Uniform mixing device for photoresist production

Abstract

The invention discloses a uniform mixing device for photoresist production, and mainly relates to photoresist mixing equipment. Comprising a base plate and a material barrel, a lifting rod is installed on the upper surface of the base plate, a machine arm is fixedly installed at the output end of the lifting rod, a servo motor is fixedly connected to one end of the machine arm, a connecting rod is fixedly connected to the output end of the servo motor, and a distribution box is installed on the base plate; and the distribution box is used for supplying power to the servo motor and the lifting rod, and a mixing and cleaning mechanism is arranged on the connecting rod and comprises a sliding ring. The photoresist stirring device has the beneficial effects that the problems that when a stirring shaft is used for stirring and uniformly mixing photoresist raw materials, the materials are in a vortex shape under the centrifugal effect, so that the liquid level of the materials located at the edge of the vortex is higher than the liquid level before stirring, part of the materials are left on the inner wall of a material barrel, and the materials left on the inner wall of the material barrel cannot be fully mixed are solved; therefore, the uniform mixing effect of the materials is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of photoresist mixing equipment, and in particular to a uniform mixing device for photoresist production. Background Art

[0002] Photoresist mixing equipment refers to equipment that mixes raw materials such as resin (or polymer), photosensitizer (or photoinitiator) and solvent to prepare photoresist.

[0003] Prior art, such as the invention with publication number CN116371283B, discloses a raw material mixing device for photoresist production and a mixing method thereof, which are applied to photoresist production and include: a sealed mixing chamber and a rotating motor, wherein the output shaft of the rotating motor is connected to a stirring shaft; the stirring shaft includes a first bridging shaft, a hollow clamping seat, and a second bridging shaft, an interlocking structure is installed on the outer side of the first bridging shaft, and a changing structure is clamped on the outer wall of the second bridging shaft, the interlocking structure slides down and is clamped in the connection gap between the first bridging shaft and the second bridging shaft, the changing structure drives the second bridging shaft to change direction when it is pushed out and guides the second bridging shaft after it is retracted, a stirring bucket is hinged on the second bridging shaft, and the bottom of the stirring bucket contacts the upper end of the liquid surface in the mixing chamber, which solves the problem of raw materials dissolving into other substances, can seal and evenly input solid raw materials, and the solid raw materials can be evenly dissolved after input.

[0004] However, in the process of using the above-mentioned equipment to produce and prepare photoresist, it was found that when the photoresist raw material is stirred and mixed by using a stirring shaft, the material will be centrifuged and take on a vortex shape. Therefore, the material liquid level at the edge of the vortex will be higher than before stirring. This will cause some material to remain on the inner wall of the barrel. The material remaining on the inner wall of the barrel cannot be fully mixed, thereby reducing the mixing effect of the material. Summary of the invention

[0005] The purpose of the present invention is to solve the problem in the prior art that when a photoresist raw material is stirred and mixed by a stirring shaft, the material will be centrifugal and take on a vortex shape, so the material liquid level at the edge of the vortex will be higher than that before stirring, which will cause part of the material to remain on the inner wall of the barrel. The material remaining on the inner wall of the barrel cannot be fully mixed, thereby reducing the mixing effect of the material, and a uniform mixing device for photoresist production is proposed.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a uniform mixing device for producing photoresist, comprising a pad and a material barrel, a lifting rod is installed on the upper surface of the pad, an arm is fixedly installed on the output end of the lifting rod, one end of the arm is fixedly connected to a servo motor, the output end of the servo motor is fixedly connected to a connecting rod, a distribution box is installed on the pad, the distribution box is used to supply power to the servo motor and the lifting rod, a mixing and cleaning mechanism is provided on the connecting rod, the mixing and cleaning mechanism comprises a slip ring, the slip ring is slidably connected to the connecting rod, three rotating plates are rotatably connected to the circular arc surface of the slip ring, one end of the rotating plate is rotatably connected to the circular arc plate, a scraper is fixedly connected to the outer circular arc surface of the circular arc plate, a connecting block is clamped on the connecting rod, and a bellows is fixedly connected between the connecting block and the circular arc plate.

