Substrate support apparatus and substrate processing apparatus

Abstract

The purpose of the present invention is to provide a substrate support device and a substrate processing device which are capable of supporting a portion of a substrate that is extremely close to an end portion by means of a support pin even when a support plate for supporting the substrate is provided. The printing apparatus includes: a lifting table that lifts and lowers below a substrate positioned at a predetermined position; and a support plate which is provided so as to be movable in the vertical direction, and which supports the substrate positioned at the predetermined position from below by being pushed up by the rising lift table. The supporting pin is provided with a base part arranged on the lifting platform and a supporting part which is smaller than the base part in diameter and extends upwards from the base part. A plate lower edge formed by a portion of a lower edge of the support plate that faces an upper surface of the lift table is positioned above a base portion of a support pin provided on the lift table and supporting the substrate.

Description

Technical Field

[0001] The present invention relates to a substrate supporting device for supporting a substrate and a substrate processing device equipped with the substrate supporting device. Background Art

[0002] Conventionally, as substrate processing devices for performing predetermined processing on a substrate, for example, a printing device for applying a paste such as solder to a substrate, a component mounting device for mounting components on a substrate, and the like are known. In such a substrate processing device, a substrate supporting device is provided, and the substrate supporting device includes: a lifting table that is lifted and lowered below a substrate positioned at a predetermined position by a pair of transport rails; and support pins that are arranged on the upper surface of the lifting table and support the substrate from below. In the component mounting device, there is also a case where the substrate supporting device includes a support plate that is pushed up by the lifting table and supports the end of the substrate from below (for example, refer to the following patent documents 1 and 2).

[0003] Here, in addition to a structure in which the base of the support pin is inserted into an insertion hole formed in a matrix shape on the upper surface of the lifting platform (for example, Patent Document 1), there is also a structure having a base provided on the upper surface of the lifting platform and a support portion extending upward from the base and abutting against the lower surface of the substrate, and becoming a structure in which the support pin can be set at any position on the lifting platform by the magnetic force acting between the base and the lifting platform (for example, Patent Document 2).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-149433

[0007] Patent Document 2: Japanese Patent Application Publication No. 2012-59976 Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, as in the above-mentioned Patent Document 2, even if the support pin can be set at any position on the upper surface of the lifting platform, the substrate can be supported near the end portion by means of the support pin, there is a limit to the extent to which the side surface of the base of the support pin contacts the support plate, and the support portion cannot be brought closer to the support plate to support the end portion of the substrate by means of the support pin.

[0010] Therefore, an object of the present invention is to provide a substrate supporting device capable of supporting a portion of a substrate extremely close to an end portion by supporting pins even when a supporting plate for supporting the substrate is provided, and a substrate processing apparatus including the substrate supporting device.

[0011] Means for solving problems

[0012] The support member is a pair of support members which are each provided with a plurality of support members which are movable along the length of the support member, and the plurality of support members are provided with support members which are movable along the length of the support member.

[0013] A substrate processing apparatus according to the present invention includes the substrate support device according to the present invention, and performs a predetermined process on the substrate supported by the substrate support device.

[0014] Effects of the Invention

[0015] According to the present invention, even when a support plate for supporting the substrate is provided, a portion of the substrate extremely close to the end portion can be supported by the support pins. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a perspective view of a printing device according to one embodiment of the present invention.

[0017] Figure 2 This is a side view of a printing device according to one embodiment of the present invention.

[0018] Figure 3 It is a side view of a substrate conveyance and holding portion provided in the printing apparatus according to one embodiment of the present invention.

[0019] Figure 4 It is a perspective view of a substrate transport and holding portion according to one embodiment of the present invention.

[0020] Figure 5 This is a perspective view of a support pin included in a printing device according to an embodiment of the present invention.

[0021] Figure 6 (a), (b), and (c) are diagrams for explaining the operation of the substrate transport and holding unit according to one embodiment of the present invention.

[0022] Figure 7 This is an exploded perspective view of a part of a substrate transport and holding unit according to one embodiment of the present invention.

[0023] Figure 8 This is a perspective view of a part of a substrate transport and holding unit according to one embodiment of the present invention.

[0024] Fig. 9 This is a perspective view of a part of a substrate transport and holding unit according to one embodiment of the present invention.

[0025] Fig.10 (a) and (b) are enlarged side views of a substrate transport holding portion according to an embodiment of the present invention.

[0026] Fig.11 (a) and (b) are perspective views for explaining the structure and operation of a positioning guide included in a substrate transport holding portion according to an embodiment of the present invention.

[0027] Fig.12 This is a block diagram showing a control system of a printing apparatus according to one embodiment of the present invention.

