Tail gas purification equipment for etching liquid production

Abstract

The invention provides tail gas purification equipment for etching liquid production, and relates to the technical field of tail gas purification, the tail gas purification equipment comprises a purification base, and a transmission lead screw is rotatably mounted in the middle of the interior of the purification base; a butt joint pipe is fixedly mounted on the left side of the top of the purification base; the right end of the butt joint pipe is connected with a telescopic pipe; a mounting sliding seat is slidably mounted on the left side of the top of the purification base; a connecting pipe is fixedly mounted on the mounting sliding seat; a movable sealing housing is fixedly mounted on the right side of the connecting pipe; and a fixed sealing housing is fixedly mounted at the top of the purification base. According to the purification equipment, the opening work of the movable sealing cover shell and the opening work of the movable fan shell are combined together to be synchronously realized, so that the operation convenience of the two regular work is improved, and the problem that the filter assembly and the fan assembly in the existing purification equipment are mostly disassembled step by step; and tedious dismounting work needs to be completed before replacement and maintenance.

Description

Technical Field

[0001] The invention relates to the technical field of tail gas purification, and in particular to tail gas purification equipment used in etching liquid production. Background Art

[0002] The tail gas produced by etching liquid production usually contains a variety of harmful substances, which may have a negative impact on the environment and human health. In order to avoid the harm of etching liquid tail gas emissions to the environment and human health, purification equipment is usually required to purify the etching liquid tail gas before discharge.

[0003] During the use of existing etching liquid tail gas purification equipment, in order to ensure the good operation state of the purification equipment and extend its service life, it is necessary to regularly disassemble and replace or maintain the filter components and fan components in the purification equipment. However, since the disassembly of the filter components and fan components in the existing purification equipment is mostly carried out in steps, tedious disassembly work needs to be completed before replacement and maintenance, which reduces the replacement and maintenance efficiency of the equipment for the filter components and fan components. Summary of the invention

[0004] The disclosed embodiment relates to an exhaust gas purification device for etching liquid production, which connects a docking tube to an exhaust gas discharge port of an etching liquid production device, and then starts a fan motor to run a suction turbine, so that the suction turbine extracts the exhaust gas by rotation. During the extraction process, the exhaust gas of the etching liquid will preferentially flow through an activated carbon filter element, so that the activated carbon filter element purifies the exhaust gas of the etching liquid. Finally, the exhaust gas of the etching liquid after the purification treatment is completed will be discharged, thereby completing the treatment of the exhaust gas of the etching liquid.

[0005] In a first aspect of the present disclosure, there is provided an exhaust gas purification device for etching liquid production, specifically comprising: a purification base, wherein a transmission screw is rotatably installed at the center position inside the purification base; a butt pipe is fixedly installed on the left side of the top of the purification base; a telescopic tube is connected to the right end of the butt pipe; a mounting slide is slidably installed on the left side of the top of the purification base; a connecting pipe is fixedly installed on the mounting slide; a movable sealing cover is fixedly installed on the right side of the connecting pipe; a fixed sealing cover is fixedly installed on the top of the purification base; an activated carbon filter is installed inside the movable sealing cover and the fixed sealing cover; a fixed fan casing is fixedly installed on the right side of the fixed sealing cover; a push trigger rod is fixedly installed on the right side of the purification base; and a sliding cover is slidably installed on the right side of the top of the purification base There is an opening and closing sliding seat; a movable fan casing is fixedly installed on the left side of the opening and closing sliding seat; a motor mounting seat is placed on the top of the opening and closing sliding seat; limited position plug-in holes are provided on the front and rear sides of the motor mounting seat; a fan motor is fixedly installed on the top of the motor mounting seat; a docking slide groove is provided on the left side of the motor mounting seat; docking bosses are fixedly installed on the front and rear sides of the top of the motor mounting seat; the docking slide groove is connected with the limited position plug-in hole; a limited position plug-in slider is slidably installed inside the docking boss; the outer end of the limited position plug-in slider is also inserted into the inside of the limited position plug-in hole; a force-bearing inclined groove is provided on the right side of the limit plug-in slider; the inner end of the force-bearing inclined groove is an inclined structure; an embedded baffle is fixedly installed on the top of the limit plug-in slider; a push-up through hole is provided on the right side of the motor mounting seat.

[0006] In at least some embodiments, the transmission screw is symmetrically provided with two opposite threads; the left end of the butt joint tube should be connected to the exhaust port of the etching liquid production equipment; the mounting slide is connected to the thread on the left side of the transmission screw.