[0007] The effect achieved by the above components is: the arc plate can be driven to expand outward by the sliding ring, and when the material is stirred, the material remaining on the barrel can be scraped downward, thereby facilitating the mixing of the material remaining on the barrel wall.

[0008] Preferably, a spring is provided inside the bellows, and two ends of the spring are respectively fixedly connected to the connecting block and the arc plate; a telescopic rod is provided inside the spring, and two ends of the telescopic rod are respectively fixedly connected to the connecting block and the arc plate.

[0009] The effect achieved by the above components is: elastic force can be applied to the arc plate, so as to facilitate the rapid retraction of the arc plate.

[0010] Preferably, a stirring assembly is provided on the connecting rod, and the stirring assembly includes a clamping ring, which is fixedly connected to the connecting rod, and the arc surface of the clamping ring is fixedly connected to a plurality of fixing rods, and the arc surface of the fixing rod is evenly fixedly connected to a plurality of stirring rods.

[0011] The effect achieved by the above components is that the connecting rod can drive the stirring assembly to rotate, thereby stirring and mixing the materials inside the barrel.

[0012] Preferably, an electric push rod is clamped on the arc surface of the connecting rod, an output end of the electric push rod is fixedly connected to a lug plate, a lower end of the lug plate is fixedly connected to a slip ring, and the electric push rod is rechargeable.

[0013] The effect achieved by the above components is: the slip ring can be pushed to move by the electric push rod to control the arc plate to expand or contract outward.

[0014] Preferably, a plurality of limit bars are fixedly connected to the arc surface of the connecting rod, and the slip ring is provided with limit grooves corresponding to the positions of the limit bars, and the slip ring is slidably connected to the limit bars via the limit grooves.

[0015] The effect achieved by the above components is: achieving the effect of limiting the up and down sliding positions of the slip ring.

[0016] Preferably, the connection block is connected to a mounting ring, a screw rod is inserted into the inner thread of the mounting ring, and the screw rod passes through the connecting rod.

[0017] The effect achieved by the above components is that the connecting block can be quickly disassembled and assembled from the connecting rod.

[0018] Preferably, the arc plate and the scraper are integrally formed, and the scraper has a wide blade and faces downward.

[0019] The effect achieved by the above components is that the scraped residual material can flow down more smoothly.

[0020] Preferably, the pad is provided with a limiting mechanism, which includes a fixing frame, which is fixedly connected to the pad, a clamping plate is fixedly connected to the upper end of the fixing frame, two supporting frames are fixedly connected to the pad, and the upper ends of the two supporting frames are slidably connected to the same rack, one end of the rack is fixedly connected to a fixing plate, a side of the fixing plate close to the clamping plate is fixedly connected to a positioning plate, the rack meshes with a gear, the axial position of the gear is fixedly connected to a rotating shaft, the lower end of the rotating shaft is fixedly connected to the pad, the clamping plate and the positioning plate are both arc-shaped, the arc surface of the rotating shaft is fixedly connected to a circular plate, a pressure rod is inserted into the internal thread of the circular plate, and a rubber pad is fixedly connected to the position of the pad corresponding to the pressure rod.

[0021] The effect achieved by the above components is: the material barrel can be clamped and fixed with the help of the positioning plate and the clamping plate, thereby avoiding the situation where the material barrel and the pad rotate when the material is stirred, thereby reducing the material stirring efficiency.

[0022] Preferably, the sides of the positioning plate and the clamping plate that are close to each other are fixedly connected with anti-skid pads, and the anti-skid pads are evenly provided with anti-skid patterns.

[0023] The effect achieved by the above components is: the fixing strength of the positioning plate and the clamping plate on the material barrel is improved.

