An aberration detection device

Abstract

The present invention discloses an aberration detection device, which includes a scattered light generation module, an imaging module, and an image receiving and processing module; nanoparticles are arranged on the scattered light generation module, and the scattered light generation module is used to generate scattered point light sources formed by scattering of the nanoparticles; the imaging module and the image receiving and processing module are sequentially arranged along the optical axis of the scattered point light source; the imaging module is used to focus and image the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position point of the scattered image, and is used to receive the scattered image and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module. With the above structure, accurate measurement of the optical aberration of the imaging module is achieved, the resolution of the detection device is improved, and the structure is simple.

Description

Technical Field

[0001] The present invention relates to the technical field of optical aberration detection of imaging modules, and particularly to an aberration detection device. Background Art

[0002] Measuring the optical aberration of an imaging system has always been an important research topic in the optical field. Optical aberration is caused by the imperfection of the optical system and includes types such as spherical aberration, coma aberration, astigmatism, field curvature, and distortion. These aberrations will cause a decline in imaging quality and need to be improved through optical design and correction.

[0003] Existing methods for detecting the aberration of an imaging system usually include interferometric measurement, Hartmann-Shack sensor method, and shearing interferometry to determine the optical aberration of the imaging system. However, these methods have a relatively complex optical path structure in practical applications, few application scenarios, and cannot achieve accurate measurement of the aberration of the imaging system in different application scenarios, resulting in reduced resolution. Summary of the Invention

[0004] The present invention provides an aberration detection device, which uses the scattered image generated by the scattered point light source formed by the scattering of nanoparticles passing through the imaging module. By performing data reconstruction calculation on the point spread function formed by the scattered image, the optical aberration of the imaging module is accurately determined, the resolution of the detection device is improved, the structure is simple, and the applicable range is wide.

[0005] The present invention provides an aberration detection device, including a scattered light generation module, an imaging module, and an image reception and processing module;

[0006] The scattered light generation module is provided with nanoparticles, and the scattered light generation module is used to generate a scattered point light source formed by the scattering of nanoparticles; the imaging module and the image reception and processing module are sequentially arranged along the optical axis of the scattered point light source; the imaging module is used to focus and image the scattered point light source to generate a scattered image; the image reception and processing module is located at the imaging position point of the scattered image and is used to receive the scattered image and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module.

[0007] Optionally, the scattered light generation module includes a light source for generating monochromatic light; it also includes a focusing lens group, a condenser module, and a glass slide sequentially arranged along the optical axis of the monochromatic light; the nanoparticles are arranged on the side of the glass slide close to the imaging module and are attached to the glass slide;

[0008] The focusing lens group is used to collimate the monochromatic light; the condenser module is used to focus the collimated monochromatic light onto the nanoparticles so that the nanoparticles scatter to form a scattered point light source.

[0009] Optionally, the imaging module includes an objective lens and a tube lens;

[0010] The objective lens is located on the optical axis on the side of the glass slide away from the light source; the tube lens is located on the optical axis on the side of the objective lens away from the light source;

[0011] The numerical aperture of the objective lens is smaller than that of the condenser module.

[0012] Optionally, the condenser module includes a dark field condenser module.

[0013] Optionally, the focusing lens group includes a first collimator, a filter module, a telescopic magnification module, and a reflector arranged in sequence along the optical axis of the monochromatic light;

[0014] The first collimator is located between the light source and the filter module, and the reflector is located between the telescopic magnification module and the condenser module.

[0015] Optionally, the image receiving and processing module includes an image receiving unit and a control unit; the filter module includes a plurality of filter plates with different wavelengths;

[0016] The control unit is electrically connected to the image receiving unit and each filter plate respectively; the image receiving unit is used to receive the scattered image; the control unit is used to control the filter plate to switch after determining that the image receiving unit has received the scattered image corresponding to the wavelength of the current filter plate, so that the image receiving unit receives the scattered images corresponding to the wavelengths of the remaining filter plates.