[0007] In at least some embodiments, the left end of the connecting tube is connected to the right end of the telescopic tube; the left end of the fixed sealing cover is connected to the right end of the movable sealing cover; and the opening and closing sliding seat is connected to the thread on the right side of the transmission screw.

[0008] In at least some embodiments, a suction turbine is rotatably installed inside the movable fan housing; the output shaft of the fan motor is connected to the suction turbine inside the movable fan housing via a spline; and the docking boss is also slidably connected to the motor mounting seat via a docking slot.

[0009] In at least some embodiments, one end of a restoring spring is embedded and installed on the outer side of the embedded baffle; the other end of the restoring spring is embedded and installed inside the docking boss; and the push through hole is connected to the force-bearing inclined groove.

[0010] In at least some embodiments, when the transmission screw is rotated, the transmission screw uses two opposite threads to respectively drive the mounting slide seat and the opening and closing slide seat to slide outwards relative to each other.

[0011] In at least some embodiments, when the mounting slide seat slides to the left, it also moves the connecting pipe and the movable sealing cover to the left; after the movable sealing cover moves to the left, the activated carbon filter element is exposed from the interior of the fixed sealing cover.

[0012] In at least some embodiments, when the opening and closing sliding seat moves to the right, the left end of the push trigger rod passes through the push through hole and is inserted into the interior of the force-bearing inclined groove.

[0013] In at least some embodiments, after the left end of the push trigger rod enters the interior of the force-bearing inclined groove, the left end of the push trigger rod will push the inclined surface of the force-bearing inclined groove.

[0014] In at least some embodiments, the inclined surface of the force-bearing inclined groove will move inward with the limiting plug-in slider after being pushed; after the limiting plug-in slider moves inward, the outer end of the limiting plug-in slider will be separated from the interior of the limiting socket.

[0015] The present invention provides a tail gas purification device for etching liquid production, which has the following beneficial effects: 1. This purification equipment is provided with a movable sealing cover and a movable fan casing. The staff only needs to rotate the operating screw to control the movable sealing cover and the movable fan casing to move left and right relative to each other, so that the movable sealing cover is separated from the fixed sealing cover by moving to the left, which is convenient for the staff to take out and replace the activated carbon filter inside the fixed sealing cover. At the same time, the movable fan casing is separated from the fixed fan casing by moving to the right, so that the suction turbine inside the movable fan casing is exposed, which is convenient for the staff to inspect and maintain the suction turbine.

[0016] 2. When the movable fan casing of the purification equipment moves to the right to separate itself from the fixed fan casing, the push trigger rod will cooperate with the force-bearing inclined groove to disengage the limit plug-in slider from the inside of the limit plug hole, so that there is no rigid connection between the motor mounting seat and the opening and closing sliding seat, which makes it convenient for the staff to disassemble the motor mounting seat and the fan motor thereon, and to disassemble, replace or repair the fan motor, thereby improving the maintenance convenience of the fan assembly of this equipment.

[0017] 3. This purification equipment combines the opening work of the movable sealing cover with the opening work of the movable fan casing and realizes them synchronously, thereby improving the convenience of operation of these two regular tasks. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the embodiment of the present invention, the drawings of the embodiment are briefly introduced below.

[0019] The drawings described below are only related to some embodiments of the present invention, but are not intended to limit the present invention.

[0020] In the attached picture: Figure 1 A schematic diagram showing the structure of the movable sealing cover and the movable fan casing of the present application in a closed state; Figure 2 This application shows Figure 1 The enlarged structural diagram of part A in the middle; Figure 3 A schematic diagram of the structure of the movable sealing cover and the movable fan casing of the present application in an open state is shown; Figure 4 This application shows Figure 1 Another perspective structural diagram of; Figure 5 A schematic diagram of a half-section structure of a movable sealing cover and a fixed sealing cover of the present application is shown; Figure 6 The schematic diagram of the structure of the opening and closing sliding seat and the fan motor of the present application is shown; Figure 7 It shows a schematic diagram of the structure of the movable fan casing and the motor mounting seat of the present application in a disassembled state; Figure 8 A schematic diagram of a half-section structure of a motor mounting seat of the present application is shown; Reference numerals list 1. Purification base; 2. Drive screw; 3. Butt joint; 4. Telescopic tube; 5. Mounting slide; 6. Connecting tube; 7. Movable sealing cover; 8. Fixed sealing cover; 9. Activated carbon filter; 10. Fixed fan casing; 11. Push trigger rod; 12. Open and close sliding seat; 13. Movable fan housing; 14. Motor mounting seat; 15. Limiting jack; 16. Fan motor; 17. Docking slide; 18. Docking boss; 19. Limiting plug-in slider; 20. Force-bearing inclined slot; 21. Embedded baffle; 22. Restoration spring; 23. Push-through hole. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] Please refer to Figures 1 to 8 : Embodiment 1:

