rod, the bearing shell is sleeved on the first driving unit, and the first driving unit is one of a pneumatic rod or a hydraulic rod; A partition plate of an annular structure is fixed in the inner cavity of the bearing shell, and the partition plate separates the inner cavity of the bearing shell to form two closed driving cavities, and a first driving member and a second driving member are respectively arranged in the two driving cavities, and the first driving member and the second driving member slide in the two driving cavities respectively; It also includes at least two moving shafts, one end of which is fixed to the moving end of the first driving unit, and the other end of which passes through the bottom outer wall of the bearing shell and is drivingly connected to the first driving member and the second driving member; The two driving chambers are respectively connected to the corresponding driving limit parts through air guide tubes of sufficient length.

[0015] Specifically, the first driving member is located inside the driving chamber at a lower position, and the first driving member includes a first piston of an annular structure, the first piston is slidably connected to the inner wall of the driving chamber, and is connected to the inner wall of the driving chamber in a sliding seal, the first piston is provided with sliding through holes whose positions and numbers correspond to the positions and numbers of the moving shafts, the moving shafts can pass through the sliding through holes, and the connection between the moving shaft and the bottom of the sliding through holes is a sliding seal; A first transmission cavity is provided on the top side wall of the first piston on both sides of the sliding through hole, a first transmission rod is fixed on the bottom side wall of the first transmission cavity, the first transmission cavity and the first transmission column on the bottom side wall of the partition plate can be plugged into each other, an insertion cavity is provided on the bottom side wall of the first transmission column, and the insertion cavity and the first transmission rod can be plugged into each other; The movable shaft passes through a connecting through hole on the surface of the partition plate and is connected to the second driving member, and the bottom of the connecting through hole is covered with a sealing portion.

[0016] In the present technical solution, the sealing part includes two slidingly connected sealing plates, which jointly cover the surface of the connecting through hole, and the two sealing plates are symmetrically distributed, and the two sealing plates are both slidingly connected to the bottom side wall of the partition plate, and one end of the first transmission rope is fixed on the outer end surface of the two partition plates, and the first transmission rope covers the surface of the plug-in cavity after passing through the guide wheel, and the guide wheel is fixed on the side wall of the partition plate through which the first transmission rope passes, and the sealing plate and the partition plate are connected in a sliding sealing manner, and a sealing strip is provided at the connection between the two partition plates.

[0017] In the technical solution, the second driving member includes a second piston, the second driving member is located inside the driving chamber at a high position, the second driving member includes a second piston of an annular structure, the second piston is slidably connected to the inner wall of the corresponding driving chamber, and is slidably sealed to the inner wall of the driving chamber; The bottom side wall of the second piston is provided with insertion holes whose positions and number correspond to the positions and number of the moving shafts. Symmetrical limiting parts are arranged on both sides of the insertion holes, and the limiting parts can be clamped with the ear plates on the end of the moving shaft.

[0018] In the technical solution, the limiting part includes a limiting plate, the limiting plate is slidably connected to the slide groove on the inner wall of the insertion hole in the horizontal direction, and a second spring is fixed to the limiting plate, and the two ends of the second spring are respectively fixed to the limiting plate and the slide groove, one end of the limiting plate can be inserted into the insertion hole, and the other end of the limiting plate is fixed to the second transmission rope, and the other end of the second transmission rope passes through the inner wall of the second transmission cavity and is connected to the inner wall of the opposite side, that is, the second transmission rope passes through the central axis of the second transmission cavity; A second transmission column can be inserted into the second transmission cavity, and the second transmission column can be connected to the second transmission rope; The connection between the air guide tube and the driving chamber is located at the top of the driving chamber, and the thickness of the first piston is greater than the diameter of the hole at the connection between the air guide tube and the driving chamber.

