Ultra-high temperature measurement and control system and method for high temperature purification equipment

Abstract

The present invention discloses an ultra-high temperature measurement and control system and method for high-temperature purification equipment, including: a purification furnace, the purification furnace including a furnace body and a top cover, a temperature measurement interface being provided in the middle of the top cover; an infrared temperature measurement system, the infrared temperature measurement system including an adjustment bracket, the adjustment bracket being mounted on the top surface of the top cover, an infrared thermometer being mounted on the adjustment bracket, a temperature measurement glass assembly being detachably connected to the top of the temperature measurement interface, an emergency protection assembly being provided between the temperature measurement glass assembly and the top of the temperature measurement interface; a graphite temperature measurement system, the graphite temperature measurement system including a stepped graphite temperature measuring cylinder, the bottom end of which is detachably connected to a graphite temperature measuring cone; a debugging system, the debugging system including a nine-point temperature measuring bracket and a debugging temperature measuring cone. In the present invention, the stepped graphite temperature measuring cylinder transfers the heat absorbed from the inner portion of the insulation felt step by step to the insulation felt, and the temperature is lowered through three steps of insulation felt cooling and conduction, thereby solving the problem of melting steel parts on the upper portion of the furnace body and ensuring its safe operation.

Description

Technical Field

[0001] The present invention relates to the field of high-temperature measurement and control technology, and in particular to an ultra-high-temperature measurement and control system and method for high-temperature purification equipment. Background Art

[0002] High-temperature purification equipment is a type of vacuum thermal equipment. It uses advanced high-temperature purification technology to evaporate impurity elements in materials such as graphite, carbon felt, and graphite powder or generate low-melting-point halides through ultra-high temperature (≥2300°C) vacuum atmosphere and process gas, and then remove them from the product itself to achieve the purpose of purification. These purified materials are the basic materials for the production of third-generation semiconductor SiC substrate materials.

[0003] In existing technology, the temperature in the measurement area of ​​high-temperature purification equipment's measurement and control systems can reach 2300-2400°C. The temperature measurement device inside the insulation felt is made of high-temperature-resistant graphite. However, graphite has excellent thermal conductivity, so it is necessary to prevent the high temperature from being transferred to the furnace body and melting the steel components inside. Furthermore, because the temperature measurement point is not allowed to enter the active area of ​​the high-temperature purification equipment (doing so would reduce the volume of the active area), the temperature at the measurement point of the measurement and control system deviates from the temperature of the active space, resulting in inaccurate temperature measurements.

[0004] Based on the above technical problems, the present invention provides an ultra-high temperature measurement and control system and method for high-temperature purification equipment. Summary of the Invention

[0005] The purpose of the present invention is to provide an ultra-high temperature measurement and control system for high temperature purification equipment to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the present invention provides the following solution: The present invention provides an ultra-high temperature measurement and control system for high-temperature purification equipment, comprising:

[0007] A purification furnace, comprising a furnace body and a top cover, wherein the top cover is fixed to the top of the furnace body, and a temperature measurement interface is provided in the middle of the top cover;

[0008] An infrared temperature measurement system, comprising an adjustment bracket mounted on the top surface of the top cover, an infrared thermometer mounted on the adjustment bracket, a temperature measuring glass assembly detachably connected to the top of the temperature measuring interface, the infrared temperature measurement system corresponding to the temperature measuring glass assembly, and an emergency protection assembly disposed between the temperature measuring glass assembly and the top of the temperature measuring interface;

[0009] A graphite temperature measuring system, comprising a stepped graphite temperature measuring cylinder, the stepped graphite temperature measuring cylinder being coaxially and detachably connected to the bottom of the temperature measuring interface, the bottom of the stepped graphite temperature measuring cylinder extending into the furnace body, and a graphite temperature measuring cone being detachably connected to the bottom end of the stepped graphite temperature measuring cylinder;

[0010] The debugging system includes a nine-point temperature measuring bracket and a debugging temperature measuring cone. The nine-point temperature measuring bracket is detachably connected to the effective area of ​​the furnace body. The debugging temperature measuring cone is detachably connected to the bottom end of the stepped graphite temperature measuring cylinder. The bottom of the debugging temperature measuring cone is installed with a calibration point, and the calibration point is set corresponding to the infrared thermometer.

