Vacuum gauge zeroing method and semiconductor device

Abstract

The invention provides a vacuum gauge zeroing method and semiconductor equipment. The method comprises the following steps: when a semiconductor device obtains a process task, if it is judged that a vacuum gauge needs to be zeroed according to zeroing identification information and preset identification information of the vacuum gauge, obtaining an observation value set and a reference value set, and generating a zeroing curve of the vacuum gauge according to the observation value set and the reference value set, and zero setting is carried out on the vacuum gauge based on the zero setting curve. According to the zero setting mode, for the vacuum gauge needing zero setting, software zero setting is carried out by generating the zero setting curve corresponding to the vacuum gauge, and compared with an existing hardware zero setting mode, the zero setting efficiency of the vacuum gauge is improved, and the productivity of semiconductor equipment is improved; meanwhile, whether the vacuum gauge needs to be zeroed or not can be quickly judged according to the zeroing identification information of the vacuum gauge, failure of a process task to be operated is avoided, and the process quality of a semiconductor equipment product is ensured.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a vacuum gauge zeroing method and semiconductor equipment. Background Art

[0002] In the process, processes such as vertical furnace annealing have very high requirements on the pressure conditions of the chamber. Usually, the chamber pressure is measured in real time by a vacuum gauge and fed back to the pressure controller so that the pressure controller can control the pressure of the chamber. Among them, the vacuum gauge will have different zero drifts under different operating conditions. If it is not zeroed, it will affect the pressure control accuracy and even the process results. Therefore, it is of great significance to zero the vacuum gauge.

[0003] The existing method mainly performs hardware zeroing of the vacuum gauge by rotating or pressing a zeroing button, but the cycle of hardware zeroing is relatively frequent, thereby reducing the production capacity of semiconductor equipment; in addition, during hardware zeroing, if the semiconductor equipment is executing the bottom pumping process of a process task (Job) or process recipe (i.e., pumping out the gas in the chamber to put the chamber in a vacuum state), excessive zero drift of the vacuum gauge will cause bottom pumping failure, resulting in a situation where the process abnormality needs to be terminated. At this time, the silicon wafer that has entered the chamber is affected by the process performance indicators, etc., and the risk of bottom pumping failure cannot be identified in advance and avoided, which will also affect the process quality of the product and is not convenient for promotion and implementation in practical applications. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a vacuum gauge zeroing method and a semiconductor device to alleviate at least some of the technical problems in the above-mentioned hardware zeroing method.

[0005] In a first aspect, an embodiment of the present invention provides a vacuum gauge zeroing method, which is applied to semiconductor equipment; wherein the semiconductor equipment includes a chamber, and a reference vacuum gauge and at least one vacuum gauge arranged at the exhaust end of the chamber; the method includes: when the semiconductor equipment obtains a process task, obtaining the zeroing identification information of the vacuum gauge; judging whether the vacuum gauge needs to be zeroed according to the zeroing identification information and the preset identification information; if the vacuum gauge needs to be zeroed, obtaining an observation value set and a reference value set, and generating a zeroing curve of the vacuum gauge according to the observation value set and the reference value set; wherein the observation value set includes multiple pressure observation values, the reference value set includes multiple pressure reference values, the pressure observation values ​​are used to characterize the pressure values ​​collected by the vacuum gauge at multiple pressure points, the pressure reference values ​​are used to characterize the pressure values ​​collected by the reference vacuum gauge at multiple pressure points, and the pressure points are used to characterize different pressure values ​​within the range of the vacuum gauge; and performing software zeroing on the vacuum gauge based on the zeroing curve.

[0006] Preferably, after performing software zeroing on the vacuum gauge based on the zeroing curve, the method further comprises: if the software zeroing fails, performing hardware zeroing on the vacuum gauge.

[0007] Preferably, the step of performing software zeroing on the vacuum gauge based on the zeroing curve includes: determining the pressure detection values ​​corresponding to multiple pressure points according to the zeroing curve; wherein the pressure detection value is used to characterize the pressure value of the vacuum gauge at the pressure point after zeroing; calculating the pressure difference value of the pressure point according to the pressure detection value and the pressure reference value corresponding to each pressure point; obtaining the pressure accuracy range values ​​of the reference vacuum gauge at multiple pressure points, and determining whether the pressure difference value of each pressure point is not greater than the corresponding pressure accuracy range value; if so, determining that the software zeroing of the vacuum gauge is successful.

[0008] Preferably, the method further comprises: if there is at least one pressure point where the pressure difference is greater than the corresponding pressure accuracy range value, generating an alarm prompt message to indicate that the software zeroing has failed.

[0009] Preferably, the step of performing hardware zeroing on the vacuum gauge comprises: performing zeroing on the vacuum gauge in response to a rotation operation of the vacuum gauge by a user.

[0010] Preferably, the vacuum gauge is further provided with a zero adjustment button, and the step of performing hardware zero adjustment on the vacuum gauge comprises: zeroing the vacuum gauge in response to a user pressing the zero adjustment button.

[0011] Preferably, before the step of obtaining a set of observation values ​​and a set of reference values, the method further includes: controlling the pressure in the chamber to within the range of the vacuum gauge and controlling the chamber to be in a vacuum state; and, within the range, adjusting the pressure value in the chamber to obtain multiple pressure points.

[0012] Preferably, the preset identification information includes first identification information and second identification information; the step of judging whether the vacuum gauge needs to be zeroed according to the zeroing identification information and the preset identification information includes: if the zeroing identification information is the first identification information, judging that the vacuum gauge does not need to be zeroed; or, if the zeroing identification information is the second identification information, judging that the vacuum gauge needs to be zeroed.

[0013] Preferably, the method further comprises: if the vacuum gauge does not need to be zeroed, controlling the semiconductor equipment to execute a process task.

[0014] In a second aspect, an embodiment of the present invention further provides a semiconductor device, comprising a controller and a chamber, wherein a reference vacuum gauge and at least one vacuum gauge are arranged at the exhaust end of the chamber; the controller is used to perform software zeroing on the vacuum gauge using the vacuum gauge zeroing method of the first aspect mentioned above.

