A proportional control valve and control method and system thereof

Abstract

The present application discloses a proportional control valve and its control method and system, which relate to the field of pressure control valves. The method includes selecting a matching PID segment according to the pressure control target pressure of the vacuum container chamber and the current air intake flow rate; outputting a control signal using the selected PID segment according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current air intake flow rate; regulating the opening of the proportional control valve according to the control signal; obtaining the real-time pressure of the vacuum container chamber during the pressure control process to form an actual pressure curve; if the difference between the final pressure in the actual pressure curve and the pressure control target pressure is greater than the preset error, the coefficient of the PID segment is automatically adjusted to re-control the opening of the proportional control valve until the difference between the final pressure in the actual pressure curve and the pressure control target pressure is less than or equal to the preset error. The present application can match various different pressure control requirements and ensure the pressure control accuracy of the vacuum container chamber.

Description

Technical Field

[0001] The present application relates to the field of pressure control valves, and in particular to a proportional control valve and a control method and system thereof. Background Art

[0002] The pressure control valve is a device that controls the gas pressure inside the container. The pressure control valve can control the pressure inside the container at a certain value so that the pressure inside the container meets the use requirements. The pressure control valve is widely used in vacuum sintering furnaces, pressure sintering furnaces, semiconductor crystal growth furnaces, gas synthesis furnaces and other occasions that have certain requirements for pressure control.

[0003] Traditional pressure control valves are generally controlled by several fixed PIDs in the host computer. This will bring the following problems: 1. Poor controllability: the pressure control accuracy required for some pressure control is poor; 2. Poor adaptability: it is difficult to adapt to occasions with huge changes in pressure and flow; 3. Low versatility: when installed on different equipment, PID needs to be reset and debugged, wasting the customer's time; 4. High ability requirements: PID setting is very dependent on the ability of engineers, and the setting results of different engineers are often very different. Summary of the invention

[0004] The purpose of the present application is to provide a proportional control valve and a control method and system thereof, which can match various pressure control requirements and ensure the pressure control accuracy of the vacuum container chamber.

[0005] To achieve the above objectives, this application provides the following solutions:

[0006] In a first aspect, the present application provides a proportional control valve control method, wherein the proportional control valve is used to adjust the pressure of a vacuum container chamber, and the proportional control valve control method comprises: obtaining a pressure control target pressure, a current chamber pressure, and a current air intake flow rate of the vacuum container chamber; selecting a matching PID segment according to the pressure control target pressure and the current air intake flow rate of the vacuum container chamber; outputting a control signal using the selected PID segment according to the pressure control target pressure, the current chamber pressure, and the current air intake flow rate of the vacuum container chamber; regulating the opening of the proportional control valve according to the control signal; and after regulating the opening of the proportional control valve, The real-time pressure of the vacuum container chamber during the pressure control process is obtained to form an actual pressure curve; if the difference between the final pressure in the actual pressure curve and the pressure control target pressure is greater than the preset error, the coefficient of the PID segment is automatically adjusted according to the deviation between the actual pressure curve and the pressure control target pressure; the selected PID segment is updated to the PID segment after the adjustment coefficient, and the step of "outputting a control signal using the selected PID segment according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake air flow" is returned until the difference between the final pressure in the actual pressure curve and the pressure control target pressure is less than or equal to the preset error.

[0007] In the second aspect, the present application provides a proportional control valve, including: a single-chip microcomputer, a driving device and a valve body; the air intake side of the valve body is connected to the vacuum container chamber, and the exhaust side of the valve body is connected to the vacuum pump; the signal output end of the single-chip microcomputer is connected to the control end of the driving device, and the driving end of the driving device is connected to the control end of the valve body; a plurality of PID segments are arranged on the single-chip microcomputer; the single-chip microcomputer is used to execute the above-mentioned proportional control valve control method and output a control signal; the driving device is used to regulate the opening of the valve body according to the control signal, thereby adjusting the pumping rate on the exhaust side and maintaining the constant pressure in the vacuum container chamber.

[0008] In the third aspect, the present application provides a proportional control valve system, comprising: a host computer, a flow meter and the above-mentioned proportional control valve; the flow meter and the host computer are both connected to the proportional control valve; the flow meter is used to measure the current air intake flow of the vacuum container chamber and transmit it to the proportional control valve; the host computer is used to transmit the pressure control target pressure of the vacuum container chamber to the proportional control valve; the proportional control valve is used to obtain the current chamber pressure of the vacuum container chamber, and adjust the exhaust side's pumping rate according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current air intake flow, so as to maintain the constant pressure in the vacuum container chamber.

