An on-line swing adjustable magnetic rod for magnetron sputtering

Abstract

The present invention discloses an on-line swing adjustable magnetic rod for magnetron sputtering, which comprises a housing assembly, a magnetic yoke assembly and an adjustment assembly; the housing assembly has a receiving chamber, and the magnetic yoke assembly is located below the housing assembly; there are multiple adjustment assemblies which are independently controlled from each other, and they are arranged along the length direction of the magnetic yoke assembly and are arranged in the receiving chamber; the output end of each adjustment assembly moves linearly in a direction perpendicular to the magnetic yoke assembly, and all pass through from the side wall of the receiving chamber to the side where the magnetic yoke assembly is located and are hinged to the magnetic yoke assembly, so as to drive the magnetic yoke assembly to partially or completely change the distance from the surface of the sputtering target. By arranging multiple adjustment assemblies, there are multiple connection points between the adjustment assemblies and the magnetic yoke assembly. When the output end of the adjustment assembly acts, it drives the magnetic yoke assembly at the corresponding point to partially change the distance from the surface of the sputtering target (approach or move away), thereby adjusting the local magnetic field intensity and realizing real-time on-line control of the coating thickness on the surface of the sputtering target, so that the coating thickness of the coated product tends to be consistent.

Description

Technical Field

[0001] The present invention belongs to the technical field of magnetron sputtering, and particularly relates to an on-line swing adjustable magnetic rod for magnetron sputtering. Background Art

[0002] Physical vapor deposition using sputtering has become a standard technique for customizing the properties of, for example, glass plates or other rigid or flexible materials. "Sputtering" refers to the ballistic ejection of coating material atoms from a sputtering target by positively charged ions, and the positively charged ions (usually argon ions) are accelerated by an electric field directed at the negatively charged sputtering target. Positive ions are formed by collision ionization in a low-pressure gas phase. The ejected atoms impinge on the substrate to be coated, where a dense and well-adhering coating is formed. The disadvantage is that the magnetron must be opened, so the vacuum must be removed to allow adjustment, and the vacuum must be reapplied after the adjustment is completed. This is very time-consuming. One of the process problems faced is that a magnetic field generator must be included in the sputtering target. The magnetic field generator oriented to point at the substrate to be coated is usually kept stationary while the cylindrical sputtering target rotates in front of it. High-performance permanent magnets based on neodymium iron boron (Fe-Nd-B) alloy or cobalt samarium (Co-Sm) alloy are used to generate the magnetic field. Since the magnetic field component parallel to the surface of the sputtering target determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic induction intensity (in tesla) of this component usually decreases at least with the square of the distance from the magnetic field generator, and thus is very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. The distance between the surface of the sputtering target and the magnetic field generator must therefore be well controlled, otherwise the plasma will exhibit local intensity variations, which can correspondingly lead to non-uniform coating profiles on the substrate.

[0003] In the field of magnetron sputtering industry, the most widely used is the cylindrical target, with an inner diameter of the target cylinder of 125 mm. In order to enable magnetron sputtering products to obtain the best uniformity. Especially in the LowE market, on-line adjustable magnetic rods have become an indispensable choice for producing high-end LowE products. Summary of the Invention

[0004] The object of the present invention is to provide an on-line swing adjustable magnetic rod for magnetron sputtering, which aims to solve...

[0005] To solve the above technical problems, the object of the present invention is achieved as follows:

[0006] An on-line swing adjustable magnetic rod for magnetron sputtering, comprising a housing assembly, a yoke assembly and an adjustment assembly; the housing assembly has a receiving chamber, and the yoke assembly is located outside the housing assembly; there are a plurality of adjustment assemblies which are independently controlled from each other, are arranged along the length direction of the yoke assembly and are arranged in the receiving chamber, and the output ends thereof pass through the side wall of the receiving chamber towards the side where the yoke assembly is located and are hinged to the yoke assembly to drive the yoke assembly to move linearly back and forth, so as to drive the yoke assembly to partially or completely change the distance from the surface of the sputtering target; further comprising a swing assembly fixed in the housing assembly, and the housing assembly is rotatably connected to the machine body; the swing assembly includes a swing motor, the swing motor is fixedly installed on the housing assembly, the driving assembly is fixedly installed on the machine body, and the output end of the swing motor is restricted from rotating by the driving assembly; when the output end of the swing motor rotates, the reaction force drives the swing motor to rotate in the reverse direction, and further drives the housing assembly to swing along its axis of rotation, so as to drive the yoke assembly to swing along the axis of rotation of the housing assembly; by providing a plurality of adjustment assemblies, the adjustment assemblies and the yoke assembly have a plurality of connection points, and when the output ends of the adjustment assemblies act, the yoke assembly at the corresponding points is driven to locally change the distance from the surface of the sputtering target to be closer or farther away, thereby adjusting the local magnetic field intensity, realizing real-time on-line control of the coating thickness on the surface of the sputtering target, making the coating thickness of the coated product tend to be consistent, improving the quality of the coated product while not needing to remove the vacuum, and significantly improving the production efficiency.

