Distribution device, distribution system with distribution device and distribution method

Abstract

A dispensing device capable of accurately and quantitatively dispensing a dispensing liquid to a dripping position, a dispensing system including the same, and a dispensing method are provided. The dispensing device includes a nozzle member, a nozzle mounting block, and a suction member. The nozzle member is configured to dispense a dispensing liquid through a dispensing hole defined at a front end thereof. The nozzle mounting block is configured to provide a vacuum forming space around a leading end of the nozzle member. The suction component is configured to vacuumize the interior of the vacuum forming space.

Description

Technical Field

[0001] The present disclosure relates to a dispensing device, a dispensing system including the dispensing device, and a dispensing method, and more particularly, to a dispensing device capable of accurately dispensing a dispensing liquid to a dripping position, a dispensing system including the dispensing device, and a dispensing method. Background Art

[0002] A dispensing device is a device that sprays a certain amount of dispensing liquid through a nozzle to apply (dispense) a correct predetermined amount of dispensing liquid to a corresponding position of a target object. The dispensing device can be used to perform coating or bonding of corresponding parts in precision industries such as display manufacturing processes, and can be used to dispense liquid crystal (LC) in packaging and unit process processes.

[0003] At the moment when the dispensing liquid is dispensed from the dispensing device, droplets may scatter, and the scattered droplets may contaminate other areas other than the intended position. In addition, in the case where the dispensing liquid is a liquid crystal (LC) or the like, the dispensing liquid may not be cut into a drop shape but stretched, so the dispensing liquid may drip in a tadpole shape instead of a circular shape, causing the tail to deviate from the corresponding part, thereby reducing the coating quality.

[0004] Therefore, there is a need for a technology that can prevent contamination caused by the generation of scattered droplets and tails of dripping dispensed liquid when dispensing liquid.

[0005] [Prior art literature]

[0006] [Patent Document]

[0007] Korean Patent No. 10-1461438 Summary of the invention

[0008] The present disclosure provides a dispensing device, which can accurately and quantitatively dispense a dispensing liquid to a dripping position without generating droplet tails and contamination caused by scattered droplets, and also provides a dispensing system and a dispensing method including the dispensing device.

[0009] According to an exemplary embodiment, a dispensing device includes: a nozzle component configured to dispense a dispensing liquid through a dispensing hole provided at a front end thereof; a nozzle mounting block configured to provide a vacuum forming space around the front end of the nozzle component; and a suction component configured to evacuate the interior of the vacuum forming space.

[0010] The nozzle mounting block may include an insertion groove for the front end of the nozzle member to be inserted, wherein a width of the insertion groove may be greater than a width of the front end of the nozzle member.

[0011] The vacuum forming space may be provided between an inner surface of the insertion groove and an outer surface of the front end of the nozzle member.

[0012] The dispensing device may further include a nozzle fixing member to which the rear end of the nozzle member is fixed and which is supported on the nozzle mounting block, wherein the nozzle fixing member may be supported on the nozzle mounting block so that the front end of the nozzle member is spaced apart from the inner surface of the insertion groove.

[0013] The dispensing device may further include a seal disposed between the nozzle fixing member and the nozzle mounting block.

[0014] The nozzle mounting block may further include a communicating hole communicating with the insertion groove, and the dispensing hole of the nozzle member may be disposed concentrically with the communicating hole.

[0015] The diameter of the communication hole may correspond to about 90% to about 110% of the diameter of the dispensing hole.

[0016] The dispensing hole and the communicating hole may be disposed on different planes, and a spacing distance between the dispensing hole and the communicating hole may be about 5% to about 10% of a diameter of the dispensing hole.

[0017] The suction component may include: a suction pipeline configured to exhaust the vacuum forming space; and a suction pump connected to the suction pipeline.

[0018] The nozzle mounting block may include: a first suction channel extending to the outside of the vacuum forming space; and a second suction channel connected to the first suction channel and extending in a direction crossing an extending direction of the first suction channel.

[0019] A plurality of first suction channels may be provided.

[0020] The nozzle mounting block may further include a buffer channel configured to allow two or more first suction channels to communicate with each other to be connected to the second suction channel.

[0021] The dispensing device may further include a controller configured to control the nozzle member and the suction member so that the dispensing liquid is dispensed from the dispensing hole while the inside of the vacuum forming space is evacuated.

[0022] According to another exemplary embodiment, a dispensing system includes: a stage configured to support a target object; a dispensing device disposed on the stage; and a driver configured to move the stage or the dispensing device.

[0023] The target object may include a glass substrate and the dispensed liquid may include liquid crystal.

[0024] According to another exemplary embodiment, the dispensing method includes: evacuating a vacuum forming space disposed around a front end of a nozzle component; dispensing a dispensing liquid from a dispensing hole of the nozzle component while evacuating the vacuum forming space; and aspirating and discharging at least one of scattered droplets or droplet trails of the dispensing liquid.

[0025] The sucking and discharging may include: sucking scattered liquid droplets by forming a first vacuum degree in the vacuum forming space; and sucking the liquid droplet tail by forming a second vacuum degree equal to or greater than the first vacuum degree.

[0026] The vacuum forming space may be formed between the inner surface of the insertion groove and the outer surface of the front end of the nozzle member by inserting the front end of the nozzle member into the insertion groove of the nozzle mounting block.

[0027] The distance between the inner surface of the insertion groove and the outer surface of the front end of the nozzle member may be equal to or smaller than the diameter of the dispensing hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The exemplary embodiments may be understood in more detail from the following description in conjunction with the accompanying drawings:

[0029] Figure 1 is a schematic cross-sectional view of a dispensing device according to an exemplary embodiment;

[0030] Figure 2 is a cross-sectional view showing a first suction channel and a second suction channel of a nozzle mounting block according to an exemplary embodiment;

[0031] Figure 3 is a schematic cross-sectional view of a dispensing system according to another exemplary embodiment; and

[0032] Figure 4 is a flow chart illustrating an allocating method according to yet another exemplary embodiment.