[0009] According to the specific embodiments provided in this application, this application has the following technical effects:

[0010] The present application provides a proportional control valve and a control method and system thereof. The PID segment can automatically adjust the coefficient according to the deviation between the actual pressure curve and the pressure control target pressure to meet the pressure control requirement. The adaptive learning of the PID segment can match various different pressure control requirements while ensuring the pressure control accuracy of the vacuum container chamber, so that the proportional control valve can learn more extreme pressure control scenarios and can complete high-precision pressure control in a wider range. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0012] Figure 1 A flow chart of a proportional control valve control method provided in one embodiment of the present application;

[0013] Figure 2 A schematic diagram of the principle of a proportional control valve control method provided in one embodiment of the present application;

[0014] Figure 3A front view schematic diagram of a proportional control valve provided in one embodiment of the present application;

[0015] Figure 4 A side schematic diagram of a proportional control valve provided in one embodiment of the present application;

[0016] Figure 5 for Figure 4 Structural diagram of the AA section;

[0017] Figure 6 A schematic diagram of the connection relationship of a proportional control valve provided in another embodiment of the present application;

[0018] Figure 7 A schematic diagram of the connection relationship of the host computer control mode provided in another embodiment of the present application;

[0019] Figure 8 A schematic diagram of the connection relationship of a valve adaptive control mode provided in another embodiment of the present application;

[0020] Fig. 9 A schematic diagram of a pressure control process of a proportional control valve in a host computer control mode provided in another embodiment of the present application;

[0021] Fig.10 A schematic diagram of the pressure control process of a proportional control valve in a valve adaptive control mode provided in another embodiment of the present application. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0024] In an exemplary embodiment, Figure 1 As shown, a proportional control valve control method is provided, wherein the proportional control valve is used to adjust the pressure of a vacuum container chamber, and the proportional control valve control method includes the following steps 101 to 107. Among them:

[0025] Step 101: Obtain the pressure control target pressure, current chamber pressure and current air intake flow rate of the vacuum container chamber.

[0026] Step 102: Select a matching PID segment according to the pressure control target pressure of the vacuum container chamber and the current air intake flow rate.

[0027] Step 103: Output a control signal using the selected PID segment according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake air flow rate.

[0028] Step 104: regulating the opening of the proportional control valve according to the control signal.

[0029] Step 105: After adjusting the opening of the proportional control valve, the real-time pressure of the vacuum container chamber during the pressure control process is obtained to form an actual pressure curve.

[0030] Step 106: If the difference between the final pressure in the actual pressure curve and the pressure control target pressure is greater than the preset error, the coefficient of the PID segment is automatically adjusted according to the deviation between the actual pressure curve and the pressure control target pressure.

[0031] Step 107: Update the selected PID segment to the PID segment after the adjustment coefficient, and return to the step of "outputting a control signal using the selected PID segment according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake air flow rate" until the difference between the final pressure in the actual pressure curve and the pressure control target pressure is less than or equal to the preset error.

[0032] By implementing the above steps 101 to 107, the PID is automatically adjusted according to the actual feedback, so that the PID parameters can be automatically adjusted according to the dynamic changes of the system to achieve better stability and control accuracy. The proportional coefficient, differential coefficient and integral coefficient of the PID are adaptively adjusted so that the system performance indicators (such as overshoot, stabilization time, steady-state error, etc.) meet expectations.

[0033] In another exemplary embodiment of the present application, since there are multiple PID segments, in order to select a suitable PID segment, the above step 102 can be replaced by the following steps 201 to 202:

[0034] Step 201: Setting a one-to-one correspondence between different parameter values ​​and PID segments; the parameters include a pressure control target pressure and an intake air flow rate.

[0035] Step 202: According to the pressure control target pressure of the vacuum container chamber and the current air intake flow rate, a matching PID segment is selected by utilizing the one-to-one correspondence between different values ​​of the parameter and the PID segment.

[0036] After the PID segment matching is completed, the first round of pressure control test is carried out. According to the fit between the actual pressure curve and the target pressure curve generated during the pressure control process, the PID information that needs to be adjusted is determined, and an adaptive judgment is made based on the error information generated.

