A device for adjusting the verticality of the bonding head of a die bonding machine

Abstract

This invention relates to the field of semiconductor technology, specifically to a die bonder mount verticality adjustment device, comprising a first adjustment member; a second adjustment member disposed at the bottom of the first adjustment member along a first direction for fixing the mount; and a fine-tuning assembly. The first adjustment member is adjustablely connected to the second adjustment member along the first direction via multiple sets of fine-tuning assemblies. The fine-tuning assembly is threadedly connected to the first adjustment member and detachably connected to the second adjustment member. The fine-tuning assembly is screwed relative to the first adjustment member to adjust the spacing and angle between the second and first adjustment members. In this application, the fine-tuning assembly is threadedly screwed onto the first adjustment member to adjust the spacing of the second adjustment members surrounding the first adjustment member relative to the first adjustment member. Multiple sets of fine-tuning assemblies cooperate to control the angle and / or spacing changes of the second adjustment member relative to the first adjustment member, adjusting the verticality of the mount fixed on the second adjustment member, thereby improving the accuracy and stability of the die bonding operation.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a die bonder head verticality adjustment device. Background Technology

[0002] In modern electronics manufacturing, die bonding is a crucial technical step, as its precision directly affects the performance and reliability of electronic products. In die bonding, the die bonder, as a key component of the equipment, plays a vital role in accurately mounting the chip to the designated position on the substrate. The motion accuracy and stability of the die bonder are essential for ensuring bonding precision, and the perpendicularity of the die bonder is a critical technical parameter. Specifically, the perpendicularity of the die bonder refers to the perpendicular relationship between the die bonder and the die bonder's rotating rod in the XY plane of motion.

[0003] Significant verticality errors in the bonding head can severely impact the placement accuracy of the chip. During the placement process, the bonding head needs to be precisely moved to the designated position and place the chip onto the substrate pads. If the bonding head is misaligned, the actual bonding position of the chip will deviate from the expected position, leading to poor electrical connection between the chip and the substrate, and even causing serious problems such as short circuits. This not only reduces product yield but also increases the cost of rework and scrap.

[0004] Significant verticality errors in the bonding head can also affect the accuracy of chip placement angles. The bonding head rotation lever is responsible for adjusting the chip placement angle to ensure precise alignment between the chip and the substrate. If the bonding head is not vertically aligned, the rotation lever will tilt or twist additionally when adjusting the chip angle, resulting in inaccurate chip placement angles. This will also reduce product yield and reliability, and may even lead to the failure of the entire product. Summary of the Invention

[0005] The purpose of this invention is to provide a die bonder pin perpendicularity adjustment device to solve the problem of low die bonding accuracy caused by large pin perpendicularity error in the prior art.

[0006] The technical solution of the present invention is: a die bonder bonding head verticality adjustment device, comprising: a first adjustment member; a second adjustment member disposed at the bottom of the first adjustment member along a first direction for fixing the bonding head; and a fine-tuning assembly, wherein the first adjustment member is adjustablely connected to the second adjustment member along the first direction through multiple sets of the fine-tuning assemblies, the fine-tuning assembly is threadedly connected to the first adjustment member, the fine-tuning assembly is detachably connected to the second adjustment member, and the fine-tuning assembly is screwed relative to the first adjustment member to adjust the distance and angle between the second adjustment member and the first adjustment member.

[0007] Preferably, the first adjusting member has a first threaded hole, and the second adjusting member has a second threaded hole, the first threaded hole and the second threaded hole are coaxial along the first direction; the fine-tuning component includes a calibration member and a fastening bolt, the calibration member is threadedly connected to the first threaded hole, the fastening bolt is partially movably inserted into the calibration member, and the fastening bolt is partially threadedly connected to the first threaded hole.

[0008] Preferably, the calibration component has a guide hole, the fastening bolt includes a fastening head and a fastening screw, the fastening screw is slidably inserted into the guide hole, the diameter of the fastening screw is smaller than the diameter of the guide hole, the fastening screw is threadedly connected to the second threaded hole, and the bottom surface of the fastening head abuts against the top surface of the calibration component.