[0007] On the basis of the above solution and as a preferred solution of the above solution: further comprising a first terminal assembly and a second terminal assembly, the first terminal assembly and the second terminal assembly are respectively arranged at both ends of the housing assembly and are coaxial with the swing axis of the magnetic rod; the output end of the swing motor is coaxial with the axis of the first terminal assembly. Setting the first terminal assembly and the second terminal assembly to be coaxial with the swing axis of the magnetic rod will not have an adverse effect on the swing of the magnetic rod, and at the same time simplifies the equipment structure.

[0008] On the basis of the above solution and as a preferred solution of the above solution: further comprising a main control assembly; the first terminal assembly is a water inlet and power supply joint assembly, and the second terminal assembly is an optical fiber communication joint assembly; control signals are transmitted to the main control assembly via the first terminal assembly and / or the second terminal assembly. Since the entire magnetic rod is in a moving state and the second terminal assembly is coaxial with the swing axis of the magnetic rod, that is to say, the external optical communication end and the signal receiving end of the second terminal assembly are also on the same axis. Then, no matter how the magnetic rod swings, the optical signal can be reliably transmitted, and compared with the traditional cable communication method, it avoids the problem of signal failure caused by the twisting or fatigue damage of the cable during the movement of the magnetic rod.

[0009] Based on the above solution and as a preferred solution of the above solution: It further includes an energy storage component, and the energy storage component supplies power to the swing component, the main control component, and the adjustment component; the energy storage component is arranged in the accommodation chamber. Through the energy storage component built in the housing component, it can continuously and stably supply power to the adjustment component and the swing component, ensuring the stability and reliability of the operation of the entire device.

[0010] Based on the above solution and as a preferred solution of the above solution: During the operation and / or intermittent period of magnetron sputtering, the external power supply charges the energy storage component through the first terminal component. Since during the magnetron sputtering process, the swing component and the adjustment component will consume the power of the energy storage component, if the power is too low, it may be difficult to maintain reliable operation. Therefore, the external power supply continuously or intermittently charges the energy storage component to timely supplement its power.

[0011] Based on the above solution and as a preferred solution of the above solution: The housing component includes a housing body and an upper cover plate group. An opening is provided at the upper end of the housing body, and the opening communicates the accommodation chamber with the outside; the upper cover plate group is fixedly installed at the opening of the housing body to close the accommodation chamber. By setting the upper opening, it is convenient to install the adjustment component, the energy storage component, the swing component, etc. in the accommodation chamber, and the opening is closed by the upper cover plate group to isolate it from the outside during the magnetron sputtering process, preventing water or other media from entering the accommodation chamber and causing damage to the device.

[0012] Based on the above solution and as a preferred solution of the above solution: The adjustment component further includes a mounting seat. A channel is correspondingly opened on the side of the housing body facing the magnetic yoke component. The adjustment component is installed on the mounting seat, and its output end passes downward through the mounting seat and passes through the channel to be connected to the magnetic yoke component; the mounting seat closes the channel, and a seal is provided between the output end of the adjustment component and the mounting seat. The setting of the mounting seat facilitates the installation of the adjustment component on the one hand, and is conducive to closing and sealing the channel on the other hand. At the same time, while enabling the output end of the adjustment component to move flexibly, the seal between the two is maintained. Of course, when the seal ages or leaks, it can also be disassembled and replaced more conveniently.

[0013] Based on the above solution and as a preferred solution to the above solution: The adjustment assembly includes a servo motor, a transmission assembly, a nut, and a lead screw; the axis of the servo motor is perpendicular to the axis of the lead screw, and the lead screw passes through the mounting seat and the channel and is hinged to the yoke assembly; the servo motor drives the lead screw to linearly reciprocate along its axial direction through the transmission assembly and the nut. By setting the axis of the servo motor perpendicular to the lead screw, the size of the entire adjustment assembly can be significantly shortened, making it more conducive to being installed into the housing assembly with a narrow space.

[0014] Based on the above solution and as a preferred solution to the above solution: The yoke assembly includes a connecting piece, and the connecting piece is detachably connected to the lead screw. The detachable connection structure is conducive to assembly during the production process and also conducive to disassembly during later maintenance.

[0015] Based on the above solution and as a preferred solution to the above solution: The connecting piece is provided with a mounting hole, the lead screw is inserted into the mounting hole, and a pin shaft passes through the connecting piece and the lead screw from the side of the connecting piece, and the axial position of the pin shaft is limited. The connection structure of the pin shaft is simple and reliable, and both disassembly and assembly are very convenient.

[0016] Based on the above solution and as a preferred solution to the above solution: The adjustment assembly further includes a mounting seat, a channel is correspondingly opened on the side of the outer housing body facing the yoke assembly, the adjustment assembly is mounted on the mounting seat, and its output end passes downward through the mounting seat, passes through the channel and is connected to the yoke assembly; the mounting seat closes the channel, and a second seal is provided between the output end of the adjustment assembly and the channel.

[0017] Based on the above solution and as a preferred solution to the above solution: The second seal includes a flexible seal sleeve, the inner edge of the seal sleeve is connected to the output end of the adjustment assembly, and the outer edge is connected to the outer edge of the channel, sealing the output end of the adjustment assembly and the channel.

[0018] Based on the above solution and as a preferred solution to the above solution: The cross-section of the seal sleeve is skirt-shaped or sheet-shaped; part or all of the cross-section of the side wall of the seal sleeve is corrugated.

