Precise regeneration method for LAM aluminum oxide coating part of chip manufacturing etching machine

Abstract

The invention relates to the technical field of precise regeneration methods, in particular to a precise regeneration method of an LAM aluminum oxide coating part of a chip manufacturing etching machine, which comprises the following steps: SI, mixing abrasive and water; s2, placing components; s3, carrying out wet sand blasting treatment; s4, detecting and processing; s5, recovering the grinding material and the sewage; according to the method, by accurately controlling the injection pressure, injection distance and sand blasting time of wet sand blasting treatment, it can be ensured that the surface of the part is evenly and finely treated, dirt and attachments are removed, meanwhile, a clean and rough film layer surface is exposed, the requirement for high-precision regeneration is met, and compared with dry sand blasting, wet sand blasting has the advantages that due to the fact that water is added, sand blasting efficiency is greatly improved; the system has the advantages that dust is reduced, environmental pollution is low, abrasive and sewage can be separated by the recovery system, resources can be recycled, environmental protection requirements are met, the whole regeneration process is performed in a closed environment, harm of dust to operators is avoided, high-precision requirements of chip manufacturing are further met, and product quality is improved.

Description

Technical Field

[0001] The invention relates to the technical field of precision regeneration methods, and in particular to a precision regeneration method for LAM alumina coating parts of a chip manufacturing etching machine. Background Art

[0002] The precision regeneration method of LAM alumina coated components of chip manufacturing etching tools is a complex and delicate process, which aims to restore the cleanliness and performance of the component surface to ensure the normal operation of the etching tool and the quality of chip manufacturing.

[0003] The current traditional precision regeneration method uses 7448 scouring pad as a polishing tool, dips it in an appropriate amount of pure water or detergent, and repeatedly polishes the surface of the attachment of the aluminum oxide coated parts. Because it is difficult to accurately control the polishing force and uniformity during manual polishing, it is easy to cause over- or under-polishing, resulting in a relatively long operation cycle and low efficiency. Long-term manual polishing operations not only increase labor costs, but may also cause surface damage to components or material waste due to excessive polishing.

[0004] Therefore, in view of the above-mentioned traditional precision regeneration method, 7448 scouring pad is used for repeated polishing to remove the surface of the attachment. Although this process is effective, it has the problems of long operation cycle and low efficiency. A precision regeneration method for LAM alumina coated parts of chip manufacturing etching machine can be designed. Compared with the original manual polishing of the part surface, it saves more operation time; the attachments in the pores of the parts can be cleaned more thoroughly. Summary of the invention

[0005] In order to overcome the traditional precision regeneration method, 7448 scouring pad is used for repeated polishing to remove the surface of the attachment. Although this process is effective, it has the problems of long operation cycle and low efficiency.

[0006] The technical solution of the present invention is: a precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine, the steps of which are as follows:

[0007] SI: Mixed abrasive and water

[0008] S11: Abrasive Preparation

[0009] Add water and glass beads GB220 into a mixing tank, the ratio of water: glass beads GB220 = 1:0.5;

[0010] S12: Hybrid Processing

[0011] The glass beads GB220 and water are evenly mixed by a stirring device to prepare for the subsequent spraying process;

[0012] S2: Place components

[0013] S21: Preparing the Wet Blast Machine

[0014] Gently place the aluminum oxide coated part to be treated into the wet sandblasting machine, with the sprayed part facing upwards;

[0015] S3: Wet sandblasting

[0016] Use 1.5kg / cm 2 The abrasive mixed in step S12 is sprayed at high speed onto the surface of the component through the spray gun at a spray pressure of 10 to 15 cm from the gun head to the component. The gun head is gently shaken during sandblasting to avoid sandblasting at the same position. The continuous sandblasting time at the same position shall not exceed 3 seconds. The dirt and attachments on the surface of the component are removed through the impact and scraping action of the abrasive particles to expose a clean and rough film surface.

[0017] S4: Detection and treatment

[0018] After sandblasting, turn off the machine and take out the parts. Check the sandblasting effect with the naked eye or professional testing instruments to ensure that the surface is clean and free of residual attachments. If there are residual attachments, repeat steps 1 to 4 until the surface is completely regenerated.

