Focusing platform for optical range finder and working method

Abstract

The invention discloses a focusing platform for an optical range finder and a working method, solves the problem of low flatness of the focusing platform of the optical range finder in the prior art, and has the beneficial effect of ensuring the focusing precision and stability of the focusing platform, and the specific scheme is as follows: the focusing platform for the optical range finder comprises an XY parallel piezoelectric positioning table, the XY parallel piezoelectric positioning table comprises a first base, the first base is hollow, an X-direction positioning table is arranged in the first direction of the hollow portion of the first base, a Y-direction positioning table is arranged in the second direction of the hollow portion of the first base, the X-direction positioning table and the Y-direction positioning table are both connected with the supporting base, and external decoupling modules are arranged on the portions, on the other side of the X-direction positioning table and the other side of the Y-direction positioning table, of the first base. The external decoupling module is connected with the supporting seat, the supporting seat is connected with the Z-axis compensation piezoelectric positioning table, the two sides of the Z-axis compensation piezoelectric positioning table are respectively provided with a homocentric-square-shaped hinge to serve as a guide mechanism of the Z-axis compensation piezoelectric positioning table, and the Z-axis compensation piezoelectric positioning table compensates external parasitism of the XY parallel piezoelectric positioning table top.

Description

Technical Field

[0001] The invention relates to the technical field of distance measurement, in particular to a focusing platform for an optical distance meter and a working method. Background Art

[0002] The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art.

[0003] In recent years, multi-degree-of-freedom ultra-precision positioning platforms that can achieve high-precision motion scanning and tracking are one of the important components of the core components in the current cutting-edge fields, and are widely used in high-precision fields such as semiconductor manufacturing, micro-electromechanical systems, medical devices, and space communications.

[0004] At present, the two-degree-of-freedom piezoelectric positioning platform generally relies too much on the external decoupling hinge between the drive amplifier and the mover to complete the decoupling of the mover motion. Few people consider the impact of the coupling problem of the XY parallel piezoelectric positioning platform on the drive amplifier itself. Due to the integrated structural design, the two-degree-of-freedom parallel piezoelectric positioning platform has inevitable coupling errors. The coupling error generated by the mover will directly act on the output end of the drive amplifier through the flexible hinge, and will be transmitted to the input end where the piezoelectric ceramic driver is located through the input end of the drive amplifier, thereby affecting the stability of the piezoelectric ceramic drive at the input end. In addition, during the movement of the two-degree-of-freedom parallel piezoelectric positioning platform, in addition to the conventional XY coupling error, there will also be out-of-plane parasitic errors, namely Z-axis errors. At present, the Z-axis error is rarely analyzed. However, at this stage, optical rangefinders use piezoelectric positioning platforms for focusing. During the focusing process, there are relatively strict requirements for the plane accuracy of the parallel platform. The plane accuracy of the Z-axis will directly affect the focusing accuracy.

[0005] In addition, the current XY parallel piezoelectric positioning stage has output errors caused by piezoelectric ceramic installation deviations because both ends of the piezoelectric ceramics are rigidly connected; due to the structural setting of the XY parallel piezoelectric positioning stage, there is also an overall lack of stability, which affects the focusing accuracy and stability of the optical rangefinder. Summary of the invention

[0006] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a focusing platform for an optical rangefinder, in which an XY parallel piezoelectric positioning table is connected to a support seat, and the support seat is connected to a Z-axis compensation piezoelectric positioning table. The Z-axis compensation piezoelectric positioning table performs out-of-plane compensation on the XY parallel piezoelectric positioning table to ensure its plane accuracy.

