Small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication internet

Abstract

The invention discloses a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication internet, and relates to the technical field of radio frequency integrated circuit design, the filter chip comprises a GaAs substrate and an ultra-wide stopband lumped GaAs filter circuit arranged on the substrate, the ultra-wide stopband lumped GaAs filter chip comprises an input port and an output port, the input port is connected with the output port, and the output port is connected with the output port. The filter comprises an input port, an output port and a capacitance-inductance resonant coupling network connected between the input port and the output port, the capacitance-inductance resonant coupling network comprises four lumped inductors and five lumped capacitors, and three resonators and three capacitance-inductance couplings are formed, so that an out-of-band transmission zero point of the filter is realized, and the filter has a wide application prospect. According to the wide-stop-band band-pass filter, the novel circuit coupling topological structure is adopted, the IPD technology is combined, the device performance can be improved, meanwhile, the size of the filter is reduced, and the filtering characteristics of broadband high selectivity and wide stop band are achieved.

Description

Technical Field

[0001] The present invention relates to the field of chip technology, and in particular to a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet. Background Art

[0002] Mobile satellite communication systems have been developing technologically in recent decades. In 2010, LTE commercial services began to use microwave frequency bands. In 2020, the fifth generation (5G) satellite communication technology has been launched worldwide. 5G is the first generation of technology that supports millimeter wave (mmW) frequency bands. The new 5G satellite communication technology supports frequency bands up to 52.6GHz, and future versions are studying expansion to 71GHz. It is expected that by 2030, the new market value created by 5G will be further expanded through the next generation 6G. The 6G network, the sixth generation of mobile communication standards, will be a fully connected world integrating terrestrial wireless and satellite communications. By integrating satellite communications into 6G mobile communications, seamless global coverage can be achieved. The data transmission rate of 6G may reach 50 times that of 5G, and the latency is shortened to one-tenth of 5G. It is far superior to 5G in terms of peak rate, latency, traffic density, connection density, mobility, spectrum efficiency, positioning capability, etc.

[0003] At the same time, with the rapid development of satellite communication technology, the communication system is developing towards high performance, miniaturization and high reliability, which puts forward higher requirements on the size and performance of components such as bandpass filters in the system. Bandpass filters are one of the important components in wireless communication systems. In order to achieve better communication quality, bandpass filters are required to have lower in-band loss and wider stopband suppression, so as to improve communication capacity and avoid interference between adjacent channels. At the same time, integration and miniaturization are also important design goals of filter design. At present, the miniaturization technology of bandpass filters is mainly achieved by adopting new process methods to miniaturize filters. IPD technology uses a variety of advanced semiconductor processing technologies on GaAs substrates, such as photolithography, thin film deposition and etching processes, so that the processed devices have higher process accuracy at the micron level, and while ensuring high circuit integration, there is still low mutual interference. Summary of the invention

[0004] Purpose of the invention: The technical problem to be solved by the present invention is to address the shortcomings of the prior art. The present invention discloses a small-size, ultra-wide stopband lumped GaAs filter chip designed using a comprehensive design method for 6G satellite communication Internet. The IPD process is used to realize a miniaturized, high-performance wide stopband bandpass filter to solve the problem of excessive size of RF filters designed based on microstrip lines or coupled lines.

[0005] Technical solution: In order to solve the above technical problems, the present invention proposes a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet, the chip comprising a GaAs substrate (14), a grounding metal layer (13), and an ultra-wide stopband lumped GaAs filter circuit located on the upper layer of the GaAs substrate (14), and the grounding metal layer (13) is located on the lower layer of the GaAs substrate (14); the ultra-wide stopband lumped GaAs filter chip comprises a total input port (1), a total output port (2), and a filter resonant network located between the total input port (1) and the total output port (2), and two ends of the filter resonant network are respectively connected to the total input port (1) and the total output port (2) through microstrip connecting lines; the total input port (1) and the total output port (2) are both ground-signal-ground (GSG) structures, and are respectively arranged on both sides of the GaAs substrate (14), and the filter resonant network is connected to the grounding metal layer (13) through a grounding column (12) penetrating the GaAs substrate (14).

