Device for heat treatment of multiple superconducting films

Abstract

The invention relates to the technical field of heat treatment devices, and discloses a device for heat treatment of multiple superconducting thin films, the device comprises a furnace body, an air inlet circulation mechanism is arranged outside the furnace body, the air inlet circulation mechanism is used for inflating the interior of the furnace body and can make air circulate, an air inlet heating mechanism is arranged at the bottom of the furnace body, and the air inlet heating mechanism is used for heating the superconducting thin films. An air inlet heating mechanism is arranged at the bottom end of the furnace body and used for heating gas, a uniform heating mechanism is arranged in the middle of the bottom end of the furnace body and used for achieving uniformity of the gas in the furnace body, a furnace cover is arranged at the top of the furnace body and used for sealing the furnace body, and an air pressure stabilizing mechanism is fixedly connected to the top of the furnace cover. Through the cooperation of the air inlet circulating mechanism and the uniform heating mechanism, the placement frame can rotate in the furnace body, and meanwhile, hot air can circularly flow in the furnace body, so that the heat treatment uniformity of the multiple superconducting thin films can be improved, and the heat treatment effect of the multiple superconducting thin films can be improved.

Description

Technical Field

[0001] The invention relates to the technical field of heat treatment devices, in particular to a device for heat treatment of multiple superconducting films. Background Art

[0002] Multi-sheet superconducting thin film refers to a structure composed of multiple superconducting thin films, which is usually used in the research and application of superconducting materials. Superconducting thin film refers to superconducting materials with a thickness of less than one micron deposited by evaporation, spraying and other methods. In addition to the geometric size difference between superconducting thin films and bulk superconductors, their structure and superconducting properties are also quite different.

[0003] When multiple superconducting films are produced, a heat treatment device is required for heat treatment. However, the structure of the multiple superconducting films placed inside the heat treatment device in the prior art is generally not able to rotate, which may easily lead to the multiple superconducting films not being heated evenly during the heat treatment, thereby reducing the heat treatment effect of the multiple superconducting films. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a device for heat treatment of multiple superconducting films, which solves the problem that the structure of the heat treatment device for multiple superconducting films in the prior art for placing the multiple superconducting films cannot be rotated, resulting in reduced heat treatment effect of the multiple superconducting films.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a device for heat treatment of multiple superconducting films, comprising a furnace body, an air intake circulation mechanism is arranged on the outside of the furnace body, the air intake circulation mechanism is used to inflate the interior of the furnace body and enable the gas to circulate, an air intake heating mechanism is arranged at the bottom of the furnace body, the air intake heating mechanism is used to heat the gas, a heating uniformity mechanism is arranged at the middle of the bottom end of the furnace body, the heating uniformity mechanism is used to achieve uniform gas inside the furnace body, a furnace cover is arranged on the top of the furnace body, the furnace cover is used to seal the furnace body, an air pressure stabilizing mechanism is fixedly connected to the top of the furnace cover, the air pressure stabilizing mechanism is used to prevent the internal air pressure of the furnace body from being too high, a top cover fixing mechanism is arranged on the outside of the furnace cover, the top cover fixing mechanism is used to connect the furnace cover and the furnace body, a placement frame is rotatably connected to the bottom of the furnace cover, the placement frame is used to place multiple superconducting thermal films, and a rotating door is rotatably connected to the outside of the placement frame.

[0006] Preferably, the air intake circulation mechanism includes a high-pressure blower and a mounting box, the outside of the high-pressure blower is fixedly connected to the outside of the furnace body, the input end of the high-pressure blower is fixedly connected to a three-way pipe, both ends of the top of the three-way pipe are fixedly connected to solenoid valves, one of the solenoid valves is fixedly connected to a circulating air duct on a side away from the three-way pipe, and the other solenoid valve is fixedly connected to an air intake pipe on a side away from the three-way pipe, a plurality of air filter plates are fixedly connected to the inside of the mounting box, and connecting mounting pipes are fixedly connected to the upper and lower sides of the mounting box, and the bottom of the connecting mounting pipe on the lower side is threadedly connected to the bottom of the air intake pipe.

