Laser system output stability detection analysis device and method

Abstract

The application discloses a kind of laser system output stability detection analysis device and method, device includes the optical characteristic detection unit and optical characteristic analysis unit connected in optical path;Optical characteristic detection unit includes the optical path connection of spectroscope (20) in turn, condensing mirror (21), position sensitive detector (22), focusing lens array (23) and CCD camera (24);Optical characteristic analysis unit includes processor (30) and controller (31), controller (31) receives the processing result of processor (30), when the processing result of the processor (30) exceeds the set requirement of laser system, controller (31) sends alarm information to laser system (10).The application simultaneously measures the laser beam position, laser beam pointing and beam wavefront variation of three aspects information of laser system, the influence generated by the measurement of laser beam position, laser beam pointing eliminates beam wavefront variation, improves the measurement precision of laser beam position, laser beam pointing.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of optical engineering, and more particularly relates to a laser system output stability detection and analysis device and method. BACKGROUND

[0002] In a laser system such as laser space communication, laser etching, and laser micro-processing, after the laser beam output by the laser system is transformed and transmitted by optical devices such as lenses and mirrors, the laser beam position will deviate and the laser beam pointing will deviate due to the jitter and position change of the optical elements in the laser system and the vibration of the external environment. At the same time, the wavefront of the laser beam in the laser system will change, causing the wavefront of the laser beam to distort and the quality of the laser beam to deteriorate. This reflects whether the laser system can continuously work under the laser output condition and seriously affects the performance index and stability of the laser system. Therefore, it is particularly important to detect the laser beam output position, the beam pointing, and the beam wavefront change in the laser system in real time with high precision.

[0003] With the rapid development of laser systems in the aspects of high power, high precision, and high stability, the requirements for the output precision, stability, and reliability of the laser beam in the laser system are becoming higher and higher. At present, the detection method for the laser beam output position and the beam pointing adopts light splitting detection, and the laser beam output position and the beam pointing are measured respectively. However, the beam wavefront change in the laser system cannot be detected and analyzed, so the measurement values of the laser beam output position and the beam pointing contain the error of the beam wavefront change, which reduces the detection precision of the laser beam output position and the beam pointing, and cannot screen out the index parameters that can reflect the stable working of the laser system. SUMMARY

[0004] In view of the above defects or improvement needs of the prior art, the present application provides a laser system output stability detection and analysis device and method, which measures the information of the laser beam position, the laser beam pointing, and the beam wavefront change in the laser system. The measurement of the laser beam position and the laser beam pointing eliminates the influence of the beam wavefront change, and improves the measurement precision of the laser beam position and the laser beam pointing.

[0005] To achieve the above-mentioned purpose, according to the first aspect of the present application, a laser system output stability detection and analysis device is provided, comprising an optical characteristic detection unit and an optical characteristic analysis unit connected in an optical path; wherein,

[0006] The optical characteristic detection unit comprises a beam splitter, a beam reducer, a position sensitive detector, a focusing lens array, and a CCD camera connected in an optical path in sequence. The laser beam is divided into transmitted light and reflected light by the beam splitter. The transmitted light is irradiated on the position sensitive detector after being reduced by the beam reducer. The reflected light is focused on the CCD camera by the lens array.

[0007] The optical characteristic analysis unit comprises a processor and a controller, the processor collects the light beam signals detected by the position sensitive detector and the CCD camera and processes data, analyzes whether the laser beam position in the laser system, the laser beam pointing offset and the beam wavefront change exceed the requirements, and the controller receives the processing results of the processor and sends alarm information to the laser system when the processing results of the processor exceed the set requirements of the laser system.

[0008] Further, the optical characteristic detection unit further comprises a sampling mirror arranged between the laser system and the beam splitter, and the laser system outputs a laser beam which is divided into a first transmitted light beam and a first reflected light beam through the sampling mirror.

[0009] Further, the first transmitted light beam is divided into a second transmitted light beam and a second reflected light beam through the beam splitter.

[0010] Further, the second transmitted light beam is irradiated on the position sensitive detector after being shrunk by the beam shrinking mirror.

[0011] Further, the second reflected light beam is focused on the CCD camera by the lens array.

