Slide rail buffer device for wafer bearing table

Abstract

The invention provides a slide rail buffer device for a wafer bearing table. The slide rail buffer device comprises a platform, the electric sliding rail is arranged on the platform, and a wafer bearing table is arranged on the electric sliding rail; the at least one slide rail buffer module is arranged on the wafer bearing table, the slide rail buffer module comprises a movable part, the fixed end of the movable part is fixed on the wafer bearing table, the movable end of the movable part is fixedly provided with an installation part, and the surface of the installation part is fixedly connected with a buffer pad; the control module is used for controlling the buffer pad on the movable end of the movable part to move to a position with a preset height between the buffer pad and the platform when the machine normally works, so that the buffer pad and the platform are not in contact; and when the machine is down, the buffer pad on the movable end of the movable part is controlled to be in contact with the platform, so that the wafer bearing platform stops buffering. According to the invention, the wafer bearing platform is transformed, the buffering stop of the wafer bearing platform after downtime is realized by additionally arranging the electrically controllable buffering device and changing the original motor self-locking mechanism, and the purpose of protecting the wafer bearing platform is achieved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a slide rail buffer device for a wafer carrier. Background Art

[0002] When the ASML Yield Star (optical measurement) machine encounters an abnormal situation and stops, it will issue instructions to each module for emergency stop in order to protect itself and the product. Because the wafer support platform is a precision moving part, when it encounters an emergency stop, there is a probability of damage to its own connection structure and the risk of wafer falling due to inertia.

[0003] In order to solve the above problems, it is necessary to propose a new type of wafer carrier slide rail buffer device. Summary of the invention

[0004] In view of the shortcomings of the prior art mentioned above, the purpose of the present invention is to provide a wafer carrier slide rail buffer device, which is used to solve the problem that the wafer carrier platform in the prior art is a precision moving component, and when encountering an emergency stop, there is a probability that its own connection structure will be damaged due to inertia and there is a risk of the wafer falling.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the present invention provides a wafer carrier slide rail buffer device, comprising:

[0006] platform;

[0007] An electric slide rail is arranged on the platform, and a wafer carrying platform is arranged on the electric slide rail;

[0008] At least one slide rail buffer module is arranged on the wafer carrying platform, the slide rail buffer module includes a movable part, a fixed end of the movable part is fixed on the wafer carrying platform, a mounting part is fixedly arranged on the movable end of the movable part, and a buffer pad is fixedly connected to the surface of the mounting part;

[0009] The control module is used to: when the machine is working normally, control the buffer pad on the movable end of the movable part to move to a position at a preset height between the movable part and the platform so that the two do not contact each other; when the machine is down, control the buffer pad on the movable end of the movable part to contact with the platform so that the wafer carrying platform stops buffering.

[0010] Preferably, the movable part comprises a fixed plate, one end of which is fixedly connected to the wafer supporting platform, and the other end of the fixed plate is connected to the movable plate via an electric rotating shaft.

[0011] Preferably, when the machine is working normally, the buffer pad is located at a preset height between the platform, the first motor for controlling the movement of the electric slide rail continues to work, and the second motor for controlling the rotation of the electric shaft stops working; when the machine fails, the first motor for controlling the movement of the electric slide rail continues to work, and the second motor for controlling the rotation of the electric shaft starts working, so that the buffer pad contacts the platform.

[0012] Preferably, the fixed plate, the movable plate and the electric rotating shaft are all made of stainless steel.

[0013] Preferably, the material of the buffer pad is nitrile rubber.

[0014] Preferably, the wafer supporting platform has a rectangular shape when viewed from a top view.

[0015] Preferably, the number of the slide rail buffer modules is 4, which are respectively arranged on the outer surfaces at the four corners of the wafer supporting platform.

[0016] Preferably, the device is used in an optical measuring machine.

[0017] As described above, the wafer carrier slide rail buffer device of the present invention has the following beneficial effects:

[0018] The present invention transforms the wafer carrying platform by adding an electrically controllable buffer device and changing the original motor self-locking mechanism, so as to achieve buffering stop of the wafer carrying platform after a machine failure, thereby achieving the purpose of protecting the wafer carrying platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the slide rail buffer device of the wafer carrier table when the machine of the present invention is working normally;

[0020] Figure 2 It is a schematic diagram of the slide rail buffer device of the wafer carrier when the machine is down. DETAILED DESCRIPTION

[0021] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0022] The present invention provides a wafer carrier slide rail buffer device, comprising:

[0023] Platform 101;

[0024] An electric slide rail is arranged on the platform 101, and a wafer carrying platform 102 is arranged on the electric slide rail;

[0025] At least one slide rail buffer module is arranged on the wafer carrier 102, and the slide rail buffer module includes a movable member 103, a fixed end of the movable member 103 is fixed on the wafer carrier 102, a mounting member 104 is fixedly arranged on the movable end of the movable member 103, and a buffer pad 105 is fixedly connected to the surface of the mounting member 104;

[0026] In an embodiment of the present invention, the movable member 103 includes a fixed plate 1031 , one end of the fixed plate 1031 is fixedly connected to the wafer carrier 102 , and the other end of the fixed plate 1031 is connected to the movable plate 1033 via an electric shaft 1032 .