[0017] Optionally, the telescopic magnification module includes a converging lens and a second collimator; the converging lens is located between the filter module and the second collimator, and the second collimator is located between the converging lens and the reflector.

[0018] Optionally, the size of the nanoparticles is much smaller than the diffraction limit of the imaging module.

[0019] Optionally, the scattered light generating module includes a three-dimensional moving stage and a movement control mechanism;

[0020] The movement control mechanism is electrically connected to the three-dimensional moving stage; the three-dimensional moving stage is located on the side of the glass slide away from the imaging module and is in contact with the glass slide;

[0021] The movement control mechanism is used to control the three-dimensional moving stage to move in a preset direction by a preset step size, driving the nanoparticles to move, so that the monochromatic light is focused on different positions of the nanoparticles to form a plurality of scattered point light sources; wherein, the preset direction includes a first direction, a second direction, and a third direction, and the first direction, the second direction, and the third direction are perpendicular to each other in pairs.

[0022] Optionally, the diameter D of the nanoparticles satisfies: 1nm ≤ D ≤ 10um.

[0023] The technical solution of the present invention generates scattered point light sources formed by scattering of nanoparticles through a scattered light generation module; after the scattered point light sources are transmitted to the imaging module, the imaging module focuses and images the scattered point light sources to generate a scattered image; the image receiving and processing module is located at the imaging position point of the scattered image, receives the scattered image generated by the imaging module, and performs data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module. With the above structure, the optical aberration of the imaging module is accurately determined, the resolution of the detection device is improved, the structure is simple, and the applicable range is wide.

[0024] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 It is a schematic structural diagram of an aberration detection device provided by an embodiment of the present invention;

[0027] Figure 2 It is a schematic structural diagram of a second aberration detection device provided by an embodiment of the present invention;

[0028] Figure 3 It is a partial schematic diagram of an aberration detection device provided by an embodiment of the present invention;

[0029] Figure 4 It is a schematic structural diagram of a third aberration detection device provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of the present invention are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0032] In one embodiment, Figure 1 is a schematic structural diagram of an aberration detection device provided by an embodiment of the present invention. This embodiment is applicable to the situation of accurately detecting the optical aberration of an imaging module by using a scattered point light source formed by scattering of nanoparticles, such as Figure 1 shown. The device includes a scattered light generation module 1, an imaging module 2, and an image receiving and processing module 3; a nanoparticle 11 is provided on the scattered light generation module 1, and the scattered light generation module 1 is used to generate a scattered point light source formed by scattering of the nanoparticle 11; the imaging module 2 and the image receiving and processing module 3 are sequentially arranged along the optical axis of the scattered point light source; the imaging module 2 is used to focus and image the scattered point light source to generate a scattered image; the image receiving and processing module 3 is located at the imaging position point of the scattered image, and is used to receive the scattered image and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module 2.

[0033] Among them, the scattered light generation module 1 is a structure for generating and controlling the scattered point light source. Since the nanoparticle 11 is provided on the scattered light generation module 1, the scattered light generation module 1 can generate a scattered point light source formed by scattering of the nanoparticle 11. The imaging module 2 is a structure for focusing and imaging the scattered point light source to generate a scattered image; the imaging module 2 may include, but is not limited to, a combination of an objective lens and a tube lens. The image receiving and processing module 3 is a structure for receiving the scattered image and performing data processing and analysis on the point spread function formed by the scattered image to obtain the optical aberration of the imaging module 2.

[0034] Specifically, when detecting and determining the optical aberration of the imaging module 2, the imaging module 2 and the image receiving and processing module 3 can be sequentially arranged along the optical axis of the scattered point light source, and the image receiving and processing module 3 can be arranged at the imaging position point of the scattered image, so that after the scattered point light source generated by the scattering light generation module 1 and scattered by the nanoparticles 11 is sent to the imaging module 2, the imaging module 2 will focus and image the scattered point light source to form a scattered image. After the scattered image is formed, the image receiving and processing module 3 located at the imaging position point will receive the scattered image generated by the imaging module 2 and perform image processing on the scattered image. Among them, since the scattering light generation module 1 generates a scattered point light source, the scattered image generated by the scattered point light source passing through the imaging module 2 can form a point spread function. Therefore, when the image receiving and processing module 3 performs image processing on the scattered image, it is actually performing data processing on the point spread function, and specifically, the point spread function of the imaging module 2 can be reconstructed and calculated by using a preset physical model, so as to obtain the optical aberration of the imaging module 2.