[0037] In another exemplary embodiment of the present application, the automatic adjustment of the coefficient of the PID segment according to the deviation between the actual pressure curve and the pressure control target pressure in the above step 106 may specifically include:

[0038] If at least one of the following three situations occurs, adjust the proportional coefficient, differential coefficient, and integral coefficient of the PID segment:

[0039] The first case: the difference between the real-time pressure in the actual pressure curve and the pressure control target pressure is greater than the first preset difference;

[0040] The second situation: the change time from the last real-time pressure to the next real-time pressure in the actual pressure curve is less than the preset time threshold;

[0041] The third situation: the difference between the real-time pressure average value in the actual pressure curve and the pressure control target pressure is greater than the second preset difference.

[0042] Specifically, if the oscillation is greater than the ΔX value (the first preset difference), the system will reduce the proportional term for adjustment, otherwise increase it.

[0043] If the curve oscillates frequently and the oscillation period is less than the ΔT value (preset time threshold), the system will reduce the differential term for adjustment, otherwise it will increase it.

[0044] If the overall curve deviation is greater than the ΔY value (the second preset difference), the system will reduce the integral term for adjustment, otherwise it will increase it.

[0045] Figure 2 The schematic diagram of the proportional control valve control method of the present application is shown. The pressure control target pressure is A, the current chamber pressure is B, the current air intake flow is C, and the difference between the pressure control target pressure and the current chamber pressure is D. After adjusting the opening of the proportional control valve, the pressure in the vacuum container chamber will eventually remain unchanged and approach the pressure control target pressure. When the difference between the final pressure in the actual pressure curve and the pressure control target pressure is greater than the preset error, it means that the selected PID segment does not meet the use requirements. When the difference between the final pressure in the actual pressure curve and the pressure control target pressure is less than or equal to the preset error, it means that the PID segment meets the use requirements, and the PID segment is output and saved.

[0046] In actual application, trial and error tests are automatically performed. By gradually changing the PID parameters, the fit between the actual pressure curve and the target pressure curve is compared. According to the actual oscillation difference and curve deviation changes, the system determines whether it is necessary to further increase or decrease the parameters.

[0047] After multiple cycles, until the output pressure approaches the set value, the difference information D deviation is less than the equipment error requirement, and the PID segment meets the use requirements, the PID segment is output and saved.

[0048] Based on the same inventive concept, the embodiment of the present application also provides a proportional control valve for executing the proportional control valve control method involved above. The implementation scheme for solving the problem provided by the proportional control valve is similar to the implementation scheme recorded in the above method, so the specific limitations in one or more proportional control valve embodiments provided below can refer to the limitations of the proportional control valve control method above, and will not be repeated here.

[0049] In an exemplary embodiment, Figures 3 to 5 As shown, a proportional control valve is provided, including: a single chip microcomputer, a driving device and a valve body.

[0050] The air inlet side of the valve body is connected to the vacuum container chamber, and the exhaust side of the valve body is connected to the vacuum pump. The signal output end of the single chip microcomputer is connected to the control end of the driving device, and the driving end of the driving device is connected to the control end of the valve body. The single chip microcomputer is provided with multiple PID segments; the single chip microcomputer is used to execute the above-mentioned proportional control valve control method and output a control signal. The driving device is used to control the opening of the valve body according to the control signal, thereby adjusting the exhaust side of the pumping rate, and maintaining the constant pressure in the vacuum container chamber.

[0051] Commonly used PID segments are stored in the single-chip microcomputer (also called PCB board). According to the current chamber pressure change data, the proportional control valve performs closed-loop control through the internal PCB program. According to the pressure change situation, a more appropriate PID segment is matched to make the pressure control more accurate.

[0052] The proportional control valve can control the pressure of the chamber that needs pressure control under different air pressure environments. The valve has multi-stage PID, which can cope with different upstream air intake volumes and downstream exhaust rates, ensuring the pressure control accuracy of the chamber under various environments. It also has a PID learning function. Through this function, the pressure control valve can learn more extreme pressure control scenarios, so that the proportional control valve can complete high-precision pressure control in a wider range.