[0019] S5: Abrasive and wastewater recovery

[0020] The abrasive and wastewater after blasting are separated through a recovery system. The abrasive can be recycled to reduce costs; the wastewater is treated or discharged to meet environmental protection requirements.

[0021] Preferably, the rotation speed of the stirring device in S12 is between 200-500 rpm, and the stirring time is between 5-10 minutes.

[0022] Preferably, the wet sandblasting machine in S21 includes a spraying system, a spray gun, and a conveying pipeline.

[0023] As a preferred method, the spraying system includes a pressure pump, an air compressor and a pressure regulating valve. The pressure pump has a power of 3-7.5kW, which can generate sufficient pressure to transport the abrasive from the mixing tank to the spray gun; the air compressor provides compressed air for the entire spraying process to ensure that the abrasive can be sprayed out at high speed, and its exhaust volume is 0.6-1.2m 3 / min; the pressure regulating valve is used to accurately control the injection pressure, and the adjustable range is 0.5-2.5kg / cm 2 .

[0024] Preferably, the spray gun is a device that directly sprays abrasives onto the surface of a component, and its structure includes a gun body, a nozzle and a trigger; the gun body is made of aluminum alloy or stainless steel to ensure that it is not easily damaged during long-term use; the nozzle is the core component of the spray gun, and its material is tungsten carbide to resist high-speed erosion of abrasives; the inner diameter of the nozzle is 3-6mm.

[0025] Preferably, the delivery pipe is responsible for delivering the mixed abrasive from the injection system to the spray gun. It is made of rubber or polyurethane and has good flexibility and wear resistance. The inner diameter of the pipe is 10-15mm, which can not only ensure the smooth delivery of the abrasive, but also avoid the problems of poor delivery or excessive pressure loss caused by too large or too small pipe diameter. The length of the pipe is determined according to the overall structure of the wet sandblasting machine and the actual use requirements, and the length ranges from 2-5m.

[0026] Preferably, the professional detection instrument in S4 is a high-power microscope or an electron scanning microscope.

[0027] Preferably, the recovery system in S5 includes a separator and a recovery tank, wherein the separator is used to separate the abrasive and the sewage; and the recovery tank is used to store the separated abrasive and the sewage.

[0028] Beneficial effects of the present invention:

[0029] 1. The precision regeneration method of the present invention can ensure that the surface of the component is evenly and finely treated by precisely controlling the injection pressure, injection distance and injection time of wet sandblasting, and expose a clean and rough film surface while removing dirt and attachments, thereby meeting the requirements of high-precision regeneration. Compared with dry sandblasting, wet sandblasting reduces the generation of dust due to the addition of water, and has little pollution to the environment. At the same time, the recovery system can separate abrasives and sewage to achieve the recycling of resources, which meets environmental protection requirements. During the wet sandblasting process, the presence of water reduces the impact force of the abrasive and reduces the risk of injury to the operator. In addition, the entire regeneration process is carried out in a closed environment, avoiding the harm of dust to the operator. The wet sandblasting machine can quickly and effectively perform surface treatment and improve work efficiency. By precisely controlling the injection parameters and the recovery system, the regeneration cycle can be further shortened and the production cost can be reduced. The precision regeneration method can restore the cleanliness and performance of the component surface, reduce the wear and corrosion caused by dirt and attachments, thereby extending the service life of the component. The surface of the regenerated component is clean and has moderate roughness, which can meet the high-precision requirements of chip manufacturing and improve product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 Shown is a flow chart of the precise regeneration method of the LAM alumina coating components of a chip manufacturing etching machine of the present invention. DETAILED DESCRIPTION

[0031] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0032] See also Figure 1The present invention provides an embodiment: a precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine, the steps of which are as follows:

[0033] SI: Mixed abrasive and water

[0034] S11: Abrasive Preparation

[0035] Add water and glass beads GB220 into a mixing tank, the ratio of water: glass beads GB220 = 1:0.5;

