Electrostatic chuck spraying equipment

Abstract

The electrostatic chuck spraying equipment comprises a rack, and a conveying platform used for conveying an electrostatic chuck is installed at the bottom of the rack; a pretreatment mechanism, a first spraying mechanism, a second spraying mechanism and a vacuum high-temperature curing mechanism are sequentially mounted at the top of the rack; the conveying platform sequentially conveys the electrostatic chucks to all the mechanisms so as to carry out corresponding process treatment. The pretreatment mechanism is used for performing vacuum plasma activation treatment on the surface of the electrostatic chuck; the first spraying mechanism and the second spraying mechanism are respectively used for spraying a film layer material on the circumferential surface and the top surface of the electrostatic chuck so as to form a spraying film layer; the vacuum high-temperature curing mechanism is used for performing vacuum high-temperature curing on the upper surface of the electrostatic chuck on which the spraying film layer is formed; transfer among different devices is not needed, the spraying efficiency is high, and the cleanliness of a film layer of the electrostatic chuck is improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor equipment, and in particular to an electrostatic chuck spraying device. Background Art

[0002] In the manufacturing and repairing process of the electrostatic chuck, a layer of resin protective coating needs to be coated on the outer surface of the electrostatic chuck. Currently, polyimide coating is commonly used. This coating can achieve good wear resistance, voltage resistance, corrosion resistance and other effects.

[0003] Due to the differences in the outer surface materials and manufacturing processes of different electrostatic chucks, the interface bonding strength of the same coating material will be significantly different. Therefore, before applying the polyimide coating, the outer surface of the electrostatic chuck is usually cleaned and activated using a plasma surface treatment process to improve the interface energy and thus improve the coating bonding strength. In addition, after the coating is sprayed, a vacuum curing device is required to remove the volatile solvent in the film layer and complete the curing of the film layer. Therefore, when coating the electrostatic chuck, multiple processes such as vacuum plasma activation treatment, polyimide spraying, and vacuum high-temperature curing are required.

[0004] At present, when electrostatic chucks are processed in multiple processes, different equipment is involved, and the electrostatic chuck needs to be transferred between different equipment and processes. However, the risk of contamination of the electrostatic chuck will increase during the transfer process, affecting the cleanliness of the electrostatic chuck and easily causing impurity contamination in the coating.

[0005] The statements herein merely provide background art related to the present invention and do not necessarily constitute prior art. Summary of the invention

[0006] The purpose of the present invention is to provide an electrostatic chuck spraying device, so that the coating of the electrostatic chuck can be completed on the same device, avoiding the pollution problem caused by repeatedly transferring the electrostatic chuck between different devices.

[0007] To achieve the above object, the present invention proposes an electrostatic chuck spraying device for forming a spray film layer on the upper surface of an electrostatic chuck, wherein the upper surface of the electrostatic chuck includes a circumferential surface and a top surface of a stepped structure, including:

[0008] A frame, wherein a transmission platform for transmitting the electrostatic chuck is installed at the bottom of the frame; a pretreatment mechanism, a first spraying mechanism, a second spraying mechanism and a vacuum high-temperature curing mechanism are installed on the top of the frame in sequence; the transmission platform transmits the electrostatic chuck to each mechanism in sequence for corresponding process processing;

[0009] The pretreatment mechanism is used to perform vacuum plasma activation treatment on the surface of the electrostatic chuck;

[0010] The first spraying mechanism and the second spraying mechanism spray the film layer material onto the circumferential surface and the top surface of the electrostatic chuck respectively to form a sprayed film layer;

[0011] The vacuum high temperature curing mechanism is used to perform vacuum high temperature curing treatment on the upper surface of the electrostatic chuck formed with the sprayed film layer.

[0012] Optionally, the transmission platform is a grooved transmission track, and a chuck support mechanism is slidably mounted on the transmission platform, and the chuck support mechanism is used to place the electrostatic chuck and drive it to be transmitted on the transmission platform;

[0013] Protective baffles are provided on both sides of the transmission platform in the transmission direction to prevent the chuck support mechanism from detaching.

[0014] Optionally, the chuck supporting mechanism comprises:

[0015] A transmission bearing module, wherein the transmission bearing module is slidably mounted on the transmission platform;

[0016] A rotating platform is fixed on the top of the conveying and carrying module;

[0017] A motor, wherein the motor is disposed longitudinally through the transmission bearing module, and an output shaft of the motor is connected to the center of the rotating platform, so that the motor can drive the rotating platform to rotate;

[0018] The electrostatic chuck is placed on the upper surface of the rotating platform, a plurality of grooves are provided on the circumferential surface of the electrostatic chuck, and a plurality of positioning pins corresponding to the grooves are arranged on the upper surface of the rotating platform.

[0019] Optionally, photoelectric speed sensors and drive motors are installed on both sides of the transmission track of the transmission platform; the drive motor is used to drive the transmission track of the transmission platform to roll, and then transmit the chuck support mechanism; the photoelectric speed sensor is used to detect the rolling rate of the transmission platform.