[0007] Preferably, the air inlet heating mechanism includes an air outlet pipe, one end of the air outlet pipe is fixedly connected to the output end of the high-pressure blower, the other end of the air outlet pipe is externally fixedly connected to a fixed disk, the fixed disk is fixedly connected to a clamping spring on the side away from the high-pressure blower, the clamping spring is fixedly connected to a movable disk on the side away from the fixed disk, the middle of the movable disk is fixedly connected to an inner tube, the side of the inner tube close to the high-pressure blower is fixedly connected to a limiting ring, the bottom end of the furnace body is fixedly connected to a hollow cylinder, the interior of the hollow cylinder is fixedly connected to an electric heating wire, and an air inlet connecting pipe is provided on the side of the hollow cylinder away from the movable disk.

[0008] Preferably, the uniform heating mechanism includes a mounting tank, the top of which is fixedly connected to the middle of the bottom end of the furnace body, the inside of the mounting tank is rotatably connected to an impeller, the top of the impeller is fixedly connected to a connecting rotating shaft, the outside of the mounting tank is fixedly connected to a connecting bent rod, the top of the connecting bent rod is fixedly connected to a ventilation ring, the outside of the ventilation ring is fixedly connected to a ventilation connecting pipe, the top of the ventilation connecting pipe is fixedly connected to a ventilation upper ring, the ventilation upper ring and the outside of the ventilation ring are both fixedly connected to a plurality of nozzles, the bottom of the placement frame is fixedly connected to a connecting block, and the connecting rotating shaft engages with the connecting block.

[0009] Preferably, the air pressure stabilizing mechanism includes an outer tube, the bottom of the outer tube is fixedly connected to the top of the furnace cover, a plurality of air leakage holes are opened at the top of the outer wall of the outer tube, the inner sliding tube is slidingly connected to the inside of the outer tube, a plurality of exhaust holes are opened at the bottom end of the outer wall of the inner sliding tube, the top of the internal sliding tube is fixedly connected to a top plate, the outer bottom end of the outer tube is fixedly connected to a fixed mounting ring, and a tension spring is fixedly connected between the top plate and the fixed mounting ring.

[0010] Preferably, the top cover fixing mechanism includes two upper bent rods, the tops of the two upper bent rods are fixedly connected to the outside of the furnace cover, the outside of the upper bent rods is fixedly connected to a mounting plate, one side of the mounting plate is rotatably connected to a wrench, both sides of the wrench are provided with sliding grooves, the outside of the upper bent rods is slidably connected to a sliding sleeve, both ends of the outside of the sliding sleeve are fixedly connected to fixing columns, the outside of the fixing column is arranged inside the sliding groove, a pushing spring is fixedly connected between the mounting plate and the sliding sleeve, lower bent rods are fixedly connected to both sides of the top of the furnace body, the end of the lower bent rod away from the furnace body is fixedly connected to a clamping head 1, and the end of the upper bent rod away from the furnace cover is fixedly connected to a clamping head 2, and the clamping head 2 is engaged with the clamping head 1.

[0011] Preferably, the side of the air inlet connecting pipe away from the hollow cylinder is fixedly connected to the outside of the mounting tank, and both ends of the hollow cylinder are fixedly connected with sealing gaskets.

[0012] Preferably, the bottom of the ventilation ring is fixedly connected to the inner bottom end of the furnace body, and the top of the ventilation upper ring is fixedly connected to the inner bottom end of the furnace body.

[0013] Preferably, the inner side of the retaining spring is sleeved on the outside of the air outlet pipe, and the limiting ring is slidably connected to the inside of the air outlet pipe.

[0014] Preferably, the push spring is sleeved on the outside of the upper bending rod, and the outside of the wrench is sleeved with a rubber sleeve.

[0015] The present invention provides a device for heat treatment of multiple superconducting films. It has the following beneficial effects:

[0016] 1. The present invention can realize the rotation of the placement frame inside the furnace body through the cooperation of the air circulation mechanism and the heating uniformity mechanism, and at the same time, the hot air can circulate inside the furnace body, thereby improving the uniformity of the heat treatment of multiple superconducting films, and thus improving the effect of the heat treatment of multiple superconducting films.