[0028] Fig.13 (a) and (b) are plan views of a substrate transport and holding portion according to an embodiment of the present invention.

[0029] Fig.14 (a) and (b) are diagrams for explaining the relationship between the support plate and the support pins included in the substrate transport and holding portion according to one embodiment of the present invention.

[0030] Fig.15 It is an enlarged side view of a substrate transport holding portion according to one embodiment of the present invention.

[0031] Fig.16 (a) and (b) are plan views of a substrate transport and holding portion according to an embodiment of the present invention.

[0032] Fig.17 (a) and (b) are perspective views for explaining the operation of the transport rail included in the substrate transport holding unit according to one embodiment of the present invention.

[0033] Fig.18 (a) and (b) are plan views of a substrate transport and holding portion according to an embodiment of the present invention.

[0034] Fig.19 This is a side view of a printing device according to an embodiment of the present invention in which a suction box is installed instead of a support pin.

[0035] Fig. 20 (a) and (b) are plan views of a substrate transport and holding portion according to an embodiment of the present invention.

[0036] Fig.21 (a) and (b) are side views of a substrate transport and holding portion according to an embodiment of the present invention.

[0037] Description of reference numerals:

[0038] 1 Printing device (substrate processing device)

[0039] 13 Substrate transport and holding unit (substrate support device)

[0040] 14 Mask

[0041] 21 Transport track

[0042] 22 Lifting base

[0043] 23 Elevator

[0044] 24 Lifting platform

[0045] 24R Support pin setting area

[0046] 25 Support pin

[0047] 25a Base

[0048] 25b Supporting part

[0049] 25T Top

[0050] 26 Support plate

[0051] 26F lower edge of board

[0052] 28 Positioning guide

[0053] 28G Notch

[0054] 33 Butt part

[0055] 34 Force application spring (force application unit)

[0056] KB Substrate

[0057] Pst ointment. DETAILED DESCRIPTION

[0058] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figure 1 and Figure 2A printing device 1 is shown as an embodiment of a substrate processing device that performs a prescribed process on a substrate KB. The printing device 1 is a device that carries in a substrate KB and positions it, performs a process (paste coating process) of printing a paste Pst such as solder on an electrode pattern DK provided on the upper surface of the substrate KB, and carries it out to the outside. In this embodiment, for the convenience of explanation, the direction of conveying the substrate KB (the left-right direction observed by the operator OP) is set to the X direction. In addition, the direction orthogonal to the X direction in the horizontal plane (the front-back direction observed by the operator OP) is set to the Y direction, and the up-down direction is set to the Z direction. Furthermore, the near front side observed by the operator OP in the Y direction is set to the front, and the deep side observed by the operator OP is set to the rear.

[0059] exist Figure 1 and Figure 2 In the figure, a substrate conveyance holding unit 13 is provided on a base 11 provided in the printing apparatus 1 via an XYZ moving mechanism 12. The substrate conveyance holding unit 13 corresponds to a substrate support device as a device for supporting the substrate KB in the printing apparatus 1.

[0060] exist Figure 1 and Figure 2 In the embodiment, the mask 14 is disposed in a horizontal posture above the substrate conveyance and holding portion 13. The print head 15 is disposed above the mask 14 so as to be movable in the Y direction.

[0061] exist Figure 3 In the figure, the substrate transport holding unit 13 includes a pair of front and rear transport rails 21 , an elevating base 22 , an elevator 23 , an elevating table 24 , a plurality of support pins 25 , a pair of front and rear support plates 26 , a pair of clampers 27 , and a positioning guide 28 .

[0062] like Figure 3 and Figure 4 As shown, the front and rear pair of transport rails 21 are respectively provided with a conveyor base 21a extending in the left-right direction (X direction), left and right conveyor base support parts 21b extending downward from the left and right ends of the conveyor base 21a, and a conveyor 21c provided on the inner surface side of the conveyor base 21a (the side opposite to the two transport rails 21) and extending in the X direction. The pair of transport rails 21 are arranged opposite to each other in the Y direction (front-back direction), and the substrate KB sent from the outside is brought in in the X direction by the pair of conveyors 21c and positioned at a predetermined working position.

[0063] exist Figure 3 and Figure 4 In the embodiment, the lifting base 22 is composed of a plate-shaped member extending in the XY plane. The lifting base 22 is supported in a horizontal posture by the XYZ moving mechanism 12. Rail moving guides 22G extending in the Y direction are provided at both left and right ends of the lifting base 22, respectively.

[0064] The lower ends of the left and right conveyor base support parts 21b of the conveyor rail 21 located on the front side of the two front and rear conveyor rails 21 are respectively fixed to the left and right rail moving guides 22G. On the other hand, the lower ends of the left and right conveyor base support parts 21b of the conveyor rail 21 located on the rear side of the two front and rear conveyor rails 21 are respectively attached to the left and right rail moving guides 22G via the sliding members 21d fixed to the lower ends thereof.

