A semiconductor power module detection fixture

Abstract

The present invention belongs to the field of semiconductor production technology, specifically, a semiconductor power module detection jig, including a placement component, a transfer component is arranged at the axis center of the top of the placement component, and a detection component is arranged on the top of the transfer component; the transfer component includes a supporting bottom shell, the bottom of the inner wall of the supporting bottom shell is fixedly connected to a torque motor, and the outer surface of the output shaft of the torque motor is fixedly connected to a socket rod. When the device is used to detect the semiconductor power module, the detection equipment corresponding to the module can synchronize the module to rotate, thereby ensuring that the placement module, detection module, transfer module and unloading module can be carried out synchronously, thereby effectively improving work efficiency, and when transferring the module, the movement amplitude of the device is small, and the modules need to be placed at intervals, so the rotation speed of the hollow partition shell will not be too large, thereby making the production work safer and avoiding the problem of high-speed moving devices injuring people.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor production, and in particular is a semiconductor power module detection fixture. Background Art

[0002] Semiconductor lasers are also commonly called semiconductor modules. The working principle is that through a certain excitation method, the non-equilibrium carrier population inversion is achieved between the energy bands of semiconductor materials, or between the energy bands of semiconductor materials and the impurity energy levels. When a large number of electrons in the population inversion state recombine with holes, stimulated emission occurs. There are three main excitation methods for semiconductor lasers, namely electrical injection, optical pumping, and high-energy electron beam excitation. The advantages of semiconductor module lasers are small size, light weight, reliable operation, low power consumption, and high efficiency.

[0003] A semiconductor power module inspection fixture with an existing publication number of CN113879760B can load more materials at the same time, realizing continuous processing, thereby greatly improving work efficiency. This assembly line-style transportation and processing is very suitable for inspecting a large number of semiconductor power modules, thereby solving the problem of poor efficiency in manual transfer of semiconductor power modules. However, the loading table of this equipment needs to be frequently flipped, and when flipping, the inspection work cannot be performed through the inspection head above, which causes the actual inspection time to be longer than the scheduled inspection time, so optimization work is still needed. Summary of the invention

[0004] In view of the problem that the detection work cannot be performed by the detection head above when the loading table in the prior art is turned over, the technical solution adopted by the present invention is: a semiconductor power module detection fixture, including a placing component, a transfer component is arranged at the axis center of the top of the placing component, and a detection component is arranged on the top of the transfer component;

[0005] The transfer component comprises a supporting bottom shell, a torque motor is fixedly connected to the bottom of the inner wall of the supporting bottom shell, a sleeve plug rod is fixedly connected to the outer surface of the torque motor output shaft, a rotating chassis is fixedly connected to the lower part of the outer surface of the sleeve plug rod, a hollow partition shell is fixedly connected to the upper surface of the rotating chassis, a rectangular groove is provided on the outer surface of the hollow partition shell to accommodate the module, the outer surface of the hollow partition shell is evenly provided with a wall-attached outer box, and limit push rods are symmetrically provided on both sides of the inner cavity of the wall-attached outer box, the limit push rods and the groove of the hollow partition shell accommodating the module are perpendicular to each other, and the inner wall of the hollow partition shell is evenly provided with sensing components;

[0006] The detection component includes a control turntable, a control rod is fixedly connected to the axis of the inner cavity of the control turntable, detection rods are evenly arranged in the inner cavity of the control turntable through the through-hole, the top of the detection rod is slidably connected to the detection sleeve, the detection rod can slide vertically relative to the detection sleeve and is connected through an internal wire. After the detection rod is docked with the module at the bottom, the detection sleeve at the top can detect the module, and control wheels are evenly arranged on the lower surface of the control turntable. Two control wheels are set in a group and are arranged on both sides of each detection rod.

[0007] Furthermore, the bottom end of the control rotating rod is slidably connected to the inner cavity of the sleeve plug rod, the outer surface of the detection plug rod is slidably connected to the inner cavity of the control rotating disk, the number of the control rotating wheels is twelve, and the middle part of the outer surface of the control rotating wheel is rollingly connected to the outer surface of the detection plug rod. The bottom end of the outer surface of the sleeve plug rod is rotatably connected to the axis of the inner cavity of the supporting bottom shell, the number of the wall-attached outer boxes is six, the outer surface of the wall-attached outer box is fixedly connected to the outer surface of the hollow partition shell, and the end of the limit push rod away from the wall-attached outer box passes through the outer surface of the hollow partition shell through the plug interface.

