Clamping device for clamping workpiece, carrying equipment and semiconductor inspection system

Abstract

An embodiment of the present application provides a clamping device for clamping a workpiece, a loading device, and a semiconductor detection system. The clamping device includes an air-bearing chuck, a self-locking cam, and a jaw. The self-locking cam is installed on one side of the air-bearing chuck. The side of the air-bearing chuck facing away from the self-locking cam is used to blow out gas so that the workpiece floats above the side of the air-bearing chuck facing away from the self-locking cam. The self-locking cam is provided with a cam groove. One end of the jaw is connected to the cam groove, and the other end of the jaw is used to abut against the peripheral wall of the workpiece. The cam groove includes a self-locking groove section, and the angle θ between the self-locking groove section and the radial direction of the self-locking cam satisfies the following condition: θ < arctan μ, where μ is the friction coefficient between the self-locking cam and the jaw, and the self-locking groove section is used to lock the jaw.

Description

Technical Field

[0006] ,

[0001] This application relates to the field of mechanical technology, and particularly to a clamping device for clamping workpieces, a carrying device, and a semiconductor detection system. Background Art

[0002] With the development of semiconductor technology, while the channel is miniaturized, the requirements for particulate contamination are becoming increasingly strict. For some machines with a need for double-sided cleanliness detection, a common chuck for detection is an air-floating workpiece clamping mechanism. To improve the detection efficiency of workpieces, a spiral scan without repeated acceleration and deceleration is commonly used. This scan method requires an extremely high rotational speed, usually above 1000 rpm. Since the workpiece is in an air-floating state, it is impossible to drive the workpiece through the frictional force between the upper surface of the chuck and the workpiece. The workpiece will only rotate under the action of the edge clamping force. When the jaws rotate at high speed, they will be subjected to a great centrifugal force, which will cause the jaws to loosen, affecting the clamping reliability. Summary of the Invention

[0003] An embodiment of this application provides a clamping device for clamping workpieces, a carrying device, and a semiconductor detection system, which can improve the clamping reliability.

[0004] In a first aspect, an embodiment of this application provides a clamping device. The clamping device includes an air-floating chuck, a self-locking cam, and jaws. The self-locking cam is installed on one side of the air-floating chuck. The side of the floating chuck facing away from the self-locking cam is used to blow out gas so that the workpiece floats above the side of the air-floating chuck facing away from the self-locking cam. The self-locking cam is provided with a cam groove. One end of the jaw is connected to the cam groove, and the other end of the jaw is used to abut against the circumferential wall of the workpiece. The cam groove includes a self-locking groove section. The included angle θ between the self-locking groove section and the radial direction of the self-locking cam satisfies the following condition: θ < arctanμ, where μ is the friction coefficient between the self-locking cam and the jaw. The self-locking groove section is used to lock the jaw. In the clamping device provided in this application, since the included angle θ between the self-locking groove section and the radial direction of the self-locking cam satisfies the following condition: θ < arctanμ, the jaw can be self-locked in the self-locking groove section, reducing the possibility that the jaw loosens the workpiece due to centrifugal force during high-speed rotation of the cam, the jaw, and the workpiece, and improving the clamping reliability of the clamping device.

[0005] According to the first aspect, in a possible implementation, the cam groove further includes an opening and closing groove section connected to the self-locking groove section. The friction angle of the self-locking groove section is smaller than the friction angle of the opening and closing groove section. When the jaw is connected to the opening and closing groove section, the jaw can move along the radial direction of the self-locking cam to abut against or release the circumferential wall of the workpiece.

[0006] According to the first aspect, in one possible implementation, the cam groove passes through the self-locking cam, and the gripper includes an arm body, a connecting part, and a clamping part. One end of the arm body is fixedly connected to the connecting part, and the other end of the arm body is fixedly connected to the clamping part. The connecting part and the clamping part are located on the same side of the arm body facing the air-floating chuck. The connecting part passes through the cam groove from the side of the cam groove away from the air-floating chuck. In this way, part of the arm body is located on the side of the self-locking cam away from the air-floating chuck, which helps to reduce the contact area between the gripper and the air-floating chuck, reduce the friction when the gripper moves relative to the air-floating chuck, and improve the smoothness of the gripper's movement relative to the air-floating chuck.

[0007] According to the first aspect, in one possible implementation, the air-bearing chuck further includes a first guide portion disposed on the side of the air-bearing chuck facing the self-locking cam, and the gripper further includes a second guide portion disposed on the arm body facing the air-bearing chuck. One of the first guide portion and the second guide portion includes a guide rail, and the other of the first guide portion and the second guide portion includes a guide groove. The guide groove extends radially along the self-locking cam, and the guide rail and the guide groove are slidably connected.

[0008] In this possible implementation, the first guide portion is used to engage with the gripper to guide and limit the radial movement of the gripper along the self-locking cam, thereby improving the stability and smoothness of the gripper's opening and closing motion.