[0009] Preferably, the calibration component includes a threaded section and an engaging section. The threaded section is threadedly connected to the first threaded hole, and the engaging section is fixed at the end of the threaded section away from the second adjustment component. The engaging section is located outside the first adjustment component.

[0010] Preferably, the calibration component further includes an upper curved surface segment and a lower curved surface segment, wherein the upper curved surface segment, the screw-in segment, the threaded segment, and the lower curved surface segment are fixedly connected in sequence, and the top end face of the upper curved surface segment and the bottom end face of the lower curved surface segment are both arc surfaces; a first shim is provided between the calibration component and the fastening head, and a second shim is provided between the calibration component and the second adjusting component, wherein the contact surface between the first shim and the upper curved surface segment is an arc surface, and the contact surface between the second shim and the lower curved surface segment is an arc surface.

[0011] Preferably, the fine-tuning components are in three groups, and the three groups of fine-tuning components are distributed in a triangle in a plane perpendicular to the first direction.

[0012] Preferably, the die bonder head verticality adjustment device is provided with a stabilizing component for single-point fixing of the first adjusting member and the second adjusting member. The stabilizing component and the two sets of fine-tuning components are arranged in a right-angled triangle, and the stabilizing component is located at the vertical foot.

[0013] Preferably, the stabilizing component includes a positioning bolt, a first fixing member, and a second fixing member. The first fixing member, the first adjusting member, and the second fixing member have a first channel internally. The positioning bolt is movably inserted into the first channel. The diameter of the first channel is larger than the diameter of the positioning bolt, and the end of the positioning bolt is threadedly connected to the second adjusting member.

[0014] Preferably, the positioning bolt is movably fitted with a third washer and a fourth washer. The third washer is located between the positioning bolt and the first fixing member, and the lower end face of the third washer and the upper end face of the first fixing member are both arc surfaces. The fourth washer is located between the second fixing member and the second adjusting member, and the upper end face of the fourth washer and the lower end face of the second fixing member are both arc surfaces.

[0015] Preferably, the first gasket and the third gasket are located in the same plane, and the second gasket and the fourth gasket are in the same plane.

[0016] Compared with the prior art, the advantages of the present invention are:

[0017] (1) Multiple sets of fine-tuning components work together to adjust the positional relationship between the second adjusting component and the first adjusting component. The fine-tuning components are screwed into the first adjusting component to adjust the spacing between the second adjusting components around the first adjusting component and the first adjusting component. Multiple sets of fine-tuning components work together to control the angle and / or spacing changes between the second adjusting component and the first adjusting component, thereby adjusting the perpendicularity of the bonding head fixed on the second adjusting component, ensuring that the perpendicularity error of the bonding head is within the allowable range, improving the accuracy and stability of the bonding operation, increasing the product qualification rate, and reducing the cost of rework and scrap, thereby improving the overall economic benefits.

[0018] (2) The fastening screw is slidably inserted into the guide hole. The diameter of the fastening bolt is smaller than the diameter of the guide hole so that the fastening screw can have a certain tilt angle in the guide hole. When the second adjustment component needs to be finely adjusted, the fastening bolt can be rotated to tilt it in the guide hole, thereby achieving fine adjustment of the position of the second adjustment component. Compared with the direct deformation of the bolt, this tilt adjustment method has higher adjustment accuracy and stability.

[0019] (3) The top and bottom surfaces of the upper and lower curved sections are both arc surfaces, which can effectively disperse the stress during tightening. When the tightening bolts are tightened, the pressure generated will gradually disperse along the arc surface to other parts of the calibration part, rather than being concentrated at a certain point or in a certain area. This helps to reduce stress concentration and reduce the risk of damage to the parts. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0021] Figure 1 This is a schematic diagram of the structure of a die bonder bonding head verticality adjustment device according to the present invention;

[0022] Figure 2 This is a cross-sectional schematic diagram of a die bonder bonding head verticality adjustment device according to the present invention;

[0023] Figure 3This is a partially exploded cross-sectional view of the die bonder perpendicularity adjustment device of the present invention.