[0065] The sliding member 21d provided at the lower end of the left and right conveyor base support parts 21b slides in the front-back direction along the rail moving guide 22G, so that the transport rail 21 located at the rear side can move in the front-back direction. Therefore, in the printing device 1 of this embodiment, the transport rail 21 located at the rear side can be moved closer to or away from the transport rail 21 located at the front side, thereby transporting a variety of substrates KB of different sizes and positioning them at the working position.

[0066] The lift 23 is mounted on the lift base 22, and causes the lift table 24 to be lifted and lowered relative to the lift base 22 (moved in the Z direction). The lift table 24 is composed of a block-shaped member extending along the XY plane, and is located below between the pair of conveying rails 21. The upper surface portion of the lift table 24 is composed of a magnetic material. The lift table 24 moves upward (rises) from the lowest position, i.e., the "lowest descending position", by means of the lift 23, and moves (descends) from the position moved upward to the lowest descending position.

[0067] A plurality of support pins 25 are respectively mounted on the upper surface of the lifting platform 24. Figure 5 As shown, each support pin 25 includes a base 25a provided on the upper surface of the lifting platform 24 and a support portion 25b extending upward from the base 25a. The outer diameter Db of the support portion 25b is smaller than the outer diameter Da of the base 25a. The support pin 25 makes the upper end 25T of the support portion 25b contact the lower surface of the substrate KB to support the substrate KB from below.

[0068] Thus, in this embodiment, the support pin 25 arranged on the upper surface of the lifting platform 24 has a base 25a set on the lifting platform 24 and a support portion 25b with a diameter smaller than that of the base 25a and extending upward from the base 25a, and is configured to support the substrate KB by making the upper end 25T of the support portion 25b abut against the substrate KB.

[0069] exist Figure 5Therefore, when the support part 25b is placed on the upper surface of the lifting platform 24 made of magnetic material, the magnet 25m and the upper surface of the lifting platform 24 are attracted to each other by magnetic force, and the support pin 25 is installed on the lifting platform 24 in a self-supporting state.

[0070] Each support pin 25 can be arranged in a predetermined area (hereinafter referred to as "support pin installation area 24R") on the upper surface of the lifting platform 24. Figure 4 ). Therefore, the plurality of support pins 25 can be arranged in the support pin arrangement region 24R in an optimal arrangement according to the condition of the lower surface of the substrate KB (for example, the arrangement of the unillustrated components mounted on the lower surface of the substrate KB). The support pins 25 mounted on the lifting platform 24 move integrally, so when the lifting platform 24 is raised or lowered by the lift 23, the support pins 25 mounted on the lifting platform 24 are also raised or lowered together with the lifting platform 24.

[0071] The front and rear pair of support plates 26 are respectively provided corresponding to the front and rear pair of transport rails 21. Each support plate 26 is located on the inner surface side of the corresponding transport rail 21 (the side opposite to the two transport rails 21). Figure 6 As shown in (a), (b), and (c) of FIG. 1 , the two support plates 26 each include a plate main portion 31 extending in the left-right direction and two left and right extension portions 32 extending downward from left and right ends of the plate main portion 31 .

[0072] exist Figure 6 In (a), (b), and (c), the lower edge of the middle portion of the support plate 26 (specifically, the plate main portion 31) in the left-right direction is opposed to the upper surface of the lifting platform 24 in the vertical direction. Hereinafter, the portion that is the lower edge of the middle portion of the support plate 26 in the left-right direction and is opposed to the upper surface of the lifting platform 24 (including the above-mentioned support pin installation area 24R on the upper surface) is referred to as the "plate lower edge 26F" (also refer to Figure 7 , Figure 8 and Fig. 9 When the lifting platform 24 is at the lowest descending position, the plate lower edge 26F is located at a position lower than the upper end 25T of the support pin 25 provided on the lifting platform 24 ( Figure 5 ) High position ( Figure 6 (a)).

[0073] Thus, in the present embodiment, the plate lower edge 26F, which is formed by the portion of the lower edge of the support plate 26 that faces the upper surface of the lift table 24, is located at a position lower than the support pin 25 ( Figure 6 The upper end 25T (upper end 25T of the support portion 25b) of (a) is located at an upper position.

[0074] exist Figure 6 In (a), (b), and (c), left and right contact portions 33 located lower than the plate lower edge 26F are formed at the boundary portions between the plate lower edge 26F and the left and right extension portions 32 (see also Figure 7 , Figure 8 and Fig. 9 The left and right abutment portions 33 abut against the left and right edges 24H of the lifting platform 24 that has risen from the lowest descending position from below ( Figure 4 ) abutment.