[0017] 2. The present invention can realize the rotation of the placement frame and the hot air circulation inside the furnace body through a high-pressure blower, reduce the use of power units, reduce the cost of multiple superconducting film heat treatment devices, and can quickly replace the air inlet heating mechanism, thereby improving the maintenance efficiency of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A perspective view of the present invention;

[0019] Figure 2 The three-dimensional Figure 2 ;

[0020] Figure 3It is a structural schematic diagram of the ventilation ring in the present invention;

[0021] Figure 4 It is a structural schematic diagram of the impeller in the present invention;

[0022] Figure 5 It is a structural schematic diagram of the air filter plate in the present invention;

[0023] Figure 6 It is a structural schematic diagram of the hollow cylinder in the present invention;

[0024] Figure 7 It is a schematic diagram of the structure of the inner tube in the present invention;

[0025] Figure 8 It is a schematic diagram of the structure of the internal sliding tube in the present invention;

[0026] Fig. 9 It is a structural schematic diagram of the wrench in the present invention;

[0027] Fig.10 It is a structural schematic diagram of the second clamp in the present invention;

[0028] Fig.11 It is a structural schematic diagram of the clamp head 1 in the present invention;

[0029] Fig.12 It is a structural schematic diagram of the connecting block in the present invention.

[0030] Among them, 1. furnace body; 2. air inlet circulation mechanism; 201. high pressure blower; 202. three-way pipe; 203. solenoid valve; 204. circulating air duct; 205. air inlet pipe; 206. installation box; 207. air filter plate; 208. connecting installation pipe; 3. air inlet heating mechanism; 301. air outlet pipe; 302. fixed plate; 303. tightening spring; 304. moving plate; 305. inner pipe; 306. limiting ring; 307. air inlet connecting pipe; 308. hollow cylinder; 309. electric heating wire; 4. heating uniform mechanism; 401. installation tank; 402. impeller; 403. connecting rotating shaft; 404. connecting bending rod; 405, ventilation ring; 406, ventilation connecting pipe; 407, ventilation upper ring; 408, nozzle; 409, connecting block; 5, furnace cover; 6, air pressure stabilizing mechanism; 601, outer tube; 602, air leakage hole; 603, internal sliding tube; 604, exhaust hole; 605, top plate; 606, fixed mounting ring; 607, tension spring; 7, top cover fixing mechanism; 701, upper bending rod; 702, mounting plate; 703, wrench; 704, slide groove; 705, sliding sleeve; 706, fixing column; 707, pushing spring; 708, lower bending rod; 709, clamp head one; 710, clamp head two; 8, placement frame; 9, rotating door. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the specification of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Please see attached Figure 1 -Attached Fig.12 The embodiment of the present invention provides a device for heat treatment of multiple superconducting films, including a furnace body 1, an air intake circulation mechanism 2 is arranged outside the furnace body 1, the air intake circulation mechanism 2 is used to inflate the interior of the furnace body 1 and enable the gas to circulate, an air intake heating mechanism 3 is arranged at the bottom of the furnace body 1, the air intake heating mechanism 3 is used to heat the gas, a heating uniformity mechanism 4 is arranged at the middle of the bottom end of the furnace body 1, the heating uniformity mechanism 4 is used to achieve uniformity of the gas inside the furnace body 1, a furnace cover 5 is arranged on the top of the furnace body 1, the furnace cover 5 is used to seal the furnace body 1, an air pressure stabilizing mechanism 6 is fixedly connected to the top of the furnace cover 5, the air pressure stabilizing mechanism 6 is used to prevent the internal air pressure of the furnace body 1 from being too high, a top cover fixing mechanism 7 is arranged outside the furnace cover 5, the top cover fixing mechanism 7 is used to connect the furnace cover 5 and the furnace body 1, a placement frame 8 is rotatably connected to the bottom of the furnace cover 5, the placement frame 8 is used to place multiple superconducting thermal films, and a rotating door 9 is rotatably connected to the outside of the placement frame 8.