[0009] According to the first aspect, in one possible implementation, there are multiple cam grooves, which are spaced apart circumferentially along the self-locking cam. There are also multiple grippers, which are spaced apart circumferentially along their respective sides, with each gripper connected to a corresponding cam groove. In the circumferential direction of the self-locking cam, the self-locking section of one cam groove is adjacent to the opening / closing section of another cam groove. The gripping portions of the multiple grippers are used to abut against the peripheral wall of the workpiece to cooperate in clamping or releasing the workpiece.

[0010] In this possible implementation, multiple grippers are arranged circumferentially, which can improve the force balance when the workpiece is gripped by the clamping device.

[0011] According to the first aspect, in one possible implementation, the clamping device further includes a drive mechanism connected to the self-locking cam, the drive mechanism being used to drive the self-locking cam to rotate. Thus, driving the self-locking cam to move via the drive mechanism improves the automation level of the clamping device.

[0012] According to the first aspect, in one possible implementation, the drive mechanism further includes a bracket, a drive member, a first transmission member, and a second transmission member. The bracket is fixed to the side of the air-floating chuck facing the self-locking cam, and the bracket and the air-floating chuck form a receiving space. The drive member is fixed to the side of the bracket facing away from the receiving space. A portion of the first transmission member is received in the receiving space and is movably connected to the air-floating chuck. The first transmission member is connected to the drive member, and the second transmission member is connected to the self-locking cam. The second transmission member is also connected to the first transmission member in a transmission connection.

[0013] In this possible implementation, the drive member is fixed to the side of the bracket away from the receiving space, and part of the first transmission member is received in the receiving space. In other words, the first transmission member is located between the air-floating chuck and part of the bracket to reduce the arrangement area of ​​the drive mechanism on the air-floating chuck.

[0014] According to the first aspect, in one possible implementation, the first transmission member includes a transmission gear, and the second transmission member includes a transmission rack, the transmission gear meshing with the transmission rack.

[0015] In this possible implementation, a transmission method using transmission gears and a transmission rack is employed, which features high transmission efficiency and a compact structure.

[0016] According to the first aspect, in one possible implementation, the air-bearing chuck is provided with a first air inlet and a second air inlet. The driving mechanism includes a driving member, which is provided with a third air inlet and a fourth air inlet. The clamping device further includes an adapter, a first pipeline, a second pipeline, a third pipeline, and a fourth pipeline. The adapter includes a first adapter inlet, a second adapter inlet, a first adapter outlet, a second adapter outlet, a third adapter outlet, and a fourth adapter outlet. The first adapter inlet is used to communicate with a first gas outlet of an air slip ring, and the second adapter inlet is used to communicate with a second gas outlet of the air slip ring, which is disposed on a turntable for driving the air-bearing chuck. The first pipeline is connected between the first adapter outlet and the first air inlet, the second pipeline is connected between the second adapter outlet and the second air inlet, the third pipeline is connected between the third adapter outlet and the third air inlet, and the third pipeline is connected between the fourth adapter outlet and the fourth air inlet.

[0017] In this possible implementation, the two air paths of the air slip ring are divided into four air paths by an adapter, so as to supply air to the air float chuck and the drive component, which simplifies the pipeline structure of the clamping device and helps to reduce the installation space.

[0018] According to the first aspect, in one possible implementation, the clamping device further includes a first flow-limiting gasket and a second flow-limiting gasket. The first flow-limiting gasket is disposed in the first pipeline and is used to regulate the pressure of the gas in the first pipeline. The second flow-limiting gasket is disposed in the second pipeline and is used to regulate the pressure of the gas in the second pipeline.

[0019] Secondly, one embodiment of this application also provides a carrying device, the carrying device including a turntable and a clamping device provided according to any possible implementation of the first aspect, the turntable being used to drive the air-floating chuck of the clamping device to rotate.

[0020] In a second aspect, this application provides a semiconductor inspection system, which includes a moving stage, an optical inspection device, and a carrying device according to the first aspect. The moving stage is used to carry and move a clamping device, and the optical inspection device is used to perform optical inspection on the workpiece clamped by the clamping device. Attached Figure Description

[0021] Figure 1 A schematic diagram of the structure of a semiconductor detection system provided in one embodiment of this application;

[0022] Figure 2 A perspective view of a clamping device clamping a workpiece according to an embodiment of this application;

[0023] Figure 3 A perspective view of a clamping device provided in one embodiment of this application;

[0024] Figure 4 A plan view of a self-locking cam provided for one embodiment of this application;

[0025] Figure 5 This is a schematic diagram of the air circuit connection between the air-float chuck, drive component, adapter component, air slip ring, and air supply device according to an embodiment of this application.

[0026] Figure 6 A schematic diagram of an adapter provided according to one embodiment of this application;

[0027] Figure 7 for Figure 6 A schematic diagram of the adapter from another perspective.