[0007] In order to achieve the above object, the present invention is implemented through the following technical solutions: A focusing platform for an optical rangefinder comprises an XY parallel piezoelectric positioning table, wherein the XY parallel piezoelectric positioning table comprises a first base, wherein the first base is hollow, wherein an X-direction positioning table is arranged in the first direction at the hollow part of the first base, and a Y-direction positioning table is arranged in the second direction, wherein both the X-direction positioning table and the Y-direction positioning table are connected to a support seat, wherein an external decoupling module is arranged on the other side of the X-direction positioning table and the Y-direction positioning table of the first base, wherein the external decoupling module is connected to the support seat, wherein piezoelectric ceramics are arranged on the X-direction positioning table and the Y-direction positioning table respectively, wherein both ends of the piezoelectric ceramics are spherical, wherein the support seat is connected to a Z-axis compensation piezoelectric positioning table, wherein return hinges are arranged on both sides of the Z-axis compensation piezoelectric positioning table as guide mechanisms of the Z-axis compensation piezoelectric positioning table respectively, wherein the Z-axis compensation piezoelectric positioning table compensates for the parasitics outside the surface of the XY parallel piezoelectric positioning table, thereby realizing the adjustment of the flatness of the XY parallel piezoelectric positioning table.

[0008] In the focusing platform for an optical rangefinder as described above, the structures of the X-axis positioning stage and the Y-axis positioning stage are the same, and both include a driving amplifier module. The driving amplifier module includes a guide input unit, a primary amplification unit, a displacement steering unit, a secondary amplification unit, an output unit and a decoupling unit connected in sequence. The vertical upward displacement is converted into a horizontal displacement for output through the displacement steering unit, and the decoupling unit is connected to the Z-axis compensation piezoelectric positioning stage.

[0009] In the focusing platform for an optical rangefinder as described above, the guide input unit includes an input rod, guide leaf spring beams are respectively arranged at both ends of the input rod, the side of the guide leaf spring beam away from the support seat is movably connected to the primary amplification unit, and the primary amplification unit includes an amplification lever, which is connected to the displacement steering unit through a primary output hinge.

[0010] As described above, in a focusing platform for an optical rangefinder, a straight-leaf hinge is arranged on one side of the amplifying lever facing the supporting seat, the first-level output hinge is arranged on the other side of the amplifying lever, and a fulcrum hinge connected to the first base is also arranged, and the fulcrum hinge and the first-level output hinge are arranged opposite to each other.

[0011] As described above, in a focusing platform for an optical rangefinder, the displacement steering units are arranged at two locations, the two displacement steering units are arranged opposite to each other, the displacement steering units include a steering rod, the steering rod is L-shaped, a steering fulcrum hinge is arranged on the outer side of the longer side of the steering rod, the steering fulcrum hinge is connected to the first base, the inner sides of the longer sides of the two steering rods are respectively connected to the secondary amplification units, and the decoupling unit is arranged in the middle of the secondary amplification units on both sides.

[0012] In the focusing platform for an optical rangefinder as described above, a conical limiting hole is arranged on a side of the guide input unit away from the support seat, one end of the piezoelectric ceramic contacts the conical limiting hole, and the other end is fixedly connected to the first base.

[0013] In the focusing platform for an optical rangefinder as described above, the decoupling unit comprises an output rod, and the output rod is connected to the support seat via a leaf spring hinge; Leaf spring type hinges are respectively arranged on opposite sides of the external decoupling module to be connected with the first base.

[0014] In the focusing platform for an optical rangefinder as described above, the secondary amplification unit includes an amplification input rod, one side of the amplification input rod is connected to the displacement steering unit via an input hinge, and the other side of the amplification input rod is connected to the decoupling unit via a secondary output hinge.

[0015] As described above, a focusing platform for an optical rangefinder, the Z-axis compensation piezoelectric positioning platform includes a second base, the second base is installed on the support base, the second base supports the mover through the return hinge, a Z-direction piezoelectric ceramic is arranged between the second base and the mover, and the mover is connected to the optical device of the optical rangefinder.