[0023] The present invention proposes an exhaust gas purification device for etching liquid production, comprising: a purification base 1, a transmission screw 2 is rotatably installed at the center position inside the purification base 1; a butt pipe 3 is fixedly installed on the left side of the top of the purification base 1; a telescopic pipe 4 is connected to the right end of the butt pipe 3; a mounting slide 5 is slidably installed on the left side of the top of the purification base 1; a connecting pipe 6 is fixedly installed on the mounting slide 5; a movable sealing cover 7 is fixedly installed on the right side of the connecting pipe 6; a fixed sealing cover 8 is fixedly installed on the top of the purification base 1; an activated carbon filter 9 is installed inside the movable sealing cover 7 and the fixed sealing cover 8; a fixed fan casing 10 is fixedly installed on the right side of the fixed sealing cover 8; a push trigger rod 11 is fixedly installed on the right side of the purification base 1; an opening and closing sliding seat 12 is slidably installed on the right side of the top of the purification base 1; the opening and closing sliding seat 1 2 is fixedly installed with a movable fan casing 13 on the left side; a motor mounting seat 14 is placed on the top of the opening and closing sliding seat 12; limited position plug holes 15 are provided on the front and rear sides of the motor mounting seat 14; a fan motor 16 is fixedly installed on the top of the motor mounting seat 14; a docking slide 17 is provided on the left side of the motor mounting seat 14; docking bosses 18 are fixedly installed on the front and rear sides of the top of the motor mounting seat 14; the docking slide 17 is connected with the limited position plug hole 15; a limited position plug-in slider 19 is slidably installed inside the docking boss 18; the outer end of the limited position plug-in slider 19 is also inserted into the inside of the limited position plug hole 15; a force-bearing inclined groove 20 is provided on the right side of the limited position plug-in slider 19; the inner end of the force-bearing inclined groove 20 is an inclined structure; an embedded baffle 21 is fixedly installed on the top of the limited position plug-in slider 19; a top push through hole 23 is provided on the right side of the motor mounting seat 14.

[0024] By connecting the docking tube 3 to the exhaust outlet of the etching liquid production equipment, and then starting the fan motor 16, the fan motor 16 is driven by the suction turbine to extract the exhaust gas through rotation. During the extraction process, the exhaust gas of the etching liquid will preferentially flow through the activated carbon filter element 9, so that the activated carbon filter element 9 purifies the exhaust gas of the etching liquid. Finally, the exhaust gas of the etching liquid after the purification treatment is completed will be discharged, thereby completing the treatment of the exhaust gas of the etching liquid.

[0025] Embodiment 2, on the basis of embodiment 1, two opposite threads are symmetrically provided on the transmission screw 2; the left end of the docking tube 3 should be connected to the exhaust gas discharge port of the etching liquid production equipment; the installation slide 5 is connected to the thread on the left side of the transmission screw 2; the left end of the connecting tube 6 is connected to the right end of the telescopic tube 4; the left end of the fixed sealing cover 8 is connected to the right end of the movable sealing cover 7; the opening and closing sliding seat 12 is connected to the thread on the right side of the transmission screw 2; a suction turbine is rotatably installed inside the movable fan housing 13; the output shaft of the fan motor 16 is connected to the suction turbine inside the movable fan housing 13 through a spline; the docking boss 18 is also slidably connected to the motor mounting seat 14 through the docking slide groove 17; one end of the restoring spring 22 is embedded and installed on the outer side of the embedded baffle 21; the other end of the restoring spring 22 is embedded and installed inside the docking boss 18; the push through hole 23 is connected to the force-bearing inclined groove 20.

[0026] When the activated carbon filter element 9 needs to be replaced, the transmission screw 2 is manually rotated so that it moves to the left with the installation slide 5, the connecting pipe 6 and the movable sealing cover 7 under the action of the left thread, so that the movable sealing cover 7 separates itself from the fixed sealing cover 8 by moving to the left, thereby exposing the activated carbon filter element 9 inside the fixed sealing cover 8, making it convenient for the staff to take out and replace the activated carbon filter element 9.

