A sub-micron precision long-stroke metal guide rail measuring and processing method

Abstract

This invention discloses a method for measuring and machining long-stroke metal guideways with sub-micron precision, comprising the following steps: using a reference mirror to separate the measurement errors of the measuring device in the long and short directions of the workpiece, and calibrating the measuring device using the measurement errors in the long and short directions of the workpiece; using the measuring device to measure the initial surface shape of the workpiece, generating a corresponding machining code based on the initial surface shape, and using the machining code to control a time-controlled grinding device to perform time-controlled grinding on the workpiece; using the measuring device to measure the surface shape of the machined workpiece, and if the surface shape of the machined workpiece does not meet the precision requirements, generating a new machining code based on the surface shape of the machined workpiece, and using the new machining code to control the time-controlled grinding device to perform time-controlled grinding on the workpiece until the surface shape of the machined workpiece meets the precision requirements. This invention improves measurement accuracy by separating the measurement errors of the measuring device, and continuously improves machining accuracy through an iterative machining-measurement process.

Description

Technical Field

[0001] This invention relates to machining technology, specifically to a method for measuring and machining long-stroke metal guide rails with sub-micron precision. Background Technology

[0002] Hydrostatic guideways are widely used in ultra-precision machine tools. Currently, the highest precision hydrostatic guideway is the Nanoform X ultra-precision machine tool from Precitech Corporation in the United States, with a straightness error of 0.2μm over a 200mm stroke. A key factor affecting the straightness error of hydrostatic guideways is the manufacturing error of the guideway itself. According to the error homogenization effect, to achieve a straightness error better than 0.1μm for hydrostatic guideways, the manufacturing error of the guideway itself needs to be better than 1μm. Hydrostatic guideways are long-stroke metal guideways, and due to limitations in processing and inspection methods, it is currently difficult to achieve a manufacturing accuracy better than 1μm for long-stroke metal guideways. Therefore, improving the manufacturing accuracy of mechanical guideways is a key factor in achieving higher precision hydrostatic guideways.

[0003] Metal guide rails are typically made of cast iron, making them difficult to machine using ultra-precision turning. Currently, the primary method for machining these parts is ultra-precision grinding, sometimes combined with manual lapping. However, ultra-precision grinding is based on the principle of error replication, and the precision of the machine tool itself determines the grinding accuracy. The larger the workpiece, the lower the machine tool's precision, making sub-micron precision grinding difficult. Furthermore, machining accuracy is limited by factors such as grinding wheel wear and grinding heat, further reducing grinding precision.

[0004] In the measurement of long-stroke metal guideways, the most common measurement method is coordinate measuring machine (CMM). ZEISS's large-stroke high-precision CMM, XENOS CMM, has a measurement stroke of 900mm×1500mm×700mm and a maximum permissible error of (0.3+L / 1000)μm. However, its measurement accuracy cannot meet the manufacturing requirements for sub-micron precision.

[0005] In summary, there is an urgent need for a method to manufacture long-stroke metal guideways with sub-micron precision. Summary of the Invention

[0006] The technical problem this invention aims to solve is that the machining accuracy of long-stroke metal guide rails is currently low. To address the aforementioned problems in existing technologies, this invention proposes a sub-micron precision method for measuring and machining long-stroke metal guide rails. This method uses a time-controlled grinding process based on computer-defined deterministic shaping principles to machine long-stroke metal guide rails. Simultaneously, an optical reference mirror is used to calibrate the measurement equipment system error, thereby improving the measurement accuracy of metal guide rails.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:

[0008] A method for measuring and machining long-stroke metal guide rails with sub-micron precision includes the following steps:

[0009] S1) Use a reference mirror to separate the measurement errors of the measuring equipment in the long and short directions of the workpiece, and then use the measurement errors in the long and short directions of the workpiece to calibrate the measuring equipment;

[0010] S2) Use a measuring device to measure the initial surface shape of the workpiece, generate a corresponding machining code based on the initial surface shape, and use the machining code to control the timed grinding device to perform timed grinding on the workpiece;

[0011] S3) Use measuring equipment to measure the surface shape of the workpiece after processing. If the surface shape of the workpiece after processing does not meet the accuracy requirements, generate a new processing code based on the surface shape of the workpiece after processing, and use the new processing code to control the timed grinding processing device to perform timed grinding processing on the workpiece until the surface shape of the workpiece after processing meets the accuracy requirements.

