An on-line swing device for a yoke assembly used in magnetron sputtering

Abstract

The present invention discloses an on-line swinging device for a magnetic yoke assembly used in magnetron sputtering. The magnetic yoke assembly is connected to a housing assembly, and the housing assembly and the magnetic yoke assembly are located inside the target. It includes a swinging assembly; a first terminal assembly and a second terminal assembly are respectively arranged at both ends of the housing assembly and are coaxial with the swinging axis of the magnetic rod. The housing assembly is rotatably connected to the frame through the first terminal assembly and the second terminal assembly; the magnetic yoke assembly is connected to the housing assembly, and the swinging assembly drives the magnetic yoke assembly to swing along its rotation axis. During the forward or reverse rotation of the swinging motor, the housing body will rotate in the opposite direction relative to the axis of the joint body. By controlling the rotation angle and rotation amplitude, the magnetic rod is driven to swing along its rotation axis, and then the swinging of the magnetic yoke assembly is realized, so as to achieve a more uniform distribution of the magnetic field on the arc-shaped product and improve the uniformity of the surface of the product coating.

Description

Technical Field

[0001] The present invention belongs to the technical field of magnetron sputtering, and particularly relates to an on-line swing device for a yoke assembly used in magnetron sputtering. Background Art

[0002] Physical vapor deposition using sputtering has become a standard technique for customizing the properties of, for example, glass plates or other rigid or flexible materials. "Sputtering" means that coating material atoms are ballistically ejected from a sputtering target by positively charged ions, and the positively charged ions (usually argon ions) are accelerated by an electric field directed at the negatively charged sputtering target. The positive ions are formed by collision ionization in a low-pressure gas phase. The ejected atoms impinge on the substrate to be coated, where a dense and well-adhering coating is formed. The disadvantage is that the magnetron must be opened, so the vacuum must be removed to allow adjustment, and the vacuum must be reapplied after the adjustment is completed. This is very time-consuming. One of the process problems faced is that a magnetic field generator must be included in the sputtering target. The magnetic field generator oriented to point at the substrate to be coated is usually kept stationary while the cylindrical sputtering target rotates in front of it. High-performance permanent magnets based on neodymium iron boron (Fe-Nd-B) alloys or cobalt samarium (Co-Sm) alloys are used to generate the magnetic field. Since the magnetic field component parallel to the surface of the sputtering target determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic induction intensity (in tesla) of this component usually decreases at least with the square of the distance from the magnetic field generator, and thus is very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. The distance between the surface of the sputtering target and the magnetic field generator must therefore be well controlled, otherwise the plasma will exhibit local intensity variations, which can correspondingly lead to non-uniform coating profiles on the substrate. Nowadays, with the progress of current industrial design and the pursuit of more product differentiation, the demand for curved and arc-shaped products is gradually increasing. Exactly because the position of the magnetic field generator relative to the surface of the sputtering target is very sensitive, in order to enable the surfaces of curved and arc-shaped products to obtain uniform coatings, the entire arc surface needs to have a uniform magnetic field distribution. Summary of the Invention

[0003] The object of the present invention is to provide an on-line swing device for a yoke assembly used in magnetron sputtering, which is intended to achieve the swing of a magnetic rod within a certain range and with a certain amplitude, so as to solve the problem that the surfaces of curved and arc-shaped products can obtain a uniform magnetic field distribution, and thus obtain a uniform coating.

[0004] To solve the above technical problems, the object of the present invention is achieved as follows:

[0005] An online swinging device of a yoke assembly for magnetron sputtering, wherein the yoke assembly is connected to a shell assembly, the shell assembly and the yoke assembly are located in a target material, and include a swinging assembly fixedly arranged in the shell assembly, the shell assembly being rotatably connected to a frame; the yoke assembly is arranged outside the shell assembly, the swinging assembly includes a swinging motor, the swinging motor is fixedly mounted on the shell assembly, and the output end of the swinging motor is restricted in rotation by the frame; the output end of the swinging motor rotates, and the reaction force drives the swinging motor to rotate in the opposite direction, thereby driving the shell assembly to swing along its rotation axis, so as to drive the yoke assembly to swing along the rotation axis of the shell assembly.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: the swing component includes a swing motor, the output end of the swing motor is coaxial with the axis of the first terminal component, the swing motor is fixedly mounted on the housing component, and the output end of the swing motor is restricted in rotation by the frame.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: the first terminal component includes a joint body, a pin head interface is provided at the front end of the joint body, and the output end of the swing motor is transmission-connected to the joint body; it also includes a driving component, the driving component includes a spacer sleeve, the spacer sleeve is fixedly connected to the frame, and a central support fixing pin is provided on the spacer sleeve, and the central support fixing pin is inserted into the pin head interface.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes a fixing pin, which is fixed to the rear end of the joint body and inserted into the flange hole of the output flange of the swing motor.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: the driving shaft of the swing component is a hollow structure and extends to the rear end of the swing motor to form a cable channel c at the front and rear ends of the swing motor.

