Cover plate mounting method

Abstract

The invention provides a cover plate installation method, and belongs to the technical field of semiconductor production equipment, and the method comprises the steps: lifting a to-be-installed quartz part or ceramic part to be close to a cover plate through an auxiliary vehicle, and keeping a distance between the to-be-installed quartz part or ceramic part and the cover plate; a plurality of adjusting assemblies are arranged in the mounting holes of the quartz component or the ceramic component upwards in a penetrating mode to be connected with the cover plate, and the quartz component or the ceramic component is lifted to abut against the cover plate through the adjusting assemblies; connecting pieces are arranged in the mounting holes of the quartz component or the ceramic component to be connected with the threaded holes in the cover plate, then the adjusting assembly is disassembled, and the connecting pieces are installed at the disassembling positions of the adjusting assembly. The lifting speed of the auxiliary vehicle is high, the installation efficiency can be improved, the lifting speed is low when the adjusting part is manually adjusted, workers have enough time to check the lifting condition, and the risk that the quartz part or the ceramic part is prone to being collided and damaged in the installation process is avoided.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor production equipment, and specifically relates to a cover plate installation method. Background Art

[0002] Reference Figure 4 In semiconductor etching equipment, some cover plates are applied with large-sized quartz components or ceramic components 400. The quartz components or ceramic components 400 are expensive and have a long processing cycle. In addition, due to the characteristics of the material, they are easily broken and damaged after being bumped. Therefore, special attention should be paid when installing the quartz components or ceramic components 400 on the cover plate.

[0003] In the related prior art, although the difficulty of manual handling is taken into consideration, an auxiliary vehicle is used to support the quartz component or ceramic component 400 for movement and lifting. However, during the lifting process, the quartz component or ceramic component 400 is prone to collide with the cover plate or other components, which poses a risk. Summary of the invention

[0004] The present application aims to solve at least one of the above-mentioned technical problems existing in the prior art. To this end, the present application provides a cover plate installation method that can solve the installation risk of quartz components or ceramic components.

[0005] The cover plate installation method according to an embodiment of the present application includes: The quartz component or ceramic component to be installed is placed on the auxiliary vehicle and moved to the bottom of the cover plate, and then the auxiliary vehicle is controlled to lift, and the quartz component or ceramic component to be installed is lifted to be close to the cover plate, and a distance is maintained between the auxiliary vehicle and the cover plate; A plurality of adjustment components are upwardly arranged in at least part of the mounting holes of the quartz component or the ceramic component, the adjustment components are connected to the threaded holes on the cover plate, and then the adjustment parts of the adjustment components located below the quartz component or the ceramic component are adjusted upward, and the quartz component or the ceramic component is lifted by the adjustment parts until it abuts against the cover plate; A connector is arranged in the mounting hole of the quartz component or the ceramic component to connect the threaded hole on the cover plate, and then the adjustment component is disassembled, and the connector is installed from the position where the adjustment component is disassembled.

[0006] The cover plate installation method according to the embodiment of the present application has at least the following beneficial effects: The cover plate installation method in the present application uses an auxiliary vehicle to control the movement of the quartz component or ceramic component, and no manual handling is required, which can reduce the intensity of the work. At the same time, during installation, the quartz component or ceramic component is first lifted by the auxiliary vehicle, which can quickly approach the cover plate, and then the adjustment parts of multiple adjustment components are used to lift the quartz component or ceramic component upward until it abuts the cover plate. In the two processes, the lifting speed of the auxiliary vehicle is fast, which is conducive to improving the installation efficiency, while the lifting speed when the adjustment part is manually adjusted is slow, and the workers have sufficient time to check the lifting situation, avoiding the situation in which the quartz component or ceramic component is automatically lifted in the traditional solution and collides with the cover plate, or collides with other components and is damaged, thereby solving the risk of quartz components or ceramic components being easily damaged by collision during installation. And after the quartz component or ceramic component abuts the cover plate, a connector is used to connect and fix it, and then the adjustment component is disassembled and replaced with a connector, so that the quartz component or ceramic component can be stably installed.

[0007] According to some embodiments of the present application, the adjustment assembly includes an adjustment screw, which passes through a quartz component or a ceramic component and is connected to the threaded hole. The adjustment part is threadedly connected to the adjustment screw, and the adjustment part is controlled to lift the quartz component or the ceramic component by rotating the adjustment part.