[0012] Furthermore, when using a reference mirror to separate the measuring equipment for measurement errors in the long and short sides of a workpiece, the specific errors include:

[0013] The reference mirror is set on one side of the workpiece along its long side, and the measuring device is controlled to feed at the corresponding position where the reference mirror is placed on the workpiece. The measurement error along the long side of the workpiece is separated in real time through the reference mirror.

[0014] The reference mirror is set on one side of the workpiece in the short side direction. The measuring device is controlled to use a unidirectional grating scanning path to perform feed motion on the side of the workpiece where the reference mirror is placed. The reference mirror is set at the position where the grating trajectory changes. The measurement error in the short side direction of the workpiece is separated in real time through the reference mirror.

[0015] Furthermore, when the reference mirror is positioned on one side of the workpiece's long side, and the measuring device is controlled to perform feed motion at the corresponding position where the reference mirror is placed on the workpiece, the specific steps include:

[0016] If the workpiece length is greater than the reference mirror length, two or more reference mirrors are set sequentially along the long side of the workpiece according to the specified step length. Then, the measuring device is controlled to feed along the long side of the workpiece on the side where the reference mirror is placed. Alternatively, the reference mirrors are set sequentially from the initial position to the next position along the long side of the workpiece according to the specified step length. After each reference mirror is set to a new position, the measuring device is controlled to feed at the corresponding position along the long side of the workpiece.

[0017] When measuring the workpiece's long side direction in real time using a reference mirror, the process includes: obtaining the contour error of each segment of the workpiece's long side direction corresponding to the reference mirror, and then converting and splicing the contour errors of each segment of the workpiece's long side direction to obtain the workpiece's straightness error contour.

[0018] Furthermore, when splicing together the workpiece after converting the contour error of each segment along its long side, the specific steps include:

[0019] Calculate the slope error difference ΔB between two adjacent segments of the contour error along the long side of the workpiece. i and position error difference ΔA i ;

[0020] Based on the contour error of the latter segment among two adjacent segments along the long side of the workpiece The difference between the measured value and the slope error ΔB i and position error difference ΔA i The contour error after the subsequent transformation is calculated.

[0021] The contour error of the first segment among two adjacent segments along the long side of the workpiece. Measurement value and the contour error after the subsequent conversion By adding them together, we obtain the straightness error profile of two adjacent segments along the long side of the workpiece.

[0022] Furthermore, the slope error difference ΔB between two adjacent segments of the contour error along the long side of the workpiece is calculated. i and position error difference ΔA i Specifically, this includes:

[0023] In the overlapping area of ​​two adjacent segments along the long side of the workpiece, the corresponding contour errors of the two adjacent segments along the long side of the workpiece are subtracted.

[0024] Using the least squares method, the slope error difference ΔB between two adjacent segments of the contour error along the long side of the workpiece is calculated. i and position error difference ΔA i The expression is as follows:

[0025]

[0026] Where k = 1, 2, ..., N, and N is the number of data points in the overlapping region. It is the contour error of the first segment in the overlapping area of ​​two adjacent segments along the long side of the workpiece. It is the contour error of the latter segment of two adjacent segments along the long side of the workpiece in the overlapping area, x i,k It is the k-th position of the i-th workpiece segment.

[0027] Furthermore, the contour error after the latter transformation The expression is as follows:

[0028]

[0029] Where, x i+1 It is the x-coordinate of the (i+1)th segment of the workpiece.

[0030] Optionally, when measuring the initial surface shape of the workpiece using measuring equipment, a Bezier point support method is adopted to minimize the workpiece's gravitational deformation.

[0031] Optionally, when using the machining code to control the time-controlled grinding device to perform time-controlled grinding on the workpiece, edge-complementing fixtures are set around the workpiece to reduce the edge effect of time-controlled grinding.

[0032] Optionally, after measuring the surface shape of the machined workpiece using a measuring device, the following steps are performed: low-pass filtering of the measurement results according to a specified frequency band.

[0033] Optional, the specified frequency band is 10mm.