[0012] According to the second aspect of the present application, a laser system output stability detection and analysis method is provided, which is implemented by using the laser system output stability detection and analysis device, and comprises the following steps:

[0013] S100: the laser system outputs a laser beam which is divided into a first reflected light beam and a first transmitted light beam through a sampling mirror, and the first transmitted light beam is divided into a second transmitted light beam and a second reflected light beam through a beam splitter;

[0014] S200: the second transmitted light beam is irradiated on a position sensitive detector after being shrunk by a beam shrinking mirror, and the second reflected light beam is focused on a CCD camera by a lens array, and the position sensitive detector and the CCD camera transmit the measurement data of the light beam to a processor;

[0015] S300: the processor processes the measurement data to obtain the laser beam position offset, the laser beam pointing offset and the beam wavefront change information in the optical path, and analyzes the stability of the laser system;

[0016] S400: when the processing results of the processor exceed the set requirements of the laser system, the controller sends alarm information to the laser system, and an operator controls the shutdown or continuous operation of the laser system through the controller.

[0017] Further, in step S200, the beam shrinking mirror shrinks the second transmitted light beam, and the shrunk laser beam is irradiated on the position sensitive detector, and the position information (ΔX n ,ΔY n ) of the laser beam measured by the position sensitive detector is:

[0018] ΔX n = X n - X0

[0019] ΔY n = Y n - Y0

[0020] Wherein, X0, Y0 are the positions of the light spot of the beamlet in the position sensitive detector, X n , Y n are the positions of the light spot collected by the position sensitive detector.

[0021] Further, in step S200, the lens array focuses the second reflected light, and the CCD camera is placed at the focal point of the lens array, and the CCD camera detects the second reflected light focusing light spot array formed by the lens array;

[0022] The laser beam pointing direction of the lens array is :

[0023]

[0024]

[0025] Wherein, D is the diameter of the lens array sub-lens, f is the focal length of the lens array, X ij , Y ij are the coordinate positions of the light spot array in the CCD camera, i, j are pixel numbers respectively, and n is the total number of pixels.

[0026] Further, in step S300, the processor receives the laser beam position information measured by the position sensitive detector and the second reflected light focusing light spot array information detected by the CCD camera, processes the received measurement data, and calculates the laser beam position offset, the laser beam pointing direction offset and the beam wavefront change.

[0027] Further, the laser beam position offset is:

[0028]

[0029]

[0030] Wherein, X ij (t0), Y ij (t0) are the calibration positions of the light spot array in the camera, X ij (t), Y ij (t) are the positions of the light spot array collected by the CCD camera.

[0031] Overall, compared with the prior art, the above technical solutions conceived by the present application can achieve the following beneficial effects:

[0032] 1. The device of the present application simultaneously measures the position, pointing and wavefront variation of the laser beam of the laser system, and the measurement of the position and pointing of the laser beam eliminates the influence of the wavefront variation, thereby improving the measurement accuracy of the position and pointing of the laser beam.

[0033] 2. The device of the present application has the measurement capability of the wavefront variation of the laser beam in the laser system, and by measuring the real-time variation of the optical element during operation, the stability and reliability of the laser system are ensured.

[0034] 3. The device of the present application realizes high-precision detection of the output laser beam position and pointing of the laser system, and can measure and analyze the deformation of the optical element to determine the stability and reliability of the laser system.

[0035] 4. The device of the present application particularly focuses on the optical path design between the beam reducer and the position sensitive detector, and the position and angle of the beam reducer are precisely adjusted to ensure that the reduced beam can be irradiated onto the detector with the best incident condition, and the optical axis of the beam reducer is strictly aligned with the detection surface of the position sensitive detector to avoid measurement errors caused by beam deviation or scattering.