[0028] Figure label:

[0029] 100-Semiconductor testing system; 10-Moving stage; 101-Base; 103-Moving table; 20-Bearing device; 201-Turntable; 203-Clamping device; 22-Air float chuck; 2242-First surface; 2244-Second surface; 226-First guide section; 227-First air inlet; 228-Second air inlet; 24-Self-locking cam; 242-Cam groove; 2424-Opening and closing groove section; 2422-Self-locking groove section; 26-Gripper; 262-Arm body; 264-Connecting part; 266-Clamping part; 268-Second guide section; 28-Drive mechanism; 282-Bracket; 284-Driver; 2842-Third air inlet; 2844-Fourth air inlet; 286-First transmission component; 2 88-Second transmission component; 291-Transfer component; 2911-First transfer inlet; 2912-Second transfer inlet; 2913-First transfer outlet; 2914-Second transfer outlet; 2915-Third transfer outlet; 2916-Fourth transfer outlet; 292-First pipeline; 293-Second pipeline; 294-Third pipeline; 295-Fourth pipeline; 301-Air slip ring; 31-First part; 32-Second part; 313-First air inlet; 314-Second air inlet; 323-First gas outlet; 324-Second gas outlet; 297-First flow-limiting gasket; 298-Second flow-limiting gasket; 30-Transfer device; 40-Optical inspection device; 50-Gas supply device; 200-Workpiece. Detailed Implementation

[0030] Please see Figure 1 One embodiment of this application provides a semiconductor inspection system 100 for detecting whether a workpiece 200 has defects. The workpiece 200 can be a wafer, which is a carrier used to produce integrated circuits, that is, various circuit element structures can be fabricated on a wafer.

[0031] The semiconductor testing system 100 includes a moving stage 10, a carrier device 20, a transfer device 30, an optical testing device 40, and a gas supply device 50. The moving stage 10 is used to carry and move the carrier device 20.

[0032] In this embodiment, the movable stage 10 includes a base 101 and a movable platform 103 movably disposed on the base 101. For example, a boss can be provided on the side of the base 101 facing the movable platform 103, and a slide groove can be provided on the boss. A slide rail can be provided on the side of the movable platform 103 facing the base 101, and the slide rail is slidably disposed in the slide groove. In this way, the movable platform 103 can move relative to the base 101. The movable stage 10 can also be a robot, centrifuge, machine tool, etc., as long as the movable stage 10 can move the position of the supporting device 20.

[0033] The carrying device 20 includes a turntable 201 and a clamping device 203 disposed on the turntable 201. The turntable 201 is supported by the movable table 103. The clamping device 203 is used to clamp the workpiece 200. The transfer device 30 is used to transfer the workpiece 200 to the clamping device 203, for example, to transfer the workpiece 200 to be inspected from another position to the position of the clamping device 203. The optical inspection device 40 is used to perform optical inspection on the workpiece 200 clamped on the clamping device 203 to detect whether the workpiece 200 has defects. The optical inspection device 40 may include an objective lens, an illumination module, an imaging module, etc. Defects in the workpiece 200 may include undesirable contaminants, dents, protrusions, etc., caused during the manufacturing process. The transfer device 30 may be a robotic arm, a robot, etc. The air supply device 50 is used to connect to the clamping device 203 to supply air to the clamping device 203. It is understood that the moving stage 10 can be omitted. For example, if the optical inspection device 40 is already in a preset position, the workpiece 200 can be directly transferred to the clamping device 203 at the preset position via the transfer device 30. It is understood that the clamping device 203 is not limited to clamping wafers. The clamping device 203 can also be used to clamp other types of workpieces, such as masks, for defect detection.

[0034] With the development of semiconductor technology and the miniaturization of channels, the requirements for particulate matter contamination are becoming increasingly stringent. Air-floating workpiece clamping mechanisms are commonly used to hold workpieces and maintain the cleanliness of their opposing sides. An air-floating workpiece clamping mechanism includes a chuck, a cam, and a fixture. The chuck is used to air-float the workpiece. The fixture is connected to the cam, which drives the fixture to clamp or release the workpiece. Because the workpiece needs to be in an air-floating state, the chuck cannot drive the workpiece through the frictional force between the chuck's upper surface and the workpiece; the workpiece will only rotate under the clamping force applied by the fixture. The rotation speed of the chuck, fixture, and the workpiece held by the fixture may reach 1000 rpm or higher. When the fixture rotates at high speed, it is subjected to a large centrifugal force, which can cause the fixture to release the workpiece (i.e., the slider). The slider can cause the workpiece's position to shift, thus affecting the detection accuracy and quality of the optical inspection device. Therefore, there is an urgent need for a workpiece clamping device that can improve clamping reliability.

