A method and system for sensing angular velocity based on double silicon-based micro-ring resonance demodulation

Abstract

The present application relates to the technical field of integrated optical gyroscopes, and particularly relates to a method and system for sensing angular velocity based on double silicon-based micro-ring resonance demodulation. The method comprises the following steps: a driving circuit drives broadband light emitted by an on-chip light source to be coupled into an on-chip silicon-based optical waveguide through an input grating; the broadband light is modulated into narrowband light after passing through a first silicon-based micro-ring; the narrowband light enters a silicon-based sensing ring, and the narrowband light generates Sagnac frequency shift when the silicon-based sensing ring rotates; a second silicon-based micro-ring changes a channel frequency band through electrical modulation, and resonance demodulation is achieved when the channel frequency band matches the frequency of the narrowband light signal after frequency shift; the demodulated optical signal enters an on-chip detector through an output grating and is converted into an electrical signal, and the initial angular velocity of a carrier platform is demodulated after being processed by a demodulation circuit. The present application realizes high-sensitivity sensing of angular velocity based on double silicon-based micro-ring resonance demodulation; and provides a theoretical basis and technical support for the development of integrated optical gyroscopes with the advantages of high sensitivity, miniaturization, chipization and low cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of integrated optical gyroscopes, in particular to a method and system for sensing angular velocity based on dual silicon-based micro-ring resonance demodulation. BACKGROUND

[0002] Optical gyroscopes are sensors for measuring the angular velocity of a carrier platform, and have been widely used in aerospace, military weapons, earthquake monitoring and many other fields. However, with the rapid development of modern carrier platforms such as microsatellites, intelligent ammunition, unmanned aerial vehicles and intelligent driverless cars, gyroscopes with high sensitivity, wide frequency response, integration, chipization and low cost have become an important demand. Silicon-based monolithic integrated optical gyroscopes compatible with CMOS technology have great potential in integrated chipization and manufacturing cost, but the relatively low sensitivity greatly limits the popularization and application of such gyroscopes, so a new high-sensitivity demodulation method is of great scientific significance for the research of silicon-based monolithic integrated optical gyroscopes.

[0003] Silicon-based monolithic integrated optical microsystems have the characteristics of compatibility with CMOS technology and are commonly used in the manufacture of temperature, magnetic field and other parameter sensing systems. The hetero-integration process of silicon-based chips with III-V group light sources and photodetectors is very mature, and silicon-based monolithic integrated optical gyroscope schemes have been reported, and angular motion sensing in a very small volume has been achieved, but the existing demodulation method still has relatively low sensitivity, which greatly limits the popularization and application of integrated optical gyroscopes. SUMMARY

[0004] To solve the technical problem of low sensitivity of the existing integrated optical gyroscope demodulation method, the embodiments of the present application provide a method and system for sensing angular velocity based on dual silicon-based micro-ring resonance demodulation. The technical solution is as follows:

[0005] On the one hand, a sensing system based on dual silicon-based micro-ring resonance demodulation is provided, which includes a driving circuit, an on-chip light source, an input grating, a first silicon-based micro-ring, a silicon-based sensing ring, a second silicon-based micro-ring, a modulation circuit, an output grating, an on-chip detector and a demodulation circuit.

[0006] The driving circuit drives the on-chip light source, and the broadband light emitted by the on-chip light source is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0007] When the light is conducted to the first optical waveguide of the first silicon-based micro-ring, it enters the first silicon-based micro-ring in the form of evanescent wave coupling and resonates in the micro-ring; wherein the first optical waveguide is located on the light input side of the first silicon-based micro-ring;

[0008] The light in the resonance frequency band outputs narrowband light through the first silicon-based micro-ring, and enters the second optical waveguide of the first silicon-based micro-ring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based micro-ring;

[0009] The narrow-band light enters the silicon-based sensing ring through the optical waveguide, and when the silicon-based sensing ring rotates, the output light frequency changes with the rotation of the silicon-based micro-ring;

[0010] The narrow-band light enters the second silicon-based micro-ring through evanescent wave coupling after passing through the silicon-based sensing ring, and the resonance channel of the silicon-based micro-ring shifts under the control of the electric field of the modulation circuit; when the channel matches the signal, resonance demodulation is realized, and an intensity modulation signal is output;

[0011] The light signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating to be converted into an electric signal, and the initial angular velocity signal of the angular velocity sensing system is demodulated after the electric signal is processed by the demodulation circuit.