[0019] In the technical solution, the regulating assembly includes a judgment module for adjusting the temperature for logical judgment and a regulating shell, the regulating shell is fixed to the inner wall of the coolant circulation channel by a connecting rod, a piston plate is slidably connected in the inner cavity of the regulating shell, and a sliding seal is formed between the piston plate and the inner wall of the regulating shell; The top and bottom of the regulating shell are both provided with a plurality of connecting tubes, and the top side wall and the bottom side wall of the piston plate are provided with driven rods corresponding to the connecting tubes, and the driven rods can pass through the corresponding connecting tubes, and the two ends of the driven rods are respectively fixed with a first sealing plug and a second sealing plug, the first sealing plug is fixed on the piston plate, the first sealing plug can overlap and seal with the inner end of the connecting tube, and the second sealing plug can overlap and seal with the outer end of the connecting tube, and the outer end and the inner end of the connecting tube are respectively located outside and inside the regulating shell; A sliding driving member is fixed on the piston plate, which can drive it to slide in the inner cavity of the adjustment shell. A refrigeration unit and a heating unit are arranged on the inner side wall of the adjustment shell. The refrigeration unit and the heating unit are preferably existing refrigeration and heating devices of suitable size, such as semiconductor refrigeration sheets and electric heating wires, and matching use equipment; The judgment module includes a temperature sensor and a matching processing chip, and temperature sensors are installed inside and outside the adjustment shell.

[0020] The sliding drive member comprises a second driving unit, wherein the second driving unit is connected to a driving rod, the driving rod penetrates the side wall of the regulating shell and is connected to the piston plate, and the connection between the driving rod and the regulating shell is a sliding sealing connection.

[0021] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0022] The positive and progressive effects of the present invention are: The expandable support assembly increases the contact area between the ejector pin and the wafer, reducing the possibility of damage to the wafer when the ejector pin is ejected or retracted.

[0023] Adjustment of the local temperature of the electrostatic chuck can be further assisted by adjusting the assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the structure of the present invention with a supporting component; Figure 3 It is a structural schematic diagram of the supporting assembly of the present invention; Figure 4 It is a schematic diagram of the structure of the present invention when the unfolding part is retracted; Figure 5 It is a structural schematic diagram of the driving part when the unfolding part of the present invention is retracted; Figure 6 It is a schematic diagram of the single-side structure of the load-bearing shell of the present invention; Figure 7 It is a schematic diagram of the positional relationship between the first driving member, the second driving member and the partition plate of the present invention; Figure 8 It is a half-section structural schematic diagram of the first piston of the present invention; Fig. 9 It is a structural schematic diagram of the supporting assembly when the unfolding part of the present invention is in a semi-expanded state; Fig.10 It is a structural schematic diagram of the unfolding part of the present invention in a semi-expanded state; Fig.11 It is a structural schematic diagram of the driving part of the present invention when the unfolding part is half unfolded; Fig.12 For the present invention Fig.11 Schematic diagram of the single-side structure of the middle load-bearing shell; Fig.13 For the present invention Fig.12 A local enlarged structural schematic diagram; Fig.14 It is a structural schematic diagram of the supporting assembly when the unfolding portion of the present invention is in a fully unfolded state; Fig.15 It is a structural schematic diagram of the unfolding part of the present invention when it is in a fully unfolded state; Fig.16 This is a schematic diagram of the structure of the driving limiter of the present invention; Fig.17It is a schematic diagram of the overall structure of the present invention with an adjustment component; Fig.18 It is a schematic diagram of the connection structure between the regulating component and the coolant circulation channel of the present invention; Fig.19 It is a schematic diagram of the structure of the regulating component of the present invention.

[0025] The following are the descriptions of the reference numerals: In the attached drawings: 1, substrate; 11, electrostatic electrode; 12, insulating layer; 13, coolant circulation channel; 2, ejector pin; 21, first drive unit; 3, adjustment assembly; 31, adjustment shell; 32, piston plate; 33, second drive unit; 331, drive rod; 34, driven rod; 35, first sealing plug; 36, second sealing plug; 37, connecting pipe; 4, drive unit; 41, bearing shell; 42, air guide tube; 5, unfolding unit; 51, first supporting plate; 52, second supporting plate; 53, third supporting plate ; 54. Connecting shell; 55. Limiting hose; 6. First driving member; 61. First piston; 62. First transmission chamber; 63. First transmission rod; 64. Sliding through hole; 7. Second driving member; 71. Second piston; 72. Insertion hole; 73. Limiting plate; 74. Second transmission rope; 75. Second transmission chamber; 8. Partition plate; 81. Second transmission column; 82. First transmission column; 83. Plug-in chamber; 84. First transmission rope; 85. Sealing plate; 86. Connecting through hole; 9. Moving shaft; 91. Ear plate. DETAILED DESCRIPTION

[0026] The present invention is further described below by way of examples, but the present invention is not limited to the specific examples.

