Tray assembly and basket device for wet processing of metal diaphragms

Abstract

The invention relates to the technical field of metal diaphragm manufacturing processes, in particular to a tray assembly and a basket device for wet processing of a metal diaphragm. The material disc assembly comprises a first material disc and a second material disc, and the two material discs are the same in structure and are arranged in a mirror symmetry mode. The two material discs are respectively provided with a process round hole used for clamping a metal diaphragm, and the two material discs are connected through a positioning pin, a fixing pin and a spacing pin. The basket device comprises a basket frame assembly, a fixing assembly and the tray assembly. The basket frame assembly is used for being connected with external equipment and can bear at least one material disc assembly. The fixing assembly is arranged on the lifting basket frame assembly and can fix the material disc assembly to the lifting basket frame assembly. According to the method, the problem of process surface shielding in the wet machining process of the metal diaphragm is solved to a certain extent, meanwhile, the requirements for multi-workpiece treatment and compatibility are met, it is ensured that the metal diaphragm is firmly placed, the difficulty of operators is greatly lowered, and the production efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of metal diaphragm manufacturing process, and in particular to a tray assembly and a basket device for wet processing of metal diaphragms. Background Art

[0002] In the process of metal diaphragm processing and manufacturing, the diaphragm products to be processed need to be fixed so that they can be prepared with the movement of the robot. The simultaneous processing of multiple workpiece diaphragms and the design compatibility with existing wafers have greatly increased the difficulty and complexity of the relevant basket device design. At the same time, the process surface of the workpiece diaphragm generally needs to be unobstructed and cannot be interfered with by the fixture. Because wet processing requires multiple process flows, the fixation stability of the workpiece diaphragm is required to be high, and self-rotation or shaking cannot occur.

[0003] In the prior art, a clamp is often used to clamp the edge of the process surface so that the product is combined with the fixing clamp, or a tape is used to stick the process surface of the product for subsequent operations, which has the problems of blocking the process surface and poor fixing stability. Summary of the invention

[0004] The present application provides a tray assembly and a basket device for wet processing of metal diaphragms, which can solve the problem of process surface obstruction to a certain extent, while meeting the requirements of multi-workpiece processing and compatibility, and ensuring that the workpiece diaphragm is firmly placed in place.

[0005] In a first aspect, the present application provides a tray assembly for wet processing of a metal diaphragm, comprising a first tray and a second tray;

[0006] The first material tray and the second material tray have the same structure and are arranged in a mirror-symmetrical manner;

[0007] The first material tray and the second material tray are respectively provided with a plurality of process circular holes arranged in an array and corresponding to each other for clamping the metal diaphragm;

[0008] At least two corresponding positioning pin holes are respectively arranged on the first material tray and the second material tray, and the first material tray and the second material tray are connected by inserting positioning pins; a plurality of corresponding fixing pin holes are arranged at intervals on the edges of the first material tray and the second material tray, and the first material tray and the second material tray are connected by a plurality of fixing pins; a spacing pin hole is also arranged on at least one of the first material tray and the second material tray, and the first material tray and the second material tray are spaced apart by inserting a spacing pin.

[0009] In a preferred embodiment, the outer side of the process circular hole is provided with a chamfer.

[0010] In a preferred embodiment, the metal diaphragm is cylindrical as a whole, with one end closed and the other end open, and the open section of the metal diaphragm is bent outward to form a blocking end; the outer diameter of the cylindrical part is smaller than the aperture of the process circular hole, and the outer diameter of the blocking end is larger than the aperture of the process circular hole, so that the metal diaphragm can pass through the process circular hole and be clamped between the first material tray and the second material tray.

[0011] In a preferred embodiment, the spacing pin includes a pin body and a pin head, the pin body can be inserted into the spacing pin hole, and the pin head is a flat structure with a certain thickness, which can separate the first material tray and the second material tray.

[0012] In a second aspect, the present application provides a basket lifting device, including a basket lifting frame assembly, a fixing assembly and the material tray assembly;

[0013] The basket frame assembly is used to connect with external equipment and can carry at least one of the tray assemblies;

[0014] The fixing assembly is arranged on the basket frame assembly and can fix the material tray assembly on the basket frame assembly.

[0015] In a preferred embodiment, the basket frame assembly includes a basket hanging plate, a connecting plate, a basket support rod and a basket baffle;

[0016] One side of the upper end of the connecting plate is vertically fixedly connected to the basket hanging plate, and the basket hanging plate is provided with a hanging portion connected to an external device;

[0017] At least two of the basket support rods vertically pass through the lower end of the connecting plate, and both ends of the basket support rods are respectively connected to a basket baffle, so that a space for carrying the tray assembly is formed between the basket support rods, the connecting plate and the basket baffle.