[0027] Embodiment 3, on the basis of embodiment 2, when the transmission screw 2 rotates, the transmission screw 2 will use two opposite threads to respectively drive the mounting slide 5 and the opening and closing slide seat 12 to slide outward relative to each other; when the mounting slide 5 slides to the left, it will also drive the connecting pipe 6 and the movable sealing cover 7 to move to the left; after the movable sealing cover 7 moves to the left, the activated carbon filter 9 will be exposed from the inside of the fixed sealing cover 8; when the opening and closing slide seat 12 moves to the right, the left end of the push trigger rod 11 will pass through the push through hole 23 and insert into the inside of the force-bearing inclined groove 20; after the left end of the push trigger rod 11 enters the inside of the force-bearing inclined groove 20, the left end of the push trigger rod 11 will push the inclined surface of the force-bearing inclined groove 20; after the inclined surface of the force-bearing inclined groove 20 is pushed, it will drive the limiting plug-in slider 19 to move inward; after the limiting plug-in slider 19 moves inward, the outer end of the limiting plug-in slider 19 will be detached from the inside of the limiting plug hole 15.

[0028] When the transmission screw rod 2 rotates, the transmission screw rod 2 will also use the right-side thread to move the opening and closing sliding seat 12 and the movable fan casing 13 to the right, so that the movable fan casing 13 is separated from the fixed fan casing 10 by moving to the right, which is convenient for the staff to inspect and maintain the suction turbine inside the fixed fan casing 10, and after the opening and closing sliding seat 12 moves to a certain position to the right, the pushing trigger rod 11 will pass through the pushing through hole 23 and insert into the inner protection of the force-bearing inclined groove 20, so that the pushing trigger rod 11 pushes the inclined surface of the force-bearing inclined groove 20, so that the force-bearing inclined groove 20 is forced to move inward with the limiting plug-in slider 19, so that the limiting plug-in slider 19 is disengaged from the inside of the limiting plug hole 15, so that the limiting plug-in slider 19 cancels the positioning of the motor mounting seat 14, which is convenient for the staff to disassemble the fan motor 16 and replace or maintain the fan motor 16.

[0029] The working principle of this embodiment: When in use, the butt joint 3 is connected to the tail gas exhaust port of the etching liquid production equipment, and then the fan motor 16 is started to make the fan motor 16 run with the suction turbine, so that the suction turbine extracts the tail gas by rotation. During the extraction process, the tail gas of the etching liquid will preferentially flow through the activated carbon filter element 9, so that the activated carbon filter element 9 purifies the tail gas of the etching liquid. Finally, the tail gas of the etching liquid after the purification treatment is completed will be discharged, and the treatment of the tail gas of the etching liquid is completed. When it is necessary to replace the activated carbon filter element 9, the transmission screw 2 is manually rotated to make it move to the left with the installation slide 5, the connecting pipe 6 and the movable sealing cover 7 under the action of the left thread, so that the movable sealing cover 7 separates itself from the fixed sealing cover 8 by moving to the left, thereby exposing the activated carbon filter element 9 inside the fixed sealing cover 8, which is convenient for the staff to take out the activated carbon filter element 9 When the transmission screw rod 2 rotates, the transmission screw rod 2 will also use the right thread to move the opening and closing sliding seat 12 and the movable fan casing 13 to the right, so that the movable fan casing 13 is separated from the fixed fan casing 10 by moving to the right, which is convenient for the staff to inspect and maintain the suction turbine inside the fixed fan casing 10, and after the opening and closing sliding seat 12 moves to a certain position to the right, the pushing trigger rod 11 will pass through the pushing through hole 23 and be inserted into the inner protection of the force-bearing inclined groove 20, so that the pushing trigger rod 11 pushes the inclined surface of the force-bearing inclined groove 20, so that the force-bearing inclined groove 20 is forced to move the limiting plug-in slider 19 inward, so that the limiting plug-in slider 19 is disengaged from the inside of the limiting plug hole 15, so that the limiting plug-in slider 19 cancels the positioning of the motor mounting seat 14, which is convenient for the staff to disassemble the fan motor 16 and replace or maintain the fan motor 16.

[0030] In this article, there are a few points to note: 1. The drawings of the embodiments of the present disclosure only involve structures related to the embodiments of the present disclosure, and other structures may refer to general designs.

