Welding method of aluminum heating plate

Abstract

The invention provides a welding method of an aluminum heating plate, which comprises the following steps of: (1) fixing a sleeve and a heating plate body by adopting a welding fixture, and removing the welding fixture after determining a welding route to obtain a blank; and (2) electron beam welding is conducted along the welding route obtained in the step (1), and the aluminum heating plate is obtained. The welding method is easy to operate, the heating plate body and the sleeve are fixed through the welding clamp, the perpendicularity and concentricity of the sleeve and the heating plate body are guaranteed, then the welding quality of a molten pool is improved through electron beam welding, the quality of the aluminum heating plate is improved, and normal use of the aluminum heating plate is guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor welding and relates to a welding method, in particular to a welding method for an aluminum heating plate. Background Art

[0002] Although China started late in the semiconductor design and manufacturing chain, and the international economic situation has declined in recent years, the rapid growth of downstream industries such as communications and automotive electronics markets and the long-term ranking of global electronics manufacturing centers at the forefront of the world have made the consumer electronics market continue to be the second largest market for Chinese semiconductor chips. Therefore, the semiconductor industry still shows a cyclical upward trend.

[0003] As a main wafer heating plate, the market demand for aluminum heating plates is also increasing. For example, CN217018957U discloses a suspended fixed tight brazing heating plate, comprising: an integrally cast plate body, a heating wire is buried in the plate body, the heating wire is provided with a number of hanging wires for connecting with the supporting part of the casting processing equipment, and the hanging wires are evenly arranged along the winding direction of the heating wire; a connecting sleeve is provided in the middle of the plate body, and the heating wire passes through the heating sleeve. Before casting the plate body, the heating wire is suspended in the casting mold through the hanging wire, and then the casting slurry is poured into the casting mold to form the plate body. The casting slurry completely wraps the heating wire in the casting mold, so that the plate body can form a stable and tight combination with the heating wire after cooling and forming, and finally the sleeve is assembled on the plate body.

[0004] CN 216700363U discloses a high-efficiency integrated brazing heating plate, comprising: a heat-conducting plate body, a heat-dissipating plate body arranged below the heat-conducting plate body, and a heating wire arranged in a plate shape between the heat-conducting plate body and the heat-dissipating plate body, wherein a receiving groove matched with the heat-dissipating plate body is provided on the lower surface of the heat-conducting plate body, the heat-dissipating plate body is cast in the receiving groove, a mounting groove matched with the heating wire is provided in the receiving groove, a plurality of coupling grooves with a diameter larger than the mounting groove are provided on the mounting groove, a coupling ring embedded in the coupling groove and covering the heating wire is formed on the heat-dissipating plate body, and a wire-passing hole for the heat-dissipating plate body to pass through is provided in the middle of the heat-dissipating plate body.

[0005] The above structure focuses on the overall structure of the heating plate, but does not focus on the firmness and verticality of the connection between the sleeve and the plate body. Improving the firmness and verticality of the connection between the sleeve and the plate body is an important factor affecting the use effect of the aluminum heating plate.

[0006] In the prior art, the method of connecting the sleeve and the disk body is electron beam welding. Usually, the vertical accuracy is difficult to ensure, and it is generally ensured by machining the slot. However, due to the deformation of the heating wire itself and other problems, the sleeve is skewed to varying degrees, making it difficult to ensure the quality of welding verticality.

[0007] Therefore, it is necessary to provide a welding method for an aluminum heating plate that ensures the verticality of the sleeve and the plate body and ensures the welding effect of the sleeve and the plate body. Summary of the invention

[0008] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a welding method for an aluminum heating plate. The welding method is simple to operate. First, the heating plate body and the sleeve are fixed by a welding fixture to ensure the verticality and concentricity of the sleeve and the heating plate body. Then, electron beam welding is used to improve the welding quality of the molten pool, thereby improving the quality of the obtained aluminum heating plate and ensuring the normal use of the aluminum heating plate.