[0018] In a preferred embodiment, a long hole is provided along the longitudinal direction of the connecting plate, and a reinforcing rod is inserted into the long hole.

[0019] In a preferred embodiment, the reinforcing rod is made of 304 stainless steel or 316L stainless steel.

[0020] In a preferred embodiment, the fixing assembly includes a tray fixing block, a fixing block rotating shaft and a fixing block stop shaft;

[0021] The fixed block shaft is passed through the middle of the connecting plate, and the tray fixing block is rotatably connected to the fixed block shaft; the fixed block stop shaft is passed through the connecting plate and is located at one side of the tray fixing block.

[0022] In a preferred embodiment, a fastening screw is further provided on the side of the connecting plate for locking the rotating shaft of the fixing block.

[0023] In a preferred embodiment, the basket frame assembly, the fixing assembly and the tray assembly are all made of high-performance engineering plastics or rubber materials.

[0024] This application has the following beneficial effects:

[0025] This application solves the problem of process surface obstruction during the wet processing of metal diaphragms to a certain extent, while meeting the requirements of multi-workpiece processing and compatibility, ensuring that the metal diaphragm is firmly placed in place, greatly reducing the difficulty for operators and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 is an axonometric schematic diagram of a material tray assembly provided in an embodiment of the present application;

[0028] Figure 2 is a front view of a tray assembly provided in an embodiment of the present application;

[0029] Figure 3 is a side view of a tray assembly provided in an embodiment of the present application;

[0030] Figure 4 is a front view of a first material tray provided in an embodiment of the present application;

[0031] Figure 5 is a side longitudinal sectional view of the first material tray provided in an embodiment of the present application when a workpiece diaphragm, a fixing pin, a spacing pin and a positioning pin are installed;

[0032] Figure 6 It is an axonometric schematic diagram of a workpiece diaphragm applicable to the material tray assembly provided in the embodiment of the present application;

[0033] Figure 7 for Figure 6 Longitudinal cross-sectional view of the workpiece diaphragm;

[0034] Figure 8 An axonometric diagram of a basket carrying device provided in an embodiment of the present application;

[0035] Fig. 9 A side view schematic diagram of a basket carrying device provided in an embodiment of the present application;

[0036] Fig.10 A front view schematic diagram of a basket carrying device provided in an embodiment of the present application;

[0037] Fig.11 A schematic diagram of the structure of the basket hanging plate and the connecting plate provided in the embodiment of the present application;

[0038] Numbers in the figure:

[0039] 1-first material tray; 103-process round hole; 104-spacer pin hole; 105-fixing pin hole; 106-positioning pin hole;

[0040] 2-second tray; 3-metal diaphragm; 4-spacer pin; 5-fixing pin; 6-positioning pin; 7-basket hanging plate; 8-connecting plate; 9-basket support rod; 10-basket baffle; 11-tray fixing block; 12-fixing block rotating shaft; 13-fixing block stop shaft; 14-reinforcement rod; 15-long hole; 16-fastening screw. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention generally described and marked in the drawings can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0044] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0045] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0046] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0048] like Figures 1 to 5 As shown, the material tray assembly provided in this embodiment includes a first material tray 1 and a second material tray 2;

[0049] The first material tray 1 and the second material tray 2 have the same structure and are arranged in a mirror-symmetrical manner.

[0050] A plurality of process circular holes 103 arranged in an array for clamping the metal diaphragm 3 are provided on the first material tray 1 and the second material tray 2 ; the outer sides of the process circular holes 103 are chamfered to ensure that the metal diaphragm 3 can be processed evenly.

[0051] The upper and lower ends of the first material tray 1 and the second material tray 2 are respectively arranged as parallel cross-sections for easy positioning, and a corresponding positioning pin hole 106 is respectively arranged at the center position of the upper and lower ends of the first material tray 1 and the second material tray 2, and the positioning pin 6 is inserted to connect and align the first material tray 1 and the second material tray 2; a plurality of corresponding fixing pin holes 105 are arranged at intervals on the edges of the first material tray 1 and the second material tray 2, and the first material tray 1 and the second material tray 2 are connected by a plurality of fixing pins 5; the first material tray 1 and the second material tray 2 can be aligned and clamped by the fixing pin 5 and the positioning pin 6.

[0052] At least one of the first tray 1 and the second tray 2 is also provided with a spacing pin hole 104, and the first tray 1 and the second tray 2 are spaced apart by inserting a spacing pin 4, so as to ensure a stable gap and good parallelism between the first tray 1 and the second tray 2.