[0033] [Explanation of symbols]

[0034] 10: Dispense liquid 11: Dispense droplets

[0035] 11a: Droplet 11b: Droplet tail

[0036] 12: Falling droplets 13: Scattering droplets

[0037] 20: Target object 100: Dispensing device

[0038] 110: Nozzle component 111: Dispensing hole

[0039] 120: Nozzle mounting block 121: Insertion slot

[0040] 122: Connecting hole 125: Vacuum forming space

[0041] 131: first suction channel 131a: first horizontal channel

[0042] 131b: second horizontal channel 131c: third horizontal channel

[0043] 132: Second suction channel 133: Buffer channel

[0044] 140: Nozzle fixing part 151: Seal

[0045] 200: Distribution system 210: Carrier DETAILED DESCRIPTION

[0046] Below, specific embodiments will be described in more detail with reference to the accompanying drawings. However, the present invention can be embodied in different forms and should not be construed as being limited to the embodiments described herein. On the contrary, these embodiments are provided to make the present disclosure comprehensive and complete and to fully convey the scope of the present invention to those skilled in the art. In the description, the same components are represented by the same reference numerals. In the figures, the sizes of layers and regions are exaggerated for clarity. The same reference numerals refer to the same components throughout the text.

[0047] Figure 1 is a schematic cross-sectional view of a dispensing device according to an exemplary embodiment.

[0048] Reference Figure 1 According to an exemplary embodiment, a dispensing device 100 may include a nozzle component 110 that dispenses a dispensing liquid 10 through a dispensing hole 111 at a front end, a nozzle mounting block 120 that sets a vacuum forming space 125 around the front end of the nozzle component 110, and a suction component (not shown) that vacuums the interior of the vacuum forming space 125.

[0049] The nozzle member 110 may have a dispensing hole 111 at the front end, and the dispensing liquid 10 may be dispensed through the dispensing hole 111 at the front end, and the dispensing liquid 10 may be applied (dispensed) to a corresponding position (or target position) of the target object 20. Here, the target object 20 may include a substrate such as glass, organic or semiconductor. For example, the nozzle member 110 may form a dispensing hole 111 at the front end (part), and the dispensing liquid 10 dispensed from the dispensing hole 111 may fall vertically to a corresponding position of the target object 20 under the action of gravity.

[0050] The nozzle mounting block 120 may be provided with a vacuum forming space 125 around the front end of the nozzle member 110 to provide suction pressure around the dispensing hole 111. Here, the vacuum forming space 125 may be connected to a suction member (not shown) and evacuated (or suction-exhausted) to form a vacuum, and the vacuum degree may be controlled according to the suction strength of the suction member (not shown).

[0051] The suction component (not shown) can exhaust the vacuum in the vacuum forming space 125 to form a vacuum in the vacuum forming space 125, thereby providing suction pressure around the dispensing hole 111, and can also remove scattered droplets 13 and / or droplet tails other than a set dispensing amount (or a constant amount) of the dispensing liquid 10 dispensed through the dispensing hole 111. Here, the suction component (not shown) can control the suction (or exhaust) strength, and therefore, the vacuum degree of the vacuum forming space 125 can be controlled.

[0052] The dispensing device 100 according to the exemplary embodiment may be provided with a vacuum forming space 125 around the front end of the nozzle member 110 to dispense the scattered droplets 13 and / or the droplet tail 11b generated when the dispensing liquid 10 is dispensed to the dispensing hole 111 of the nozzle member 110, thereby preventing the portion (or area) other than the dripping position (or target position) from being contaminated due to the scattered droplets 13 and the tail portion of the dripping dispensing liquid (or dripping droplet) from being generated due to the droplet tail 11b. Therefore, the coating quality of the dispensing device 100 may be improved.

[0053] Here, the nozzle mounting block 120 may include an insertion groove 121 into which the front end (eg, lower portion) of the nozzle member 110 is inserted, and the front end (portion) of the nozzle member 110 defining the dispensing hole 111 may be inserted.

[0054] Here, the width of the insertion groove 121 may be wider than the front end of the nozzle member 110. For example, the insertion groove 121 may be larger than the insertion portion (or front end) of the nozzle member 110, the cross-sectional area (or width) of the insertion groove 121 may be larger than the cross-sectional area (or width) of the nozzle member 110, and the nozzle member 110 may be spaced apart from the inner surface of the insertion groove 121.

[0055] That is, by inserting the front end of the nozzle component 110 into the insertion groove 121 and separating the outer surface of the front end of the nozzle component 110 from the inner surface of the insertion groove 121, a vacuum forming space 125 can be defined between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle component 110.

[0056] For example, the insertion groove 121 may be defined to correspond to the front end (shape) of the nozzle member 110, and the distance between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle member 110 may be always constant (or the same). Therefore, the vacuum degree may be consistent (or the same) throughout the vacuum forming space 125, and an overall uniform suction pressure may be generated around the dispensing hole 111 of the nozzle member 110.

[0057] In an exemplary embodiment, the front end of the nozzle member 110 can be inserted into the insertion groove 121 of the nozzle mounting block 120 to form a vacuum-formed space 125 between the inner surface of the insertion groove 121 of the nozzle mounting block 120 and the outer surface of the front end of the nozzle member 110, thereby generating suction pressure around the dispensing hole 111 of the nozzle member 110 (or about 360°) as a whole to effectively suck and dispense the scattered droplets 13 and the droplet tails 13b. That is, the suction pressure can be provided throughout the 360° area around the dispensing hole 111 through the vacuum-formed space 125, so that all the scattered droplets 13 can be sucked regardless of the scattering direction of the scattered droplets 13.

[0058] The dispensing device 100 according to the exemplary embodiment may further include a nozzle fixing member 140 to which a rear end of the nozzle member 110 is fixed and supported, the nozzle fixing member 140 being located on the nozzle mounting block 120 .

[0059] The nozzle fixing member 140 may fix the nozzle member 110. Here, the rear end (e.g., upper end) of the nozzle member 110 opposite to the front end may be fixed, and the front end of the nozzle member 110 may be inserted into the insertion groove 121 and supported on the upper end (or top surface) of the nozzle mounting block 120. For example, the rear end of the nozzle member 110 may be inserted and fixed in the nozzle fixing member 140, and the front end of the nozzle member 110 may protrude to the lower portion of the nozzle fixing member 140 and be inserted into the insertion groove 121, and thus, the bottom surface (or lower end) of the nozzle fixing member 140 may be supported on the upper end (surface) of the nozzle mounting block 120.