[0011] According to the ultra-high temperature measurement and control system of high-temperature purification equipment provided by the present invention, the adjustment bracket includes a base fixedly connected to the top cover, the top surface of the base is fixedly connected to a support rod, the top of the support rod is fixedly connected to a first manual adjustment slide, the top of the first manual adjustment slide is installed with a second manual adjustment slide, the sliding directions of the first manual adjustment slide and the second manual adjustment slide are perpendicular, the top of the second manual adjustment slide is fixedly connected with a mounting plate, the mounting plate is provided with a mounting slot, and the infrared thermometer is installed in the mounting slot.

[0012] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the temperature measuring glass assembly includes a glass top plate and a glass bottom plate, both of which are annular structures. A mounting cavity is formed between the glass top plate and the glass bottom plate, and quartz glass is installed in the mounting cavity. Sealing rings are respectively provided between the top and bottom surfaces of the quartz glass and the inner wall of the mounting cavity. The glass top plate and the glass bottom plate are fixedly connected by fastening bolts.

[0013] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the emergency protection component includes an emergency hand valve, a connecting piece is fixedly connected to the bottom of the glass bottom plate, a connecting piece is provided between the bottom of the emergency hand valve and the temperature measuring interface, the connecting piece and the top of the emergency hand valve are coaxially and detachably connected via a clamp, and the sealing ring is respectively provided between the connecting piece, the temperature measuring interface and the clamp.

[0014] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the top end of the stepped graphite temperature measuring cylinder is fixedly connected to a metal threaded sleeve, and the stepped graphite temperature measuring cylinder is fixedly connected to the bottom end of the temperature measuring interface through the metal threaded sleeve.

[0015] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the metal threaded sleeve fits in place with the cooling water channel on the top cover.

[0016] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, a thermal insulation ring is installed at the bottom end of the stepped graphite temperature measuring cylinder.

[0017] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the calibration point includes a calibration light source, a through hole is opened at the bottom of the debugging temperature measuring cone, the calibration light source is fixed in the through hole, and the calibration light source and the infrared thermometer are arranged correspondingly.

[0018] The ultra-high temperature measurement and control method for high temperature purification equipment includes the following steps:

[0019] Step 1: Fix the infrared thermometer to the top of the top cover by adjusting the bracket, install the emergency protection component and the temperature measuring glass component on the top of the temperature measuring interface in sequence, and cut a stepped through hole in the middle of the insulation felt in the furnace body to correspond to the stepped graphite temperature measuring cylinder;

[0020] Step 2: The debugging temperature measuring cone is installed at the bottom of the stepped graphite temperature measuring cylinder for debugging. The calibration point shows the temperature measuring position. The position of the infrared thermometer is adjusted by adjusting the bracket. After the infrared thermometer cursor captures the temperature measuring point, the bracket is fixed and adjusted, and the debugging temperature measuring cone is replaced with the graphite temperature measuring cone.

[0021] Step 3: Fix the nine-point temperature measuring bracket in the effective area inside the furnace body, install thermocouples at the nine temperature measuring points of the nine-point temperature measuring bracket respectively, connect the thermocouples at the nine points to the temperature control meter outside the furnace body, close the furnace door, and heat the temperature inside the furnace body from room temperature to 1000°C. Record the temperature values ​​of the nine points and the infrared thermometer. Since the temperature range of the thermocouple cannot be tested, mathematical modeling software is needed to simulate the corresponding relationship between the thermocouple and the infrared thermometer above 1000°C. The corresponding relationship between the two is as follows;

[0022] Y=0.9406X+82.1601

[0023] Among them, Y is the temperature value at nine points; X is the test temperature value of the infrared thermometer;

[0024] Step 4: After cooling, open the furnace door, remove the thermocouple and the nine-point temperature measuring bracket, and add the relationship obtained by the mathematical modeling software to the PLC temperature control system of the high-temperature purification equipment for temperature compensation.