[0024] Figure 4 This is an exploded view of the fine-tuning component described in this invention;

[0025] Figure 5 This is a schematic diagram of the structure of Embodiment 2 of the present invention;

[0026] Figure 6 This is a partially exploded cross-sectional view of Embodiment 2 of the present invention;

[0027] Figure 7 This is a cross-sectional view of Embodiment 2 of the present invention;

[0028] Figure 8 This is an exploded view of the stabilizing component described in this invention.

[0029] Explanation of reference numerals in the attached figures:

[0030] 1. First adjusting component; 11. First threaded hole; 12. First positioning hole; 13. First positioning groove; 14. Third positioning groove; 15. Adjustment groove; 16. Adjusting bolt; 2. Second adjusting component; 21. Second threaded hole; 22. Receiving groove; 23. Second positioning hole; 24. Second positioning groove; 3. Fine-tuning assembly; 31. Calibration component; 311. Threaded section; 312. Engaging section; 313. Guide hole; 314. Upper curved surface section; 315. Lower curved surface section; 32. Fastening bolt; 321. Fastening head; 322. Fastening screw; 33. First washer; 34. Second washer; 4. Stabilizing assembly; 41. Positioning bolt; 411. Positioning head; 412. Positioning screw; 42. First fixing component; 43. Second fixing component; 44. First channel; 45. Second channel; 46. Third washer; 47. Fourth washer. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0032] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0033] like Figure 1 and Figure 2 As shown, a die bonder connector verticality adjustment device is used to fine-tune the verticality of the connector to ensure that the verticality of the connector is within the error range. It includes a first adjusting member 1, a second adjusting member 2, and a fine-tuning assembly 3. The first adjusting member 1 and the second adjusting member 2 are arranged along a first direction. The second adjusting member 2 is used to fix the connector. The first adjusting member 1 is adjustablely connected to the second adjusting member 1 via the fine-tuning assembly 3 to adjust the position of the second adjusting member relative to the first adjusting member 1, thereby controlling the verticality of the connector. The fine-tuning assembly 3 is threadedly connected to the first adjusting member 1 and detachably connected to the second adjusting member 2. The fine-tuning assembly 3 rotates relative to the first adjusting member 1, forcing the second adjusting member 2 to move closer to or further away from the first adjusting member 1 at this portion of the fine-tuning assembly 3, thereby adjusting the distance and angle between the second adjusting member 2 and the first adjusting member 1 around the fine-tuning assembly 3.

[0034] It is worth noting that the first direction refers to a specific spatial direction, which determines the relative position or arrangement of the first adjusting member 1 and the second adjusting member 2 in space, thus clarifying and specifying the layout or configuration of the two adjusting members in space. The first direction is a direction in three-dimensional space, which can be horizontal, vertical, or inclined, depending on the actual application scenario and needs. In this embodiment, the first direction is specifically a vertical direction.

[0035] The second adjusting component 2 is located at the bottom of the first adjusting component 1. Both the first adjusting component 1 and the second adjusting component 2 are plate-shaped structures. The first adjusting component 1 is fixed on the gantry platform, that is, the part of the first adjusting component 1 that is fixed. The second adjusting component 2 is finely adjusted with the first adjusting component 1 through the fine-tuning component 3. The second adjusting component 2 is fixed to the head. When the second adjusting component 2 is adjusted relative to the first adjusting component 1, the rotation or translation of the head can be adjusted.

