Insulating liquid fluidity monitoring device and wafer testing device

Abstract

The invention discloses an insulating liquid fluidity monitoring device and a wafer testing device. The insulating liquid fluidity monitoring device comprises a flow monitoring module and an alarm module. The flow monitoring module is electrically connected with the alarm module, and the flow monitoring module is used for monitoring the actual flow of insulating liquid in an insulating liquid pipeline in the wafer testing device and controlling the alarm module to give an alarm prompt when the actual flow is smaller than a first set threshold value. The invention provides an insulating liquid fluidity monitoring device and a wafer testing device, which can reduce the economic loss of an enterprise and indirectly increase the income of the enterprise.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor testing, and in particular to an insulating liquid fluidity monitoring device and a wafer testing device. Background Art

[0002] After the wafer is manufactured, it is necessary to perform wafer testing on the wafer to ensure its production quality. During the wafer testing process, the existing wafers often explode due to excessive leakage current caused by sparks on the wafer surface, causing great economic losses to the company. Summary of the invention

[0003] The present invention provides an insulating liquid fluidity monitoring device and a wafer testing device, which can reduce the economic loss of an enterprise and indirectly increase the enterprise's profit.

[0004] According to one aspect of the present invention, there is provided an insulating liquid fluidity monitoring device, the insulating liquid fluidity monitoring device comprising: a flow monitoring module and an alarm module;

[0005] The flow monitoring module is electrically connected to the alarm module, and is used to monitor the actual flow of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and control the alarm module to issue an alarm prompt when the actual flow is less than a first set threshold.

[0006] Optionally, the insulating liquid includes fluorine oil.

[0007] Optionally, the first set threshold is determined according to the number of bubbles in the insulating liquid pipeline.

[0008] Optionally, the flow monitoring module is also used to issue a first prompt when the actual flow is less than the first set threshold, issue a second prompt when the actual flow is less than a second set threshold and greater than or equal to the first set threshold, and issue a third prompt when the actual flow is greater than or equal to the second set threshold, wherein the second set threshold is greater than the first set threshold.

[0009] Optionally, the flow monitoring module includes a flow monitoring unit, a first light emitting unit, a second light emitting unit and a third light emitting unit;

[0010] The flow monitoring unit is electrically connected to the first light-emitting unit, the second light-emitting unit, the third light-emitting unit and the alarm module. The flow monitoring unit is used to control the first light-emitting unit to issue the first prompt and the alarm module to issue an alarm prompt when the actual flow is less than the first set threshold, control the second light-emitting unit to issue the second prompt when the actual flow is less than the second set threshold and greater than or equal to the first set threshold, and control the third light-emitting unit to issue the third prompt when the actual flow is greater than or equal to the second set threshold.

[0011] Optionally, the alarm module includes a sound unit and a light unit;

[0012] The sound unit is connected in series with the light unit.

[0013] Optionally, the insulating liquid fluidity monitoring device provided in this embodiment further includes a power supply module;

[0014] The power module is electrically connected to the flow monitoring module and the alarm module, and the power module is used to supply power to the flow monitoring module and the alarm module.

[0015] Optionally, the flow monitoring module includes a monitoring sensor and a relay;

[0016] The common end of the relay is electrically connected to the first end of the alarm module, and the normally closed end of the relay is electrically connected to the positive end of the power module;

[0017] The second end of the alarm module is electrically connected to the negative end of the power module;

[0018] The monitoring sensor is used to control the common end of the relay to be connected to the normally closed end of the relay when the actual flow rate is less than the first set threshold value.

[0019] According to another aspect of the present invention, there is provided a wafer testing device, the wafer testing device comprising an insulating liquid pipeline, a nozzle, an insulating liquid storage module, a test bench module and an insulating liquid fluidity monitoring device provided by any embodiment of the present invention;

[0020] The insulating liquid pipeline is used to transport the insulating liquid;

[0021] The nozzle is used to spray the insulating liquid onto the surface of the wafer;

[0022] The insulating liquid storage module is in communication with the insulating liquid pipeline, and the insulating liquid storage module is used to store the insulating liquid;

[0023] The test bench module is used for carrying the wafer.