[0036] 5. The method of the present application divides the output laser beam of the laser system into a first reflected beam and a first transmitted beam through a sampling mirror, divides the first transmitted beam into a second transmitted beam and a second reflected beam through a beam splitter, irradiates the second transmitted beam on a position sensitive detector after being reduced by a beam reducer, focuses the second reflected beam on a CCD camera through a lens array, and transmits the measurement data of the beams to a processor by the position sensitive detector and the CCD camera, and the processor processes the measurement data to obtain the laser beam position deviation, laser beam pointing deviation and wavefront variation information in the optical path, analyzes the stability of the laser system, sends alarm information to the laser system by the controller when the processing result of the processor exceeds the set requirement of the laser system, and controls the laser system to be turned off or continue to run by the controller. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 The present application is an output stability detection and analysis device for a laser system;

[0038] Figure 2 The present application is a laser position measurement optical path diagram;

[0039] Figure 3 The present application is a laser pointing and beam wavefront variation measurement optical diagram;

[0040] Figure 4 Fig. 1 is a schematic diagram of a position sensitive detector collecting the position of a condensed beam onto a processor in an embodiment of the present application;

[0041] Figure 5 Fig. 2 is a schematic diagram of a data processing flow in an embodiment of the present application;

[0042] Figure 6 Fig. 3 is a schematic diagram of a laser system output stability detection and analysis method flow in an embodiment of the present application.

[0043] In all the drawings, the same reference signs refer to the same technical features, specifically: 10 - laser system, 11 - sampling mirror, 20 - beam splitter, 21 - condensing mirror, 22 - position sensitive detector, 23 - focusing lens array, 24 - CCD camera, 30 - processor, 31 - controller. DETAILED DESCRIPTION

[0044] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not used to limit the present application. In addition, the technical features involved in the various embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0045] Embodiment 1

[0046] As Figure 1As shown, the application is composed of an optical characteristic detection unit and an optical characteristic analysis unit. The optical characteristic detection unit realizes high-precision detection of the output position of the laser beam of the laser system, the direction of the beam, and the measurement of the wavefront variation of the beam, and is composed of a beam splitter 20, a beam reducer 21, a position-sensitive detector 22, a focusing lens array 23, and a CCD camera 24. The optical characteristic analysis unit collects and processes the information detected by the position-sensitive detector 22 and the CCD camera 24, realizes analysis of the characteristics of the output laser beam of the laser system and control of the laser system, and is composed of a processor 30 and a controller 31. The first transmitted light is subjected to secondary splitting by the beam splitter 20, the second transmitted light is subjected to beam reduction after passing through the beam reducer 21, and the second transmitted light after beam reduction is irradiated on the position-sensitive detector 22. The second reflected light is subjected to focusing by the focusing lens array 23, and the second reflected light forms a focusing beam array and is irradiated on the CCD camera 24. The detection data of the position-sensitive detector 22 and the CCD camera 24 are uploaded to the processor 30 for processing and analysis, the measurement results of the position of the laser beam, the direction of the laser beam, and the wavefront variation of the beam of the laser system are obtained, and it is judged whether the set requirements of the laser system 10 are met. When the set index of the laser system is not met, the controller 31 sends an alarm information to the laser system 10. The device of the application simultaneously measures the position of the laser beam, the direction of the laser beam, and the wavefront variation of the beam of the laser system, eliminates the influence of the wavefront variation of the beam on the measurement of the position of the laser beam and the direction of the laser beam, and improves the measurement precision of the position of the laser beam and the direction of the laser beam.