[0020] Optionally, the pre-processing mechanism includes:

[0021] A first driving cylinder, wherein the first driving cylinder has a first telescopic end that can be longitudinally telescopic, and the first telescopic end can be longitudinally telescopic under the driving action of the first driving cylinder to be close to or away from the transmission platform;

[0022] A vacuum plasma generating device is connected to the bottom of the first telescopic end, and the first telescopic end drives the vacuum plasma generating device to move up and down;

[0023] The vacuum chamber is connected to the bottom of the vacuum plasma generating device, and the vacuum chamber is used to contain the plasma generated by the plasma generating device.

[0024] Optionally, the vacuum high temperature curing mechanism includes:

[0025] a second driving cylinder having a second telescopic end that is longitudinally telescopic;

[0026] A vacuum heating device connected to the bottom of the second telescopic end, wherein the second telescopic end drives the vacuum heating device to move up and down to move away from or close to the transmission platform;

[0027] The vacuum high temperature cavity is connected to the bottom of the vacuum heating device, and the vacuum high temperature cavity moves up and down following the vacuum heating device.

[0028] Optionally, the bottom ends of the vacuum high-temperature chamber and the vacuum chamber both have a sealing ring and an electromagnet, the diameters of the sealing ring and the electromagnet are larger than the electrostatic chuck and smaller than the rotating platform, and the sealing ring is located on the inner side of the electromagnet; the rotating platform is a steel platform, and the electromagnet is magnetic when energized, so that it is tightly attached to the rotating platform.

[0029] Optionally, the first spraying mechanism and the second spraying mechanism have the same structure, including:

[0030] An electric-controlled slide rail is arranged on the top of the frame, and the installation direction of the electric-controlled slide rail is perpendicular to the transmission direction of the transmission platform;

[0031] A transverse slide bar is slidably mounted on the electric control slide rail and slides along the installation direction of the electric control slide rail; the bottom of the transverse slide bar has a longitudinal columnar portion;

[0032] An angle adjustment plate, rotatably mounted on the side wall of the columnar portion;

[0033] An ultrasonic spray head, fixedly connected to the angle adjustment plate and rotating with the rotation of the angle adjustment plate, and used for spraying film layer materials;

[0034] Integrated tube bundle, connecting the spray material source and the ultrasonic spray head;

[0035] The surface of the angle adjustment plate is provided with scale lines, the side wall of the columnar portion is fixedly connected with a pointer, the angle adjustment plate is located between the pointer and the side wall of the columnar portion, and the pointer points to the scale lines.

[0036] Optionally, the first spraying mechanism or the second spraying mechanism is used to spray the circumferential surface of the electrostatic chuck. If the width of the circumferential surface is not greater than the spraying width of the ultrasonic spray head, then when the electrostatic chuck reaches directly below the first spraying mechanism or the second spraying mechanism and before the first spraying mechanism or the second spraying mechanism starts working, the position of the transverse sliding bar and the angle of the angle adjustment plate are adjusted and fixed so that the spraying width of the ultrasonic spray head can cover the width of the circumferential surface and will not cover the top surface; after the first spraying mechanism or the second spraying mechanism starts working, the motor drives the electrostatic chuck to rotate so that the film material sprayed by the ultrasonic spray head covers the circumferential surface;

[0037] If the width of the circumferential surface is greater than the maximum spraying width of the ultrasonic spray head, before the first spraying mechanism or the second spraying mechanism starts working, the angle of the angle adjustment plate is adjusted so that the spraying range of the ultrasonic spray head can cover the circumferential surface as much as possible without covering the top surface; after the first spraying mechanism or the second spraying mechanism starts working, as the electrostatic chuck rotates at a uniform speed, the lateral slide bar is controlled to move slowly laterally so that the film layer material sprayed by the ultrasonic spray head covers the entire circumferential surface.

[0038] Optionally, the second spraying mechanism or the first spraying mechanism is used to spray the top surface of the electrostatic chuck. When the edge of the electrostatic chuck moves below the second spraying mechanism or the first spraying mechanism, the transverse slide bar of the second spraying mechanism or the first spraying mechanism reciprocates along the electrically controlled slide rail to spray the top surface. When the second spraying mechanism or the first spraying mechanism is spraying, the driving motor also controls the moving speed of the transmission platform to slow down, so that the electrostatic chuck moves slowly forward.

[0039] Compared with the prior art, the technical solution of an electrostatic chuck spraying device of the present invention has the following advantages and beneficial effects:

[0040] The electrostatic chuck spraying equipment of the present invention integrates a pretreatment mechanism, a circumferential spraying mechanism, a top surface spraying mechanism and a vacuum high-temperature curing mechanism. A film layer can be formed on the surface of the electrostatic chuck without transferring between multiple devices. The operation is simple, and the problem of reduced cleanliness caused by the introduction of impurities is avoided, and the spraying efficiency is improved.