[0006] Furthermore, the filtering resonant network comprises a first resonator, a second resonator and a third resonator, the first resonator is composed of a first inductor (3) and a first capacitor (4), and the first inductor (3) and the first capacitor (4) are connected in series, the second end of the first inductor (3) is connected to the first end of the first capacitor (4) via a microstrip connecting line, the first end of the first inductor (3) serves as an input port of the first resonator, and the second end of the first capacitor (4) serves as an output port of the first resonator;

[0007] The second resonator is composed of a second inductor (5) and a second capacitor (6), and the second inductor (5) and the second capacitor (6) are connected in series, the second end of the second inductor (5) is connected to the first end of the second capacitor (6) through a microstrip connecting line, the first end of the second inductor (5) serves as an input port of the second resonator, and the second end of the second capacitor (6) serves as an output port of the second resonator; the output port of the first resonator is connected to the input port of the second resonator;

[0008] The third resonator is composed of a third inductor (7) and a third capacitor (8), and the third inductor (7) and the third capacitor (8) are connected in parallel, a first end of the third inductor (7) and a first end of the third capacitor (8) are connected to form an input port of the third resonator, and a second end of the third inductor (7) and a second end of the third capacitor (8) are connected to form an output port of the third resonator.

[0009] Furthermore, a coupling element is provided between the total input port (1) and the total output port (2), the coupling element comprising a first coupling capacitor (9), a coupling inductor (10) and a second coupling capacitor (11); the first coupling capacitor (9) is connected in parallel with the first resonator, one end of the first coupling capacitor is connected to the input port of the first resonator via a microstrip connecting line, and the other end of the first coupling capacitor is connected to the output port of the first resonator via a microstrip connecting line; the coupling inductor (10) and the second coupling capacitor (11) are connected in series to form a coupling network; one end of the coupling inductor (10) is respectively connected to the output port of the first resonator and the input port of the second resonator, serving as the input port of the coupling network; the other end of the coupling inductor (10) is connected to one end of the second coupling capacitor (11), and the other end of the second coupling capacitor (11) is respectively connected to the first end of the third inductor (7) and the first end of the third capacitor (8), serving as the output port of the coupling network.

[0010] Furthermore, the input port of the first resonator is connected to the total input port (1); the output port of the second resonator is connected to the total output port (2); and the output port of the third resonator is connected to the grounding column (12).

[0011] Furthermore, the topological structure of the entire circuit is a T-shaped structure as a whole.

[0012] Beneficial effects: Compared with the prior art, the technical solution of the present invention has the following beneficial technical effects:

[0013] (1) The present invention provides a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet, wherein the capacitors are all MIM planar capacitors, and the inductors are square inductors obtained by thin-film IPD technology, both of which have high integration, reduce the volume of the inductors and capacitors, and also reduce the volume of the overall circuit, thereby realizing the miniaturization of the circuit.

[0014] (2) This circuit is a chip designed using a comprehensive design method, which has high reproducibility and can more easily use the comprehensive design method to obtain circuits with other values. In addition, the circuit chip size is small, the thickness is thin, and the circuit performance is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, and the advantages and implementation methods of the present invention will be more obvious. The contents of the accompanying drawings are only used to illustrate and explain the present invention, but will not constitute any limitation to the present invention in any sense. In the accompanying drawings:

[0016] Figure 1It is a structural schematic diagram of a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet according to the present invention.

[0017] Figure 2 It is an equivalent circuit diagram of a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet according to the present invention.

[0018] Figure 3 It is an S-parameter curve diagram of the simulation and test processing of a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet in the present invention. DETAILED DESCRIPTION

[0019] The embodiments of the present invention will be described below in conjunction with the accompanying drawings. The implementation modes shown in the accompanying drawings are only exemplary and are intended to explain the principles of the present invention, but are not intended to limit the scope of the present invention.

[0020] The example of the present invention aims to provide a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet, including a substrate and an IPD filter circuit arranged on the substrate, wherein the IPD filter circuit includes an input port, an output port, and a capacitor-inductor resonant network and a coupling element connected between the input port and the output port.

[0021] Among them, the input port located on the far left of the circuit is used to receive signals input from outside the circuit, the capacitor and inductor resonant network in the input and output ports are used to pass signals within the frequency range of 2.7Ghz to 4.8Ghz, and will suppress frequencies outside the 2.7Ghz to 4.8Ghz signal range, and the output port is used to output signals that are still within the 2.7Ghz to 4.8Ghz signal range after being processed by the capacitor and inductor resonant network. The output port is located on the far right of the circuit.