[0047] As Figure 2As shown, in the optical property detection device of the present application, the beam reducer 21 performs critical optical processing on the second transmitted light, compressing the originally large-diameter laser beam into a smaller-diameter reduced beam, laying the foundation for subsequent high-precision detection. Through beam reduction, not only can the influence of laser beam diffusion on the detection equipment be effectively reduced, but also the focusing ability of the beam on the position-sensitive detector 22 can be significantly improved, thereby improving the accuracy of measurement. In the specific working process, the design and performance of the beam reducer 21 are crucial. It is usually made of high-quality optical materials, with excellent transmittance and anti-reflection performance, to reduce optical loss and interference. In addition, the optical parameters of the beam reducer are precisely calculated and adjusted to ensure that the beam diameter can be uniformly contracted during the beam reduction process, and the beam quality is not damaged. The reduced beam is optimized to concentrate energy in a smaller area, thereby enhancing signal strength and resolution in subsequent detection steps. The reduced beam is precisely directed to the position-sensitive detector 22 after passing through the beam reducer. The position-sensitive detector is a high-sensitivity optical detector specifically used to measure the spatial position change of the beam. The detector can capture the spot position of the reduced beam on the detection surface in real time, and calculate the center position of the spot through its internal detection mechanism, thereby obtaining the beam position data of the second transmitted light. This process relies on the high-precision response and fast calculation capability of the position-sensitive detector, which can complete measurement and output results within milliseconds. The working principle of the position-sensitive detector is based on photoelectric conversion technology. When the reduced beam shines on the detector surface, the photosensitive elements inside the detector will produce corresponding electrical signals, and the strength and distribution of the signals are directly related to the position of the spot on the detection surface. Through processing and analysis of the electrical signals, the detector can accurately locate the center position of the spot and output it in the form of high-resolution coordinates. This high-precision position detection method can adapt to a larger dynamic range of beam position changes, while having excellent anti-interference ability, providing stable and reliable measurement results even in complex optical environments. To ensure the accuracy of detection, the present application pays special attention to the optical path design between the beam reducer 21 and the position-sensitive detector 22. The position and angle of the beam reducer are precisely adjusted to ensure that the reduced beam can be incident on the detector with the best conditions. The optical axis of the beam reducer is strictly aligned with the detection surface of the position-sensitive detector to avoid measurement errors caused by beam deviation or scattering. In addition, to further improve the stability of detection, the device is usually equipped with anti-vibration structures and dustproof devices outside to reduce the interference of the external environment on the optical detection process. Through this complete design and working mechanism, the optical detection device of the present application not only realizes high-precision measurement of the beam position, but also has excellent real-time performance and reliability. This device can be applied to various scenes requiring precise optical measurement, such as laser cutting, optical laboratory research, and military laser system monitoring, etc.In the field of laser cutting, precise control of beam position is directly related to the machining precision and product quality; in optical laboratory research, beam position measurement provides important basic data for scientific experiments; in the military field, the stability and precision of laser systems are key factors to ensure combat effectiveness.

[0048] The condenser lens 21 is designed as a condenser lens system with adjustable condensing ratio. By adjusting the condensing ratio, it can adapt to second transmitted beams of different diameters, thereby expanding the application range of the optical property detection unit, especially showing excellent performance when handling large-diameter laser beams. The core of this system is to achieve flexible adjustment of beam diameter through adjustable structure to meet diversified application needs. The adjustable condenser lens system is composed of multiple optical elements, such as adjustable lens groups or zoom lens groups, whose optical spacing, focal length, etc. can be adjusted according to actual needs. Users adjust the condensing ratio of the condenser lens through mechanical or electronic control systems, so that the device can realize efficient condensing processing within a range of different laser beam diameters. When the input beam diameter is large, the condenser lens can compress the beam diameter through a higher condensing ratio to reach a suitable range for detection; while for small-diameter laser beams, the condensing ratio can be reduced to reduce beam distortion, thereby maintaining the integrity of the beam quality. This design greatly improves the versatility and adaptability of the device. Traditional fixed condensing ratio optical systems are usually only applicable to laser beams within a certain diameter range, and cannot meet the needs of multiple scenarios and multiple specifications of laser systems. By introducing the adjustable condensing ratio function, the same device can complete the beam condensing and position detection tasks with optimal performance when facing different types of laser systems. In specific application scenarios such as industrial laser processing, scientific research experiments, and military laser equipment, the diameter of the laser beam may vary due to application needs. The adjustable condensing ratio condenser lens system of the invention can dynamically adjust according to these differences, making the optical property detection unit have higher flexibility and precision in the detection of large-diameter laser beams. At the same time, this design also provides technical support for the upgrading and expansion of laser systems, showing important value in the development of new lasers. In addition, the adjustable condenser lens system also fully considers stability and operational convenience. By integrating an intelligent control system, users can quickly adjust the condensing ratio, avoiding tedious manual adjustment processes while ensuring high-precision optical performance during dynamic adjustment. This innovation makes the optical property detection device not only more functional, but also more user-friendly in actual operation.