[0024] Preferably, a handle is fixedly connected to the upper end of the gear, and the cross-section of the handle is "T"-shaped.

[0025] The effect achieved by the above components is: it is convenient to rotate the gear to adjust the position of the positioning plate.

[0026] In summary, the beneficial effects of the present invention are:

[0027] In the present invention, two effects are achieved at the same time by setting up a mixing and cleaning mechanism. One is that the material remaining on the inner wall of the barrel can be pushed and cleaned, so that the material remaining on the inner wall of the barrel can flow down quickly, which is conducive to stirring; the second is that the scraper and the arc plate themselves can also play a certain stirring role on the material, further improving the stirring efficiency of the material.

[0028] In the present invention, by providing a limiting mechanism, the effect of quickly limiting the material barrel is achieved, thereby avoiding the situation where the material barrel and the pad rotate when the material is stirred due to the thickness of the material, thereby reducing the stirring efficiency of the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Attached Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0030] Attached Figure 2 The present invention Figure 1 The structural diagram on the left;

[0031] Attached Figure 3 The present invention Figure 1 Schematic diagram of the local structure;

[0032] Attached Figure 4 It is a structural schematic diagram of the mixing and cleaning mechanism of the present invention;

[0033] Attached Figure 5 It is a partial structural schematic diagram of the mixing and cleaning mechanism of the present invention;

[0034] Attached Figure 6 The present invention Figure 5 Schematic diagram of the local structure;

[0035] Attached Figure 7 The present invention Figure 6 sectional view of;

[0036] Attached Figure 8 It is a partial structural schematic diagram of the limiting mechanism of the present invention;

[0037] Attached Fig. 9 The present invention Figure 2 Schematic diagram of the local structure;

[0038] Attached Fig.10 The present invention Fig. 9 Schematic diagram of the structure on the left.

[0039] Numbers shown in the accompanying drawings: 1, pad; 2, lifting rod; 3, machine arm; 4, servo motor; 5, connecting rod; 6, distribution box; 7, stirring assembly; 71, clamping ring; 72, fixing rod; 73, stirring rod; 8, mixing and cleaning mechanism; 801, slip ring; 802, rotating plate; 803, arc plate; 804, scraper; 805, connecting block; 806, bellows; 807, spring; 808, telescopic rod; 809, Limiting strip; 810, electric push rod; 811, mounting ring; 812, screw; 813, ear plate; 9, limiting mechanism; 901, fixing frame; 902, clamping plate; 903, supporting frame; 904, rack; 905, fixing plate; 906, positioning plate; 907, rotating shaft; 908, gear; 909, handle; 910, round plate; 911, pressure rod; 912, rubber pad; 913, anti-skid pad; 10, barrel. DETAILED DESCRIPTION

[0040] The present invention will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms fall within the scope limited by the appended claims of the application equally.

[0041] Reference Figure 1 As shown, the present invention provides a technical solution: a uniform mixing device for producing photoresist, comprising a pad 1 and a material barrel 10, a lifting rod 2 is installed on the upper surface of the pad 1, an arm 3 is fixedly installed on the output end of the lifting rod 2, a servo motor 4 is fixedly connected to one end of the arm 3, a connecting rod 5 is fixedly connected to the output end of the servo motor 4, a distribution box 6 is installed on the pad 1, the distribution box 6 is used to supply power to the servo motor 4 and the lifting rod 2, a mixing and cleaning mechanism 8 is provided on the connecting rod 5, and a limiting mechanism 9 is provided on the pad 1.

[0042] The specific arrangement and function of the mixing and cleaning mechanism 8 and the limiting mechanism 9 will be described in detail below.

