Patterning regulation and control device and method for azimuth angle and pretilt angle of liquid crystal

By using lasers and optical components to regulate the azimuth angle and pretilt angle of liquid crystal molecules, and patterned exposure is achieved in combination with the movement of the displacement stage, the problem of difficulty in controlling the angle of liquid crystal molecules at the same time in the prior art is solved, and the preparation of liquid crystal thin films with complex patterned amplitude modulation function is realized.

CN119781212APending Publication Date: 2025-04-08CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACAD OF SCI +1
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Patent Information

Application Number
CN202411892440.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-20
Publication Date
2025-04-08

AI Technical Summary

Technical Problem

The prior art is difficult to simultaneously regulate the azimuth angle and pretilt angle of liquid crystal molecules, and it is impossible to prepare a liquid crystal film with complex patterned amplitude regulation function.

Method used

The device including a laser, shutter, polarization modulator, galvanometer and focus objective lens is adopted to control the on-off, polarization direction and irradiation angle of the laser, and to control the azimuth angle and pretilt angle of the liquid crystal molecules, and to move the liquid crystal film using a displacement stage to achieve patterned exposure and writing.

Benefits of technology

Simultaneous control of the azimuth angle and pretilt angle of the liquid crystal film is achieved, and a liquid crystal film with complex patterned amplitude modulation function is prepared.

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Abstract

The invention discloses a liquid crystal azimuth angle and pretilt angle patterning regulation and control device and method, and belongs to the field of liquid crystal thin film processing, a laser is used for generating laser, a displacement table is used for bearing a liquid crystal thin film and driving the liquid crystal thin film to move, and the laser, a shutter, a polarization modulator, a galvanometer and a focusing objective lens are sequentially arranged in the light path direction; the shutter controls on-off of laser, the polarization modulator regulates the polarization direction of the laser so as to regulate the azimuth angle of liquid crystal molecules, the position of the laser at the entrance pupil position of the focusing objective lens is regulated by changing the deflection angle of a lens of the galvanometer, the irradiation angle of a focusing light beam is further regulated, and therefore the pretilt angle of the liquid crystal molecules is regulated. The displacement table drives the liquid crystal film to move to change an exposure area of the liquid crystal film, so that azimuth angles and pretilt angles of a plurality of liquid crystal molecules of the liquid crystal film are written, and the liquid crystal film with a complex amplitude modulation function is prepared.
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Description

Technical Field

[0001] The present invention relates to the field of liquid crystal film processing, and in particular to a patterning control device and method for liquid crystal azimuth angle and pretilt angle. Background Art

[0002] Laser exposure of liquid crystal polymers can adjust the pointing vector of liquid crystal molecules, thereby achieving optical complex amplitude modulation. Complex amplitude modulation includes phase modulation and amplitude modulation. Adjusting the azimuth angle of liquid crystal molecules can adjust the geometric phase of orthogonal circular polarization to achieve phase modulation. Adjusting the pretilt angle of liquid crystal molecules can adjust the equivalent refractive index of the liquid crystal layer, thereby changing the output intensity of orthogonal circular polarization to achieve amplitude modulation.

[0003] Existing methods for manufacturing photo-oriented liquid crystal films include: a liquid crystal azimuth angle control method based on polarization interference and a liquid crystal pre-tilt angle control method based on inclined light beam irradiation. On the one hand, the liquid crystal azimuth angle control method based on polarization interference uses the linear relationship between the polarization direction of the interference light field and the phase of the reference light to achieve the control of the azimuth angle of the liquid crystal molecules. On the other hand, the liquid crystal pre-tilt angle control method based on inclined light beam irradiation uses a two-step exposure method to complete the in-plane orientation of the liquid crystal film using inclined light beam irradiation to prepare a liquid crystal film with a pre-tilt angle.