[0009] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0010] The present invention provides a welding method for an aluminum heating plate, the welding method comprising the following steps:

[0011] (1) A welding fixture is used to fix the sleeve and the heating plate, and after the welding route is determined, the welding fixture is removed to obtain a blank;

[0012] (2) Electron beam welding is performed along the welding route obtained in step (1) to obtain the aluminum heating plate.

[0013] The welding method provided by the present invention is simple to operate. Firstly, the heating plate body and the sleeve are fixed by a welding fixture to ensure the verticality and concentricity of the sleeve and the heating plate body. Then, electron beam welding is used to improve the welding quality of the molten pool, thereby improving the quality of the obtained aluminum heating plate and ensuring the normal use of the aluminum heating plate.

[0014] It is worth noting that the heating disk body described in the present invention includes an upper disk body and a lower disk body. A vertical heating wire rod is connected to the center position of the lower disk body, and a sleeve is provided on the periphery of the heating wire rod. The purpose of the present invention is to fix the sleeve on the upper surface of the lower disk body by welding to prevent the heating wire rod from bending and deformation.

[0015] As a preferred technical solution of the present invention, the welding method further comprises finishing and cleaning the welding surfaces of the sleeve and the heating disk in step (1).

[0016] Preferably, the material of the tool used for the fine machining includes diamond.

[0017] Preferably, the cleaning liquid used in the cleaning process comprises ethanol or isopropanol.

[0018] As a preferred technical solution of the present invention, the thickness flatness of the sleeve and the heating plate in step (1) is ≤0.05mm, for example, it can be 0.05mm, 0.04mm, 0.03mm, 0.02mm or 0.01mm, etc., but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0019] Preferably, the parallelism of the welding surface of the sleeve and the heating plate in step (1) is ≤0.05 mm, for example, it can be 0.05 mm, 0.04 mm, 0.03 mm, 0.02 mm or 0.01 mm, etc., but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0020] As a preferred technical solution of the present invention, the welding fixture includes at least three evenly arranged U-shaped clamps.

[0021] As a preferred technical solution of the present invention, a pad is provided at one end of the U-shaped clamp close to the heating plate.

[0022] Preferably, the material of the pad includes rubber or silicone.

[0023] Preferably, the height of the cushion block is 5 to 10 mm, for example, 5 mm, 6 mm, 7 mm, 8 mm, 9 mm or 10 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0024] As a preferred technical solution of the present invention, a threaded hole is provided at one end of the U-shaped clamp close to the sleeve.

[0025] Preferably, the threaded hole is used for assembling screws for locking the sleeve and the heating plate.

[0026] In the present invention, at least three evenly arranged U-shaped clips are used to fix the sleeve and the heating plate body. During the fixing process, one end of the U-shaped clip is tightly attached to the bottom of the heating plate body through a high-temperature resistant pad, providing an upward force for fixing the sleeve and the heating plate body; the other end of the U-shaped clip is seamlessly fitted with the outer surface of the sleeve, and the sleeve is clamped by using a threaded hole and a screw used in conjunction, and a downward force is provided for fixing the sleeve and the heating plate body, thereby achieving fixation of the sleeve and the heating plate body.

[0027] As a preferred technical solution of the present invention, before determining the welding route in step (1), the step also includes: detecting the verticality and concentricity of the sleeve and the heating disk.

[0028] Preferably, before determining the welding route in step (1), the verticality of the sleeve and the heating disk is ≤0.05°, for example, it can be 0.05°, 0.04°, 0.03°, 0.02° or 0.01°, etc., but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0029] Preferably, before determining the welding route in step (1), the concentricity of the sleeve and the heating disk is 0.01 to 0.05 mm, for example, it can be 0.01 mm, 0.02 mm, 0.03 mm, 0.04 mm or 0.05 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0030] As a preferred technical solution of the present invention, the step (1) of determining the welding route includes: performing laser spot welding on the connection between the sleeve and the heating disk to form a plurality of welding spots.

[0031] Preferably, the depth of the weld is 0.5-1 mm, for example, 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm or 1 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0032] Preferably, the number of welding points between two adjacent U-shaped clips is 5 to 10, for example, 5, 6, 7, 8, 9 or 10.