[0049] As Figure 3As shown, the lens array 23 in the present application is used to decompose and focus the second reflected light into an array of sub-beams, which are then guided to the CCD camera 24 for detection. By capturing the center position information of the sub-beam array spots, the CCD camera achieves high-precision measurement of the beam wavefront characteristics and focusing state. This design fully utilizes the optical characteristics of the lens array and the high-resolution detection capability of the CCD camera, and builds an efficient and stable optical characteristic monitoring mechanism. The lens array 23 is composed of multiple lens units, each with a precisely designed focal length and spacing to ensure that the second reflected light is decomposed into sub-beams with uniform distribution and fixed spacing after passing through the lens array. This design of the lens array can effectively disperse the light energy, so that each sub-beam maintains independent optical characteristics, thereby avoiding interference between beams and enhancing the sensitivity to beam wavefront and pointing changes. The focused sub-beam array spots are regularly distributed in space, which provides a clear reference for subsequent measurement and analysis. The CCD camera 24, as the core component of optical characteristic detection, can accurately image the sub-beam array. The built-in photosensitive unit of the camera can capture the intensity distribution and center position of the spot in real time and output it in the form of high-resolution digital signals. By accurately measuring the center position of the sub-beam array spot, the beam wavefront variation and pointing offset information can be derived. Compared with the traditional single-point detection method, this multi-point detection method based on sub-beam array significantly improves the measurement accuracy and anti-interference ability, especially in dynamic wavefront variation measurement. In addition, the design has also been optimized in terms of optical path stability and data analysis reliability. The relative position and angle between the lens array 23 and the CCD camera 24 are strictly calibrated to ensure that the sub-beam array can completely cover the CCD photosensitive area, avoiding detection blind spots or signal distortion. At the same time, the spot data collected by the CCD camera is analyzed through an efficient processing algorithm, which can quickly extract the spot center information and output the wavefront characteristic parameters. This combination of real-time and high-precision provides a strong guarantee for dynamic monitoring and precise control of laser systems. The design of this system is not only suitable for optical measurement in laboratory environment, but also can be extended to industrial processing and military equipment fields. In laser processing, the combination of lens array and CCD camera can accurately adjust the focusing state of the beam to improve processing precision; in optical experiments, this device can help researchers monitor the output stability of lasers in real time; in military applications, this design helps to improve the performance and reliability of laser weapons and sensing systems. The CCD camera 24 can be fixed on a high-precision moving platform, which drives the CCD camera 24 to move on the focusing beam array focal plane, so that the optical characteristic detection unit can adapt to different diameters of the second reflected light, realizing the detection of large-diameter laser beam pointing and large-aperture laser system beam wavefront variation.

[0050] As Figure 4As shown, the present application realizes comprehensive monitoring and dynamic feedback control of multi-dimensional characteristics of the laser system through the cooperative detection of the position-sensitive detector 22 and the CCD camera 24, combined with the intelligent analysis and control of the processor 30 and the controller 31. This design plays an important role in ensuring the stability, accuracy and real-time response capability of the laser system performance, and is an innovative solution in the field of laser technology application. The position-sensitive detector 22 is responsible for collecting the position information of the beam-reducing light, and is the core component for realizing the laser beam position monitoring. After the beam-reducing mirror 21 processes the second transmitted light into a beam-reducing light, the light beam is projected onto the photosensitive area of the position-sensitive detector. The detector perceives the center position of the light spot through photoelectric conversion technology, and converts this information into digital signals uploaded to the processor 30. After receiving the position signal, the processor analyzes the spatial position of the light beam using an efficient calculation model, and compares the result with the set requirements of the laser system to make a judgment. If the laser beam position exceeds the set error range (such as deviating from the machining path or exceeding the optical tolerance), the processor will immediately generate an abnormal signal and transmit it to the controller 31. The CCD camera 24 is responsible for collecting the information of the focused light beam array, which is used for the detection of the laser beam pointing and wavefront changes. The lens array 23 decomposes and focuses the second reflected light into multiple sub-beam arrays, and the distribution and characteristics of the light spots reflect the wavefront state of the laser beam. The CCD camera captures the light beam array image through high-resolution photosensitive units, and uploads it to the processor 30 for data analysis. The processor extracts the light spot center position and intensity distribution of each sub-beam, and deduces the pointing angle and wavefront change parameters of the laser beam. This multi-point measurement method has higher precision and anti-interference ability compared with the traditional single-point measurement method, especially in dynamic laser systems. The processor 30 and the controller 31 are the intelligent core of the device, and through the cooperative work of the two, the functions of real-time, accuracy and intelligence are realized. The processor not only processes the collected data, but also comprehensively evaluates the position, pointing and wavefront changes of the laser beam through the built-in algorithm model. If these parameters exceed the set requirements, for example, the laser beam position deviation may affect the machining precision, or the wavefront changes affect the focusing quality of the light beam, the processor will immediately generate an alarm signal and send it to the controller 31. After receiving the signal, the controller can perform various response measures, including issuing an audible and visual alarm prompt to the operator, controlling the laser system to automatically adjust the output parameters, or even triggering an emergency shutdown program if necessary, to ensure system safety.