[0035] Based on this, please refer to Figure 2 and Figure 3 This application provides a clamping device 203 for clamping a workpiece 200. The clamping device 203 includes an air-floating chuck 22, a self-locking cam 24, and grippers 26. The self-locking cam 24 is mounted on one side of the air-floating chuck 22. The side of the air-floating chuck 22 opposite to the self-locking cam 24 is used to blow gas to suspend the workpiece 200 above the side of the air-floating chuck 22 opposite to the self-locking cam 24. The self-locking cam 24 is provided with a cam groove 242, and the grippers 26 are connected to the cam groove 242 and are used to clamp the workpiece 200. Please refer to the following reference. Figure 2 With Figure 4 , the cam groove 242 includes a self-locking groove section 2422. Please refer to Figure 4 The included angle θ between the radial direction of the self-locking groove section 2422 and the self-locking cam 24 satisfies the following condition: θ < arctan μ, where μ is the friction coefficient between the self-locking cam 24 and the jaw 26. The self-locking groove section 2422 is used to lock the jaw 26 to limit the movement of the jaw 26 along the radial direction of the self-locking cam 24.

[0036] Since the included angle between the self-locking groove section 2422 and the radial direction of the self-locking cam 24 is θ, let the centrifugal force acting on the jaw 26 be N, and the component force of the centrifugal force N in the tangential direction of the cam groove 242 is the driving force F, and the driving force F is N × cos θ. The frictional force f caused by the centrifugal force N is μ × N × sin θ. Obviously, when the frictional force f is greater than the driving force F, no matter how large the centrifugal force acting on the jaw 26 is, the jaw 26 will not slide relative to the self-locking cam, that is, the jaw 26 will not move along the radial direction of the self-locking cam to release the workpiece 200, thus achieving self-locking. Therefore, the self-locking condition of the clamping device 203 is μ > tan θ, or in other words, θ < arctan μ.

[0037] For the clamping device 203 provided in this application, since θ < arctan μ, the jaw 26 can be self-locked in the self-locking groove section 2422. When the self-locking cam 24, the jaw 26 and the workpiece 200 rotate at a high speed, it can reduce the possibility that the jaw 26 releases the workpiece 200 due to the centrifugal force and improve the clamping reliability of the clamping device 203.

[0038] The cam groove 242 further includes an opening and closing groove section 2424 connected to the self-locking groove section 2422. The friction angle of the self-locking groove section 2422 is smaller than the friction angle of the opening and closing groove section 2424. When the jaw 26 is connected to the opening and closing groove section 2424, the jaw 26 can move along the radial direction of the self-locking cam 24 to clamp or release the workpiece 200. The opening and closing groove section 2424 extends along the circumferential direction of the self-locking cam 24 to increase the radial stroke of the jaw 26 on the self-locking cam 24, that is, a greater degree of opening and closing, to adapt to workpieces 200 of different sizes. For example, when the workpiece 200 is a wafer, it can increase the success rate of loading the wafer in the workpiece transfer system (Wafer Transfer System, EFEM).

[0039] The self-locking groove segment 2422 is generally an arc-shaped groove, where θ is the angle between the tangent of the self-locking groove segment 2422 and the self-locking cam 24. The opening and closing groove segment 2424 is also generally an arc-shaped groove. It is understood that this application does not limit the structure and shape of the self-locking groove segment 2422. For example, the self-locking groove segment 2422 can also be a straight groove, where θ is the angle between the extension direction of the self-locking groove segment 2422 and the self-locking cam 24; or, the self-locking groove segment 2422 may include straight segments and arc segments, etc. This application does not limit the structure and shape of the opening and closing groove segment 2424. The opening and closing groove segment 2424 can be a straight groove, or, the opening and closing groove segment 2424 may include straight segments and arc segments.

[0040] Please refer to the following: Figure 2 and Figure 3 The air-floating chuck 22 includes a first surface 2242 and a second surface 2244 disposed opposite to each other. The second surface 2244 faces the self-locking cam 24. The first surface 2242 is provided with air holes for outputting gas, so that the workpiece 200 is suspended above the side of the first surface 2242 away from the second surface 2244. When the workpiece 200 is suspended above the first surface 2242, the workpiece 200 does not come into contact with the first surface 2242 to avoid contamination of the workpiece 200. The first surface 2242 has multiple air holes, which can be arranged regularly on the first surface 2242. For example, the multiple air holes can be divided into multiple groups, and the multiple groups of air holes are distributed along the circumferential direction of the air-floating chuck 22. The multiple air holes in each group are arranged radially along the self-locking cam 24, which can improve the force balance of the workpiece 200. It is understood that this application does not limit the arrangement of the air holes, and the multiple air holes can also be arranged irregularly, and the number of air holes can be one. The turntable 201 is connected to the second surface 2244 of the air-float chuck 22, and the turntable 201 is used to drive the air-float chuck 22 to rotate. The self-locking cam 24 can rotate with the air-float chuck 22, and the self-locking cam 24 is coaxially arranged with the air-float chuck 22.