[0036] S12: Hybrid Processing

[0037] The glass beads GB220 and water are evenly mixed by a stirring device to prepare for the subsequent spraying process;

[0038] S2: Place components

[0039] S21: Preparing the Wet Blast Machine

[0040] Gently place the aluminum oxide coated part to be treated into the wet sandblasting machine, with the sprayed part facing upwards;

[0041] S3: Wet sandblasting

[0042] Use 1.5kg / cm 2 The abrasive mixed in step S12 is sprayed at high speed onto the surface of the component through the spray gun at a spray pressure of 10 to 15 cm from the gun head to the component. The gun head is gently shaken during sandblasting to avoid sandblasting at the same position. The continuous sandblasting time at the same position shall not exceed 3 seconds. The dirt and attachments on the surface of the component are removed through the impact and scraping action of the abrasive particles to expose a clean and rough film surface.

[0043] S4: Detection and treatment

[0044] After sandblasting, turn off the machine and take out the parts. Check the sandblasting effect with the naked eye or professional testing instruments to ensure that the surface is clean and free of residual attachments. If there are residual attachments, repeat steps 1 to 4 until the surface is completely regenerated.

[0045] S5: Abrasive and wastewater recovery

[0046] The abrasive and wastewater after blasting are separated through a recovery system. The abrasive can be recycled to reduce costs; the wastewater is treated or discharged to meet environmental protection requirements.

[0047] Example 1

[0048] When using the process of this technical solution, the steps are as follows:

[0049] SI: Mixed abrasive and water

[0050] S11: Abrasive Preparation

[0051] Add water and glass beads GB220 into a mixing tank, the ratio of water: glass beads GB220 = 1:0.5;

[0052] S12: Hybrid Processing

[0053] The glass beads GB220 and water are uniformly mixed by a stirring device to prepare for the subsequent spraying treatment. The speed of the stirring device is 200 rpm and the stirring time is 5 minutes;

[0054] S2: Place components

[0055] S21: Preparing the Wet Blast Machine

[0056] Gently place the aluminum oxide coated parts to be treated into the wet sandblasting machine, with the sprayed part facing upwards. The wet sandblasting machine includes a spraying system, a spray gun, and a delivery pipeline. The spraying system includes a pressure pump, an air compressor, and a pressure regulating valve. The pressure pump has a power of 3kW and can generate enough pressure to transport the abrasive from the mixing tank to the spray gun; the air compressor provides compressed air for the entire spraying process to ensure that the abrasive can be sprayed out at high speed. Its exhaust volume is 0.6m 3 / min; the pressure regulating valve is used to accurately control the injection pressure, and the adjustable range is 0.5-2.5kg / cm 2 The spray gun is a device that directly sprays abrasives onto the surface of a component. Its structure includes a gun body, a nozzle and a trigger. The gun body is made of aluminum alloy or stainless steel to ensure that it is not easily damaged during long-term use. The nozzle is the core component of the spray gun, and its material is tungsten carbide, which can resist the high-speed erosion of abrasives. The inner diameter of the nozzle is 3mm. The conveying pipe is responsible for conveying the mixed abrasive from the injection system to the spray gun. It is made of rubber or polyurethane and has good flexibility and wear resistance. The inner diameter of the pipe is 10mm, which can not only ensure the smooth conveying of abrasives, but also avoid the problems of poor conveying or excessive pressure loss caused by too large or too small pipe diameter. The length of the pipe is determined according to the overall structure of the wet sandblasting machine and the actual use requirements, and the length range is between 2-5m.

[0057] S3: Wet sandblasting

[0058] Use 1.5kg / cm 2 The abrasive mixed in step S12 is sprayed at high speed onto the surface of the component through the spray gun at a spray pressure of 10 to 15 cm from the gun head to the component. The gun head is gently shaken during sandblasting to avoid sandblasting at the same position. The continuous sandblasting time at the same position shall not exceed 3 seconds. The dirt and attachments on the surface of the component are removed through the impact and scraping action of the abrasive particles to expose a clean and rough film surface.