[0075] like Figure 6 As shown in (b) and (c) of FIG. 1 , even when the left and right edges 24H of the lifting platform 24 are in contact with the left and right contact portions 33, the plate lower edge 26F is located at a position higher than the upper surface of the base 25a of the support pin 25 provided on the lifting platform 24. That is, in the present embodiment, the plate lower edge 26F, which is formed by the portion of the lower edge of the support plate 26 that faces the upper surface of the lifting platform 24, is located higher than the support pin 25 ( Figure 6 (c)) The base 25a is positioned upward.

[0076] Therefore, the support pin 25 can have a portion of the base 25a located below the plate lower edge 26F ( Fig. 9 ). Therefore, even though the outer diameter Da of the base 25a is larger than the outer diameter Db of the support 25b, the support 25b can be located close to a position that is smaller than the radius (Da / 2) of the base 25a.

[0077] From another point of view, the support plate 26 is configured to have an interference avoidance space 26R (see Figure 6 The interference avoidance space 26R has a size such that interference with the support pin 25 provided on the lifting platform 24 can be avoided regardless of whether the lifting platform 24 is in a state where it is in the lowest descended position or in a position where the lifting platform 24 is in an ascending position. Figure 6 (a)).

[0078] exist Figure 7 , Figure 8 and Fig. 9In the embodiment, a sliding guide 21e extending in the up-down direction (Z direction) is provided on the inner surface side of the left and right conveyor base support parts 21b of the two front and rear transport rails 21, respectively. On the other hand, a sliding member 26S engaging with the above-mentioned sliding guide 21e is provided on the front and rear extension parts 32 of each of the two front and rear support plates 26. The sliding member 26S is freely slidable in the up-down direction (Z direction) relative to the sliding guide 21e. Therefore, the two front and rear support plates 26 can move (rise and fall) in the up-down direction relative to the corresponding transport rails 21, respectively.

[0079] exist Figure 7 , Figure 8 and Fig. 9 In the embodiment, a spring lower end support portion 21f is provided on the inner surface of the conveyor base support portion 21b of the transport rail 21 in a protruding manner in the Y direction, and a spring upper end support portion 32a is provided on the inner surface of the extension portion 32 in a protruding manner in the Y direction. A biasing spring 34 is provided between the spring lower end support portion 21f and the spring upper end support portion 32a. When the support plate 26 rises from the lowest position (hereinafter referred to as the "standby position") in the lifting range determined by the support plate 26, the biasing spring 34 exerts a force in the direction of pulling the support plate 26 back to the standby position.

[0080] When the lifting platform 24 is at the lowest descending position, the contact portion 33 of the support plate 26 is located at a position higher than the upper surface of the lifting platform 24 (specifically, the left and right edges 24H). Figure 6 (a) → Figure 6 (b)), the upper surface of the lifting platform 24 abuts against the abutment portion 33 of the support plate 26 from below ( Figure 6 (b)).

[0081] Thus, hereinafter, the height of the lifting platform 24 when the upper surface of the lifting platform 24 raised from the lowest descending position abuts against the abutment portion 33 of the support plate 26 is referred to as the "abutment height". When the lifting platform 24 reaches the abutment height, the upper ends 25T of the support pins 25 provided on the lifting platform 24 become the same height as the upper ends of the support plates 26 ( Figure 6 (b)).

[0082] After the lifting platform 24 reaches the contact height, when the lifting platform 24 is further raised by the lift 23, the pair of support plates 26 and the lifting platform 24 are integrated and raised ( Figure 6 (b) → Figure 6 Thus, in this embodiment, the support plate 26 does not contact the lift table 24 when the lift table 24 is at the lowest descending position, but contacts the lifted lift table 24 when the lift table 24 rises from the lowest descending position and is pushed up.

[0083] When the lifting platform 24 further rises after contacting the contact portion 33 of the support plate 26, the upper ends 25T of the plurality of support pins 25 and the upper edges of the front and rear support plates 26 contact the lower surface of the substrate KB ( Figure 6 Then, when the lifting platform 24 rises further ( Figure 6 (c) → Fig.10 In (a), the substrate KB is pushed upward while being supported by a plurality of support pins 25 and front and rear support plates 26. When the upper surface of the substrate KB reaches the same height as the upper surface of the clamp 27, the lifting platform 24 stops based on the rise of the lift 23.

[0084] Thus, in this embodiment, the support plate 26 is arranged in a manner that can be freely moved in the up and down directions on a pair of transport rails 21 that transport the substrate KB and position the substrate KB at a specified position, and is pushed up by the lifting platform 24 that is raised and lowered below the substrate KB positioned at the specified position, thereby supporting the substrate KB positioned by the pair of transport rails 21 from below together with the support pins 25 arranged on the upper surface of the lifting platform 24.