[0027] like Figure 1 and Figure 2 As shown, an electrostatic chuck for adsorbing wafers comprises a substrate 1, an insulating layer 12 is fixed on the surface of the substrate 1, an electrostatic electrode 11 is arranged inside the substrate 1, a mounting hole is provided on the substrate 1, a lift pin 2 is arranged on the mounting hole, and the end of the lift pin 2 can be lower than the surface of the insulating layer, and a coolant circulation channel 13 for entering and exiting the coolant is provided on the substrate 1; A supporting assembly, wherein the supporting assembly is arranged on the ejector pin 2, and the supporting assembly is unfolded to be flush with the top surface of the ejector pin 2 during the ascending stage of the ejector pin 2, and the ejector pin 2 is retracted during the descending stage; It also includes a plurality of regulating components 3 that can assist in temperature regulation, and the regulating components 3 are distributed at equal intervals along the cooling liquid circulation channel 13 inside the substrate 1 .

[0028] The contact area between the ejector pin 2 and the wafer is increased by the expandable supporting assembly, thereby reducing the possibility of damaging the wafer when the ejector pin 2 is ejected or retracted.

[0029] The adjustment component 3 can further assist in adjusting the local temperature of the electrostatic chuck.

[0030] Embodiment 1 As one of the embodiments of the present technical solution, the supporting assembly includes a driving portion 4 and a plurality of unfolding portions 5, wherein the unfolding portion 5 is arranged on the top of the ejector pin 2, and the unfolding portion 5 is flush with the top surface of the ejector pin 2; The driving part 4 is fixed on the inner wall of the mounting hole, and the driving part 4 is arranged on the surface of the first driving unit 21 that drives the ejector pin 2 to rise and fall; The driving part 4 is in driving connection with the unfolding part 5 , and the driving part 4 drives the unfolding part 5 to unfold or retract. The unfolding parts 5 are distributed on the top of the ejector pin 2 in a ring array.

[0031] Specifically, as shown in FIG. 4 , the unfolding portion 5 includes a first supporting plate 51, the first supporting plate 51 is fixedly connected to the top side wall of the ejector pin 2, the outer end of the first supporting plate 51 is rotatably connected to the second supporting plate 52, the other end of the second supporting plate 52 is rotatably connected to the third supporting plate 53, and the top surfaces of the first supporting plate 51, the second supporting plate 52 and the third supporting plate 53 can be flush with the top surface of the ejector pin 2; A driving limit portion is provided at the connection between the first supporting plate 51 and the second supporting plate 52 and at the connection between the second supporting plate 52 and the third supporting plate 53, and the driving limit portion supports or contracts the connection between the first supporting plate 51, the second supporting plate 52 and the third supporting plate 53, and the driving limit portion is connected to the driving portion 4.

[0032] By unfolding the second supporting plate 52 and the third supporting plate 53 , the contact area between the ejector pins 2 and the wafer is increased.

[0033] Specifically, Figure 4 and Fig.16 As shown, the driving limiting part includes a connecting shell 54 and a limiting hose 55. The connecting parts of the first supporting plate 51 and the second supporting plate 52 and the connecting parts of the second supporting plate 52 and the third supporting plate 53 are fixed with the connecting shell 54. The connecting parts of the first supporting plate 51 and the second supporting plate 52 and the connecting parts of the second supporting plate 52 and the third supporting plate 53 are connected and communicated with each other through a plurality of limiting hoses 55. The driving limiting parts of the connecting parts of the first supporting plate 51 and the second supporting plate 52 and the second supporting plate 52 and the third supporting plate 53 are independent of each other, that is, they are not communicated with each other. The driving part 4 is used to blow air into the limiting hose 55, so that the limiting hose 55 is propped up and then straightened, so that the second supporting plate 52 and the third supporting plate 53 are rotated and unfolded. The limiting hose 55 is made of soft material, but it does not need to have ductility. Coil springs are provided at the connection between the first support plate 51 and the second support plate 52, as well as at the connection between the second support plate 52 and the third support plate 53. The coil springs keep the first support plate 51, the second support plate 52 and the third support plate 53 in a contracted state. When the second support plate 52 and the third support plate 53 are rotated and unfolded, the coil springs are deformed to generate elastic potential energy, thereby providing a basis for the subsequent contraction of the second support plate 52 and the third support plate 53.