[0019] Based on the above solution and as a preferred solution to the above solution: A first support ring is fixedly provided on the inner edge of the seal sleeve, and a second support ring is fixedly provided on the outer edge. The first support ring is detachably fixed and sealed to the output end of the adjustment assembly, and the second support ring is detachably fixed and sealed to the outer edge of the channel.

[0020] The prominent and beneficial technical effects of the present invention compared with the prior art are as follows: First, by providing a plurality of adjusting components, the adjusting components and the yoke component have a plurality of connection points. When the output end of the adjusting component acts, it drives the local distance between the corresponding point of the yoke component and the surface of the sputtering target to change, approaching or moving away, thereby adjusting the local magnetic field intensity, realizing real-time on-line control of the coating thickness on the surface of the sputtering target, making the coating thickness of the coated product tend to be consistent, improving the quality of the coated product, and significantly improving the production efficiency without removing the vacuum. By providing an energy storage component, a main control component, a first terminal component and a second terminal component, the energy storage component provides electrical energy for the swinging component and the adjusting component, the first terminal component charges the energy storage component, and of course, the cooling medium required for cooling is introduced, and the second terminal component realizes optical fiber communication with the main control component, improving the reliability and stability of the entire magnetic rod control. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is the front view of the overall structure of the present invention;

[0022] Figure 2 is the right view of the overall structure of the present invention;

[0023] Figure 3 is the left view of the overall structure of the present invention;

[0024] Figure 4 is the exploded view of the overall structure of the present invention;

[0025] Figure 5 is the schematic diagram of the internal component installation structure of the present housing component;

[0026] Figure 6 is the schematic diagram of the adjusting component structure;

[0027] Figure 7 is the partial cross-sectional view of the overall structure of the present invention;

[0028] Figure 8 is Figure 7 the partial enlarged view at position III in;

[0029] Figure 9 is the schematic diagram of the yoke component structure;

[0030] Figure 10 is Figure 9 the partial enlarged view at position V in;

[0031] Figure 11 is the exploded view of the first terminal component;

[0032] Figure 12 the schematic diagram of the target material installation state structure;

[0033] Figure 13 isFigure 12 Partial enlarged view at position A in

[0034] Figure 14 is a partial cross-sectional view of the overall structure of the second embodiment of the present invention;

[0035] Figure 15 is Figure 14 partial enlarged view at position VI in

[0036] Figure 16 is a schematic diagram of the structure of the swing assembly;

[0037] Figure 17 is a schematic diagram of the structure of the fixed column;

[0038] Figure 18 is a cross-sectional view of the structure of the swing assembly;

[0039] Figure 19 is Figure 18 partial enlarged view at position XII in Detailed implementation manners

[0040] To make the objectives, technical solutions and advantages of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments with reference to the accompanying drawings in the embodiments. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the given embodiments, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

[0041] In the description of this application, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to this application.

[0042] In the description of this application, terms such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Embodiment