[0012] Optionally, only the light in the resonance frequency band can pass through the silicon-based micro-ring.

[0013] Optionally, the narrow-band light enters the silicon-based sensing ring, and the output light frequency of the silicon-based sensing ring shifts with the rotation of the sensing ring, comprising:

[0014] The narrow-band light enters the silicon-based sensing ring, and the light propagates in the optical waveguide of the silicon-based sensing ring; when the silicon-based sensing ring does not rotate, the output light frequency does not change at this time;

[0015] When the silicon-based sensing ring rotates along the plane of the ring, the light will exhibit a relativistic effect during transmission in the ring to produce a Sagnac phase shift, and at this time the narrow-band light frequency shifts; the size of the shift of the output light frequency of the silicon-based sensing ring is judged, and the faster the rotation speed, the greater the shift.

[0016] Optionally, judging the size of the shift of the output light frequency of the silicon-based sensing ring further comprises:

[0017] The carrier rotation angular velocity is demodulated by detecting the shift of the narrow-band light frequency.

[0018] Optionally, demodulating the carrier platform rotation angular velocity comprises:

[0019] The first silicon-based micro-ring is used to change the wide-band light into narrow-band light, and the narrow-band light with an extremely narrow frequency band is demodulated;

[0020] The frequency-shifted narrow-band light is formed after the narrow-band light passes through the rotated silicon-based sensing ring, and then enters the second silicon-based micro-ring.

[0021] Optionally, the modulation circuit is used to apply modulation to the electrodes on the silicon-based micro-ring; the size of the silicon-based micro-ring is finely adjusted to obtain the shift of the resonance channel, and the center frequency of the narrow-band light is biased to the highest sensitivity on one side of the resonance channel, thereby completing the demodulation of the directionality of the carrier platform.

[0022] In another aspect, a method for demodulation based on double silicon-based micro-ring resonance is provided, which is applied to an angular velocity sensing system based on double silicon-based micro-ring resonance demodulation, and the method comprises the following steps:

[0023] S1, driving an on-chip light source by a driving circuit, and emitting broadband light which is coupled into an on-chip silicon-based optical waveguide through an input grating;

[0024] S2, when the light is transmitted to a first optical waveguide of a first silicon-based micro-ring, the light enters the first silicon-based micro-ring in the form of evanescent wave coupling and resonates in the micro-ring; wherein the first optical waveguide is located at the light input side of the first silicon-based micro-ring;

[0025] S3, the light in the resonance frequency band passes through the first silicon-based micro-ring and outputs narrowband light, and the narrowband light enters a second optical waveguide of the first silicon-based micro-ring through evanescent wave coupling; wherein the second optical waveguide is located at the light output side of the first silicon-based micro-ring;

[0026] S4, the narrowband light enters a silicon-based sensing ring through the optical waveguide, and when the silicon-based sensing ring rotates, the output light frequency is offset due to the rotation of the sensing ring;

[0027] S5, after the narrowband light passes through the silicon-based sensing ring, the light enters a second silicon-based micro-ring through evanescent wave coupling, and under the control of an electric field of a modulation circuit, the resonance channel of the silicon-based micro-ring is offset; when the channel matches the signal, resonance demodulation is realized, and an intensity modulation signal is output;

[0028] S6, the light signal output by the second silicon-based micro-ring enters an on-chip detector through an output grating to be converted into an electric signal, and after being processed by a demodulation circuit, an initial angular velocity signal of the angular velocity sensing system is demodulated.

[0029] Optionally, in S2, only the light in the resonance frequency band can pass through the silicon-based micro-ring.