[0008] According to some embodiments of the present application, the adjustment component also includes a non-metallic washer. When the adjustment component is inserted, the adjustment part is first installed on the adjustment screw, and the distance from the adjustment part to the upper end of the adjustment screw is greater than the distance from the lower end surface of the quartz component or the ceramic component to the lower end surface of the cover plate. The non-metallic washer is then sleeved on the adjustment screw, and then the adjustment screw is controlled to pass through the mounting hole and upwardly connect to the threaded hole.

[0009] According to some embodiments of the present application, the adjustment assembly also includes a metal washer, the outer diameter of the metal washer is larger than the outer diameter of the adjustment part, and after the adjustment part is installed on the adjustment screw, the metal washer is first installed and then the non-metallic washer is installed.

[0010] According to some embodiments of the present application, the diameter of the mounting hole is , the outer diameter of the adjusting screw is , the outer diameter of the metal gasket is , the outer diameter of the non-metallic gasket is ,satisfy: ,or ,or .

[0011] According to some embodiments of the present application, before installing the connector, an insulating sleeve is first sleeved on the connector, and the outer diameter of the insulating sleeve matches the hole diameter of the mounting hole, so that an insulating layer is provided between the connector and the hole wall of the mounting hole.

[0012] According to some embodiments of the present application, the connecting member is a connecting screw.

[0013] According to some embodiments of the present application, the auxiliary vehicle is provided with a hydraulic lifting platform, a plurality of non-metallic pads are provided at the upper end of the hydraulic lifting platform, and the quartz components or ceramic components to be installed are placed on the non-metallic pads.

[0014] According to some embodiments of the present application, the non-metallic pad is made of rubber material, nylon material or polyurethane material.

[0015] According to some embodiments of the present application, after the auxiliary vehicle lifts the quartz component or the ceramic component, the distance between the quartz component or the ceramic component and the cover plate is 10 mm to 30 mm.

[0016] Additional aspects and advantages of the present application will be partially given in the following description, and some of the additional aspects and advantages will become obvious from the following description, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present application is further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 A schematic diagram of a state in which the auxiliary vehicle supports a quartz component or a ceramic component in the present application; Figure 2 This is a schematic diagram of a structure in which the auxiliary vehicle supports a quartz component or a ceramic component located below a cover plate in the present application; Figure 3 A schematic diagram of installing the adjustment component on a quartz component or a ceramic component in the present application; Figure 4 A schematic diagram of the position of a quartz component or a ceramic component in an etching device. DETAILED DESCRIPTION

[0018] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0019] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0020] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0021] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0022] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0023] Reference Figures 1 to 4 , a cover plate installation method according to an embodiment of the present application includes: First, the quartz component or ceramic component 400 to be installed is placed on the auxiliary vehicle 100, and the quartz component or ceramic component 400 to be installed is moved to the bottom of the cover plate 200 by the auxiliary vehicle 100; Then, the auxiliary vehicle 100 is controlled to be lifted, and the quartz component or ceramic component 400 to be installed is lifted close to the cover plate 200, and a distance is maintained between the cover plate 200; Then, a plurality of adjustment components 300 are installed upwardly through at least a portion of the mounting holes 202 of the quartz component or ceramic component 400, and the adjustment components 300 are connected to the threaded holes 201 on the cover plate 200; Then, the adjusting portion 301 of the adjusting assembly 300 located below the quartz component or the ceramic component 400 is adjusted upward, and the quartz component or the ceramic component 400 is lifted up to abut against the cover plate 200 through the adjusting portion 301; Finally, a connector is set in the mounting hole 202 of the quartz component or ceramic component 400 to connect to the threaded hole 201 on the cover plate 200, and then the adjustment component 300 is disassembled, and the connector is installed from the position where the adjustment component 300 is disassembled to complete the installation of the quartz component or ceramic component 400 on the cover plate 200.

[0024] The cover installation method in the present application utilizes an auxiliary vehicle 100 to control the movement of the quartz component or the ceramic component 400, which eliminates the need for manual handling, can reduce the intensity of the work, and can quickly move the quartz component or the ceramic component 400 to a designated location, thereby helping to improve installation efficiency.

[0025] At the same time, during installation, the auxiliary vehicle 100 is first used to lift the quartz component or ceramic component 400, so that it can quickly approach the cover plate 200. Since the auxiliary vehicle 100 still maintains a distance from the cover plate 200 after lifting the quartz component or ceramic component 400, the quartz component or ceramic component 400 can be quickly lifted to the bottom of the cover plate 200 to improve the installation efficiency, and the quartz component or ceramic component 400 can be prevented from being damaged by collision.

