A fine-tuning device and bonding method for a high-precision wire bonding machine

Abstract

The present invention relates to the technical field of semiconductor packaging equipment, and discloses a fine-tuning device and bonding method for a high-precision wire bonding machine, the fine-tuning device for a high-precision wire bonding machine comprising a base, a guide rail fixedly arranged on one side of the base, a support rod fixedly arranged on the top of the base, an internal thread arranged inside the support rod, the internal thread of the support rod is threadedly connected with an adjustment structure, an elastic element fixedly arranged on the top of the adjustment structure, a slider fixedly arranged on the top of the elastic element, a displacement sensor symmetrically fixedly arranged on one side of the slider, and the other side of the slider is slidably connected to one side of the guide rail. The slider is driven to slide up and down in the slide groove of the guide rail by the adjustment structure, and the splitter of the wire bonding machine is driven to perform fine-tuning, and the elastic element is used to buffer and damp the slider when it moves, so as to enhance the stability and accuracy of the slider movement, and the position of the slider is detected in real time by the displacement sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor packaging equipment, in particular to a fine-tuning device and a bonding method for a high-precision wire bonding machine. Background Art

[0002] With the miniaturization and integration of electronic products, the precision requirements for wire bonding machines are getting higher and higher. Existing wire bonding machines usually use motor drive to achieve the movement and positioning of the bonding head, but due to factors such as mechanical wear and transmission error, it is often difficult to achieve the ideal precision requirements. In addition, the complex circuit design also challenges the stability and reliability of the system. Therefore, it is particularly important to develop a fine-tuning device that can effectively improve the bonding accuracy.

[0003] Traditional fine-tuning devices usually use air-floating precision platforms, which reduce friction and improve motion accuracy through gas suspension. However, in actual applications, due to problems such as gas leakage, the long-term operating stability is poor, which affects its fine-tuning accuracy. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a fine-tuning device and a bonding method for a high-precision wire bonding machine, which solves the problem that the traditional fine-tuning device has poor long-term operating stability, thereby affecting its fine-tuning accuracy.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a fine-tuning device for a high-precision wire bonding machine, comprising a base, a guide rail is fixedly provided on one side of the base, a support rod is fixedly provided on the top of the base, an internal thread is provided inside the support rod, the internal thread of the support rod is threadedly connected with an adjustment structure, an elastic element is fixedly provided on the top of the adjustment structure, a slider is fixedly provided on the top of the elastic element, a displacement sensor is symmetrically fixedly provided on one side of the slider, the other side of the slider is slidably connected to one side of the guide rail, the adjustment structure is used to drive the slider to perform fine-tuning up and down, the elastic element is used to buffer and reduce shock to the slider, and a control panel is provided on the other side of the base.

[0006] Preferably, the adjustment structure includes an adjustment column, the top of which is rotatably arranged at the bottom of the elastic element, the bottom of which is rotatably connected to a base plate, a motor is fixedly arranged at the bottom of the base plate, and the output end of the motor passes through the top of the base plate and is fixedly connected to the bottom end of the adjustment column.

[0007] Preferably, the circumferential outer wall of the adjusting column is rotatably connected to a top plate, the bottom of the top plate is evenly rotatably connected to a rotating column, the outer wall of the rotating column is provided with a first external thread, and the first external thread of the rotating column is threadedly connected to the internal thread of the support rod.

[0008] Preferably, the circumferential outer wall of the adjusting column is provided with a second external thread, the second external thread of the adjusting column is threadedly connected to one side of the first external thread of the rotating column, the second external thread is located between the top plate and the bottom plate, and the bottom end of the rotating column is rotatably connected to the top of the bottom plate.

[0009] Preferably, the elastic element includes a connecting column, and rubber buffer blocks are fixedly installed on the top and bottom of the connecting column, wherein the top of one of the rubber buffer blocks is fixedly installed on the bottom of the slider, and the bottom of the other rubber buffer block is fixedly installed on the top of the adjusting column, a first cavity is arranged inside the connecting column, a battery is fixedly installed on the outer wall of the connecting column, and an electromagnetic coil is arranged on the inner wall of the connecting column.