[0043] Reference Figures 2 to 7As shown, in this embodiment: the mixing and cleaning mechanism 8 includes a slip ring 801, which is slidably connected to the connecting rod 5, and the arc surface of the slip ring 801 is rotatably connected to three rotating plates 802, one end of the rotating plate 802 is rotatably connected to the arc plate 803, and the outer arc surface of the arc plate 803 is fixedly connected to a scraper 804, and a connecting block 805 is clamped on the connecting rod 5, and a bellows 806 is fixedly connected between the connecting block 805 and the arc plate 803. The sliding slip ring 801 can drive the arc plate 803 to expand outward, and when the material is stirred, the material remaining on the barrel 10 can be scraped downward, thereby facilitating the mixing of the material remaining on the barrel wall. A spring 807 is arranged inside the bellows 806, and the two ends of the spring 807 are fixedly connected to the connecting block 805 and the arc plate 803, respectively. A telescopic rod 808 is arranged inside the spring 807, and the two ends of the telescopic rod 808 are fixedly connected to the connecting block 805 and the arc plate 803, respectively. The effect of applying elastic force to the arc plate 803 and facilitating the rapid retraction of the arc plate 803 is achieved. A stirring assembly 7 is arranged on the connecting rod 5, and the stirring assembly 7 includes a clamping ring 71, and the clamping ring 71 is fixedly connected to the connecting rod 5. A plurality of fixed rods 72 are fixedly connected to the arc surface of the clamping ring 71, and a plurality of stirring rods 73 are evenly fixedly connected to the arc surface of the fixed rod 72. The effect of making the connecting rod 5 drive the stirring assembly 7 to rotate and stir and mix the materials inside the barrel 10 is achieved. The arc surface of the connecting rod 5 is clamped with an electric push rod 810, and the output end of the electric push rod 810 is fixedly connected with an ear plate 813, and the lower end of the ear plate 813 is fixedly connected to the slip ring 801, and the electric push rod 810 is rechargeable. The electric push rod 810 can be used to push the slip ring 801 to move and control the arc plate 803 to expand or contract outward. The arc surface of the connecting rod 5 is fixedly connected with a plurality of limit bars 809, and the slip ring 801 is provided with a limit groove corresponding to the position of the limit bar 809, and the slip ring 801 is slidably connected with the limit bar 809 by means of the limit groove. The effect of limiting the sliding position of the slip ring 801 up and down is achieved. The connecting block 805 is connected with a mounting ring 811, and a screw 812 is inserted into the inner thread of the mounting ring 811, and the screw 812 passes through the connecting rod 5. The effect of quickly disassembling and assembling the connecting block 805 from the connecting rod 5 is achieved. The arc plate 803 and the scraper 804 are integrally formed, and the scraper 804 is a wide blade and faces downward, so that the scraped residual material can flow down more smoothly.

[0044] Reference Figure 8 , Fig. 9 and Fig.10As shown, in this embodiment: the limiting mechanism 9 includes a fixed frame 901, the fixed frame 901 is fixedly connected to the pad 1, the upper end of the fixed frame 901 is fixedly connected with a clamping plate 902, the pad 1 is fixedly connected with two support frames 903, the upper ends of the two support frames 903 are slidably connected with the same rack 904, one end of the rack 904 is fixedly connected with a fixed plate 905, the side of the fixed plate 905 close to the clamping plate 902 is fixedly connected with a positioning plate 906, the rack 904 is meshed with a gear 908, the axial position of the gear 908 is fixedly connected with a rotating shaft 907, the lower end of the rotating shaft 907 is fixedly connected to the pad 1, the clamping plate 902 and the positioning plate 906 are both arc-shaped, the arc surface of the rotating shaft 907 is fixedly connected with a circular plate 910, the internal thread of the circular plate 910 is inserted with a pressure rod 911, and the pad 1 is fixedly connected with a rubber pad 912 at the position corresponding to the pressure rod 911. The material barrel 10 can be clamped and fixed by means of the positioning plate 906 and the card plate 902, thereby preventing the material barrel 10 from rotating with the pad 1 when the material is stirred, thereby reducing the material stirring efficiency. The side where the positioning plate 906 and the card plate 902 are close to each other is fixedly connected with an anti-skid pad 913, and the anti-skid pad 913 is evenly provided with anti-skid grooves. The effect of improving the fixing strength of the positioning plate 906 and the card plate 902 on the material barrel 10 is achieved. The upper end of the gear 908 is fixedly connected with a handle 909, and the cross-section of the handle 909 is "T"-shaped. The effect of conveniently rotating the gear 908 to adjust the position of the positioning plate 906 is achieved.