[0026] After the auxiliary vehicle 100 is lifted, the adjustment parts 301 of the multiple adjustment components 300 are used to lift the quartz component or ceramic component 400 upward until it abuts the cover plate 200. The lifting speed is slow when the adjustment part 301 is manually adjusted, and the workers have sufficient time to check the lifting status. This can effectively prevent the quartz component or ceramic component 400 from colliding with other components, and can also prevent the situation in the traditional solution where the quartz component or ceramic component 400 is automatically lifted and caused to collide with the cover plate 200 and be damaged, thereby solving the risk of the quartz component or ceramic component 400 being easily damaged by collision during the installation process.

[0027] After the quartz component or ceramic component 400 abuts against the cover plate 200 , a connector is used to connect and fix it, and then the adjustment component 300 is removed and replaced with the connector, thereby achieving stable installation of the quartz component or ceramic component 400 .

[0028] Combination Figure 3 In some embodiments of the present application, the adjustment assembly 300 includes an adjustment screw 302, which passes through the mounting hole 202 of the quartz component or ceramic component 400 and is connected to the threaded hole 201. The adjustment part 301 is threadedly connected to the adjustment screw 302, and the adjustment part 301 is controlled to lift the quartz component or ceramic component 400 by rotating the adjustment part 301.

[0029] It can be understood that in this embodiment, the adjusting screw 302 is provided to adjust the raising and lowering of the adjusting part 301. Since the adjusting screw 302 is connected to the threaded hole 201 on the cover plate 200, the quartz component or ceramic component 400 can be automatically aligned with the cover plate 200 in the lifting process, which is convenient for installing the connecting parts.

[0030] Furthermore, the adjusting part 301 is threadedly connected for lifting and lowering adjustment. When the quartz component or the ceramic component 400 is lifted, the reaction force on the adjusting part 301 will not cause the adjusting part 301 to fall, thereby ensuring the supporting stability of the quartz component or the ceramic component 400.

[0031] When lifting the quartz component or ceramic component 400, since multiple adjustment parts 301 are set to support the quartz component or ceramic component 400, during the adjustment process, it is necessary to control the rotation of the adjustment parts 301 on the multiple adjustment components 300 to drive the quartz component or ceramic component 400 to rise or fall. The adjustment speed is controllable, which is convenient for workers to adjust and install according to the actual assembly situation, and can effectively avoid collisions.

[0032] Combination Figure 3 In some embodiments of the present application, the adjustment component 300 further includes a non-metallic washer 304. When the adjustment component 300 is installed, the adjustment part 301 is first installed on the adjustment screw 302, and the distance from the adjustment part 301 to the upper end of the adjustment screw 302 is greater than the distance from the lower end surface of the quartz component or the ceramic component 400 to the lower end surface of the cover plate 200, and then the non-metallic washer 304 is sleeved on the adjustment screw 302, and then the adjustment screw 302 is controlled to pass through the mounting hole 202 and connect to the threaded hole 201 upward.

[0033] Combined with the structural arrangement of the aforementioned embodiment, since the adjusting part 301 is rotated to adjust the lifting and lowering, it will rotate relative to the quartz component or ceramic component 400 during the lifting and lowering process, causing friction, which may cause damage to the quartz component or ceramic component 400. In this embodiment, by providing a non-metallic washer 304, when the adjusting part 301 lifts the quartz component or ceramic component 400 upward, the non-metallic washer 304 can be used to abut against the quartz component or ceramic component 400, thereby preventing the adjusting part 301 from being damaged due to friction when abutting against the quartz component or ceramic component 400, especially when the adjusting part 301 is provided as a nut.

[0034] In addition, when no gasket is provided, the size of the adjustment part 301 must be larger than the mounting hole 202 to ensure support for the quartz component or ceramic component 400. In this embodiment, a non-metallic gasket 304 is provided to abut the quartz component or ceramic component 400, which is beneficial to reducing the size of the adjustment part 301.

[0035] After the adjusting part 301 is installed on the adjusting screw 302, by making the distance at the upper end of the controller greater than the distance from the lower end surface of the quartz component or ceramic component 400 to the lower end surface of the cover plate 200, it can be ensured that the upper end of the adjusting screw 302 is first screwed into the threaded hole 201 on the cover plate 200 before the adjusting part 301 abuts against the quartz component or ceramic component 400, thereby ensuring that the adjusting part 301 can stably support the quartz component or ceramic component 400 and ensure a smooth lifting process.