[0010] Preferably, a groove is provided on the opposite side of the rubber buffer block, piezoelectric ceramic sheets are evenly arranged in the groove of the rubber buffer block, a pressing sheet is provided on one side of the piezoelectric ceramic sheet, a spring is fixedly provided on the side opposite to the pressing sheet, and a metal cylinder is fixedly provided on the side opposite to the spring.

[0011] Preferably, an electric heating wire is arranged inside the spring, a damper is arranged in the middle of the pressing plate, a side of the damper away from the pressing plate is arranged on a side of the metal cylinder, and the spring, the metal cylinder and the damper are all located in the first cavity of the connecting column.

[0012] Preferably, a second cavity is opened inside the metal cylinder, and magnetorheological fluid is arranged in the second cavity of the metal cylinder.

[0013] Preferably, sliding grooves are provided on both sides of the guide rail, the sliding block is slidably connected in the sliding grooves of the guide rail, and the guide rail is parallel to the support rod.

[0014] A bonding method of a high-precision wire bonding machine comprises the following steps:

[0015] S1: Install the fine-tuning device on the workbench of the wire bonding machine and check the working status of each component;

[0016] S2: Input the target position parameters through the control panel and control the fine-tuning device to drive the wedge of the high-precision wire bonding machine to perform fine-tuning;

[0017] S3: Perform bonding operation with a splitter, and after completing the bonding operation, disconnect the power supply and clean the workbench.

[0018] Working principle: When in use, install the fine-tuning device on the workbench of the wire bonding machine, check the working status of each component, input the target position parameters through the control panel, and control the motor to drive the adjusting column to rotate at the bottom of the elastic element and the top of the base plate. Since the circumferential outer wall of the adjusting column is provided with a second external thread, and the second external thread is threadedly connected to the first external thread of the rotating column, the rotation of the adjusting column will drive the rotating column to rotate through the second external thread. Since the first external thread of the rotating column is threadedly connected to the internal thread of the support rod, the rotation of the rotating column will be driven by the thread transmission of the first external thread and the internal thread, driving it to move up and down in the support rod.

[0019] The up and down movement of the rotating column drives the adjusting column, the top plate, the rotating column, the bottom plate, the motor, the first external thread, and the second external thread to move up and down inside the support rod, and then drives the slider to slide up and down in the slide groove of the guide rail through the elastic element, so that the rotation of the motor is converted into precise linear movement through multi-stage thread transmission, and the position of the slider is fine-tuned with high precision. The slider is connected to the splitting knife of the wire bonding machine, so the movement of the slider can drive the splitting knife of the wire bonding machine to be fine-tuned, thereby realizing precise control of the bonding position.

[0020] The position of the slider is detected in real time by the displacement sensor, and the position information is fed back to the control panel. The control panel adjusts the speed and direction of the motor in real time according to the data fed back by the displacement sensor, so that the position of the slider can be fine-tuned as needed. The guide rail is kept parallel to the support rod, which ensures the stability and accuracy of the slider during the up and down sliding process.

[0021] At the same time, the adjustment structure and the slider are flexibly connected through a rubber buffer block. The good elasticity of the rubber material can effectively reduce the influence of vibration on the movement of the slider when the adjustment structure is running, thereby playing a preliminary buffering role. When the slider is vibrated or impacted, the piezoelectric ceramic sheet in the groove of the rubber buffer block will be mechanically deformed due to the squeezing of the pressing sheet. According to the piezoelectric effect, the piezoelectric ceramic sheet will convert mechanical energy into electrical energy. Through circuit connection, the generated electrical energy can be efficiently collected and stored in the battery to achieve energy recovery, and power can be supplied to components such as the electromagnetic coil and the electric heating wire, thereby enhancing the practicality of the device.