[0053] As an optional embodiment, the driving device is a motor, and the valve body includes: a valve stem and a valve plate. The driving shaft of the motor is connected to one end of the valve stem through a coupling, and the other end of the valve stem is connected to the valve plate. The control end of the motor is connected to the signal output end of the single-chip microcomputer. The motor is used to adjust the angle of the valve plate through the coupling and the valve stem according to the control signal output by the single-chip microcomputer to adjust the opening of the valve body.

[0054] When the motor rotates, the valve plate is driven to rotate synchronously. The system pumping speed is adjusted by controlling the angle of the valve plate.

[0055] As another optional implementation, the proportional control valve further includes: an encoder and a communication port. The encoder is connected to the single-chip microcomputer; the encoder is used to measure the position of the motor and transmit it to the single-chip microcomputer to represent the valve body opening. The single-chip microcomputer is connected to the communication port; the single-chip microcomputer receives the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake flow rate through the communication port.

[0056] like Figure 6 The connection relationship of the proportional control valve is shown, and a storage component is provided on the single chip microcomputer, which can store multiple PID segments.

[0057] The encoder is a high-precision encoder that reads the motor position in real time to ensure the accuracy of the proportional control valve opening position.

[0058] Communication port: The proportional control valve is used to communicate with the external PLC and host computer to read the target pressure and current chamber pressure required for pressure control, as well as the intake flow rate, so that the program can select the PID segment. Data transmission and PID segment copy input can also be carried out through the communication port.

[0059] Reference Figure 5 , the proportional control valve also includes: a protective cover, a base, an O-ring seal and a shaft seal. The protective cover is used to protect vulnerable parts such as the motor and PCB board. The base connects the motor and the valve body. The O-ring seal enables the valve to shut off and can be completely sealed when closed. The O-ring seal is installed around the valve plate. The shaft seal can be sealed with a sealing ring or magnetic coupling as needed, and the shaft seal is located around the valve stem.

[0060] The proportional control valve adopts a closed-loop control system, which can compare the intake flow rate, current chamber pressure and pressure control target pressure in real time, and can quickly and accurately adjust the valve opening to ensure the stability and high-precision control of the system, especially for occasions that require precise control, such as semiconductor PVT, CVD equipment, etc.

[0061] The closed-loop control of the proportional control valve has a certain degree of anti-interference ability. It automatically adjusts the proportional control valve in the event of external interference or system changes, reduces the impact of the external environment on the performance of the proportional control valve, and ensures that the proportional control valve system maintains efficient operation in different environments.

[0062] As another optional implementation, the proportional control valve has its own control system, which can detect whether its own electronic control system is abnormal and give relevant alarms. If there is an abnormality, it will automatically shut down. This prevents the leakage of harmful gases from causing harm, helps to quickly find problems and repair them, thereby reducing system downtime and maintenance costs.

[0063] The proportional control valve of the present application has a learning function of an adaptive control mode. Through the learning function of the proportional control valve, the proportional control valve is given a pressure control target pressure and a current chamber pressure, and the valve can record pressure changes. After entering the learning mode, the proportional control valve will automatically correct and store PID data according to pressure changes, thereby increasing pressure control accuracy and response speed.

[0064] With this function, the proportional control valve can detect changes in system pressure and adaptively adjust its program, thereby changing the control performance in real time, and continuously learning and optimizing during the system operation process.

[0065] Through the learning function, the system can reduce its reliance on manual operations, reduce the need for maintenance and adjustments, and improve the autonomy of the system.

[0066] Adaptive control also stores historical data, which can be used to analyze and trace system performance, helping to troubleshoot problems and make improvements.

[0067] Proportional control valve communication function. After the above functions are completed, the data stored in the proportional control valve can be copied and shared. When used for different devices of the same model, the pressure control PID data can be copied to the new proportional control valve without re-learning, reducing equipment debugging costs and improving efficiency.

[0068] Based on the same inventive concept, the embodiment of the present application further provides a proportional control valve system, comprising: a host computer, a flow meter and the above-mentioned proportional control valve. The flow meter and the host computer are both connected to the proportional control valve.

[0069] The flow meter is used to measure the current air intake flow rate of the vacuum container chamber and transmit it to the proportional control valve. The host computer is used to transmit the pressure control target pressure of the vacuum container chamber to the proportional control valve. The proportional control valve is used to obtain the current chamber pressure of the vacuum container chamber, and adjust the exhaust side pumping rate according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current air intake flow rate to maintain the constant pressure in the vacuum container chamber.