[0022] like Figure 1The present invention provides a small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet, the chip comprising a GaAs substrate (14), a grounding metal layer (13), and an ultra-wide stopband lumped GaAs filter circuit located on the upper layer of the GaAs substrate (14), and the grounding metal layer (13) is located on the lower layer of the GaAs substrate (14); the ultra-wide stopband lumped GaAs filter chip comprises a total input port (1), a total output port (2), and a filter resonant network located between the total input port (1) and the total output port (2), and two ends of the filter resonant network are respectively connected to the total input port (1) and the total output port (2) through microstrip connecting lines; the total input port (1) and the total output port (2) are both ground-signal-ground (GSG) structures, and are respectively arranged on both sides of the GaAs substrate (14); the filter resonant network penetrates the GaAs substrate (14) through a grounding column (12) and is connected to the grounding metal layer (13).

[0023] Furthermore, the filtering resonant network comprises a first resonator, a second resonator and a third resonator, the first resonator is composed of a first inductor (3) and a first capacitor (4), and the first inductor (3) and the first capacitor (4) are connected in series, the second end of the first inductor (3) is connected to the first end of the first capacitor (4) via a microstrip connecting line, the first end of the first inductor (3) serves as an input port of the first resonator, and the second end of the first capacitor (4) serves as an output port of the first resonator;

[0024] The second resonator is composed of a second inductor (5) and a second capacitor (6), and the second inductor (5) and the second capacitor (6) are connected in series, the second end of the second inductor (5) is connected to the first end of the second capacitor (6) through a microstrip connecting line, the first end of the second inductor (5) serves as an input port of the second resonator, and the second end of the second capacitor (6) serves as an output port of the second resonator; the output port of the first resonator is connected to the input port of the second resonator;

[0025] The third resonator is composed of a third inductor (7) and a third capacitor (8), and the third inductor (7) and the third capacitor (8) are connected in parallel, a first end of the third inductor (7) and a first end of the third capacitor (8) are connected to form an input port of the third resonator, and a second end of the third inductor (7) and a second end of the third capacitor (8) are connected to form an output port of the third resonator.

[0026] Furthermore, a coupling element is provided between the total input port (1) and the total output port (2), the coupling element comprising a first coupling capacitor (9), a coupling inductor (10) and a second coupling capacitor (11); the first coupling capacitor (9) is connected in parallel with the first resonator, one end of the first coupling capacitor is connected to the input port of the first resonator via a microstrip connecting line, and the other end of the first coupling capacitor is connected to the output port of the first resonator via a microstrip connecting line; the coupling inductor (10) and the second coupling capacitor (11) are connected in series to form a coupling network; one end of the coupling inductor (10) is respectively connected to the output port of the first resonator and the input port of the second resonator, serving as the input port of the coupling network; the other end of the coupling inductor (10) is connected to one end of the second coupling capacitor (11), and the other end of the second coupling capacitor (11) is respectively connected to the first end of the third inductor (7) and the first end of the third capacitor (8), serving as the output port of the coupling network.

[0027] Furthermore, the input port of the first resonator is connected to the total input port (1); the output port of the second resonator is connected to the total output port (2); and the output port of the third resonator is connected to the grounding column (12).

[0028] Furthermore, the topological structure of the entire circuit is a T-shaped structure as a whole.

[0029] Furthermore, if Figure 2 The topological structure diagram of the radio frequency filter circuit of the present invention is shown, and the topological structure diagram includes a plurality of resonant networks and coupling elements connected between resonators.

[0030] Furthermore, the capacitor in the embodiment of the present invention is a MIM capacitor, which is composed of a top metal layer and a bottom metal layer and a silicon nitride isolation layer therebetween. The capacitor in the embodiment of the present invention includes capacitors C(0-3), which are all MIM planar capacitors, and the specific parameter settings of each capacitor are shown in Table 1.

[0031] Table 1

[0032]

[0033] Furthermore, if Figure 1 and Figure 2As shown, the square inductor in the embodiment of the present invention is composed of a multi-turn transmission line, and the coupling function is achieved by the mutual winding of two square inductors. Optionally, the square inductor in the embodiment of the present invention is composed of three layers of metal transmission lines wound in a square shape, and the external port of the transmission line can be directly connected to other devices, while the internal port is connected to the external device after being led out through the bottom metal. The bottom and middle layers of metal of the transmission line are removed at the intersection of the bottom metal and the three layers of square-wound metal transmission line, so that the top and bottom metals form an air bridge and will not be conductive to each other, thereby achieving electrical isolation. The square inductor in the example of the present invention includes L(1-3), and the specific parameter settings of each square inductor are shown in Table 2.