[0024] Optionally, the wafer testing device provided in this embodiment further includes a flow regulating valve;

[0025] The flow regulating valve is located in the insulating liquid pipeline, and the flow regulating valve is used to regulate the actual flow of the insulating liquid in the insulating liquid pipeline.

[0026] This example provides an insulating liquid fluidity monitoring device, which includes a flow monitoring module and an alarm module. The flow monitoring module is electrically connected to the alarm module, and the flow monitoring module is used to monitor the actual flow of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and control the alarm module to issue an alarm prompt when the actual flow is less than the first set threshold. The insulating liquid fluidity monitoring device provided in this embodiment can issue an alarm prompt under the condition that the actual flow of the insulating liquid is uneven and unstable, so as to remind the staff to check the wafers that may have unqualified insulation in time and remind the staff to adjust the actual flow of the insulating liquid in the insulating liquid pipeline in time, so as to avoid the economic losses and personal injuries caused by the staff directly igniting the unqualified wafers and causing them to explode, and also avoid the economic losses of the enterprise caused by the majority of wafers being unqualified due to the unstable insulating liquid flow in the subsequent wafer production process. In summary, the insulating liquid fluidity monitoring device provided in this embodiment can reduce the economic losses of the enterprise and indirectly increase the profits of the enterprise.

[0027] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 is a schematic structural diagram of an insulating liquid fluidity monitoring device provided according to an embodiment of the present invention;

[0030] Figure 2 is a structural schematic diagram of a wafer testing device provided according to an embodiment of the present invention;

[0031] Figure 3 is a schematic structural diagram of another insulating liquid fluidity monitoring device provided according to an embodiment of the present invention;

[0032] Figure 4is a schematic structural diagram of another insulating liquid fluidity monitoring device provided according to an embodiment of the present invention;

[0033] Figure 5 is a schematic structural diagram of another insulating liquid fluidity monitoring device provided according to an embodiment of the present invention;

[0034] Figure 6 It is a structural schematic diagram of a wafer testing device provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0036] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0037] Figure 1 is a schematic diagram of the structure of an insulating liquid fluidity monitoring device provided according to an embodiment of the present invention, with reference to Figure 1 The insulating liquid fluidity monitoring device 100 provided in this embodiment includes: a flow monitoring module 110 and an alarm module 120; the flow monitoring module 110 is electrically connected to the alarm module 120, and the flow monitoring module 110 is used to monitor the actual flow of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and control the alarm module 120 to issue an alarm prompt when the actual flow is less than the first set threshold.

[0038] Specifically, the flow monitoring module 110 includes a probe, which is arranged in the insulating liquid pipeline. After monitoring the actual flow, the flow monitoring module 110 will determine the size between the actual flow and the first set threshold, and when it is determined that the actual flow is less than the first set threshold, the alarm module 120 is controlled to issue an alarm prompt. The alarm module 120 may include a sound alarm unit and / or a light alarm unit. The alarm prompt can be received by the staff. The first set threshold can be set according to actual needs.