[0034] The present invention has the following advantages over the prior art:

[0035] This invention uses time-controlled grinding, which continuously improves the workpiece machining accuracy based on measurement results. Therefore, the machining accuracy is not limited by the machine tool. Furthermore, the measurement error of the measuring equipment in the long and short sides of the workpiece is separated by the reference mirror, thus ensuring the measurement accuracy of the workpiece and significantly improving the machining accuracy of the workpiece. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the time-controlled grinding principle.

[0037] Figure 2 This is a flowchart of an embodiment of the present invention.

[0038] Figure 3 This is a schematic diagram of the measuring device used in an embodiment of the present invention.

[0039] Figure 4 This is a schematic diagram illustrating the principle of splicing errors along the long side of the workpiece in an embodiment of the present invention.

[0040] Figure 5 This is the measurement result of splicing the workpiece along its long side in an embodiment of the present invention.

[0041] Figure 6 This is a schematic diagram illustrating the principle of error separation in the short side direction of the workpiece in an embodiment of the present invention.

[0042] Figure 7 This is a flowchart of the time-controlled grinding process. Detailed Implementation

[0043] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0044] Before introducing specific embodiments of the present invention, the relevant concepts will be explained first.

[0045] Timed grinding: Timed grinding is a precision machining method primarily used to ensure that parts reach the required dimensions and surface quality within a specified time. By precisely controlling the grinding time, timed grinding can improve machining efficiency, reduce costs, and guarantee consistent machining quality. The basic principle of timed grinding is as follows: Figure 1 As shown, a stable removal function is formed by constant pressure and speed, and the grinding time is precisely controlled so that a certain amount of material is removed from the workpiece surface within a specified time, thereby achieving the expected size and surface quality.

[0046] Example

[0047] To improve the machining accuracy of long-stroke metal guideways, this embodiment proposes a sub-micron precision measurement and machining method for long-stroke metal guideways. Based on traditional grinding methods, a time-controlled grinding method based on computer-defined deterministic shaping principles is used to machine long-stroke metal guideways. This time-controlled grinding method employs an iterative measurement-machining approach to achieve high-precision machining of large-stroke guideways. The machining accuracy depends on the measurement accuracy and is not limited by the machine tool's own accuracy. Simultaneously, an optical reference lens is used to calibrate the measurement equipment's system error, improving the measurement accuracy of the metal guideways.

[0048] like Figure 2 As shown, the specific implementation steps of the method in this embodiment include:

[0049] S1) Use a reference mirror to separate the measurement errors of the measuring equipment in the long and short directions of the workpiece, and then use the measurement errors in the long and short directions of the workpiece to calibrate the measuring equipment;

[0050] S2) Use a measuring device to measure the initial surface shape of the workpiece, generate a corresponding machining code based on the initial surface shape, and use the machining code to control the timed grinding device to perform timed grinding on the workpiece;

[0051] S3) Use measuring equipment to measure the surface shape of the workpiece after processing. If the surface shape of the workpiece after processing does not meet the accuracy requirements, generate a new processing code based on the surface shape of the workpiece after processing, and use the new processing code to control the timed grinding processing device to perform timed grinding processing on the workpiece until the surface shape of the workpiece after processing meets the accuracy requirements.

[0052] The following provides a detailed explanation of each step.

[0053] The measuring device used in step S1 of this embodiment is, for example... Figure 3 As shown, it consists of X-axis, Y-axis, and non-contact sensors. The Y-axis measurement range is 700mm, and the X-axis measurement range is 200mm. When using a reference mirror to separate the measuring equipment, the measurement errors in the long and short sides of the workpiece specifically include:

[0054] S11) Set the reference mirror on one side of the workpiece's long side (i.e., the Y-axis), and control the measuring device to feed along the Y-axis at the corresponding position of the workpiece with the reference mirror on the side where the reference mirror is placed. Separate the measurement error of the workpiece's long side in real time through the reference mirror. For long-stroke metal guide rails, the measurement error of the workpiece's long side is mainly the straightness error along the length of the guide rail.

[0055] S12) Set the reference mirror on one side of the workpiece's short side (i.e., the X-axis), and control the measuring device to feed along the X-axis at the corresponding position of the reference mirror on the workpiece side. Separate the measurement error of the workpiece's short side in real time through the reference mirror. For long-stroke metal guide rails, the measurement error of the workpiece's short side includes straightness error and temperature error.