[0022] The slider is driven by the spring in the adjustment structure for fine adjustment. When the slider is vibrated, it will undergo elastic deformation to absorb part of the vibration energy. The current intensity of the electromagnetic coil can be adjusted through the control panel. When the electromagnetic coil is energized, a magnetic field will be generated, which will act on the magnetorheological fluid in the second cavity of the metal cylinder, causing the magnetic particles inside to quickly form a chain structure, thereby causing the viscosity of the liquid to increase sharply, presenting solid-like properties, thereby generating a damping force to further buffer and reduce the vibration of the slider.

[0023] The spring is heated by an electric heating wire. When the spring's performance deteriorates due to temperature changes or long-term use, the characteristics of the shape memory alloy are used to restore it to its original set shape, compensating for elastic changes caused by temperature or fatigue. The damping effect on vibration is further enhanced by the damper to ensure the stable movement of the slider, thereby effectively improving the accuracy and stability of wire bonding.

[0024] The present invention provides a fine-tuning device and bonding method for a high-precision wire bonding machine, which has the following beneficial effects:

[0025] 1. The present invention drives the slider to slide up and down in the slide groove of the guide rail through the adjustment structure, driving the chopper of the wire bonding machine to perform fine adjustment. At the same time, the elastic element is used to buffer and reduce shock when the slider moves, thereby enhancing the stability and accuracy of the slider movement. The position of the slider is detected in real time by the displacement sensor, and the speed and direction of the motor are adjusted in real time according to the data fed back by the displacement sensor through the control panel, so as to facilitate fine adjustment of the position of the slider according to the needs, thereby solving the problem that the traditional fine adjustment device has poor long-term operating stability, thereby affecting its fine adjustment accuracy.

[0026] 2. The present invention drives the adjusting column to rotate through a motor, and drives the rotating column to rotate through a second external thread thread transmission. Because the first external thread of the rotating column is threadedly connected to the internal thread of the support rod, the rotation of the rotating column will drive it to move up and down in the support rod through the thread transmission of the first external thread and the internal thread, thereby converting the rotation of the motor into precise linear movement through multi-stage thread transmission, thereby achieving high-precision fine-tuning of the position of the slider.

[0027] 3. The present invention uses a rubber buffer block to preliminarily reduce the impact of vibration on the movement of the slider when the adjustment structure is running, and provides elastic buffering force through the spring. When affected by temperature changes or performance degradation, the original shape can be restored through the electric heating wire to compensate for elastic changes. At the same time, under the action of the magnetic field generated by the electromagnetic coil, the magnetorheological fluid can quickly change the viscosity according to the magnetic field strength to generate a damping force, further buffering and reducing the vibration of the slider. With the assistance of the damper, the stable movement of the slider is ensured, the impact of vibration on the bonding quality is effectively reduced, and the bonding stability is improved.

[0028] 4. The present invention uses piezoelectric ceramic sheets evenly distributed in the groove of the rubber buffer block. When the slider is vibrated or impacted, the piezoelectric ceramic sheets are squeezed by the sheets and mechanically deformed. The mechanical energy is converted into electrical energy according to the piezoelectric effect. The generated electrical energy is efficiently collected and stored in the battery through circuit connection to power components such as the electromagnetic coil and the electric heating wire, thereby reducing the device's dependence on an external power source, improving energy utilization efficiency, reducing operating costs, and enhancing the practicability and sustainability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0030] Figure 2 It is a schematic diagram of the local structure of the slider of the present invention;

[0031] Figure 3 It is a schematic diagram of the internal structure of the connecting column of the present invention;

[0032] Figure 4 It is a schematic diagram of the internal structure of the metal cylinder of the present invention;

[0033] Figure 5 It is a schematic diagram of the internal structure of the support rod of the present invention;

[0034] Figure 6 It is a schematic diagram of the partial structure of the second external thread of the present invention;

[0035] Figure 7 It is a schematic diagram of the local structure of the base of the present invention;

[0036] Figure 8 It is a front view structural schematic diagram of the present invention;

[0037] Fig. 9 The present invention provides a method flow chart of a bonding method of a high-precision wire bonding machine.