[0039] The insulating liquid fluidity monitoring device 100 provided in this embodiment is applied to a wafer testing device. Figure 2 is a schematic diagram of the structure of a wafer testing device provided according to an embodiment of the present invention, with reference to Figure 2 The wafer testing device is used to manufacture the wafer 300. The wafer testing device includes an insulating liquid pipeline 210 and a nozzle 220. The insulating liquid pipeline 210 is used to transmit the insulating liquid. The insulating liquid is sprayed onto the surface of the wafer 300 through the nozzle 220. During the manufacturing process of the wafer 300, the insulating liquid needs to be sprayed onto the set area of ​​the wafer 300. When the wafer 300 is manufactured, the flow rate of the insulating liquid when it flows in the insulating liquid pipeline 210 is the actual flow rate. When the actual flow rate is less than the first set threshold, the insulating liquid in the insulating liquid pipeline 210 will have uneven flow rate, unstable flow rate and other phenomena, resulting in the insulating liquid sprayed from the nozzle 220 containing bubbles, so that the insulating liquid is sprayed everywhere, so that some areas of the surface of the wafer 300 that should be sprayed with the insulating liquid are not sprayed with the insulating liquid, and finally the insulated area of ​​the manufactured wafer 300 will not be insulated, resulting in the manufactured wafer 300 being prone to explosion when ignited, causing certain losses to the enterprise. In this embodiment, a flow monitoring module 110 is provided to monitor the actual flow of the insulating liquid in the insulating liquid pipeline 210, and when the actual flow is less than a first set threshold value, the alarm module 120 is controlled to issue an alarm prompt, so as to remind the staff to promptly check for wafers 300 that may have unqualified insulation, so as to avoid the staff directly igniting the unqualified insulation wafers and causing explosion and other hazards. The alarm prompt issued by the alarm module 120 also reminds the staff to promptly adjust the flow of the insulating liquid in the insulating liquid pipeline 210, so as to avoid a large number of unqualified wafers 300 being produced during the subsequent wafer 300 production process due to the unstable actual flow of the insulating liquid.

[0040] This example provides an insulating liquid fluidity monitoring device, which includes a flow monitoring module and an alarm module. The flow monitoring module is electrically connected to the alarm module, and the flow monitoring module is used to monitor the actual flow of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and control the alarm module to issue an alarm prompt when the actual flow is less than the first set threshold. The insulating liquid fluidity monitoring device provided in this embodiment can issue an alarm prompt under the condition that the actual flow of the insulating liquid is uneven and unstable, so as to remind the staff to check the wafers that may have unqualified insulation in time and remind the staff to adjust the actual flow of the insulating liquid in the insulating liquid pipeline in time, so as to avoid the economic losses and personal injuries caused by the staff directly igniting the unqualified wafers and causing them to explode, and also avoid the economic losses of the enterprise caused by the majority of wafers being unqualified due to the unstable insulating liquid flow in the subsequent wafer production process. In summary, the insulating liquid fluidity monitoring device provided in this embodiment can reduce the economic losses of the enterprise and indirectly increase the profits of the enterprise.

[0041] Optionally, the insulating liquid includes fluorinated oil.

[0042] Specifically, fluorine oil is also called electronic fluorinated liquid, and its chemical formula is C9H5F 15O . Fluorine oil is a colorless, transparent, low-viscosity, non-flammable and highly safe liquid. In addition, fluorine oil has the characteristics of low surface tension, good material compatibility, moderate solubility, excellent electrical insulation performance, excellent thermal conductivity, thermal stability and chemical stability, good chemical inertness, and no corrosion when in contact with electronic components. The application of fluorine oil in wafer production can form effective high-voltage protection performance for the wafer, effectively reduce the probability of sparking and discharge under high voltage during wafer testing, and improve the yield of the wafer. The insulating liquid fluidity monitoring device provided in this embodiment can monitor the actual flow rate of fluorine oil when coating fluorine oil during the wafer production process, and issue an alarm when the actual flow rate of fluorine oil is less than the first set threshold value, so as to remind the staff to check the wafers with unqualified insulation in time and adjust the actual flow rate of fluorine oil in the insulating liquid pipeline.

[0043] Optionally, the first set threshold is determined according to the number of bubbles in the insulating liquid pipeline.

[0044] Specifically, when there are bubbles in the insulating liquid pipeline, the actual flow rate of the insulating liquid will fluctuate. The more bubbles there are, the more unstable the actual fluidity of the insulating liquid will be, and the actual flow rate will fluctuate greatly, causing the insulating liquid sprayed from the nozzle to splash everywhere, which may easily lead to wafer insulation failure. In this embodiment, the first set threshold is determined according to the number of bubbles in the insulating liquid pipeline, so that the first set threshold can better measure the stability of the actual flow rate of the insulating liquid, improve the accuracy of monitoring the stability of the actual flow rate of the insulating liquid, and reduce the number of false alarms.