[0025] The present invention discloses the following technical effects:

[0026] 1. The stepped graphite temperature measuring tube in the present invention transfers the absorbed heat to the insulation felt step by step through the steps. Through the cooling conduction of the insulation felt three times, the temperature of the graphite temperature measuring tube transmitted to the outside of the insulation felt is reduced, thereby solving the melting phenomenon of the steel parts on the upper part of the furnace body and ensuring its safe operation.

[0027] 2. The present invention can debug the temperature measurement before measurement and control by debugging the setting of the temperature measuring cone, ensuring that the temperature measuring point of the infrared thermometer of the measurement and control system is consistent with the temperature measuring point on the graphite temperature measuring cone. At the same time, the setting of the nine-point temperature measuring bracket can form a correspondence between the measured value of the infrared thermometer and the actual value. A mathematical model is formed through the corresponding relationship for subsequent temperature output value compensation to ensure the accuracy of temperature measurement of high-temperature purification equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 This is a schematic diagram of the structure of the ultra-high temperature measurement and control system for high-temperature purification equipment of the present invention;

[0030] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0031] Figure 3 for Figure 1 Enlarged view of point B in the middle;

[0032] Figure 4 for Figure 1 Enlarged view of point C in the middle;

[0033] Figure 5 Axonometric diagram of the ultra-high temperature measurement and control system for high-temperature purification equipment of the present invention

[0034] Figure 6 for Figure 5 Enlarged view of point D in the middle;

[0035] Figure 7 This is a schematic diagram of the structure of the temperature measuring cone debugged in the present invention;

[0036] Figure 8 This is a structural diagram of the nine-point temperature measurement bracket of the present invention.

[0037] Figure 9 Relationship curve simulated by mathematical modeling software

[0038] Among them, 1. Furnace body; 2. Top cover; 3. Temperature measurement interface; 4. Infrared thermometer; 5. Stepped graphite temperature measuring tube; 6. Graphite temperature measuring cone; 7. Nine-point temperature measuring bracket; 8. Debugging temperature measuring cone; 9. Base; 10. Support rod; 11. First manual adjustment slide; 12. Second manual adjustment slide; 13. Mounting plate; 14. Mounting slot; 15. Glass top plate; 16. Glass bottom plate; 17. Quartz glass; 18. Sealing ring; 19. Emergency hand valve; 20. Clamp; 21. Metal threaded sleeve; 22. Insulation ring; 23. Calibration light source. DETAILED DESCRIPTION

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0040] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0041] Reference Figures 1-8 The present invention provides an ultra-high temperature measurement and control system for high temperature purification equipment, comprising:

[0042] The purification furnace comprises a furnace body 1 and a top cover 2, wherein the top cover 2 is fixed on the top of the furnace body 1, and a temperature measurement interface 3 is provided in the middle of the top cover 2;

[0043] Infrared temperature measurement system, the infrared temperature measurement system includes an adjustment bracket, the adjustment bracket is installed on the top surface of the top cover 2, an infrared thermometer 4 is installed on the adjustment bracket, the top of the temperature measurement interface 3 is detachably connected to a temperature measuring glass assembly, the infrared temperature measurement system is correspondingly arranged with the temperature measuring glass assembly, and an emergency protection assembly is provided between the temperature measuring glass assembly and the top of the temperature measurement interface 3;

[0044] A graphite temperature measuring system, comprising a stepped graphite temperature measuring cylinder 5, which is coaxially and detachably connected to the bottom of the temperature measuring interface 3, the bottom of which extends into the furnace body 1, and a graphite temperature measuring cone 6 is detachably connected to the bottom end of the stepped graphite temperature measuring cylinder 5;

[0045] The debugging system includes a nine-point temperature measuring bracket 7 and a debugging temperature measuring cone 8. The nine-point temperature measuring bracket 7 is detachably connected to the effective area within the furnace body 1. The debugging temperature measuring cone 8 is detachably connected to the bottom end of the stepped graphite temperature measuring cylinder 5. A calibration point is installed at the bottom of the debugging temperature measuring cone 8, and the calibration point is set corresponding to the infrared thermometer 4.