[0008] Furthermore, the inner cavity of the control dial is uniformly provided with guide grooves, and both sides of the outer surface of the detection rod are fixedly connected with side support plates through the guide grooves, and the end of the side support plate away from the detection rod is symmetrically provided with a compression sleeve, and the end of the compression sleeve away from the side support plate is fixedly connected with the sensing sleeve. The outer surface of the sensing sleeve is fixedly connected to the inner wall of the control dial, and the outer surface of the side support plate is slidably connected to the inner cavity of the control dial through the guide groove, and the end of the compression sleeve away from the sensing sleeve is fixedly connected to the outer surface of the side support plate.

[0009] Furthermore, the placement component includes an internal collar, which is sleeved on the outer surface of the torque motor but does not contact the outer surface of the torque motor, and the inner side of the internal collar is provided with uniformly distributed air jets, such as Figure 6As shown, the left and right sides of the inner cavity of the built-in collar are symmetrically provided with pressurizing pistons through the plug-in tube, and the pressurizing piston is connected to the inside of the built-in collar through the plug-in tube. The bottom of the outer surface of the pressurizing piston is fixedly connected with a side connecting plate, and the end of the side connecting plate away from the pressurizing piston is fixedly connected with a turning force arm, and the upper part of the outer surface of the turning force arm is fixedly connected with a thrust slide bar, and the end of the thrust slide bar away from the turning force arm is fixedly connected with a guide slide plate, and the upper and lower sides of the inner wall of the guide slide plate are symmetrically provided with pressure clamps, and the guide slide plate can pull the pressure clamps on both sides to slide vertically along the slide groove of the inner wall, thereby achieving the effect of clamping the module. The side of the lower surface of the rotating chassis close to the pressurizing piston is evenly provided with pressing convex rods, and the outer surface of the pressing convex rods and the top of the outer surface of the pressurizing piston are pressed against each other, the outer surface of the built-in collar is fixedly connected to the inner wall of the supporting bottom shell, and the side of the side connecting plate away from the turning force arm is fixedly connected to the outer surface of the supporting bottom shell.

[0010] Furthermore, the induction component includes an insulating inner shell, the front of the insulating inner shell is symmetrically fixed with an embedded plug rod, the middle of the inner cavity of the insulating inner shell is slidably connected with a pressing inner rod, the end of the pressing inner rod away from the embedded plug rod is fixedly connected with a spring washer, the end of the spring washer away from the pressing inner rod is fixedly connected with an independent pressure plate, and the back of the outer surface of the independent pressure plate is fixedly connected with an external wire. The front of the insulating inner shell is plugged into the inner cavity of the hollow partition shell through the embedded plug rod, the end of the pressing inner rod away from the spring washer extends to the outside of the hollow partition shell through the through hole, the outer surface of the independent pressure plate is fixedly connected to the inner cavity of the insulating inner shell, and the end of the external wire away from the independent pressure plate is fixedly connected to the inner cavity of the sleeve plug rod.

[0011] The beneficial effects of the present invention are as follows:

[0012] 1. When the device is used to detect semiconductor power modules, the detection equipment corresponding to the module can synchronize the module to rotate, thereby ensuring that the work of placing the module, detecting the module, transferring the module and unloading the module can be carried out synchronously, thereby effectively improving work efficiency. When transferring the module, the movement amplitude of the device is small, and the modules need to be placed at intervals, so the rotation speed of the hollow partition shell will not be too large, thereby making production work safer and avoiding the problem of high-speed moving devices injuring people.

[0013] 2. The detection component above is docked with the module below through the detection rod, and the detection sleeve is used to perform module detection. Since there will never be a module placed in the accommodating groove area on the back of the hollow partition shell when it rotates, the detection rod will shrink to its original position when rotating through the back area and will not work, providing the detection sleeve with rest time, so that the actual working time of the detection sleeve is extended during the continuous operation of the device, so that the device can work continuously for a longer time and the endurance will be stronger.

[0014] 3. When the detection rod slides up and down, since the height change of the detection rod is proportional to the pressure change of the sensing sleeve during normal operation, when the bottom end of the detection rod is docked with the module, the pressure indication of the sensing sleeve is normal. If the detection rod does not contact the module, the pressure indication of the sensing sleeve will not meet the standard. At this time, it is necessary to control the detection rod to continue to slide down by controlling the wheel to ensure that the detection rod is successfully docked with the module, avoid the problem that the detection rod slides down too short, resulting in the inability to detect and judge module faults normally, and also avoid the problem that the detection rod continues to press down the module and cause damage to the module.