[0045] Optionally, the flow monitoring module is also used to issue a first prompt when the actual flow is less than a first set threshold, issue a second prompt when the actual flow is less than a second set threshold and greater than or equal to the first set threshold, and issue a third prompt when the actual flow is greater than or equal to the second set threshold, wherein the second set threshold is greater than the first set threshold.

[0046] Specifically, the first prompt, the second prompt and the third prompt are different from each other. The flow monitoring module issues the first prompt indicating that the actual flow of the insulating liquid in the insulating liquid pipeline is unstable, and the unqualified rate of the produced wafers is high. The first prompt and the alarm prompt can be issued at the same time. The flow monitoring module issues the third prompt indicating that the actual flow of the insulating liquid in the insulating liquid pipeline is stable, the flow rate of the insulating liquid is uniform, and the qualified rate of the wafers produced under this condition is high. The flow monitoring module issues the second prompt, indicating that the actual flow of the insulating liquid in the insulating liquid pipeline fluctuates, but basically does not affect the production of wafers. The flow monitoring module issues the second prompt to remind the staff to pay attention to the actual flow of the insulating liquid in the insulating liquid pipeline, so as to adjust the actual flow of the insulating liquid in time when the actual flow is less than the first set threshold, thereby reducing the number of unqualified wafers. The second set threshold can be determined according to the number of bubbles in the insulating liquid pipeline.

[0047] Optional, Figure 3 is a schematic diagram of the structure of another insulating liquid fluidity monitoring device provided according to an embodiment of the present invention, with reference to Figure 3 The flow monitoring module 110 includes a flow monitoring unit 111, a first light-emitting unit 112, a second light-emitting unit 113 and a third light-emitting unit 114; the flow monitoring unit 111 is electrically connected to the first light-emitting unit 112, the second light-emitting unit 113, the third light-emitting unit 114 and the alarm module 120, and the flow monitoring unit 111 is used to control the first light-emitting unit 112 to issue a first prompt and the alarm module 120 to issue an alarm prompt when the actual flow is less than the first set threshold, control the second light-emitting unit 113 to issue a second prompt when the actual flow is less than the second set threshold and greater than or equal to the first set threshold, and control the third light-emitting unit 114 to issue a third prompt when the actual flow is greater than or equal to the second set threshold.

[0048] Specifically, the first light emitting unit 112 may be a red light emitting unit, and the first prompt is red light. The second light emitting unit 113 may be a yellow light emitting unit, and the second prompt is yellow light. The third light emitting unit 114 may be a green light emitting unit, and the second prompt is green light.

[0049] Optionally, the alarm module includes a sound unit and a light unit; the sound unit and the light unit are connected in series.

[0050] Specifically, when the actual flow rate is less than the first set threshold, the alarm prompt issued by the alarm module includes a light prompt and a sound prompt. A sound unit and a light unit are set in the alarm module, and the sound unit and the light unit are connected in series, so that the staff can receive the alarm information more quickly through the sound and light prompts, and the staff can check the actual flow rate of the insulating liquid with unstable fluidity in time, further reduce the number of unqualified wafers, reduce corporate losses, and indirectly increase corporate profits.

[0051] Optional, Figure 4 is a schematic diagram of the structure of another insulating liquid fluidity monitoring device provided according to an embodiment of the present invention, with reference to Figure 4 The insulating liquid fluidity monitoring device provided in this embodiment further includes a power module 130 ; the power module 130 is electrically connected to the flow monitoring module 110 and the alarm module 120 , and the power module 130 is used to supply power to the flow monitoring module 110 and the alarm module 120 .

[0052] Specifically, the power module 130 outputs direct current. The output voltage of the power module 130 matches the voltage that the flow monitoring module 110 and the alarm module 120 can receive. Exemplarily, the rated voltage of the power module 130 is 24V, and the rated current can be 1.5A. The flow monitoring module 110 can be a 24V relay-type flow sensor. In this embodiment, the power module 130 is provided in the insulating liquid fluidity monitoring device, which can ensure that the insulating liquid fluidity monitoring device continues to work when the mains power is cut off, so that the insulating liquid fluidity monitoring device can work normally in a variety of scenarios.