[0036] like Figure 3 As shown, the first adjusting member 1 has a plurality of first threaded holes 11, all of which are through holes along the first direction. The fine-tuning component 3 includes a calibration member 31, which is threadedly connected to the first threaded hole 11. Specifically, the calibration member 31 is screwed into the first threaded hole 11 from the end face of the first adjusting member 1 away from the second adjusting member 2. The length of the calibration member 31 is greater than the thickness of the first adjusting member 1, so that after the calibration member 31 is screwed into the first threaded hole 11, the calibration member 31 can extend out of the first adjusting member 1 and abut against the second adjusting member 2. The calibration member 31 forces the second adjusting member 2 to move relative to the first adjusting member 1, or even deform.

[0037] like Figure 3 and Figure 4As shown, the calibration component 31 has a threaded section 311 and an engaging section 312. The threaded section 311 engages with the first threaded hole 11, and the engaging section 312 is fixed at the end of the threaded section 311 away from the second adjusting member 2. The engaging section 312 is located outside the first adjusting member 1. The operator controls the feed amount of the threaded section 311 by rotating the engaging section 312. In this embodiment, the outer periphery of the engaging section 312 is hexagonal, so that the operator can use a wrench or pliers to hold the engaging section 312 and drive the calibration component 31 to rotate as a whole. In other embodiments, the outer periphery of the engaging section 312 can be set as a butterfly-shaped protrusion, which can be rotated manually by the operator without the use of tools.

[0038] Preferably, the thread of the threaded section 311 is M10×0.5, that is, the diameter of the threaded section 311 is 10mm and the pitch of the threaded section 311 is 0.5mm. For each revolution of the calibration piece 31, the calibration piece 31 can rotate 500um. For example, an angle meter or a rotation angle measuring instrument can be used to control the rotation angle of the calibration piece 31, thereby controlling the feed accuracy of the calibration piece 31, so that the feed accuracy of the calibration piece 31 can reach an error of less than 10um. While ensuring the adjustment accuracy, the method for adjusting the perpendicularity of the head is simple and easy to operate.

[0039] The calibration component 31 is movably connected to a fastening bolt 32. Specifically, the calibration component 31 is provided with a guide hole 313, which is a through hole along the length of the calibration component 31. The central axis of the guide hole 313 is coaxial with the rotational central axis of the calibration component 31. The inner wall of the guide hole 313 has a smooth curved surface, and the fastening bolt 32 is slidably connected to the guide hole 313.

[0040] The second adjusting member 2 has a second threaded hole 21, the rotation axis of the second threaded hole 21 is coaxial with the rotation axis of the calibrating member 31. In this embodiment, the second threaded hole 21 is a threaded through hole along the first direction. After the fastening bolt 32 is slidably connected to the calibrating member 31, it is threadedly connected to the second threaded hole 21.

[0041] Specifically, the fastening bolt 32 includes a fastening head 321 and a fastening screw 322. The fastening head 321 is fixedly connected to one end of the fastening screw 322, and the diameter of the fastening head 321 is larger than the diameter of the fastening screw 322. When the fastening screw 322 is movably inserted into the guide hole 313, the fastening head 321 abuts against the upper end of the calibration piece 31. Preferably, the fastening bolt 32 is a semi-threaded fastening bolt 32, that is, the part of the fastening screw 322 in the guide hole 313 is a smooth rod, and the part of the fastening screw 322 in the second threaded hole 21 is a threaded rod.

[0042] The inner diameter of the guide hole 313 is larger than the outer diameter of the fastening screw 322. The fastening screw 322 has a certain adjustable angle within the guide hole 313. That is, when the calibrator 31 adjusts the angle of the second adjusting member 2, the fastening screw 322 can tilt within the guide hole 313, reducing the interference of the guide hole 313 on the fastening screw 322. Since the position adjustment of the fastening screw 322 replaces the deformation of the fastening screw 322, the internal stress and potential fatigue problems caused by the deformation of the fastening screw 322 are reduced. Moreover, the force generated by the deformation of the fastening screw 322 will counteract the fine adjustment amount of the calibrator 31 on the second adjusting member 2, increasing the fine adjustment error. Therefore, by tilting the fastening screw 322 relative to the guide hole 313, the first adjusting member 1 and the second adjusting member 2 can be kept in the adjusted state.