[0015] In a third aspect, an embodiment of the present invention further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the vacuum gauge zeroing method of the first aspect are executed.

[0016] The embodiments of the present invention bring the following beneficial effects:

[0017] The embodiment of the present invention provides a vacuum gauge zeroing method and semiconductor equipment. When the semiconductor equipment obtains a process task, if it is determined that the vacuum gauge needs to be zeroed according to the zeroing identification information and preset identification information of the vacuum gauge, an observation value set and a reference value set are obtained, and a zeroing curve of the vacuum gauge is generated according to the observation value set and the reference value set, so as to perform software zeroing on the vacuum gauge based on the zeroing curve. In the above zeroing method, for the vacuum gauge that needs to be zeroed, software zeroing is performed by generating a zeroing curve corresponding to the vacuum gauge. Compared with the existing hardware zeroing method, the vacuum gauge zeroing efficiency is improved and the zeroing frequency is reduced. For example, the hardware manual zeroing cycle in months is extended to years, which significantly reduces the hardware maintenance frequency of semiconductor equipment and improves the production capacity of semiconductor equipment. At the same time, according to the zeroing identification information of the vacuum gauge, it can be quickly determined whether the vacuum gauge needs to be zeroed, avoiding the failure of the process task Job or process recipe to be run, and ensuring the process quality of semiconductor equipment products.

[0018] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the structure of a semiconductor device provided by an embodiment of the present invention;

[0022] Figure 2 A flow chart of a vacuum gauge zeroing method provided in an embodiment of the present invention;

[0023] Figure 3It is a schematic diagram of the operation process of an existing semiconductor device;

[0024] Figure 4 A schematic diagram of another operation flow of a semiconductor device provided by an embodiment of the present invention;

[0025] Figure 5 A schematic structural diagram of another semiconductor device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] To facilitate understanding of this embodiment, the vacuum gauge zeroing method provided by the embodiment of the present invention is described in detail below. The method is applied to semiconductor equipment. It should be noted that the semiconductor equipment can be a vertical furnace equipment, and the embodiment of the present invention does not limit the type of semiconductor process equipment.

[0028] Specifically, Figure 1 As shown, the semiconductor device includes a controller (not shown) and a chamber 10, wherein the chamber 10 includes an air inlet end 11 and an exhaust end 12, and a reference vacuum gauge 23 and at least one vacuum gauge are arranged at the exhaust end 12; illustratively, the vacuum gauge here includes a first vacuum gauge 21 and a second vacuum gauge 22, and a first pneumatic valve 31 is arranged between the first vacuum gauge 21 and the exhaust end 12, which is used to control the working state of the first vacuum gauge 21, such as when the first pneumatic valve 31 is opened, the first vacuum gauge 21 is used to detect the pressure of the chamber 10; when the first pneumatic valve 31 is closed, at this time, the first vacuum gauge 21 cannot detect the pressure of the chamber 10, and the pressure of the chamber 10 is detected by the second vacuum gauge 22; in addition, a second pneumatic valve 32 is arranged between the reference vacuum gauge 23 and the exhaust end 12, which is used to control the working state of the reference vacuum gauge 23.

[0029] It should be noted that the ranges of the first vacuum gauge 21, the second vacuum gauge 22 and the reference vacuum gauge 23 may be the same or different. For example, the range of the first vacuum gauge 21 is set to 10T, the range of the second vacuum gauge 22 is set to 1000T, and the range of the reference vacuum gauge 23 is set to 1000T. The specific ranges can be set according to actual conditions. In addition, the reference vacuum gauge 23 does not participate in the process, but is only used to measure whether the accuracy of the other vacuum gauges is within the standard specification Spec, so as to judge the zero drift of the vacuum gauge.

[0030] In addition, the above-mentioned semiconductor equipment also includes a pressure controller 40 and a vacuum pump 50 connected to the exhaust end 12. Specifically, when the chamber 10 is bottom-pumped and the air inlet valve of the air inlet end 11 is closed, the angle of the pressure controller 40 is controlled to increase, and the vacuum pump 50 is controlled to evacuate the chamber 10 and process the exhaust gas, etc., until the chamber 10 is in a vacuum state (also referred to as a bottom-pumping state).

[0031] Furthermore, the controller can be a host computer or a slave computer. The controller can control the valve of the air inlet component to open so as to introduce the corresponding process gas into the chamber 10; the controller can also control the opening and closing degree of the valve of the air inlet component to control the flow rate of the process gas. The controller can also control the exhaust component to exhaust the inside of the chamber 10 to control the pressure inside the chamber 10, discharge reaction byproducts, etc.

[0032] Therefore, for the above-mentioned first vacuum gauge 21 and the second vacuum gauge 22, when a vacuum gauge has zero drift, the controller is used to perform software zeroing on the vacuum gauge using the vacuum gauge zeroing method provided in the embodiment of the present invention. Compared with the existing hardware zeroing, the vacuum gauge zeroing efficiency is improved and the zeroing frequency is reduced. For example, the hardware manual zeroing cycle in months is extended to years, which significantly reduces the hardware maintenance frequency of semiconductor equipment and improves the production capacity of semiconductor equipment. At the same time, it can be determined whether the vacuum gauge needs to be zeroed based on the zeroing identification information of the vacuum gauge, thereby avoiding the failure of the process task (Job) or process recipe (recipe) to be run, and ensuring the process quality of semiconductor equipment products.

[0033] Embodiment 1:

[0034] Based on the above semiconductor device, an embodiment of the present invention provides a vacuum gauge zeroing method, such as Figure 2 As shown, the method comprises the following steps:

[0035] Step S202, when the semiconductor device obtains a process task, the zeroing identification information of the vacuum gauge is obtained;

[0036] In practical applications, such as Figure 3As shown, the operation process of the existing semiconductor equipment is as follows: ① Before and after the semiconductor equipment runs a process task Job or a process recipe Recipe, the semiconductor equipment is in an idle state. At this time, the machine (i.e., the semiconductor equipment) runs the Idle Recipe, where the Idle Recipe refers to the recipe in which the machine remains in an idle state; ② After receiving a Job or Recipe instruction, the semiconductor equipment starts to execute the Job; ③ The semiconductor equipment starts to run the process recipe (Process Recipe), such as entering the bottom pumping process, until the bottom pumping of the chamber of the semiconductor equipment is completed; ④ After the bottom pumping is completed, the semiconductor equipment executes the Process Recipe normally until the Job is completed, and is in an idle state again after the Job is completed.