[0015] 4. When the module is placed in the receiving groove of the hollow partition shell, the internal pressing inner rod will definitely be in a pressed state, thereby triggering the independent pressure plate. Through the pressed independent pressure plate, the detection component above can control the detection rod at the corresponding position to perform detection work according to the point where work is required. Since the module is squeezed and limited by the limiting push rod and the pressing inner rod at this time, the module is more stable inside the receiving groove, preventing the module from sliding relative to the inner wall of the hollow partition shell due to centrifugal force during rotation and transportation and then colliding with the inner wall. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a front view of the present invention;

[0017] Figure 2 is a cross-sectional view of the present invention;

[0018] Figure 3 is a cross-sectional view of a transfer component of the present invention;

[0019] Figure 4 is a cross-sectional view of the detection component of the present invention;

[0020] Figure 5 The present invention Figure 4 The enlarged view of point A in the middle;

[0021] Figure 6 It is a schematic structural diagram of the transfer component of the present invention;

[0022] Figure 7 It is a cross-sectional view of the inductive component of the present invention.

[0023] In the figure: 1. placement component; 2. transfer component; 3. detection component; 4. induction component; 21. support bottom shell; 22. torque motor; 23. sleeve plug rod; 24. hollow partition shell; 25. rotating chassis; 26. pressing convex rod; 27. wall-mounted outer box; 28. limit push rod; 31. control turntable; 32. control turn rod; 33. control turn wheel; 34. detection sleeve; 35. detection plug rod; 36. guide groove; 37. side support plate; 38. compression sleeve; 39. induction sleeve; 11. built-in collar; 12. pressurizing piston; 13. side connecting plate; 14. rotating force arm; 15. thrust slide rod; 16. guide slide plate; 17. pressure clamp; 41. insulating inner shell; 42. embedded plug rod; 43. pressing inner rod; 44. spring washer; 45. independent pressure plate; 46. external wire. DETAILED DESCRIPTION

[0024] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0025] Example 1, please refer to Figure 1-Figure 4 The present invention provides a technical solution: a semiconductor power module detection fixture, comprising a placement component 1, a transfer component 2 is arranged at the axis center of the top of the placement component 1, and a detection component 3 is arranged on the top of the transfer component 2;

[0026] The transfer component 2 includes a supporting bottom shell 21, a torque motor 22 is fixedly connected to the bottom of the inner wall of the supporting bottom shell 21, a sleeve plug rod 23 is fixedly connected to the outer surface of the output shaft of the torque motor 22, a rotating chassis 25 is fixedly connected to the lower part of the outer surface of the sleeve plug rod 23, a hollow partition shell 24 is fixedly connected to the upper surface of the rotating chassis 25, a rectangular groove is opened on the outer surface of the hollow partition shell 24 to accommodate the module, the outer surface of the hollow partition shell 24 is evenly provided with a wall-attached outer box 27, and limit push rods 28 are symmetrically arranged on both sides of the inner cavity of the wall-attached outer box 27, the limit push rods 28 and the groove of the hollow partition shell 24 for accommodating the module are perpendicular to each other, and the inner wall of the hollow partition shell 24 is evenly provided with a sensing component 4;

[0027] The detection component 3 includes a control turntable 31, a control rod 32 is fixedly connected to the axis of the inner cavity of the control turntable 31, and detection rods 35 are evenly arranged in the inner cavity of the control turntable 31 through the through-hole. The top of the detection rod 35 is slidably connected to the detection sleeve 34. The detection rod 35 can slide vertically relative to the detection sleeve 34 and is connected through an internal wire. After the detection rod 35 is docked with the module at the bottom, the detection sleeve 34 at the top can detect the module. Control wheels 33 are evenly arranged on the lower surface of the control turntable 31. Two control wheels 33 are arranged in a group on both sides of each detection rod 35.