[0059] S4: Detection and treatment

[0060] After sandblasting, turn off the machine and take out the parts. Check the sandblasting effect with the naked eye or professional testing instruments to ensure that the surface is clean and free of residual attachments. If there are residual attachments, repeat steps one to four until the surface is completely regenerated. Professional testing instruments specifically use high-power microscopes or electron scanning microscopes;

[0061] S5: Abrasive and wastewater recovery

[0062] The abrasive and sewage after spraying are separated through the recovery system. The abrasive can be recycled to reduce costs; the sewage is treated or discharged in accordance with environmental protection requirements. The recovery system includes a separator and a recovery tank. The separator is used to separate the abrasive and sewage; the recovery tank is used to store the separated abrasive and sewage.

[0063] Example 2

[0064] When using the process of this technical solution, the steps are as follows:

[0065] SI: Mixed abrasive and water

[0066] S11: Abrasive Preparation

[0067] Add water and glass beads GB220 into a mixing tank, the ratio of water: glass beads GB220 = 1:0.5;

[0068] S12: Hybrid Processing

[0069] The glass beads GB220 and water are uniformly mixed by a stirring device to prepare for the subsequent spraying treatment. The speed of the stirring device is 500 rpm and the stirring time is 10 minutes;

[0070] S2: Place components

[0071] S21: Preparing the Wet Blast Machine

[0072] Gently place the aluminum oxide coated parts to be treated into the wet sandblasting machine, with the sprayed part facing upwards. The wet sandblasting machine includes a spraying system, a spray gun, and a delivery pipeline. The spraying system includes a pressure pump, an air compressor, and a pressure regulating valve. The pressure pump has a power of 7.5kW and can generate enough pressure to transport the abrasive from the mixing tank to the spray gun; the air compressor provides compressed air for the entire spraying process to ensure that the abrasive can be sprayed out at high speed. Its exhaust volume is 1.2m 3 / min; the pressure regulating valve is used to accurately control the injection pressure, and the adjustable range is 0.5-2.5kg / cm 2The spray gun is a device that directly sprays abrasives onto the surface of a component. Its structure includes a gun body, a nozzle and a trigger. The gun body is made of aluminum alloy or stainless steel to ensure that it is not easily damaged during long-term use. The nozzle is the core component of the spray gun, and its material is tungsten carbide, which can resist the high-speed erosion of abrasives. The inner diameter of the nozzle is 6mm. The conveying pipe is responsible for conveying the mixed abrasive from the injection system to the spray gun. It is made of rubber or polyurethane and has good flexibility and wear resistance. The inner diameter of the pipe is 15mm, which can not only ensure the smooth conveying of abrasives, but also avoid the problems of poor conveying or excessive pressure loss caused by too large or too small pipe diameter. The length of the pipe is determined according to the overall structure of the wet sandblasting machine and the actual use requirements, and the length range is between 2-5m.

[0073] S3: Wet sandblasting

[0074] Use 1.5kg / cm 2 The abrasive mixed in step S12 is sprayed at high speed onto the surface of the component through the spray gun at a spray pressure of 10 to 15 cm from the gun head to the component. The gun head is gently shaken during sandblasting to avoid sandblasting at the same position. The continuous sandblasting time at the same position shall not exceed 3 seconds. The dirt and attachments on the surface of the component are removed through the impact and scraping action of the abrasive particles to expose a clean and rough film surface.

[0075] S4: Detection and treatment

[0076] After sandblasting, turn off the machine and take out the parts. Check the sandblasting effect with the naked eye or professional testing instruments to ensure that the surface is clean and free of residual attachments. If there are residual attachments, repeat steps one to four until the surface is completely regenerated. Professional testing instruments specifically use high-power microscopes or electron scanning microscopes;

[0077] S5: Abrasive and wastewater recovery

[0078] The abrasive and sewage after spraying are separated through the recovery system. The abrasive can be recycled to reduce costs; the sewage is treated or discharged in accordance with environmental protection requirements. The recovery system includes a separator and a recovery tank. The separator is used to separate the abrasive and sewage; the recovery tank is used to store the separated abrasive and sewage.