[0037] Therefore, in order to avoid excessive zero drift of the vacuum gauge during the process, which may lead to process failure, the embodiment of the present invention configures zero adjustment identification information for each vacuum gauge, and the zero adjustment identification information is used to characterize the zero drift information of the vacuum gauge. When the semiconductor device obtains a process task Job or a process recipe Recipe, the controller first determines the zero drift situation of each vacuum gauge according to the zero adjustment identification information, so that when the zero drift is too large, the vacuum gauge is zeroed first, thereby avoiding process failure due to excessive zero drift of the vacuum gauge during the execution of the process task to be run.

[0038] Step S204, judging whether the vacuum gauge needs to be zeroed according to the zeroing identification information and the preset identification information;

[0039] Among them, the preset identification information includes the first identification information and the second identification information; here, the first identification information is used to indicate that the zero drift of the vacuum gauge is small or does not exist, and there is no need to adjust the zero, and the second identification information is used to indicate that the zero drift of the vacuum gauge is large or too large, and there is a need to adjust the zero. In practical applications, the above preset identification information can be represented in digital form, such as the first identification information is 0 and the second identification information is 1; it can also be represented in text form, such as the first identification information is no and the second identification information is yes; or the first identification information is false and the second identification information is true; the specific representation form of the first identification information and the second identification information can be set according to the actual situation. For the convenience of explanation in the embodiment of the present invention, the first identification information is preferably 0 and the second identification information is preferably 1.

[0040] Specifically, if the zeroing identification information is the first identification information, it is determined that the vacuum gauge does not need to be zeroed; if the zeroing identification information is the second identification information, it is determined that the vacuum gauge needs to be zeroed. Figure 1Taking the first vacuum gauge in as an example, if the zeroing identification information of the first vacuum gauge is 0, it is determined that the first vacuum gauge does not need to be zeroed, and the first vacuum gauge can normally detect the pressure of the chamber during the execution of subsequent process tasks; if the zeroing identification information of the first vacuum gauge is 1, it is determined that the first vacuum gauge needs to be zeroed. At this time, if the first vacuum gauge is not zeroed and continues to detect the pressure of the chamber in subsequent process tasks, the zero drift of the first vacuum gauge will cause a large error in the pressure detection in the chamber, thereby causing the subsequent process tasks to be terminated and the process quality of the material (also called wafer or silicon wafer) in the chamber to be reduced.

[0041] Therefore, for semiconductor equipment, before the process task is executed, the controller can quickly determine whether the vacuum gauge needs to be zeroed based on the zeroing identification information and preset identification information of each vacuum gauge, thereby avoiding the failure of the upcoming process task job or process recipe due to excessive zero drift of the vacuum gauge, and ensuring the process quality of semiconductor equipment products.

[0042] Step S206, if the vacuum gauge needs to be zeroed, obtain an observation value set and a reference value set, and generate a zeroing curve of the vacuum gauge according to the observation value set and the reference value set;

[0043] Among them, the observation value set includes multiple pressure observation values, the reference value set includes multiple pressure reference values, the pressure observation values ​​are used to characterize the pressure values ​​collected by the vacuum gauge at multiple pressure points, the pressure reference values ​​are used to characterize the pressure values ​​collected by the reference vacuum gauge at multiple pressure points, and the pressure points are used to characterize different pressure values ​​within the measuring range of the vacuum gauge. For example, the measuring range of the vacuum gauge to be zeroed is divided into multiple parts, such as 100 parts, and the corresponding 101 divided points are used as pressure points; and, for each pressure point, the controller obtains the pressure observation value of the vacuum gauge at the pressure point and the pressure reference value of the reference vacuum gauge at the pressure point, and generates a zeroing curve corresponding to the vacuum gauge according to the obtained observation value set and reference value set, so as to perform software zeroing on the vacuum gauge according to the zeroing curve, thereby achieving zeroing of the vacuum gauge without changing the hardware parameters. Compared with the existing hardware zeroing method, not only the zeroing efficiency of the vacuum gauge is improved, but also the zeroing frequency is reduced, such as extending the hardware manual zeroing cycle in months to years, thereby avoiding the client from frequently performing hardware zeroing on semiconductor equipment, significantly reducing the hardware maintenance frequency of semiconductor equipment, and thus improving the production capacity of semiconductor equipment.

[0044] Step S208, performing software zero adjustment on the vacuum gauge based on the zero adjustment curve.

[0045] Specifically, for the vacuum gauge that needs to be zeroed, after its corresponding zeroing curve is generated, during the subsequent execution of the process task, for the initial pressure value of the chamber collected by the vacuum gauge, the controller corrects the initial pressure value based on the zeroing curve, and uses the corrected pressure value as the pressure detection value output by the vacuum gauge, thereby eliminating the need for hardware zeroing of the vacuum gauge. Software zeroing of the vacuum gauge is achieved through software calculation to compensate for the pressure detection error caused by the zero drift of the vacuum gauge, thereby meeting the chamber's requirements for pressure conditions and further ensuring the process quality of the process products of the semiconductor equipment.

[0046] In summary, the vacuum gauge zeroing method provided in the embodiment of the present invention performs software zeroing on the vacuum gauge that needs to be zeroed by generating a zeroing curve corresponding to the vacuum gauge. Compared with the existing hardware zeroing method, the vacuum gauge zeroing efficiency is improved and the zeroing frequency is reduced. For example, the hardware manual zeroing cycle in months is extended to years, which significantly reduces the hardware maintenance frequency of semiconductor equipment and improves the production capacity of semiconductor equipment. At the same time, according to the zeroing identification information of the vacuum gauge, it can be quickly determined whether the vacuum gauge needs to be zeroed, thereby avoiding the failure of the process task Job or process recipe to be run, and ensuring the process quality of semiconductor equipment products.