[0016] In a second aspect, the present invention further provides a working method of a focusing platform for an optical rangefinder, comprising the following contents: The first base is connected with the X-axis positioning table, the Y-axis positioning table and the support seat as a whole, the support seat is connected with the Z-axis compensation piezoelectric positioning table, and return hinges are respectively arranged on both sides of the Z-axis compensation piezoelectric positioning table; For the compensation of the external parasitics of the XY parallel piezoelectric positioning table, the Z-axis compensation piezoelectric positioning table can be used to compensate for the external parasitics of the XY parallel piezoelectric positioning table, so as to adjust the flatness of the XY parallel piezoelectric positioning table. The piezoelectric ceramic movement drives the support seat to move, thereby achieving the focusing of the optical rangefinder.

[0017] The beneficial effects of the present invention are as follows: 1) In the present invention, the defect of out-of-plane parasitics of the two-degree-of-freedom parallel piezoelectric platform is taken into consideration, and a Z-axis compensation piezoelectric positioning stage is connected in series to the original two-degree-of-freedom parallel piezoelectric platform. The out-of-plane compensation of the XY parallel piezoelectric positioning stage is performed by driving the Z-axis compensation piezoelectric positioning stage to ensure its plane accuracy, and meet the requirements of the optical rangefinder focusing platform for plane accuracy. The incident position of the optical path is fine-tuned at the nanometer level by the XY parallel piezoelectric positioning stage to determine the accuracy of the optical path position, and the Z-axis compensation piezoelectric positioning stage is fine-tuned to determine the stability of the focusing plane, thereby completing the focusing problem of the plane.

[0018] 2) In the present invention, both the X-axis positioning stage and the Y-axis positioning stage are provided with piezoelectric ceramics, and both ends of the piezoelectric ceramics are spherical, so that the two ends of the piezoelectric ceramics can be in flexible contact with the corresponding components to transmit force. Compared with the traditional rigid connection, the stability of the piezoelectric ceramic output is guaranteed, and the output error caused by the installation deviation of the piezoelectric ceramics is effectively eliminated. At the same time, the spherical contact method reduces the stress concentration problem of the piezoelectric ceramics caused by the installation deviation, improves the life of the piezoelectric ceramics, and reduces the risk of piezoelectric ceramic breakdown.

[0019] 3) In the present invention, both the X-axis positioning stage and the Y-axis positioning stage include a driving amplifier module, and adopt a multi-stage amplification mechanism, so that a smaller piezoelectric ceramic can be used to produce a larger displacement. Under the same displacement amplification ratio, the design mechanism has a higher natural frequency and a greater lateral stiffness while ensuring the compactness of the mechanism. The driving amplifier module has better dynamic performance. The driving amplifier module has an internal decoupling function, which can effectively offset the influence of the external coupling error on the driving amplifier module, reduce the motion inertia of the input end of the driving amplifier, and ensure the stability of the driving amplifier movement.

[0020] 4) The hinges in the present invention are reasonably arranged. The straight leaf hinge has a good guiding function and has certain torsional characteristics, providing the mechanism with better guiding and decoupling performance; the leaf spring hinge has a good guiding function and uses its torsional sensitivity to provide good guiding performance, which can ensure the stability of the linear output. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0022] Figure 1 It is a schematic diagram of a focusing platform for an optical rangefinder according to one or more embodiments of the present invention.

[0023] Figure 2 It is a schematic diagram of an XY parallel piezoelectric positioning stage in a focusing platform for an optical rangefinder according to one or more embodiments of the present invention.

[0024] Figure 3 It is an enlarged view of a Y-axis positioning stage in a focusing platform for an optical rangefinder according to one or more embodiments of the present invention.

[0025] Figure 4 It is a cross-sectional view of a Y-axis positioning stage in a focusing platform for an optical rangefinder according to one or more embodiments of the present invention.

[0026] Figure 5It is a front view of a Z-axis compensation piezoelectric positioning stage in a focusing platform for an optical rangefinder according to one or more embodiments of the present invention.