[0036] Combination Figure 3 In some embodiments of the present application, the adjustment component 300 further includes a metal washer 303, the outer diameter of which is greater than the outer diameter of the adjustment part 301. After the adjustment part 301 is mounted on the adjustment screw 302, the metal washer 303 is first sleeved, and then the non-metallic washer 304 is sleeved. In this way, the adjustment part 301 can be further reduced in size, and only the metal washer 303 needs to be supported, and the metal washer 303 is used to ensure the supporting force of the non-metallic washer 304, and then the metal washer 303 or the non-metallic washer 304 is used to ensure the supporting force of the quartz component or the ceramic component 400.

[0037] In some embodiments of the present application, the diameter of the mounting hole 202 is , the outer diameter of the adjusting screw 302 is , the outer diameter of the metal washer 303 is , the outer diameter of the non-metallic gasket 304 is ,satisfy: In this embodiment, the outer diameter of the non-metallic gasket 304 is greater than or equal to the outer diameter of the metal gasket 303 , and both are greater than the aperture of the mounting hole 202 , which can effectively ensure the supporting force on the quartz component or ceramic component 400 .

[0038] In addition, the above dimensions can also be designed to have other size relationships, such as ,or wait.

[0039] It is understandable that the adjusting screw 302 matches the threaded hole 201, and the outer diameter of the adjusting screw 302 is smaller than the aperture of the mounting hole 202, that is, the aperture of the mounting hole 202 is larger than the aperture of the threaded hole 201. In some embodiments of the present application, before the connector is installed, an insulating sleeve is first sleeved on the connector, and the outer diameter of the insulating sleeve matches the aperture of the mounting hole 202, so that an insulating layer is provided between the connector and the hole wall of the mounting hole 202.

[0040] Since the connectors usually adopt a screw structure, the structural setting of this embodiment can avoid the connectors from abutting against the quartz component or the ceramic component 400 in the mounting hole 202, which is beneficial to protecting the quartz component or the ceramic component 400.

[0041] In some embodiments of the present application, the connecting member is configured as a connecting screw. And a truncated cone is provided at the lower end of the insulating sleeve extending outward. When installing the connecting member, the insulating sleeve is firstly put on the connecting screw, and then the connecting screw is passed upward through the mounting hole 202, so that the insulating sleeve is inserted into the mounting hole 202, and the truncated cone abuts against the lower end of the quartz component or ceramic component 400, and the upper end of the connecting screw is connected to the threaded hole 201. By gradually screwing into the threaded hole 201, the head of the connecting screw is pressed against the quartz component or ceramic component 400 through the truncated cone, and the installation and fixation are completed.

[0042] In some embodiments of the present application, the auxiliary vehicle 100 is provided with a hydraulic lifting platform 101, and a plurality of non-metallic pads 102 are provided on the upper end of the hydraulic lifting platform 101, and the quartz component or ceramic component 400 to be installed is placed on the non-metallic pads 102. In this embodiment, the quartz component or ceramic component 400 is lifted by hydraulic lifting, which is simple to control, and the hydraulic lifting distance can be pre-set according to the installation requirements. The worker only needs to start the lifting operation by pressing a button or other means, and the auxiliary vehicle 100 can automatically lift the quartz component or ceramic component 400 to the set height.

[0043] Furthermore, by supporting the quartz component or ceramic component 400 with the non-metallic pad 102, wear of the quartz component or ceramic component 400 can be effectively avoided. At the same time, when the structural design of the bottom of the quartz component or ceramic component 400 is not convenient for bearing force, the non-metallic pad 102 can be used to support it, thereby avoiding the structure that is not convenient for bearing force and avoiding damage to the quartz component or ceramic component 400.

[0044] The non-metallic pad 102 can be made of rubber material, nylon material or polyurethane material.

[0045] In some embodiments of the present application, after the auxiliary vehicle 100 lifts the quartz component or ceramic component 400, the distance between the quartz component or ceramic component 400 and the cover plate 200 is 10 mm to 30 mm. Since the adjustment part 301 is lifted by a thread, the lifting speed is slow. By controlling the distance between the quartz component or ceramic component 400 after lifting to 10 mm to 30 mm, collision can be avoided while taking into account installation efficiency.