[0034] The driving part 4 includes a bearing shell 41, which is an annular structure. The bearing shell 41 is fixed to the inner wall of the mounting hole through a connecting rod. The bearing shell 41 is sleeved on the first driving unit 21. The first driving unit 21 is one of a pneumatic rod or a hydraulic rod. A partition plate 8 of an annular structure is fixed in the inner cavity of the bearing shell 41. The partition plate 8 separates the inner cavity of the bearing shell 41 to form two closed driving cavities. A first driving member 6 and a second driving member 7 are respectively arranged in the two driving cavities. The first driving member 6 and the second driving member 7 slide in the two driving cavities respectively. It also includes at least two moving shafts 9, one end of which is fixed on the moving end of the first driving unit 21, and the other end of which passes through the bottom outer wall of the bearing shell 41 and is transmission-connected with the first driving member 6 and the second driving member 7. The surface of the moving shaft 9 is sleeved with a first spring, and the two ends of the first spring are respectively fixed on the first piston 61 and the moving shaft 9. The elastic force provided by the first spring is greater than the friction force between the first piston 61 and the inner wall of the bearing shell 41. The first spring is not shown in the figure. The moving shaft 9 moves upward synchronously when the first driving unit 21 rises. During the upward movement of the moving shaft 9, the first piston 61 on the first driving member 6 is driven to move by the first spring. At this time, the first spring does not deform or deforms slightly. The two driving chambers are respectively connected to the corresponding driving limit parts through air pipes 42 of sufficient length. The corresponding air pipes 42 are inflated through the first driving member 6 and the second driving member 7, and the gas enters the corresponding limit hose 55 through the air pipes 42.

[0035] The first driving member 6 is located inside the driving chamber at the lower part. The first driving member 6 includes a first piston 61 of an annular structure. The first piston 61 is slidably connected to the inner wall of the driving chamber and is connected to the inner wall of the driving chamber in a sliding and sealing manner. The first piston 61 is provided with sliding through holes 64 whose positions and numbers correspond to the positions and numbers of the moving shafts 9. The moving shafts 9 can pass through the sliding through holes 64. The connection between the moving shaft 9 and the bottom of the sliding through holes 64 is a sliding seal. A first transmission cavity 62 is provided on the top side wall of the first piston 61 on both sides of the sliding through hole 64, a first transmission rod 63 is fixed on the bottom side wall of the first transmission cavity 62, the first transmission cavity 62 and the first transmission column 82 on the bottom side wall of the partition plate 8 can be plugged into each other, an insertion cavity 83 is provided on the bottom side wall of the first transmission column 82, and the insertion cavity 83 can be plugged into the first transmission rod 63; The moving shaft 9 passes through a connecting through hole 86 on the surface of the partition plate 8 and is connected to the second driving member 7 , and the bottom of the connecting through hole 86 is covered with a sealing portion.

[0036] The sealing portion includes two slidingly connected sealing plates 85, which jointly cover the surface of the connecting through hole 86, and are symmetrically distributed. Both sealing plates 85 are slidingly connected to the bottom side wall of the partition plate 8, and one end of the first transmission rope 84 is fixed to the outer end surface of the two partition plates 8. The first transmission rope 84 covers the surface of the plug-in cavity 83 after passing through the guide wheel, and the guide wheel is fixed on the side wall of the partition plate 8 through which the first transmission rope 84 passes. The sealing plate 85 is slidingly sealed to the partition plate 8, and a sealing strip is provided at the connection between the two partition plates 8.

[0037] The first driving unit 21 drives the ejector pin 2 to move upward. When the moving end of the first driving unit 21 moves upward, it drives the moving shaft 9 to move upward. The moving shaft 9 drives the first piston 61 to move upward through the first spring. During the upward movement, the first piston 61 presses the gas in the corresponding driving chamber into the limiting hose 55 between the second supporting plate 52 and the third supporting plate 53 through the air guide pipe 42, so that the supporting assembly is in a semi-expanded state. Fig.10 shown.