[0041] The present invention provides two spraying mechanisms to spray the film layer on the circumferential surface and the top surface of the electrostatic chuck respectively, which is beneficial to achieving the consistency, stability and uniformity of the film layer on the circumferential surface and the top surface, and can also improve the spraying efficiency.

[0042] The ultrasonic spray head in the spray mechanism of the present invention is rotatable and can be adapted to electrostatic chucks of different sizes and thicknesses, thereby expanding the application range of the device of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1It is a schematic diagram of the overall structure of an electrostatic chuck spraying device of the present invention;

[0044] Figure 2 is a schematic diagram of a chuck support mechanism in the present invention;

[0045] Figure 3 It is a bottom view schematic diagram of the chuck support mechanism in the present invention;

[0046] Figure 4 A schematic diagram of the specific structure of an electrostatic chuck spraying device of the present invention;

[0047] Figure 5 for Figure 4 The enlarged view of point A in the middle;

[0048] Figure 6 for Figure 4 Enlarged view of point B in the middle. DETAILED DESCRIPTION

[0049] The following will be combined with the embodiments of the present invention Figure 1 to Figure 6 , the technical solutions, structural features, objectives achieved and effects in the embodiments of the present invention are described in detail.

[0050] It should be noted that the drawings are in a very simplified form and use non-precise proportions. They are only used to conveniently and clearly assist in explaining the embodiments of the present invention, and are not used to limit the conditions for the implementation of the present invention. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical content disclosed by the present invention.

[0051] It should be noted that, in the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only the elements explicitly listed, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0052] The present invention discloses an electrostatic chuck spraying device, which integrates a vacuum plasma activation processing module, a polyimide spraying module, and a vacuum high-temperature curing module in the same device, and connects them through a transmission platform, so that the transmission platform sequentially transmits the electrostatic chuck to each process module for corresponding processing, thereby avoiding the problem of contamination caused by repeated transfer of the electrostatic chuck between different devices.

[0053] The technical solution of an electrostatic chuck spraying device of the present invention will be described in detail below in conjunction with specific embodiments and drawings.

[0054] like Figure 1 As shown, an electrostatic chuck spraying device according to an embodiment of the present invention includes a frame 1, and a transmission platform 2 is installed at the bottom of the frame 1, and the transmission platform 2 is used to transmit the electrostatic chuck 55. The top of the frame 1 is also sequentially installed with a pretreatment mechanism 6, a first spraying mechanism 7, a second spraying mechanism 8 and a vacuum high-temperature curing mechanism 9, and the transmission platform 2 can sequentially transmit the electrostatic chuck 55 to each mechanism for corresponding process processing. The electrostatic chuck spraying device is a closed overall space, and the electrostatic chuck 55 completes all the processing of the polyimide film layer in this overall space, without the need to switch between different devices, thereby avoiding the introduction of impurities.

[0055] In this embodiment, polyimide is used as an example to illustrate the specific structure and working principle of the electrostatic chuck spraying equipment. In more embodiments, other materials can also be used as film layer materials as needed.

[0056] like Figure 2 As shown, the upper surface of the electrostatic chuck 55 is composed of a circumferential surface 551 and a top surface 552 . The top surface 552 is located inside the circumferential surface 551 . The top surface 552 is higher than the circumferential surface 551 , so that the two form a stepped structure.

[0057] The pretreatment mechanism 6 is used to perform vacuum plasma activation treatment on the surface of the electrostatic chuck 55 to activate and clean the surface of the electrostatic chuck 55, thereby improving the bonding force between the subsequent electrostatic chuck 55 and the polyimide coating. The first spraying mechanism 7 and the second spraying mechanism 8 are respectively used to spray polyimide on the circumferential surface 551 and the top surface 552 of the electrostatic chuck 55 to form a polyimide film layer on the upper surface of the electrostatic chuck 55. The spraying angle and spraying position of the first spraying mechanism 7 and the second spraying mechanism 8 are adjustable. The vacuum high-temperature curing mechanism 9 is used to perform vacuum high-temperature curing on the upper surface of the electrostatic chuck 55 sprayed with the polyimide film layer to remove the volatile solvent in the film layer and complete the curing of the film layer.