[0043] In combination with Figure 1-11As shown in the figure, the present invention discloses an on-line swing adjustable magnetic rod for magnetron sputtering, which includes a housing assembly 10, a magnetic yoke assembly 20 and an adjustment assembly 50. Among them, the housing assembly 10 includes a housing body 11 and an upper cover plate group 12. The housing body 11 is hollow to form an accommodation chamber 111, and there is an opening at its upper end, and the opening communicates the accommodation chamber 111 with the outside. The upper cover plate group 12 includes multiple upper cover plates. After installing components such as the adjustment assembly 50 in the accommodation chamber, the upper cover plates are fixedly installed at the opening of the housing body 11 to close the accommodation chamber 111, and the opening is closed by the upper cover plate group. By setting the upper opening, it is convenient to install the adjustment assembly, the energy storage assembly, the swing assembly, etc. in the accommodation chamber, and the opening is closed by the upper cover plate group to isolate it from the outside during the magnetron sputtering process, avoiding the problem that water or other media enter the accommodation chamber and cause equipment damage. The magnetic yoke assembly 20 is located below the housing assembly 10; it includes a support plate 21 and a magnetic rod main body 22, and the magnetic rod main body 22 is fixedly installed on the support plate 21. Of course, it is also possible to set a magnet accommodation chamber on the support plate 21, arrange a number of magnets in the magnet accommodation chamber according to the required magnetic field, and then close the magnet accommodation chamber to form the magnetic yoke assembly in sequence. There are multiple adjustment assemblies 50 and they are independently controlled from each other. They are arranged along the length direction of the magnetic yoke assembly 20 and are arranged in the accommodation chamber 111. The output end of each adjustment assembly 50 moves linearly back and forth perpendicular to the magnetic yoke assembly 20, and all pass through the side wall of the accommodation chamber 111 to the side where the magnetic yoke assembly 20 is located and are hinged to the magnetic yoke assembly 20. By pushing or pulling the magnetic yoke assembly locally outward or inward through the output end of the adjustment assembly 50, the magnetic yoke assembly 20 will elastically deform within its elastic deformation range or within the range that its strength and shape can withstand. Since the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic induction intensity (in Tesla) of this component usually decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the sputtering target surface. During the actual test process, the deformation amount of the magnetic rod within 4 mm can fully meet the actual use requirements, so as to drive the magnetic yoke assembly 20 to locally or completely change the distance from the sputtering target surface. By setting multiple adjustment assemblies, there are multiple connection points between the adjustment assembly and the magnetic yoke assembly. When the output end of the adjustment assembly moves, it drives the magnetic yoke assembly at the corresponding point to locally change the distance from the sputtering target surface to be closer or farther, thereby adjusting the local magnetic field intensity and realizing real-time on-line control of the coating thickness on the sputtering target surface, making the coating thickness of the coated product tend to be consistent, improving the quality of the coated product while not requiring to remove the vacuum, and significantly improving the production efficiency.Specifically, in this embodiment, the adjusting assembly 50 includes a servo motor 51, a first bevel gear 53, a second bevel gear 54, a nut 52, and a lead screw 55. Among them, the first bevel gear 53 is fixedly installed on the main shaft of the servo motor 51, the second bevel gear 54 is fixedly connected to the nut 52, the nut 52 is threadedly connected to the lead screw 55, and the first bevel gear 53 meshes with the second bevel gear 54 so that the axis of the servo motor 51 is perpendicular to the axis of the lead screw 55. The installation seat 56 is provided to facilitate the installation of the adjusting assembly on the one hand, and on the other hand, it is beneficial to seal the channel. At the same time, while enabling the output end of the adjusting assembly to move flexibly, the seal between the two is maintained. Of course, when the seal ages or leaks, it can be disassembled and replaced more conveniently. And by setting the axis of the servo motor perpendicular to the axis of the lead screw, the size of the entire adjusting assembly can be significantly shortened, making it more conducive to being installed in the narrow housing assembly. Further, in this embodiment, it is preferably that the adjusting assembly 50 further includes an installation seat 56. A corresponding channel 112 is opened on the side of the outer housing 11 facing the yoke assembly 20. The nut 53 is movably installed on the installation seat 56, and its lead screw 55 passes downward from the middle of the installation seat 56, passes through the channel 112, and is connected to the yoke assembly 20. The installation seat 56 contacts the bottom surface of the accommodation chamber and the edge of the channel 112. And a seal is provided between the contact surface of the installation seat 56 and the edge of the channel 112, thereby realizing that the installation seat 56 seals the channel 112. The nut 52 is installed in the installation hole in the middle of the installation seat 56, and a seal such as a skeleton oil seal is provided between the installation hole and the outer peripheral surface of the nut 52, so that a seal is formed between the nut 52 and the installation seat 56. Of course, it should be noted that the threaded hole 521 on the nut 52 connected to the threaded section 552 of the lead screw 55 is a blind hole. Such a setting only needs to ensure reliable sealing between the outer peripheral surface of the nut 52 and the installation seat 56, and there will be no problem of leakage between the threaded gap of the lead screw 55 and the threaded hole. In addition, considering that the nut 52 can rotate flexibly and can withstand a certain axial force, in this embodiment, it is preferably that a combination of a thrust bearing and an angular contact bearing is provided between the upper end surface of the nut 52 and the installation seat 56 and / or the installation hole. Of course, it also includes necessary axial limit members to limit the possible axial movement of the nut 52, such as Figure 8 the limiting plate 57 shown in the figure, which is connected to the installation seat 56 and axially limits the nut 52 through the limiting plate 57. The yoke assembly 20 in this embodiment includes a connecting member 23. The connecting member 23 is fixedly installed on the end surface of the support plate 21 facing the outer housing, and the connecting member 23 is detachably connected to the lower end of the lead screw 55. Specifically, as Figure 8 and Figure 10As shown, the connecting member 23 is provided with a mounting hole 231. The lead screw 55 is inserted into the mounting hole 231. A pin shaft 553 passes through the connecting member 23 and the lead screw 55 from the side of the connecting member 23, and the pin shaft 553 is axially limited by an elastic lock 554. The connection structure of the pin shaft is simple and reliable, and both disassembly and assembly are very convenient.

[0044] For an application scenario of magnetron sputtering, it is necessary for the yoke assembly to swing within a certain range so that the magnetic field of magnetron sputtering can cover a larger range. At the same time, according to the actual coating thickness requirements, the position of the magnetic rod can be adjusted, thereby adjusting the magnetic field distribution and changing the coating distribution. Then, in this embodiment, in order to realize the swing of the magnetic rod, a swing assembly 80, a drive assembly 90, a first terminal assembly 30, and a second terminal assembly 40 are provided in the accommodation chamber 111; the first terminal assembly 30 and the second terminal assembly 40 are respectively arranged at both ends of the housing assembly 10. For details, see Figure 16-19 As shown, the swing assembly 80 in this embodiment includes a swing motor 81, an output flange 82, and a motor fixing seat 83. The output flange 82 is fixedly installed on the output shaft of the swing motor 81, and a flange hole is opened on the output flange 82. The output flange 82 is coaxial with the axis of the first terminal assembly 30. The motor fixing seat 83 fixedly installs the swing motor 81 on the outer housing 10. The drive assembly 90 is fixedly installed on the machine body. It includes a drive end 91, a spacer 92, a protective pipe fitting 93, a driving member 94, and a transmission belt 95. The drive end 91 is fixedly connected to the end of the driving member 94 close to the magnetic rod. The spacer 92 is sleeved inside the driving member 94, and the protective pipe fitting 93 is sleeved inside the spacer 92. Preferably, a support block 933 is arranged between the protective pipe fitting 93 and the inner hole of the spacer 92. Both ends of the target 100 are clamped on the drive end 91, and a sealing ring 911 is arranged between the drive end 91 and the target 100 to make