[0045] Detailed description of the method of use: When it is necessary to prepare photoresist, first put the raw material of photoresist into the material barrel 10, then move the material barrel 10 onto the pad 1, and then turn the handle 909 to make the handle 909 drive the gear 908 to rotate, and the gear 908 rotates to drive the rack 904 to move, and the rack 904 will slide along the support frame 903, and the rack 904 will drive the positioning plate 906 to move in the direction close to the card plate 902, and the positioning plate 906 and the card plate 902 will clamp the material barrel 10 on the pad 1, and the anti-skid pad 913 has the effect of improving the surface roughness of the positioning plate 906 and the card plate 902, and then turn the pressure rod 911 so that the pressure rod 911 is squeezed on the rubber pad 912 by means of the thread, so as to achieve the effect of fixing the rotation angle of the gear 908;

[0046] After the material barrel 10 is fixed by the limiting mechanism 9, the lifting rod 2 is started, so that the lifting rod 2 drives the machine arm 3 to move, and the machine arm 3 drives the connecting rod 5 to extend into the material barrel 10, and then the servo motor 4 is started. At this time, the servo motor 4 will drive the connecting rod 5 to rotate, and the connecting rod 5 will drive the stirring rod 73 of the stirring assembly 7 to rotate. At this time, the stirring rod 73 can be used to stir the material. During the stirring process, if it is found that there is a lot of material remaining inside the material barrel 10, the lifting rod 2 is directly started, so that the scraper 804 is located above the residual material but not exceeding the height of the material barrel 10, and then the electric push rod 810 is started, so that the electric push rod 810 drives the slip ring 801 to move downward, and the slip ring 801 will slide downward along the surface of the limiting strip 809. During the sliding process of the slip ring 801, the rotating plate 802 will be driven to rotate, and the rotation of the rotating plate 802 will drive the arc plate 803 to expand outward. At this time, the spring 807 and the bellows 806 will be stretched. When the scraper 804 When it contacts the inner wall of the barrel 10, the electric push rod 810 is turned off, and then the lifting rod 2 is started, so that the connecting rod 5 drives the scraper 804 to move downward. The downward movement of the scraper 804 will push the material remaining on the inner wall of the barrel 10 to the bottom. At this time, the servo motor 4 can continue to be started to rotate the scraper 804 to evenly push the material remaining on the circumference of the barrel 10. The bellows 806 can apply elastic force to the arc plate 803 and cover and protect the spring 807 to prevent the material from affecting the normal expansion and contraction of the spring 807.

Claims

1. A uniform mixing device for producing photoresist, comprising a pad (1) and a material barrel (10), wherein a lifting rod (2) is installed on the upper surface of the pad (1), an arm (3) is fixedly installed on the output end of the lifting rod (2), one end of the arm (3) is fixedly connected to a servo motor (4), and the output end of the servo motor (4) is fixedly connected to a connecting rod (5), a distribution box (6) is installed on the pad (1), and the distribution box (6) is used to supply power to the servo motor (4) and the lifting rod (2), characterized in that: The connecting rod (5) is provided with a mixing and cleaning mechanism (8), the mixing and cleaning mechanism (8) comprising a slip ring (801), the slip ring (801) being slidably connected to the connecting rod (5), the arc surface of the slip ring (801) being rotatably connected to three rotating plates (802), one end of the rotating plate (802) being rotatably connected to an arc plate (803), the outer arc surface of the arc plate (803) being fixedly connected to a scraper (804), a connecting block (805) being clamped on the connecting rod (5), and a bellows (806) being fixedly connected between the connecting block (805) and the arc plate (803).