[0038] When the first piston 61 moves to the partition plate 8, the first transmission rod 63 is inserted into the plug-in cavity 83 on the first transmission column 82. During the insertion of the first transmission rod 63 into the plug-in cavity 83, the second transmission rope 74 is pushed to move, thereby causing the sealing plate 85 to slide, so that the sealing plate 85 slides to both sides and no longer covers the connecting hole 86.

[0039] A third spring is fixed on both sealing plates 85 , and two ends of the third spring are fixed on the sealing plate 85 and the partition plate 8 respectively. In the above process, the third spring is deformed, and the third spring is not shown in the figure.

[0040] The second driving member 7 includes a second piston 71, which is located inside the driving chamber at a high position. The second driving member 7 includes a second piston 71 of an annular structure, and the second piston 71 is slidably connected to the inner wall of the corresponding driving chamber, and is in a sliding and sealing connection with the inner wall of the driving chamber; The bottom side wall of the second piston 71 is provided with insertion holes 72 whose positions and numbers correspond to the positions and numbers of the movable shaft 9 , and symmetrical limiting parts are arranged on both sides of the insertion holes 72 , which can be engaged with the ear plates 91 on the end of the movable shaft 9 .

[0041] The limiting portion includes a limiting plate 73, which is slidably connected to the slide groove on the inner wall of the insertion hole 72 in the horizontal direction, and a second spring is fixed to the limiting plate 73, and the two ends of the second spring are respectively fixed to the limiting plate 73 and the slide groove. One end of the limiting plate 73 can be inserted into the insertion hole 72, and the other end of the limiting plate 73 is fixed to a second transmission rope 74, and the other end of the second transmission rope 74 passes through the inner wall of the second transmission cavity 75 and is connected to the inner wall of the opposite side, that is, the second transmission rope 74 passes through the central axis of the second transmission cavity 75. The elastic force provided by the second spring is less than the friction force between the second piston 71 and the inner wall of the bearing shell 41. The second spring is not shown in the figure; The second transmission column 81 can be inserted into the second transmission cavity 75, and the second transmission column 81 can overlap with the second transmission rope 74; The connection between the air duct 42 and the driving chamber is located at the top of the driving chamber. The thickness of the first piston 61 is greater than the diameter of the hole at the connection between the corresponding air duct 42 and the driving chamber. When the first piston 61 slides to the connection between the corresponding air duct 42 and the driving chamber, the first piston 61 can seal the hole at the connection between the air duct 42 and the driving chamber. At this time, the first piston 61 slides and overlaps with the partition plate 8.

[0042] After the moving shaft 9 drives the first piston 61 to move to the partition plate 8, the moving shaft 9 continues to move upward with the first driving unit 21. The moving shaft 9 compresses the first spring in the process of continuing to move upward, and then passes through the connecting through hole 86 to the inner wall of the insertion hole 72 on the second piston 71. The moving shaft 9 that continues to move upward drives the second piston 71 to move upward. In the process of the second piston 71 moving upward, the gas in the corresponding driving chamber is pressed into the limiting hose 55 between the first supporting plate 51 and the second supporting plate 52 through the air guide pipe 42, so that the first supporting plate 51, the second supporting plate 52 and the third supporting plate 53 are in a fully expanded state, as shown in FIG. Fig.15 As shown, during the process of the unfolding portion 5 changing from the contracted state to the fully unfolded state, the ejector pin 2 continues to move upward, and during the process of changing from the semi-expanded state to the fully unfolded state, the first supporting plate 51, the second supporting plate 52 and the third supporting plate 53 do not contact the inside of the mounting hole.

[0043] When the second piston 71 is driven upward during movement, the second transmission chamber 75 on the second piston 71 gradually disengages from the second transmission column 81, and the second transmission column 81 no longer compresses the second transmission rope 74. The limiting plate 73 connected to the second transmission rope 74 moves toward one side of the ear plate 91 under the action of the second spring, thereby being engaged with the bottom of the ear plate 91. When the ejector pin 2 contracts, the moving shaft 9 drives the second piston 71 to reset through the engagement between the ear plate 91 and the limiting plate 73.