[0043] like Figure 4 As shown, the calibration component 31 also includes an upper curved surface segment 314 and a lower curved surface segment 315. The upper curved surface segment 314, the fastening head 321, the fastening screw 322, and the lower curved surface segment 315 are sequentially fixedly connected. The guide hole 313 is a through hole penetrating the upper curved surface segment 314, the fastening head 321, the fastening screw 322, and the lower curved surface segment 315. Preferably, the upper end face of the upper curved surface segment 314 is an arc surface, and the lower end face of the lower curved surface segment 315 is an arc surface. More preferably, the upper end face of the upper curved surface segment 314 is a spherical surface, and the lower end face of the lower curved surface segment 315 is a spherical surface. Specifically, the arc surface of the upper curved surface segment 314 protrudes upward, and the arc surface of the lower curved surface segment 315 protrudes downward.

[0044] A first washer 33 is provided between the fastening head 321 and the upper curved section 314. The first washer 33 is movably sleeved on the fastening screw 322. The upper end surface of the first washer 33 is flat, and the lower end surface of the first washer 33 is an arc surface that fits against the upper end surface of the upper curved section 314. That is, the lower end surface of the first washer 33 is recessed inward. The lower end surface of the part of the fastening head 321 that protrudes from the fastening screw 322 is flat, and the lower end surface of the fastening head 321 fits against the upper end surface of the first washer 33.

[0045] The upper end face of the first adjusting member 1 is recessed to form a receiving groove 22. In this embodiment, the receiving groove 22 is a cylindrical groove with a flat bottom. The bottom of the receiving groove 22 is connected to the second threaded hole 21, and the central axis of the receiving groove 22 is coaxial with the central axis of the second threaded hole 21. A second gasket 34 is provided inside the receiving groove 22. The lower end face of the second gasket 34 is flat, and the bottom of the second gasket 34 fits against the receiving groove 22. The outer peripheral side of the second gasket 34 abuts against the inner sidewall of the receiving groove 22, thus confining the second gasket 34 within the receiving groove 22. The upper end face of the second gasket 34 is an arc surface that fits against the lower end face of the lower curved surface segment 315, that is, the upper end face of the second gasket 34 is recessed inside it. The lower curved section 315 can slide relative to the second shim 34, and the upper curved section 314 can slide relative to the first shim 33. After the relative offset between the calibrator 31 and the fastening bolt 32, the fastening bolt 32 can stably lock the calibrator 31, the first adjusting member 1 and the second adjusting member 2 in the adjusted state.

[0046] It is worth noting that the "relative offset between the calibrator 31 and the fastening bolt 32" refers to a state where the two have an angular change. For ease of explanation, in this embodiment, the central axis of the calibrator 31 is set in the vertical direction, the first adjusting member 1 is in a stationary state, and the calibrator 31 is screwed relative to the first adjusting member 1. That is, the calibrator 31 moves relative to the first adjusting member 1 in the vertical direction. The calibrator 31 forces the second adjusting member 2 to have a gap and / or angular change relative to the first adjusting member 1. At this time, the fastening bolt 32, which is threaded to the second threaded hole 21, moves with the second adjusting member 2, and the fastening bolt 32 tilts relative to the calibrator 31. During this process, the upper end face of the first shim 33 is always in contact with the lower end face of the fastening head 321, the lower end face of the first shim 33 slides relative to the upper end face of the upper curved section 314, and the upper end face of the second shim 34 slides relative to the lower end face of the lower curved section 315. The upper curved section 314 and the lower curved section 315 are centrally symmetrical about the direction of movement. After adjustment, the fastening bolt 32 is tightened onto the second adjusting component 2, locking the first adjusting component 1, the first shim 33, the calibration component 31, the second shim 34, and the second adjusting component 2 in the adjusted state. This configuration ensures that the stress among the components of the fine-tuning assembly 3 is balanced and safe. In this state, each component can not only effectively resist external forces and maintain its overall integrity and stability, but also avoid material damage or failure due to stress concentration or excessive stress.