[0060] Here, the nozzle fixing member 140 is supported through the nozzle mounting block 120, and the front end of the nozzle member 110 can be spaced apart from the inner surface of the insertion groove 121, so that the vacuum forming space 125 can be defined between the inner surface of the insertion groove 121 of the nozzle mounting block 120 and the outer surface of the front end of the nozzle member 110, and the distance between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle member 110 can be constant. In addition, the distance between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle member 110 can be uniform as a whole, so that a suction and exhaust path (i.e., a vacuum forming space) having a uniform width can be provided in the insertion groove 121, and a uniform and smooth exhaust flow can be generated. Therefore, the scattered droplets 13 and the droplet tail 11b can be effectively sucked and discharged along the suction and exhaust path.

[0061] In addition, the dispensing device 100 according to the exemplary embodiment may further include a seal 151 disposed between the nozzle fixing member 140 and the nozzle mounting block 120 .

[0062] The seal 151 may be disposed between the nozzle fixing member 140 and the nozzle mounting block 120 to seal the gap between the nozzle fixing member 140 and the nozzle mounting block 120, so that the suction pressure does not leak except for the periphery (or vicinity) of the dispensing hole 111, and a vacuum (degree) can be effectively formed in the vacuum forming space 125. For example, the seal 151 may be disposed between the lower end (or bottom surface) of the nozzle fixing member 140 and the upper end (or top surface) of the nozzle mounting block 120, and a groove may be defined on the top surface of the nozzle mounting block 120 so that the seal 151 is disposed in the groove. Here, the seal 151 may include an O-ring.

[0063] The nozzle mounting block 120 may further include a communication hole 122 communicating with the insertion groove 121. The communication hole 122 may be communicated with the insertion groove 121 and located opposite to (or communicated with) the dispensing hole 111 to allow the dispensing liquid 10 dispensed from the dispensing hole 111 to pass through. For example, the dispensing liquid 10 dispensed from the dispensing hole 111 may allow only the droplet 11a of the dispensing droplet 11 to drip to the target position (or dripping position) of the target object 20 through the communication hole 122, while the droplet tail 11b and / or the scattered droplet 13 may be sucked (discharged) to the vacuum forming space 125.

[0064] Here, the dispensing hole 111 of the nozzle member 110 may be arranged concentrically with the connecting hole 122. That is, the centers of the dispensing hole 111 and the connecting hole 122 of the nozzle member 110 may be located (coincident with) on a straight line, so that the dispensing droplet 11 dispensed from the dispensing hole 111 can well penetrate the connecting hole 122, and when the dispensing droplet 11 penetrates the connecting hole 122, only the droplet 11a can completely pass through the connecting hole 122, and the droplet tail 11b may not completely leak out of the connecting hole 122, and thus be sucked into the vacuum forming space 125 by the suction pressure.

[0065] Here, the diameter of the communicating hole 122 may be about 90% to about 110% of the diameter of the dispensing hole 111, and the diameter of the communicating hole 122 may be as equal to the diameter of the dispensing hole 111 as possible. When the diameter of the communicating hole 122 is less than about 90% of the diameter of the dispensing hole 111, the droplet 11a may collide with the periphery of the communicating hole 122 when passing through the communicating hole 122, thereby increasing the amount of the scattered droplets 13 and reducing the size, and therefore, the amount of the dispensed droplets (or dispensed liquid) applied (or deposited) at the dripping position is small, and a large amount of the scattered droplets 13 may not be completely removed. On the other hand, if the diameter of the communicating hole 122 is greater than about 110% of the diameter of the dispensing hole 111, the suction pressure may leak through the communicating hole 122, and the entrance (or starting position) of the vacuum forming space 125 may be far away from the droplet tail 11b, and therefore, the suction pressure may not be properly transmitted to the droplet tail 11b, and the droplet tail 11b may not be sufficiently (or completely) sucked. As a result, a large amount of dispensed liquid may be applied to the dripping position, or a droplet tail may be generated on the dripping droplet 12, so that the dispensed liquid 10 is applied in a tadpole shape.

[0066] However, when the diameter of the connecting hole 122 is approximately 90% to approximately 110% of the diameter of the dispensing hole 111, all the scattered droplets 13 can be sucked, and therefore, the droplet tail 11b can be fully (or completely) sucked to prevent the scattered droplets 13 from contaminating parts other than the dripping position, and also to prevent the droplet tail 11b from being generated on the dripping droplet 12.

[0067] In addition, the dispensing hole 111 and the communicating hole 122 may be in different planes, and the distance between the dispensing hole 111 and the communicating hole 122 may be about 5% to about 10% of the diameter of the dispensing hole 111. The nozzle member 110 may be spaced apart from the inner surface of the insertion groove 121, and thus, the front end (part) of the nozzle member 110 may be spaced apart from the bottom surface of the insertion groove 121, and the dispensing hole 111 may be in the insertion groove 121. Therefore, the communicating hole 122 defined by at least a portion of the bottom surface of the insertion groove 121 may be in a different plane from the dispensing hole 111, the dispensing hole 111 may be located above the communicating hole 122, and the dispensing hole 111 and the communicating hole 122 may be aligned (with each other).

[0068] Here, the distance between the dispensing hole 111 and the communicating hole 122 may be about 5% to about 10% of the diameter of the dispensing hole 111, and the communicating hole 122 may be disposed as close to the dispensing hole 111 as possible, so that the droplets 11a may pass through the communicating hole 122 well without being affected by the suction pressure, thereby allowing the relatively small and light scattered droplets 13 and the droplet wake 11b to be well sucked into the vacuum forming space 125. That is, as the entrance of the vacuum forming space 125 becomes narrower as it gets closer to the dispensing hole 111, the suction pressure leakage may be suppressed and / or prevented, and therefore, the scattered droplets 13 and the droplet wake 11b may be well sucked into the vacuum forming space 125 by the strong suction pressure, while the relatively large and heavy droplets 11a may not enter the entrance of the vacuum forming space 125 and may pass through the communicating hole 122 intactly and leak out.