[0051] Embodiment 2

[0052] As Figure 6 shown, in another embodiment of the present application, a laser system output stability detection and analysis method is provided, which is implemented by using the laser system output stability detection and analysis device, comprising:

[0053] S100: the laser system outputs a laser beam, which is divided into a first reflected light beam and a first transmitted light beam by a sampling mirror, and the first transmitted light beam is divided into a second transmitted light beam and a second reflected light beam by a beam splitter;

[0054] S200: the second transmitted light beam is irradiated on a position sensitive detector after being shrunk by a beam shrinking mirror, and the second reflected light beam is focused on a CCD camera by a lens array, and the position sensitive detector and the CCD camera transmit the measurement data of the light beams to a processor;

[0055] In step S200, the beam shrinking mirror shrinks the second transmitted light beam, and the shrunk laser beam is irradiated on the position sensitive detector, and the position sensitive detector measures the position information (ΔX n ,ΔY n ) of the laser beam as follows:

[0056] ΔX n =X n -X0

[0057] ΔY n =Y n -Y0

[0058] Wherein, X0 and Y0 are the calibration positions of the spot of the shrunk light beam on the position of the light beam of the position sensitive detector, X n and Y n are the positions of the spot collected by the position sensitive detector.

[0059] The lens array focuses the second reflected light, and the CCD camera is placed at the focal point of the lens array, and the CCD camera detects the second reflected light focusing spot array formed by the lens array;

[0060] The laser beam of the lens array is directed to as follows:

[0061]

[0062]

[0063] Wherein, D is the diameter of the lens array sub-lens, f is the focal length of the lens array, X ij and Y ij are the coordinate positions of the spot array in the CCD camera, i and j are pixel numbers, and n is the total number of pixels.

[0064] S300: the processor processes the measurement data to obtain the position offset of the laser beam in the light path, the pointing offset of the laser beam, and the wavefront variation information of the light beam, and analyzes the stability of the laser system;

[0065] In step S300, the processor receives the laser beam position information measured by the position sensitive detection and the second reflected light focus spot array information detected by the CCD camera, and processes the received measurement data to calculate the laser beam position offset, laser beam pointing offset and beam wavefront change.

[0066] The laser beam position offset for:

[0067]

[0068]

[0069] Among them, X ij (t0), Y ij (t0) are the calibration positions of the light spot array in the camera, X ij (t), Y ij (t) are the positions of the light spot array captured by the CCD camera.

[0070] S400: When the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to shut down or continue to operate through the controller.

[0071] According to the method of the present invention, a laser beam output by a laser system is divided into a first reflected beam and a first transmitted beam by a sampling mirror, the first transmitted beam is divided into a second transmitted beam and a second reflected beam by a beam splitter, the second transmitted beam is reduced by a beam reduction mirror and irradiated on a position sensitive detector, the second reflected beam is focused on a CCD camera by a lens array, the position sensitive detector and the CCD camera transmit measurement data of the light beam to a processor, the processor processes the measurement data to obtain information on the laser beam position offset, laser beam pointing offset and beam wavefront change in the optical path, analyzes the stability of the laser system, and when the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to be shut down or continue to operate through the controller.