[0004] The liquid crystal azimuth angle control method based on polarization interference can only process periodic structures, and it is difficult to achieve complex patterned liquid crystal azimuth angle control. The liquid crystal pre-tilt angle control method based on inclined beam irradiation uses parallel light sources with uniform energy distribution for exposure, which is difficult to achieve pixelated liquid crystal pre-tilt angle control. The existing methods are also difficult to control the azimuth angle and pre-tilt angle at the same time, so it is still impossible to prepare liquid crystal films with complex patterned amplitude control functions. Summary of the invention

[0005] In order to overcome the shortcomings of the prior art, one of the objectives of the present invention is to provide a device capable of simultaneously regulating the azimuth angle and the pretilt angle to prepare a liquid crystal film with a complex patterned amplitude regulation function.

[0006] In order to overcome the shortcomings of the prior art, a second object of the present invention is to provide a method for preparing a liquid crystal film with a complex patterned amplitude control function by simultaneously controlling the azimuth angle and the pretilt angle.

[0007] One of the purposes of the present invention is achieved by the following technical solution:

[0008] A patterned control device for liquid crystal azimuth and pre-tilt angle comprises a laser and a displacement stage, wherein the laser is used to generate laser light, the displacement stage is used to carry a liquid crystal film and drive the liquid crystal film to move, the patterned control device for liquid crystal azimuth and pre-tilt angle further comprises a shutter, a polarization modulator, a galvanometer and a focusing objective lens, wherein the laser, the shutter, the polarization modulator, the galvanometer and the focusing objective lens are sequentially arranged along the optical path direction, the shutter controls the on and off of the laser light, the polarization modulator controls the polarization direction of the laser light, thereby controlling the azimuth angle of the liquid crystal molecules, the position of the laser light at the entrance pupil of the focusing objective lens is adjusted by changing the lens deflection angle of the galvanometer, the irradiation angle of the focused light beam is adjusted, thereby controlling the pre-tilt angle of the liquid crystal molecules, the displacement stage drives the liquid crystal film to move and changes the exposure area of ​​the liquid crystal film, thereby writing the azimuth angle and pre-tilt angle of a plurality of liquid crystal molecules of the liquid crystal film, and preparing a liquid crystal film with a complex amplitude modulation function.

[0009] Furthermore, the patterned control device for the azimuth angle and pretilt angle of the liquid crystal further comprises a depolarizer, wherein the depolarizer is located between the polarization modulator and the galvanometer, and the depolarizer reduces the polarization degree of the focused light beam.

[0010] Furthermore, the patterning control device for the azimuth angle and pretilt angle of the liquid crystal further comprises a focusing lens, wherein the focusing lens is located between the depolarizer and the galvanometer, and the focusing lens focuses the laser.

[0011] Furthermore, the patterned control device for the azimuth angle and pre-tilt angle of the liquid crystal further comprises a relay mirror, wherein the relay mirror is located between the galvanometer mirror and the focusing objective lens, and the relay mirror adjusts the angle of the laser.

[0012] Furthermore, the patterned control device for the liquid crystal azimuth angle and pretilt angle also includes a control system, which includes a control computer, a control card and a translation stage controller, the control computer is communicatively connected with the control card and the translation stage controller, the control computer synchronously controls the control card and the translation stage controller, the control card synchronously controls the shutter, the polarization modulator and the galvanometer, and the translation stage controller controls the movement of the translation stage.

[0013] Furthermore, the control card controls the shutter to control the on and off of the laser, and the laser on and off response time is less than or equal to 1 μs.

[0014] Furthermore, the control card controls the polarization modulator to adjust the polarization direction of the laser, and the adjustment frequency is greater than or equal to 1 kHz.

[0015] Furthermore, the control card controls the galvanometer to adjust the irradiation angle of the focused light beam, and the response time is less than 500 μs.

[0016] The second object of the present invention is achieved by adopting the following technical solution:

[0017] A method for patterning the azimuth angle and pretilt angle of a liquid crystal is implemented by any of the above-mentioned patterning control devices for the azimuth angle and pretilt angle of a liquid crystal, and comprises the following steps:

[0018] Azimuth angle control: The laser emits laser light, and the shutter controls the on and off of the laser light. The laser light passes through the polarization modulator to quickly adjust the polarization direction, and then passes through the galvanometer and focusing lens to irradiate the surface of the liquid crystal film. By changing the polarization direction of the focused beam, the azimuth angle of the liquid crystal molecules is adjusted.