[0010] On the basis of the above scheme and as a preferred scheme of the above scheme: the first terminal assembly also includes a contact assembly including a first contact, a second contact and a contact assembly, the contact assembly includes a plurality of movable contacts arranged on the end surface of the first contact and a plurality of static contacts arranged on the end surface of the second contact; an elastic assembly presses the first contact toward the second contact to keep the first contact in contact with the second contact; the cable channel c is connected to the rear end of the second contact.

[0011] The prominent and beneficial technical effects of the present invention compared with the prior art are as follows: When the output flange of the swing assembly rotates, it drives the pin head interface to rotate accordingly. However, since the spacer sleeve restricts the rotation of the joint body through the cooperation of the central support fixing pin and the pin head interface, the reaction force generated by the joint body acts on the swing motor through the output flange. Since the swing motor is fixed to the outer housing through the motor fixing seat, under the action of the reaction force, the outer housing is driven to twist around the axis of the output flange, thereby driving the entire magnetic rod to rotate, that is, swinging is achieved. Then, during the forward or reverse rotation of the swing motor, the outer housing rotates in the opposite direction relative to the axis of the joint body. By controlling the rotation angle and rotation amplitude, the magnetic rod is driven to swing along its rotation axis, and then the swing of the yoke assembly is realized, so as to achieve a more uniform distribution of the magnetic field on the arc-shaped product and improve the uniformity of the surface of the product coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is the front view of the overall structure of the present invention;

[0013] Figure 2 is the right view of the overall structure of the present invention;

[0014] Figure 3 is the left view of the overall structure of the present invention;

[0015] Figure 4 is the exploded view of the overall structure of the present invention;

[0016] Figure 5 is the schematic diagram of the installation structure of the internal components of the present outer shell assembly;

[0017] Figure 6 Schematic diagram of the installation state of the target;

[0018] Figure 7 is Figure 6 the partial enlarged view at A in

[0019] Figure 8 is the exploded view of the first terminal assembly;

[0020] Figure 9 is the schematic diagram of the swing assembly structure;

[0021] Figure 10 is the schematic diagram of the fixed column structure;

[0022] Figure 11 is the cross-sectional view of the swing assembly structure;

[0023] Figure 12 is Figure 11 the partial enlarged view at Ⅻ in DETAILED DESCRIPTION OF THE INVENTION

[0024] To make the objectives, technical solutions and advantages of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments with reference to the accompanying drawings in the embodiments. Obviously, the described embodiments are only a part rather than all of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the given embodiments without creative efforts shall fall within the scope of protection of the present application.

[0025] In the description of the present application, it should be understood that the orientation or positional relationship indicated by terms such as "upper" and "lower" is based on the orientation or positional relationship shown in the accompanying drawings. This is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0026] In the description of the present application, terms such as "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features.