[0033] Preferably, the welding power of the laser spot welding is 100-200 W, for example, it can be 100 W, 120 W, 140 W, 160 W, 180 W or 200 W, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0034] Preferably, the welding frequency of the laser spot welding is 5 to 10 Hz, for example, 5 Hz, 6 Hz, 7 Hz, 8 Hz, 9 Hz or 10 Hz, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0035] In the present invention, the laser spot welding not only provides a welding route for subsequent electron beam welding, but also realizes the function of fixing the sleeve and the heating plate, so that after the welding fixture is removed, the sleeve and the heating plate are still fixed without affecting the verticality and concentricity.

[0036] As a preferred technical solution of the present invention, the electron beam welding in step (2) includes first electron beam welding, second electron beam welding and third electron beam welding performed sequentially.

[0037] As a preferred technical solution of the present invention, the electron beam current of the first electron beam welding is 5 to 15 mA, for example, it can be 5 mA, 7 mA, 9 mA, 11 mA, 13 mA or 15 mA, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0038] Preferably, the electron beam focus of the first electron beam welding is a surface focus.

[0039] Preferably, the electron beam current of the second electron beam welding is 20-40 mA, for example, 20 mA, 24 mA, 28 mA, 32 mA, 36 mA or 40 mA, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0040] Preferably, the electron beam focus of the second electron beam welding is deep focus.

[0041] Preferably, the welding depth of the second electron beam welding is 10-20 mm, for example, it can be 10 mA, 12 mA, 14 mA, 16 mA, 18 mA or 20 mA, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0042] Preferably, the electron beam focus of the third electron beam welding is a floating focus.

[0043] It is worth noting that the process parameters of the third electron beam welding described in the present invention are not particularly limited and can be those commonly used in the art.

[0044] As a preferred technical solution of the present invention, the present invention provides a welding method for an aluminum heating plate, the welding method comprising the following steps:

[0045] (1) The sleeve and the heating plate are respectively finely processed and cleaned, and then the sleeve and the heating plate are fixed with a welding fixture. After the welding route is determined, the welding fixture is removed to obtain a blank;

[0046] Wherein, the material of the tool used for the fine processing includes diamond, and the cleaning liquid used in the cleaning process includes ethanol or isopropanol;

[0047] The thickness flatness of the sleeve and the heating plate is ≤0.05mm, and the parallelism is ≤0.05mm;

[0048] The connecting fixture comprises at least three evenly arranged U-shaped clips; a pad with a height of 5 to 10 mm is arranged at one end of the U-shaped clip close to the heating plate; a threaded hole is arranged at one end of the U-shaped clip close to the sleeve, and the threaded hole is used for assembling screws to lock the sleeve and the heating plate;

[0049] The method for determining the welding route includes: performing laser spot welding on the connection between the sleeve and the heating plate to form a plurality of welding spots; the welding power of the laser spot welding is 100-200W, and the welding frequency is 5-10HZ; the depth of the welding spot is 0.5-1mm, and the number of welding spots between two adjacent U-shaped clips is 5-10;

[0050] (2) performing electron beam welding along the welding route obtained in step (1) to obtain the aluminum heating plate;

[0051] Wherein, the electron beam welding includes first electron beam welding, second electron beam welding and third electron beam welding performed sequentially;

[0052] The electron beam current of the first electron beam welding is 5-15 mA, and the electron beam focus is the surface focus;

[0053] The electron beam current of the second electron beam welding is 20-40 mA, the electron beam focus is deep focus, and the welding depth is 10-20 mm;

[0054] The electron beam focus of the third electron beam welding is a floating focus.