[0044] When the second piston 71 is resetting to the partition plate 8, the second transmission chamber 75 covers the second transmission column 81. The second transmission column 81 pushes the second transmission rope 74 to move. The second transmission rope 74 drives the limit plate 73 to move to both sides, so that the limit plate 73 is disengaged from the ear plate 91, thereby disengaging the moving shaft 9 from the second piston 71. After disengagement, the moving shaft 9 continues to retract to the bottom of the partition plate 8, thereby driving the first piston 61 to reset.

[0045] During the resetting process of the first piston 61 , the first transmission rod 63 gradually disengages from the plug-in cavity 83 , thereby no longer restricting the first transmission rope 84 . Under the action of the third spring, the two sealing plates 85 are reset, thereby sealing the connecting through hole 86 again.

[0046] The air is exhausted so that the supporting assembly is shrunk during the downward movement of the ejector pin 2.

[0047] Embodiment 2 As one of the embodiments of this technical solution, Fig.18 and 19 As shown, the regulating component 3 includes a judgment module for adjusting the temperature for logical judgment and a regulating shell 31, the regulating shell 31 is fixed to the regulating shell 31 on the inner wall of the coolant circulation channel 13 by a connecting rod, a piston plate 32 is slidably connected in the inner cavity of the regulating shell 31, and a sliding seal is formed between the piston plate 32 and the inner wall of the regulating shell 31; A plurality of connecting tubes 37 are disposed on the top and bottom of the regulating housing 31. A driven rod 34 corresponding to the connecting tube 37 is disposed on the top side wall and the bottom side wall of the piston plate 32. The driven rod 34 can pass through the corresponding connecting tube 37. A first sealing plug 35 and a second sealing plug 36 are respectively fixed at both ends of the driven rod 34. The first sealing plug 35 is fixed on the piston plate 32. The first sealing plug 35 can overlap and seal with the inner end of the connecting tube 37. The second sealing plug 36 can overlap and seal with the outer end of the connecting tube 37. The outer end and the inner end of the connecting tube 37 are respectively located outside and inside the regulating housing 31. The piston plate 32 is fixed with a sliding driving member that can drive it to slide in the inner cavity of the adjustment shell 31. The inner side wall of the adjustment shell 31 is provided with a refrigeration unit and a heating unit. The refrigeration unit and the heating unit are preferably existing refrigeration and heating devices of suitable size, such as semiconductor refrigeration sheets and electric heating wires, and matching use equipment; The judgment module includes a temperature sensor and a matching processing chip, and temperature sensors are installed inside and outside the adjustment shell 31.

[0048] The temperature sensor is electrically connected to the processing chip. The temperature sensor monitors the internal temperature of the coolant circulation channel 13. When the temperature of the area where the adjustment component 3 is located is significantly increased or decreased, the refrigeration unit and the heating unit are used to quickly heat or reduce the temperature of the medium inside the corresponding adjustment shell 31, and then the sliding drive member is started to drive the piston plate 32 to move and discharge the medium in the piston plate 32, so as to achieve the purpose of quickly adjusting the local temperature of the electrostatic suction cup. At the same time, an equal amount of medium inside the coolant circulation channel 13 is extracted into the inner cavity of the adjustment shell 31 to facilitate the next adjustment, and no medium will be added during the adjustment process.

[0049] The sliding drive member includes a second driving unit 33, which is connected to a driving rod 331. The driving rod 331 passes through the side wall of the adjusting shell 31 and is connected to the piston plate 32. The connection between the driving rod 331 and the adjusting shell 31 is a sliding sealing connection.

[0050] The first spring, the second spring, the third spring and the coil spring in the present application can be made of high-temperature spring materials, for example, ceramic springs and springs made of other high-temperature resistant materials can be used.

[0051] The high temperature resistant materials may be Inconel X-750 and Inconel 718 in nickel-based alloys, Ti-6Al-4V in titanium alloys, etc.

[0052] The present invention is not limited to the above-mentioned embodiments. Any changes in shape or structure are within the protection scope of the present invention. The protection scope of the present invention is defined by the attached claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principle and essence of the present invention, but these changes and modifications are within the protection scope of the present invention.