[0027] In combination with Figures 1-12As shown in the figure, the present invention discloses an online swing adjustable magnetic rod for magnetron sputtering, which includes a housing assembly 10, a yoke assembly 20, and an adjustment assembly 50. Among them, the housing assembly 10 includes a housing body 11 and an upper cover plate group 12. The housing body 11 is hollow to form an accommodation chamber 111, and an opening is provided at its upper end. The opening communicates the accommodation chamber 111 with the outside. The upper cover plate group 12 includes multiple upper cover plates. After installing components such as the adjustment assembly 50 in the accommodation chamber, the upper cover plate is fixedly installed at the opening of the housing body 11 to close the accommodation chamber 111, and the opening is closed by the upper cover plate group. By setting the upper opening, it is convenient to install the adjustment assembly, energy storage assembly, swing assembly, etc. in the accommodation chamber, and the opening is closed by the upper cover plate group to isolate it from the outside during the magnetron sputtering process, avoiding the problem that water or other media enter the accommodation chamber and cause equipment damage. The yoke assembly 20 is located below the housing assembly 10; it includes a support plate 21 and a magnetic rod main body, and the magnetic rod main body is fixedly installed on the support plate 21; of course, it can also be that a magnet accommodation chamber is provided on the support plate 21, and several magnets are arranged in the magnet accommodation chamber according to the required magnetic field, and then the magnet accommodation chamber is closed to form the yoke assembly in sequence. There are multiple adjustment assemblies 50 and they are independently controlled from each other. They are arranged along the length direction of the yoke assembly 20 and are located in the accommodation chamber 111; the output end of each adjustment assembly 50 moves linearly back and forth perpendicular to the yoke assembly 20, and all pass through the side wall of the accommodation chamber 111 and penetrate toward the side where the yoke assembly 20 is located, and are hinged to the yoke assembly 20. By pushing or pulling the yoke assembly locally outward or inward through the output end of the adjustment assembly 50, the yoke assembly 20 will elastically deform within its elastic deformation range or within the range that its strength and shape can withstand. Since the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic induction intensity (in Tesla) of this component usually decreases at least with the square of the distance from the magnetic field generator, and therefore is very sensitive to the position of the magnetic field generator relative to the sputtering target surface. During the actual test process, the deformation amount of the magnetic rod within 4 mm can fully meet the actual use requirements, thereby driving the yoke assembly 20 to locally or completely change the distance from the sputtering target surface. By setting multiple adjustment assemblies, the adjustment assembly and the yoke assembly have multiple connection points. The output end of the adjustment assembly acts to drive the yoke assembly at the corresponding point to locally change the distance from the sputtering target surface to be closer or farther away, thereby adjusting the local magnetic field intensity and realizing real-time online control of the coating thickness on the sputtering target surface, making the coating thickness of the coated product tend to be consistent, improving the quality of the coated product, and at the same time, without removing the vacuum, the production efficiency can be significantly improved.

[0028] For an application scenario of magnetron sputtering, the yoke assembly needs to swing within a certain range so that the magnetic field of magnetron sputtering can cover a larger range. At the same time, according to the actual requirements of the coating thickness, the position of the magnetic rod can be adjusted, thereby adjusting the magnetic field distribution and changing the coating distribution. Then, in this embodiment, in order to realize the swing of the magnetic rod, a swing assembly 80, a driving assembly 90, a first terminal assembly 30 and a second terminal assembly 40 are arranged in the accommodation chamber 111; the first terminal assembly 30 and the second terminal assembly 40 are respectively arranged at both ends of the housing assembly 10. For details, see Figures 9-12 As shown, the swing assembly 80 in this embodiment includes a swing motor 81, an output flange 82 and a motor fixing seat 83. The output flange 82 is fixedly installed on the output shaft of the swing motor 81, and a flange hole is provided on the output flange 82. The output flange 82 is coaxial with the axis of the first terminal assembly 30. The motor fixing seat 83 fixedly installs the swing motor 81 on the outer housing 10. The driving assembly 90 is fixedly installed on the machine body, and it includes a driving end 91, a spacer 92, a protective pipe fitting 93, a driving member 94 and a transmission belt 95. The driving end 91 is fixedly connected to the end of the driving member 94 close to the magnetic rod. The spacer 92 is sleeved inside the driving member 94, and the protective pipe fitting 93 is sleeved inside the spacer 92. Preferably, a support block 933 is arranged between the protective pipe fitting 93 and the inner hole of the spacer 92. Both ends of the target 100 are clamped on the driving end 91, and a sealing ring 911 is arranged between the driving end 91 and the target 100, so as to form a coolant channel a between the target 100, the driving end 91 and the outer housing 11 of the magnetic rod. A fluid channel is arranged on the support plate 31, so as to form a coolant channel b between the fluid channel, the spacer 92 and the protective pipe fitting 93. For details, see Figure 6 the coolant flow direction shown by the arrow in. Finally, the coolant is introduced from the external pipeline through the interface provided on the driving assembly 90 and fills the coolant channel a, and flows back to the external cooling device through another return interface on the driving assembly 90 via the coolant channel b to realize the cooling of the target 100; one end of the protective pipe fitting 93 close to the magnetic rod is provided with a head 931. See Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7As shown, the first terminal component 30 in this embodiment includes a first mounting plate 31, a fixing pin 32, an outer spacer 33, a joint body 34, a bearing 36, and a sealing component 37. The joint body 34 is hollow and sleeved outside the outer spacer 33, and the end 931 extends into the outer spacer 33. The contact component 35 is located inside the outer spacer 33. Among them, sealing rings are provided between the outer spacer 33 and the joint body 34, and between the end 931 and the inner wall of the outer spacer 33. Of course, considering the positioning of the sealing ring, in this embodiment, preferably annular grooves are provided on the inner walls of the joint body 34 and the outer spacer 33, and the O-ring is embedded in the annular groove; thus, multiple seals are formed between the joint body 34, the outer spacer 33, and the end 931 to prevent moisture from entering the inner part of the outer shell during use. To enable the swinging component to drive the magnetic rod to swing, the fixing pin 32 in this embodiment is fixed to the rear end of the joint body 34, and the fixing pin 32 is inserted into the flange hole of the output flange 82 of the swinging component 80. A sealing component 36 and a bearing 37 are sleeved outside the rear end of the joint body 34 to enable the outer shell to rotate relative to the joint body 34 and maintain reliable sealing; and a pin head interface 341 is provided at the front end of the joint body 34, and a central support fixing pin 921 is provided on the spacer 92. After the first terminal component 30 is fitted into the socket of the driving component 90, the central support fixing pin 921 is inserted into the pin head interface 341. Since the spacer 92 is fixed and the swinging motor 81 is fixed to the outer shell through the motor fixing base 83, when the output flange 82 of the swinging component 80 rotates, it will drive the pin head interface 341 to rotate with it. However, since the spacer 92 will limit the rotation of the joint body 34 through the cooperation of the central support fixing pin 921 and the pin head interface 341, the reaction force generated by the joint body 34 will act on the swinging motor 81 through the output flange 82. Since the swinging motor 81 is fixed to the outer shell through the motor fixing base 83, under the action of the reaction force, it will drive the outer shell to twist around the axis of the output flange 82, thereby driving the entire magnetic rod to rotate, that is, swinging is achieved. Then, during the forward or reverse rotation of the swinging motor 81, the outer shell will rotate in the opposite direction relative to the axis of the joint body 34. By controlling the rotation angle and rotation amplitude, driving the magnetic rod to swing along its rotation axis is achieved.