[0047] In this embodiment, the fine-tuning components 3 are in three groups, arranged in a triangle, with the central axes of all three groups vertically aligned. Preferably, the three groups of fine-tuning components 3 form a right triangle, meaning one of the fine-tuning components 3 is located at the foot of the perpendicular. The two fine-tuning components 3 located on one of the right-angled sides are adjusted first. After adjusting the second fine-tuning component 3 along that right-angled side, the last fine-tuning component 3 is then adjusted to adjust the angle of the second adjusting member 2, thereby adjusting the verticality of the head fixed to the second adjusting member 2.

[0048] Example 2

[0049] like Figure 5 and Figure 6 As shown, the difference between this embodiment and Embodiment 1 is that the first adjusting member 1 located at the vertical foot is provided with a stabilizing component 4, which replaces the fine-tuning component 3 located at the vertical foot in Embodiment 1. The first adjusting member 1 has a first positioning hole 12 and a first positioning groove 13. The first positioning hole 12 is a through hole in the vertical direction, and the inner wall of the first positioning hole 12 is a smooth curved surface. The first positioning groove 13 is formed by recessing from the upper end face of the first adjusting member 1. The first positioning groove 13 communicates with the first positioning hole 12. Specifically, the first positioning groove 13 is a cylindrical groove, and the central axis of the first positioning groove 13 and the central axis of the first positioning hole 12 are both on the vertical foot.

[0050] The second adjusting member 2 has a second positioning hole 23 and a second positioning groove 24. The second positioning hole 23 is a through hole in the vertical direction, and the inner wall of the second positioning hole 23 is a threaded surface. The second positioning groove 24 is formed by recessing from the upper end face of the second adjusting member 2. The second positioning groove 24 and the second positioning hole 23 are connected. The bottom surface of the first adjusting member 1 has a third positioning groove 14 recessed. Specifically, the second positioning groove 24 and the third positioning groove 14 are both cylindrical grooves. The first positioning groove 13, the first positioning hole 12, the third positioning groove 14, the second positioning groove 24, and the second positioning hole 23 are connected in sequence.

[0051] like Figure 6As shown, the stabilizing component 4 includes a positioning bolt 41, a first fixing member 42 and a second fixing member 43. The first fixing member 42 is movably engaged with the first positioning groove 13, and the second fixing member 43 is movably engaged with the second positioning groove 24 and the third positioning groove 14. Specifically, the top end face of the second fixing member 43 abuts against the bottom surface of the third positioning groove 14, the bottom end face of the second fixing member 43 abuts against the bottom surface of the second positioning groove 24, the side wall of the portion of the second fixing member 43 located in the third positioning groove 14 abuts against the inner wall of the third positioning groove 14, and the side wall of the portion of the second fixing member 43 located in the second positioning groove 24 abuts against the inner wall of the second positioning groove 24. The vertical length of the second fixing member 43 is greater than the sum of the vertical depth of the third positioning groove 14 and the vertical depth of the second positioning groove 24. That is, when both ends of the second fixing member 43 are in abutting state, there is a gap between the first adjusting member 1 and the second adjusting member 2 in the vertical direction. The second fixing member 43 plays the role of supporting the first adjusting member 1 and the second adjusting member 2, so that the first adjusting member 1 and the second adjusting member 2 maintain a specific distance.