[0035] The technical solution of the embodiment of the present invention is as follows: the scattering light generation module generates a scattered point light source formed by scattering of nanoparticles; after the scattered point light source is transmitted to the imaging module, the imaging module will focus and image the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position point of the scattered image, will receive the scattered image generated by the imaging module, and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module. With the above structure, the optical aberration of the imaging module is accurately determined, the resolution of the detection device is improved, the structure is simple, and the applicable range is wide.

[0036] In another specific embodiment, optionally, Figure 2 is a schematic structural diagram of the second aberration detection device provided by the embodiment of the present invention. Refer to Figure 2 As shown, the scattering light generation module 1 includes a light source 12 for generating monochromatic light; it also includes a focusing lens group 13, a condenser module 14 and a glass slide 15 arranged in sequence along the optical axis of the monochromatic light; the nanoparticles 11 are arranged on the side of the glass slide 15 close to the imaging module 2 and are attached to the glass slide 15; the focusing lens group 13 is used to collimate the monochromatic light; the condenser module 14 is used to focus the collimated monochromatic light on the nanoparticles 11 so that the nanoparticles 11 scatter to form a scattered point light source.

[0037] Among them, the light source 12 is an object or device that emits monochromatic light. In this embodiment, the light source 12 can be a separate wide-spectrum light source, a monochromatic point light source, a white light point light source, etc., or can be implemented in the form of a light source + optical fiber. The optical fiber can be a material that can achieve a specific numerical aperture and a good light homogenization effect, and can be specifically determined according to the actual situation, and is not limited here. The focusing lens group 13 is a combination of optical elements, mainly used to focus light onto a point or a specific area. It usually includes multiple lenses, which can effectively reduce aberration and spherical aberration and improve the imaging quality. The condenser module 14 is an optical system for concentrating light onto a specific area. In this embodiment, the condenser module 14 can be a dark-field condenser module or a bright-field condenser module. When the image receiving and processing module 3 can receive weak scattered light, the condenser module 14 can use a bright-field condenser module, and vice versa, a dark-field condenser module is used. This application takes the condenser module 14 as a dark-field condenser module as an example for elaboration. The glass slide 15 is a thin glass sheet, mainly used to carry and fix the nanoparticles 11. In this embodiment, the nanoparticles 11 are fixed on the surface of the glass slide 15 on the side away from the light source 12, and are used to make monochromatic light pass through the nanoparticles 11 to form a scattered point light source.

[0038] Specifically, the monochromatic light emitted by the light source 12 will generate parallel light of a certain size after passing through the focusing lens group 13. After the parallel light is transmitted to the condenser module 14, the condenser module 14 will focus the parallel light onto the nanoparticles 11. After the parallel light passes through the nanoparticles 11, scattering will occur, generating a scattered point light source.

[0039] Optionally, continue to refer to Figure 2 , the imaging module 2 includes an objective lens 21 and a tube lens 22; the objective lens 21 is located on the optical axis on the side of the glass slide 15 away from the light source 12; the tube lens 22 is located on the optical axis on the side of the objective lens 21 away from the light source 12; the numerical aperture of the objective lens 21 is smaller than the numerical aperture of the condenser module 14.

[0040] Among them, the objective lens 21 is used to collect the scattered point light source from the nanoparticles 11 and focus it into an enlarged intermediate image. The tube lens 22 is used to further magnify the intermediate image formed by the objective lens 21 to form a final observation image or imaging signal, that is, a scattered image.

[0041] It should be noted that in this embodiment, the numerical aperture of the objective lens 21 is set to be smaller than the numerical aperture of the condenser module 14, so that only scattered light can be sent to the objective lens 21, and the rest of the light will not be transmitted to the objective lens 21, ensuring that the image generated by the imaging module 2 is a scattered image.