[0030] Optionally, S4 comprises: the narrowband light enters the silicon-based sensing ring, and the light propagates in the optical waveguide of the silicon-based sensing ring; when the silicon-based sensing ring does not rotate, the output light frequency is constant at this time;

[0031] When the silicon-based sensing ring rotates along the plane where the ring is located, the light will exhibit a relativistic effect during transmission in the ring to generate a Sagnac phase shift, and at this time, the narrowband light frequency is offset; the size of the frequency offset of the light output by the silicon-based sensing ring is determined, and the faster the rotation speed, the greater the offset.

[0032] In another aspect, an angular velocity sensing device based on double silicon-based micro-ring resonance demodulation is provided, and the angular velocity sensing device based on double silicon-based micro-ring resonance demodulation comprises:

[0033] a processor, which processes the collected signal to obtain an angular velocity value;

[0034] A memory, the memory stores ARM processor readable instructions and temporarily stores the collected data, when the ARM processor readable instructions are executed by the processor, any one of the above-mentioned angular velocity sensing methods based on double silicon-based micro-ring resonance demodulation is realized.

[0035] In another aspect, an ARM processor readable storage medium is provided, the storage medium stores at least one instruction, the at least one instruction is loaded and executed by the processor to realize any one of the above-mentioned angular velocity sensing methods based on double silicon-based micro-ring resonance demodulation.

[0036] The technical scheme provided by the embodiment of the application has at least the following beneficial effects:

[0037] In the embodiment of the application, through the research of the silicon-based monolithic integrated optical gyroscope in many aspects, it is found that the double silicon-based micro-ring resonance demodulation method can realize high-sensitivity detection of Sagnac frequency shift, thereby realizing angular velocity sensing; the application provides a new solution for realizing a CMOS process compatible high-sensitivity silicon-based monolithic integrated optical gyroscope. The implementation of the application will provide a theoretical basis and technical support for the development of an integrated optical gyroscope with the advantages of high sensitivity, miniaturization, chipization and low cost, further expand its application in more fields, and produce great social application value and economic benefits. BRIEF DESCRIPTION OF DRAWINGS

[0038] In order to more clearly illustrate the technical scheme in the embodiments of the application, the drawings needed in the embodiment description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0039] Figure 1 is a structure diagram of an angular velocity sensing system based on double silicon-based micro-ring resonance demodulation provided by the embodiment of the application;

[0040] Figure 2 is a signal flow chart of a double silicon-based micro-ring resonance demodulation angular velocity sensing system provided by the embodiment of the application;

[0041] Figure 3 is a principle diagram of signal demodulation by channel shift of a silicon-based micro-ring under voltage modulation provided by the embodiment of the application;

[0042] Figure 4 is a flow chart of an angular velocity sensing method based on double silicon-based micro-ring resonance demodulation provided by the embodiment of the application;

[0043] Figure 5 is a structure schematic diagram of an angular velocity sensing device based on double silicon-based micro-ring resonance demodulation provided by the embodiment of the application. DETAILED DESCRIPTION

[0044] The technical solutions in the application will be described below with reference to the drawings.

[0045] To make the technical problems, technical solutions and advantages of the application clearer, specific embodiments will be described in detail below with reference to the drawings.

[0046] The embodiment of the application provides an angular velocity sensing method and system based on double silicon-based micro-ring resonance demodulation. Figure 1 As shown in the structure diagram of the angular velocity sensing system based on double silicon-based micro-ring resonance demodulation, the sensing system of the application comprises:

[0047] a driving circuit 1, an on-chip light source 2, an input grating 3, a first silicon-based micro-ring 4, a silicon-based sensing ring 5, a second silicon-based micro-ring 6, a modulation circuit 7, an output grating 8, an on-chip detector 9 and a demodulation circuit 10.

[0048] The on-chip light source 2 is driven by the driving circuit 1, and broadband light emitted by the on-chip light source 2 is coupled into the on-chip silicon-based optical waveguide through the input grating 3.