[0052] like Figure 7 and Figure 8 As shown, the positioning bolt 41 includes a positioning head 411 and a positioning screw 412. The positioning screw 412 is sequentially and movably inserted into the first fixing member 42, the first adjusting member 1, and the second fixing member 43. The second fixing member 43 has a through hole in the vertical direction to form a first channel 44. The inner wall of the first channel 44 is a smooth curved surface. The second adjusting member 2 has a second channel 45 that communicates with the first channel 44 in the vertical direction. The second channel 45 is a threaded hole. The diameter of the first channel 44 is larger than the diameter of the positioning screw 412. The positioning screw 412 can be adjusted in angle and position within the first channel 44. The positioning screw 412 is threadedly connected to the second adjusting member 2 in the second channel 45. The diameter of the positioning head 411 is larger than the diameter of the positioning screw 412, and the bottom end face of the positioning head 411 abuts against the first fixing member 42.

[0053] Preferably, the upper end face of the first fixing member 42 is an arc surface, and the lower end face of the second fixing member 43 is an arc surface. More preferably, the upper end face of the first fixing member 42 is a spherical surface, the lower end face of the second fixing member 43 is a spherical surface, and the curvature of the upper end face of the first fixing member 42, the lower end face of the second fixing member 43, the upper end face of the upper curved surface segment 314, and the lower end face of the lower curved surface segment 315 are the same.

[0054] A third gasket 46 is provided between the first fixing member 42 and the positioning head 411. The upper end surface of the third gasket 46 is a plane, and the lower end surface of the positioning head 411 is a plane. The upper end surface of the third gasket 46 and the lower end surface of the positioning head 411 are in contact. The lower end surface of the third gasket 46 is an arc surface that matches the upper end surface of the first fixing member 42. The third gasket 46 and the first fixing member 42 can slide relative to each other through the arc surface, so that the third gasket 46 and the first fixing member 42 are relatively misaligned.

[0055] The second positioning groove 24 is provided with a fourth gasket 47. The bottom end face of the fourth gasket 47 is a plane. The bottom surface of the fourth gasket 47 abuts against the bottom surface of the second positioning groove 24. The top end face of the fourth gasket 47 is an arc surface that matches the lower end face of the second fixing member 43. The fourth gasket 47 and the second fixing member 43 can slide relative to each other through the arc surface, so that the fourth gasket 47 and the second fixing member 43 are relatively misaligned.

[0056] Preferably, a set of stabilizing components 4, together with two sets of fine-tuning components 3, adjusts the second adjusting component 2. The three form a right triangle. The stabilizing component 4 is located at the foot of the perpendicular from the two right-angled sides. The stabilizing component 4 and one of the fine-tuning components 3 form one right-angled side, and the stabilizing component 4 and the other fine-tuning component 3 form the other right-angled side.

[0057] Preferably, the first gasket 33 and the third gasket 46 are located on the same horizontal plane, and the second gasket 34 and the fourth gasket 47 are located on another horizontal plane, and the two horizontal planes are parallel.

[0058] The adjustment method in this embodiment differs from that in Embodiment 1 in that, since the stabilizing component 4 positions the first adjusting member 1 and the second adjusting member 2 at a single point at the vertical foot, that is, it is fixed only at the vertical foot, the other positions of the second adjusting member 2 can be adjusted by the two fine-tuning components 3. The adjustment method has been described in detail in Embodiment 1 and will not be repeated here.

[0059] Example 3

[0060] The difference between this embodiment and embodiment 1 is that the first adjusting member 1 has a plurality of adjusting grooves 15, which are connected one-to-one with the first threaded hole 11 from the side. The tension of the adjusting groove is adjusted by adjusting bolts 16 to ensure the stability of the calibrator 31 located in the first threaded hole 11.

[0061] The above embodiments are merely illustrative of the technical concept and features of the present invention, intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and should not be construed as limiting the scope of protection of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of the present invention is defined by the appended claims rather than the foregoing description, and thus all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within the present invention.