[0042] Optionally, Figure 3 is a partial schematic diagram of an aberration detection device provided by an embodiment of the present invention. Refer to Figure 2 and Figure 3As shown in the figure, the condenser module 14 includes a dark-field condenser module, that is, a black light-absorbing structure is provided at the center of the condenser module 14, so that the monochromatic light transmitted through the center will be absorbed, and only the monochromatic light on both sides will be emitted to the nanoparticles 11. At this time, the light emitted through the condenser module 14 is a hollow light, and the hollow light forms a scattered point light source after irradiating the nanoparticles 11.

[0043] Optionally, Figure 4 This is a schematic structural diagram of the third aberration detection device provided by the embodiment of the present invention. Refer to Figure 4 As shown in the figure, the focusing lens group 13 includes a first collimating lens 131, a filter module 132, a telescopic magnification module 133, and a reflecting mirror 134 arranged in sequence along the optical axis of the monochromatic light; the first collimating lens 131 is located between the light source 12 and the filter module 132, and the reflecting mirror 134 is located between the telescopic magnification module 133 and the condenser module 14.

[0044] Among them, the first collimating lens 131 is used to collimate the monochromatic light to form parallel light. The filter module 132 includes a plurality of filter sheets with different wavelengths, which are used to realize the scattered images of the imaging module 2 at different wavelengths. In this embodiment, the filter module 132 may include a plurality of narrow-band or broadband wavelength filter sheets, and each filter sheet represents a wavelength. Generally, a scattered image can only represent the optical aberration of the imaging module 2 at one wavelength. The telescopic magnification module 133 is used to magnify the monochromatic light of a certain wavelength so that it can be sent to the condenser module 14. The reflecting mirror 134 is used to reflect the amplified light and change the propagation direction of the optical path to reduce the volume of the detection device, improve the integration and portability. In this embodiment, the number of reflecting mirrors 134 can be set according to the actual situation. The more the number of reflecting mirrors 134, the more times the optical path turns, and the smaller the volume of the detection device, but the involved optical devices will increase accordingly. Exemplarily, the number of reflecting mirrors 134 is 1.

[0045] Specifically, the monochromatic light emitted by the light source 12 is sent to the first collimating lens 131 to form parallel light, the parallel light passes through the filter module 132 and then is sent to the telescopic magnification module 133. The telescopic magnification module 133 focuses and collimates the parallel light and then sends it to the reflecting mirror 134. The reflecting mirror 134 reflects the parallel light and changes the propagation direction of the optical path. The reflected parallel light will be sent to the condenser module 14 to be focused on the nanoparticles 11 through the condenser module 14, generating a scattered point light source.

[0046] Optionally, continue to refer to Figure 2 and Figure 4, the image receiving and processing module 3 includes an image receiving unit 31 and a control unit (not shown in the figure); the filter module 132 includes a plurality of filters with different wavelengths; the control unit is electrically connected to the image receiving unit 31 and each filter respectively; the image receiving unit 31 is used to receive the scattered image; the control unit is used to control the filter to switch after determining that the image receiving unit 31 has received the scattered image corresponding to the wavelength of the current filter, so that the image receiving unit 31 receives the scattered images corresponding to the wavelengths of the remaining filters.

[0047] Among them, the image receiving unit 31 is used to receive the scattered image. Generally, the image receiving unit 31 may include, but is not limited to, a CCD camera. The control unit is the control core of the detection device and includes a processor. The processor is used to perform data reconstruction calculation on the point spread function formed after the image receiving unit 31 receives the scattered image by using a physical model, so as to determine the optical aberration of the imaging module 2. In addition, the control unit is also electrically connected to each filter. After the control unit determines that the image receiving unit 31 has received the scattered image, it indicates that the scattered image corresponding to the wavelength under the current filter has been received, and the next wavelength can be changed to continue receiving the scattered image. Then the control unit will control the filter to switch to the filter of the next wavelength to realize the reception of the scattered image of the next wavelength.