[0070] As an optional implementation, the proportional control valve system further includes: a vacuum gauge. The vacuum gauge is connected to the host computer; the vacuum gauge is used to measure the current chamber pressure of the vacuum container chamber and transmit it to the host computer. The host computer transmits both the pressure control target pressure and the current chamber pressure of the vacuum container chamber to the proportional control valve.

[0071] As another optional implementation, the proportional control valve system further includes: a vacuum gauge connected to the single chip microcomputer in the proportional control valve; the vacuum gauge is used to measure the current chamber pressure of the vacuum container chamber and transmit it to the proportional control valve.

[0072] From the above two implementation modes, it can be seen that the proportional control valve system adopts two control modes:

[0073] 1. Host computer control mode: All data are provided by the host computer to the proportional control valve, and the proportional control valve controls the chamber pressure according to the set pressure, chamber pressure and other information provided by the host computer. The connection relationship of the host computer control mode is as follows Figure 7 As shown in Figure 2, the pressure control process of the proportional control valve is as follows: Fig. 9 shown.

[0074] 2. Valve adaptive control mode: The host computer only provides the required set pressure, and the proportional control valve communicates directly with the vacuum gauge, reducing the response time and data transmission lag, and reducing the adjustment time of the proportional control valve control pressure. At the same time, the proportional control valve provides real-time feedback to the host computer on valve plate position and valve diagnosis information. The connection relationship of the valve adaptive control mode is as follows: Figure 8 As shown in Figure 2, the pressure control process of the proportional control valve is as follows: Fig.10 shown.

[0075] There are two setting modes for PID segment, one is preset mode, which stores the commonly used PID segments in the microcontroller, and the other is automatic adjustment mode. There are two automatic adjustment modes, one is the PID segment adaptive adjustment coefficient, and the other is that the customer can adjust the coefficient of the PID segment in the microcontroller through the host computer, that is, Fig. 9 and Fig.10 Artificially optimized PID parameters in.

[0076] Since the change in the opening of the proportional control valve has a certain lag in response to the vacuum gauge reading, the opening of the proportional control valve is often adjusted only after the pressure falls below the set pressure during the pressure reduction process. Through the learning function, the opening change time is advanced, which greatly reduces the pressure oscillation cycle and makes PID control more precise.

[0077] The adaptive function of the proportional control valve will automatically correct and store the PID data according to the pressure changes, thereby increasing the pressure control accuracy and response speed.

[0078] In addition to pressure as the main control parameter, on this basis, the data interface of the host computer is expanded. In addition to inputting the set pressure, the host computer can also input other parameters such as gas medium (including nitrogen, argon, air, etc.), gas flow, vacuum pump speed, etc. as secondary control parameters. The multivariable adaptive control algorithm can optimize the performance of the proportional control valve according to multiple parameters. The control system will select the appropriate PID curve based on these parameters, or better perform adaptive learning.

[0079] At the same time, the proportional control valve can store and analyze data to analyze the performance of the proportional control valve control system, identify trends and potential problems, and provide relevant information for subsequent optimization of the proportional control valve.

[0080] The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0081] This article uses specific examples to illustrate the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and core ideas of this application. At the same time, for those skilled in the art, according to the ideas of this application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this application.

Claims

1. A proportional control valve control method, characterized in that: The proportional regulating valve is used to adjust the pressure of the vacuum container chamber, and the proportional regulating valve control method includes: Obtaining the pressure control target pressure, current chamber pressure and current air intake flow rate of the vacuum container chamber; Select a matching PID segment according to the pressure control target pressure of the vacuum container chamber and the current air intake flow rate; Outputting a control signal using the selected PID segment according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake air flow rate; regulating the opening of the proportional control valve according to the control signal; After adjusting the opening of the proportional control valve, the real-time pressure of the vacuum container chamber during the pressure control process is obtained to form an actual pressure curve; If the difference between the final pressure in the actual pressure curve and the pressure control target pressure is greater than the preset error, the coefficient of the PID segment is automatically adjusted according to the deviation between the actual pressure curve and the pressure control target pressure; The selected PID segment is updated to the PID segment after the adjustment coefficient, and the step of "outputting a control signal using the selected PID segment according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake air flow rate" is returned until the difference between the final pressure in the actual pressure curve and the pressure control target pressure is less than or equal to the preset error.