[0055] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0056] Compared with the prior art, the present invention has the following beneficial effects:

[0057] The welding method provided by the present invention is simple to operate. By using a welding fixture to fix the heating plate body and the sleeve, the verticality and concentricity of the sleeve and the heating plate body are guaranteed. Then, electron beam welding is used to improve the welding quality of the molten pool, thereby improving the quality of the aluminum heating plate and ensuring the normal use of the aluminum heating plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 A schematic diagram of the structure of the aluminum heating plate provided by the present invention;

[0059] Figure 2 The welding assembly diagram of the aluminum heating plate provided by the present invention;

[0060] Figure 3 It is a schematic diagram of the structure of a U-shaped clip in a specific implementation manner of the present invention.

[0061] Among them, 1 is the upper plate body, 2 is the lower plate body, 3 is the U-shaped clamp, 3-1 is the cushion block, 3-2 is the screw, 4 is the heating wire rod, 5 is the sleeve, and 6 is the connection point. DETAILED DESCRIPTION

[0062] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0063] In the following examples and comparative examples, Figure 1 As shown, the aluminum heating plate includes an upper plate body 1 and a lower plate body 2, a vertical heating wire rod 4 is connected to the center of the lower plate body 2, and a sleeve 5 is arranged on the periphery of the heating wire rod 4.

[0064] Example 1

[0065] This embodiment provides a welding method for a heating plate, and the welding method comprises the following steps:

[0066] (1) The sleeve and the heating plate are finely processed and cleaned respectively, and then the sleeve and the heating plate are fixed with a welding fixture (such as Figure 2 After the welding route is determined, the welding fixture is removed to obtain the blank;

[0067] Wherein, the material of the tool used for the fine processing includes diamond, and the cleaning liquid used in the cleaning process is ethanol;

[0068] The thickness flatness of the sleeve and the heating plate is 0.03mm, and the parallelism is 0.03mm;

[0069] The connection fixture includes three evenly arranged Figure 3 The U-shaped clip 3 shown; a pad 3-1 with a height of 7.5 mm is provided at one end of the U-shaped clip 3 close to the heating plate; a threaded hole at one end of the U-shaped clip 3 close to the sleeve is used to assemble the screw 3-2 for locking the sleeve and the heating plate;

[0070] The determining of the welding route includes: performing laser spot welding on the connection 6 between the sleeve and the heating plate to form a plurality of welding spots; the welding power of the laser spot welding is 150W, and the welding frequency is 7.5HZ; the depth of the welding spot is 0.6mm, and the number of welding spots between two adjacent U-shaped clips is 8;

[0071] (2) performing electron beam welding along the welding route obtained in step (1) to obtain the aluminum heating plate;

[0072] Wherein, the electron beam welding includes first electron beam welding, second electron beam welding and third electron beam welding performed sequentially;

[0073] The electron beam current of the first electron beam welding is 10 mA, and the electron beam focus is the surface focus;

[0074] The electron beam current of the second electron beam welding is 30 mA, the electron beam focus is deep focus, and the welding depth is 15 mm;

[0075] The electron beam focus of the third electron beam welding is a floating focus.

[0076] Example 2

[0077] This embodiment provides a welding method for a heating plate, and the welding method comprises the following steps:

[0078] (1) The sleeve and the heating plate are respectively finely processed and cleaned, and then the sleeve and the heating plate are fixed with a welding fixture. After the welding route is determined, the welding fixture is removed to obtain a blank;

[0079] Wherein, the material of the tool used for the fine processing includes diamond, and the cleaning liquid used in the cleaning process is isopropyl alcohol;

[0080] The thickness flatness of the sleeve and the heating plate is 0.05 mm, and the parallelism is 0.05 mm;

[0081] The connecting fixture includes 4 evenly arranged U-shaped clips; a pad with a height of 5 mm is arranged at one end of the U-shaped clip close to the heating plate; a threaded hole is arranged at one end of the U-shaped clip close to the sleeve, and the threaded hole is used for assembling screws to lock the sleeve and the heating plate;

[0082] The determining of the welding route includes: performing laser spot welding on the connection between the sleeve and the heating plate to form a plurality of welding spots; the welding power of the laser spot welding is 100W, and the welding frequency is 5HZ; the depth of the welding spot is 0.5mm, and the number of welding spots between two adjacent U-shaped clips is 6;

[0083] (2) performing electron beam welding along the welding route obtained in step (1) to obtain the aluminum heating plate;

[0084] Wherein, the electron beam welding includes first electron beam welding, second electron beam welding and third electron beam welding performed sequentially;

[0085] The electron beam current of the first electron beam welding is 5 mA, and the electron beam focus is the surface focus;

[0086] The electron beam current of the second electron beam welding is 20 mA, the electron beam focus is deep focus, and the welding depth is 10 mm;

[0087] The electron beam focus of the third electron beam welding is a floating focus.