[0041] The gripper 26 includes an arm 262, a connecting portion 264, and a clamping portion 266. One end of the arm 262 is fixedly connected to the connecting portion 264, and the other end of the arm 262 is fixedly connected to the clamping portion 266. The connecting portion 264 is used to pass through the cam groove 242 and can move along the cam groove 242. The clamping portion 266 is used to abut against the peripheral wall of the workpiece 200. In some embodiments of this application, the connecting portion 264 and the clamping portion 266 are located on the same side of the arm 262 facing the air chuck 22. The connecting portion 264 passes through the cam groove 242 from the side of the cam groove 242 away from the air chuck 22. In this way, part of the arm 262 is located on the side of the self-locking cam 24 away from the air chuck 22, which helps to reduce the contact area between the gripper 26 and the air chuck 22, reduce the friction when the gripper 26 moves relative to the air chuck 22, and improve the smoothness of the movement of the gripper 26 relative to the air chuck 22. It is understandable that the connecting part 264 and the clamping part 266 can be located on different sides of the arm body 262. The connecting part 264 passes through the cam groove 242 and can move along the cam groove 242. The clamping part 266 can abut against the workpiece 200.

[0042] The air-floating chuck 22 also includes a first guide portion 226 disposed on the second surface 2244, which is used to engage with the gripper 26. The gripper 26 also includes a second guide portion 268 disposed on the side of the arm body 262 facing the air-floating chuck 22. The second guide portion 268 is slidably connected to the first guide portion 226. The first guide portion 226 includes a guide groove, and the second guide portion 268 includes a guide rail. The guide groove extends radially along the self-locking cam 24, and at least a portion of the guide rail is received in the guide groove. The guide rail can move along the guide groove. The guide groove can guide and limit the radial movement of the gripper 26 along the self-locking cam 24. That is, the guide groove can restrict the degree of freedom of movement of the gripper 26, thereby improving the stability and smoothness of the opening and closing movement of the gripper 26.

[0043] It is understood that in some embodiments, the air-floating chuck 22 includes a first guide portion 226 disposed on the side of the air-floating chuck 22 facing the self-locking cam 24, and the gripper 26 also includes a second guide portion 268 disposed on the arm body 262 facing the air-floating chuck 22. One of the first guide portion 226 and the second guide portion 268 includes a guide rail, and the other of the first guide portion 226 and the second guide portion 268 includes a guide groove. The guide groove extends radially along the self-locking cam 24, and the guide rail and the guide groove are slidably connected.

[0044] In this embodiment, there are multiple cam grooves 242, which are spaced apart circumferentially along the self-locking cam 24. In the circumferential direction of the self-locking cam 24, the self-locking groove segment 2422 of one cam groove 242 is adjacent to the opening / closing groove segment 2424 of another cam groove 242. The clamping portions 266 of the multiple grippers 26 are used to abut against the peripheral wall of the workpiece 200 to jointly clamp or release the workpiece 200. The multiple grippers 26 are all arranged circumferentially, which improves the force balance when the workpiece 200 is clamped by the clamping device 203. It is understood that the number of grippers 26 can be one, and the number of cam grooves 242 can be one. For example, when the number of cam grooves 242 is one, the air chuck 22 also includes a limiting bar. The limiting bar can protrude from the first surface 2242 or the peripheral wall of the air chuck 22. The peripheral wall of the workpiece 200 above the first surface 2242 abuts against the limiting bar. The movement of one gripper 26 along the opening and closing groove section 2424 can realize the clamping or releasing of the workpiece 200.

[0045] The clamping device 203 includes an open state, a closed state, and a self-locking state. The gripper 26 moves radially outward from the self-locking cam 24 to put the clamping device 203 in the open state. The gripper 26 moves radially towards the center of the self-locking cam 24 to put the clamping device 203 in the closed state. The gripper 26 is locked within the self-locking groove section 2422, and the clamping device 203 is in the self-locking state.

[0046] The clamping device 203 also includes a drive mechanism 28 connected to the self-locking cam 24. The drive mechanism 28 is used to drive the self-locking cam 24 to rotate relative to the air float chuck 22 so that the gripper 26 can move radially along the self-locking cam 24, thereby enabling the gripper 26 to clamp the workpiece 200, or release the workpiece 200, or self-lock to the self-locking cam 24.

[0047] The drive mechanism 28 includes a bracket 282, a drive member 284, a first transmission member 286, and a second transmission member 288. The bracket 282 is fixed to the second surface 2244. The bracket 282 and the air-floating chuck 22 form a receiving space. The drive member 284 is fixed to the side of the bracket 282 opposite to the air-floating chuck 22 and is used to provide driving force to the self-locking cam 24. Driving the self-locking cam 24 through the drive member 284 helps to improve the automation level of the clamping device 203. The first transmission member 286 is mounted on the second surface 2244, and part of the first transmission member 286 is received within the receiving space. In other words, the first transmission member 286 is located between the air-floating chuck 22 and part of the bracket 282 to reduce the arrangement area of ​​the drive mechanism 28 on the air-floating chuck 22. The second transmission member 288 is mounted on the self-locking cam 24. The drive member 284 is connected to the first transmission member 286, and the second transmission member 288 is drively connected to the first transmission member 286. The drive member 284 is used to drive the self-locking cam 24 to rotate through the first transmission member 286 and the second transmission member 288, thereby realizing the radial movement of the gripper 26 along the self-locking cam 24.