[0053] Optional, Figure 5 is a schematic diagram of the structure of another insulating liquid fluidity monitoring device provided according to an embodiment of the present invention, with reference to Figure 5 The flow monitoring module 110 includes a monitoring sensor 117 and a relay 116; the common terminal COM of the relay 116 is electrically connected to the first end of the alarm module 120, and the normally closed terminal NC of the relay 116 is electrically connected to the positive terminal of the power module 130; the second end of the alarm module 120 is electrically connected to the negative terminal of the power module 130; the monitoring sensor 117 is used to control the common terminal COM of the relay 116 to be connected to the normally closed terminal NC of the relay 116 when the actual flow rate is less than the first set threshold value.

[0054] Specifically, the monitoring sensor 117 can be a resistive monitor. After the common terminal COM of the relay 116 is connected to the normally closed terminal NC of the relay 116, the alarm module 120 will issue an alarm prompt when it is powered on. The monitoring sensor 117 is used to control the common terminal COM of the relay 116 to be connected to the normally open terminal NO of the relay 116 when the actual flow rate is not less than the first set threshold value, so that the alarm module 120 does not issue an alarm prompt. The relay 116 has the characteristics of simple structure, long service life and low power consumption. The relay 116 is arranged in the flow monitoring module 110, and the alarm module 120 is controlled by controlling the relay 116 to issue an alarm prompt, which can improve the service life and reliability of the insulating liquid fluidity monitoring device. The monitoring sensor 117 and the relay 116 can be arranged in the flow monitoring unit.

[0055] Figure 6 is a schematic diagram of the structure of a wafer testing device provided according to an embodiment of the present invention, with reference to Figure 6 The wafer testing device provided in this embodiment includes an insulating liquid pipeline 210, a nozzle 220, an insulating liquid storage module 230, a test bench module 240, and an insulating liquid fluidity monitoring device 100 provided in any embodiment of the present invention. The insulating liquid pipeline 210 is used to transmit insulating liquid, and the nozzle 220 is used to spray the insulating liquid onto the surface of the wafer 300; the insulating liquid storage module 230 is connected to the insulating liquid pipeline 210, and the insulating liquid storage module 230 is used to store insulating liquid; the test bench module 240 is used to carry the wafer 300.

[0056] Specifically, the insulating liquid pipeline 210 can be a hose. The insulating liquid storage module 230 includes a storage pot 231 and a storage cover 232. The test bench module 240 can also be used to move the position of the wafer 300 relative to the nozzle 220. The probe 115 of the flow monitoring module 110 in the insulating liquid fluidity monitoring device 100 is disposed in the insulating liquid pipeline 210.

[0057] The present embodiment provides a wafer testing device, which can issue an alarm prompt when the flow rate of insulating liquid in the insulating liquid pipeline is uneven or the flow rate is unstable, so as to remind the staff to promptly check the wafers that may have unqualified insulation and remind the staff to promptly adjust the actual flow rate of the insulating liquid in the insulating liquid pipeline, so as to avoid the economic losses and personal injuries to the company caused by the staff directly igniting the wafers with unqualified insulation and causing them to explode, and also avoid the economic losses to the company caused by the majority of wafers being unqualified due to the unstable flow rate of insulating liquid in the subsequent wafer production process.

[0058] Optional, continue to refer to Figure 6The wafer testing device provided in this embodiment also includes a flow regulating valve 250 ; the flow regulating valve 250 is located in the insulating liquid pipeline 210 , and the flow regulating valve 250 is used to regulate the actual flow of the insulating liquid in the insulating liquid pipeline 210 .

[0059] Specifically, in this embodiment, a flow regulating valve 250 is provided in the wafer testing device, which can adjust the actual flow of the insulating liquid according to actual needs, thereby improving the wafer manufacturing qualification rate.

[0060] This embodiment also provides a method for manufacturing an insulating liquid fluidity monitoring device, the manufacturing method comprising the following steps:

[0061] S110, determining a relevant circuit diagram for setting up an insulating liquid fluidity monitoring device.