[0028] The bottom end of the control rotating rod 32 is slidably connected to the inner cavity of the sleeve plug rod 23, the outer surface of the detection plug rod 35 is slidably connected to the inner cavity of the control rotating disk 31, the number of the control wheels 33 is twelve, and the middle of the outer surface of the control wheel 33 is rollingly connected to the outer surface of the detection plug rod 35. The bottom end of the outer surface of the sleeve plug rod 23 is rotatably connected to the axis of the inner cavity of the supporting bottom shell 21, the number of the wall-attached outer boxes 27 is six, the outer surface of the wall-attached outer boxes 27 is fixedly connected to the outer surface of the hollow partition shell 24, and the end of the limit push rod 28 away from the wall-attached outer box 27 passes through the outer surface of the hollow partition shell 24 through the plug interface.

[0029] The device is used to inspect the modules. The module on the transport line is clamped into the receiving groove on the left side of the hollow partition shell 24 by placing the left side of the component 1. Then, the wall-attached outer box 27 on both sides of the receiving groove seals the module inside the hollow partition shell 24 by pushing and pressing the protruding rod 26 to ensure the stability of the module.

[0030] After the module is placed, the upper detection component 3 lowers the detection rod 35 at the corresponding position according to the position of the module, that is, the control wheels 33 on both sides drive the detection rod 35 to slide down by rotational friction. At this time, the bottom end of the detection rod 35 is docked with the upper surface of the module, and the detection sleeve 34 performs module detection on the module through the detection rod 35.

[0031] During the module detection process, the hollow partition shell 24 and the rotating chassis 25 rotate counterclockwise under the torsional action of the socket rod 23, and the receiving slot facing the left side is switched in sequence to perform the above-mentioned module placement work. The placed module moves synchronously with the rotation of the rotating chassis 25, and the detection component 3 also rotates synchronously with the rotation of the socket rod 23, ensuring that the module and the corresponding detection rod 35 are deflected synchronously. When the module moves to the position facing the right side, the module reaches the transfer point, and the module testing work is also completed. At this time, the detection rod 35 is lifted up and separated from the module, and the module inside the receiving slot on the right side of the hollow partition shell 24 is taken out through the right clamping portion of the placement component 1 for transfer work.

[0032] Example 2, please refer to Figure 1-Figure 7 The present invention provides a technical solution: on the basis of Example 1, the inner cavity of the control dial 31 is uniformly provided with guide grooves 36, and the two sides of the outer surface of the detection rod 35 are fixedly connected with side support plates 37 through the guide grooves 36, and the end of the side support plate 37 away from the detection rod 35 is symmetrically provided with a compression sleeve 38, and the end of the compression sleeve 38 away from the side support plate 37 is fixedly connected with a sensing sleeve 39. The outer surface of the sensing sleeve 39 is fixedly connected to the inner wall of the control dial 31, and the outer surface of the side support plate 37 is slidably connected to the inner cavity of the control dial 31 through the guide grooves 36, and the end of the compression sleeve 38 away from the sensing sleeve 39 is fixedly connected to the outer surface of the side support plate 37.

[0033] The placement component 1 includes an internal sleeve 11, which is sleeved on the outer surface of the torque motor 22 but does not contact the outer surface of the torque motor 22, and the inner side of the internal sleeve 11 is provided with uniformly distributed air jets, such as Figure 6 As shown, pressurizing pistons 12 are symmetrically arranged on the left and right sides of the inner cavity of the built-in collar 11 through the plug-in tube, and the pressurizing piston 12 is connected to the interior of the built-in collar 11 through the plug-in tube. The bottom of the outer surface of the pressurizing piston 12 is fixedly connected with a side connecting plate 13, and the end of the side connecting plate 13 away from the pressurizing piston 12 is fixedly connected with a rotating force arm 14, and the upper part of the outer surface of the rotating force arm 14 is fixedly connected with a thrust slide bar 15, and the end of the thrust slide bar 15 away from the rotating force arm 14 is fixedly connected with a guide slide plate 16, and pressure clamps 17 are symmetrically arranged on the upper and lower sides of the inner wall of the guide slide plate 16. The guide slide plate 16 can pull the pressure clamps 17 on both sides to slide vertically along the slide groove of the inner wall, thereby achieving the effect of clamping the module. Pressing protrusions 26 are evenly arranged on the side of the lower surface of the rotating chassis 25 close to the pressurizing piston 12, and the outer surface of the pressing protrusions 26 and the top of the outer surface of the pressurizing piston 12 are pressed against each other, the outer surface of the built-in ring 11 is fixedly connected to the inner wall of the supporting bottom shell 21, and the side connecting plate 13 is fixedly connected to the outer surface of the supporting bottom shell 21 on the side away from the rotating force arm 14.