[0045] a coolant channel a is formed among the target 100, the drive end 91, and the outer housing 11 of the magnetic rod. A fluid channel is arranged on the support plate 31 so that a coolant channel b is formed among the fluid channel, the spacer 92, and the protective pipe fitting 93. For details, see Figure 12 the coolant flow direction indicated by the arrow in the figure. Finally, the coolant is introduced from an external pipeline through an interface provided on the drive assembly 90 and fills the coolant channel a, and flows back to an external cooling device through another return interface on the drive assembly 90 via the coolant channel b, realizing the cooling of the target 100 and the yoke assembly 20; one end of the protective pipe fitting 93 close to the magnetic rod is provided with a head 931. See Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 11As shown, the first terminal component 30 in this embodiment includes a first mounting plate 31, a fixing pin 32, an outer spacer 33, a joint body 34, a bearing 36, and a sealing component 37. The joint body 34 is hollow and sleeved outside the outer spacer 33, and the end 931 extends into the outer spacer 33. The contact component 35 is located inside the outer spacer 33. Among them, sealing rings are provided between the outer spacer 33 and the joint body 34, and between the end 931 and the inner wall of the outer spacer 33. Of course, considering the positioning of the sealing ring, in this embodiment, preferably annular grooves are provided on the inner walls of the joint body 34 and the outer spacer 33, and the O-ring is embedded in the annular groove; hereby, multiple seals are formed between the joint body 34, the outer spacer 33, and the end 931 to prevent moisture from entering the inside of the outer housing during use. To enable the swing component to drive the magnetic rod to swing, the fixing pin 32 in this embodiment is fixed to the rear end of the joint body 34, and the fixing pin 32 is inserted into the flange hole of the output flange 82 of the swing component 80. A sealing component 36 and a bearing 37 are sleeved outside the rear end of the joint body 34 to enable the outer housing to rotate relative to the joint body 34 and maintain a reliable seal; and a pin head interface 341 is provided at the front end of the joint body 34, and a central support fixing pin 921 is provided on the spacer 92. After the first terminal component 30 is fitted into the socket of the drive component 90, the central support fixing pin 921 is inserted into the pin head interface 341. Thus, since the spacer 92 is fixed and the swing motor 81 is fixed to the outer housing through the motor fixing seat 83, when the output flange 82 of the swing component 80 rotates, it will drive the pin head interface 341 to rotate with it. However, since the spacer 92 will limit the rotation of the joint body 34 through the cooperation of the central support fixing pin 921 and the pin head interface 341, this will cause the reaction force generated by the joint body 34 to act on the swing motor 81 through the output flange 82. Since the swing motor 81 is fixed to the outer housing through the motor fixing seat 83, this will cause the outer housing to twist around the axis of the output flange 82 under the action of the reaction force, thereby driving the entire magnetic rod to rotate, that is, the swing is realized. Then, during the forward or reverse rotation of the swing motor 81, the outer housing will rotate in the opposite direction relative to the axis of the joint body 34. By controlling the rotation angle and rotation amplitude, the drive magnetic rod is swung along its rotation axis.

[0046] See details Figure 12-13As shown, this embodiment also includes a contact assembly 35, the contact assembly 35 includes a first contact 351, a second contact 352 and a contact assembly 353, the contact assembly 353 includes a plurality of moving contacts 353a arranged on the end surface of the first contact 351 and a plurality of stationary contacts 353b arranged on the end surface of the second contact 352. A first contact accommodating cavity 9311 is provided on the end 931, and the first contact 351 is movably arranged in the first contact accommodating cavity 9311. The moving contact 353a of the first contact 351 and the static contact 353b of the second contact 352 correspond to each other one by one and contact each other. A spring 354 is provided in the first contact accommodating cavity 9311, and the spring 354 contacts one end of the first contact 351 away from the moving contact 353a, so as to keep the first contact 351 pressed in the direction of the second contact 352, so that the moving contact 353a and the static contact 353b keep in contact. The static contact 353b is connected to the main control component 60 through a wire; the moving contact 353a is connected to the external power supply through a wire 110; it should be noted that each moving contact 353a preferably includes a contact terminal and a terminal compression spring, and a receiving hole is opened on the end face of the first contact 351, and the terminal compression spring and the contact terminal are received in the receiving hole. Of course, it is preferred that the static contact 353b on the second contact 352 is a conductive metal material distributed on the end face of the second contact 352, which is annular or fan-shaped and has a planar structure and is distributed on the end face of the second contact 352. It can be a sheet of metal fixed on the second contact 352, or it can be embedded in the end face of the second contact 352 and flush with the end face of the second contact 352. During the use of the entire magnetron sputtering system, there will be rotation and a certain degree of overall deformation. Through such a structural setting, the first contact 351 and the second contact 352 can always maintain good contact through the elastic push of the terminal compression spring on the contact terminal, thereby ensuring that it can supply power stably, thereby improving the operating stability of the entire device.