[0048] In this embodiment, the driving component 284 is a rotary cylinder, the first transmission component 286 includes a transmission gear, and the rotating shaft of the driving component 284 can pass through the bracket 282 and be connected to the first transmission component 286. The second transmission component 288 includes a transmission rack, and the transmission gear meshes with the transmission rack. The rotation of the driving component 284 drives the first transmission component 286 to rotate, and the first transmission component 286 drives the second transmission component 288 and the self-locking cam 24 to rotate. The use of a transmission gear and transmission rack for transmission has the characteristics of high transmission efficiency and compact structure.

[0049] It is understood that this application does not limit the first transmission member 286 to a transmission gear, nor does it limit the second transmission member 288 to a transmission rack. The driving member 284 can be connected to the self-locking cam 24 through other transmission structures. This application may also omit the bracket 282 and the second transmission member 288. In other words, the driving mechanism 28 includes the driving member 284 and the first transmission member 286. The driving member 284 drives the self-locking cam 24 to rotate through the first transmission member 286. For example, the first transmission member 286 can be a transmission shaft, and the driving member 284 is connected to the self-locking cam 24 through the transmission shaft. This application does not limit the driving member 284 to a rotary cylinder. For example, the driving member 284 can be a linear cylinder, and the driving member 284 converts linear motion into rotary motion through the first transmission member 286 to drive the self-locking cam 24 to rotate. The driving member 284 may also not be a cylinder; for example, the driving member 284 can be a motor, hydraulic cylinder, or other types of driving mechanisms 28.

[0050] In traditional technology, a slip ring is installed in the turntable to connect with the air supply device and the clamping device, thereby delivering gas from the air supply device to the clamping device. Air-float chucks typically have two air inlets, and drive components typically have two air inlets. To accommodate the turntable's size, the slip ring usually only has two inlets and two outlets. If simultaneous air supply to the air-float chuck and the rotating cylinder is required, two sets of related air circuits are needed. This results in a complex piping structure and occupies a significant amount of installation space.

[0051] In this embodiment, please refer to Figure 4 and Figure 5 The air flotation chuck 22 is provided with a first air inlet 227 and a second air inlet 228, and the drive unit 284 is provided with a third air inlet 2842 and a fourth air inlet 2844.

[0052] The turntable 201 is equipped with an air slip ring 301, which enables airflow between the clamping device 203 and the air supply device 50. The air slip ring 301 includes a first part 31 and a second part 32 connected together and rotatable relative to each other. For example, the first part 31 is located on the main body of the turntable 201, and the second part 32 is located on the rotation axis of the turntable 201. The rotation axis is rotatably mounted on the main body and is used to drive the air-bearing chuck 22 to rotate.

[0053] The first part 31 is provided with a first air inlet 313 and a second air inlet 314, which can be connected to and communicate with the air supply device 50 through pipes. The second part 32 is provided with a first gas outlet 323 and a second gas outlet 324.

[0054] The clamping device 203 also includes an adapter 291, a first conduit 292, a second conduit 293, a third conduit 294, and a fourth conduit 295. Please refer to the following references. Figure 5 , Figure 6 and Figure 7The adapter 291 includes a first adapter inlet 2911, a second adapter inlet 2912, a first adapter outlet 2913, a second adapter outlet 2914, a third adapter outlet 2915, and a fourth adapter outlet 2916. The first adapter inlet 2911 is used to communicate with the first gas outlet 323, and the second adapter inlet 2912 is used to communicate with the second gas outlet 324. A first conduit 292 connects the first adapter outlet 2913 and the first gas inlet 227, and a second conduit 293 connects the second adapter outlet 2914 and the second gas inlet 228. A third conduit 294 connects the third adapter outlet 2915 and the third gas inlet 2942, and the fourth adapter outlet 2916 connects the fourth gas inlet 2944. In this way, the two air paths of the air slip ring 301 are divided into four air paths through the adapter 291, so as to supply air to the air float chuck 22 and the drive component 284, which simplifies the pipeline structure of the clamping device 203 and helps to reduce the installation space.

[0055] The driving component 284 and the air-floating chuck 22 require different gas pressures. The gas clamping device 203 also includes a first flow-limiting gasket 297 and a second flow-limiting gasket 298. The first flow-limiting gasket 297 is disposed in the first pipeline 292 and is used to regulate the gas pressure from the first pipeline 292. The second flow-limiting gasket 298 is disposed in the second pipeline 293 and is used to regulate the gas pressure from the second pipeline 293. In this embodiment, the air-floating chuck 22 requires lower gas pressure than the drive unit 284. Through the first flow-limiting gasket 297 and the second flow-limiting gasket 298, the gas pressure in the first pipeline 292 is lower than the gas pressure in the third pipeline 294, the gas pressure in the first pipeline 292 is lower than the gas pressure in the fourth pipeline 295, the gas pressure in the second pipeline 293 is lower than the gas pressure in the third pipeline 294, and the gas pressure in the second pipeline 293 is lower than the gas pressure in the fourth pipeline 295. As a result, the workpiece 200 can be stably suspended on the air-floating chuck 22, and the drive unit 284 can obtain the required driving force. It can be understood that the gas pressure in the first pipeline 292 is different from the gas pressure in the third pipeline 294, the gas pressure in the first pipeline 292 is different from the gas pressure in the fourth pipeline 295, the gas pressure in the second pipeline 293 is different from the gas pressure in the third pipeline 294, and the gas pressure in the second pipeline 293 is different from the gas pressure in the fourth pipeline 295.