[0053] The outer side of the process circular hole is provided with a chamfer to ensure that the metal diaphragm 3 can be processed evenly.

[0054] The overall structure of the first material tray 1 and the second material tray 2 is made of non-metallic materials to avoid interference from metal sensitivity, and high-performance engineering plastics or rubber materials are preferably used, such as PEEK (polyetheretherketone), PI (polyimide), PPS (polyphenylene sulfide) and fluororubber.

[0055] The metal diaphragm 3 is used as a sensor wafer and is made of 1Cr18Ni9Ti. Figure 6 and Figure 7 As shown, the metal diaphragm 3 is cylindrical as a whole, with one end closed and the other end open, and the open section of the metal diaphragm 3 is bent outward to form a blocking end.

[0056] The overall height L of the metal diaphragm 3 is not greater than 5 mm, the outer diameter d1 of the cylindrical portion is 0.5 mm to 1 mm smaller than the aperture of the process circular hole 103, and the outer diameter D of the blocking end is 0.5 mm to 1 mm larger than the aperture of the process circular hole 103, so that the metal diaphragm 3 can pass through the process circular hole 103 and be clamped between the first material tray 1 and the second material tray 2. The inner diameter d2 of the cylindrical portion can be set according to design requirements.

[0057] The spacing pin 4 includes a pin body and a pin head, and the pin body can be inserted into the spacing pin hole 104. The pin head is a flat cylindrical structure with a thickness of 1.5mm to 2mm, and its diameter is 1mm to 2mm larger than the aperture of the spacing pin hole 104, and can separate the first material tray 1 from the second material tray 2.

[0058] like Figures 8 to 11 As shown, this embodiment also provides a basket lifting device, including a basket lifting frame assembly, a fixing assembly and the material tray assembly.

[0059] Specifically, the basket frame assembly includes a basket hanging plate 7, a connecting plate 8, a basket support rod 9 and a basket baffle 10;

[0060] One side of the upper end of the connecting plate 8 is vertically fixedly connected to the basket hanging plate 7, and the basket hanging plate 7 is provided with a hanging part connected to an external device, such as a screw, a hook, a clamp and the like.

[0061] At least two basket support rods 9 vertically pass through the lower end of the connecting plate 8, and the two ends of the basket support rods 9 are respectively connected to a basket baffle 10, so that a space for carrying the material tray assembly is formed between the basket support rods 9, the connecting plate 8 and the basket baffle 10, and the material tray assembly can be tilted and placed between the connecting plate 8 and the basket baffle 10.

[0062] Long holes 16 are provided along the longitudinal direction of the connecting plate 8, and reinforcing rods 14 are inserted into the long holes 15. The reinforcing rods 14 are 304 stainless steel or 316L stainless steel, and are inserted into the long holes 15 of the connecting plate 8 to ensure the strength of the basket frame assembly.

[0063] The fixing assembly includes a tray fixing block 11, a fixing block rotating shaft 12 and a fixing block stop shaft 13; the fixing block rotating shaft 12 is passed through the middle of the connecting plate 8, and the tray fixing block 11 is rotatably connected to the fixing block rotating shaft 12; the fixing block stop shaft 13 is passed through the connecting plate 8 and is located on one side of the tray fixing block 11.

[0064] The tray fixing block 11 is fan-shaped and can press the upper end of the tray assembly onto the connecting plate 8 to prevent it from turning outward, thereby avoiding problems such as rotation and shaking of the tray assembly during the process.

[0065] The fixed block stop shaft 13 can limit the rotation range of the tray fixed block 11.

[0066] A fastening screw 16 is also provided on the side of the connecting plate 8 for locking the fixing block shaft 12 to prevent it from rotating or loosening.

[0067] The basket frame assembly, the fixing assembly and the tray assembly are all made of high-performance engineering plastics or rubber materials.

[0068] The basket hanging plate 7, connecting plate 8, basket supporting rod 9, basket baffle 10, tray fixing block 11, fixing block rotating shaft 12 and fixing block stop shaft 13 are all made of non-metallic materials to avoid interference from metal sensitivity. High-performance engineering plastics or rubber materials are preferred, such as PEEK (polyetheretherketone), PI (polyimide), PPS (polyphenylene sulfide) and fluororubber.

[0069] In this embodiment, the metal diaphragm 3 is made of 1Cr18Ni9Ti, the outer diameter D of the blocking end is 9.5mm, and the outer diameter d1 of the cylindrical part is 8mm. Multiple metal diaphragms 3 are installed on the first tray 1 manually or by an external automatic device, and the positions of the first tray 1 and the second tray 2 are aligned by the positioning pin 6, and the fixing pin 5 is locked; the fixed tray assembly is placed tangentially on the basket support rod 9, one side is close to the connecting plate 8, and the tray fixing block 11 is rotated so that the tray fixing block 11 completely locks the tray assembly. The entire basket device is connected to an external manipulator, and subsequent wet etching, development, degumming and other processes are carried out through an electronic control system.