[0034] Table 2

[0035]

[0036] Furthermore, if Figure 3 As shown, the simulation results of the example of the present invention are that its center frequency is 3.657Ghz, 3db bandwidth is 68%, passband is 2.587Ghz-4.94Ghz, insertion loss is ≤15dB in its passband, three zero points are added outside the band to increase frequency selectivity, and the wide stopband bandpass filtering effect of the circuit as a whole is achieved. The actual measurement results of the processing of the present invention are that its center frequency is 3.624Ghz, 3db bandwidth is 65%, passband is 2.67Ghz-5.02Ghz, insertion loss is ≤13.5dB in its passband, and there are three transmission zero points outside the band.

[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, chip, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, chip, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, chip, article or device including the elements.

[0038] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. For related parts, refer to the partial description of the chip embodiment.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet, characterized in that: The chip comprises a GaAs substrate (14), a grounding metal layer (13), and an ultra-wide stopband lumped GaAs filter circuit located on the upper layer of the GaAs substrate (14); the grounding metal layer (13) is located on the lower layer of the GaAs substrate (14); the ultra-wide stopband lumped GaAs filter chip comprises a total input port (1), a total output port (2), and a filter resonance network located between the total input port (1) and the total output port (2); and two ends of the filter resonance network are respectively connected to the total input port (1) and the total output port (2) through microstrip connecting lines; the total input port (1) and the total output port (2) are both ground-signal-ground (GSG) structures, and are respectively arranged on both sides of the GaAs substrate (14); and the filter resonance network is connected to the grounding metal layer (13) through a grounding column (12) penetrating the GaAs substrate (14).

2. A small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet according to claim 1, characterized in that: The filter resonant network comprises a first resonator, a second resonator and a third resonator, the first resonator is composed of a first inductor (3) and a first capacitor (4), and the first inductor (3) and the first capacitor (4) are connected in series, the second end of the first inductor (3) is connected to the first end of the first capacitor (4) through a microstrip connecting line, the first end of the first inductor (3) serves as an input port of the first resonator, and the second end of the first capacitor (4) serves as an output port of the first resonator; The second resonator is composed of a second inductor (5) and a second capacitor (6), and the second inductor (5) and the second capacitor (6) are connected in series, the second end of the second inductor (5) is connected to the first end of the second capacitor (6) through a microstrip connecting line, the first end of the second inductor (5) serves as an input port of the second resonator, and the second end of the second capacitor (6) serves as an output port of the second resonator; the output port of the first resonator is connected to the input port of the second resonator; The third resonator is composed of a third inductor (7) and a third capacitor (8), and the third inductor (7) and the third capacitor (8) are connected in parallel, a first end of the third inductor (7) and a first end of the third capacitor (8) are connected to form an input port of the third resonator, and a second end of the third inductor (7) and a second end of the third capacitor (8) are connected to form an output port of the third resonator.

3. A small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet according to claim 2, characterized in that: A coupling element is provided between the total input port (1) and the total output port (2), the coupling element comprising a first coupling capacitor (9), a coupling inductor (10) and a second coupling capacitor (11). The first coupling capacitor (9) is connected in parallel with the first resonator, one end of the first coupling capacitor is connected to the input port of the first resonator via a microstrip connecting line, and the other end of the first coupling capacitor is connected to the output port of the first resonator via a microstrip connecting line. The coupling inductor (10) and the second coupling capacitor (11) are connected in series to form a coupling network. One end of the coupling inductor (10) is respectively connected to the output port of the first resonator and the input port of the second resonator, serving as the input port of the coupling network; the other end of the coupling inductor (10) is connected to one end of the second coupling capacitor (11), and the other end of the second coupling capacitor (11) is respectively connected to the first end of the third inductor (7) and the first end of the third capacitor (8), serving as the output port of the coupling network.

4. A small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet according to claim 3, characterized in that: The input port of the first resonator is connected to the total input port (1); the output port of the second resonator is connected to the total output port (2); and the output port of the third resonator is connected to the grounding column (12).

5. A small-size ultra-wide stopband lumped GaAs filter chip for 6G satellite communication Internet according to claim 1, characterized in that: The topological structure of the entire circuit is a T-shaped structure as a whole.

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