[0056] Please refer to the reference again. Figure 1 , Figure 2 and Figure 4Assuming workpiece 200 is placed at the junction plate position, the moving table 10 transports the clamping device 203 to the junction plate position, and the air supply equipment supplies air. The driving component 284 can drive the self-locking cam 24 to rotate, and one end of the gripper 26 moves along the opening and closing groove section 2424 of the cam groove 242, so that the gripper 26 moves radially towards the outside of the self-locking cam 24, and the clamping device 203 is in the open state. The workpiece 200 is transported by the transfer device 30 to the top of the air-floating chuck 22 and is suspended. The driving component 284 can drive the self-locking cam 24 to rotate, so that the gripper 26 moves radially towards the center of the self-locking cam 24, and the clamping device 203 is in the closed state until the gripper 26 abuts against the peripheral wall of the workpiece 200, thus clamping the workpiece 200. The gripper 26 continues to move along the cam groove 242 and reaches the self-locking groove section 2422, where it locks itself in place. The clamping device 203 is then in a self-locking state. The moving stage 10, which carries the clamping device 203, moves to the optical inspection device 40.

[0057] The rotating shaft of the turntable 201 drives the air-floating chuck 22 to rotate at high speed, and the optical detection device 40 begins to acquire images, which can also be called scanning. Since the clamping device 203 is in a self-locking state when the air-floating chuck 22 rotates at high speed, it avoids or reduces the possibility that the gripper 26 will release the workpiece 200 due to centrifugal force, thus improving the clamping reliability of the clamping device 203.

[0058] After scanning is completed, the transfer device 30 removes the workpiece 200, and the moving table 10 can return to the handover position to carry out the next round of workpiece 200 inspection.

[0059] It should be understood that expressions such as “comprising” and “may include” used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as “comprising” and / or “having” are to be interpreted as indicating a particular characteristic, number, operation, constituent element, component, or combination thereof, but not to exclude the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0060] Furthermore, in this application, the expression "and / or" includes any and all combinations of the associated listed words. For example, the expression "A and / or B" may include A, may include B, or may include both A and B.

[0061] In this application, expressions including ordinal numbers such as "first" and "second" may modify the elements. However, such elements are not limited by the foregoing expressions. For example, the foregoing expressions do not limit the order and / or importance of the elements. The foregoing expressions are only used to distinguish one element from other elements. For example, "first user device" and "second user device" refer to different user devices, although both "first user device" and "second user device" are user devices. Similarly, without departing from the scope of this application, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

[0062] When a component is referred to as "connected" or "accessed" to other components, it should be understood that this component not only connects directly to or accesses other components, but also that another component may exist between this component and other components. On the other hand, when a component is referred to as "directly connected" or "directly accessed" to other components, it should be understood that no component exists between them.

[0063] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A clamping device (203), characterized in that, The clamping device (203) includes an air-floating chuck (22), a self-locking cam (24), and a jaw (26). The self-locking cam (24) is installed on one side of the air-floating chuck (22). The side of the air-floating chuck (22) facing away from the self-locking cam (24) is used to blow out gas so that the workpiece (200) floats above the side of the air-floating chuck (22) facing away from the self-locking cam (24). The self-locking cam (24) is provided with a cam groove (242). One end of the jaw (26) is connected to the cam groove (242), and the other end of the jaw (26) is used to abut against the circumferential wall of the workpiece (200). The cam groove (242) includes a self-locking groove section (2422). The included angle θ between the self-locking groove section (2422) and the radial direction of the self-locking cam (24) satisfies the following condition: θ < arctanμ, where μ is the friction coefficient between the self-locking cam (24) and the jaw (26). The self-locking groove section (2422) is used to lock the jaw (26).

2. The clamping device (203) according to claim 1, characterized in that, The cam groove (242) further includes an opening / closing groove section (2424) connected to the self-locking groove section (2422). The friction angle of the self-locking groove section (2422) is smaller than the friction angle of the opening / closing groove section (2424). When the jaw (26) is connected to the opening / closing groove section (2424), the jaw (26) can move along the radial direction of the self-locking cam (24) to abut against or release the circumferential wall of the workpiece (200).