[0056] In step S11 of this embodiment, a 500mm long optical reference mirror with an accuracy of 0.1μm is used. When the workpiece length is less than the reference mirror length, the measurement error in the long side direction of the workpiece can be directly separated using the reference mirror. In this case, how to separate the measurement error using the reference mirror is a conventional method. However, in this embodiment, the workpiece is a long-stroke metal guide rail, and its length is generally greater than 500mm. Therefore, this embodiment considers using a splicing method to separate the error in the long side direction of the workpiece.

[0057] Correspondingly, in step S11, when the reference mirror is set on one side of the long side of the workpiece, it specifically includes:

[0058] If the length of the workpiece is greater than the length of the reference mirror, two or more reference mirrors are set sequentially along the long side of the workpiece according to a specified step size. In this way, during the process of controlling the measuring device to feed along the Y-axis, each reference mirror measures the measurement error of the corresponding segment of the workpiece.

[0059] Or, such as Figure 4 As shown, a reference mirror is set from the initial position and then sequentially to the next position along the long side of the workpiece according to a specified step size. After the reference mirror is placed in a new position, the measuring device is controlled to perform a feed motion along the Y-axis at the corresponding position, thereby measuring the measurement error of each segment of the workpiece through a reference mirror.

[0060] Therefore, when the measurement error of the workpiece in the long side direction is separated in real time by the reference mirror, the straightness error of the i-th segment of the workpiece corresponding to the i-th reference mirror or the i-th placement position of the reference mirror is separated in the long side direction of the workpiece. Thus, the contour error of each segment in the long side direction of the workpiece can be obtained. Then, the contour error of each segment in the long side direction of the workpiece is converted and spliced ​​to obtain the straightness error contour of the workpiece.

[0061] In this embodiment, when splicing together the contour errors of each segment along the long side of the workpiece, the specific steps include:

[0062] First, calculate the slope error difference ΔB between two adjacent segments of the contour error along the long side of the workpiece. i and position error difference ΔA i ;

[0063] For the i-th segment of the workpiece, let the measurement result of the reference mirror on the contour error of the i-th segment when separating the measurement error be: The straightness error measurement result is z i As shown in formulas (1) and (2):

[0064]

[0065]

[0066] In the formula B i A i Let x be the slope error and position error of the i-th segment of the contour error. i It is the x-coordinate of the i-th workpiece segment.

[0067] Due to the existence of slope error and position error, the contours of the overlapping areas of the i-th segment and the (i+1)-th segment of the guide rail are not equal, as shown in formula (3):

[0068]

[0069] However, the straightness error profile of the guide rail in the overlapping area is equal:

[0070] z = z (4)

[0071] i,k i+1,k

[0072] In the formula, k = 1, 2, ... N, and N is the number of data points in the overlapping area.

[0073] Therefore, the slope error difference ΔB between two adjacent segments of the contour error along the long side of the workpiece is calculated. i and position error difference ΔA i In the overlapping area of ​​two adjacent segments along the long side of the workpiece, subtract the corresponding contour errors of the two adjacent segments along the long side of the workpiece, that is, subtract equations (1) and (2), to obtain:

[0074]

[0075] In the formula ΔB i =B i -B i+1 ΔA i =A i -A i+1 .

[0076] B and A can be calculated using the least squares method, as shown in formula (6):

[0077]

[0078] in, It is the contour error of the first segment i in the overlapping area of ​​two adjacent segments along the long side of the workpiece. It is the contour error of the latter segment i+1 in the overlapping area of ​​two adjacent segments along the long side of the workpiece, x i,k It is the k-th position of the i-th workpiece segment.

[0079] Then, based on the contour error of the latter segment of two adjacent segments along the long side of the workpiece... The difference between the measured value and the slope error ΔB i and position error difference ΔA i The contour error after the subsequent transformation is calculated. The expression is as follows:

[0080]

[0081] Where, x i+1 It is the x-coordinate of the (i+1)th segment of the workpiece.