[0088] Example 3

[0089] This embodiment provides a welding method for a heating plate, and the welding method comprises the following steps:

[0090] (1) The sleeve and the heating plate are respectively finely processed and cleaned, and then the sleeve and the heating plate are fixed with a welding fixture. After the welding route is determined, the welding fixture is removed to obtain a blank;

[0091] Wherein, the material of the tool used for the fine processing includes diamond, and the cleaning liquid used in the cleaning process includes ethanol or isopropanol;

[0092] The thickness flatness of the sleeve and the heating plate is 0.02mm, and the parallelism is 0.05mm;

[0093] The connecting fixture includes three evenly arranged U-shaped clips; a pad with a height of 10 mm is arranged at one end of the U-shaped clip close to the heating plate; a threaded hole is arranged at one end of the U-shaped clip close to the sleeve, and the threaded hole is used for assembling screws to lock the sleeve and the heating plate;

[0094] The determining of the welding route includes: performing laser spot welding on the connection between the sleeve and the heating plate to form a plurality of welding spots; the welding power of the laser spot welding is 200W, and the welding frequency is 10HZ; the depth of the welding spot is 1mm, and the number of welding spots between two adjacent U-shaped clips is 10;

[0095] (2) performing electron beam welding along the welding route obtained in step (1) to obtain the aluminum heating plate;

[0096] Wherein, the electron beam welding includes first electron beam welding, second electron beam welding and third electron beam welding performed sequentially;

[0097] The electron beam current of the first electron beam welding is 15 mA, and the electron beam focus is the surface focus;

[0098] The electron beam current of the second electron beam welding is 40 mA, the electron beam focus is deep focus, and the welding depth is 20 mm;

[0099] The electron beam focus of the third electron beam welding is a floating focus.

[0100] Example 4

[0101] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0102] In this embodiment, the material of the tool used for the fine machining is adjusted to cemented carbide.

[0103] Example 5

[0104] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0105] In this embodiment, finishing and cleaning processes are omitted.

[0106] Example 6

[0107] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0108] In this embodiment, the thickness and flatness of the sleeve and the heating plate are adjusted to 0.1 mm, and the parallelism is adjusted to 0.1 mm.

[0109] Example 7

[0110] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0111] In this embodiment, the number of welding points between two adjacent U-shaped clips is adjusted to one.

[0112] Example 8

[0113] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0114] This embodiment omits the laser spot welding process.

[0115] Example 9

[0116] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0117] In this embodiment, the electron beam current of the first electron beam welding in step (2) is adjusted to 20 mA.

[0118] Example 10

[0119] This embodiment provides a welding method for an aluminum heating plate, and the welding method is different from that of Embodiment 1 only in that:

[0120] In this embodiment, the electron beam current of the second electron beam welding in step (2) is adjusted to 45 mA.

[0121] Comparative Example 1

[0122] This comparative example provides a welding method for an aluminum heating plate, which differs from Example 1 only in that:

[0123] The use of the welding jig was omitted in this comparative example.

[0124] Comparative Example 2

[0125] This comparative example provides a welding method for an aluminum heating plate, which differs from Example 1 only in that:

[0126] In this comparative example, the welding fixture was not removed before electron beam welding.

[0127] Performance characterization:

[0128] The verticality and concentricity of the aluminum heating plate provided in the above-mentioned embodiment and comparative example, as well as the sleeve and the heating plate body before determining the welding route in step (1) were measured, and the results are shown in Table 1;

[0129] The verticality is the angle between the axis of the sleeve and the axis of the heating plate. The smaller the verticality value, the better the quality of the aluminum heating plate.