[0038] Among them, 1. base; 2. support rod; 3. adjustment column; 4. guide rail; 5. slider; 6. slide groove; 7. displacement sensor; 8. rubber buffer block; 9. battery; 10. groove; 11. piezoelectric ceramic sheet; 12. pressing sheet; 13. connecting column; 14. first cavity; 15. electromagnetic coil; 16. spring; 17. metal cylinder; 18. damper; 19. second cavity; 20. magnetorheological fluid; 21. electric heating wire; 22. internal thread; 23. top plate; 24. rotating column; 25. bottom plate; 26. motor; 27. first external thread; 28. second external thread; 29. ​​control panel. DETAILED DESCRIPTION

[0039] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] Please see attached Figure 1 -Attached Figure 8The embodiment of the present invention provides a fine-tuning device for a high-precision wire bonding machine, comprising a base 1, characterized in that: a guide rail 4 is fixedly provided on one side of the base 1, a support rod 2 is fixedly provided on the top of the base 1, an internal thread 22 is provided inside the support rod 2, the internal thread 22 of the support rod 2 is threadedly connected with an adjustment structure, an elastic element is fixedly provided on the top of the adjustment structure, a slider 5 is fixedly provided on the top of the elastic element, a displacement sensor 7 is symmetrically fixedly provided on one side of the slider 5, the other side of the slider 5 is slidably connected to one side of the guide rail 4, the adjustment structure is used to drive the slider 5 to perform fine-tuning up and down, the elastic element is used to buffer and reduce shock to the slider 5, and a control panel 29 is provided on the other side of the base 1; slide grooves 6 are provided on both sides of the guide rail 4, the slider 5 is slidably connected in the slide grooves 6 of the guide rail 4, and the guide rail 4 is parallel to the support rod 2.

[0041] Specifically, the entire device is fixed by the base 1 so that it can be firmly installed on the wire bonding machine. The device can be moved up and down by operating the adjustment structure and utilizing the thread matching relationship between the device and the internal thread 22 of the support rod 2. The slide grooves 6 provided on both sides of the guide rail 4 provide guide rails for the sliding of the slider 5, so that the slider 5 can be driven by the adjustment structure to slide up and down in the slide groove 6 of the guide rail 4. The slider 5 is connected to the splitting knife of the wire bonding machine, so the movement of the slider 5 can drive the splitting knife of the wire bonding machine to perform fine-tuning, thereby realizing precise control of the bonding position. At the same time, the elastic element can buffer and reduce shock when the slider 5 moves, thereby enhancing the stability and accuracy of the movement of the slider 5.

[0042] The displacement sensor 7 uses a high-precision grating displacement sensor or a laser displacement sensor. Through the operation of the displacement sensor 7, the position of the slider 5 is detected in real time, and the position information is fed back to the control panel 29. The control panel 29 has a built-in control algorithm, which can adjust the speed and direction of the motor 26 and the current intensity of the electromagnetic coil 15 in real time according to the data fed back by the displacement sensor 7, thereby realizing intelligent and high-precision control of the fine-tuning device, thereby facilitating fine-tuning the position of the slider 5 as required. By keeping the guide rail 4 parallel to the support rod 2, the stability and accuracy of the slider 5 in the process of sliding up and down are guaranteed, thereby solving the problem of poor long-term operating stability of traditional fine-tuning devices, which affects their fine-tuning accuracy.