[0019] Pre-tilt angle control: The laser emits laser light, and the shutter controls the on-off of the laser light. The laser light passes through the galvanometer, and by changing the lens deflection angle of the galvanometer, the position of the light beam at the entrance pupil of the focusing lens is changed, thereby adjusting the irradiation angle of the focused light beam, and then adjusting the pre-tilt angle of the liquid crystal molecules;

[0020] Large-area writing: After the azimuth angle and pre-tilt angle of the liquid crystal molecules are adjusted, exposure of one pixel is achieved. The translation stage drives the liquid crystal film to move, changes the exposure area of ​​the liquid crystal film, and re-performs the azimuth angle adjustment and pre-tilt angle adjustment steps until all the exposure areas of the liquid crystal film are exposed.

[0021] Furthermore, in the large-area writing step, the displacement stage drives the liquid crystal film to move, and when the exposure area of ​​the liquid crystal film is changed, specifically: the displacement stage moves to the specified X, Y, and Z coordinates to expose adjacent pixels.

[0022] Compared with the prior art, the laser of the patterned control device for the azimuth angle and pretilt angle of the liquid crystal of the present invention is used to generate laser light, the displacement stage is used to carry the liquid crystal film and drive the liquid crystal film to move, the patterned control device for the azimuth angle and pretilt angle of the liquid crystal also includes a shutter, a polarization modulator, a galvanometer and a focusing objective lens, along the direction of the optical path, the laser, the shutter, the polarization modulator, the galvanometer and the focusing objective lens are arranged in sequence, the shutter controls the on and off of the laser, the polarization modulator controls the polarization direction of the laser, thereby controlling the azimuth angle of the liquid crystal molecules, the position of the laser at the entrance pupil of the focusing objective lens is adjusted by changing the lens deflection angle of the galvanometer, the irradiation angle of the focused light beam is adjusted, thereby controlling the pretilt angle of the liquid crystal molecules, the displacement stage drives the liquid crystal film to move and change the exposure area of ​​the liquid crystal film, so that the azimuth angle and pretilt angle of multiple liquid crystal molecules of the liquid crystal film are written, and a liquid crystal film with a complex amplitude modulation function is prepared. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1The optical path diagram of the patterned control device for the azimuth angle and pre-tilt angle of liquid crystal of the present invention;

[0024] Figure 2 for Figure 1 A control system framework diagram of a patterned control device for controlling the azimuth angle and pre-tilt angle of a liquid crystal;

[0025] Figure 3 The present invention is a flow chart of the patterned control method of the liquid crystal azimuth angle and pretilt angle.

[0026] In the figure: 101, laser; 102, laser; 103, shutter; 104, polarization modulator; 105, depolarizer; 106, focusing lens; 107, galvanometer; 108, relay lens; 109, focusing objective lens; 110, focused light beam; 111, liquid crystal molecules; 112, pretilt angle; 113, azimuth angle; 114, translation stage; 201, control computer; 202, control card; 203, translation stage controller. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may be another intermediate component through which it is fixed. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be another intermediate component at the same time. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be another intermediate component at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0030] See also Figure 1The present invention provides a patterned control device for the azimuth angle and pretilt angle of liquid crystal, comprising a laser 101, a shutter 103, a polarization modulator 104, a depolarizer 105, a focusing lens 106, a galvanometer 107, a relay lens 108, a focusing objective lens 109, a translation stage 114 and a control system. Along the optical path direction, the laser 101, the shutter 103, the polarization modulator 104, the depolarizer 105, the focusing lens 106, the galvanometer 107, the relay lens 108, the focusing objective lens 109 and the translation stage 114 are arranged in sequence. In the specific structure, the laser 101, the shutter 103, the polarization modulator 104, the depolarizer 105, the focusing lens 106 and the galvanometer 107 are located on a straight line, and the galvanometer 107, the relay lens 108, the focusing objective lens 109 and the translation stage 114 are located on another straight line. The straight line where the laser 101, the shutter 103, the polarization modulator 104, the depolarizer 105, the focusing lens 106 and the galvanometer 107 are located is perpendicular to the straight line where the galvanometer 107, the relay lens 108, the focusing objective lens 109 and the translation stage 114 are located.