[0046] Combination Figures 1 to 3 In some embodiments of the present application, the cover plate installation method includes: First, place the quartz component or ceramic component 400 to be installed on the hydraulic lifting platform 101 of the auxiliary vehicle 100, and move the quartz component or ceramic component 400 to be installed to the bottom of the cover plate 200 by moving the auxiliary vehicle 100; Then, the hydraulic lifting platform 101 is controlled to lift, and the quartz component or ceramic component 400 to be installed is lifted to a position 20 mm below the cover plate 200; Then, the adjusting part 301 is installed on the four adjusting screws 302, and the metal washers 303 and the non-metal washers 304 are sequentially sleeved, and then the four adjusting screws 302 are passed upward through the mounting holes 202 at the four vertex positions of the quartz component or ceramic component 400, and connected upward to the threaded holes 201 on the cover plate 200; Then rotate the four adjusting parts 301 to control the adjusting parts 301 to move upward relative to the adjusting screws 302, thereby supporting the quartz component or the ceramic component 400 to move upward. When the quartz component or the ceramic component 400 abuts against the cover plate 200, stop rotating the adjusting parts 301; An insulating sleeve is placed on the connecting screw, and then the connecting screw is passed upward from the remaining mounting hole 202 of the quartz component or ceramic component 400 to the threaded hole 201 on the connecting cover plate 200, and screwed into the pre-tightening position; Then, the four adjusting screws 302 are removed, and the connecting screws are installed to the pre-tightening position from the position where the adjusting screws 302 are removed. Finally, all the connecting screws are tightened to complete the installation of the quartz component or ceramic component 400 on the cover plate 200.

[0047] In which, when the adjustment part 301 lifts the quartz component or ceramic component 400 to abut the cover plate 200, and / or when the connecting screws are pre-tightened, the quartz component or ceramic component 400 can be fine-tuned in horizontal position under the action of external force to ensure that the mounting hole 202 is aligned with the threaded hole 201.

[0048] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A cover plate installation method, characterized in that: include: The quartz component or ceramic component to be installed is placed on the auxiliary vehicle and moved to the bottom of the cover plate, and then the auxiliary vehicle is controlled to lift, and the quartz component or ceramic component to be installed is lifted to be close to the cover plate, and a distance is maintained between the auxiliary vehicle and the cover plate; A plurality of adjustment components are upwardly arranged in at least part of the mounting holes of the quartz component or the ceramic component, the adjustment components are connected to the threaded holes on the cover plate, and then the adjustment parts of the adjustment components located below the quartz component or the ceramic component are adjusted upward, and the quartz component or the ceramic component is lifted by the adjustment parts until it abuts against the cover plate; A connector is arranged in the mounting hole of the quartz component or the ceramic component to connect the threaded hole on the cover plate, and then the adjustment component is disassembled, and the connector is installed from the position where the adjustment component is disassembled.

2. The cover plate installation method according to claim 1, characterized in that: The adjustment assembly includes an adjustment screw, which passes through a quartz component or a ceramic component and is connected to the threaded hole. The adjustment part is threadedly connected to the adjustment screw, and the adjustment part is controlled to lift the quartz component or the ceramic component by rotating the adjustment part.

3. The cover plate installation method according to claim 2, characterized in that: The adjustment component also includes a non-metallic washer. When the adjustment component is inserted, the adjustment part is first installed on the adjustment screw, and the distance from the adjustment part to the upper end of the adjustment screw is greater than the distance from the lower end surface of the quartz component or the ceramic component to the lower end surface of the cover plate. The non-metallic washer is then sleeved on the adjustment screw, and then the adjustment screw is controlled to pass through the mounting hole and connect upward to the threaded hole.

4. The cover plate installation method according to claim 3, characterized in that: The adjustment assembly also includes a metal washer, the outer diameter of which is larger than the outer diameter of the adjustment part. After the adjustment part is mounted on the adjustment screw, the metal washer is first sleeved and then the non-metallic washer is sleeved.

5. The cover plate installation method according to claim 4, characterized in that: The diameter of the mounting hole is , the outer diameter of the adjusting screw is , the outer diameter of the metal gasket is , the outer diameter of the non-metallic gasket is ,satisfy: ,or ,or .

6. The cover plate installation method according to claim 1, characterized in that: Before installing the connector, an insulating sleeve is first sleeved on the connector, and the outer diameter of the insulating sleeve matches the hole diameter of the mounting hole, so that an insulating layer is provided between the connector and the hole wall of the mounting hole.

7. The cover plate installation method according to claim 1, characterized in that: The connecting piece is a connecting screw.

8. The cover plate installation method according to claim 1, characterized in that: The auxiliary vehicle is provided with a hydraulic lifting platform, and a plurality of non-metallic pads are provided on the upper end of the hydraulic lifting platform, and the quartz components or ceramic components to be installed are placed on the non-metallic pads.

9. The cover plate installation method according to claim 8, characterized in that: The non-metallic pad is made of rubber material, nylon material or polyurethane material.

10. The cover plate installation method according to claim 1, characterized in that: After the auxiliary vehicle lifts the quartz component or the ceramic component, the distance between the quartz component or the ceramic component and the cover plate is 10 mm to 30 mm.

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