2. A uniform mixing device for photoresist production according to claim 1, characterized in that: A spring (807) is arranged inside the bellows (806), and two ends of the spring (807) are respectively fixedly connected to the connecting block (805) and the circular arc plate (803). A telescopic rod (808) is arranged inside the spring (807), and two ends of the telescopic rod (808) are respectively fixedly connected to the connecting block (805) and the circular arc plate (803).

3. A uniform mixing device for photoresist production according to claim 2, characterized in that: The connecting rod (5) is provided with a stirring assembly (7), the stirring assembly (7) comprising a clamping ring (71), the clamping ring (71) being fixedly connected to the connecting rod (5), the arc surface of the clamping ring (71) being fixedly connected to a plurality of fixing rods (72), and the arc surface of the fixing rod (72) being evenly fixedly connected to a plurality of stirring rods (73).

4. A uniform mixing device for photoresist production according to claim 1, characterized in that: The arc surface of the connecting rod (5) is clamped with an electric push rod (810), the output end of the electric push rod (810) is fixedly connected with an ear plate (813), the lower end of the ear plate (813) is fixedly connected to a slip ring (801), and the electric push rod (810) is a rechargeable type.

5. A uniform mixing device for photoresist production according to claim 1, characterized in that: The arc surface of the connecting rod (5) is fixedly connected with a plurality of limit strips (809), and the slip ring (801) is provided with limit slots corresponding to the positions of the limit strips (809). The slip ring (801) is slidably connected with the limit strips (809) by means of the limit slots.

6. A uniform mixing device for photoresist production according to claim 1, characterized in that: The connection block (805) is connected to a mounting ring (811), and a screw rod (812) is inserted into the internal thread of the mounting ring (811), and the screw rod (812) passes through the connection rod (5).

7. A uniform mixing device for photoresist production according to claim 1, characterized in that: The arc plate (803) and the scraper (804) are integrally formed, and the scraper (804) has a wide blade and faces downward.

8. A uniform mixing device for photoresist production according to claim 1, characterized in that: The backing plate (1) is provided with a limiting mechanism (9), the limiting mechanism (9) comprising a fixing frame (901), the fixing frame (901) being fixedly connected to the backing plate (1), the upper end of the fixing frame (901) being fixedly connected to a clamping plate (902), the backing plate (1) being fixedly connected to two supporting frames (903), the upper ends of the two supporting frames (903) being slidably connected to the same rack (904), one end of the rack (904) being fixedly connected to a fixing plate (905), and a side of the fixing plate (905) close to the clamping plate (902) being fixedly connected to the fixing plate (905). A positioning plate (906) is fixedly connected to the rack (904), a gear (908) is meshed with the rack (904), a rotating shaft (907) is fixedly connected to the axial position of the gear (908), the lower end of the rotating shaft (907) is fixedly connected to the pad (1), the clamping plate (902) and the positioning plate (906) are both arc-shaped, the arc surface of the rotating shaft (907) is fixedly connected to a circular plate (910), a pressure rod (911) is inserted into the internal thread of the circular plate (910), and a rubber pad (912) is fixedly connected to the pad (1) at the position corresponding to the pressure rod (911).

9. A uniform mixing device for photoresist production according to claim 8, characterized in that: The sides of the positioning plate (906) and the clamping plate (902) that are close to each other are fixedly connected with an anti-skid pad (913), and the anti-skid pad (913) is evenly provided with anti-skid patterns.

10. The uniform mixing device for producing photoresist according to claim 5, characterized in that: The upper end of the gear (908) is fixedly connected to a handle (909), and the cross-section of the handle (909) is "T"-shaped.

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