[0029] See details in Figures 6-7As shown, this embodiment also includes a contact assembly 35, the contact assembly 35 includes a first contact 351, a second contact 352 and a contact assembly 353, the contact assembly 353 includes a plurality of moving contacts 353a arranged on the end surface of the first contact 351 and a plurality of stationary contacts 353b arranged on the end surface of the second contact 352. A first contact accommodating cavity 9311 is provided on the end 931, and the first contact 351 is movably arranged in the first contact accommodating cavity 9311. The moving contact 353a of the first contact 351 and the static contact 353b of the second contact 352 correspond to each other and contact each other. A spring 354 is provided in the first contact accommodating cavity 9311, and the spring 354 contacts one end of the first contact 351 away from the moving contact 353a, so as to keep the first contact 351 pressed in the direction of the second contact 352, so that the moving contact 353a and the static contact 353b keep in contact. The static contact 353b is connected to the main control component 60 through a wire; the moving contact 353a is connected to the external power supply through a wire 110; it should be noted that each moving contact 353a preferably includes a contact terminal and a terminal compression spring, and a receiving hole is opened on the end face of the first contact 351, and the terminal compression spring and the contact terminal are received in the receiving hole. Of course, it is preferred that the static contact 353b on the second contact 352 is a conductive metal material distributed on the end face of the second contact 352, which is annular or fan-shaped and has a planar structure and is distributed on the end face of the second contact 352. It can be a sheet of metal fixed on the second contact 352, or it can be embedded in the end face of the second contact 352 and flush with the end face of the second contact 352. During the use of the entire magnetron sputtering system, there will be rotation and a certain degree of overall deformation. Through such a structural setting, the first contact 351 and the second contact 352 can always maintain good contact through the elastic push of the terminal compression spring on the contact terminal, thereby ensuring that it can supply power stably, thereby improving the operating stability of the entire device.