[0058] Continue as Figure 1 As shown, the transmission platform 2 is a grooved transmission track, a chuck support mechanism 5 is slidably mounted on the transmission platform 2, and protective baffles 4 are also provided on both sides of the transmission direction of the transmission platform 2 to prevent the chuck support mechanism 5 from leaving the transmission track; the chuck support mechanism 5 is used to place the electrostatic chuck 55 and drive it to be transmitted on the transmission platform 2. Figure 2 and Figure 3As shown, the chuck supporting mechanism 5 has a conveying carrying module 51, which is slidably mounted on the transmission platform 2, and a rotating platform 53 is fixed to the top of the conveying carrying module 51. A motor 52 is arranged longitudinally through the conveying carrying module 51, and the output shaft of the motor 52 is connected to the center of the rotating platform 53, so that the motor 52 can drive the rotating platform 52 to rotate; a plurality of grooves are provided at the bottom of the circumferential surface 551 of the electrostatic chuck 55, and a plurality of positioning pins 54 are fixed on the upper surface of the rotating platform 52, and the positioning pins 54 correspond to the grooves on the circumferential surface 551 one by one, and the electrostatic chuck 55 is fixed on the rotating platform 52 by inserting the positioning pins 54 into the grooves of the electrostatic chuck 55, so that the electrostatic chuck 55 can rotate with the rotating platform 52.

[0059] Photoelectric speed sensors 3 and drive motors (not shown) are installed on both sides of the transmission track of the transmission platform 2, that is, the photoelectric speed sensors 3 and the drive motors are symmetrical about the transmission direction of the transmission track. The drive motor is used to drive the transmission track of the transmission platform 2 to roll, so that the chuck support mechanism 5 is sequentially transmitted to the bottom of each mechanism for corresponding processing; the photoelectric speed sensor 3 is used to detect the rolling rate of the transmission platform 2, and the position of the transmission platform 2 is accurately controlled and its transmission speed is controlled through the cooperation of the drive motor and the photoelectric speed sensor 3. Compared with stepper motors or servo motors combined with high-end electrical components such as encoders, this method of driving and controlling the transmission track is less expensive.

[0060] like Figure 4 and Figure 5As shown, the pretreatment mechanism 6 is arranged at the top of the frame 1, and the pretreatment mechanism 6 includes a first driving cylinder 61, which is arranged through the top of the frame 1 and fixed on the frame 1. The first driving cylinder 61 has a first telescopic end that can be longitudinally telescopic. The first telescopic end can be longitudinally telescopic under the driving action of the first driving cylinder 61 to approach or move away from the transmission platform 2. The bottom of the first telescopic end is also connected to a vacuum plasma generating device 62. When the first telescopic end is longitudinally telescopic, the vacuum plasma generating device 62 is driven to move up and down to approach or move away from the transmission platform. The bottom of the vacuum plasma generating device 62 is connected to a vacuum chamber 63, and the vacuum chamber 63 moves up and down with the vacuum plasma generating device. The vacuum chamber 63 is also connected to the output end of the vacuum plasma generating device 62 to accommodate the plasma generated by the vacuum plasma generating device 62. The vacuum chamber 63 is annular, and an annular first sealing ring 65 and a first electromagnet 66 are fixed at the bottom thereof, wherein the first sealing ring 65 is located inside the first electromagnet 66; the diameters of the first sealing ring 65 and the first electromagnet 66 are both larger than the electrostatic chuck 55 and smaller than the rotating platform 52, so the vacuum chamber 63 can completely accommodate the electrostatic chuck 55. The rotating platform 52 is a steel platform, and the first electromagnet 66 has magnetism after being energized. When the vacuum chamber 63 is driven by the first driving cylinder 61 and descends to contact the rotating platform 52, the first electromagnet 66 is energized, so that the first electromagnet 66 and the rotating platform 52 are attracted by magnetic force, so that the vacuum chamber 63 is tightly attached to the rotating platform 52, and the first sealing ring 65 is pressed tightly against the rotating platform 52 to form a seal, so that a sealed environment is formed between the vacuum chamber 63 and the rotating platform 52, and the electrostatic chuck 55 is located in the sealed environment. By setting the lowest point of the vacuum chamber 63 and limiting the height of the vacuum chamber 63 not to be lower than the lowest point, the vacuum chamber 63 can just drop down to contact the rotating platform, thereby avoiding damaging the rotating platform 52 during the descending process of the vacuum chamber 63.

[0061] The vacuum plasma generating device 62 has a vacuum pumping module, whose port is connected to the vacuum chamber 63. The vacuum plasma generating device 62 also has a plasma generating module and an oxygen supply module, and their output ends are both connected to the vacuum chamber 63. After the first sealing ring 65 seals the vacuum chamber 63 under the magnetic force between the first electromagnet 66 and the rotating platform 52, the vacuum pumping module is started to discharge the gas in the vacuum chamber 63; when the gas in the vacuum chamber 63 reaches below 0.1 kPa, the plasma generating module and the oxygen supply module are started to allow oxygen plasma and oxygen to enter the vacuum chamber 63, and the surface (especially the upper surface and the side surface) of the electrostatic chuck 55 is activated and pre-treated by the physical bombardment of the low-temperature medium-frequency oxygen plasma and the activation of free radicals to enhance its interface bonding strength. After completing the activation pretreatment, the power of the first electromagnet 66 is disconnected, the attraction between the first electromagnet 66 and the rotating platform 52 is released, the vacuum chamber 63 is slowly aired, and then the first driving cylinder 61 is controlled to contract, the vacuum chamber 63 is lifted, and then the driving motor drives the transmission platform 2 to move forward.