[0130] The concentricity is the distance between the center of the sleeve and the heating plate. The smaller the distance, the better the quality of the aluminum heating plate.

[0131] The welding route as described in Table 1 is specifically determined as follows: after the sleeve and the heating plate are fixed with a welding fixture, and before laser spot welding.

[0132] Table 1

[0133]

[0134]

[0135] The welding method of the aluminum heating plate provided by the present invention can control the verticality of the sleeve and the heating plate body within 0.05°, and the concentricity within the range of 0.03-0.05mm, and the welding method is simple to operate;

[0136] In addition, in Example 2, the electron beam welding is performed without removing the welding fixture, which will make it impossible to achieve complete welding at the connection between the sleeve and the heating plate, resulting in the scrapping of the product.

[0137] In summary, the welding method provided by the present invention is simple to operate. By using a welding clamp to fix the heating plate and the sleeve, the verticality and concentricity of the sleeve and the heating plate are guaranteed. Then electron beam welding is used to improve the welding quality of the molten pool, thereby improving the quality of the aluminum heating plate and ensuring the normal use of the aluminum heating plate.

[0138] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. A welding method for an aluminum heating plate, characterized in that: The welding method comprises the following steps: (1) A welding fixture is used to fix the sleeve and the heating plate, and after the welding route is determined, the welding fixture is removed to obtain a blank; (2) Electron beam welding is performed along the welding route obtained in step (1) to obtain the aluminum heating plate.

2. The welding method according to claim 1, characterized in that: The welding method further comprises finishing and cleaning the welding surfaces of the sleeve and the heating disk in step (1); Preferably, the material of the tool used for the fine machining includes diamond; Preferably, the cleaning liquid used in the cleaning process comprises ethanol or isopropanol.

3. The welding method of the aluminum heating plate according to claim 1 or 2, characterized in that: The thickness and flatness of the sleeve and the heating plate in step (1) are ≤0.05 mm; Preferably, in step (1), the parallelism between the welding surfaces of the sleeve and the heating plate is ≤0.05 mm.

4. The welding method of the aluminum heating plate according to any one of claims 1 to 3, characterized in that: The welding fixture comprises at least three evenly arranged U-shaped clamps.

5. The welding method of the aluminum heating plate according to claim 4, characterized in that: A cushion block is provided at one end of the U-shaped clamp close to the heating plate; Preferably, the material of the pad includes rubber or silicone; Preferably, the height of the cushion block is 5-10 mm.

6. The welding method of the aluminum heating plate according to claim 4 or 5, characterized in that: A threaded hole is provided at one end of the U-shaped clip close to the sleeve; Preferably, the threaded hole is used for assembling screws for locking the sleeve and the heating plate.

7. The welding method of the aluminum heating plate according to any one of claims 1 to 6, characterized in that: Determining the welding route in step (1) includes: performing laser spot welding on the connection between the sleeve and the heating disk to form a plurality of welding spots; Preferably, the depth of the welding spot is 0.5 to 1 mm; Preferably, the number of welding points between two adjacent U-shaped clips is 5 to 10; Preferably, the welding power of the laser spot welding is 100-200W; Preferably, the welding frequency of the laser spot welding is 5 to 10 Hz.

8. The welding method of the aluminum heating plate according to any one of claims 1 to 7, characterized in that: The electron beam welding in step (2) includes first electron beam welding, second electron beam welding and third electron beam welding performed in sequence.

9. The welding method of the aluminum heating plate according to claim 8, characterized in that: The electron beam current of the first electron beam welding is 5-15 mA; Preferably, the electron beam focus of the first electron beam welding is a surface focus.

10. The welding method of the aluminum heating plate according to claim 8, characterized in that: The electron beam current of the second electron beam welding is 20-40 mA; Preferably, the electron beam focus of the second electron beam welding is deep focus; Preferably, the welding depth of the second electron beam welding is 10-20 mm.

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