Claims

1. A die bonder head verticality adjustment device, characterized in that, include: First adjustment component (1); The second adjusting member (2) is disposed at the bottom of the first adjusting member (1) along the first direction and is used to fix the head; The fine-tuning component (3) is used to adjust the first adjustment member (1) and the second adjustment member (2) along the first direction through multiple sets of the fine-tuning components (3). The fine-tuning component (3) is threadedly connected to the first adjustment member (1). The fine-tuning component (3) is detachably connected to the second adjustment member (2). The fine-tuning component (3) is screwed relative to the first adjustment member (1) to adjust the distance and angle between the second adjustment member (2) and the first adjustment member (1). The fine-tuning components (3) are in three groups, and the three groups of fine-tuning components (3) are distributed in a triangle in a plane perpendicular to the first direction; The first adjusting member (1) has a first threaded hole (11), and the second adjusting member (2) has a second threaded hole (21). The first threaded hole (11) and the second threaded hole (21) are coaxial along the first direction. The fine-tuning component (3) includes a calibration piece (31) and a fastening bolt (32). The calibration piece (31) is threaded into the first threaded hole (11), and the fastening bolt (32) is partially movably inserted into the calibration piece (31). The fastening bolt (32) is partially threaded into the first threaded hole (11). The calibration component (31) has a guide hole (313). The fastening bolt (32) includes a fastening head (321) and a fastening screw (322). The fastening screw (322) is slidably inserted into the guide hole (313). The diameter of the fastening screw (322) is smaller than the diameter of the guide hole (313). The fastening screw (322) is threadedly connected to the second threaded hole (21). The bottom surface of the fastening head (321) abuts against the top surface of the calibration component (31). The calibration component (31) includes a threaded section (311) and a screw-in section (312). The threaded section (311) is threadedly connected to the first threaded hole (11). The screw-in section (312) is fixed at one end of the threaded section (311) away from the second adjustment component (2). The screw-in section (312) is located outside the first adjustment component (1). The calibration component (31) further includes an upper curved surface segment (314) and a lower curved surface segment (315). The upper curved surface segment (314), the screw-in segment (312), the threaded segment (311), and the lower curved surface segment (315) are fixedly connected in sequence. The top end face of the upper curved surface segment (314) and the bottom end face of the lower curved surface segment (315) are both arc surfaces. A first gasket (33) is provided between the calibration component (31) and the fastening head (321), and a second gasket (34) is provided between the calibration component (31) and the second adjustment component (2). The contact surface between the first gasket (33) and the upper curved section (314) is an arc surface, and the contact surface between the second gasket (34) and the lower curved section (315) is an arc surface.

2. The die bonder head verticality adjustment device according to claim 1, characterized in that: The die bonder verticality adjustment device is provided with a stabilizing component (4) for fixing the first adjusting component (1) and the second adjusting component (2) at a single point. The stabilizing component (4) and the two sets of fine-tuning components (3) are arranged in a right-angled triangle. The stabilizing component (4) is located at the vertical foot.

3. The die bonder head verticality adjustment device according to claim 2, characterized in that: The stabilizing component (4) includes a positioning bolt (41), a first fixing member (42), and a second fixing member (43). The first fixing member (42), the first adjusting member (1), and the second fixing member (43) have a first channel (44) inside. The positioning bolt (41) is movably inserted into the first channel (44). The diameter of the first channel (44) is larger than the diameter of the positioning bolt (41), and the end of the positioning bolt (41) is threadedly connected to the second adjusting member (2).

4. The die bonder head verticality adjustment device according to claim 3, characterized in that: The positioning bolt (41) is movably fitted with a third washer (46) and a fourth washer (47). The third washer (46) is located between the positioning bolt (41) and the first fixing member (42). The lower end face of the third washer (46) and the upper end face of the first fixing member (42) are both arc surfaces. The fourth washer (47) is located between the second fixing member (43) and the second adjusting member (2). The upper end face of the fourth washer (47) and the lower end face of the second fixing member (43) are both arc surfaces.

5. The die bonder head verticality adjustment device according to claim 4, characterized in that: The first gasket (33) and the third gasket (46) are located in the same plane, and the second gasket (34) and the fourth gasket (47) are in the same plane.

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