[0034] The induction component 4 includes an insulating inner shell 41, and an embedded plug rod 42 is symmetrically fixed on the front of the insulating inner shell 41. A pressing inner rod 43 is slidably connected to the middle of the inner cavity of the insulating inner shell 41. A spring washer 44 is fixedly connected to the end of the pressing inner rod 43 away from the embedded plug rod 42. An independent pressing plate 45 is fixedly connected to the end of the spring washer 44 away from the pressing inner rod 43. An external wire 46 is fixedly connected to the back of the outer surface of the independent pressing plate 45. The front of the insulating inner shell 41 is plugged into the inner cavity of the hollow partition shell 24 through the embedded plug rod 42, and the end of the pressing inner rod 43 away from the spring washer 44 extends to the outside of the hollow partition shell 24 through the through-hole. The outer surface of the independent pressing plate 45 is fixedly connected to the inner cavity of the insulating inner shell 41, and the end of the external wire 46 away from the independent pressing plate 45 is fixedly connected to the inner cavity of the sleeve plug rod 23.

[0035] When the detection rod 35 slides up and down, the side support plates 37 on both sides of the rod body will slide synchronously along the guide grooves 36, thereby driving the compression sleeves 38 on the upper and lower sides to perform compression or tension movements, causing pressure changes in the sensing sleeve 39. The height change of the detection rod 35 is proportional to the pressure change on the sensing sleeve 39 during normal operation. Therefore, when the bottom end of the detection rod 35 is docked with the module, the pressure indication of the sensing sleeve 39 is normal. If the detection rod 35 does not contact the module, the pressure indication of the sensing sleeve 39 will not meet the standard. At this time, it is necessary to control the detection rod 35 to continue to slide down by controlling the rotating wheel 33 to ensure that the detection rod 35 is successfully docked with the module.

[0036] The rotating force arms 14 on both sides can drive the pressure clamping plate 17 to deflect by twisting the thrust slide bar 15, and adjust the position of the clamping claws by the telescopic function of the thrust slide bar 15 to achieve the effect of clamping the module. When the rotating chassis 25 is rotating and transporting, the pressing protrusions 26 on its lower surface will continuously press the pressurizing pistons 12 on both sides, and then the pressurizing pistons 12 will separate from the pressing protrusions 26 and rebound upward to reset. When the pressurizing piston 12 is pressed, the interior of the built-in collar 11 will be pressurized and sprayed with air, so that the built-in collar 11 continuously sprays air to cool the inner torque motor 22, thereby cooling the torque motor 22.

[0037] When the module is placed in the receiving groove of the hollow partition shell 24, the outer surface of the module will press the protruding pressing inner rod 43. When the clamp leaves the inner wall of the receiving groove, the limiting push rods 28 on both sides have replaced the clamp to block and fix the module. Therefore, in the receiving groove where the module is placed, the internal pressing inner rod 43 will definitely be in a pressed state, thereby triggering the independent pressure plate 45. Through the pressed independent pressure plate 45, the detection component 3 above can control the detection rod 35 at the corresponding position to perform detection work according to the working point required. Since the module is squeezed and limited by the limiting push rod 28 and the pressing inner rod 43 at this time, the module is also more stable inside the receiving groove.

[0038] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A semiconductor power module detection fixture, comprising a placement component (1), a transfer component (2) is arranged at the axis center of the top of the placement component (1), and a detection component (3) is arranged on the top of the transfer component (2), characterized in that: The transfer component (2) comprises a supporting bottom shell (21), the bottom of the inner wall of the supporting bottom shell (21) is fixedly connected to a torque motor (22), the outer surface of the output shaft of the torque motor (22) is fixedly connected to a sleeve plug rod (23), the lower part of the outer surface of the sleeve plug rod (23) is fixedly connected to a rotating chassis (25), the upper surface of the rotating chassis (25) is fixedly connected to a hollow partition shell (24), the outer surface of the hollow partition shell (24) is evenly provided with a wall-attached outer box (27), the two sides of the inner cavity of the wall-attached outer box (27) are symmetrically provided with limit push rods (28), and the inner wall of the hollow partition shell (24) is evenly provided with a sensing component (4); The detection component (3) comprises a control turntable (31), a control rod (32) is fixedly connected to the axis of the inner cavity of the control turntable (31), the inner cavity of the control turntable (31) is evenly provided with detection rods (35) through the through opening, the top end of the detection rod (35) is slidably connected to the detection sleeve (34), and the lower surface of the control turntable (31) is evenly provided with control wheels (33).