[0033] The air inlet circulation mechanism 2 includes a high-pressure blower 201 and an installation box 206. The outside of the high-pressure blower 201 is fixedly connected to the outside of the furnace body 1. The input end of the high-pressure blower 201 is fixedly connected to a three-way pipe 202. The three-way pipe 202 has a connecting function. The top two ends of the three-way pipe 202 are fixedly connected to electromagnetic valves 203. The electromagnetic valve 203 can control the on-off of the air flow inside the three-way pipe 202. One side of the electromagnetic valve 203 away from the three-way pipe 202 is fixedly connected to a circulating air duct 204. The circulating air duct 204 plays a connecting role. The other side of the electromagnetic valve 203 away from the three-way pipe 202 is fixedly connected to an air inlet pipe 205. The interior of the installation box 206 is fixedly connected to a plurality of air filter plates 207. The air filter plates 207 can filter air. The upper and lower sides of the installation box 206 are fixedly connected to the connecting installation pipe 2 08. The bottom of the lower connecting installation pipe 208 is threadedly connected to the bottom of the air inlet pipe 205. When providing hot air to the interior of the furnace body 1, first start the high-pressure blower 201, open the solenoid valve 203 at the bottom of the air inlet pipe 205, and close the solenoid valve 203 under the circulating air pipe 204. At this time, the high-pressure blower 201 passes the air through the connecting installation pipe 208, the installation box 206 and the air filter plate 207 through the air inlet pipe 205, and then enters the interior of the high-pressure blower 201, and is discharged into the air inlet heating mechanism 3 through the output end of the high-pressure blower 201 for heating, and then enters the interior of the furnace body 1 through the uniform heating mechanism 4. If it is necessary to circulate the air inside the furnace body 1, the solenoid valve 203 under the air inlet pipe 205 can be closed, and the solenoid valve 203 under the circulating air pipe 204 can be opened. At this time, the hot air circulation inside the furnace body 1 can be realized.

[0034] The air inlet heating mechanism 3 includes an air outlet pipe 301, which plays a connecting role. One end of the air outlet pipe 301 is fixedly connected to the output end of the high-pressure blower 201, and the other end of the air outlet pipe 301 is externally fixedly connected to a fixed disk 302, which provides an installation position. The side of the fixed disk 302 away from the high-pressure blower 201 is fixedly connected to a tightening spring 303, and the side of the tightening spring 303 away from the fixed disk 302 is fixedly connected to a movable disk 304, the middle part of the movable disk 304 is fixedly connected to an inner tube 305, and the side of the inner tube 305 close to the high-pressure blower 201 is fixedly connected to a limiting ring 306, and the bottom end of the furnace body 1 is fixedly connected to a hollow cylinder 308, which is pressed against The tightening spring 303 can push the movable disk 304 to fit tightly against one end of the hollow tube 308. The interior of the hollow tube 308 is fixedly connected with an electric heating wire 309. An air inlet connecting pipe 307 is provided on the side of the hollow tube 308 away from the movable disk 304. The side of the air inlet connecting pipe 307 away from the hollow tube 308 is fixedly connected to the outside of the mounting tank 401. Both ends of the hollow tube 308 are fixedly connected with sealing gaskets. The inner side of the tightening spring 303 is sleeved on the outside of the air outlet pipe 301. The limiting ring 306 is slidably connected to the inside of the air outlet pipe 301. When the air enters the interior of the inner tube 305 through the air outlet pipe 301, the air enters the interior of the hollow tube 308 through the inner tube 305 and turns on the electric heating wire 309. The heat of the electric heating wire 309 is used to heat the air entering the hollow cylinder 308, and the hot air can enter the interior of the heating uniformity mechanism 4 through the air inlet connecting pipe 307. When the hollow cylinder 308 is disassembled, the movable disk 304 is first pushed in the direction of the fixed disk 302, and then the spring 303 can be squeezed and pressed, and the movable disk 304 and the inner tube 305 in the middle of the movable disk 304 can be slid out of the interior of the hollow cylinder 308. At this time, the hollow cylinder 308 is removed from the air inlet connecting pipe 307 to complete the disassembly of the hollow cylinder 308. When installing, one end of the hollow cylinder 308 is pressed against the far end of the air inlet connecting pipe 307. The movable disk 304 is moved toward the side of the uniform heating mechanism 4, away from the uniform heating mechanism 4. At this time, the movable disk 304 is pushed toward the fixed disk 302, and the other end of the hollow cylinder 308 is aligned with the inner tube 305. Then, the movable disk 304 is released, and the movable disk 304 is driven to move toward the direction of the hollow cylinder 308 under the push of the reaction force of the tightening spring 303, and the inner tube 305 is driven to move toward the direction of the hollow cylinder 308, so that the end of the inner tube 305 away from the limit ring 306 slides into the interior of the hollow cylinder 308, and at the same time, the movable disk 304 is tightly pressed against the side of the hollow cylinder 308 away from the air inlet connecting pipe 307. At this time, the installation of the hollow cylinder 308 is completed.