[0085] When the front and rear support plates 26 are lifted from the standby position by the lifting platform 24, they receive a force from the biasing spring 34 in the direction of being pulled back to the standby position. Therefore, the support plates 26 pushed up by the lifting platform 24 are kept in close contact with the upper surface of the lifting platform 24 (specifically, the upper surface of the edge 24H of the lifting platform 24).

[0086] As described above, in the present embodiment, the biasing spring 34 serves as biasing means for biasing the support plate 26 pushed up by the lift table 24 toward the position (standby position) before being pushed up by the lift table 24 .

[0087] exist Figure 3 and Figure 4 In the embodiment, a pair of clamps 27 are arranged opposite to each other in the Y direction. As described above, when the upper surface of the substrate KB reaches the same height as the upper surface of the clamp 27, the lifting platform 24 stops rising, and the pair of clamps 27 move inwards (the sides facing each other) to clamp the substrate KB from the Y direction ( Fig.10 (a) → Fig.10 (b)). As a result, the substrate KB is supported by the lifting table 24 via the plurality of support pins 25 and is clamped by the pair of clampers 27 , that is, held by the substrate transport holding unit 13 .

[0088] exist Figure 4 and Fig.11In (a) and (b), the positioning guide 28 is composed of a relatively long plate-shaped member extending on the upper surface of the lifting platform 24 in the extending direction (X direction) of the support plate 26 (see Figure 3 ). The positioning guide 28 is provided at a position slightly below and slightly behind the front support plate 26 and has a shape extending along a horizontal plane (XY plane).

[0089] The positioning guide 28 is provided with semicircular notches 28G that are open toward the center side (i.e., the rear side) of the lifting platform 24 in a row. By making the base 25a of the support pin 25 abut against each notch 28G provided in the positioning guide 28 from the side, the plurality of support pins 25 on the lifting platform 24 can be arranged in a row (arranged) at a position along the front support plate 26.

[0090] The left and right ends of the positioning guide 28 are supported by left and right brackets 24b provided on the left and right edges 24H of the lifting platform 24. The left and right ends of the positioning guide 28 are respectively connected to the left and right brackets 24b with axes 28J ( Fig.11 The frame can rotate freely around (a) and (b).

[0091] exist Figure 4 , Figure 8 , Fig.11 In (a) and (b), a gripping portion 28T extending outward along the axis 28J is provided at one of the left and right ends of the positioning guide 28. The gripping portion 28T is located outside the bracket portion 24b. The operator OP can rotate the entire positioning guide 28 around the axis 28J by twisting the gripping portion 28T around the axis 28J.

[0092] The positioning guide 28 is in a horizontal posture extending in a substantially horizontal plane (XY plane) and extending toward the center of the lifting platform 24, and the plurality of notches 28G are respectively oriented toward the center side (rear) of the lifting platform 24 ( Fig.11 (a)) and a vertical position (a) in which the plurality of notches 28G are respectively directed upward by rotating approximately 90 degrees from the first position. Fig.11 When the positioning guide 28 is in a horizontal position ( Fig.11 (a)), the base 25a of the support pin 25 is pressed against each notch 28G, thereby enabling the plurality of support pins 25 to be positioned in a row. Hereinafter, such a position of the positioning guide 28 is referred to as a "positionable position".

[0093] On the other hand, when the positioning guide 28 is located at the vertical position ( Fig.11(b)), the base 25a of the support pin 25 cannot be pressed against each notch 28G (i.e., the plurality of support pins 25 cannot be positioned in an aligned state), but the positioning guide 28 can be prevented from extending toward the central portion of the lifting platform 24 (i.e., retreating from the positionable position). Hereinafter, such a position of the positioning guide 28 is referred to as a "retracted position".

[0094] Thus, in the present embodiment, the positioning guide 28 is provided on the lifting platform 24, and is a member for arranging and positioning the plurality of support pins 25 at positions along the support plate 26 (here, the front support plate 26) on the lifting platform 24, and is configured to be movable between a positionable position where the plurality of support pins 25 can be positioned and a retreat position where the plurality of support pins 25 can be retreated from the positionable position. Furthermore, the positioning guide 28 can be moved between the positionable position and the retreat position by performing a rotation operation around an axis 28J extending in a direction (X direction) along the support plate 26.

[0095] exist Figure 1 and Figure 2 In the embodiment, the mask 14 has a rectangular shape and is supported by a rectangular frame 14W. The mask 14 is composed of a plate-like member and has a pattern opening 14H ( 14W ) corresponding to the electrode pattern DK of the substrate KB formed in the center. Figure 1 ).