[0048] Optionally, continue to refer to Figure 4 , the telescopic magnification module 133 includes a converging lens 1331 and a second collimating lens 1332; the converging lens 1331 is located between the filter module 132 and the second collimating lens 1332, and the second collimating lens 1332 is located between the converging lens 1331 and the reflector 134.

[0049] Among them, the converging lens 1331 is used to focus the light. The second collimating lens 1332 is the same as the first collimating lens 131 and is used to collimate the light to form parallel light.

[0050] Optionally, the size of the nanoparticles 11 is much smaller than the diffraction limit of the imaging module 2.

[0051] Among them, the diffraction limit of the imaging module 2 refers to the theoretical limit of the resolution caused by the wave nature of light waves in the optical system. In this embodiment, the size of the nanoparticles 11 is set to be much smaller than the diffraction limit of the imaging module 2, so as to ensure that the scattered light generated by the scattered light generating module 1 is a scattered point light source, so as to ensure that the scattered image generated by the imaging module 2 is the point spread function of the imaging module 2 and ensure the accuracy of aberration calculation.

[0052] Optionally, continue to refer to Figure 2, the scattered light generation module 1 further includes a three-dimensional moving stage (not shown in the figure) and a movement control mechanism (not shown in the figure); the movement control mechanism is electrically connected to the three-dimensional moving stage; the three-dimensional moving stage is located on the side of the glass slide 15 away from the imaging module 2 and is in contact with the glass slide 15; the movement control mechanism is used to control the three-dimensional moving stage to move in a preset direction by a preset step length, driving the nanoparticles 11 to move, so that the monochromatic light is focused on different positions of the nanoparticles 11 to form a plurality of scattered point light sources; wherein, the preset direction includes a first direction, a second direction and a third direction, and the first direction, the second direction and the third direction are perpendicular to each other in pairs.

[0053] Wherein, the three-dimensional moving stage is used to drive the glass slide 15 to move in a preset direction, so that the nanoparticles 11 move in three directions. The movement control mechanism is used to control the three-dimensional moving stage to move by a preset step length to realize the movement of the glass slide 15. In this embodiment, the preset direction includes a first direction, a second direction and a third direction, and the first direction, the second direction and the third direction are perpendicular to each other in pairs, that is, the first direction, the second direction and the third direction can be the X direction, the Y direction and the Z direction respectively.

[0054] Specifically, the number of the nanoparticles 11 can be one or more. To ensure that the image receiving and processing module 3 can accurately obtain a plurality of scattered point light sources scattered at different positions of the nanoparticles 11, usually a plurality of nanoparticles 11 are arranged flat on the surface of the glass slide 15. At this time, in order to obtain the scattered images at different positions of the nanoparticles 11, this embodiment is provided with a three-dimensional moving stage and a movement control mechanism. The movement control mechanism controls the three-dimensional moving stage to move by a preset step length in a plane perpendicular to the optical axis direction, so that the image receiving and processing module 3 can receive the scattered images of different fields of view in the X direction and the Y direction. In addition, the movement control mechanism controls the three-dimensional moving stage to move by a preset step length in a direction parallel to the optical axis direction, that is, the Z direction, so that the image receiving and processing module 3 can receive the scattered images of different focal lengths, that is, the scattered images in the defocus state and the in-focus state. In this way, it is ensured that the image receiving and processing module 3 can receive a plurality of scattered images in three dimensions. The plurality of scattered images include the scattered images of different fields of view and the scattered images in the defocus state and the in-focus state, that is, a plurality of three-dimensional point spread functions are formed, and the physical model is used to perform data reconstruction calculation on the plurality of three-dimensional point spread functions to determine the optical aberration of the imaging module 2.

[0055] Optionally, the diameter D of the nanoparticles satisfies: 1nm ≤ D ≤ 10um.