[0035] The uniform heating mechanism 4 includes a mounting tank 401, the top of which is fixedly connected to the middle of the bottom end of the furnace body 1, the interior of the mounting tank 401 is rotatably connected to an impeller 402, the impeller 402 can rotate under the action of airflow, the top of the impeller 402 is fixedly connected to a connecting rotating shaft 403, the outside of the mounting tank 401 is fixedly connected to a connecting bent rod 404, the top of the connecting bent rod 404 is fixedly connected to a ventilation ring 405, the outside of the ventilation ring 405 is fixedly connected to a ventilation connecting pipe 406, the top of the ventilation connecting pipe 406 is fixedly connected to a ventilation upper ring 407, the outside of the ventilation upper ring 407 and the ventilation ring 405 are fixedly connected to a plurality of nozzles 408, the nozzles 408 can spray gas, the bottom of the placement frame 8 is fixedly connected to a connecting block 409, the connecting rotating shaft 403 is engaged with the connecting block 409, the bottom of the ventilation ring 405 is fixedly connected to the furnace At the inner bottom end of the furnace body 1, the top of the ventilation upper ring 407 is fixedly connected to the inner bottom end of the furnace body 1. When the hot air enters the interior of the installation tank 401 through the air inlet connecting pipe 307, the airflow will drive the impeller 402 to rotate. After the impeller 402 rotates, it can drive the connecting rotating shaft 403 to rotate. Due to the engagement between the connecting rotating shaft 403 and the connecting block 409, it is achieved that after the connecting rotating shaft 403 rotates, the connecting block 409 is driven to rotate, and then the placement frame 8 can be driven to rotate, so that the superconducting film inside the placement frame 8 can be heated evenly. At the same time, the gas inside the installation tank 401 will enter the interior of the ventilation ring 405 through the connecting bent rod 404, and enter the interior of the ventilation upper ring 407 through the ventilation connecting pipe 406. At this time, the nozzles 408 outside the ventilation ring 405 and the ventilation upper ring 407 spray out, thereby providing a uniform and stable heat source.

[0036] The air pressure stabilizing mechanism 6 includes an outer tube 601, the bottom of the outer tube 601 is fixedly connected to the top of the furnace cover 5, a plurality of air leakage holes 602 are provided on the top of the outer wall of the outer tube 601, an inner sliding tube 603 is slidably connected to the inside of the outer tube 601, a plurality of exhaust holes 604 are provided on the bottom end of the outer wall of the inner sliding tube 603, and the exhaust holes 604 can discharge the gas inside the furnace body 1 after aligning the air leakage holes 602, a top plate 605 is fixedly connected to the top of the inner sliding tube 603, a fixed mounting ring 606 is fixedly connected to the outer bottom end of the outer tube 601, a tension spring 607 is fixedly connected between the top plate 605 and the fixed mounting ring 606, and when the furnace body When the air pressure inside the furnace body 1 is too high, the top plate 605 will be pushed to move upward, and then the internal sliding tube 603 will be driven to move upward. When the exhaust hole 604 on the internal sliding tube 603 moves to the leak hole 602 on the outer tube 601, the gas inside the furnace body 1 can be discharged through the exhaust hole 604 and the leak hole 602. When the top plate 605 moves upward, the tension spring 607 will be pulled. After a part of the gas inside the furnace body 1 is discharged, the top plate 605 will be pulled downward by the action of the tension spring 607, and then the exhaust hole 604 and the leak hole 602 will be staggered. At this time, the gas inside the furnace body 1 will not be discharged.