[0062] Continue as Figure 4 As shown, the pretreatment mechanism 6 also includes four first guide rods 64, which are fixed on the top of the frame 1 and extend to the bottom of the frame 1 (i.e., the transmission platform 2). Through holes are respectively opened at the four vertical side edges of the vacuum plasma generating device 62, and the four first guide rods 64 pass through the four through holes one by one, so that the vacuum plasma generating device 62 can move up and down along the first guide rods 64. By setting the first guide rods 64 to guide the vacuum plasma generating device 62, the vacuum plasma generating device 62 is prevented from being deflected when moving up and down, thereby improving its stability when moving up and down.

[0063] The first spraying mechanism 7 and the second spraying mechanism 8 have the same structure, but different specific spraying positions and spraying methods. In the present embodiment, the first spraying mechanism 7 is a circumferential spraying mechanism for spraying the circumferential surface 551, and the second spraying mechanism 8 is an upper plane spraying mechanism for spraying the top surface 552. In other embodiments, the first spraying mechanism 7 may also be an upper plane spraying mechanism, and the second spraying mechanism 8 may be a circumferential spraying mechanism.

[0064] The following takes the first spraying mechanism 7 as an example to describe in detail the structural composition of the first spraying mechanism 7 and the second spraying mechanism 8.

[0065] The first spraying mechanism 7 includes a first electrically controlled slide rail 71, which is arranged on the top of the frame 1, and the installation direction of the first electrically controlled slide rail 71 is perpendicular to the conveying direction of the conveying platform 2; a first transverse slide bar 72 is slidably installed on the first electrically controlled slide rail 71, and the first transverse slide bar 72 can slide along the installation direction of the first electrically controlled slide rail 71; the first spraying mechanism 7 also includes a driving motor, which is connected to the first transverse slide bar 72 to drive the first transverse slide bar 72 to slide along the first electrically controlled slide rail 71; the first The bottom of the transverse slide bar 72 has a longitudinal columnar portion, and the side wall of the columnar portion is rotatably mounted with a first angle adjustment plate 73; the first spray mechanism 7 also includes a first spray assembly, and the first spray assembly includes a first ultrasonic spray head 74 and a first integrated pipe bundle 75, one end of the first integrated pipe bundle 75 is connected to the polyimide source, and the other end is connected to the first ultrasonic spray head 74, and the outlet of the first ultrasonic spray head 74 faces the transmission platform 2, so that the polyimide is sprayed on the top surface of the electrostatic chuck 55 through the first ultrasonic spray head 74. The first integrated pipe bundle 75 has a corrugated tube on the outside, and a liquid guide tube, an electrical signal transmission line and an air guide tube integrated inside. The first ultrasonic spray head 74 is fixedly connected to the first angle adjustment plate 73 by bolts, and rotates with the rotation of the first angle adjustment plate 73 to adjust the spraying angle of the first ultrasonic spray head 74 on the electrostatic chuck 55. Figure 6 As shown, the upper surface of the first angle adjustment plate 73 is provided with a first scale line 77, the side wall of the columnar portion of the first transverse slide bar 72 is fixedly connected with a first pointer 76, the first angle adjustment plate 73 is located between the first pointer 76 and the side wall of the columnar portion, and the first pointer 76 points to the first scale line 77. Since the first pointer 76 is relatively fixed to the columnar portion, the first angle adjustment plate 73 and the columnar portion rotate relatively, so the rotation angle of the first angle adjustment plate 73 relative to the columnar portion can be distinguished by the specific scale of the first scale line 77 pointed to by the first pointer 76. The lower part of the first angle adjustment plate 73 is rotatably connected to the columnar portion, and there is no connection relationship between the upper part of the first angle adjustment plate 73 and the columnar portion, so that the upper part of the first angle adjustment plate 73 can rotate relative to the columnar portion.

[0066] In this embodiment, the rotation of the first angle adjustment plate 73 is achieved by manual adjustment, which greatly reduces the cost compared to electromechanical adjustment and can achieve a good spraying effect. There are many ways to match the first electric control rail 71 with the first transverse slide bar 72. In this embodiment, the bottom of the first electric control rail 71 has a protrusion, and the top of the first transverse slide bar 72 has a groove, so that the first transverse slide bar 72 is sleeved on the first electric control rail 71.