[0027] In an embodiment of the present invention, when the machine is working normally, the buffer pad 105 is located at a preset height between the platform 101, the first motor for controlling the movement of the electric slide rail continues to work, and the second motor for controlling the rotation of the electric shaft 1032 stops working; when the machine is down, the first motor for controlling the movement of the electric slide rail continues to work, and the second motor for controlling the rotation of the electric shaft 1032 starts working, the second motor drives the electric shaft 1032 to rotate, and then drives the movable plate 1033 to rotate downward, so that the buffer pad 105 contacts the platform 101.

[0028] In the embodiment of the present invention, the materials of the fixed plate 1031 , the movable plate 1033 , and the electric rotating shaft 1032 are all made of stainless steel.

[0029] In the embodiment of the present invention, the material of the buffer pad 105 is nitrile rubber. In other embodiments, the material of the buffer pad 105 can also be other well-known friction-resistant materials.

[0030] In the embodiment of the present invention, the wafer supporting platform 102 is rectangular in shape when viewed from a top view.

[0031] In the embodiment of the present invention, the number of the slide rail buffer modules is four, which are respectively disposed on the outer surfaces of the four corners of the wafer carrying platform 102 .

[0032] In an embodiment of the present invention, the device is used in an optical measurement machine.

[0033] Control module, which is used to: See Figure 1 When the machine is operating normally, the buffer pad 105 on the movable end of the movable member 103 is controlled to move to a position at a preset height relative to the platform 101 so that the two do not come into contact; see Figure 2 When the machine stops working, the buffer pad 105 on the movable end of the movable member 103 is controlled to contact with the platform 101, so that the wafer carrying platform 101 stops buffering.

[0034] The control module includes:

[0035] Memory, used to store computer programs;

[0036] The processor is used to implement the steps of the above-mentioned mobile application debugging method when executing the program stored in the memory.

[0037] In addition, the electronic device may further include a communication bus and / or a communication interface, and the processor, the communication interface, and the memory communicate with each other via the communication bus. The communication bus mentioned in the electronic device may be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus. The communication bus may be divided into an address bus, a data bus, a control bus, and the like. For ease of representation, only one thick line is used in the figure, but it does not mean that there is only one bus or one type of bus.

[0038] The communication interface is used for communication between the above electronic device and other devices.

[0039] The memory may include a random access memory (RAM) or a non-volatile memory (NVM), such as at least one disk memory. Optionally, the memory may also be at least one storage device located away from the aforementioned processor.

[0040] The above-mentioned processor can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components.

[0041] In another embodiment provided in the present application, a computer-readable storage medium is provided, in which a computer program is stored. When the computer program is executed by a processor, the steps of any of the above-mentioned debugging methods for mobile applications are implemented.

[0042] In another embodiment provided by the present application, a computer program product including instructions is also provided, which, when executed on a computer, enables the computer to execute any mobile application debugging method of the above embodiments.

[0043] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loading and executing computer program instructions on a computer, the process or function according to the embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from a website site, a computer, a server or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, server or data center. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server, a data center, etc. that contains one or more available media integrated. The available medium can be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a solid-state hard disk Solid State Disk (SSD), etc.

[0044] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0045] In summary, the present invention transforms the wafer carrying platform, by adding an electrically controllable buffer device and changing the original motor self-locking mechanism, so as to achieve the buffer stop of the wafer carrying platform after the machine stops, thereby achieving the purpose of protecting the wafer carrying platform. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0046] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A wafer carrier slide rail buffer device, characterized in that: At least: platform; An electric slide rail is arranged on the platform, and a wafer carrying platform is arranged on the electric slide rail; At least one slide rail buffer module is arranged on the wafer carrying platform, the slide rail buffer module includes a movable part, a fixed end of the movable part is fixed on the wafer carrying platform, a mounting part is fixedly arranged on the movable end of the movable part, and a buffer pad is fixedly connected to the surface of the mounting part; The control module is used to: when the machine is working normally, control the buffer pad on the movable end of the movable part to move to a position at a preset height between the movable part and the platform so that the two do not contact each other; when the machine is down, control the buffer pad on the movable end of the movable part to contact with the platform so that the wafer carrying platform stops buffering.

2. The wafer carrier slide rail buffer device according to claim 1, characterized in that: The movable part comprises a fixed plate, one end of which is fixedly connected to the wafer carrying platform, and the other end of which is connected to the movable plate via an electric rotating shaft.

3. The wafer carrier slide rail buffer device according to claim 2, characterized in that: When the machine is operating normally, the buffer pad is located at a preset height between the platform, the first motor for controlling the movement of the electric slide rail continues to work, and the second motor for controlling the rotation of the electric shaft stops working; when the machine is down, the first motor for controlling the movement of the electric slide rail continues to work, and the second motor for controlling the rotation of the electric shaft starts working, so that the buffer pad contacts the platform.

4. The wafer carrier slide rail buffer device according to claim 2, characterized in that: The fixed plate, the movable plate and the electric rotating shaft are all made of stainless steel.

5. The wafer carrier slide rail buffer device according to claim 1, characterized in that: The material of the buffer pad is nitrile rubber.

6. The wafer carrier slide rail buffer device according to claim 1, characterized in that: The wafer supporting platform has a rectangular shape when viewed from a top view.

7. The wafer carrier slide rail buffer device according to claim 6, characterized in that: The number of the slide rail buffer modules is 4, and they are respectively arranged on the outer surfaces at the four corners of the wafer supporting platform.

8. The wafer carrier slide rail buffer device according to claim 1, characterized in that: The device is used for an optical measuring machine.

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