[0049] When the light is transmitted to the first optical waveguide of the first silicon-based micro-ring 4, the light enters the first silicon-based micro-ring 4 in the form of evanescent wave coupling and resonates in the micro-ring; wherein the first optical waveguide is located at the light input side of the first silicon-based micro-ring 4.

[0050] The light in the resonance frequency band passes through the first silicon-based micro-ring 4 and outputs narrowband light, and enters the second optical waveguide of the first silicon-based micro-ring 4 through evanescent wave coupling; wherein the second optical waveguide is located at the light output side of the first silicon-based micro-ring 4.

[0051] The narrowband light enters the silicon-based sensing ring 5 through the optical waveguide, and when the silicon-based sensing ring 5 rotates, the output light frequency is offset with the rotation of the sensing ring.

[0052] After the narrowband light passes through the silicon-based sensing ring 5, it enters the second silicon-based micro-ring 6 through evanescent wave coupling, and the resonance channel of the silicon-based micro-ring is offset under the control of the electric field of the modulation circuit 7; when the channel matches the signal, resonance demodulation is realized, and an intensity modulation signal is output.

[0053] The light signal output by the second silicon-based micro-ring 6 enters the on-chip detector 9 through the output grating 8 and is converted into an electric signal, and the electric signal is processed by the demodulation circuit 10 to demodulate an initial angular velocity signal.

[0054] In a feasible implementation, only the light in the resonance frequency band can pass through the first silicon-based micro-ring 4.

[0055] In a feasible implementation, the narrowband light enters the silicon-based sensing ring 5, and the light frequency output by the silicon-based sensing ring 5 changes with the rotation of the silicon-based micro-ring, comprising:

[0056] When the light propagates in the optical waveguide of the silicon-based sensing ring 5, if the platform where the silicon-based sensing ring 5 is located does not rotate, the output light frequency is unchanged; when the sensing ring rotates along the plane where the ring 5 is located, the light exhibits a relativistic effect during the transmission in the ring to generate a Sagnac phase shift, at this time, the narrow-band light frequency is shifted, and the greater the rotation speed, the more the shift.

[0057] In a feasible implementation, judging whether the output light frequency of the silicon-based sensing ring 5 is shifted further includes:

[0058] The carrier rotation angular velocity is demodulated through detection of the shift of the narrow-band light frequency.

[0059] In a feasible implementation, demodulating the carrier rotation angular velocity includes:

[0060] The wide-band light is converted into narrow-band light based on the silicon-based micro-ring, and the narrow-band light with an extremely narrow frequency band is filtered out;

[0061] The frequency-shifted narrow-band light is formed after the narrow-band light passes through the rotated silicon-based micro-ring, and then enters the silicon-based micro-ring.

[0062] In a feasible implementation, the electrode on the silicon-based micro-ring is modulated by the modulation circuit 7; the silicon-based micro-ring size is finely adjusted to obtain the shift of the resonance channel, and then the narrow-band light center frequency is biased to the highest sensitivity position on one side of the resonance channel, so as to complete the demodulation of the carrier platform directionality.

[0063] In the present application, the light frequency in the silicon-based sensing ring 5 is unchanged when the carrier platform does not rotate, but when the rotation occurs, the light in the silicon-based sensing ring 5 will generate a Sagnac frequency shift due to the relativistic effect, and the carrier rotation angular velocity can be demodulated by detecting the frequency shift. In order to realize the demodulation of the small frequency shift, the resonance of two same silicon-based micro-rings is used to realize it, and the signal flow of the double silicon-based micro-ring angular velocity demodulation system provided by the embodiment of the present application is as shown in the figure. Figure 2 The wide-band light is converted into narrow-band light based on the first silicon-based micro-ring 4, because only the light with the same resonance frequency as the micro-ring can pass through, so the narrow-band light with an extremely narrow frequency band can be screened out. The frequency-shifted narrow-band light is formed after the narrow-band light passes through the rotated first silicon-based micro-ring 4, and then enters the second silicon-based micro-ring 6. The first silicon-based micro-ring 4 and the second silicon-based micro-ring 6 have the same resonance channel when there is no frequency shift, at this time, the output light intensity is theoretically maximum, but after the frequency shift, the narrow-band light will shift the resonance channel of the second silicon-based micro-ring 6, at this time, the output light intensity will decrease, and the angular velocity can be demodulated by demodulating the intensity signal.