[0096] exist Figure 1 and Figure 2 In the embodiment, the print head 15 has two scrapers 15S arranged opposite to each other in the Y direction. Each scraper 15S is composed of a "scraper"-shaped member extending in the X direction. The print head 15 is moved by a print head moving mechanism 15K ( Figure 2 ) and moves in the Y direction. The two scrapers 15S are raised and lowered respectively by two scraper lifting parts 15M provided in the printing head 15.

[0097] exist Fig.12 In the embodiment, the control unit 51 of the printing device 1 controls the following actions: conveyance of the substrate KB by the conveyance rail 21; elevation of the lifting platform 24 by the lift 23; clamping of the substrate KB by the clamper 27; and movement of the substrate conveyance holding unit 13 in the XYZ direction by the XYZ moving mechanism 12. The control unit 51 also controls the elevation of the squeegee 15S by the squeegee lifting unit 15M of the printing head 15, and the movement of the printing head 15 by the printing head moving mechanism 15K.

[0098] exist Fig.12In the example, the control unit 51 includes a storage unit 51a. The control unit 51 outputs commands to the above-mentioned components according to the job execution program stored in the storage unit 51a. Then, each component operates according to the command output by the control unit 51, so that the printing device 1 executes a print job as a predetermined process.

[0099] When the printing device 1 performs a printing operation of printing the paste Pst onto the substrate KB, the control unit 51 first operates the support pin arrangement device (not shown) from a state where the lifting platform 24 is located at the lowest descending position, the mask 14 is not set at the mask setting position, and the positioning guide 28 is located at the position where the positioning guide 28 can be positioned. Then, the support pin arrangement device causes the plurality of support pins 25 to be arranged on the lifting platform 24 to contact the respective notches 28G of the plurality of notches 28G of the positioning guide 28 from the side one by one. As a result, the plurality of support pins 25 are positioned in a row behind the front support plate 26 ( Fig.13 In this way, the plurality of support pins 25 are arranged along the support plate 26 (the front support plate 26 ) by the positioning guide 28 , so that the control unit 51 can recognize the position of each of the plurality of support pins 25 to be arranged on the lift table 24 next.

[0100] After arranging the plurality of support pins 25 at positions along the front support plate 26 as described above, the control unit 51 reads the operation execution program from the storage unit 51a. Then, based on the support pin arrangement data recorded in the read operation execution program, the plurality of support pins 25 positioned by the positioning guide 28 are moved to the determined positions on the lifting platform 24. As a result, the plurality of support pins 25 are arranged at the positions determined by the support pin arrangement data ( Fig.13 (b)).

[0101] After the support pins 25 are arranged at the positions determined by the support pin arrangement data, the mask 14 is set at a predetermined mask setting position. The mask 14 is set manually by an operator OP or automatically by a mask setting device (not shown).

[0102] After the mask 14 is set at the mask setting position, the transport rail 21 is operated to carry the substrate KB into the transport rail 21 and position it. After the substrate KB is positioned, the lift 23 raises the lift table 24, and the clamp 27 clamps the substrate KB. After the clamp 27 clamps the substrate KB, the XYZ moving mechanism 12 raises the substrate transport holding part 13 as a whole, so that the upper surface of the substrate KB contacts the lower surface of the mask 14.

[0103] Here, as described above, the lower edge 26F of the support plate 26 is located above the base 25a of the support pin 25 that is provided on the lifting table 24 and supports the substrate KB. Therefore, by making a part of the base 25a of the support pin 25 located below the lower edge 26F (inside the interference avoidance space 26R) ( Fig.14 (a)), it is possible to position a portion of the base 25a of the support pin 25 below the plate lower edge 26F while the upper edge 26T of the support plate 26 and the upper end 25T of the support pin 25 are in contact with the lower surface of the substrate KB ( Fig.14 (b)). Thus, the support portion 25b of the support pin 25 can be arranged in a state extremely close to (or in contact with) the support plate 26 (see Fig.13 The support pins 25 shown by reference numeral “25P” in (b) of the drawing) can support the substrate KB at the limit position of the end portion in the Y direction by the support pins 25 ( Fig.15 ).

[0104] After the substrate KB contacts the mask 14, the print head 15 operates to apply the paste Pst to the substrate KB. First, the paste Pst is supplied to the upper surface of the mask 14. The paste Pst is supplied by the operator OP manually or by a paste supply device (not shown). After the paste Pst is supplied to the mask 14, the scraper lifting unit 15M operates to lower one of the two scrapers 15S, and the lower end of the scraper 15S is brought into contact with the upper surface of the mask 14.