[0047] Of course, in order to control the swing component 80 and the adjustment component 50 and process and execute external control signals or feed back the execution results to the host computer, the present embodiment also includes a main control component 60 disposed in the accommodating chamber 111; the present embodiment preferably has the first terminal component 30 as a water inlet power supply connector component and the second terminal component 40 as an optical fiber communication connector component; the first terminal component 30 connects the external power supply to the main control component 60, and the control signal is transmitted to the main control component 60 via the second terminal component 40 and the internal optical fiber, and the main control component 60 analyzes and processes the signal to control the swing component 80 and the adjustment component 50 to perform adaptive actions. Figure 4As shown, the second terminal component 40 includes a second mounting plate, a second connector body, and an optical fiber component 41. The second connector body is fixedly mounted on the second mounting plate. The optical fiber component 41 can be an optoelectronic conversion component or an optical path guiding component, which is used to transmit optical signals to the main control component 60 in time. It is fixedly mounted inside the second connector body. The second mounting plate is fixedly mounted at one end of the outer housing. Of course, there are necessary seals between the second mounting plate and / or the second connector body and the mounting position of the outer housing to make it completely sealed after installation. At the same time, there are also necessary seals between the optical fiber component 41 and the second connector body. Since the entire magnetic rod is in a moving state and the second terminal component is coaxial with the swing axis of the magnetic rod, that is to say, the external optical fiber communication end and the signal receiving end of the second terminal component are also on the same axis. Then, no matter how the magnetic rod swings, the optical signal can be reliably transmitted. And compared with the traditional cable communication method, it avoids the problem of signal failure caused by the twisting or fatigue damage of the cable during the movement of the magnetic rod. Thus, the optical signal conducted to the main control component 60 through the second terminal component 40, after being analyzed and processed by the main control component 60, controls the adjustment component 50 to drive the yoke component at the corresponding position to locally change the distance from the surface of the sputtering target to be closer or farther away, thereby adjusting the local magnetic field intensity and realizing the real-time on-line control of the coating thickness on the surface of the sputtering target; it also includes controlling the swing component 80 to drive the yoke component to swing a certain angle at the required angle to adjust the magnetic field distribution range.

[0048] Of course, in this embodiment, in order to more reliably and in multiple modes realize communication with the main control component 60, further in this embodiment, by adaptively increasing and adjusting the number and size of the moving contact 353a of the first contact 351 and the static contact 353b of the second contact 352, and at the same time adaptively selecting the sizes of the first contact 351 and the second contact 352, on the one hand, charging can be realized, and on the other hand, data communication through the RS485 communication interface can be realized through the increased contacts. Then, while realizing water supply and power supply to the inside of the magnetic rod and charging through the first terminal component 30, RS485 data communication is realized, data communication with the main control component 60 inside the adjustable magnetic rod is realized, and then the second terminal component 40 and the first terminal component 30 are used to realize the communication control of the adjustable magnetic rod in a one-for-one or synchronous communication manner, thereby realizing the reliable control of the magnetic rod, and at the same time, the compatibility and universality of the data and communication modes of the adjustable magnetic rod can also be improved.

[0049] It further includes an energy storage component 70 which supplies power to the swing component 80, the main control component 60 and the adjustment component 50; the energy storage component 70 is arranged in the accommodation chamber 111. Since during the use process, the entire adjustable magnetic rod is located inside the cylindrical target, the volume and size of the adjustable magnetic rod are greatly restricted. Then, higher requirements are put forward for the installation of the energy storage component 70. If a whole lithium battery is used for installation, it is obviously difficult to achieve. Therefore, in this embodiment, the energy storage component 70 is preferably a multi-piece lithium battery pack, which is arranged between adjacent adjustment components 50. Of course, it can also be arranged in other empty spaces within the accommodation space. By this way of small-volume dispersion, the design requirements for energy storage are met, and at the same time, the requirements for the installation space are reduced. The energy storage component 70 is connected to the main control component 60. On the one hand, it supplies power to the main control component 60. Thus, through the energy storage component built in the housing component, it can continuously and stably supply power to the adjustment component and the swing component, ensuring the stability and reliability of the operation of the entire device. On the other hand, during the magnetron sputtering process, the swing component and the adjustment component will consume the power of the energy storage component. If the power is too low, it may be difficult to maintain reliable operation. Therefore, during the magnetron sputtering operation and / or during the magnetron sputtering interval, while the external power supply can supply power to the main control component 60 through the first terminal component 30, it can also charge the energy storage component 70 through the main control component 60 and perform battery management and protection on its charge and discharge. By continuously or intermittently charging the energy storage component 70 through the external power supply, its power is timely replenished, so that the energy storage component 70 can stably operate within the designed power range, ensuring the stable operation of the entire system.

[0050] Thus, by setting the energy storage component 70, the main control component 60, the first terminal component 30 and the second terminal component 40, the energy storage component 70 provides electrical energy for the swing component and the adjustment component 60, the first terminal component 30 and the main control component 60 charge the energy storage component 70, and the first terminal component 30 and / or the second terminal component 40 realize fiber optic communication with the main control component 60, improving the reliability and stability of the entire magnetic rod control.