2. The proportional control valve control method according to claim 1, characterized in that: According to the pressure control target pressure of the vacuum container chamber and the current air intake flow rate, a matching PID segment is selected, including: A one-to-one correspondence relationship between different values ​​of parameters and PID segments is set; the parameters include pressure control target pressure and intake air flow; According to the pressure control target pressure of the vacuum container chamber and the current air intake flow rate, a matching PID segment is selected by utilizing the one-to-one correspondence between different values ​​of the parameter and the PID segment.

3. The proportional control valve control method according to claim 1, characterized in that: According to the deviation between the actual pressure curve and the pressure control target pressure, the coefficient of the PID segment is automatically adjusted, including: If at least one of the following three situations occurs, adjust the proportional coefficient, differential coefficient, and integral coefficient of the PID segment: The first case: the difference between the real-time pressure in the actual pressure curve and the pressure control target pressure is greater than the first preset difference; The second situation: the change time from the last real-time pressure to the next real-time pressure in the actual pressure curve is less than the preset time threshold; The third situation: the difference between the real-time pressure average value in the actual pressure curve and the pressure control target pressure is greater than the second preset difference.

4. A proportional control valve, characterized in that: The proportional control valve comprises: a single chip microcomputer, a driving device and a valve body; The air inlet side of the valve body is connected to the vacuum container chamber, and the exhaust side of the valve body is connected to the vacuum pump; The signal output terminal of the single chip microcomputer is connected to the control terminal of the driving device, and the driving terminal of the driving device is connected to the control terminal of the valve body; There are multiple PID segments set on the microcontroller; The single chip microcomputer is used to execute the proportional control valve control method according to any one of claims 1 to 3 and output a control signal; The driving device is used to control the opening of the valve body according to the control signal, thereby adjusting the exhaust rate on the exhaust side to maintain the constant pressure in the chamber of the vacuum container.

5. The proportional control valve according to claim 4, characterized in that: The driving device is a motor, and the valve body comprises: a valve stem and a valve plate; The driving shaft of the motor is connected to one end of the valve stem through a coupling, and the other end of the valve stem is connected to the valve plate; The control end of the motor is connected to the signal output end of the single chip microcomputer; The motor is used to adjust the angle of the valve plate through the coupling and the valve stem according to the control signal output by the single chip microcomputer, so as to adjust the opening of the valve body.

6. The proportional control valve according to claim 5, characterized in that: The proportional control valve also includes: an encoder and a communication port; The encoder is connected to the single chip microcomputer; the encoder is used to measure the position of the motor and transmit it to the single chip microcomputer to represent the valve body opening; The single chip microcomputer is connected to the communication port; the single chip microcomputer receives the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current air intake flow rate through the communication port.

7. A proportional control valve system, characterized in that: The proportional control valve system comprises: a host computer, a flow meter and the proportional control valve according to any one of claims 4 to 6; The flow meter and the host computer are both connected to the proportional control valve; The flow meter is used to measure the current air intake flow rate of the vacuum container chamber and transmit the flow rate to the proportional control valve; The host computer is used to transmit the pressure control target pressure of the vacuum container chamber to the proportional control valve; The proportional control valve is used to obtain the current chamber pressure of the vacuum container chamber, and adjust the exhaust rate on the exhaust side according to the pressure control target pressure of the vacuum container chamber, the current chamber pressure and the current intake flow rate to maintain the constant pressure in the vacuum container chamber.

8. The proportional control valve system according to claim 7, characterized in that: The proportional control valve system further comprises: a vacuum gauge; The vacuum gauge is connected to the host computer; The vacuum gauge is used to measure the current chamber pressure of the vacuum container chamber and transmit it to the host computer; The host computer transmits the pressure control target pressure of the vacuum container chamber and the current chamber pressure to the proportional control valve.

9. The proportional control valve system according to claim 7, characterized in that: The proportional control valve system further comprises: a vacuum gauge; The vacuum gauge is connected to the single chip microcomputer in the proportional control valve; The vacuum gauge is used to measure the current chamber pressure of the vacuum container chamber and transmit the pressure to the proportional regulating valve.

10. The proportional control valve system according to claim 7, characterized in that: Adjust the coefficient of the PID segment in the microcontroller through the host computer.

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