[0105] After the lower end of the squeegee 15S contacts the upper surface of the mask 14, the print head 15 is moved in the Y direction by the print head moving mechanism 15K ( Figure 2 As shown by arrow D in FIG. 1 , the paste Pst on the mask 14 is scraped by the scraper 15S. Thus, the paste Pst is filled in the pattern opening 14H, and the paste Pst is applied to the electrode pattern DK on the substrate KB.

[0106] After the paste Pst is applied to the electrode pattern DK on the substrate KB, the XYZ moving mechanism 12 is operated to lower the substrate transport holding part 13, so that the substrate KB is separated from the mask 14 (off the plate). After the substrate KB is off the plate and the lifting platform 24 is at the lowest descending position, the transport rail 21 is operated to carry the substrate KB out. Thus, the printing operation of one substrate KB is completed.

[0107] When the type of the produced substrate KB is changed by repeatedly performing such printing operation, the control unit 51 operates the aforementioned support pin arrangement device (not shown) to perform an operation (support pin arrangement change operation) of changing the arrangement of the support pins 25 according to the type of the substrate KB. In the support pin arrangement change operation, when the type of the substrate KB is different, the condition of the lower surface of the substrate KB (for example, the arrangement of the unshown components mounted on the lower surface of the substrate KB) is different, so the arrangement of the support pins 25 is changed according to the condition of the lower surface of the substrate KB.

[0108] In the support pin arrangement change operation, first, when the plate stripping is completed and the lifting platform 24 is at the lowest descending position and the mask 14 is removed from the mask setting position, the plurality of support pins 25 arranged on the lifting platform 24 are positioned in front of the support plate 26 close to the rear side by the support pin arrangement device ( Fig.16 At this time, the upper end 25T of each support pin 25 is located below the plate lower edge 26F of the support plate 26 on the rear side.

[0109] After the plurality of support pins 25 are positioned near the front side of the rear support plate 26 by the support pin arrangement device, the transport rail 21 located at the rear side is moved forward. As a result, the rear support plate 26 and the transport rail 21 move forward together, but at this time, the lower edge 26F of the rear support plate 26 passes above the plurality of support pins 25 from the rear side to the front side ( Fig.17 (a) → Fig.17 As a result, the plurality of support pins 25 are moved to the rear of the rear support plate 26 (of the rear transport rail 21 ) ( Fig.16 (b)).

[0110] As described above, after the plurality of support pins 25 located in front of the rear support plate 26 move to the rear of the rear support plate 26 (the rear transport rail 21), the control unit 51 moves the plurality of support pins 25 to the rearmost portion of the lifting platform 24 through the support pin arrangement device ( Fig.18 Then, the operator manually removes the plurality of support pins 25 from the lifting platform 24 ( Fig.18 After the plurality of support pins 25 are removed from the lifting platform 24, the control unit 51 operates the support pin configuration device to supply the plurality of support pins 25 to the lifting platform 24 again, and to make the plurality of support pins 25 contact with the notches 28G of the positioning guide 28 to arrange them, and to perform the support pin configuration change operation again ( Fig.13 (a)).

[0111] The printing device 1 changes the position of the support pin 25 on the lifting platform 24 according to the above-mentioned procedure. However, in the embodiment, as described above, the support plate 26 is located above the upper end of the support portion 25b of the support pin 25 provided on the lifting platform 24 when the lifting platform 24 is located at the lowest position, that is, the lowest descending position. Therefore, although the structure is provided with the support plate 26 that supports the end of the substrate KB, the support pin 25 on the lifting platform 24 can be moved (passed) from the one side surface (front side surface) of the rear side support plate 26 to the other side surface (rear side surface) by moving the support plate 26 (here, the rear side support plate 26). Therefore, when a plurality of support pins 25 arranged in front of the support plate 26 (rear side support plate 26) are moved backward, it is not necessary to perform a large-scale operation of moving the support pins 25 in a manner of passing over the support plate 26 (transport rail 22), and the support pin arrangement change operation can be performed efficiently and in a short time.

[0112] However, in the printing device 1 of the present embodiment, it is possible to use a plurality of support pins 25 instead of the plurality of support pins 25. Fig.19 and Fig. 20 The substrate KB is supported by the suction box 60 shown in (a) and (b). The suction box 60 has a structure that uses a vacuum chuck mechanism provided on the upper surface to vacuum the lower surface of the substrate KB through a plurality of suction holes 61 provided on the upper surface of the suction box 60, and is a lower support unit of the substrate KB that is interchangeable with the support pins 25.