[0031] The laser 101 is used to generate laser light 102 .

[0032] The shutter 103 controls the on and off of the laser beam 102 .

[0033] The polarization modulator 104 realizes rapid regulation of the polarization direction.

[0034] The depolarizer 105 converts the laser light 102 from polarized light to non-polarized light.

[0035] The focusing lens 106 focuses the laser light 102 to a micrometer level.

[0036] The galvanometer 107 changes the position of the light beam at the entrance pupil of the focusing objective lens 109 by changing the lens deflection angle, thereby adjusting the irradiation angle 112 of the focused light beam 110 and regulating the pre-tilt angle 112 of the liquid crystal molecules 111 .

[0037] The relay lens 108 changes the angle of the laser light 102 .

[0038] The focusing objective lens 109 focuses the laser light 102 to form a focused light beam 110 .

[0039] The displacement stage 114 is used to place the liquid crystal film and drive the liquid crystal film to designated X, Y, and Z coordinates to form pixel exposure.

[0040] Please continue reading Figure 2The control system includes a control computer 201, a control card 202 and a stage controller 203, and the control computer 201 is in communication with the control card 202 and the stage controller 114. The control computer 201 synchronously controls the control card 202 and the stage controller 114, the control card 202 synchronously controls the shutter 103, the polarization modulator 104 and the galvanometer 107, and the stage controller 114 controls the movement of the stage 114.

[0041] The control card 202 controls the shutter 103 to control the on and off of the laser 102, and the on and off response time of the laser 102 is less than or equal to 1μs. The control card 202 controls the polarization modulator 104 to adjust the polarization direction of the laser 102, and the adjustment frequency is greater than or equal to 1kHz. The control card 202 controls the galvanometer 107 to adjust the irradiation angle of the focused beam 110, and the response time is less than 500μs.

[0042] When using a patterned control device for liquid crystal azimuth angle and pre-tilt angle:

[0043] The process of adjusting the azimuth angle of the liquid crystal is as follows: first, the laser 101 emits the laser 102, and the shutter 103 controls the on and off of the laser 102; then, the laser 102 passes through the polarization modulator 104 to achieve rapid adjustment of the polarization direction; then, the laser 102 passes through the focusing lens 106 and is focused on the galvanometer 107; finally, the laser 102 passes through the relay lens 108 and the focusing objective lens 109, and is irradiated on the surface of the liquid crystal film, and the azimuth angle 113 of the liquid crystal molecules 111 is adjusted by changing the polarization direction of the focused light beam 110.

[0044] The process of adjusting the pretilt angle of the liquid crystal is as follows: first, the laser 101 emits the laser 102, and the shutter 103 controls the on and off of the laser 102; then, the laser 102 passes through the depolarizer 105 to reduce the polarization degree; then, the laser 102 passes through the focusing lens 106 and is focused on the galvanometer 107; finally, the laser 102 passes through the relay lens 108 and the focusing lens 109 and is irradiated on the surface of the liquid crystal film. By changing the lens deflection angle of the galvanometer 107, the position of the light beam at the entrance pupil of the focusing lens 109 is changed, and the irradiation angle 112 of the focused light beam 110 is adjusted to adjust the pretilt angle 112 of the liquid crystal molecule 111. After completing the exposure of one pixel, the exposure area of ​​the liquid crystal film is changed by using the displacement stage 114, and the azimuth angle and pretilt angle of the liquid crystal are written in a large area to prepare a liquid crystal film with complex amplitude modulation function.