[0047] In one embodiment, after performing software zeroing on the vacuum gauge based on the zeroing curve, the method further includes: if the software zeroing fails, performing hardware zeroing on the vacuum gauge.

[0048] Specifically, when the vacuum gauge needs to be zeroed, the controller preferentially generates a zeroing curve corresponding to the vacuum gauge, and performs software zeroing on the vacuum gauge according to the zeroing curve, so as to improve the zeroing efficiency of the vacuum gauge, reduce the frequency of zeroing, and ensure the production capacity of semiconductor equipment. In addition, if the software zeroing fails, the vacuum gauge needs to be zeroed by hardware, so that the vacuum gauge is zeroed by combining software zeroing and hardware zeroing, ensuring the zeroing effect of the vacuum gauge, avoiding the failure of the running process task Job or process recipe due to the zero drift of the vacuum gauge, and ensuring the process quality of semiconductor equipment products.

[0049] In one embodiment, before the step of obtaining a set of observation values ​​and a set of reference values, the method further includes: controlling the pressure in the chamber to within the range of the vacuum gauge and controlling the chamber to be in a vacuum state; and, within the range, adjusting the pressure value in the chamber to obtain multiple pressure points.

[0050] Specifically, when it is determined that the vacuum gauge needs to be zeroed according to the zeroing identification information and the preset identification information, since different vacuum gauges have different ranges, such as Figure 1The range of the first true control gauge is 10T, and the range of the second true control gauge is 1000T. In order to ensure the accuracy of the zeroing curve generation corresponding to the vacuum gauge, that is, to ensure the detection accuracy of the set of observation values ​​and the set of reference values ​​corresponding to the vacuum gauge, the controller also controls the pressure in the chamber to be within the range of the vacuum gauge that needs to be zeroed, and controls the chamber to be in a vacuum state, such as closing the air inlet valve at the air inlet end of the chamber, controlling the angle of the pressure controller to increase, and controlling the vacuum pump to evacuate the chamber until the chamber is in a vacuum state, completing the bottom pumping process. And, after the bottom pumping is completed, the pressure in the chamber is controlled to meet the range of the vacuum gauge, and within the range, the pressure value in the chamber is adjusted to obtain multiple pressure points, such as adjusting the range to 100, and using the division points as multiple pressure points.

[0051] For ease of understanding, here we use Figure 1 The first vacuum gauge and the second vacuum gauge in are used as examples. When the first vacuum gauge needs to be zeroed, the pressure in the chamber is controlled to be within the range of the first vacuum gauge, and the chamber is controlled to be in a vacuum state; and the first pneumatic valve between the first vacuum gauge and the exhaust end, and the second pneumatic valve between the reference vacuum gauge and the exhaust end are opened, so as to obtain the observation value set and the reference value set corresponding to the first vacuum gauge; similarly, when the second vacuum gauge needs to be zeroed, the pressure in the chamber is controlled to be within the range of the second vacuum gauge, and the chamber is controlled to be in a vacuum state; and the second pneumatic valve between the reference vacuum gauge and the exhaust end is opened, so as to obtain the observation value set and the reference value set corresponding to the second vacuum gauge.

[0052] In addition, if both the first vacuum gauge and the second vacuum gauge need to be zeroed, since the range of the first vacuum gauge is much smaller than that of the second vacuum gauge, at this time, the chamber is first controlled to be in a vacuum state, and the pressure in the chamber is adjusted to be within the range of the first vacuum gauge, that is, the pressure in the chamber is first controlled to be within 10T, and the pressure observation values ​​and pressure reference values ​​corresponding to multiple pressure points within 10T are obtained to obtain the observation value set and reference value set corresponding to the first vacuum gauge; and, after the acquisition, there is no need to perform a bottom pumping process on the chamber, and the pressure in the chamber is directly controlled to be within the range of the second vacuum gauge, that is, the pressure in the chamber is controlled to continue to increase from 10T to 1000T, and the pressure observation values ​​and pressure reference values ​​corresponding to multiple pressure points within 1000T are obtained to obtain the observation value set and reference value set corresponding to the second vacuum gauge.

[0053] And, the zeroing curve corresponding to the first vacuum gauge is generated according to the set of observation values ​​and the set of reference values ​​corresponding to the first vacuum gauge, and the zeroing curve corresponding to the second vacuum gauge is generated according to the set of observation values ​​and the set of reference values ​​corresponding to the second vacuum gauge. Wherein, the zeroing curve is generated based on the least squares method; assuming that there are n samples with only one feature: (x i ,y i), i = 1, 2, ..., n, this sample uses the general linear regression h θ (x) is a polynomial fit of degree n; where h θ The expression of (x) is as follows:

[0054] h θ (x) = θ 0 +θ 1 x+θ 2 x 2 +...+θ n x n (1)

[0055] Among them, (θ 0 ,θ 1 ,θ 2 ,...,θ n ) are parameters. By using the least squares method, a set of (θ 0 ,θ 1 ,θ 2 ,...,θ n ), so that the residual sum of squares Minimum, that is, according to the solution Determine a set (θ 0 ,θ 1 ,θ 2 ,...,θ n ).

[0056] For ease of understanding, here we take the number of multiple pressure points as 101 as an example to illustrate the generation process of the zeroing curve. When the vacuum gauge that needs to be zeroed is the first vacuum gauge, the range of the first vacuum gauge is divided into 100 equal parts, and these 101 points are used as pressure points, and the values ​​of each pressure point collected by the first vacuum gauge are used as pressure observation values ​​to obtain an observation value set consisting of 101 pressure observation values; similarly, the values ​​of each pressure point collected by the reference vacuum gauge at this time are used as pressure reference values ​​to obtain a reference value set consisting of 101 pressure reference values; and the pressure observation value x corresponding to each pressure point is used as the reference value. i and pressure reference value y i As a sample, 101 samples can be obtained.