[0069] If the distance between the dispensing hole 111 and the communicating hole 122 is less than about 5% of the diameter of the dispensing hole 111, the entrance of the vacuum forming space 125 may become too small, and thus, fine scattered droplets 13 may be sucked into the vacuum forming space 125, but relatively large scattered droplets 13 and droplet tails 11b may not be sucked into the vacuum forming space 125. On the other hand, if the distance between the dispensing hole 111 and the communicating hole 122 is greater than about 10% of the diameter of the dispensing hole 111, the entrance of the vacuum forming space 125 may become too large to cause leakage of the suction pressure. To compensate for this leakage, if the suction strength of the suction member (not shown) is increased, at least a portion of the droplets 11a may also be sucked through the wide entrance of the vacuum forming space 125, resulting in a loss of the dispensing amount (or the dispensed liquid).

[0070] However, when the distance between the dispensing hole 111 and the connecting hole 122 is about 5% to about 10% of the diameter of the dispensing hole 111, the scattered droplets 13 and the droplet tails 11b can be sucked into the vacuum forming space 125 intactly, and therefore, the droplets 11a can leak out through the connecting hole 122 intactly, so that a (predetermined) fixed amount of droplets falls on the target position of the target object 20.

[0071] For example, the diameter of the distribution hole 111 may be about 2 mm to about 3 mm (about 2.5 mm), and the distance between the distribution hole 111 and the connecting hole 122 may be about 0.1 mm to about 0.2 mm (about 0.2 mm). Here, the diameter of the connecting hole 122 may also be about 2 mm to about 3 mm (about 2.5 mm).

[0072] The suction component (not shown) may include a suction line (not shown) for evacuating the vacuum forming space 125 and an air pump (not shown) connected to the suction line (not shown). The suction line (not shown) may evacuate the vacuum forming space 125, be connected to the air pump (not shown), and provide a distribution path (or exhaust path) through which the scattered droplets 13 and / or droplet tails 11b sucked into the vacuum forming space 125 move toward (or reach) the air pump (not shown) under the suction force of the air pump (not shown).

[0073] An air pump (not shown) may be connected to a suction line (not shown) and provide suction force to draw the scattered droplets 13 and / or droplet tails 11b into the vacuum forming space 125, and distribute (or discharge) the scattered droplets 13 and / or droplet tails 11b drawn into the vacuum forming space 125 through the suction line (not shown).

[0074] That is, the scattered droplets 13 and / or the droplet tails 11 b may be sucked into the vacuum forming space 125 by the suction force of an air pump (not shown), and then distributed (or moved) along a suction line (not shown).

[0075] Figure 2 is a cross-sectional view illustrating first and second suction channels of a nozzle mounting block according to an exemplary embodiment.

[0076] Reference Figure 2 , the nozzle mounting block 120 may (further) include a first suction channel 131 extending to the outside of the vacuum forming space 125 and a second suction channel 132 connected to the first suction channel 131 to extend in a direction intersecting the extending direction of the first suction channel 131. The first suction channel 131 may be connected to the vacuum forming space 125, extend outward (or radially) from the vacuum forming space 125, and provide a suction pressure perpendicular to the dispensing direction of the dispensed liquid 10 to the vacuum forming space 125. Therefore, the force opposite to the dispensing direction that suppresses the dispensing of the droplet 11a may not directly act on the droplet 11a, so that only the scattered droplets 13 and / or the droplet tail 11b may be sucked (discharged) without affecting the dispensing of the droplet 11a. For example, the first suction channel 131 may extend horizontally from the vacuum forming space 125.

[0077] The second suction channel 132 may be connected to the first suction channel 131 to extend in a direction intersecting (or perpendicular to) the extension direction of the first suction channel 131, connected to a suction line (not shown), and form an exhaust flow in a direction intersecting (e.g., perpendicular) the extension direction of the first suction channel 131 through the suction force of an air pump (not shown). For example, the second suction channel 132 may be connected to the first suction channel 131 to extend in a vertical direction. When the suction line (not shown) is directly connected to the first suction channel 131, the suction force of the air pump (not shown) may directly act on the extension direction of the first suction channel 131, and therefore, the suction pressure may increase according to the distance from the suction line (not shown), and the deviation of the suction pressure may increase according to the amount of scattered droplets 13 and / or droplet wakes 11b in the first suction channel 131.

[0078] However, when the second suction channel 132 is connected to the first suction channel 131 to connect the suction line (not shown) to the first suction channel 131, the suction force of the suction pump (not shown) can directly act on the second suction channel 132, but the suction pressure can be indirectly generated in the first suction channel 131, so the difference in suction pressure can be reduced according to the distance from the suction line (not shown), and the deviation of the suction pressure can also be reduced according to the amount of scattered droplets 13 and / or droplet wakes 11b in the first suction channel 131. Therefore, a stable exhaust flow (or distribution flow) can be formed in the first suction channel 131, the second suction channel 132 and the suction line (not shown).

[0079] Here, the first suction channel 131 may be configured in plural and may be symmetrically (or on both sides) arranged around the vacuum forming space 125. Since the first suction channel 131 is provided in plural and symmetrically arranged around the vacuum forming space 125, vacuum may be stably formed along the periphery of the dispensing hole 111 of the nozzle member 110 in the vacuum forming space 125, and uniform vacuum (or suction pressure) may be formed in the entire vacuum forming space 125. Therefore, stable suction pressure may be provided around the entire periphery (or about 360°) of the dispensing hole 111 of the nozzle member 110, and suction pressure may be uniformly formed around the dispensing hole 111 of the nozzle member 110.

[0080] For example, the plurality of first suction channels 131 may extend in the same direction (or in parallel), be provided in plurality (or in two or more) on both sides of the vacuum forming space 125, and be arranged in a direction perpendicular to the extending direction and in a direction parallel to the extending direction on each side of the vacuum forming space 125. Figure 2As shown, the first horizontal channel 131a, the second horizontal channel 131b and the third horizontal channel 131c can be configured on one side of the vacuum forming space 125, and the first horizontal channel 131a, the second horizontal channel 131b and the third horizontal channel 131c can be configured on the other side of the vacuum forming space 125.