[0067] The first spraying mechanism 7 is used to spray the circumferential surface 551 of the electrostatic chuck 55, and the first ultrasonic spray head 74 has a certain spraying width, and the polyimide coating is sprayed in the form of droplets onto the circumferential surface 551. If the width of the circumferential surface 551 is not greater than the spraying width of the first ultrasonic spray head 74, before the electrostatic chuck 55 arrives directly below the first spraying mechanism 7 and the first spraying mechanism 7 starts working, the position of the first transverse slide bar 72 and the angle of the first angle adjustment plate 73 are adjusted and fixed so that the spraying width of the first ultrasonic spray head 74 can cover the width of the circumferential surface 551 and will not cover the top surface 552, so as to avoid repeated spraying of the top surface 552 and cause uneven film layers; after the first spraying mechanism 7 starts working, there is no need to adjust the angle of the first angle adjustment plate 73 and the position of the first transverse slide bar 72 for a second time, and under the driving action of the motor 52, the rotating platform 52 drives the electrostatic chuck 55 to rotate at a uniform speed, so that the polyimide sprayed by the first ultrasonic spray head 74 can be evenly coated on the circumferential surface 551. In more embodiments, the spraying width and spraying range of the first ultrasonic spray head 74 are adjustable to adapt to electrostatic chucks 55 of more sizes and thicknesses. If the size of the electrostatic chuck 55 is large, the width of the circumferential surface 551 is greater than the maximum spraying width of the first ultrasonic spray head 74, so that a single spray cannot completely cover the entire circumferential surface 551, then before the first spraying mechanism 7 starts working, the angle of the first angle adjustment plate 73 is adjusted so that the spraying range of the first ultrasonic spray head 74 can cover the circumferential surface 551 as much as possible, and will not cover the top surface 552; after the first spraying mechanism 7 starts working, as the electrostatic chuck 55 rotates at a uniform speed, the first transverse slide bar 72 is controlled to move slowly transversely, so that the paint sprayed by the first ultrasonic spray head 74 can evenly cover the entire circumferential surface 551. Among them, the transverse movement direction of the first transverse slide bar 72 can be from inside to outside, or from outside to inside.

[0068] Among them, when processing a certain type of electrostatic chuck 55, if the final film layer quality meets the process requirements after debugging the first angle adjustment plate 73 and the first transverse slide bar 72, the angle range of the first angle adjustment plate 73 and the position of the first transverse slide bar 72 will be used as one of the processing parameters of this type of electrostatic chuck 55. When processing this type of electrostatic chuck 55 later, it is only necessary to adjust the first angle adjustment plate 73 and the first transverse slide bar 72 according to the processing parameters, thereby simplifying the debugging process and improving processing efficiency. There is no need to open the equipment to adjust the first angle adjustment plate 73 during the processing process to avoid the introduction of contaminants.

[0069] The structure of the second spraying mechanism 8 is exactly the same as that of the first spraying mechanism 7, specifically including a second electrically controlled slide rail, a second transverse slide bar, a second angle adjustment plate, a second ultrasonic spray head, a second integrated tube bundle, a second pointer and a second scale line. Since the second spraying mechanism 8 is used to spray the top surface 552 of the electrostatic chuck 55, the working mode and position of the second spraying mechanism 8 are different from those of the first spraying mechanism 7. Specifically, when the edge of the electrostatic chuck 55 moves below the second spraying mechanism 8, the second transverse slide bar of the second spraying mechanism 8 reciprocates along the second electrically controlled slide rail to spray the top surface 552 of the electrostatic chuck 55, wherein the moving range of the second transverse slide bar is limited so that the spraying range of the second ultrasonic spray head can completely cover the top surface 552 and does not affect the spraying uniformity of the circumferential surface 551; when the second spraying mechanism 8 is spraying, the driving motor will also control the moving speed of the transmission platform 2 to slow down, so that the electrostatic chuck 55 moves forward slowly to cooperate with the second ultrasonic spray head to spray the top surface 552, and when the entire top surface 552 is sprayed, the transmission platform 2 speeds up again, and moves the electrostatic chuck 55 to the next mechanism for the next step of processing. It should be noted that when the second spraying mechanism sprays the top surface 552, the electrostatic chuck 55 does not need to rotate, that is, the motor 52 does not work.

[0070] Since the heights of the circumferential surface 551 and the top surface 552 are different, in this embodiment, two spraying mechanisms are provided to spray the film layer on the circumferential surface 551 and the top surface 552 respectively, which is beneficial to achieving the consistency, stability and uniformity of the film layer on the circumferential surface 551 and the top surface 552, and at the same time can improve the spraying efficiency.

[0071] Continue as Figure 4 As shown, the vacuum high temperature curing mechanism 9 includes a second driving cylinder 91, which is arranged through the top of the frame 1 and fixed on the frame 1. The second driving cylinder 91 has a second telescopic end that can be longitudinally extended. The bottom of the second telescopic end is connected to a vacuum heating device 92. When the second telescopic end of the second driving cylinder 91 is longitudinally extended, it drives the vacuum heating device 92 to move up and down to move away from or close to the transmission platform 2; the bottom of the vacuum heating device 92 is connected to a vacuum high temperature cavity 93, which moves up and down with the vacuum heating device 92. The vacuum high temperature cavity 93 has the same structure as the vacuum cavity 63, which is annular, and an annular second sealing ring and second electromagnet are fixed at the bottom, wherein the specific working mode of the second sealing ring and the second electromagnet is the same as the first sealing ring 65 and the first electromagnet 66 of the vacuum cavity 63, so it will not be described in detail; the heat output end of the vacuum heating device 92 is connected to the vacuum high temperature cavity 93, and the heat generated by it is accumulated in the vacuum high temperature cavity 93. The vacuum heating device 92 further includes a vacuum pumping device for pumping out the gas in the vacuum high-temperature cavity 93 .