3. The clamping device (203) according to claim 2, characterized in that, The number of the cam grooves (242) is multiple, and the multiple cam grooves (242) are arranged at intervals along the circumferential direction of the self-locking cam (24). The number of the jaws (26) is multiple, and the multiple jaws (26) are arranged at intervals along the circumferential direction of the jaws (26). Each jaw (26) is connected to a corresponding cam groove (242). For two adjacent cam grooves (242), in the circumferential direction of the self-locking cam (24), the self-locking groove section (2422) of one cam groove (242) is adjacent to the opening / closing groove section (2424) of the other cam groove (242). The clamping portions (266) of the multiple jaws (26) are used to abut against the circumferential wall of the workpiece (200) to cooperate with each other to clamp or release the workpiece (200).

4. The clamping device (203) according to claim 1, characterized in that, The cam groove (242) penetrates through the self-locking cam (24). The jaw (26) includes an arm body (262), a connecting portion (264), and a clamping portion (266). One end of the arm body (262) is fixedly connected to the connecting portion (264), and the other end of the arm body (262) is fixedly connected to the clamping portion (266). The connecting portion (264) and the clamping portion (266) are arranged on the same side of the arm body (262) facing the air-floating chuck (22). The connecting portion (264) penetrates into the cam groove (242) from the side of the cam groove (242) facing away from the air-floating chuck (22).

5. The clamping device (203) according to claim 4, characterized in that, The air-floating chuck (22) further includes a first guide portion (226) disposed on the side of the air-floating chuck (22) facing the self-locking cam (24), and the gripper (26) further includes a second guide portion (268) disposed on the arm body (262) facing the air-floating chuck (22). One of the first guide portion (226) and the second guide portion (268) includes a guide rail, and the other of the first guide portion (226) and the second guide portion (268) includes a guide groove. The guide groove extends radially along the self-locking cam (24), and the guide rail is slidably connected to the guide groove.

6. The clamping device (203) according to claim 1, characterized in that, The clamping device (203) further includes a drive mechanism (28) connected to the self-locking cam (24), the drive mechanism (28) being used to drive the self-locking cam (24) to rotate.

7. The clamping device (203) according to claim 6, characterized in that, The drive mechanism (28) includes a bracket (282), a drive member (284), a first transmission member (286), and a second transmission member (288). The bracket (282) is fixed to the side of the air-floating chuck (22) facing the self-locking cam (24). The bracket (282) and the air-floating chuck (22) form a receiving space. The drive member (284) is fixed to the side of the bracket (282) away from the receiving space. A portion of the first transmission member (286) is received in the receiving space and is movably connected to the air-floating chuck (22). The first transmission member (286) is connected to the drive member (284). The second transmission member (288) is connected to the self-locking cam (24). The second transmission member (288) is drively connected to the first transmission member (286).

8. The clamping device (203) according to claim 7, characterized in that, The first transmission component (286) includes a transmission gear, and the second transmission component (288) includes a transmission rack, wherein the transmission gear meshes with the transmission rack.

9. The clamping device (203) according to claim 6, characterized in that, The air flotation chuck (22) is provided with a first air inlet (227) and a second air inlet (228); The drive mechanism (28) includes a drive member (284), which is provided with a third air inlet (2842) and a fourth air inlet (2844). The clamping device (203) further includes an adapter (291), a first pipe (292), a second pipe (293), a third pipe (294), and a fourth pipe (295); The adapter (291) includes a first adapter inlet (2911), a second adapter inlet (2912), a first adapter outlet (2913), a second adapter outlet (2914), a third adapter outlet (2915), and a fourth adapter outlet (2916). The first adapter inlet (2911) is used to communicate with the first gas outlet (323) of the air slip ring (301), and the second adapter inlet (2912) is used to communicate with the second gas outlet (324) of the air slip ring. The air slip ring is installed on a turntable (201) used to drive the air float chuck (22) to move. The first pipe (292) is connected between the first adapter outlet (2913) and the first air inlet (226), the second pipe (293) is connected between the second adapter outlet (2914) and the second air inlet (228), the third pipe (294) is connected between the third adapter outlet (2915) and the third air inlet (2842), and the third pipe (294) is connected between the fourth adapter outlet (2916) and the fourth air inlet (2844).

10. The clamping device (203) according to claim 9, characterized in that, The clamping device (203) further includes a first flow-limiting pad (297) and a second flow-limiting pad (298); The first flow-limiting gasket (297) is disposed in the first pipeline (292). The first flow-limiting gasket (297) is located in the first pipeline (292) and is used to regulate the gas pressure in the first pipeline (292). The second flow-limiting gasket (298) is disposed in the second pipeline (293). The second flow-limiting gasket (298) is located in the second pipeline (293) and is used to regulate the gas pressure in the second pipeline (294).

11. A supporting device (20), characterized in that, The carrying device (20) includes a turntable (201) and a clamping device (203) according to any one of claims 1-10, wherein the turntable (201) is used to drive the air-floating chuck (22) of the clamping device (203) to rotate.

12. A semiconductor detection system (100), characterized in that, The semiconductor inspection system (100) includes a moving stage (10), an optical inspection device (40), and a carrier device (20) according to claim 11. The moving stage (10) is used to carry and move the clamping device (203), and the optical inspection device (40) is used to perform optical inspection on the workpiece (200) clamped by the clamping device (203).

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