[0081] If there is only one first suction channel 131 on both sides of the vacuum forming space 125, the scattered liquid droplets 13 and the liquid droplet tail 11b can be well sucked in the extension direction, but the suction force in the direction perpendicular to the extension direction may be relatively weak, and it is difficult to suck the scattered liquid droplets 13 and / or the liquid droplet tail 11b scattered (or dispersed or stretched) in the direction perpendicular to the extension direction. In this case, when a plurality of first suction channels 131 are arranged (or installed) in a direction perpendicular to the extension direction on each side of the vacuum forming space 125, the suction pressure in the direction perpendicular to the extension direction is supplemented, so that the scattered liquid droplets 13 and / or the liquid droplet tail 11b scattered in the direction perpendicular to the extension direction can also be effectively sucked.

[0082] Here, two or more first suction channels 131 may be connected to one second suction channel 132, and thus, the first suction channels 131 connected to the same second suction channel 132 may form an overall (or relatively) uniform suction pressure. For example, two or more (or multiple) first suction channels 131 arranged on each side of the vacuum forming space 125 may be (one by one) connected to one second suction channel 132. In this case, not only the number of suction pumps (not shown) may be reduced, but also the control of uniform suction pressure may be facilitated, and thus, uniform suction pressure may be formed overall in the plurality of first suction channels 131, and uniform suction pressure may be formed overall (or comprehensively) around the dispensing hole 111 of the nozzle member 110.

[0083] Here, two or more first suction channels 131 may be connected to one second suction channel 132 through respective connection channels, or may be connected to one second suction channel 132 by being interconnected through interconnected connection channels.

[0084] For example, the nozzle mounting block 120 may further include a buffer channel 133 connecting the two or more first suction channels 131 to the second suction channel 132. The buffer channel 133 may connect the two or more first suction channels 131 and be connected to (one) second suction channel 132 to connect the two or more first suction channels 131 to the second suction channel 132. Since the suction pressure passing through the second suction channel 132 is diffused (or dispersed) through the buffer channel 133 and becomes uniform, the suction pressure difference between the two or more first suction channels 131 can be reduced, and the suction pressure of the two or more first suction channels 131 can become uniform. Figure 2As shown, the first horizontal channel 131a, the second horizontal channel 131b and the third horizontal channel 131c may be connected to the buffer channel 133 to communicate with each other, and the buffer channel 133 may be connected to the (one) second suction channel 132 and connected to the (one) second suction channel 132.

[0085] The inner diameter (or width) of the second suction channel 132 may be at least partially larger than the inner diameter (or width) of the first suction channel 131. For example, the inner diameter of the end of the second suction channel 132 connected to the suction line (not shown) away from the first suction channel 131 may be larger, and the inner diameter may become larger (gradually or in stages) as it moves away from the first suction channel 131, and the inner diameter of the second suction channel 132 may be larger than the inner diameter of the first suction channel 131 as a whole. It is not particularly limited to this, as long as the inner diameter of the end of the second suction channel 132 connected to the suction line (not shown) is larger than the inner diameter of the first suction channel 131 that is the same (or uniform) as a whole. Since the air flow flows from high pressure to low pressure, the inner diameter of the second suction channel 132 can be increased compared to the first suction channel 131 to reduce the internal pressure. Therefore, the scattered droplets 13 and the droplet tails 11b can be well distributed (or discharged) from the first suction channel 131 with relatively high internal pressure to the second suction channel 132 with relatively low internal pressure.

[0086] The dispensing device 100 according to an exemplary embodiment may further include a controller (not shown) controlling the nozzle part 110 and the suction part (not shown) to dispense the dispensing liquid 10 from the dispensing hole 111 while vacuuming the inside of the vacuum forming space 125 .

[0087] A controller (not shown) can control the nozzle component 110 and the suction component (not shown) to dispense the dispensing liquid 10 from the dispensing hole 111 while evacuating the vacuum forming space 125, so that the scattered droplets 13 and the droplet tails 11b are sucked and discharged (or removed), allowing only the droplets 11a to drop on the target position of the target object 20.

[0088] Here, the controller (not shown) may adjust the vacuum degree of the vacuum forming space 125 according to the viscosity of the dispensed liquid 10. In the case of low viscosity, since the scattered liquid droplets 13 are more easily generated than the droplet tails 11b, a first vacuum degree may be formed in the vacuum forming space 125 to effectively suck the scattered liquid droplets 13, and in the case of high viscosity, since the droplet tails 11b are more easily generated than the scattered liquid droplets 13, a second vacuum degree higher than the first vacuum degree may be formed in the vacuum forming space 125 to effectively suck the droplet tails 11b. For the droplet tails 11b, as the viscosity is higher, it is more difficult to cut off from the droplets 11a, and therefore, the vacuum degree may be increased to cut off the droplet tails 11b from the droplets 11a. This may allow the scattered liquid droplets 13 and / or the droplet tails 11b to be effectively removed through suction and discharge according to the viscosity of the dispensed liquid 10.

[0089] For example, when the viscosity of the dispensed liquid 10 is about 20,000 cP (centipoise), the vacuum degree of the vacuum forming space 125 may be set to a vacuum pressure of about -30 kPa to about -40 kPa, and when the viscosity of the dispensed liquid 10 is about 500 cP, the vacuum degree of the vacuum forming space 125 may be set to a vacuum pressure of about -10 kPa to about -15 kPa. Here, in order to maintain a vacuum pressure of about -30 kPa to about -40 kPa, the suction pump (not shown) may provide a suction force (or suction strength) equal to or greater than a vacuum pressure of about -60 kPa, and in order to maintain a vacuum pressure of about -10 kPa to about -15 kPa, the suction pump (not shown) may provide a suction force equal to or less than a vacuum pressure of about -60 kPa.

[0090] The nozzle member 110 can be inserted into the insertion groove 121 of the nozzle mounting block 120 and removed (or separated) therefrom, and the shape, volume, etc. of the vacuum forming space 125 can be adjusted by replacing the nozzle member 110 according to the size, shape, etc. of the nozzle member 110. For example, the nozzle fixing member 140 can be attached to and separated (or connected and separated) from the nozzle mounting block 120, and the nozzle member 110 can be replaced by attaching and separating the nozzle fixing member 140. Here, the nozzle fixing member 140 can be connected to the nozzle mounting block 120 by screws (bolts) or the like, and can also be separated in the opposite manner.