[0030] Of course, in order to control the swing component 80 and the adjustment component 50 and process and execute the external control signal or feed back the execution result to the host computer, the present embodiment also includes a main control component 60 arranged in the accommodating chamber 111; the present embodiment preferably has the first terminal component 30 as a water inlet power supply connector component and the second terminal component 40 as an optical fiber communication connector component; the first terminal component 30 connects the external power supply to the main control component 60, and the control signal is transmitted to the main control component 60 via the second terminal component 40 and the internal optical fiber, and the main control component 60 analyzes and processes the signal to control the swing component 80 and the adjustment component 50 to make adaptive actions. Figure 4As shown in the figure, the second terminal component 40 includes a second mounting plate, a second connector body, and an optical fiber component 41. The second connector body is fixedly mounted on the second mounting plate. The optical fiber component can be an optoelectronic conversion component or an optical path guiding component, which is used to transmit optical signals to the main control component 60 in time. It is fixedly mounted inside the second connector body. The second mounting plate is fixedly mounted at one end of the outer shell. Of course, there are necessary seals between the second mounting plate and / or the second connector body and the mounting position of the outer shell to make it completely sealed after installation. At the same time, there are also necessary seals between the optical fiber component and the second connector body. Since the entire magnetic rod is in a moving state and the second terminal component is coaxial with the swing axis of the magnetic rod, that is to say, the external optical fiber communication end and the signal receiving end of the second terminal component are also on the same axis. Then, no matter how the magnetic rod swings, the optical signal can be reliably transmitted. And compared with the traditional cable communication method, it avoids the problem of signal failure caused by the twisting or fatigue damage of the cable during the movement of the magnetic rod. Thus, the optical signal conducted from the second terminal component 40 to the main control component 60 is analyzed and processed by the main control component 60, and then the control adjustment component 50 drives the magnetic yoke component at the corresponding position to locally change the distance from the surface of the sputtering target, approaching or moving away, so as to adjust the local magnetic field intensity, and realize the real-time online control of the coating thickness on the surface of the sputtering target; it also includes controlling the swing component 80 to drive the magnetic yoke component to swing a certain angle according to the required angle, so as to adjust the magnetic field distribution range.

[0031] Of course, in this embodiment, in order to more reliably and in multiple modes achieve communication with the main control component 60, further in this embodiment, by adaptively increasing and adjusting the number and size of the moving contact 353a of the first contact 351 and the static contact 353b of the second contact 352, and at the same time adaptively selecting the sizes of the first contact 351 and the second contact 352, on the one hand, charging can be achieved, and on the other hand, data communication through the RS485 communication interface can be achieved through the increased contacts. Furthermore, while realizing water supply and power supply to the inside of the magnetic rod and charging through the first terminal component 30, RS485 data communication is achieved, data communication with the main control component 60 inside the adjustable magnetic rod is realized, and then the second terminal component 40 and the first terminal component 30 are used to achieve communication control of the adjustable magnetic rod in a one-of-two or synchronous communication manner, so as to realize reliable control of the magnetic rod, and at the same time, the compatibility and universality of the data and communication modes of the adjustable magnetic rod can also be improved.

[0032] It further includes an energy storage component 70 which supplies power to the swing component 80, the main control component 60 and the adjustment component 50; the energy storage component 70 is arranged in the accommodation chamber 111. Since the entire adjustable magnetic rod is located inside the cylindrical target during use, the volume and size of the adjustable magnetic rod are greatly restricted, so higher requirements are put forward for the installation of the energy storage component 70. It is obviously difficult to achieve if a whole lithium battery is used for installation. Therefore, in this embodiment, the energy storage component 70 is preferably a plurality of lithium battery packs, which are arranged between adjacent adjustment components 50. Of course, it can also be in other empty spaces within the accommodation space. By this way of small-volume dispersion, the design requirements of energy storage are met, and at the same time, the requirement for the installation space is reduced. The energy storage component 70 is connected to the main control component 60. On the one hand, it supplies power to the main control component 60. Thus, through the energy storage component built in the housing component, it can continuously and stably supply power to the adjustment component and the swing component, ensuring the stability and reliability of the operation of the entire device. On the other hand, during the magnetron sputtering process, the swing component and the adjustment component will consume the power of the energy storage component. If the power is too low, it may be difficult to maintain reliable operation. Therefore, during the magnetron sputtering operation and / or during the magnetron sputtering interval, while the external power supply can supply power to the main control component 60 through the first terminal component 30, it can also charge the energy storage component 70 through the main control component 60 and perform battery management and protection on its charge and discharge. By continuously or intermittently charging the energy storage component 70 through the external power supply, its power is timely replenished, so that the energy storage component 70 is stable within the power range required by the design, ensuring the stable operation of the entire system.