[0031] 2. In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0032] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. An exhaust gas purification device for etching liquid production, comprising: A purification base (1), wherein a transmission screw (2) is rotatably installed at the center position inside the purification base (1); a butt pipe (3) is fixedly installed on the left side of the top of the purification base (1); the right end of the butt pipe (3) is connected to a telescopic tube (4); it is characterized in that a mounting slide (5) is slidably installed on the left side of the top of the purification base (1); a connecting pipe (6) is fixedly installed on the mounting slide (5); a movable sealing cover (7) is fixedly installed on the right side of the connecting pipe (6); a fixed sealing cover (8) is fixedly installed on the top of the purification base (1); an activated carbon filter (9) is installed inside the movable sealing cover (7) and the fixed sealing cover (8); a fixed fan casing (10) is fixedly installed on the right side of the fixed sealing cover (8); a push trigger rod (11) is fixedly installed on the right side of the purification base (1); an opening and closing sliding seat (12) is slidably installed on the right side of the top of the purification base (1); the opening and closing sliding seat (12) is fixedly installed on the left side A movable fan casing (13); a motor mounting seat (14) is placed on the top of the opening and closing sliding seat (12); limited position insertion holes (15) are provided on the front and rear sides of the motor mounting seat (14); a fan motor (16) is fixedly installed on the top of the motor mounting seat (14); a docking slide groove (17) is provided on the left side of the motor mounting seat (14); docking bosses (18) are fixedly installed on the front and rear sides of the top of the motor mounting seat (14); the docking slide groove (17) and the limited position insertion hole (15) are connected to each other. 15) is connected; a limit plug-in slider (19) is slidably installed inside the docking protrusion (18); the outer end of the limit plug-in slider (19) is also inserted into the inside of the limit plug hole (15); a force-bearing inclined groove (20) is opened on the right side of the limit plug-in slider (19); the inner end of the force-bearing inclined groove (20) is in an inclined structure; an embedded baffle (21) is fixedly installed on the top of the limit plug-in slider (19); and a push-up through hole (23) is opened on the right side of the motor mounting seat (14).

2. The tail gas purification equipment for etching liquid production according to claim 1, characterized in that: The transmission screw (2) is symmetrically provided with two opposite threads; the left end of the butt joint (3) should be connected to the exhaust outlet of the etching liquid production equipment; the mounting slide (5) is connected to the thread on the left side of the transmission screw (2).

3. The tail gas purification equipment for etching liquid production according to claim 2, characterized in that: The left end of the connecting tube (6) is connected to the right end of the telescopic tube (4); the left end of the fixed sealing cover (8) is connected to the right end of the movable sealing cover (7); and the opening and closing sliding seat (12) is connected to the thread on the right side of the transmission screw rod (2).

4. The tail gas purification equipment for etching liquid production according to claim 3, characterized in that: A suction turbine is rotatably mounted inside the movable fan housing (13); the output shaft of the fan motor (16) is connected to the suction turbine inside the movable fan housing (13) via a spline; and the docking boss (18) is also slidably connected to the motor mounting seat (14) via a docking slot (17).

5. The tail gas purification equipment for etching liquid production according to claim 4, characterized in that: One end of a restoring spring (22) is embedded and installed on the outer side of the embedded baffle (21); the other end of the restoring spring (22) is embedded and installed inside the docking protrusion (18); and the push-through hole (23) is connected to the force-bearing inclined groove (20).

6. The tail gas purification equipment for etching liquid production according to claim 5, characterized in that: When the transmission screw (2) rotates, the transmission screw (2) uses two opposite threads to respectively drive the mounting slide seat (5) and the opening and closing slide seat (12) to slide outwards relative to each other.

7. The tail gas purification equipment for etching liquid production according to claim 6, characterized in that: When the mounting slide (5) slides to the left, it also moves the connecting pipe (6) and the movable sealing cover (7) to the left; after the movable sealing cover (7) moves to the left, the activated carbon filter element (9) is exposed from the inside of the fixed sealing cover (8).

8. The tail gas purification equipment for etching liquid production according to claim 7, characterized in that: When the opening and closing sliding seat (12) moves to the right, the left end of the push trigger rod (11) passes through the push through hole (23) and is inserted into the interior of the force-bearing inclined groove (20).

9. The tail gas purification equipment for etching liquid production according to claim 8, characterized in that: After the left end of the push trigger rod (11) enters the interior of the force-bearing inclined groove (20), the left end of the push trigger rod (11) pushes against the inclined surface of the force-bearing inclined groove (20).

10. The tail gas purification equipment for etching liquid production according to claim 9, characterized in that: When the inclined surface of the force-bearing inclined groove (20) is pushed, it will move the limiting plug-in slider (19) inwardly; after the limiting plug-in slider (19) moves inwardly, the outer end of the limiting plug-in slider (19) will be separated from the inside of the limiting plug hole (15).

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