[0113] When the suction box 60 is installed on the lifting platform 24 instead of the support pin 25, the operator OP first operates the gripping portion 28T of the positioning guide 28 located at the position where the positioning guide 28 can be positioned, so that the positioning guide 28 is located at the retreat position ( Fig.11 (a) → Fig.11 (b)). As a result, the amount of projection of the positioning guide 28 toward the center side (rear) of the lifting platform 24 becomes smaller, so that the suction box 60 can be installed on the lifting platform 24 ( Fig.21 (a) → Fig.21 (b)). Assuming that the positioning guide 28 is a structure that cannot be moved between the positionable position and the retracted position and is fixed at the positionable position, it is difficult to provide the adsorption box 60 instead of the support pin 25, but in this embodiment, the adsorption box 60 can be used instead of the support pin 25 only by switching the position of the positioning guide 28 from the positionable position to the retracted position.

[0114] Thus, in the printing apparatus 1 of this embodiment, even when the lifting table 24 is provided with the positioning guide 28 for aligning and positioning the support pins 25 supporting the substrate KB, the suction box 60 for vacuum suctioning the lower surface of the substrate KB can be provided.

[0115] As described above, in the printing device 1 of the present embodiment, the plate lower edge 26F, which is formed by the portion of the lower edge of the support plate 26 that supports the substrate KB from below by being pushed up by the lifting platform 24 and that faces the upper surface of the lifting platform 24, is located above the base 25a of the support pin 25 that is provided on the lifting platform 24 and supports the substrate KB. Therefore, according to the printing device 1 of the present embodiment, the portion extremely close to the end of the substrate KB can be supported by the support pin 25.

[0116] So far, the embodiment of the present invention has been described, but the present invention is not limited to the above content, and various modifications can be made. For example, in the above embodiment, the support plate 26 is provided on both sides of the pair of transport rails 21, but it is sufficient to be provided on at least one of the pair of transport rails 21. In addition, the positioning guide 28 is configured to be freely rotatable around the axis 28J extending in the direction (X direction) along the support plate 26, but instead of such a structure, the positioning guide 28 can be slid forward in the horizontal plane and retreated to the front area of ​​the front support plate 26. In this case, if the positioning guide 28 as a whole moves to a position forward than the position directly below the plate lower edge 26F of the support plate 26 on the front side, then, as in the case of the support plate 26 on the rear side, a part of the base 25a of the support pin 25 can be located below the plate lower edge 26F, so that the support pin 25 supports the limit position of the end of the substrate KB.

[0117] In the above-mentioned embodiment, the substrate processing device is not necessarily the printing device 1, and may be, for example, a component mounting device. In this case, the component mounting device is a substrate processing device that has a component mounting operation of mounting components on the substrate KB as a predetermined operation.

[0118] Industrial Applicability

[0119] The present invention provides a substrate supporting device and a substrate processing device capable of supporting a portion of a substrate extremely close to an end portion by using supporting pins.

Claims

1. A substrate support device for supporting a substrate to be subjected to a predetermined process, wherein: The substrate support device comprises: A lifting platform that is lifted and lowered below the substrate positioned at a predetermined position; Support pins are arranged on the upper surface of the lifting platform and support the substrate from below; as well as a support plate which is provided in a manner movable in the up-down direction and which supports the substrate positioned at the predetermined position from below by being pushed up by the ascending lifting platform; The support pin is configured to include a base portion provided on the lifting platform and a support portion having a diameter smaller than that of the base portion and extending upward from the base portion, and the upper end of the support portion is brought into contact with the substrate to support the substrate. A portion of the lower edge of the support plate that is opposed to the upper surface of the lift table is located above the base of the support pin that is provided on the lift table and supports the substrate.

2. The substrate support device according to claim 1, wherein: When the lifting platform is located at the lowest descended position, that is, the lowest descended position, the lower edge of the support plate is located above the upper end of the support portion of the support pin provided on the lifting platform.

3. The substrate support device according to claim 2, wherein: When the lifting platform is located at the lowest descending position, the support plate does not abut against the lifting platform. When the lifting platform rises from the lowest descending position, the support plate abuts against the rising lifting platform and is pushed up.

4. The substrate support device according to claim 1, wherein: The substrate support device includes a biasing unit that biases the support plate pushed up by the lifting table toward a position before being pushed up by the lifting table.

5. A substrate processing device, wherein: The substrate processing apparatus includes the substrate support device according to any one of claims 1 to 4, and performs a predetermined process on the substrate supported by the substrate support device.

6. The substrate processing apparatus according to claim 5, wherein: The substrate processing device is a printing device that prints a paste on a substrate via a mask.

7. The substrate processing apparatus according to claim 5, wherein: The substrate processing apparatus includes a pair of transport rails for transporting the substrate and positioning the substrate at the predetermined position, and the support plate is provided on at least one of the pair of transport rails.

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