[0082] Finally, using the transformed (i+1)th segment guide profile z i+1 t and the measured value z of the i-th guide rail profile. i m The straightness error profile of the spliced ​​guide rail can be obtained, and the expression is as follows:

[0083]

[0084] Based on the above formula, when the workpiece length is greater than the reference mirror length, the straightness error of the long-stroke guide rail can be patched up and the measuring equipment calibrated. The result is as follows: Figure 5 As shown.

[0085] In step S12 of this embodiment, a 100mm optical reference mirror with an accuracy of 0.1μm is used. Since the workpiece material is cast iron, which is prone to thermal expansion, to reduce errors in the short side direction of the workpiece, the measuring device changes the traditional bidirectional grating scanning path to a unidirectional grating scanning path, and sets the reference mirror at the position where the grating trajectory intersects. Figure 6 As shown, a 100mm optical reference mirror is placed on the right side of the workpiece. The measuring equipment is controlled to change the traditional bidirectional grating scanning path to a unidirectional grating scanning path, with feeding motion only on the right side of the workpiece. The measurement data from the optical reference mirror is used to separate the measurement error in the short side direction (i.e., the X-axis direction) of the workpiece in real time. Since the reference mirror is an ideal plane, the error in the short side direction of the workpiece, including the straightness error E, can be obtained through the data from the reference mirror. ZX (x) and temperature error E TZX (x), as shown in formula (9).

[0086] E(x)=(E ZX (x) +E TZX (x)) (9)

[0087] It is important to note that, in order to ensure that the reference mirror and the workpiece have the same thermal expansion, the same cast iron material as the workpiece is used under the reference mirror to ensure that the auxiliary mirror and the workpiece have the same thermal expansion.

[0088] like Figure 7 As shown, steps S2 and S3 of this embodiment process the long-stroke metal guide rail through a measurement-processing iteration method. Step S2 specifically includes the following steps:

[0089] S21) Use the measuring device after separating the measurement error in step S1 to measure the initial surface shape of the workpiece. In order to avoid deformation of the workpiece during measurement, the Bezier point support method is adopted to minimize the workpiece's gravity deformation. Specifically, the workpiece is supported at the optimal support position based on the Bezier principle.

[0090] S22) After obtaining the initial surface shape of the workpiece, the machining code corresponding to the initial surface shape is generated based on the time-controlled grinding principle. Specifically, the removal function is calculated according to the initial surface shape to obtain the machining dwell time, that is, the dwell time of the tool at the machining position. The longer the dwell time, the higher the material removal amount. Then the machining code is generated to perform the first machining according to the dwell time and the required machining trajectory.

[0091] S23) The machining code is used to control the time-controlled grinding device to perform time-controlled grinding on the workpiece. Based on the deterministic shaping principle, high-precision machining is achieved through a stable removal function. In this embodiment, to avoid machining edge effects, edge-filling fixtures are added around the workpiece during machining.

[0092] After processing is complete, proceed to step S3, such as... Figure 7 As shown, the surface shape of the machined workpiece is measured to determine whether it meets the requirement of a machining accuracy of less than 1 μm. If it does not meet this accuracy requirement, the removal function is calculated again based on the surface shape of the machined workpiece to obtain the machining dwell time and generate the corresponding machining code; if the requirement is met, the process ends. In this embodiment, since there are periodic textures on the workpiece surface, the workpiece surface shape measurement results are low-pass filtered, and the filter frequency band is set to 10 mm.

[0093] As can be seen from the above process, the time-controlled grinding principle belongs to the deterministic shaping principle. The machining accuracy of the workpiece is continuously improved based on the measurement results. Therefore, the machining accuracy is not limited by the machine tool. In this embodiment, the main systematic error of the measuring equipment is separated by the optical reference mirror, so the surface shape measurement accuracy of the long-stroke metal guide rail can be guaranteed, thereby greatly improving the machining accuracy of the long-stroke metal guide rail.