[0057] At this point, the initial zeroing curve of the first vacuum gauge can be constructed as shown below:

[0058] h θ (x) = θ 0 +θ 1 x+θ 2 x 2 +...+θ 100 x 100 (2)

[0059] The above 101 samples (x i ,y i ) is substituted into the above formula (2), and a set of (θ 0 ,θ 1 ,θ 2 ,...,θ 100 ), so that the residual sum of squares of the first vacuum gauge Minimum, can maximize the simulation of the real pressure curve. Therefore, according to the determined (θ 0 ,θ 1 ,θ 2 ,...,θ 100 ) and the above formula (2) can obtain the zeroing curve of the first vacuum gauge, that is, the zeroing curve of the first vacuum gauge is generated according to the observation value set corresponding to the first vacuum gauge and the reference value set of the reference vacuum gauge.

[0060] Similarly, if the vacuum gauge that needs to be zeroed is the second vacuum gauge, divide the range of the second vacuum gauge into 100 equal parts, and use these 101 points as pressure points, and use the values ​​of each pressure point collected by the second vacuum gauge as pressure observation values, to obtain an observation value set consisting of 101 pressure observation values; similarly, use the values ​​of each pressure point collected by the reference vacuum gauge at this time as pressure reference values, to obtain a reference value set consisting of 101 pressure reference values; and use the pressure observation value x' corresponding to each pressure point i and pressure reference value y' i As a sample, 101 samples can be obtained.

[0061] At this time, the initial zero adjustment curve of the second vacuum gauge is constructed as shown below:

[0062] h' θ (x) = θ' 0 +θ' 1 x+θ' 2 x 2 +...+θ' 100 x 100 (3)

[0063] The above 101 samples (x' i ,y' i ) into the above formula (3), we get a set of (θ' 0 ,θ' 1 ,θ' 2 ,...,θ' 100 ), so that the residual sum of squares of the second vacuum gauge Minimum, can maximize the simulation of the real pressure curve. Therefore, according to the determined (θ' 0 ,θ' 1 ,θ' 2,...,θ' 100 ) and the above formula (3) can obtain the zeroing curve of the second vacuum gauge, that is, the zeroing curve of the second vacuum gauge is generated according to the observation value set of the second vacuum gauge and the reference value set of the reference vacuum gauge.

[0064] Therefore, by generating a zeroing curve corresponding to the vacuum gauge that needs to be zeroed for the observation value set and reference value set corresponding to the vacuum gauge, software zeroing of the vacuum gauge is achieved. Compared with the existing hardware zeroing method, the zeroing efficiency of the vacuum gauge is improved and the zeroing frequency is reduced. For example, the hardware manual zeroing cycle in months is extended to years, which significantly reduces the hardware maintenance frequency of semiconductor equipment and improves the production capacity of semiconductor equipment.

[0065] In one embodiment, the step of performing software zeroing on the vacuum gauge based on the zeroing curve includes: determining the pressure detection values ​​corresponding to multiple pressure points according to the zeroing curve; wherein the pressure detection value is used to characterize the pressure value of the vacuum gauge at the pressure point after zeroing; calculating the pressure difference value of the pressure point according to the pressure detection value and the pressure reference value corresponding to each pressure point; obtaining the pressure accuracy values ​​of the reference vacuum gauge at multiple pressure points, and determining whether the pressure difference value of each pressure point is not greater than the corresponding pressure accuracy value; if so, determining that the software zeroing of the vacuum gauge is successful.

[0066] For the sake of convenience, an example is given here. If the vacuum gauge that needs to be zeroed is the first vacuum gauge, and multiple pressure points within the measuring range of the first vacuum gauge are set as C1, C2...Cn, etc., then the pressure observation value of each pressure point is corrected according to the zeroing curve of the first vacuum gauge, and the corrected pressure observation value is used as the pressure detection value of the zeroed vacuum gauge at the pressure point after zeroing; at this time, the pressure difference of the pressure point is calculated according to the pressure detection value of each pressure point and the pressure reference value corresponding to the reference vacuum gauge at the pressure point; for example, for point C1, the pressure detection value of the point can be calculated according to the zeroing curve, and the pressure difference D1 corresponding to point C1 is calculated according to the calculated pressure detection value and the pressure reference value of the reference vacuum gauge at the point.

[0067] In addition, for multiple pressure points within different ranges, the controller also pre-stores the pressure accuracy range value of the reference vacuum gauge at each point. For the same pressure point, when the range changes, the pressure accuracy range value of the reference vacuum gauge at the pressure point is also different. Therefore, for the range of the first vacuum gauge, the controller also obtains the pressure accuracy range value of each pressure point of the reference vacuum gauge within the range, and determines whether the pressure difference value of each pressure point is not greater than the corresponding pressure accuracy range value; if so, it is determined that the zero adjustment curve is successfully zeroed.

[0068] Similarly, if the vacuum gauge that needs to be zeroed is the second vacuum gauge, the software zeroing process of the first vacuum gauge can be referred to to determine whether the zeroing curve of the second vacuum gauge is successfully zeroed. The embodiment of the present invention will not be described in detail here.

[0069] Furthermore, when the vacuum gauge software is zeroed successfully, the zeroing identification information of the vacuum gauge is adjusted from the second identification information to the first identification information, such as from 1 to 0, so that when the subsequent controller obtains the process task next time, it can quickly determine whether the vacuum gauge needs to be zeroed according to the zeroing identification information of the vacuum gauge, so as to avoid the situation where the process task fails due to excessive zero drift of the vacuum gauge, thereby ensuring the process quality and production capacity of the semiconductor equipment.

[0070] In one embodiment, the method further includes: if there is at least one pressure point where the pressure difference is greater than the corresponding pressure accuracy value, generating an alarm prompt message to indicate that the software zeroing has failed.