[0046] A further optimized solution is that the adjustment bracket includes a base 9 fixedly connected to the top cover 2, the top surface of the base 9 is fixedly connected to a support rod 10, the top of the support rod 10 is fixedly connected to a first manual adjustment slide 11, the top of the first manual adjustment slide 11 is installed with a second manual adjustment slide 12, the sliding directions of the first manual adjustment slide 11 and the second manual adjustment slide 12 are perpendicular, the top of the second manual adjustment slide 12 is fixedly connected with a mounting plate 13, the mounting plate 13 is provided with a mounting slot 14, and the infrared thermometer 4 is installed in the mounting slot 14.

[0047] The position of the infrared thermometer 4 can be adjusted by the cooperation of the first manual adjustment slide 11 and the second manual adjustment slide 12. The first manual adjustment slide 11 and the second manual adjustment slide 12 both adopt existing technologies.

[0048] A further optimized solution is provided, in which the temperature measuring glass assembly includes a glass top plate 15 and a glass bottom plate 16, both of which are annular structures. A mounting cavity is formed between the glass top plate 15 and the glass bottom plate 16, and a quartz glass 17 is installed in the mounting cavity. Sealing rings 18 are respectively provided between the top and bottom surfaces of the quartz glass 17 and the inner wall of the mounting cavity, and the glass top plate 15 and the glass bottom plate 16 are fixedly connected by fastening bolts.

[0049] A further optimized solution is provided, in which the emergency protection assembly includes an emergency hand valve 19, a connecting piece is fixedly connected to the bottom of the glass bottom plate 16, a connecting piece is provided between the bottom of the emergency hand valve 19 and the temperature measuring interface 3, and the connecting piece and the top of the emergency hand valve 19 are coaxially and detachably connected via a clamp 20, and the sealing ring 18 is respectively provided between the connecting piece, the temperature measuring interface 3 and the clamp 20.

[0050] During the operation of high-temperature purification equipment, if fine carbon particles enter the measurement and control system, they may float to the inner surface of the quartz glass 17, causing temperature distortion in the infrared thermometer 4. To address this issue, an emergency manual valve 19 is provided to isolate the temperature measuring glass assembly from the high-temperature purification equipment. The clamp 20 is then disassembled, the temperature measuring glass assembly is removed, and the carbon particles on the quartz glass 17 are cleaned. After cleaning, the glass assembly is reinstalled into the high-temperature purification equipment. The manual valve is opened, and the glass temperature measuring assembly is reconnected to the equipment. This solves the problem of fine carbon particles entering the measurement and control system during operation, causing temperature distortion in the infrared thermometer 4. Furthermore, the equipment does not need to be cooled, thus preventing any impact on equipment operation.

[0051] A further optimization scheme features a metal threaded sleeve 21 fixedly connected to the top of the stepped graphite temperature measuring cylinder 5, which is then fixedly connected to the bottom of the temperature measuring interface 3 via the metal threaded sleeve 21. The metal threaded sleeve 21 features a G-thread connection, effectively sealing the interior of the measurement and control system, preventing fine carbon particles from entering and affecting temperature measurement accuracy. The top cover 2 is designed so that its water channel is closely aligned with the metal threaded sleeve 21, further reducing its temperature and preventing melting of the upper steel components of the furnace body 1, thereby ensuring safe operation.

[0052] In a further optimization, the metal threaded sleeve 21 mates with the cooling water channel on the top cover 2. The stepped graphite temperature measuring tube 5 gradually transfers heat absorbed from the insulation felt to the insulation felt itself, lowering the temperature through three passes of cooling conduction through the insulation felt. Furthermore, the stepped shape increases the graphite's heat conduction path, further reducing the surface temperature of the metal threaded sleeve 21.

[0053] As a further optimization solution, a thermal insulation ring 22 is installed at the bottom end of the stepped graphite temperature measuring cylinder 5 .

[0054] According to a further optimization scheme, the calibration point includes a calibration light source 23 , a through hole is provided at the bottom of the debugging temperature measuring cone 8 , the calibration light source 23 is fixed in the through hole, and the calibration light source 23 is correspondingly arranged with the infrared thermometer 4 .