[0043] Please refer to the attached Figure 5 , Attachment Figure 6The adjustment structure includes an adjusting column 3, the top of the adjusting column 3 is rotatably arranged at the bottom of the elastic element, the bottom of the adjusting column 3 is rotatably connected to a bottom plate 25, a motor 26 is fixedly arranged at the bottom of the bottom plate 25, and the output end of the motor 26 passes through the top of the bottom plate 25 and is fixedly connected to the bottom end of the adjusting column 3; the circumferential outer wall of the adjusting column 3 is rotatably connected to the top plate 23, and the bottom of the top plate 23 is evenly rotatably connected to a rotating column 24, the outer wall of the rotating column 24 is provided with a first external thread 27, and the first external thread 27 of the rotating column 24 is threadedly connected to the internal thread 22 of the support rod 2; the circumferential outer wall of the adjusting column 3 is provided with a second external thread 28, the second external thread 28 of the adjusting column 3 is threadedly connected to one side of the first external thread 27 of the rotating column 24, the second external thread 28 is located between the top plate 23 and the bottom plate 25, and the bottom end of the rotating column 24 is rotatably connected to the top of the bottom plate 25.

[0044] Specifically, through the operation of the motor 26, its output end drives the adjusting column 3 to rotate at the bottom of the elastic element and the top of the bottom plate 25. The second external thread 28 and the first external thread 27 are both processed by high-precision technology. The surface roughness of the thread is controlled at an extremely low level, and the pitch error is extremely small. Since the circumferential outer wall of the adjusting column 3 is provided with a second external thread 28, and the second external thread 28 is threadedly connected to the first external thread 27 of the rotating column 24, the rotation of the adjusting column 3 will be through the second external thread 28, and the thread transmission drives the rotating column 24 to rotate at the top of the top plate 23 and the bottom of the bottom plate 25. Because the first external thread 27 of the rotating column 24 is threadedly connected to the internal thread 22 of the support rod 2, the rotation of the rotating column 24 will be through the thread transmission of the first external thread 27 and the internal thread 22, driving it to move up and down in the support rod 2.

[0045] At the same time, the rotation of the rotating column 24 drives the adjusting column 3, the top plate 23, the rotating column 24, the bottom plate 25, the motor 26, the first external thread 27, and the second external thread 28 to move up and down inside the support rod 2, and then drives the slider 5 to be fine-tuned up and down through the elastic element, so that through the multi-stage thread transmission, the rotation of the motor 26 is converted into precise linear movement, thereby realizing high-precision fine-tuning of the position of the slider 5. In order to reduce the friction resistance during the rotation of the rotating column 24, high-precision ball bearings can be installed at the rotating connections between the rotating column 24 and the top plate 23 and the bottom plate 25 to reduce friction loss and improve the operating efficiency and service life of the adjustment structure.

[0046] Please see attached Figure 2 -Attached Figure 4 , Attachment Figure 8The elastic element includes a connecting column 13, and rubber buffer blocks 8 are fixedly arranged on the top and bottom of the connecting column 13, wherein the top of one rubber buffer block 8 is fixedly arranged on the bottom of the slider 5, and the bottom of the other rubber buffer block 8 is fixedly arranged on the top of the adjusting column 3. A first cavity 14 is arranged inside the connecting column 13, a battery 9 is fixedly arranged on the outer wall of the connecting column 13, and an electromagnetic coil 15 is arranged on the inner wall of the connecting column 13; a groove 10 is arranged on the opposite side of the rubber buffer block 8, and piezoelectric ceramic sheets 11 are evenly arranged in the groove 10 of the rubber buffer block 8, a pressing sheet 12 is arranged on one side of the piezoelectric ceramic sheet 11, a spring 16 is fixedly arranged on the opposite side of the pressing sheet 12, and a metal cylinder 17 is fixedly arranged on the opposite side of the spring 16.

[0047] Specifically, the rubber buffer block 8 is made of a special rubber material with high elasticity and fatigue resistance, such as silicone rubber or fluororubber. It not only has excellent elastic recovery ability and can maintain stable buffering performance under long-term vibration impact, but also has good temperature resistance and chemical corrosion resistance, and can adapt to the complex working environment of the wire bonding machine. The adjustment structure is flexibly connected to the slider 5 through the rubber buffer block 8. By utilizing the good elasticity of the rubber material, when the adjustment structure is running, it can effectively reduce the influence of vibration on the movement of the slider 5, thereby playing a preliminary buffering role.