[0091] Figure 3 is a schematic cross-sectional view of a dispensing system according to another exemplary embodiment.

[0092] Figure 3 A dispensing system according to another exemplary embodiment will be described. In describing a dispensing system according to another exemplary embodiment, descriptions overlapping with the aforementioned dispensing device will be omitted.

[0093] A dispensing system 200 according to another exemplary embodiment of the present invention may include a stage 210 supporting a target object 20 , a dispensing apparatus 100 disposed on the stage 210 according to an exemplary embodiment, and a driver (not shown) for moving the stage 210 or the dispensing apparatus 100 .

[0094] The stage 210 may support the target object 20 , move relative to the dispensing apparatus 100 , and may be fixed or movable.

[0095] The dispensing device 100 may be disposed on the stage 210 to dispense the dispensing liquid 10 onto the target object 20. Here, the dispensing device 100 may be the dispensing device 100 according to an exemplary embodiment, and thus, since it has been described in detail above, the detailed description will be omitted.

[0096] The driver (not shown) may move the stage 210 or the dispensing device 100 so that the dispensing device 100 moves relatively on the stage 210. For example, the driver (not shown) may move the dispensing device 100, move the stage 210, or simultaneously move the dispensing device 100 and the stage 210. Therefore, the dispensing device 100 may move relatively on the stage 210, and the dispensed liquid 10 may be deposited (or applied) to a target position (or a dropping position) of the target object 20.

[0097] Here, the target object 20 may include a glass substrate, and the dispensing liquid 10 may include liquid crystal LC. That is, the dispensing system 200 may be a filling dispensing device for quantitatively dispensing liquid crystal LC during packaging and unit processes. The surface of the glass substrate may be arranged as one or more cells, and the cell may be divided into a cell active area and a cell internal area, and the cell internal area may be filled with a filling material such as liquid crystal LC. If the liquid crystal LC is dispersed, the scattered droplets 13 fall into (or enter) the active area of ​​the cell, which may cause a significant limitation to the mass production yield. If the scattered droplets 13 fall into the internal area of ​​the cell, even if it is not a direct cause of the mass production yield problem, it may be a limitation of the dispensing quality that needs to be improved.

[0098] Therefore, the dispensing system 200 according to another exemplary embodiment can fully (or completely) aspirate and dispense the scattered liquid droplets 13 and / or the droplet tails 11b by using (or including) the dispensing device 100 according to the exemplary embodiment. Therefore, the dispensing system can accurately dispense the dispensing liquid 10 such as the liquid crystal LC to the dropping position (i.e., the inner area of ​​the cell) in a quantitative manner without causing contamination due to the scattered liquid droplets 13 and the droplet tails.

[0099] The first suction channel 131 may extend along the (relative) moving direction of the dispensing device 100, the first suction channel 131 connected to one side of the vacuum forming space 125 may extend along the moving direction, and the first suction channel 131 connected to the other side of the vacuum forming space 125 may extend in the direction opposite to the moving direction. Since the above-mentioned droplet tail is generated in the same direction as the moving direction, the first suction channel 131 may extend in the moving direction to provide sufficient suction pressure in the same direction and / or opposite direction to the moving direction of the dispensing device 100, so that the droplet tail 11b that needs to be cut off from the droplet 11a is properly cut off and sucked.

[0100] Figure 4 is a flow chart illustrating an allocating method according to yet another exemplary embodiment.

[0101] Figure 4 A dispensing method according to still another exemplary embodiment will be described. In describing a dispensing apparatus according to an exemplary embodiment and a dispensing system according to another exemplary embodiment, descriptions overlapping with the aforementioned dispensing apparatus and dispensing system will be omitted.

[0102] According to yet another exemplary embodiment, the dispensing method may include: a process of evacuating a vacuum forming space 125 disposed around a front end of the nozzle member 110 (S100), a process of dispensing the dispensing liquid 10 from the dispensing hole 111 of the nozzle member 110 while evacuating the vacuum forming space 125 (S210), and a process of aspirating and discharging at least one of the scattered droplets 13 and the droplet tail 11b of the dispensing liquid 10 (S220).

[0103] First, the vacuum forming space 125 provided around the front end of the nozzle member 110 is evacuated (S100). The vacuum forming space 125 provided around the front end of the nozzle member 110 by the nozzle mounting block 120 may be evacuated, and the vacuum forming space 125 may be evacuated through a suction member (not shown) before dispensing the dispensing liquid 10 from the dispensing hole 111 of the nozzle member 110, so as to remove the scattered droplets 13 and the droplet tail 11b, and only deposit the droplets 11a (S210).

[0104] Next, while the vacuum forming space 125 is being evacuated, the dispensing liquid 10 may be dispensed from the dispensing hole 111 of the nozzle member 110 (S210). While the vacuum forming space 125 is being evacuated, the dispensing liquid 10 may be dispensed from the dispensing hole 111 of the nozzle member 110 while the vacuum forming space 125 is being vacuumed, and the scattered droplets 13 and / or droplet tails 11b of the dispensing liquid 10 may be removed by being sucked (discharged) into the vacuum forming space 125, so that only the droplets 11a may be dropped on the target position (or dropping position) of the target object 20.

[0105] Next, at least one of the scattered droplets 13 and the droplet tails 11b of the dispensed liquid 10 may be sucked and discharged (S220). In the process of dispensing the above-mentioned dispensed liquid 10 (S210), the vacuum forming space 125 may be vacuumed so that at least one of the scattered droplets 13 and the droplet tails 11b of the dispensed liquid 10 is sucked and discharged, and the scattered droplets 13 and / or the droplet tails 11b may be sucked into the vacuum forming space 125 and discharged through the suction line (not shown) of the suction member (not shown). The above-mentioned suction and discharge process (S220) may be performed almost simultaneously with the process of dispensing the dispensed liquid 10 (S210).