[0064] In a feasible implementation, asFigure 3 The principle diagram of the silicon-based micro-ring provided by the embodiment of the present application realizes signal demodulation by channel shift under voltage modulation: the modulation circuit 7 applies an electric field to the silicon-based micro-ring through electrodes, changes the center resonant frequency of the resonant channel of the silicon-based micro-ring by changing the deformation of the silicon-based micro-ring, so that the center frequency of the narrow-band light is matched, thereby realizing the demodulation of the angular velocity.

[0065] In a feasible implementation, the rotation of the carrier platform in the clockwise and counterclockwise directions will cause the decrease of the light intensity signal. In order to realize the detection of different directions by the system, the modulation circuit 7 is used to apply modulation to the electrodes on the second silicon-based micro-ring 6, the resonant channel is shifted by fine-tuning the size of the silicon-based micro-ring, and then the center frequency of the narrow-band light is offset to the side of the resonant channel with the highest sensitivity. The modulation of the second silicon-based micro-ring 6 can not only solve the directional demodulation of the carrier platform, but also enable the system to achieve the highest sensitivity.

[0066] In the embodiment of the present application, the above technical features are provided to provide an angular velocity sensing system based on double silicon-based micro-ring resonance demodulation, that is, a monolithic integrated optical gyroscope based on double silicon-based micro-ring resonance demodulation. Through the research on the silicon-based monolithic integrated optical gyroscope in many aspects, it is found that the double silicon-based micro-ring resonance demodulation method can realize high-sensitivity detection of Sagnac frequency shift, thereby realizing angular velocity sensing, which provides a new solution for the realization of a CMOS process compatible high-sensitivity silicon-based monolithic integrated optical gyroscope. The implementation of the present application provides a theoretical basis and technical support for the development of an integrated optical gyroscope with the advantages of high sensitivity, miniaturization, chipization and low cost, further expands its application in more fields, and produces great social application value and economic benefits.

[0067] The embodiment of the present application provides an angular velocity sensing method based on double silicon-based micro-ring resonance demodulation, which is realized by an angular velocity sensing device based on double silicon-based micro-ring resonance demodulation. Figure 4 As shown in the flow chart of the double silicon-based micro-ring resonance demodulation method, the processing flow of the method can include the following steps:

[0068] S1, driving the on-chip light source by the driving circuit, and emitting the broadband light which is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0069] S2, when the light is transmitted to the first optical waveguide of the first silicon-based micro-ring, the light enters the first silicon-based micro-ring in the form of evanescent wave coupling and resonates in the micro-ring; wherein the first optical waveguide is located on the light input side of the first silicon-based micro-ring;

[0070] S3, the light in the resonant frequency band passes through the first silicon-based micro-ring and outputs narrow-band light, and enters the second optical waveguide of the first silicon-based micro-ring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based micro-ring;

[0071] S4, the narrow-band light enters the silicon-based sensing ring through the optical waveguide, and when the silicon-based sensing ring rotates, the output light frequency is offset by the rotation of the sensing ring;

[0072] S5, the narrow-band light enters the second silicon-based micro-ring through evanescent wave coupling after passing through the silicon-based sensing ring, and the resonance channel of the silicon-based micro-ring is offset under the control of the electric field of the modulation circuit; when the channel matches the signal, resonance demodulation is realized, and an intensity modulation signal is output;

[0073] S6, the light signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating to be converted into an electrical signal, and the initial angular velocity signal of the angular velocity sensing system is demodulated after the electrical signal is processed by the demodulation circuit.

[0074] Optionally, in S2, only the light in the resonance frequency band can pass through the first silicon-based micro-ring.

[0075] Optionally, S4 includes: the narrow-band light enters the silicon-based sensing ring, and the light propagates in the optical waveguide of the silicon-based sensing ring; when the silicon-based sensing ring does not rotate, the output light frequency is unchanged at this time.