[0072] Similar to the pretreatment mechanism 6, the vacuum high temperature curing mechanism 9 also includes four second guide rods 94, which provide guidance for the up and down movement of the vacuum heating device 92, prevent deviation, and improve stability. Since the specific structure of the second guide rods 94 is the same as that of the first guide rods 64, they will not be described here.

[0073] When the electrostatic chuck 55 is transferred to the bottom of the vacuum high-temperature curing mechanism 9, the second driving cylinder 91 drives the vacuum heating device 92 to move downward, and drives the vacuum high-temperature cavity 93 to move downward. After reaching the lowest point, the second electromagnet is turned on to tightly absorb the vacuum high-temperature cavity 93 and the rotating platform 53, and the vacuum high-temperature cavity 93 is sealed by the second sealing ring. The vacuum device is started to extract the gas in the vacuum high-temperature cavity 93. When the air pressure reaches below 1 kPa (the actual air pressure requirement can be set as needed), the vacuum heating device 92 is started to increase the temperature in the vacuum high-temperature cavity 93 to cure the polyimide film layer on the upper surface of the electrostatic chuck 55. This embodiment provides the following specific heating process: first, the temperature is increased to 100°C at a heating rate of 1.5 to 2.0°C / min and maintained for 20 to 30 minutes; then the temperature is increased to 150°C at a heating rate of 1.0 to 1.5°C / min and maintained for 30 to 40 minutes; then the temperature is increased to 250 to 260°C at a heating rate of 1.0°C / min and maintained for 0.5 to 1 hour; finally, after turning off the heating function, the vacuum high-temperature cavity 93 is cooled to 50 to 60°C, and then the vacuum high-temperature cavity 93 is allowed to intake air to raise the air pressure to 1 atmosphere, the second electromagnet is turned off, and the second driving cylinder 91 drives the vacuum heating device 92 to move upward, driving the vacuum high-temperature cavity 93 to move upward, and the transmission platform 2 continues to transport the electrostatic chuck 55.

[0074] In other embodiments, other heating rates may be used to gradually increase the temperature of the vacuum high temperature chamber 93 according to specific performance requirements of the electrostatic chuck 55 to perform a curing process on the film layer.

[0075] After the vacuum high temperature curing mechanism 9 completes the high temperature curing process, the electrostatic chuck spraying equipment of this embodiment completes the spraying work, and the transmission platform 2 transfers the electrostatic chuck 55 out.

[0076] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. An electrostatic chuck spraying device, used for forming a spray coating layer on the upper surface of an electrostatic chuck, wherein the upper surface of the electrostatic chuck comprises a circumferential surface and a top surface of a stepped structure, characterized in that: include: A frame, wherein a transmission platform for transmitting the electrostatic chuck is installed at the bottom of the frame; a pretreatment mechanism, a first spraying mechanism, a second spraying mechanism and a vacuum high-temperature curing mechanism are installed on the top of the frame in sequence; the transmission platform transmits the electrostatic chuck to each mechanism in sequence for corresponding process processing; The pretreatment mechanism is used to perform vacuum plasma activation treatment on the surface of the electrostatic chuck; The first spraying mechanism and the second spraying mechanism spray the film layer material onto the circumferential surface and the top surface of the electrostatic chuck respectively to form a sprayed film layer; The vacuum high temperature curing mechanism is used to perform vacuum high temperature curing treatment on the upper surface of the electrostatic chuck formed with the sprayed film layer.

2. The electrostatic chuck spraying equipment according to claim 1, characterized in that: The transmission platform is a grooved transmission track, and a chuck support mechanism is slidably mounted on the transmission platform, and the chuck support mechanism is used to place the electrostatic chuck and drive it to be transmitted on the transmission platform; Protective baffles are provided on both sides of the transmission platform in the transmission direction to prevent the chuck support mechanism from detaching.

3. The electrostatic chuck spraying equipment according to claim 2, characterized in that: The chuck supporting mechanism comprises: A transmission bearing module, wherein the transmission bearing module is slidably mounted on the transmission platform; A rotating platform, the rotating platform is fixed on the top of the conveying and carrying module; A motor, wherein the motor is disposed longitudinally through the transmission bearing module, and an output shaft of the motor is connected to the center of the rotating platform, so that the motor can drive the rotating platform to rotate; The electrostatic chuck is placed on the upper surface of the rotating platform, a plurality of grooves are provided on the circumferential surface of the electrostatic chuck, and a plurality of positioning pins corresponding to the grooves are arranged on the upper surface of the rotating platform.