[0070] In another embodiment, the tray assembly can be replaced with a standard 6-inch wafer, which is fixed on the basket frame assembly after clamping and installation, and subsequent wet etching, development, degumming and other processes can be performed.

[0071] This embodiment utilizes the metal ductility of the diaphragm workpiece and improves it into a circular diaphragm with a rib for easy positioning. At the same time, a tray assembly is used to initially fix it, and spacing pins and positioning pins are added to ensure the clamping gap and stability. The two tray assemblies can be processed simultaneously to achieve large-scale workpiece processing, which can greatly increase production efficiency and ensure the stability of the finished workpiece. At the same time, the basket assembly is compatible with standard 6-inch wafer fixing, which can achieve more process options and multi-type product production.

[0072] This application solves the problem of process surface obstruction during the wet processing of metal diaphragms to a certain extent, while meeting the requirements of multi-workpiece processing and compatibility, ensuring that the metal diaphragm is firmly placed in place, greatly reducing the difficulty for operators and improving production efficiency.

[0073] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A tray assembly for wet processing of metal diaphragms, characterized in that: comprising a first material tray and a second material tray; The first material tray and the second material tray have the same structure and are arranged in a mirror-symmetrical manner; The first material tray and the second material tray are respectively provided with a plurality of process circular holes arranged in an array and corresponding to each other for clamping the metal diaphragm; At least two corresponding positioning pin holes are respectively arranged on the first material tray and the second material tray, and the first material tray and the second material tray are connected by inserting positioning pins; a plurality of corresponding fixing pin holes are arranged at intervals on the edges of the first material tray and the second material tray, and the first material tray and the second material tray are connected by a plurality of fixing pins; a spacing pin hole is also arranged on at least one of the first material tray and the second material tray, and the first material tray and the second material tray are spaced apart by inserting a spacing pin.

2. The tray assembly according to claim 1, characterized in that: The outer side of the process circular hole is provided with a chamfer.

3. The tray assembly according to claim 2, characterized in that: The metal diaphragm is cylindrical as a whole, with one end closed and the other end open, and the open section of the metal diaphragm is bent outward to form a blocking end; the outer diameter of the cylindrical part is smaller than the aperture of the process circular hole, and the outer diameter of the blocking end is larger than the aperture of the process circular hole, so that the metal diaphragm can pass through the process circular hole and be clamped between the first material tray and the second material tray.

4. The tray assembly according to claim 1, characterized in that: The spacing pin includes a pin body and a pin head, the pin body can be inserted into the spacing pin hole, and the pin head is a flat structure with a certain thickness, which can separate the first material tray and the second material tray.

5. A basket carrying device, characterized in that: It comprises a basket frame assembly, a fixing assembly and a tray assembly according to any one of claims 1 to 4; The basket frame assembly is used to connect with external equipment and can carry at least one of the tray assemblies; The fixing assembly is arranged on the basket frame assembly and can fix the material tray assembly on the basket frame assembly.

6. The basket carrying device according to claim 5, characterized in that: The basket frame assembly includes a basket hanging plate, a connecting plate, a basket support rod and a basket baffle; One side of the upper end of the connecting plate is vertically fixedly connected to the basket hanging plate, and the basket hanging plate is provided with a hanging portion connected to an external device; At least two of the basket support rods vertically pass through the lower end of the connecting plate, and both ends of the basket support rods are respectively connected to a basket baffle, so that a space for carrying the tray assembly is formed between the basket support rods, the connecting plate and the basket baffle.

7. The basket carrying device according to claim 6, characterized in that: Long holes are arranged along the longitudinal direction of the connecting plate, and reinforcing rods are inserted into the long holes.

8. The basket carrying device according to claim 6, characterized in that: The fixing assembly comprises a material tray fixing block, a fixing block rotating shaft and a fixing block stop shaft; The fixed block shaft is passed through the middle of the connecting plate, and the tray fixing block is rotatably connected to the fixed block shaft; the fixed block stop shaft is passed through the connecting plate and is located at one side of the tray fixing block.

9. The basket carrying device according to claim 8, characterized in that: A fastening screw is also provided on the side of the connecting plate for locking the rotating shaft of the fixing block.

10. The basket carrying device according to claim 5, characterized in that: The basket frame assembly, the fixing assembly and the tray assembly are all made of high-performance engineering plastics or rubber materials.

Images