[0048] The piezoelectric ceramic sheet 11 is made of high-performance piezoelectric material, such as lead zirconate titanate (PZT) piezoelectric ceramic, which has a high piezoelectric constant and electromechanical coupling coefficient, and can convert more mechanical energy into electrical energy. In the groove 10 of the rubber buffer block 8, the piezoelectric ceramic sheets 11 are evenly distributed in an array. When the slider 5 is subjected to vibration or impact, the piezoelectric ceramic sheet 11 in the groove 10 of the rubber buffer block 8 will be squeezed by the pressing sheet 12 and mechanically deformed. According to the piezoelectric effect, the piezoelectric ceramic sheet 11 will convert mechanical energy into electrical energy. Through circuit connection, the generated electrical energy will be efficiently collected and stored in the battery 9, realizing energy recovery, and powering the electromagnetic coil 15, the electric heating wire 21 and other components, thereby enhancing the practicality of the device.

[0049] Please refer to the attached Figure 3 , Attachment Figure 4 An electric heating wire 21 is arranged inside the spring 16, a damper 18 is arranged in the middle of the pressing plate 12, and the side of the damper 18 away from the pressing plate 12 is arranged on the side of the metal cylinder 17, the spring 16, the metal cylinder 17, and the damper 18 are all located in the first cavity 14 of the connecting column 13; a second cavity 19 is opened inside the metal cylinder 17, and a magnetorheological fluid 20 is arranged in the second cavity 19 of the metal cylinder 17.

[0050] Specifically, the slider 5 is driven to perform fine adjustment in the adjustment structure through the spring 16. When the slider 5 is vibrated, it will undergo elastic deformation and absorb part of the vibration energy. At the same time, the current intensity of the electromagnetic coil 15 is adjusted through the control panel 29. When the electromagnetic coil 15 is energized, a magnetic field will be generated. The magnetic field acts on the magnetorheological fluid 20 in the second cavity 19 of the metal cylinder 17. In the absence of a magnetic field, the magnetorheological fluid 20 is similar to a Newtonian fluid and has good fluidity. When an external magnetic field is applied, the magnetic particles inside it will quickly form a chain structure, causing the viscosity of the liquid to increase sharply, presenting solid-like properties, thereby generating a damping force to further buffer and reduce the vibration of the slider 5.

[0051] In addition, the spring 16 is made of shape memory alloy, which has a unique shape memory effect and super elasticity. Within the normal working temperature range, it can provide elastic buffering force like an ordinary spring. When affected by temperature changes or performance degradation caused by long-term use, the spring 16 is heated by the electric heating wire 21, and the characteristics of the shape memory alloy are used to restore it to the initial set shape, compensating for the elastic changes caused by temperature or fatigue. The damping effect on vibration is further enhanced by the damper 18, ensuring the stable movement of the slider 5, thereby effectively improving the accuracy and stability of wire bonding.

[0052] Please see attached Fig. 9 , a bonding method of a high-precision wire bonding machine, comprising the following steps:

[0053] S1: Install the fine-tuning device on the workbench of the wire bonding machine and check the working status of each component;

[0054] S2: Inputting target position parameters through the control panel 29 and controlling the fine-tuning device to drive the wedge of the high-precision wire bonding machine to perform fine-tuning;

[0055] S3: Perform bonding operation with a splitter, and after completing the bonding operation, disconnect the power supply and clean the workbench.