[0071] Specifically, when there is at least one pressure point among multiple pressure points whose pressure difference is greater than the corresponding pressure accuracy, it indicates that the zeroing curve corresponding to the vacuum gauge cannot alleviate the problem of excessive zero drift. At this time, it is determined that the zeroing of the vacuum gauge by software zeroing according to the zeroing curve has failed, and the controller generates an alarm prompt message to prompt the user or operator to perform hardware zeroing of the vacuum gauge.

[0072] Therefore, for vacuum gauges that need to be zeroed, the controller prefers software zeroing. If software zeroing fails, it is combined with hardware zeroing for zeroing. Thus, the vacuum gauge is zeroed by combining software zeroing and hardware zeroing, thereby ensuring the zeroing effect of the vacuum gauge and avoiding the problem of errors in pressure detection due to excessive zero drift of the vacuum gauge, thereby improving the pressure control accuracy of the chamber and ensuring the output and process quality of semiconductor equipment products.

[0073] In one hardware zeroing mode, the controller performs zeroing on the vacuum gauge in response to a user's rotation operation on the vacuum gauge, that is, the vacuum gauge is hardware zeroed by the user's manual rotation. In another hardware zeroing mode, the vacuum gauge is also equipped with a zeroing button, and the controller performs zeroing on the vacuum gauge in response to a user's pressing operation on the zeroing button, that is, the vacuum gauge is hardware zeroed by the user's manual pressing of the zeroing button.

[0074] Furthermore, after the hardware zeroing is completed, the zeroing identification information of the vacuum gauge is adjusted from the second identification information to the first identification information, such as from 1 to 0, so that when the subsequent controller obtains the process task next time, it can quickly determine whether the vacuum gauge needs to be zeroed according to the zeroing identification information of the vacuum gauge, so as to avoid the situation where the process task fails due to excessive zero drift of the vacuum gauge, thereby ensuring the process quality and production capacity of the semiconductor equipment.

[0075] In one embodiment, the method further includes: if the vacuum gauge does not need to be zeroed, controlling the semiconductor equipment to perform a process task.

[0076] Specifically, when the semiconductor device obtains a process task, if the zero adjustment identification information of the vacuum gauge is the first identification information, the semiconductor device directly executes the process task. During the bottom extraction process of the process flow, it is determined whether the pressure value collected by the vacuum gauge is lower than the specified range. If so, the process task continues to be executed normally. On the contrary, if the pressure value collected by the vacuum gauge exceeds the specified range, but is lower than the pressure value of the bottom extraction of the reference vacuum gauge to check the process, at this time, the vacuum gauge has zero drift, but it does not affect the normal process. The controller controls the process task to continue to execute, and adjusts the zero adjustment identification information of the vacuum gauge from the first identification information to the second identification information, such as switching from 0 to 1, thereby ensuring the normal operation of the current process task and improving the production capacity of the semiconductor equipment.

[0077] Furthermore, after the process task is completed, when the semiconductor equipment obtains the next process task, it can quickly determine whether the vacuum gauge needs to be zeroed based on the zeroing identification information of the vacuum gauge, so as to avoid the failure of subsequent process tasks due to excessive zero drift of the vacuum gauge, thereby ensuring the process quality of the semiconductor equipment.

[0078] Embodiment 2

[0079] On the basis of the above-mentioned embodiments, an embodiment of the present invention further provides an operation process of a semiconductor device, which focuses on describing the process of performing software zeroing and hardware zeroing on a vacuum gauge during the process of the semiconductor device.

[0080] For the sake of convenience, in the embodiment of the present invention, the zeroing flag is used as the zeroing identification information, and the first identification information is set to 0, and the second identification information is set to 1. Specifically, Figure 4 As shown, the method comprises the following steps:

[0081] (A1) Process: First, the machine (i.e., semiconductor equipment) is in an Idle state before and after running a Job or Recipe, i.e., the machine runs an Idle Recipe. When a Job is obtained, it is determined whether the zero adjustment flag of vacuum gauge 1 (i.e., the first vacuum gauge) or 2 (i.e., the second vacuum gauge) is greater than 0. If the zero adjustment flag is greater than 0, i.e., the zero adjustment flag is 1, it is determined that the zero drift is too large and software zero adjustment is required. If the zero adjustment flag is 0, the Job can be performed normally and the process Recipe can be executed, i.e., the Process Recipe is run.

[0082] In the bottom pumping process of the recipe, if it is judged that the value of vacuum gauge 1 is lower than the specified range Spec A1 or the value of vacuum gauge 2 is lower than the specified range Spec A2 during the bottom pumping, the process recipe is executed normally; if it is judged that the value of vacuum gauge 1 exceeds the specified Spec A1 or the value of vacuum gauge 2 exceeds the specified Spec A2 during the bottom pumping, but Spec A1 or Spec A2 is lower than the Spec value of the bottom pumping of the reference vacuum gauge inspection process, and does not affect the normal process, at this time, the process is carried out normally, and the values ​​of vacuum gauge 1 and vacuum gauge 2 at this time are recorded as B1 and B2 respectively, and the corresponding zeroing flag bit of vacuum gauge 1 is set to 1, and the corresponding zeroing flag bit of vacuum gauge 2 is set to 1; and the process recipe is executed normally.

[0083] When the job is completed, the Idle Recipe will automatically run. At this time, it will continue to determine whether the zero adjustment flag of the vacuum gauge 1 or 2 used by the machine is greater than 0. If the zero adjustment flag is greater than 0, the software will automatically perform zero adjustment. After the software zero adjustment is completed, the zero adjustment flag position will be switched to 0 to prepare for the next job or recipe. This operation will not affect the operation of the current job or recipe to the greatest extent. It can identify the excessive zero drift of the vacuum gauge in advance and process it through software zero adjustment, extend the operation frequency of hardware zero adjustment, and avoid the failure of the next job or recipe.