[0072] It will be easily understood by those skilled in the art that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A laser system output stability detection and analysis device, characterized in that: It includes an optical property detection unit and an optical property analysis unit connected in an optical path; wherein, The optical property detection unit comprises a beam splitter (20), a beam reduction mirror (21), a position sensitive detector (22), a focusing lens array (23), and a CCD camera (24) connected in sequence in an optical path, wherein the laser beam is divided into transmitted light and reflected light by the beam splitter (20), the transmitted light is shrunken by the beam reduction mirror (21) and irradiated onto the position sensitive detector (22), and the reflected light is focused onto the CCD camera (24) by the lens array (23); The optical characteristic analysis unit includes a processor (30) and a controller (31), wherein the processor (30) collects the beam signals detected by the position sensitive detector (22) and the CCD camera (24) and performs data processing, and analyzes whether the laser beam position, the laser beam pointing offset, and the beam wavefront change in the laser system (10) exceed the requirements, and the controller (31) receives the processing result of the processor (30). When the processing result of the processor (30) exceeds the set requirements of the laser system, the controller (31) sends an alarm message to the laser system (10); The focusing lens array (23) focuses the second reflected light, the CCD camera (24) is placed at a focal position of the focusing lens array (23), and the CCD camera (24) detects a focused light spot array of the second reflected light formed by the focusing lens array (23); The laser beam of the focusing lens array (23) is directed to for: in, is the diameter of the lens array sub-lens, is the focal length of the lens array, are the coordinate positions of the light spot array in the CCD camera, are pixel numbers, is the total number of pixels; The processor (30) processes the received measurement data and calculates the laser beam position offset, the laser beam pointing offset and the beam wavefront change; The laser beam position offset for: in, are the calibration positions of the light spot array in the camera, are the positions of the light spot array captured by the CCD camera respectively.

2. The laser system output stability detection and analysis device according to claim 1, characterized in that: The optical property detection unit further comprises a sampling mirror (11) disposed between the laser system (10) and the beam splitter (20); the laser beam output by the laser system (10) is split into a first transmitted beam and a first reflected beam via the sampling mirror (11).

3. The laser system output stability detection and analysis device according to claim 2, characterized in that: The first transmitted light beam is divided into a second transmitted light beam and a second reflected light beam by a beam splitter (20).

4. The laser system output stability detection and analysis device according to claim 3, characterized in that: The second transmitted light beam is radiated onto a position sensitive detector (22) after being condensed by the condenser mirror (21).

5. The laser system output stability detection and analysis device according to claim 3, characterized in that: The second reflected light beam is focused on a CCD camera (24) via the lens array (23).

6. A method for detecting and analyzing the output stability of a laser system, characterized in that: The method is implemented by using a laser system output stability detection and analysis device according to any one of claims 1 to 5, comprising: S100: The laser beam output by the laser system is divided into a first reflected beam and a first transmitted beam by a sampling mirror, and the first transmitted beam is divided into a second transmitted beam and a second reflected beam by a beam splitter; S200: The second transmitted light beam is reduced by a beam reducer and irradiated onto a position sensitive detector. The second reflected light beam is focused onto a CCD camera via a lens array. The position sensitive detector and the CCD camera transmit measurement data of the light beam to a processor. S300: The processor processes the measurement data to obtain information on the laser beam position offset, laser beam pointing offset, and beam wavefront variation in the optical path, and analyzes the stability of the laser system. S400: When the processing result of the processor exceeds the set requirements of the laser system, the controller sends an alarm message to the laser system, and the operator controls the laser system to shut down or continue to operate through the controller.

7. A method for detecting and analyzing laser system output stability according to claim 6, characterized in that: In step S200, the beam reduction mirror reduces the second transmitted light beam, and the reduced laser beam is irradiated on the position sensitive detector, which measures the position information of the laser beam. for: in, are the calibration positions of the beam spot of the reduced beam on the position sensitive detector, are the light spot positions collected by the position sensitive detector respectively.

8. The method for detecting and analyzing laser system output stability according to claim 7, characterized in that: In step S300, the processor receives the laser beam position information measured by the position sensitive detection and the second reflected light focus spot array information detected by the CCD camera, and processes the received measurement data to calculate the laser beam position offset, laser beam pointing offset and beam wavefront change.

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