[0056] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fine-tuning device for a high-precision wire bonding machine, comprising a base (1), characterized in that: A guide rail (4) is fixedly provided on one side of the base (1); a support rod (2) is fixedly provided on the top of the base (1); an internal thread (22) is provided inside the support rod (2); an adjustment structure is threadedly connected to the internal thread (22) of the support rod (2); an elastic element is fixedly provided on the top of the adjustment structure; a slider (5) is fixedly provided on the top of the elastic element; a displacement sensor (7) is symmetrically fixedly provided on one side of the slider (5); the other side of the slider (5) is slidably connected to one side of the guide rail (4); the adjustment structure is used to drive the slider (5) to perform fine adjustment up and down; the elastic element is used to buffer and reduce shock on the slider (5); and a control panel (29) is provided on the other side of the base (1); The adjustment structure comprises an adjustment column (3), the top of the adjustment column (3) is rotatably arranged at the bottom of the elastic element, the bottom of the adjustment column (3) is rotatably connected to a bottom plate (25), a motor (26) is fixedly arranged at the bottom of the bottom plate (25), and the output end of the motor (26) passes through the top of the bottom plate (25) and is fixedly connected to the bottom end of the adjustment column (3); The circumferential outer wall of the adjusting column (3) is rotatably connected to a top plate (23), the bottom of the top plate (23) is evenly rotatably connected to a rotating column (24), the outer wall of the rotating column (24) is provided with a first external thread (27), and the first external thread (27) of the rotating column (24) is threadedly connected to the internal thread (22) of the supporting rod (2); The circumferential outer wall of the adjusting column (3) is provided with a second external thread (28), the second external thread (28) of the adjusting column (3) is threadedly connected to one side of the first external thread (27) of the rotating column (24), the second external thread (28) is located between the top plate (23) and the bottom plate (25), and the bottom end of the rotating column (24) is rotatably connected to the top of the bottom plate (25).

2. The fine-tuning device for a high-precision wire bonding machine according to claim 1, characterized in that: The elastic element comprises a connecting column (13), the top and bottom of the connecting column (13) are both fixedly provided with rubber buffer blocks (8), the top of one of the rubber buffer blocks (8) is fixedly provided at the bottom of the slider (5), and the bottom of the other rubber buffer block (8) is fixedly provided at the top of the adjustment column (3), a first cavity (14) is provided inside the connecting column (13), a battery (9) is fixedly provided on the outer wall of the connecting column (13), and an electromagnetic coil (15) is provided on the inner wall of the connecting column (13).

3. The fine-tuning device for a high-precision wire bonding machine according to claim 2, characterized in that: A groove (10) is provided on one side opposite to the rubber buffer block (8), piezoelectric ceramic sheets (11) are evenly arranged in the groove (10) of the rubber buffer block (8), a pressing sheet (12) is provided on one side of the piezoelectric ceramic sheet (11), a spring (16) is fixedly provided on one side opposite to the pressing sheet (12), and a metal cylinder (17) is fixedly provided on one side opposite to the spring (16).

4. The fine-tuning device for a high-precision wire bonding machine according to claim 3, characterized in that: An electric heating wire (21) is arranged inside the spring (16), a damper (18) is arranged in the middle of the pressing plate (12), and a side of the damper (18) away from the pressing plate (12) is arranged on a side of the metal cylinder (17), and the spring (16), the metal cylinder (17) and the damper (18) are all located in the first cavity (14) of the connecting column (13).

5. The fine-tuning device for a high-precision wire bonding machine according to claim 4, characterized in that: A second cavity (19) is provided inside the metal cylinder (17), and a magnetorheological fluid (20) is arranged in the second cavity (19) of the metal cylinder (17).

6. The fine-tuning device for a high-precision wire bonding machine according to claim 1, characterized in that: Slide grooves (6) are provided on both sides of the guide rail (4), and the sliding block (5) is slidably connected in the slide grooves (6) of the guide rail (4). The guide rail (4) is parallel to the support rod (2).

7. A bonding method for a high-precision wire bonding machine, characterized in that: A fine-tuning device for a high-precision wire bonding machine according to any one of claims 1 to 6, comprising the following steps: S1: Install the fine-tuning device on the workbench of the wire bonding machine and check the working status of each component; S2: inputting target position parameters through the control panel (29) and controlling the fine-tuning device to operate, thereby driving the splitter of the high-precision wire bonding machine to perform fine-tuning; S3: Perform bonding operation with a splitter, and after completing the bonding operation, disconnect the power supply and clean the workbench.

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