[0076] When the silicon-based sensing ring rotates along the plane of the ring, the light will exhibit a relativistic effect during transmission in the ring to produce a Sagnac phase shift, and at this time the narrow-band light frequency is offset; the size of the frequency offset of the light output by the silicon-based sensing ring is judged, and the faster the rotation speed, the greater the offset.

[0077] Optionally, judging the size of the frequency offset of the light output by the silicon-based sensing ring further includes:

[0078] The angular velocity of the carrier platform rotation is demodulated by detecting the frequency offset of the narrow-band light.

[0079] Optionally, demodulating the angular velocity of the carrier platform rotation includes:

[0080] The first silicon-based micro-ring is used to convert the wide-band light into narrow-band light, and the narrow-band light with an extremely narrow frequency band is selected;

[0081] The frequency-shifted narrow-band light is formed after the narrow-band light passes through the rotating silicon-based sensing ring, and then enters the second silicon-based micro-ring.

[0082] Optionally, the modulation circuit is used to apply modulation to the electrodes on the silicon-based micro-ring; the size of the silicon-based micro-ring is finely adjusted to obtain the offset of the resonance channel, the center frequency of the narrow-band light is biased to the highest sensitivity position on one side of the resonance channel, and the directionality of the carrier platform is demodulated.

[0083] The present application provides a kind of based on the structure of double silicon-based micro-ring resonance demodulation angular velocity sensing equipment, as shown in Figure 1, based on the double silicon-based micro-ring resonance demodulation angular velocity sensing equipment can include the angular velocity sensing system based on the double silicon-based micro-ring resonance demodulation shown in Figure 2.

[0084] Figure 5 It is an embodiment of the present application to provide a kind of based on the structure of double silicon-based micro-ring resonance demodulation angular velocity sensing equipment, as shown in Figure 1, based on the double silicon-based micro-ring resonance demodulation angular velocity sensing equipment can include the angular velocity sensing system based on the double silicon-based micro-ring resonance demodulation shown in Figure 2. Figure 5 Figure 1

[0085] Optionally, the angular velocity sensing equipment 510 based on the double silicon-based micro-ring resonance demodulation can include the first ARM processor 5001.

[0086] Optionally, the angular velocity sensing equipment 510 based on the double silicon-based micro-ring resonance demodulation can further include memory 5002 and transceiver 5003.

[0087] Wherein, the first ARM processor 5001 is connected with memory 5002 and transceiver 5003, such as can be connected through communication bus.

[0088] The various constituent components of the angular velocity sensing equipment 510 based on the double silicon-based micro-ring resonance demodulation will be specifically introduced as follows: Figure 5

[0089] Wherein, the first ARM processor 5001 is the control center for signal acquisition of the angular velocity sensing equipment 510 based on the double silicon-based micro-ring resonance demodulation.

[0090] Optionally, the first ARM processor 5001 can realize various functions of the angular velocity sensing equipment 510 based on the double silicon-based micro-ring resonance demodulation by running or executing software program stored in memory 5002 and calling voltage control data stored in memory 5002.

[0091] Optionally, memory 5002 is used to store data collected by executing the present application scheme, and the execution of data collection is controlled by the first ARM processor 5001, temporarily stored in memory 5002;Specific implementation can refer to the above method embodiment, and will not be repeated here.

[0092] ​​​Optionally, in a specific implementation, as an embodiment, the angular velocity sensing device 510 based on double silicon-based micro-ring resonance demodulation can also include a plurality of processors, for example Figure 5 the first ARM processor 5001 and the second ARM processor 5004 shown in FIG. 5B.