[0037] The top cover fixing mechanism 7 includes two upper curved rods 701, the tops of the two upper curved rods 701 are fixedly connected to the outside of the furnace cover 5, the outside of the upper curved rods 701 is fixedly connected with a mounting plate 702, the mounting plate 702 provides a mounting position, one side of the mounting plate 702 is rotatably connected with a wrench 703, both sides of the wrench 703 are provided with a slide groove 704, the outside of the upper curved rod 701 is slidably connected with a sliding sleeve 705, the wrench 703 can drive the sliding sleeve 705 to slide, the outer ends of the sliding sleeve 705 are fixedly connected with fixed columns 706, the outer part of the fixed column 706 is arranged inside the slide groove 704, a pushing spring 707 is fixedly connected between the mounting plate 702 and the sliding sleeve 705, and the two sides of the top of the furnace body 1 are fixedly connected with lower curved rods 708, and the end of the lower curved rod 708 away from the furnace body 1 is fixedly connected with a clamp 709, and the end of the upper curved rod 701 away from the furnace cover 5 is fixedly connected with a clamp When the locking cam 705 is in a state of being moved downwardly, the locking cam 705 is released, and the locking cam 705 is in a state of being moved downwardly, so that the locking cam 705 can be moved upwardly, and the locking cam 705 is in a state of being moved upwardly, so that the locking cam 705 can be moved upwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved downwardly, and the locking cam 705 is in a state of being moved upwardly, and the locking cam

[0038] Working principle: when providing hot air to the interior of the furnace body 1, first start the high-pressure blower 201, open the solenoid valve 203 at the bottom of the air inlet pipe 205, and close the solenoid valve 203 under the circulating air pipe 204. At this time, the high-pressure blower 201 passes the air through the air inlet pipe 205 through the connecting installation pipe 208, the installation box 206 and the air filter plate 207 to enter the interior of the high-pressure blower 201, and discharges the air into the air inlet heating mechanism 3 through the output end of the high-pressure blower 201 for heating, and then enters the interior of the furnace body 1 through the heating uniformity mechanism 4. If it is necessary to circulate the air inside the furnace body 1, the solenoid valve 203 under the air inlet pipe 205 can be closed, and the solenoid valve 203 under the circulating air pipe 204 can be opened. At this time, the hot air circulation inside the furnace body 1 can be realized; when the air enters the interior of the inner tube 305 through the air outlet pipe 301, it enters the interior of the hollow tube 308 through the inner tube 305, and the heating wire 309 is turned on. The heat of the electric heating wire 309 is used to heat the air entering the hollow cylinder 308, and the hot air can enter the interior of the heating uniformity mechanism 4 through the air inlet connecting pipe 307. When the hollow cylinder 308 is disassembled, the movable disk 304 is first pushed in the direction of the fixed disk 302, and then the spring 303 can be squeezed and pressed, and the movable disk 304 and the inner tube 305 in the middle of the movable disk 304 can be slid out of the interior of the hollow cylinder 308. At this time, the hollow cylinder 308 is removed from the air inlet connecting pipe 307 to complete the disassembly of the hollow cylinder 308. When installing, one end of the hollow cylinder 308 is pressed against the far end of the air inlet connecting pipe 307. The movable plate 304 is pushed toward the fixed plate 302 at this time, and the other end of the hollow cylinder 308 is aligned with the inner tube 305, and the movable plate 304 is released. Under the push of the reaction force of the spring 303, the movable plate 304 is driven to move toward the direction of the hollow cylinder 308, and the inner tube 305 is driven to move toward the direction of the hollow cylinder 308, so that the end of the inner tube 305 away from the limit ring 306 slides into the interior of the hollow cylinder 308, and at the same time, the movable plate 304 is tightly pressed against the side of the hollow cylinder 308 away from the air inlet connecting pipe 307, and the installation of the hollow cylinder 308 is completed at this time;

[0039] When the hot air enters the interior of the installation tank 401 through the air inlet connecting pipe 307, the airflow will drive the impeller 402 to rotate. After the impeller 402 rotates, it can drive the connecting rotating shaft 403 to rotate. Due to the engagement between the connecting rotating shaft 403 and the connecting block 409, it is achieved that after the connecting rotating shaft 403 rotates, the connecting block 409 is driven to rotate, and then the placement frame 8 can be driven to rotate, so that the superconducting film inside the placement frame 8 can be heated evenly. At the same time, the gas inside the installation tank 401 will enter the interior of the ventilation ring 405 through the connecting bent rod 404, and enter the interior of the ventilation upper ring 407 through the ventilation connecting pipe 406. At this time, the nozzles 408 outside the ventilation ring 405 and the ventilation upper ring 407 spray out, thereby providing a uniform and stable heat source.