[0051] In addition, the drive shaft 821 of the swing assembly 80 is of a hollow structure and extends towards the rear end 811 of the swing motor 81 to form a cable channel c at the front and rear ends of the swing motor 81. The cable channel c communicates with the rear end of the second contact 352. Thus, the cable led out from the second contact 352 of the first terminal assembly 30 can directly penetrate further into the housing assembly through the cable channel c, so that it can be connected to the main control assembly 60 and / or the energy storage assembly 70 with the shortest path. Furthermore, it avoids the problems of long cable path, large energy and signal loss on the cable, and susceptibility to interference caused by the cable needing to bypass various devices through the gaps. At the same time, it can better protect the cable and avoid the problem of cable damage caused by the movement of various moving parts in the housing assembly, reducing the difficulty of wiring.

[0052] Embodiment 2

[0053] As Figure 14-15 shown, the difference between this embodiment and the first embodiment is that: the adjustment assembly 50 further includes a mounting seat 56. A channel 112 is correspondingly opened on the housing 11 towards the side where the yoke assembly 20 is located. The adjustment assembly 50 is mounted on the mounting seat 56, and its output end passes downward through the mounting seat 56 and passes through the channel 112 to be connected to the yoke assembly 20. The mounting seat 56 closes the channel 112, and a second seal 120 is provided between the output end of the adjustment assembly 50 and the channel 112.

[0054] Specifically, in this embodiment, the second seal 120 includes a flexible seal sleeve 121, and the seal sleeve 121 seals the output end of the adjustment assembly 50 and the channel 112. As Figure 15As shown in the figure, a first support ring 122 is fixedly provided on the inner edge 1211 of the sealing sleeve 121, and a second support ring 123 is fixedly provided on the outer edge 1212. The first support ring 122 is detachably fixed and sealingly connected to the output end of the adjusting assembly 50, and the second support ring 123 is detachably fixed and sealingly connected to the outer edge of the channel 112. Among them, the first support ring 122 is sleeved on the threaded section 552 of the lead screw 55, and a pressure ring 124 is detachably connected to the threaded section 552. For example, the pressure ring 124 is threadedly connected to the threaded section 552 to limit the first support ring 122 on the threaded section 552. Of course, in order to avoid leakage between the first support ring 122 and the threaded section 552, it is preferably that the diameter of the connection end 555 of the lead screw 55 and the connecting member 23 is larger than the threaded section 552. A ring groove is provided on the connection side between the connection end 555 and the threaded section 552, and a first sealing ring 127 is embedded in the ring groove. The first support ring 122 is pressed against the first sealing ring 127 by the pressure ring 124 to achieve the seal between the first support ring 122 and the threaded section 552; a ring groove is provided on the joint surface between the first support ring 123 and the outer housing, and a second sealing ring 126 is embedded in the ring groove. The second support ring 123 is pressed against the outer housing by the screw 125, thereby achieving the seal between the second support ring 123 and the outer housing. Thus, the connection between the inner edge of the sealing sleeve 121 and the output end of the adjusting assembly 50 and the connection between the outer edge and the outer edge of the channel 112 are realized, and at the same time, the channel 112 is sealed. Since the lower end of the lead screw 55 is connected to the connecting member 23, and in this embodiment, the position of the second seal 120 is close to the connection end of the two, in order to avoid interference between the connecting member 23 and the sealing sleeve 121 during the movement of the lead screw 55, which may cause damage to the sealing sleeve 121, it is preferably that the cross-section of the sealing sleeve 121 is skirt-shaped or sheet-shaped, and it is buckled above the connecting member 23, thereby avoiding interference and impact on the sealing sleeve 121 and preventing damage to the sealing sleeve 121. In addition, during the adjustment of the magnetic rod, the sealing sleeve 121 will be pulled to cause elastic deformation. Considering improving the stretching flexibility and movement range of the sealing sleeve 121 and avoiding excessive stretching of the sealing sleeve 121 when the stroke is large, which may cause damage to it, therefore, in this embodiment, it is preferably that part or all of the cross-section of the side wall of the sealing sleeve 121 is corrugated. Through the corrugated side wall structure, the movement and stretching range of the sealing sleeve 121 is greatly improved.

[0055] The above embodiments are only preferred embodiments of the present invention, and do not limit the protection scope of the present invention accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present invention should be covered within the protection scope of the present invention.

Claims

1. An online swingable adjustable magnetic bar for magnetron sputtering, characterized in that: The invention comprises a housing component (10), a yoke component (20) and an adjustment component (50); the housing component (10) has a containing chamber (111), and the yoke component (20) is located outside the housing component (10); the adjustment component (50) has a plurality of components that are independently controlled and are arranged along the length direction of the yoke component (20) and are arranged in the containing chamber (111), and the output end thereof passes through the side wall of the containing chamber (111) to the side where the yoke component (20) is located, and is hinged to the yoke component (20), so as to drive the yoke component (20) to reciprocate linearly, so as to drive the yoke component (20) to partially or completely change the distance from the surface of the sputtering target; The invention also comprises a swing assembly (80) fixedly arranged in the housing assembly (10), wherein the housing assembly (10) is rotatably connected to the machine body; the swing assembly (80) comprises a swing motor (81), wherein the swing motor (81) is fixedly mounted on the housing assembly (10), and a drive assembly (90) is fixedly mounted on the machine body, and the output end of the swing motor (81) is restricted in rotation by the drive assembly (90); when the output end of the swing motor (81) rotates, a reaction force drives the swing motor (81) to rotate in the opposite direction, thereby driving the housing assembly (10) to swing along its rotation axis, thereby driving the yoke assembly (20) to swing along the rotation axis of the housing assembly (10).

2. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 1, characterized in that: It also includes a first terminal assembly (30) and a second terminal assembly (40), wherein the first terminal assembly (30) and the second terminal assembly (40) are respectively arranged at two ends of the housing assembly (10) and are coaxial with the swing axis of the magnetic bar; the output end of the swing motor (81) is coaxial with the axis of the first terminal assembly (30).

3. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 2, characterized in that: The first terminal assembly (30) comprises a connector body (34), a pin head interface (341) is provided at the front end of the connector body (34), and the output end of the swing motor (81) is transmission-connected to the connector body (34); the drive assembly (90) comprises a spacer sleeve (92), a central support fixing pin (921) is provided on the spacer sleeve (92), and the central support fixing pin (921) is inserted into the pin head interface (341).

4. The online swingable adjustable magnetic rod for magnetron sputtering according to claim 2, characterized in that: It also includes a main control component (60); the first terminal component (30) is a water inlet power supply connector component, and the second terminal component (40) is an optical fiber communication connector component; and a control signal is transmitted to the main control component (60) via the first terminal component (30) and / or the second terminal component (40).

5. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 4, characterized in that: It also comprises an energy storage component (70), the energy storage component (70) supplies power to the swing component (80), the main control component (60) and the adjustment component (50); the energy storage component (70) is arranged in the accommodating chamber (111).

6. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 5, characterized in that: During the operation of magnetron sputtering and / or the interval of magnetron sputtering, an external power source charges the energy storage component (70) through the first terminal component (30).

7. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 6, characterized in that: The first terminal assembly (30) also includes a contact assembly (35) including a first contact (351), a second contact (352) and a contact assembly (353), wherein the contact assembly (353) includes a plurality of movable contacts (353a) arranged on the end surface of the first contact (351) and a plurality of stationary contacts (353b) arranged on the end surface of the second contact (352); an elastic assembly presses the first contact (351) toward the second contact (352) so that the first contact (351) and the second contact (352) maintain contact.

8. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 1, characterized in that: The outer shell assembly (10) comprises an outer shell (11) and an upper cover plate assembly (12); an opening is provided at the upper end of the outer shell (11), and the opening connects the accommodating chamber (111) with the outside; the upper cover plate assembly (12) is fixedly installed at the opening of the outer shell (11) to close the accommodating chamber (111).

9. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 8, characterized in that: The adjustment component (50) further comprises a mounting seat (56); a channel (112) is provided on the outer shell (11) on the side facing the yoke component (20); the adjustment component (50) is mounted on the mounting seat (56), and an output end thereof extends downward from the mounting seat (56) and passes through the channel (112) to be connected to the yoke component (20); the mounting seat (56) closes the channel (112), and a first seal is provided between the output end of the adjustment component (50) and the mounting seat (56).

10. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 9, characterized in that: The adjustment assembly (50) comprises a servo motor (51), a transmission assembly, a nut (52) and a screw rod (55); the axis of the servo motor (51) is perpendicular to the axis of the screw rod (55); the screw rod (55) passes through the mounting seat (56) and the channel (112) and is hinged to the yoke assembly (20); the servo motor (51) drives the screw rod (55) to reciprocate along its axial direction through the transmission assembly and the nut (52).

11. An online swingable adjustable magnetic bar for magnetron sputtering according to any one of claims 9-10, characterized in that: The adjustment component (50) further comprises a mounting seat (56); a channel (112) is provided on the outer shell (11) on the side facing the yoke component (20); the adjustment component (50) is mounted on the mounting seat (56), and its output end passes downward from the mounting seat (56), passes through the channel (112) and is connected to the yoke component (20); the mounting seat (56) closes the channel (112), and a second seal (120) is provided between the output end of the adjustment component (50) and the channel (112).

12. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 11, characterized in that: The second seal (120) comprises a flexible sealing sleeve (121), the inner edge of the sealing sleeve (121) being connected to the output end of the regulating component (50), and the outer edge being connected to the outer edge of the channel (112), thereby sealing the output end of the regulating component (50) and the channel (112).

13. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 12, characterized in that: The cross section of the sealing sleeve (121) is skirt-shaped or sheet-shaped; the cross section of part or all of the side wall of the sealing sleeve (121) is corrugated.

14. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 13, characterized in that: A first support ring (122) is fixedly provided on the inner edge of the sealing sleeve (121), and a second support ring (123) is fixedly provided on the outer edge; the first support ring (122) is detachably fixed and sealingly connected to the output end of the regulating assembly (50); and the second support ring (123) is detachably fixed and sealingly connected to the outer edge of the channel (112).

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