[0094] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A method for measuring and processing long-stroke metal guide rails with sub-micron precision, characterized in that, Includes the following steps: S1) Use a reference mirror to separate the measurement errors of the workpiece in the long and short directions of the measuring device, and then use the measurement errors of the workpiece in the long and short directions of the measuring device to calibrate the measuring device. Specifically, when using a reference mirror to separate the measurement errors of the workpiece in the long and short directions of the measuring device, the following applies: The reference mirror is set on one side of the workpiece along its long side, and the measuring device is controlled to feed at the corresponding position where the reference mirror is placed on the workpiece. The measurement error along the long side of the workpiece is separated in real time through the reference mirror. The reference mirror is set on one side of the workpiece in the short side direction. The measuring equipment is controlled to use a unidirectional grating scanning path to perform feed motion on the side of the workpiece where the reference mirror is placed. The reference mirror is set at the position where the grating trajectory changes. The measurement error in the short side direction of the workpiece is separated in real time through the reference mirror. S2) Use a measuring device to measure the initial surface shape of the workpiece, generate a corresponding machining code based on the initial surface shape, and use the machining code to control the timed grinding device to perform timed grinding on the workpiece; S3) Use measuring equipment to measure the surface shape of the workpiece after processing. If the surface shape of the workpiece after processing does not meet the accuracy requirements, generate a new processing code based on the surface shape of the workpiece after processing, and use the new processing code to control the timed grinding device to perform timed grinding on the workpiece until the surface shape of the workpiece after processing meets the accuracy requirements.

2. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 1, characterized in that, When the reference mirror is positioned on one side of the workpiece along its long side, and the measuring equipment is controlled to perform feed motion at the corresponding position on the workpiece where the reference mirror is placed, the specific steps include: If the workpiece length is greater than the reference mirror length, two or more reference mirrors are set sequentially along the long side of the workpiece according to the specified step length. Then, the measuring device is controlled to feed along the long side of the workpiece on the side where the reference mirror is placed. Alternatively, the reference mirror is set sequentially to the next position along the long side of the workpiece according to the specified step length starting from the initial position. After each reference mirror is set to a new position, the measuring device is controlled to feed at the corresponding position along the long side of the workpiece. When measuring the workpiece's long side direction in real time using a reference mirror, the process includes: obtaining the contour error of each segment of the workpiece's long side direction corresponding to the reference mirror, and then converting and splicing the contour errors of each segment of the workpiece's long side direction to obtain the workpiece's straightness error contour.

3. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 2, characterized in that, When splicing together the workpiece after converting the contour error of each segment along its long side, the specific steps include: Calculate the slope error difference between two adjacent segments of the contour error along the long side of the workpiece. Difference between position error and position error ; Based on the contour error of the latter segment among two adjacent segments along the long side of the workpiece Difference between measured value and slope error Difference between position error and position error The contour error after the subsequent transformation is calculated. ; The contour error of the first segment among two adjacent segments along the long side of the workpiece. Measurement value and the contour error after the subsequent conversion By adding them together, we obtain the straightness error profile of two adjacent segments along the long side of the workpiece. .

4. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 3, characterized in that, Calculate the slope error difference between two adjacent segments of the contour error along the long side of the workpiece. Difference between position error and position error Specifically, this includes: In the overlapping area of ​​two adjacent segments along the long side of the workpiece, the corresponding contour errors of the two adjacent segments along the long side of the workpiece are subtracted. The slope error difference of the contour error between two adjacent segments along the long side of the workpiece is calculated using the least squares method. Difference between position error and position error The expression is as follows: Where k = 1, 2, ..., N, and N is the number of data points in the overlapping region. It is the contour error of the first segment in the overlapping area of ​​two adjacent segments along the long side of the workpiece. It refers to the contour error of the latter segment of two adjacent segments along the long side of the workpiece in the overlapping area. It is the first i Section of workpiece k One position.

5. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 3, characterized in that, Contour error after the second transformation The expression is as follows: in, It is the first i+1 The x-coordinate of the workpiece segment.

6. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 1, characterized in that, When measuring the initial surface shape of a workpiece using measuring equipment, the Bezier point support method is adopted to minimize the workpiece's gravitational deformation.

7. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 1, characterized in that, When using the machining code to control the time-controlled grinding device to perform time-controlled grinding on a workpiece, edge-complementing fixtures are set around the workpiece to reduce the edge effect of time-controlled grinding.

8. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 1, characterized in that, After measuring the surface shape of the machined workpiece using measuring equipment, the following steps are performed: low-pass filtering of the measurement results according to a specified frequency band.

9. The method for measuring and processing long-stroke metal guide rails with sub-micron precision according to claim 8, characterized in that, The specified frequency band is 10mm.

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