[0084] (A2) Software zeroing: Automatically execute the zeroing Maintenance Recipe of the corresponding vacuum gauge according to the zeroing flag of the vacuum gauge determined in the process, and return to the Idle Recipe of the machine after execution. If vacuum gauge 1 needs to be zeroed, that is, the zeroing flag of vacuum gauge 1 = 1, the controller runs the zeroing Maintenance Recipe 1 to perform software zeroing on vacuum gauge 1. During the zeroing process, the controller controls the pressure of the chamber to within the range of vacuum gauge 1 through the pressure controller, and opens the first pneumatic valve, i.e., pneumatic valve 1, and the second pneumatic valve, i.e., pneumatic valve 2, corresponding to vacuum gauge 1 and vacuum gauge 3; if vacuum gauge 2 needs to be zeroed, that is, the zeroing flag of vacuum gauge 2 = 1, the controller runs the zeroing Maintenance Recipe 2 to perform software zeroing on vacuum gauge 2, and during the zeroing process, the controller controls the pressure to within the range of vacuum gauge 2, and opens the second pneumatic valve corresponding to vacuum gauge 3, so as to perform software zeroing operation on the corresponding vacuum gauge.

[0085] Then, bottom pumping is performed, and the fitting algorithm calculation of the full-scale pressure value of the vacuum gauge to be zeroed is performed, that is, the zeroing curve of vacuum gauge 1 is calculated, and the value of vacuum gauge 1 after zeroing is calculated according to the zeroing curve; similarly, the zeroing curve of vacuum gauge 2 is calculated, and the value of vacuum gauge 2 after zeroing is calculated according to the zeroing curve; and, for vacuum gauge 1, multiple pressure points such as C1, C2... are set, and the difference D1, D2,... between vacuum gauge 1 and vacuum gauge 3 (i.e., reference vacuum gauge) at pressure points C1, C2... is recorded, that is, the pressure difference between the pressure detection value corresponding to vacuum gauge 1 at each pressure point and the pressure reference value of vacuum gauge 3 is calculated; and the pressure difference of vacuum gauge 3 at the pressure point is obtained. Then, it determines whether the difference D1 is within the corresponding accuracy range E1, whether the difference D2 is within the accuracy range E2, etc. If the pressure difference of any pressure point exceeds the corresponding accuracy, it is considered that the software zeroing operation has failed, and the machine throws an alarm, judging that manual operation is required to perform hardware zeroing of the vacuum gauge. If the differences of all pressure points are within the corresponding accuracy range, it is determined that the software zeroing of vacuum gauge 1 is successful, and the zeroing flag of vacuum gauge 1 is switched to 0, and the first pneumatic valve and the second pneumatic valve are closed, and the machine is restored to normal pressure to prepare for subsequent jobs or recipes.

[0086] Similarly, for the vacuum gauge 2, multiple pressure points such as F1, F2, ... are set, and the difference G1, G2, ... between the vacuum gauge 2 and the vacuum gauge 3 (i.e., the reference vacuum gauge) is recorded at the pressure points F1, F2, ..., that is, the pressure difference between the pressure detection value corresponding to the vacuum gauge 2 at each pressure point and the pressure reference value of the vacuum gauge 3 is calculated; and the accuracy H1, H2, ... of the vacuum gauge 3 at the pressure points F1, F2, ... is obtained, and then it is judged whether the difference G1 is within the corresponding accuracy range H1, whether the difference G2 is within the accuracy range H2, ..., if the pressure difference of any of the pressure points exceeds the corresponding accuracy, it is considered that the software zeroing operation has failed, the machine throws an alarm, and it is judged that manual operation is required to perform hardware zeroing of the vacuum gauge. If the difference of all pressure points is within the corresponding accuracy range, it is determined that the software zeroing of the vacuum gauge 2 is successful, and the zeroing flag of the vacuum gauge 2 is switched to 0, and the second pneumatic valve is closed, and the machine is restored to normal pressure state to prepare for subsequent jobs or recipes.

[0087] (A3) Hardware zeroing: When the machine alarms, the user or operator performs hardware zeroing on the vacuum gauge. After the operation is completed, the vacuum gauge hardware zeroing completion button on the software interface must be manually operated. Then, the zeroing flags of vacuum gauges 1 and 2 will be automatically set to 1, and the software zeroing operation process will be re-entered to confirm again whether the difference between vacuum gauge 1 or vacuum gauge 2 and vacuum gauge 3 is within the accuracy range of vacuum gauge 3 within the pressure point required by the process. If it is within the accuracy range, the zeroing operation is confirmed to be successful, the relevant pneumatic valves are closed, and the machine is restored to normal pressure to prepare for subsequent jobs or recipes. If the difference between any of the pressure points exceeds the accuracy of vacuum gauge 3, the software zeroing operation is considered to have failed, and the machine throws an alarm. The vacuum gauge must be manually zeroed again until the zeroing operation is successful. The software zeroing confirmation after hardware zeroing is to avoid hardware problems caused by manual operation or incorrect installation. Therefore, the accuracy of the vacuum gauge is determined through secondary software zeroing to ensure the normal operation of the job or recipe in advance.

[0088] In summary, the operating process of the above-mentioned semiconductor equipment reduces the frequency of zeroing by performing software zeroing and hardware zeroing of the vacuum gauge. For example, the manual hardware zeroing cycle in months is extended to years, which significantly reduces the hardware maintenance frequency of semiconductor equipment and improves the production capacity of semiconductor equipment. At the same time, according to the zeroing flag of the vacuum gauge, it is possible to quickly determine whether the vacuum gauge needs to be zeroed, thereby avoiding the failure of the process task job or process recipe to be run, and ensuring the process quality of semiconductor equipment products.

[0089] An embodiment of the present invention further provides a semiconductor device, including a processor and a memory, wherein the memory stores machine executable instructions that can be executed by the processor, and the processor executes the machine executable instructions to implement the above vacuum gauge zeroing method.

[0090] See also Figure 5 As shown, the semiconductor device includes a processor 100 and a memory 101 . The memory 101 stores machine executable instructions that can be executed by the processor 100 . The processor 100 executes the machine executable instructions to implement the above vacuum gauge zeroing method.

[0091] Further, Figure 5 The semiconductor device shown further includes a bus 102 and a communication interface 103 , and the processor 100 , the communication interface 103 , and the memory 101 are connected via the bus 102 .