4. The electrostatic chuck spraying equipment according to claim 2, characterized in that: Photoelectric speed sensors and drive motors are installed on both sides of the transmission track of the transmission platform; the drive motor is used to drive the transmission track of the transmission platform to roll, and then transport the chuck support mechanism; the photoelectric speed sensor is used to detect the rolling rate of the transmission platform.

5. The electrostatic chuck spraying equipment according to claim 3, characterized in that: The pre-processing mechanism comprises: A first driving cylinder, wherein the first driving cylinder has a first telescopic end that can be longitudinally telescopic, and the first telescopic end can be longitudinally telescopic under the driving action of the first driving cylinder to be close to or away from the transmission platform; a vacuum plasma generating device, connected to the bottom of the first telescopic end, and the first telescopic end drives the vacuum plasma generating device to move up and down; The vacuum chamber is connected to the bottom of the vacuum plasma generating device, and the vacuum chamber is used to contain the plasma generated by the plasma generating device.

6. The electrostatic chuck spraying equipment according to claim 5, characterized in that: The vacuum high temperature curing mechanism comprises: a second driving cylinder having a second telescopic end that is longitudinally telescopic; A vacuum heating device connected to the bottom of the second telescopic end, wherein the second telescopic end drives the vacuum heating device to move up and down to move away from or close to the transmission platform; The vacuum high temperature cavity is connected to the bottom of the vacuum heating device, and the vacuum high temperature cavity moves up and down following the vacuum heating device.

7. The electrostatic chuck spraying device according to claim 6, characterized in that: The bottom ends of the vacuum high-temperature cavity and the vacuum cavity are both provided with a sealing ring and an electromagnet, the diameters of the sealing ring and the electromagnet are larger than the electrostatic chuck and smaller than the rotating platform, and the sealing ring is located on the inner side of the electromagnet; the rotating platform is a steel platform, and the electromagnet has magnetism after being energized, so that it is tightly attached to the rotating platform.

8. The electrostatic chuck spraying equipment according to claim 3, characterized in that: The first spraying mechanism and the second spraying mechanism have the same structure, including: An electric-controlled slide rail is arranged on the top of the frame, and the installation direction of the electric-controlled slide rail is perpendicular to the transmission direction of the transmission platform; A transverse slide bar is slidably mounted on the electric control slide rail and slides along the installation direction of the electric control slide rail; the bottom of the transverse slide bar has a longitudinal columnar portion; An angle adjustment plate, rotatably mounted on the side wall of the columnar portion; An ultrasonic spray head, fixedly connected to the angle adjustment plate and rotating with the rotation of the angle adjustment plate, and used for spraying film layer materials; Integrated tube bundle, connecting the spray material source and the ultrasonic spray head; The surface of the angle adjustment plate is provided with scale lines, the side wall of the columnar portion is fixedly connected with a pointer, the angle adjustment plate is located between the pointer and the side wall of the columnar portion, and the pointer points to the scale lines.

9. The electrostatic chuck spraying device according to claim 8, characterized in that: The first spraying mechanism or the second spraying mechanism is used to spray the circumferential surface of the electrostatic chuck. If the width of the circumferential surface is not greater than the spraying width of the ultrasonic spray head, before the electrostatic chuck reaches directly below the first spraying mechanism or the second spraying mechanism and the first spraying mechanism or the second spraying mechanism starts working, the position of the transverse slide bar and the angle of the angle adjustment plate are adjusted and fixed so that the spraying width of the ultrasonic spray head can cover the width of the circumferential surface and will not cover the top surface; after the first spraying mechanism or the second spraying mechanism starts working, the motor drives the electrostatic chuck to rotate so that the film layer material sprayed by the ultrasonic spray head covers the circumferential surface; if the width of the circumferential surface is greater than the maximum spraying width of the ultrasonic spray head, before the first spraying mechanism or the second spraying mechanism starts working, the angle of the angle adjustment plate is adjusted so that the spraying range of the ultrasonic spray head can cover the circumferential surface as much as possible and will not cover the top surface; after the first spraying mechanism or the second spraying mechanism starts working, as the electrostatic chuck rotates at a uniform speed, the transverse slide bar is controlled to move slowly laterally so that the film layer material sprayed by the ultrasonic spray head covers the entire circumferential surface.

10. The electrostatic chuck spraying device according to claim 8, characterized in that: The second spraying mechanism or the first spraying mechanism is used to spray the top surface of the electrostatic chuck. When the edge of the electrostatic chuck moves to the bottom of the second spraying mechanism or the first spraying mechanism, the transverse slide bar of the second spraying mechanism or the first spraying mechanism reciprocates along the electrically controlled slide rail to spray the top surface. When the second spraying mechanism or the first spraying mechanism is spraying, the driving motor will also control the moving speed of the transmission platform to slow down, so that the electrostatic chuck moves slowly forward.

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