[0079] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the spirit of the present invention.

Claims

1. A precise regeneration method for LAM alumina coating parts of chip manufacturing etching machine, characterized in that: The steps are as follows: SI: Mixed abrasive and water S11: Abrasive Preparation Add water and glass beads GB220 into a mixing tank, the ratio of water: glass beads GB220 = 1:0.5; S12: Hybrid Processing The glass beads GB220 and water are evenly mixed by a stirring device to prepare for the subsequent spraying process; S2: Place components S21: Preparing the Wet Blast Machine Gently place the aluminum oxide coated part to be treated into the wet sandblasting machine, with the sprayed part facing upwards; S3: Wet sandblasting Use 1.5kg / cm 2 The abrasive mixed in step S12 is sprayed at high speed onto the surface of the component through the spray gun at a spray pressure of 10 to 15 cm from the gun head to the component. The gun head is gently shaken during sandblasting to avoid sandblasting at the same position. The continuous sandblasting time at the same position shall not exceed 3 seconds. The dirt and attachments on the surface of the component are removed through the impact and scraping action of the abrasive particles to expose a clean and rough film surface. S4: Detection and processing After sandblasting, turn off the machine and take out the parts. Check the sandblasting effect with the naked eye or professional testing instruments to ensure that the surface is clean and free of residual attachments. If there are residual attachments, repeat steps 1 to 4 until the surface is completely regenerated. S5: Abrasive and wastewater recovery The abrasive and wastewater after blasting are separated through a recovery system. The abrasive can be recycled to reduce costs; the wastewater is treated or discharged to meet environmental protection requirements.

2. The precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine according to claim 1, characterized in that: The rotation speed of the stirring device in S12 is between 200 and 500 rpm, and the stirring time is between 5 and 10 minutes.

3. The precise regeneration method of the LAM alumina coating components of the chip manufacturing etching machine according to claim 1, characterized in that: The wet sandblasting machine in S21 includes a blasting system, a blasting gun, and a conveying pipeline.

4. The precise regeneration method of the LAM alumina coating components of the chip manufacturing etching machine according to claim 3, characterized in that: The spraying system includes a pressure pump, an air compressor and a pressure regulating valve. The pressure pump has a power of 3-7.5kW and can generate enough pressure to transport the abrasive from the mixing tank to the spray gun. The air compressor provides compressed air for the entire spraying process to ensure that the abrasive can be sprayed out at high speed. Its exhaust volume is 0.6-1.2m 3 / min; the pressure regulating valve is used to accurately control the injection pressure, and the adjustable range is 0.5-2.5kg / cm 2 .

5. The precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine according to claim 3, characterized in that: A spray gun is a device that sprays abrasives directly onto the surface of a component. Its structure includes a gun body, a nozzle, and a trigger. The gun body is made of aluminum alloy or stainless steel to ensure that it is not easily damaged during long-term use. The nozzle is the core component of the spray gun, and its material is tungsten carbide to resist high-speed erosion of abrasives. The inner diameter of the nozzle is 3-6mm.

6. The precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine according to claim 3, characterized in that: The conveying pipe is responsible for conveying the mixed abrasive from the injection system to the spray gun. It is made of rubber or polyurethane and has good flexibility and wear resistance. The inner diameter of the pipe is 10-15mm, which can not only ensure the smooth conveying of the abrasive, but also avoid the problems of poor conveying or excessive pressure loss caused by too large or too small pipe diameter. The length of the pipe is determined according to the overall structure of the wet sandblasting machine and the actual use requirements, and the length ranges from 2-5m.

7. The precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine according to claim 1, characterized in that: The professional testing instrument in S4 specifically adopts a high-power microscope or an electron scanning microscope.

8. The precise regeneration method for LAM alumina coating components of a chip manufacturing etching machine according to claim 1, characterized in that: The recovery system in S5 includes a separator and a recovery tank. The separator is used to separate the abrasive and the sewage; the recovery tank is used to store the separated abrasive and the sewage.

Images