[0045] Please continue reading Figure 3 The present application also discloses a method for patterning the liquid crystal azimuth and pre-tilt angle, which is implemented by the above-mentioned liquid crystal azimuth and pre-tilt angle patterning control device, and includes the following steps:

[0046] Azimuth angle 113 control: laser 101 emits laser 102, shutter 103 controls the on and off of laser 102, laser 102 passes through polarization modulator 104 to achieve rapid regulation of polarization direction, and then passes through galvanometer 107 and focusing lens 109 to irradiate the surface of liquid crystal film, and by changing the polarization direction of focused beam 110, the azimuth angle 113 of liquid crystal molecule 111 is regulated;

[0047] Pre-tilt angle 112 control: laser 101 emits laser 102, shutter 103 controls the on-off of laser 102, laser 102 passes through galvanometer 107, and by changing the lens deflection angle of galvanometer 107, the position of the light beam at the entrance pupil of focusing lens 109 is changed, the irradiation angle of focusing light beam 110 is adjusted, and the pre-tilt angle 112 of liquid crystal molecules 111 is adjusted;

[0048] Large-area writing: After the azimuth angle 113 and the pretilt angle 112 of the liquid crystal molecule 111 are adjusted, exposure of one pixel is achieved, and the displacement stage 114 drives the liquid crystal film to move, changing the exposure area of ​​the liquid crystal film, and re-performing the steps of adjusting the azimuth angle 113 and the pretilt angle 112 until the exposure area of ​​the liquid crystal film is completely exposed.

[0049] In the large-area writing step, the displacement stage 114 drives the liquid crystal film to move, and when the exposure area of ​​the liquid crystal film is changed, specifically: the displacement stage 114 moves to the specified X, Y, and Z coordinates to expose adjacent pixels.

[0050] Compared with the prior art, the laser 101 of the patterned control device for the azimuth angle and pretilt angle of the liquid crystal of the present invention is used to generate the laser 102, and the displacement stage 114 is used to carry the liquid crystal film and drive the liquid crystal film to move. Along the light path direction, the laser 101, the shutter 103, the polarization modulator 104, the galvanometer 107 and the focusing lens 109 are arranged in sequence, the shutter 103 controls the on and off of the laser 102, and the polarization modulator 104 controls the polarization direction of the laser 102, thereby controlling the azimuth angle 111 of the liquid crystal molecules 111. 3. By changing the lens deflection angle of the galvanometer mirror 107 to adjust the position of the laser 102 at the entrance pupil of the focusing lens 109, the irradiation angle of the focusing light beam 110 is adjusted, thereby adjusting the pretilt angle 112 of the liquid crystal molecule 111. The displacement stage 114 drives the liquid crystal film to move to change the exposure area of ​​the liquid crystal film, so that the azimuth angle 113 and the pretilt angle 112 of multiple liquid crystal molecules 111 of the liquid crystal film are written, and a liquid crystal film with a complex amplitude modulation function is prepared, forming a liquid crystal film with a complex patterned amplitude control function.

[0051] The above embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which are equivalent modifications and improvements made to the above embodiments based on the essential technology of the present invention, and all of them belong to the protection scope of the present invention.

Claims

1. A patterning control device for liquid crystal azimuth angle and pre-tilt angle, comprising a laser and a displacement stage, wherein the laser is used to generate laser light, and the displacement stage is used to carry a liquid crystal film and drive the liquid crystal film to move, characterized in that: The patterned control device for the azimuth angle and pre-tilt angle of the liquid crystal also includes a shutter, a polarization modulator, a galvanometer and a focusing objective lens. Along the direction of the optical path, the laser, the shutter, the polarization modulator, the galvanometer and the focusing objective lens are arranged in sequence. The shutter controls the on and off of the laser. The polarization modulator controls the polarization direction of the laser, thereby controlling the azimuth angle of the liquid crystal molecules. The position of the laser at the entrance pupil of the focusing objective lens is adjusted by changing the lens deflection angle of the galvanometer, and the irradiation angle of the focused light beam is adjusted to control the pre-tilt angle of the liquid crystal molecules. The displacement stage drives the liquid crystal film to move and change the exposure area of ​​the liquid crystal film, so that the azimuth angle and pre-tilt angle of multiple liquid crystal molecules of the liquid crystal film are written, and a liquid crystal film with complex amplitude modulation function is prepared.