[0040] When the air pressure inside the furnace body 1 is too high, the top plate 605 will be pushed to move upward, and then the internal sliding tube 603 will be driven to move upward. When the exhaust hole 604 on the internal sliding tube 603 moves to the air leakage hole 602 on the outer tube 601, the gas inside the furnace body 1 can be discharged through the exhaust hole 604 and the air leakage hole 602. When the top plate 605 moves upward, the tension spring 607 will be pulled. When part of the gas inside the furnace body 1 is discharged, the top plate 605 will be pulled downward by the action of the tension spring 607, and then the exhaust hole 604 and the air leakage hole 602 will be staggered. At this time, the gas inside the furnace body 1 will not be discharged.

[0041] When disassembling the furnace cover 5, first pull the wrench 703 to the side away from the lower bent rod 708, so that the sliding sleeve 705 can be driven to slide out of the connection between the clamp head 1 709 and the clamp head 2 710 through the fixing column 706. At this time, the furnace cover 5 can be pulled upward. When installing the furnace cover 5, it is only necessary to align the clamp head 1 709 and the clamp head 2 710, and then loosen the furnace cover 5 downward, so that the clamp head 2 710 can be engaged with the clamp head 1 709. At this time, loosen the wrench 703 again, and drive the sliding sleeve 705 to move in the direction of the lower bent rod 708 under the action of the push spring 707, so that the sliding sleeve 705 can be set at the connection between the clamp head 1 709 and the clamp head 2 710, and then the furnace cover 5 can be fixed.

[0042] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for heat treatment of multiple superconducting thin films, comprising a furnace body (1), characterized in that: An air intake circulation mechanism (2) is arranged outside the furnace body (1), and the air intake circulation mechanism (2) is used to inflate the interior of the furnace body (1) and enable the gas to circulate; an air intake heating mechanism (3) is arranged at the bottom of the furnace body (1), and the air intake heating mechanism (3) is used to heat the gas; a heating uniformity mechanism (4) is arranged at the middle of the bottom end of the furnace body (1), and the heating uniformity mechanism (4) is used to achieve uniformity of the gas inside the furnace body (1); a furnace cover (5) is arranged at the top of the furnace body (1), and the furnace cover (5) ) is used to seal the furnace body (1); the top of the furnace cover (5) is fixedly connected to an air pressure stabilizing mechanism (6), and the air pressure stabilizing mechanism (6) is used to prevent the internal air pressure of the furnace body (1) from being too high; the outer side of the furnace cover (5) is provided with a top cover fixing mechanism (7), and the top cover fixing mechanism (7) is used to connect the furnace cover (5) and the furnace body (1); the bottom of the furnace cover (5) is rotatably connected to a placement frame (8), and the placement frame (8) is used to place multiple super thermal conductive films; the outer side of the placement frame (8) is rotatably connected to a rotating door (9).

2. The device for heat treatment of multiple superconducting thin films according to claim 1, characterized in that: The air intake circulation mechanism (2) comprises a high-pressure blower (201) and a mounting box (206), wherein the outside of the high-pressure blower (201) is fixedly connected to the outside of the furnace body (1), the input end of the high-pressure blower (201) is fixedly connected to a three-way pipe (202), both ends of the top of the three-way pipe (202) are fixedly connected to electromagnetic valves (203), one side of the electromagnetic valve (203) away from the three-way pipe (202) is fixedly connected to a circulation air duct (204), and the other side of the electromagnetic valve (203) away from the three-way pipe (202) is fixedly connected to an air intake pipe (205), a plurality of air filter plates (207) are fixedly connected to the inside of the mounting box (206), and the upper and lower sides of the mounting box (206) are fixedly connected to connecting mounting pipes (208), and the bottom of the lower connecting mounting pipe (208) is threadedly connected to the bottom of the air intake pipe (205).

3. The device for heat treatment of multiple superconducting thin films according to claim 2, characterized in that: The air inlet heating mechanism (3) comprises an air outlet pipe (301), one end of the air outlet pipe (301) is fixedly connected to the output end of the high-pressure blower (201), the other end of the air outlet pipe (301) is externally fixedly connected to a fixed disk (302), a side of the fixed disk (302) away from the high-pressure blower (201) is fixedly connected to a holding spring (303), and a side of the holding spring (303) away from the fixed disk (302) is fixedly connected to a movable The movable disk (304) is fixedly connected to an inner tube (305) in the middle part, and a limiting ring (306) is fixedly connected to the side of the inner tube (305) close to the high-pressure blower (201), and a hollow tube (308) is fixedly connected to the bottom end of the furnace body (1), and a heating wire (309) is fixedly connected to the inside of the hollow tube (308), and an air inlet connecting pipe (307) is arranged on the side of the hollow tube (308) away from the movable disk (304).