[0056] Specifically, the nanoparticles 11 may include, but are not limited to, metal nanoparticles such as gold nanoparticles. In this embodiment, the diameter D of the nanoparticles satisfies 1 nm ≤ D ≤ 10 μm. Exemplarily, D may be 1 nm, 10 nm, 1 μm, 3 μm, 5 μm, or 10 μm, and can be specifically determined according to the actual situation without limitation herein.

[0057] It should be understood that various forms of the processes shown above can be used, with steps reordered, added, or deleted. For example, the steps recited in the present invention can be executed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved, and no limitation is imposed herein.

[0058] The above specific embodiments do not constitute a limitation on the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. An aberration detection device, characterized in that: It includes a scattered light generating module, an imaging module and an image receiving and processing module; The scattered light generating module is provided with nanoparticles, and the scattered light generating module is used to generate a scattered point light source formed by scattering of the nanoparticles; the imaging module and the image receiving and processing module are sequentially arranged along the optical axis of the scattered point light source; the imaging module is used to focus and image the scattered point light source to generate a scattered image; the image receiving and processing module is located at the imaging position of the scattered image, and is used to receive the scattered image, and perform data reconstruction calculation on the point spread function formed by the scattered image to determine the optical aberration of the imaging module; The scattered light generating module comprises a light source, a three-dimensional moving platform and a moving control mechanism, wherein the light source is used to generate monochromatic light; and further comprises a glass slide arranged along the optical axis of the monochromatic light; The movement control mechanism is electrically connected to the three-dimensional moving platform; the three-dimensional moving platform is located on a side of the glass slide away from the imaging module and is attached to the glass slide; The mobile control mechanism is used to control the three-dimensional mobile platform to move in a preset direction according to a preset step size, driving the nanoparticles to move, so that the monochromatic light is focused to different positions of the nanoparticles to form a plurality of scattered point light sources; wherein the preset directions include a first direction, a second direction and a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

2. The aberration detection device according to claim 1, characterized in that: The scattered light generating module further comprises a focusing lens group and a condensing module arranged in sequence along the optical axis of the monochromatic light; the glass slide is located on a side of the condensing module away from the focusing lens group, and the nanoparticles are arranged on a side of the glass slide close to the imaging module and adhered to the glass slide; The focusing lens group is used to collimate the monochromatic light; the focusing module is used to focus the collimated monochromatic light onto the nanoparticles, so that the nanoparticles are scattered to form the scattered point light source.

3. The aberration detection device according to claim 2, characterized in that: The imaging module includes an objective lens and a tube lens; The objective lens is located on the optical axis of the slide away from the light source; the tube lens is located on the optical axis of the objective lens away from the light source; The numerical aperture of the objective lens is smaller than the numerical aperture of the focusing module.

4. The aberration detection device according to claim 2, characterized in that: The focusing module includes a dark field focusing module.

5. The aberration detection device according to claim 2, characterized in that: The focusing lens group comprises a first collimating lens, a filter module, a telephoto magnifying module and a reflecting mirror which are sequentially arranged along the optical axis of the monochromatic light; The first collimator is located between the light source and the filter module, and the reflector is located between the telephoto magnification module and the focusing module.

6. The aberration detection device according to claim 5, characterized in that: The image receiving and processing module includes an image receiving unit and a control unit; the filter module includes a plurality of filters of different wavelengths; The control unit is electrically connected to the image receiving unit and each of the filters respectively; the image receiving unit is used to receive the scattered image; and the control unit is used to control the filter to switch after determining that the image receiving unit has received the scattered image at the wavelength corresponding to the current filter, so that the image receiving unit receives the scattered images at the wavelengths corresponding to the remaining filters.

7. The aberration detection device according to claim 5, characterized in that: The telephoto magnification module comprises a converging lens and a second collimating lens; the converging lens is located between the filter module and the second collimating lens, and the second collimating lens is located between the converging lens and the reflecting mirror.

8. The aberration detection device according to claim 1, characterized in that: The size of the nanoparticles is much smaller than the diffraction limit of the imaging module.

9. The aberration detection device according to claim 1, characterized in that: The diameter D of the nanoparticles satisfies: 1nm≤D≤10um.

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