[0106] Therefore, in a dispensing method according to another exemplary embodiment, the dispensing liquid 10 can be dispensed through the dispensing hole 111 of the nozzle component 110 while the vacuum forming space 125 is evacuated, so that the scattered droplets 13 and / or droplet tails 11b can be sucked and discharged, so that the dispensing liquid 10 can be accurately and quantitatively dispensed to the dripping position without causing contamination due to the scattered droplets 13 and droplet tails.

[0107] The above-mentioned suction and discharge process (S220) may include: a process of sucking the scattered droplets 13 by forming a first vacuum degree in the vacuum forming space 125, and a process of sucking the droplet tail 11b by forming a second vacuum degree equal to or greater than the first vacuum degree.

[0108] A first vacuum degree may be formed in the vacuum forming space 125 to suck the scattered droplets 13. When the dispensed liquid 10 has a low viscosity, the scattered droplets 13 are more easily generated than the droplet tails 11b. Therefore, a relatively low first vacuum degree may be formed in the vacuum forming space 125 to effectively suck the scattered droplets 13.

[0109] In addition, a second vacuum degree equal to or higher than the first vacuum degree may be formed to suck the droplet tail 11b. When the dispensed liquid 10 has a high viscosity, the droplet tail 11b may be more easily generated than the scattered droplets 13, and thus, the droplet tail 11b may be effectively sucked by forming a second vacuum degree higher than the first vacuum degree in the vacuum forming space 125. For the droplet tail 11b, when the viscosity is higher, it is more difficult to cut off from the droplet 11a, and thus, the second vacuum degree may be greater than the first vacuum degree to cut off the droplet tail 11b from the droplet 11a.

[0110] Therefore, the vacuum degree of the vacuum forming space 125 can be controlled according to the viscosity of the dispensed liquid 10. In the case of low viscosity, since the scattered liquid droplets 13 are more easily generated than the droplet tails 11b, a relatively low first vacuum degree can be formed in the vacuum forming space 125 to effectively suck the scattered liquid droplets 13, while in the case of high viscosity, since the droplet tails 11b are more easily generated than the scattered liquid droplets 13, a relatively large second vacuum degree can be formed in the vacuum forming space 125 to effectively suck the droplet tails 11b. This allows the scattered liquid droplets 13 and / or the droplet tails 11b to be effectively removed through suction and discharge according to the viscosity of the dispensed liquid 10.

[0111] Here, the vacuum forming space 125 may be formed between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle member 110 by inserting the front end of the nozzle member 110 into the insertion groove 121 of the nozzle mounting block 120. At least a portion of the nozzle member 110 may be inserted into the insertion groove 121 of the nozzle mounting block 120 to form the vacuum forming space 125 between the inner surface of the insertion groove 121 of the nozzle mounting block 120 and the outer surface of the front end of the nozzle member 110, thereby generating suction pressure completely around the dispensing hole 111 of the nozzle member 110 (or about 360°) to effectively suck and dispense the scattered droplets 13 and the droplet tails 13b. That is, the vacuum forming space 125 may provide suction pressure throughout the entire 360° area around the dispensing hole 111, and therefore, all the scattered droplets 13 may be sucked regardless of the scattering direction of the scattered droplets 13.

[0112] Here, the distance between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle member 110 may be smaller than the diameter of the dispensing hole 111. If the distance between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle member 110 is greater than the diameter of the dispensing hole 111, the entrance (or starting position) of the vacuum forming space 125 may be too large to cause suction pressure leakage. In order to compensate for the leakage, if the suction strength of the suction member (not shown) is increased, all the dispensing liquid 10 dispensed from the dispensing hole 111 may be sucked (discharged) into the vacuum forming space 125.

[0113] Therefore, the distance between the inner surface of the insertion groove 121 and the outer surface of the front end of the nozzle component 110 can be smaller than the diameter of the dispensing hole 111, which can reduce the leakage of the suction pressure and maintain sufficient suction pressure to fully (or completely) suck and distribute the scattered droplets 13 and droplet trails 13b while allowing a (predetermined) amount of droplets 11a to drip onto the target position of the target object 20.

[0114] The dispensing method according to another exemplary embodiment may further include a process of maintaining the vacuuming of the vacuum forming space 125 .

[0115] After the dispensing of the dispensing liquid 10 (or the process of dispensing the liquid) ends (or is completed), the vacuum forming space 125 may be maintained in the vacuum. After the dispensing of the dispensing liquid 10 is completed, the vacuum forming space 125 may be maintained in the vacuum for a predetermined time (or a certain period), so that after the dispensing of the dispensing liquid 10 is completed, the dispensing liquid 10 remaining around the dispensing hole 111 of the nozzle member 110 can be removed by suction and discharge. Therefore, an additional nozzle cleaning process can be omitted.

[0116] As described above, in this embodiment, a vacuum forming space may be provided around the front end of the nozzle member to suck and distribute the scattered droplets and / or droplet tails generated when the droplets are distributed through the distribution hole of the nozzle member, thereby preventing the scattered droplets or the tails generated by the tail of the dripping distribution liquid from dripping and causing contamination of the portion other than the dripping position. In this way, the coating quality of the distribution device can be improved. Here, the vacuum forming space may be formed between the inner surface of the insertion groove of the nozzle mounting block and the outer surface of the front part of the nozzle member, so that a suction pressure may be generated around the distribution hole of the nozzle member as a whole, thereby effectively distributing the scattered droplets and droplet tails. In addition, the distribution liquid may be distributed through the distribution hole of the nozzle member while the vacuum forming space is being evacuated, so that the scattered droplets and / or droplet tails may be distributed to quantitatively distribute the distribution liquid accurately to the dripping position without causing contamination due to the generation of scattered droplets and droplet tails. Here, the vacuum degree of the vacuum forming space can be adjusted according to the viscosity of the dispensed liquid. In the case of low viscosity, since scattered droplets are more likely to be generated than droplet tails, a first vacuum degree can be formed in the vacuum forming space to effectively suck the scattered droplets. In the case of high viscosity, since droplet tails are more likely to be generated than scattered droplets, a second vacuum degree higher than the first vacuum degree can be formed in the vacuum forming space to effectively suck the droplet tails. This allows the scattered droplets and / or droplet tails to be effectively removed through suction and discharge according to the viscosity of the dispensed liquid.