[0062] Specifically, before determining the circuit diagram, you should be familiar with the characteristics of fluorine oil and choose appropriate electronic accessories, such as DC24V relay-type flow sensor, sound and light alarm, and DC 24V two-wire power supply.

[0063] S120. Install electronic components according to the circuit diagram.

[0064] S130, adjusting the fluidity of the fluorine oil in the insulating pipe, and determining a first set threshold value according to the fluidity of the fluorine oil.

[0065] S140, perform a standby test.

[0066] Specifically, after the standby test is safe, it indicates that the insulating liquid fluidity monitoring device has been manufactured and can be applied to the wafer testing device.

[0067] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0068] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An insulating liquid fluidity monitoring device, characterized in that: include: Flow monitoring module and alarm module; The flow monitoring module is electrically connected to the alarm module, and is used to monitor the actual flow of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and control the alarm module to issue an alarm prompt when the actual flow is less than a first set threshold.

2. The insulating liquid fluidity monitoring device according to claim 1, characterized in that: The insulating liquid includes fluorine oil.

3. The insulating liquid fluidity monitoring device according to claim 1, characterized in that: The first set threshold is determined according to the number of bubbles in the insulating liquid pipeline.

4. The insulating liquid fluidity monitoring device according to claim 1, characterized in that: The flow monitoring module is also used to issue a first prompt when the actual flow is less than the first set threshold, issue a second prompt when the actual flow is less than the second set threshold and greater than or equal to the first set threshold, and issue a third prompt when the actual flow is greater than or equal to the second set threshold, wherein the second set threshold is greater than the first set threshold.

5. The insulating liquid fluidity monitoring device according to claim 4, characterized in that: The flow monitoring module includes a flow monitoring unit, a first light emitting unit, a second light emitting unit and a third light emitting unit; The flow monitoring unit is electrically connected to the first light-emitting unit, the second light-emitting unit, the third light-emitting unit and the alarm module. The flow monitoring unit is used to control the first light-emitting unit to issue the first prompt and the alarm module to issue an alarm prompt when the actual flow is less than the first set threshold, control the second light-emitting unit to issue the second prompt when the actual flow is less than the second set threshold and greater than or equal to the first set threshold, and control the third light-emitting unit to issue the third prompt when the actual flow is greater than or equal to the second set threshold.

6. The insulating liquid fluidity monitoring device according to claim 1, characterized in that: The alarm module includes a sound unit and a light unit; The sound unit is connected in series with the light unit.

7. The insulating liquid fluidity monitoring device according to claim 1, characterized in that: Also includes a power module; The power module is electrically connected to the flow monitoring module and the alarm module, and the power module is used to supply power to the flow monitoring module and the alarm module.

8. The insulating liquid fluidity monitoring device according to claim 7, characterized in that: The flow monitoring module includes a monitoring sensor and a relay; The common end of the relay is electrically connected to the first end of the alarm module, and the normally closed end of the relay is electrically connected to the positive end of the power module; The second end of the alarm module is electrically connected to the negative end of the power module; The monitoring sensor is used to control the common end of the relay to be connected to the normally closed end of the relay when the actual flow rate is less than the first set threshold value.

9. A wafer testing device, characterized in that: It comprises an insulating liquid pipeline, a nozzle, an insulating liquid storage module, a test bench module and the insulating liquid fluidity monitoring device according to any one of claims 1 to 8; The insulating liquid pipeline is used to transport the insulating liquid; The nozzle is used to spray the insulating liquid onto the surface of the wafer; The insulating liquid storage module is in communication with the insulating liquid pipeline, and the insulating liquid storage module is used to store the insulating liquid; The test bench module is used for carrying the wafer.

10. The wafer testing device according to claim 9, characterized in that: Also includes a flow regulating valve; The flow regulating valve is located in the insulating liquid pipeline, and the flow regulating valve is used to regulate the actual flow of the insulating liquid in the insulating liquid pipeline.

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