[0055] The ultra-high temperature measurement and control method for high temperature purification equipment includes the following steps:

[0056] Step 1: Fix the infrared thermometer 4 on the top of the top cover 2 by adjusting the bracket, install the emergency protection component and the temperature measuring glass component on the top of the temperature measuring interface 3 in sequence, and cut a stepped through hole in the middle of the insulation felt in the furnace body 1 to correspond to the stepped graphite temperature measuring cylinder 5;

[0057] Step 2: The debugging temperature measuring cone 8 is installed at the bottom of the stepped graphite temperature measuring cylinder 5 for debugging. The calibration point shows the temperature measuring position. The position of the infrared thermometer 4 is adjusted by adjusting the bracket. After the infrared thermometer 4 cursor captures the temperature measuring point, the bracket is fixed and adjusted, and the debugging temperature measuring cone 8 is replaced with the graphite temperature measuring cone 6.

[0058] Step three, the nine-point temperature measuring bracket 7 is fixed to the effective area in the furnace body 1, and thermocouples are installed at the nine temperature measuring points of the nine-point temperature measuring bracket 7. The thermocouples at the nine points are connected to the temperature control meter outside the furnace body 1. The furnace door is closed, and the temperature in the furnace body 1 is heated from room temperature to 1000°C. The temperature values ​​of the nine points and the infrared thermometer 4 are recorded. Since the temperature resistance of the thermocouple cannot be fully tested, it is necessary to use mathematical modeling software to simulate the corresponding relationship between the thermocouple above 1000°C and the infrared thermometer 4. The corresponding relationship between the two is as follows;

[0059] Y=0.9406X+82.1601

[0060] Among them, Y is the temperature value at nine points; X is the test temperature value of infrared thermometer 4;

[0061] Step 4: After cooling, open the furnace door, remove the thermocouple and the nine-point temperature measuring bracket 7, and add the relationship obtained by the mathematical modeling software to the PLC temperature control system of the high-temperature purification equipment for temperature compensation.

[0062] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0063] The embodiments described above are merely descriptions of preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Without departing from the spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by persons skilled in the art should fall within the scope of protection defined by the claims of the present invention.

Claims

1. Ultra-high temperature measurement and control system for high temperature purification equipment, characterized in that: include: A purification furnace, comprising a furnace body (1) and a top cover (2), wherein the top cover (2) is fixed to the top of the furnace body (1), and a temperature measurement interface (3) is provided in the middle of the top cover (2); An infrared temperature measurement system, comprising an adjustment bracket, the adjustment bracket being mounted on the top surface of the top cover (2), an infrared thermometer (4) being mounted on the adjustment bracket, a temperature measuring glass component being detachably connected to the top of the temperature measuring interface (3), the infrared temperature measurement system being arranged corresponding to the temperature measuring glass component, and an emergency protection component being arranged between the temperature measuring glass component and the top of the temperature measuring interface (3); A graphite temperature measuring system, comprising a stepped graphite temperature measuring cylinder (5), the stepped graphite temperature measuring cylinder (5) being coaxially and detachably connected to the bottom of the temperature measuring interface (3), the bottom of the stepped graphite temperature measuring cylinder (5) extending into the furnace body (1), and the bottom end of the stepped graphite temperature measuring cylinder (5) being detachably connected to a graphite temperature measuring cone (6); A debugging system, the debugging system comprising a nine-point temperature measuring bracket (7) and a debugging temperature measuring cone (8), the nine-point temperature measuring bracket (7) being detachably connected to an effective area within the furnace body (1), the debugging temperature measuring cone (8) being detachably connected to the bottom end of the stepped graphite temperature measuring cylinder (5), the bottom of the debugging temperature measuring cone (8) being provided with a calibration point, the calibration point being arranged corresponding to the infrared thermometer (4).