[0033] Thus, by setting the energy storage component 70, the main control component 60, the first terminal component 30 and the second terminal component 40, the energy storage component 70 provides electrical energy for the swing component and the adjustment component 60, the first terminal component 30 and the main control component 60 charge the energy storage component 70, and the first terminal component 30 and / or the second terminal component 40 realizes fiber optic communication with the main control component 60, improving the reliability and stability of the entire magnetic rod control.

[0034] In addition, the drive shaft 821 of the swing assembly 80 is of a hollow structure and extends towards the rear end 811 of the swing motor 81 to form a cable channel c at the front and rear ends of the swing motor 81. The cable channel c communicates with the rear end of the second contact 352. Thus, the cable led out from the second contact 352 of the first terminal assembly 30 can directly penetrate further into the housing assembly through the cable channel c, so that it can be connected to the main control assembly 60 and / or the energy storage assembly 70 along the shortest path. Furthermore, it avoids the problems of long cable path, large energy and signal loss on the cable, and susceptibility to interference caused by the cable needing to bypass various devices through the gap. At the same time, it can better protect the cable and avoid the problem of cable damage caused by the movement of various moving parts in the housing assembly, reducing the difficulty of wiring.

[0035] The above embodiments are only preferred embodiments of the present invention, and do not limit the protection scope of the present invention accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present invention shall be covered within the protection scope of the present invention.

Claims

1. An online oscillating device for a yoke assembly for magnetron sputtering, wherein the yoke assembly (20) is connected to a housing assembly (10), the housing assembly (10) and the yoke assembly (20) are located inside a target material (100), characterized in that: The invention comprises a swing assembly (80) fixedly arranged in the housing assembly (10), wherein the housing assembly (10) is rotatably connected to a frame; the yoke assembly (20) is arranged outside the housing assembly (10), and the swing assembly (80) comprises a swing motor (81), wherein the swing motor (81) is fixedly mounted on the housing assembly (10), and the output end of the swing motor (81) is restricted in rotation by the frame; when the output end of the swing motor (81) rotates, a reaction force drives the swing motor (81) to rotate in the opposite direction, thereby driving the housing assembly (10) to swing along its rotation axis, thereby driving the yoke assembly (20) to swing along the rotation axis of the housing assembly (10).

2. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 1, characterized in that: The invention also comprises a first terminal assembly (30), wherein the first terminal assembly (30) is fixedly mounted on one end of the housing assembly (10) and is coaxial with the rotation axis thereof; the housing assembly (10) is movably connected to the frame via the first terminal assembly (30); the output end of the swing motor (81) is coaxial with the axis of the first terminal assembly (30), and the output end of the swing motor (81) is connected to the first terminal assembly (30), and is connected to the frame via the first terminal assembly (30); The output end of the swing motor (81) is restricted from rotating.

3. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 2, characterized in that: The first terminal assembly (30) comprises a joint body (34), the output end of the swing motor (81) is drivingly connected to the joint body (34); and the joint body (34) is connected to the frame.

4. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 3, characterized in that: It also comprises a fixing pin (32), wherein the fixing pin (32) is fixedly arranged at the rear end of the joint body (34), and the fixing pin (32) is inserted into the flange hole of the output flange (82) of the swing motor (81).

5. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 4, characterized in that: It also comprises a driving assembly (90), the driving assembly (90) comprising a spacer sleeve (92), the spacer sleeve (92) being fixedly connected to the frame, and a central support fixing pin (921) being provided on the spacer sleeve (92), a pin head interface (341) being provided at the front end of the joint body (34), and the central support fixing pin (921) being inserted into the pin head interface (341).

6. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 2, characterized in that: The driving shaft (821) of the swing motor (81) is a hollow structure and extends toward the rear end (811) of the swing motor (81) to form a cable channel c at the front and rear ends of the swing motor (81).

7. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 6, characterized in that: The first terminal assembly (30) further comprises a contact assembly (35) comprising a first contact (351), a second contact (352) and a contact assembly (353); the contact assembly (353) comprises a plurality of movable contacts (353a) arranged on the end surface of the first contact (351) and a plurality of stationary contacts (353b) arranged on the end surface of the second contact (352); an elastic assembly presses the first contact (351) toward the second contact (352) so that the first contact (351) and the second contact (352) maintain contact; and the cable channel c is connected to the rear end of the second contact (352).

Images