Claims

1. An electrostatic chuck for absorbing wafers, comprising a substrate (1), an insulating layer (12) being fixed on the surface of the substrate (1), an electrostatic electrode (11) being arranged inside the substrate (1), a mounting hole being provided on the substrate (1), a liftable ejector pin (2) being arranged on the mounting hole, an end of the ejector pin (2) being lower than the surface of the insulating layer, and a coolant circulation channel (13) for the inlet and outlet of coolant being provided on the substrate (1), characterized in that: It also comprises a supporting assembly, the supporting assembly being arranged on the ejector pin (2), the supporting assembly being expanded to be flush with the top surface of the ejector pin (2) when the ejector pin (2) is in the ascending stage, and the supporting assembly being retracted when the ejector pin (2) is in the descending stage; It also includes a plurality of regulating components (3) for assisting in temperature regulation, wherein the regulating components (3) are distributed at equal intervals along a cooling liquid circulation channel (13) inside the base plate (1).

2. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 1, characterized in that: The supporting assembly comprises a driving portion (4) and a plurality of unfolding portions (5), wherein the unfolding portions (5) are arranged on the top of the ejector pin (2), and the unfolding portions (5) are flush with the top surface of the ejector pin (2); The driving part (4) is fixed on the inner wall of the mounting hole, and the driving part (4) is arranged on the surface of a first driving unit (21) that drives the ejector pin (2) to move up and down; The driving part (4) is in driving connection with the unfolding part (5), and the driving part (4) drives the unfolding part (5) to unfold or retract, and the unfolding parts (5) are distributed in a ring array on the top of the ejector pin (2).

3. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 2, characterized in that: The unfolding portion (5) comprises a first supporting plate (51), the first supporting plate (51) being fixedly connected to the top side wall of the ejector pin (2), the outer end of the first supporting plate (51) being rotatably connected to the second supporting plate (52), the other end of the second supporting plate (52) being rotatably connected to the third supporting plate (53), and the top surfaces of the first supporting plate (51), the second supporting plate (52) and the third supporting plate (53) being flush with the top surface of the ejector pin (2); A driving limit portion is provided at the connection between the first supporting plate (51) and the second supporting plate (52) and at the connection between the second supporting plate (52) and the third supporting plate (53), the driving limit portion supports or contracts the connection between the first supporting plate (51), the second supporting plate (52) and the third supporting plate (53), and the driving limit portion is connected to the driving portion (4).

4. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 3, characterized in that: The driving limiting portion comprises a connecting shell (54) and a limiting hose (55); the connecting portion between the first supporting plate (51) and the second supporting plate (52) and the connecting portion between the second supporting plate (52) and the third supporting plate (53) are both fixed with the connecting shell (54); the connecting portions between the first supporting plate (51) and the second supporting plate (52) and the connecting portions between the second supporting plate (52) and the third supporting plate (53) are connected and communicated with each other via a plurality of limiting hoses (55); Coil springs are provided at the connection between the first supporting plate (51) and the second supporting plate (52) and at the connection between the second supporting plate (52) and the third supporting plate (53).

5. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 3, characterized in that: The driving part (4) comprises a bearing shell (41), the bearing shell (41) is an annular structure, the bearing shell (41) is fixed to the inner wall of the mounting hole via a connecting rod, and the bearing shell (41) is sleeved on the first driving unit (21); A partition plate (8) of an annular structure is fixed to the inner cavity of the bearing shell (41), and the partition plate (8) separates the inner cavity of the bearing shell (41) to form two closed driving cavities, and a first driving member (6) and a second driving member (7) are respectively arranged inside the two driving cavities, and the first driving member (6) and the second driving member (7) are respectively slidably connected inside the two driving cavities; It also comprises at least two moving shafts (9), one end of the moving shaft (9) being fixed to the moving end of the first driving unit (21), the other end of the moving shaft (9) passing through the bottom outer wall of the bearing shell (41) and being drivingly connected to the first driving member (6) and the second driving member (7), the surface of the moving shaft (9) being sleeved with a first spring, the two ends of the first spring being respectively fixed to the first piston (61) and the moving shaft (9); The two drive chambers are respectively connected to corresponding drive limit parts via air guide tubes (42) of sufficient length.

6. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 5, characterized in that: The first driving member (6) is located inside the driving chamber at a lower position. The first driving member (6) comprises a first piston (61) of an annular structure. The first piston (61) is slidably connected to the inner wall of the driving chamber and is connected to the inner wall of the driving chamber in a sliding sealing manner. The first piston (61) is provided with sliding through holes (64) whose positions and number correspond to the positions and number of the moving shafts (9). The moving shafts (9) pass through the sliding through holes (64). The connection between the moving shafts (9) and the bottom of the sliding through holes (64) is a sliding seal. A first transmission cavity (62) is provided on the top side walls of the first piston (61) on both sides of the sliding through hole (64); a first transmission rod (63) is fixed on the bottom side wall of the first transmission cavity (62); the first transmission cavity (62) and a first transmission column (82) on the bottom side wall of the partition plate (8) are plugged into each other; an insertion cavity (83) is provided on the bottom side wall of the first transmission column (82); and the insertion cavity (83) and the first transmission rod (63) are plugged into each other; The movable shaft (9) passes through a connecting through hole (86) on the surface of the partition plate (8) and is connected to the second driving member (7), and the bottom of the connecting through hole (86) is covered with a sealing portion.

7. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 6, characterized in that: The sealing portion comprises two slidably connected sealing plates (85), the two sealing plates (85) jointly cover the surface of the connecting through hole (86), and the two sealing plates (85) are symmetrically distributed, and the two sealing plates (85) are both slidably connected to the bottom side wall of the partition plate (8), and one end of a first transmission rope (84) is fixed to the outer end surface of the two partition plates (8), and the first transmission rope (84) covers the surface of the plug-in cavity (83) after passing through a guide wheel, and the guide wheel is fixed to the side wall of the partition plate (8) through which the first transmission rope (84) passes.

8. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 6, characterized in that: The second driving member (7) comprises a second piston (71). The second driving member (7) is located inside the driving chamber at a high position. The second driving member (7) comprises a second piston (71) of an annular structure. The second piston (71) is slidably connected to the inner wall of the corresponding driving chamber and is in a sliding sealing connection with the inner wall of the driving chamber. The bottom side wall of the second piston (71) is provided with insertion holes (72) whose positions and number correspond to the positions and number of the movable shafts (9). Symmetrical limiting portions are provided on both sides of the insertion holes (72), and the limiting portions are engaged with the ear plates (91) at the end of the movable shaft (9).

9. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 8, characterized in that: The limiting portion comprises a limiting plate (73), the limiting plate (73) being slidably connected to a slide groove on the inner wall of the insertion hole (72) in a horizontal direction, and a second spring being fixed to the limiting plate (73), one end of the limiting plate (73) extending into the insertion hole (72), and a second transmission rope (74) being fixed to the other end of the limiting plate (73), and the other end of the second transmission rope (74) passing through the inner wall of the second transmission cavity (75) and connected to the inner wall on the opposite side; A second transmission column (81) is inserted into the second transmission cavity (75), and the second transmission column (81) is overlapped with the second transmission rope (74); The connection between the air guide tube (42) and the drive chamber is located at the top of the drive chamber, and the thickness of the first piston (61) is greater than the diameter of the hole at the connection between the air guide tube (42) and the drive chamber.

10. The electrostatic chuck for facilitating wafer adsorption as claimed in claim 1, characterized in that: The regulating assembly (3) comprises a judgment module for regulating temperature and performing logic judgment and a regulating shell (31); the regulating shell (31) is fixed to the inner wall of the coolant circulation channel (13) via a connecting rod; a piston plate (32) is slidably connected in the inner cavity of the regulating shell (31); a sliding seal is formed between the piston plate (32) and the inner wall of the regulating shell (31); A plurality of connecting tubes (37) are provided on the top and bottom of the regulating housing (31); driven rods (34) corresponding to the connecting tubes (37) are provided on the top side wall and the bottom side wall of the piston plate (32); the driven rods (34) pass through the corresponding connecting tubes (37); a first sealing plug (35) and a second sealing plug (36) are respectively fixed at both ends of the driven rod (34); the first sealing plug (35) is fixed on the piston plate (32); the first sealing plug (35) overlaps and seals the inner end of the connecting tube (37); and the second sealing plug (36) overlaps and seals the outer end of the connecting tube (37); A sliding driving member is fixed on the piston plate (32) to drive it to slide in the inner cavity of the regulating shell (31), and a refrigeration unit and a heating unit are arranged on the inner side wall of the regulating shell (31); The judgment module comprises a temperature sensor and a matching processing chip, and temperature sensors are installed both inside and outside the adjustment shell (31).

Images