[0117] The term "on..." used in the above description includes direct contact and indirect contact between the relative positions of the upper and lower parts. Not only the entire upper surface or the entire lower surface can be located, but also a part of the upper surface or the lower surface can be located, which is used to express the meaning of being relative to or in direct contact with the upper surface or the lower surface in position.

[0118] In the dispensing device according to the exemplary embodiment, a vacuum forming space may be provided around the front end of the nozzle member to aspirate and dispense scattered droplets and / or droplet tails generated when the droplets are dispensed through the dispensing hole of the nozzle member, thereby preventing the scattered droplets or the tails generated by the tail of the dripping dispensing liquid from dripping and causing contamination of the portion (or area) other than the dripping position (or target position). Thereby, the coating quality of the dispensing device can be improved.

[0119] Here, a vacuum forming space may be formed between the inner surface of the insertion groove of the nozzle mounting block and the outer surface of the front portion of the nozzle component, and thus a suction pressure may be generated overall around the dispensing hole of the nozzle component, thereby effectively dispensing scattered droplets and droplet tails.

[0120] Furthermore, in the dispensing method using the dispensing device, the dispensing liquid can be dispensed through the dispensing hole of the nozzle component while the vacuum forming space is evacuated, thereby dispensing scattered droplets and / or droplet tails, and dispensing the dispensing liquid can be precisely dispensed to the dripping position in a quantitative manner without causing contamination due to the generation of scattered droplets and droplet tails.

[0121] Here, the vacuum degree of the vacuum forming space can be adjusted according to the viscosity of the dispensed liquid. In the case of low viscosity, since scattered droplets are more likely to be generated than droplet tails, a first vacuum degree is formed in the vacuum forming space to effectively suck the scattered droplets. In the case of high viscosity, since droplet tails are more likely to be generated than scattered droplets, a second vacuum degree higher than the first vacuum degree can be formed in the vacuum forming space to effectively suck the droplet tails. This can effectively remove scattered droplets and / or droplet tails through suction and exhaust according to the viscosity of the dispensed liquid.

[0122] Although the embodiments have been described with reference to a number of illustrative embodiments, the embodiments are not limited to the above embodiments, and therefore, it should be understood that those skilled in the art can design numerous other modifications and embodiments that will fall within the spirit and scope of the principles of the present disclosure. Therefore, the actual protection scope of the present invention should be determined by the technical scope of the appended claims.

Claims

1. A dispensing device, characterized in that: include: a nozzle member configured to dispense a dispensing liquid through a dispensing hole disposed at a front end thereof; a nozzle mounting block configured to provide a vacuum forming space around the front end of the nozzle member; as well as The suction component is configured to evacuate the interior of the vacuum forming space.

2. The dispensing device according to claim 1, wherein the nozzle mounting block includes an insertion groove for the front end of the nozzle member to be inserted into, The insertion groove has a width greater than a width of the front end of the nozzle member. 3 . The dispensing device according to claim 2 , wherein the vacuum forming space is defined between an inner surface of the insertion groove and an outer surface of the front end of the nozzle member.

4. The dispensing device according to claim 2, further comprising a nozzle fixing member to which the rear end of the nozzle member is fixed, and the nozzle fixing member is supported on the nozzle mounting block, The nozzle fixing member is supported on the nozzle mounting block such that the front end of the nozzle member is spaced apart from an inner surface of the insertion groove.

5. The dispensing device of claim 4, further comprising a seal disposed between the nozzle retaining member and the nozzle mounting block.

6. The dispensing device according to claim 2, wherein the nozzle mounting block further comprises a communicating hole communicating with the insertion groove, and The dispensing hole of the nozzle member is arranged concentrically with the communicating hole. 7 . The dispensing device according to claim 6 , wherein a diameter of the communication hole corresponds to 90% to 110% of a diameter of the dispensing hole.

8. The dispensing device according to claim 6, wherein the dispensing hole and the communicating hole are defined on different planes, and The spacing distance between the dispensing hole and the communicating hole is approximately 5% to 10% of the diameter of the dispensing hole.

9. The dispensing device of claim 1, wherein the pumping member comprises: a suction pipeline configured to evacuate the vacuum forming space; as well as A suction pump is connected to the suction pipeline.

10. The dispensing device of claim 9, wherein the nozzle mounting block comprises: a first suction channel extending to the outside of the vacuum forming space; as well as A second suction passage is connected to the first suction passage to extend in a direction intersecting with an extending direction of the first suction passage. The dispensing device according to claim 10 , wherein the first suction channel is provided in plurality. 12 . The dispensing device of claim 11 , wherein the nozzle mounting block further comprises a buffer channel configured to allow two or more of the first suction channels to communicate with each other so as to be connected to the second suction channel. 13 . The dispensing device according to claim 1 , further comprising a controller configured to control the nozzle member and the suction member so that the dispensing liquid is dispensed from the dispensing hole while the interior of the vacuum forming space is evacuated.

14. A dispensing system comprising: A stage configured to support a target object ； The dispensing device according to any one of claims 1 to 13, which is arranged on the carrier; and A driver is configured to move the carrier or the dispensing device.

15. The dispensing system of claim 14, wherein the target object comprises a glass substrate, and The dispensed liquid includes liquid crystal.

16. A method of allocating, comprising: evacuating a vacuum forming space, the vacuum forming space being disposed around a front end of the nozzle member; while evacuating the vacuum forming space, dispensing the dispensing liquid from the dispensing hole of the nozzle member; as well as At least one scattered droplet or droplet tail of the dispensed liquid is aspirated and expelled.

17. The dispensing method of claim 16, wherein the aspirating and discharging comprises: sucking the scattered droplets by forming a first vacuum degree in the vacuum forming space; as well as The droplet tail is sucked by forming a second vacuum level that is equal to or greater than the first vacuum level.

18. The dispensing method according to claim 16, wherein the vacuum forming space is formed between an inner surface of the insertion groove and an outer surface of the front end of the nozzle member by inserting the front end of the nozzle member into an insertion groove of a nozzle mounting block.

19. The dispensing method according to claim 16, wherein a distance between an inner surface of the insertion groove and an outer surface of the front end of the nozzle member is equal to or smaller than a diameter of the dispensing hole.

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