2. The ultra-high temperature measurement and control system for high-temperature purification equipment according to claim 1, characterized in that: The adjustment bracket includes a base (9) fixedly connected to the top cover (2), the top surface of the base (9) is fixedly connected to a support rod (10), the top end of the support rod (10) is fixedly connected to a first manually adjustable slide (11), the top end of the first manually adjustable slide (11) is installed with a second manually adjustable slide (12), the sliding directions of the first manually adjustable slide (11) and the second manually adjustable slide (12) are perpendicular, the top end of the second manually adjustable slide (12) is fixedly connected to a mounting plate (13), the mounting plate (13) is provided with a mounting slot (14), and the infrared thermometer (4) is installed in the mounting slot (14).

3. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The temperature measuring glass assembly comprises a glass top plate (15) and a glass bottom plate (16), both of which are annular structures. A mounting cavity is formed between the glass top plate (15) and the glass bottom plate (16), and quartz glass (17) is installed in the mounting cavity. Sealing rings (18) are respectively provided between the top and bottom surfaces of the quartz glass (17) and the inner wall of the mounting cavity. The glass top plate (15) and the glass bottom plate (16) are fixedly connected by fastening bolts.

4. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 3, characterized in that: The emergency protection component comprises an emergency hand valve (19), a connecting piece is fixedly connected to the bottom of the glass bottom plate (16), a connecting piece is provided between the bottom of the emergency hand valve (19) and the temperature measuring interface (3), the connecting piece and the top of the emergency hand valve (19) are coaxially detachably connected via a clamp (20), and the sealing ring (18) is provided between the connecting piece, the temperature measuring interface (3) and the clamp (20).

5. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The top end of the stepped graphite temperature measuring cylinder (5) is fixedly connected to a metal threaded sleeve (21), and the stepped graphite temperature measuring cylinder (5) is fixedly connected to the bottom end of the temperature measuring interface (3) via the metal threaded sleeve (21).

6. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 5, characterized in that: The metal threaded sleeve (21) is fitted with the cooling water channel on the top cover (2).

7. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: A heat preservation ring (22) is installed at the bottom end of the stepped graphite temperature measuring cylinder (5).

8. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The calibration point includes a calibration light source (23); a through hole is provided at the bottom of the debugging temperature measuring cone (8); the calibration light source (23) is fixed in the through hole; and the calibration light source (23) and the infrared thermometer (4) are correspondingly arranged.

9. An ultra-high temperature measurement and control method for high temperature purification equipment, based on the ultra-high temperature measurement and control system for high temperature purification equipment according to any one of claims 1 to 8, characterized in that: The steps include: Step 1: fix the infrared thermometer (4) on the top of the top cover (2) by adjusting the bracket, install the emergency protection component and the temperature measuring glass component on the top of the temperature measuring interface (3) in sequence, and cut a stepped through hole in the middle of the insulation felt in the furnace body (1) to correspond to the stepped graphite temperature measuring cylinder (5); Step 2: The temperature measuring cone (8) is installed at the bottom of the stepped graphite temperature measuring cylinder (5) for debugging. The calibration point displays the temperature measuring position. The position of the infrared thermometer (4) is adjusted by adjusting the bracket. After the infrared thermometer (4) cursor captures the temperature measuring point, the bracket is fixed and adjusted, and the debugging temperature measuring cone (8) is replaced with the graphite temperature measuring cone (6); Step 3: The nine-point temperature measuring bracket (7) is fixed in the effective area of ​​the furnace body (1), and thermocouples are respectively installed at the nine temperature measuring points of the nine-point temperature measuring bracket (7). The thermocouples at the nine-point positions are connected to the temperature control meter outside the furnace body (1). The furnace door is closed, and the temperature inside the furnace body (1) is heated from room temperature to 1000°C. The temperature values ​​of the nine points and the infrared thermometer (4) are recorded. Since the temperature resistance of the thermocouple cannot be tested in the full range, it is necessary to use mathematical modeling software to simulate the corresponding relationship between the thermocouple above 1000°C and the infrared thermometer (4). The corresponding relationship between the two is as follows; Y=0.9406X+82.1601 Wherein, Y is the temperature value at nine points; X is the test temperature value of the infrared thermometer (4); Step 4: After cooling, open the furnace door, remove the thermocouple and the nine-point temperature measuring bracket (7), and add the relationship obtained by the mathematical modeling software to the PLC temperature control system of the high-temperature purification equipment for temperature compensation.

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