2. The patterned control device for liquid crystal azimuth angle and pretilt angle according to claim 1, characterized in that: The patterned control device for the azimuth angle and pre-tilt angle of the liquid crystal further comprises a depolarizer, wherein the depolarizer is located between the polarization modulator and the galvanometer, and the depolarizer reduces the polarization degree of the focused light beam.

3. The patterned control device for liquid crystal azimuth angle and pretilt angle according to claim 2, characterized in that: The patterned control device for the azimuth angle and pre-tilt angle of the liquid crystal further comprises a focusing lens, wherein the focusing lens is located between the depolarizer and the galvanometer, and the focusing lens focuses the laser.

4. The patterned control device for liquid crystal azimuth angle and pretilt angle according to claim 1, characterized in that: The patterned control device for the azimuth angle and pre-tilt angle of the liquid crystal further comprises a relay mirror, which is located between the galvanometer mirror and the focusing objective lens. The relay mirror is used to collimate the laser beam and adjust the angle of the laser.

5. The patterned control device for liquid crystal azimuth angle and pretilt angle according to claim 1, characterized in that: The patterned control device for the azimuth angle and pretilt angle of the liquid crystal also includes a control system, which includes a control computer, a control card and a translation stage controller. The control computer is communicatively connected with the control card and the translation stage controller. The control computer synchronously controls the control card and the translation stage controller. The control card synchronously controls the shutter, the polarization modulator and the galvanometer. The translation stage controller controls the movement of the translation stage.

6. The patterning control device for liquid crystal azimuth angle and pretilt angle according to claim 5, characterized in that: The control card controls the shutter to control the on and off of the laser, and the laser on and off response time is less than or equal to 1 μs.

7. The patterned control device for liquid crystal azimuth angle and pretilt angle according to claim 5, characterized in that: The control card controls the polarization modulator to adjust the polarization direction of the laser, and the adjustment frequency is greater than or equal to 1 kHz.

8. The patterning control device for liquid crystal azimuth angle and pretilt angle according to claim 5, characterized in that: The control card controls the galvanometer to adjust the irradiation angle of the focused light beam, and the response time is less than 500 μs.

9. A method for patterning and controlling the azimuth angle and pretilt angle of a liquid crystal, which is implemented by the patterning and controlling device for the azimuth angle and pretilt angle of a liquid crystal according to any one of claims 1 to 8, characterized in that: The following steps are involved: Azimuth angle control: The laser emits laser light, and the shutter controls the on and off of the laser light. The laser light passes through the polarization modulator to quickly adjust the polarization direction, and then passes through the galvanometer and focusing lens to irradiate the surface of the liquid crystal film. By changing the polarization direction of the focused beam, the azimuth angle of the liquid crystal molecules is adjusted. Pre-tilt angle control: The laser emits laser light, and the shutter controls the on-off of the laser light. The laser light passes through the galvanometer, and by changing the lens deflection angle of the galvanometer, the position of the light beam at the entrance pupil of the focusing lens is changed, thereby adjusting the irradiation angle of the focused light beam, and then adjusting the pre-tilt angle of the liquid crystal molecules; Large-area writing: After the azimuth angle and pre-tilt angle of the liquid crystal molecules are adjusted, exposure of one pixel is achieved. The translation stage drives the liquid crystal film to move, changes the exposure area of ​​the liquid crystal film, and re-performs the azimuth angle adjustment and pre-tilt angle adjustment steps until all the exposure areas of the liquid crystal film are exposed.

10. The method for patterning and controlling the azimuth angle and pretilt angle of liquid crystal according to claim 9, characterized in that: In the large-area writing step, the displacement stage drives the liquid crystal film to move, and when the exposure area of ​​the liquid crystal film is changed, specifically: the displacement stage moves to the specified X, Y, and Z coordinates to expose adjacent pixels.

Citation Information

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