4. The device for heat treatment of multiple superconducting thin films according to claim 1, characterized in that: The uniform heating mechanism (4) comprises a mounting pot (401), the top of which is fixedly connected to the middle of the bottom end of the furnace body (1), the interior of the mounting pot (401) is rotatably connected to an impeller (402), the top of which is fixedly connected to a connecting rotating shaft (403), the exterior of the mounting pot (401) is fixedly connected to a connecting bent rod (404), the top of which is fixedly connected to a ventilation ring (405), the exterior of the ventilation ring (405) is fixedly connected to a ventilation connecting pipe (406), the top of which is fixedly connected to a ventilation upper ring (407), the exteriors of the ventilation upper ring (407) and the ventilation ring (405) are both fixedly connected to a plurality of nozzles (408), the bottom of the placement frame (8) is fixedly connected to a connecting block (409), and the connecting rotating shaft (403) is engaged with the connecting block (409).

5. The device for heat treatment of multiple superconducting thin films according to claim 1, characterized in that: The air pressure stabilizing mechanism (6) comprises an outer tube (601), the bottom of the outer tube (601) is fixedly connected to the top of the furnace cover (5), a plurality of air leakage holes (602) are provided at the top of the outer wall of the outer tube (601), an inner sliding tube (603) is slidably connected inside the outer tube (601), a plurality of air exhaust holes (604) are provided at the bottom end of the outer wall of the inner sliding tube (603), a top plate (605) is fixedly connected to the top of the inner sliding tube (603), a fixed mounting ring (606) is fixedly connected to the outer bottom end of the outer tube (601), and a tension spring (607) is fixedly connected between the top plate (605) and the fixed mounting ring (606).

6. The device for heat treatment of multiple superconducting thin films according to claim 1, characterized in that: The top cover fixing mechanism (7) comprises two upper curved rods (701), the tops of the two upper curved rods (701) are fixedly connected to the outside of the furnace cover (5), the outside of the upper curved rods (701) is fixedly connected to a mounting plate (702), one side of the mounting plate (702) is rotatably connected to a wrench (703), both sides of the wrench (703) are provided with sliding grooves (704), the outside of the upper curved rods (701) is slidably connected to a sliding sleeve (705), and both ends of the outside of the sliding sleeve (705) are fixedly connected to a fixing column (70 6), the outside of the fixed column (706) is arranged inside the slide groove (704), a push spring (707) is fixedly connected between the mounting plate (702) and the sliding sleeve (705), lower bending rods (708) are fixedly connected to both sides of the top of the furnace body (1), and the end of the lower bending rod (708) away from the furnace body (1) is fixedly connected to a clamping head 1 (709), and the end of the upper bending rod (701) away from the furnace cover (5) is fixedly connected to a clamping head 2 (710), and the clamping head 2 (710) is engaged with the clamping head 1 (709).

7. The device for heat treatment of multiple superconducting thin films according to claim 3, characterized in that: The side of the air inlet connecting pipe (307) away from the hollow cylinder (308) is fixedly connected to the outside of the mounting tank (401), and both ends of the hollow cylinder (308) are fixedly connected with sealing gaskets.

8. The device for heat treatment of multiple superconducting thin films according to claim 4, characterized in that: The bottom of the ventilation ring (405) is fixedly connected to the inner bottom end of the furnace body (1), and the top of the ventilation upper ring (407) is fixedly connected to the inner bottom end of the furnace body (1).

9. The device for heat treatment of multiple superconducting thin films according to claim 3, characterized in that: The inner side of the pressing spring (303) is sleeved on the outside of the air outlet pipe (301), and the limiting ring (306) is slidably connected to the inside of the air outlet pipe (301).

10. The device for heat treatment of multiple superconducting thin films according to claim 6, characterized in that: The push spring (707) is sleeved on the outside of the upper bending rod (701), and the outside of the wrench (703) is sleeved with a rubber sleeve.

Images