[0092] Among them, the memory 101 may include a high-speed random access memory (RAM), and may also include a non-volatile memory (non-volatile memory), such as at least one disk storage. The communication connection between the system network element and at least one other network element is realized through at least one communication interface 103 (which can be wired or wireless), and the Internet, wide area network, local area network, metropolitan area network, etc. can be used. The bus 102 can be an ISA (Industrial Standard Architecture) bus, a PCI (Peripheral Component Interconnect) bus or an EISA (Enhanced Industry Standard Architecture) bus, etc. The above-mentioned bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 5 Only one bidirectional arrow is used in the diagram, but this does not mean that there is only one bus or only one type of bus.

[0093] The processor 100 may be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by the hardware integrated logic circuit or software instructions in the processor 100. The above processor 100 can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiments of the present invention can be implemented or executed. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in conjunction with the embodiments of the present invention can be directly embodied as a hardware decoding processor for execution, or a combination of hardware and software modules in the decoding processor for execution. The software module may be located in a storage medium mature in the art, such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory, or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory 101, and the processor 100 reads the information in the memory 101 and completes the steps of the method of the above embodiment in combination with its hardware.

[0094] This embodiment also provides a machine-readable storage medium, which stores machine-executable instructions. When the machine-executable instructions are called and executed by a processor, the machine-executable instructions prompt the processor to implement the above-mentioned vacuum gauge zeroing method.

[0095] The vacuum gauge zeroing method and the computer program product of the semiconductor device provided in the embodiments of the present invention include a computer-readable storage medium storing program code. The instructions included in the program code can be used to execute the method described in the previous method embodiments. The specific implementation can be found in the method embodiments, which will not be repeated here.

[0096] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system and device described above can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0097] In addition, in the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0098] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present invention, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in each embodiment of the present invention. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0099] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0100] Finally, it should be noted that the above-described embodiments are only specific implementations of the present invention, which are used to illustrate the technical solutions of the present invention, rather than to limit them. The protection scope of the present invention is not limited thereto. Although the present invention is described in detail with reference to the above-described embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-described embodiments within the technical scope disclosed by the present invention, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A vacuum gauge zeroing method, characterized in that: Applied to semiconductor equipment; wherein the semiconductor equipment comprises a chamber, and a reference vacuum gauge and at least one vacuum gauge arranged at an exhaust end of the chamber; the method comprises: When the semiconductor device obtains a process task, obtaining zeroing identification information of the vacuum gauge; Determining whether the vacuum gauge needs to be zeroed according to the zeroing identification information and the preset identification information; If the vacuum gauge needs to be zeroed, an observation value set and a reference value set are obtained, and a zeroing curve of the vacuum gauge is generated according to the observation value set and the reference value set; wherein the observation value set includes a plurality of pressure observation values, the reference value set includes a plurality of pressure reference values, the pressure observation values ​​are used to characterize the pressure values ​​respectively collected by the vacuum gauge at a plurality of pressure points, the pressure reference values ​​are used to characterize the pressure values ​​respectively collected by the reference vacuum gauge at a plurality of pressure points, and the pressure points are used to characterize different pressure values ​​within the measuring range of the vacuum gauge; The vacuum gauge is software zeroed based on the zeroing curve.

2. The method according to claim 1, characterized in that After performing software zeroing on the vacuum gauge based on the zeroing curve, the method further includes: If the software zeroing fails, the vacuum gauge is subjected to hardware zeroing.

3. The method according to claim 1 or 2, characterized in that: The step of performing software zeroing on the vacuum gauge based on the zeroing curve comprises: Determine the pressure detection values ​​corresponding to the plurality of pressure points respectively according to the zeroing curve; wherein the pressure detection value is used to represent the pressure value of the vacuum gauge at the pressure point after zeroing; Calculating the pressure difference of each pressure point according to the pressure detection value and the pressure reference value corresponding to each pressure point; Obtaining the pressure accuracy range values ​​of the reference vacuum gauge at the plurality of pressure points, and determining whether the pressure difference value at each of the pressure points is not greater than the corresponding pressure accuracy range value; If so, it is determined that the vacuum gauge software zeroing is successful.

4. The method according to claim 3, characterized in that The method further comprises: If there is at least one pressure point where the pressure difference is greater than the corresponding pressure accuracy range value, an alarm prompt message is generated to indicate that the software zeroing has failed.

5. The method according to claim 2, characterized in that: The step of performing hardware zeroing on the vacuum gauge comprises: In response to a rotation operation of the vacuum gauge by a user, the vacuum gauge is zeroed.

6. The method according to claim 2, characterized in that The vacuum gauge is also provided with a zeroing button, and the step of performing hardware zeroing on the vacuum gauge comprises: In response to a user's pressing operation on the zero adjustment button, the vacuum gauge is zeroed.

7. The method according to claim 1, characterized in that Before the step of obtaining the observation value set and the reference value set, the method further includes: The pressure in the chamber is controlled to be within the range of the vacuum gauge, and the chamber is controlled to be in a vacuum state; and within the range, the pressure value in the chamber is adjusted to obtain a plurality of pressure points.

8. The method according to claim 1, characterized in that The preset identification information includes first identification information and second identification information; the step of judging whether the vacuum gauge needs to be zeroed according to the zeroing identification information and the preset identification information includes: If the zero adjustment identification information is the first identification information, it is determined that the vacuum gauge does not need to be zeroed; or, if the zero adjustment identification information is the second identification information, it is determined that the vacuum gauge needs to be zeroed.

9. The method according to claim 1, characterized in that: The method further comprises: If the vacuum gauge does not need to be zeroed, the semiconductor device is controlled to perform the process task.

10. A semiconductor device comprising a controller and a chamber, wherein: A reference vacuum gauge and at least one vacuum gauge are provided at the exhaust end of the chamber; The controller is used to perform software zeroing on the vacuum gauge using the vacuum gauge zeroing method described in any one of claims 1 to 9.

11. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the vacuum gauge zeroing method according to any one of claims 1 to 9 are executed.

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