[0093] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An angular velocity sensing system based on dual silicon-based microring resonant demodulation, characterized in that: include: Driving circuit, on-chip light source, input grating, first silicon-based microring, silicon-based sensing ring, second silicon-based microring, modulation circuit, output grating, on-chip detector, demodulation circuit; The on-chip light source is driven by a driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating; When light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring through evanescent wave coupling and generates resonance in the microring; wherein the first optical waveguide is located on the light input side of the first silicon-based microring; only light in the resonant frequency band can pass through the first silicon-based microring; The light in the resonant frequency band passes through the first silicon-based microring and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based microring; The narrowband light enters the silicon-based sensing ring through the optical waveguide, and when the silicon-based sensing ring rotates, the center frequency of the narrowband light shifts; The narrowband light enters the silicon-based sensing ring through a waveguide, and the frequency of the light output by the silicon-based sensing ring changes with the rotation of the silicon-based microring, specifically including: Narrowband light enters the silicon-based sensor ring and propagates in the optical waveguide of the silicon-based sensor ring. When the silicon-based sensor ring does not rotate, the output light frequency remains unchanged. When the silicon-based sensor ring rotates along the plane in which the ring is located, the light will exhibit a relativistic effect during transmission in the ring, thereby generating a Sagnac phase shift. At this time, the narrowband light frequency will shift. The frequency of the light output by the silicon-based sensor ring is judged to determine whether it has shifted significantly. The faster the rotation speed, the greater the shift. The method further comprises: determining the magnitude of the optical frequency offset output by the silicon-based sensor ring; By detecting the shift in the narrowband optical frequency, the angular velocity of the carrier platform is demodulated; Demodulate the angular velocity of the carrier platform, including: Based on the first silicon-based microring, broadband light is converted into narrowband light, and narrowband light with extremely narrow frequency band is filtered out; After the narrowband light passes through the rotating silicon-based sensing ring, it forms a frequency-shifted narrowband light, which then enters the second silicon-based microring. After passing through the silicon-based sensing ring, the narrowband light enters the second silicon-based microring through evanescent wave coupling. Under the control of the electric field of the modulation circuit, the resonant channel of the silicon-based microring shifts. When the channel matches the signal, resonant demodulation is achieved, and an intensity modulated signal is output. The optical signal output by the second silicon-based microring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain the initial angular velocity signal of the angular velocity sensing system; Modulation is applied to the electrode on the second silicon-based microring through a modulation circuit; the size of the silicon-based microring is fine-tuned to obtain an offset of the resonant channel, and the center frequency of the narrowband light is biased to the highest sensitivity point on one side of the resonant channel, thereby completing the demodulation of the directionality of the carrier platform.

2. An angular velocity sensing method based on dual silicon-based microring resonant demodulation, wherein the angular velocity sensing method based on dual silicon-based microring resonant demodulation is implemented by the angular velocity sensing system based on dual silicon-based microring resonant demodulation as claimed in claim 1, characterized in that: The method comprises: S1, driving the on-chip light source through the driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating; S2. When light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring through evanescent wave coupling and generates resonance in the microring; wherein the first optical waveguide is located on the light input side of the first silicon-based microring; only light in the resonant frequency band can pass through the first silicon-based microring; S3, the light in the resonant frequency band passes through the first silicon-based microring and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based microring; S4. The narrowband light enters the silicon-based sensing ring through the optical waveguide. When the silicon-based sensing ring rotates, the center frequency of the narrowband light shifts. S5, the narrowband light passes through the silicon-based sensing ring and enters the second silicon-based microring through evanescent wave coupling. Under the control of the electric field of the modulation circuit, the resonant channel of the silicon-based microring shifts; when the channel matches the signal, resonant demodulation is achieved, and an intensity modulated signal is output; S6. The optical signal output by the second silicon-based microring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain the initial angular velocity signal of the angular velocity sensing system.

3. An angular velocity sensing device based on dual silicon-based microring resonant demodulation, characterized in that: The device is used in an angular velocity sensing system based on dual silicon-based microring resonant demodulation, comprising: A processor, wherein the processor processes the collected signal to obtain an angular velocity value; A memory storing ARM processor-readable instructions and temporarily storing collected data, wherein the ARM processor-readable instructions, when executed by the processor, implement the method according to claim 2.

4. An ARM processor readable storage medium, characterized in that: The ARM processor can read a storage medium storing program code, and the program code can be called by the processor to execute the method according to claim 2.

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