2. The semiconductor power module detection fixture according to claim 1, characterized in that: The bottom end of the control rotating rod (32) is slidably connected to the inner cavity of the sleeve plug rod (23), the outer surface of the detection plug rod (35) is slidably connected to the inner cavity of the control rotating disk (31), the number of the control rotating wheels (33) is twelve, and the middle part of the outer surface of the control rotating wheel (33) is rollingly connected to the outer surface of the detection plug rod (35).

3. The semiconductor power module detection fixture according to claim 2, characterized in that: The bottom end of the outer surface of the sleeve plug rod (23) is rotatably connected to the axis of the inner cavity of the supporting bottom shell (21), the number of the wall-adhering outer boxes (27) is six, the outer surface of the wall-adhering outer boxes (27) is fixedly connected to the outer surface of the hollow partition shell (24), and the end of the limit push rod (28) away from the wall-adhering outer box (27) passes through the outer surface of the hollow partition shell (24) through the plug interface.

4. The semiconductor power module detection fixture according to claim 1, characterized in that: The inner cavity of the control dial (31) is evenly provided with guide grooves (36), and both sides of the outer surface of the detection rod (35) are fixedly connected to side support plates (37) through the guide grooves (36), and compression sleeves (38) are symmetrically arranged at one end of the side support plate (37) away from the detection rod (35), and the end of the compression sleeve (38) away from the side support plate (37) is fixedly connected to the induction sleeve (39).

5. The semiconductor power module detection fixture according to claim 4, characterized in that: The outer surface of the sensing sleeve (39) is fixedly connected to the inner wall of the control turntable (31), the outer surface of the side support plate (37) is slidably connected to the inner cavity of the control turntable (31) via the guide groove (36), and the end of the compression sleeve (38) away from the sensing sleeve (39) is fixedly connected to the outer surface of the side support plate (37).

6. The semiconductor power module detection fixture according to claim 1, characterized in that: The placement component (1) comprises a built-in collar (11), and a pressurizing piston (12) is symmetrically arranged on the left and right sides of the inner cavity of the built-in collar (11) through a plug-in tube, and the bottom of the outer surface of the pressurizing piston (12) is fixedly connected to a side connecting plate (13), and the end of the side connecting plate (13) away from the pressurizing piston (12) is fixedly connected to a rotating force arm (14), and the upper part of the outer surface of the rotating force arm (14) is fixedly connected to a thrust slide bar (15), and the end of the thrust slide bar (15) away from the rotating force arm (14) is fixedly connected to a guide slide plate (16), and pressure clamps (17) are symmetrically arranged on the upper and lower sides of the inner wall of the guide slide plate (16).

7. The semiconductor power module detection fixture according to claim 6, characterized in that: A pressing protrusion (26) is evenly arranged on the side of the lower surface of the rotating chassis (25) close to the pressurizing piston (12), and the outer surface of the pressing protrusion (26) and the top of the outer surface of the pressurizing piston (12) are pressed against each other, the outer surface of the built-in collar (11) is fixedly connected to the inner wall of the supporting bottom shell (21), and the side of the side connecting plate (13) away from the rotating force arm (14) is fixedly connected to the outer surface of the supporting bottom shell (21).

8. The semiconductor power module detection fixture according to claim 1, characterized in that: The induction component (4) comprises an insulating inner shell (41), an embedded rod (42) is symmetrically fixed on the front side of the insulating inner shell (41), a pressing inner rod (43) is slidably connected to the middle of the inner cavity of the insulating inner shell (41), an end of the pressing inner rod (43) away from the embedded rod (42) is fixedly connected to a spring washer (44), an end of the spring washer (44) away from the pressing inner rod (43) is fixedly connected to an independent pressure plate (45), and the back of the outer surface of the independent pressure plate (45) is fixedly connected to an external wire (46).

9. The semiconductor power module detection fixture according to claim 8, characterized in that: The front side of the insulating inner shell (41) is plugged into the inner cavity of the hollow partition shell (24) via an embedded plug rod (42); one end of the pressing inner rod (43) away from the spring washer (44) extends to the outside of the hollow partition shell (24) through a through opening; the outer surface of the independent pressure plate (45) is fixedly connected to the inner cavity of the insulating inner shell (41); and one end of the external connecting wire (46) away from the independent pressure plate (45) is fixedly connected to the inner cavity of the sleeve plug rod (23).

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