[0027] Figure 6 It is a schematic diagram of a Z-axis compensation piezoelectric positioning stage in a focusing platform for an optical rangefinder according to one or more embodiments of the present invention.

[0028] In the figure: the distances or sizes between parts are exaggerated to show the positions of various parts, and the schematic diagram is for reference only.

[0029] Among them: 1-XY parallel piezoelectric positioning stage; 2-Z axis compensation piezoelectric positioning stage; P1-X-axis piezoelectric ceramics, P2-Y-axis piezoelectric ceramics; 11-driving amplifier module; 12-external decoupling module; 13-support base; 14-first base; 21-guide leaf spring beam; 22-input rod; 23-straight leaf hinge; 31-enlarging lever; 32-fulcrum hinge; 33-primary output hinge; 41-steering rod; 42-steering fulcrum hinge; 51-input hinge; 52-enlarged input rod; 53-secondary output hinge; 61- output rod; 71-conical limiting hole; 72-pre-tightening threaded hole; 81- second base; 82- return hinge; 83- mover; 121- straight leaf hinge; 122- leaf spring hinge. DETAILED DESCRIPTION

[0030] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used in the present invention have the same meanings as those commonly understood by those skilled in the art to which the present invention belongs.

[0031] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless otherwise explicitly stated in the present invention, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof; As introduced in the background technology, the focusing platform of the optical rangefinder in the prior art has the problem of poor plane accuracy. In order to solve the above technical problem, the present invention proposes a focusing platform for an optical rangefinder.

[0032] In a typical embodiment of the present invention, reference is made to Figure 1 As shown, a focusing platform for an optical rangefinder includes an XY parallel piezoelectric positioning stage 1, the XY parallel piezoelectric positioning stage 1 includes a first base 14, the first base 14 is hollow, an X-axis positioning stage is arranged in the first direction and a Y-axis positioning stage is arranged in the second direction at the hollow part of the first base 14, the X-axis positioning stage and the Y-axis positioning stage are arranged adjacent to each other, both of which are connected to a support seat 13, the X-axis positioning stage and the Y-axis positioning stage are respectively provided with piezoelectric ceramics, both ends of the piezoelectric ceramics are spherical, the support seat 13 is connected to a Z-axis compensation piezoelectric positioning stage 2, return hinges are respectively arranged on both sides of the Z-axis compensation piezoelectric positioning stage 2 as a guide mechanism of the Z-axis compensation piezoelectric positioning stage 2, and the flatness of the XY parallel piezoelectric positioning stage 1 is adjusted by compensating the off-surface parasitics of the XY parallel piezoelectric positioning stage 1 by the Z-axis compensation piezoelectric positioning stage 2.

[0033] It is easy to understand that the XY parallel piezoelectric positioning stage 1 and the Z-axis compensation piezoelectric positioning stage 2 are both integrated models, and the two are connected through threaded holes on the support seat 13 of the XY parallel piezoelectric positioning stage 1 and the second base 81 of the Z-axis compensation piezoelectric positioning stage 2.

[0034] The first base 14 is specifically an integrated rigid frame structure. The first base 14 is provided with positioning holes, and the first base 14 can be installed at a set position of the test platform or the experimental platform through the positioning holes.

[0035] In this embodiment, reference Figure 2 As shown, the structures of the X-axis positioning table and the Y-axis positioning table are the same, and both adopt a symmetrical structure. The driving amplifier module 11 of the X-axis positioning table includes a guide input unit, a primary amplification unit, a displacement steering unit, a secondary amplification unit, an output unit and a decoupling unit connected in sequence. The amplification lever of the primary amplification unit is connected to the displacement steering unit through the output hinge of the primary amplification unit; the displacement steering unit is connected to the secondary amplification unit through the input hinge of the secondary amplification unit, and the secondary output hinge of the secondary amplification unit is connected to the decoupling unit. Through the displacement steering unit, the vertical upward displacement is converted into a horizontal displacement for output. The decoupling unit is connected to the support seat 13 through a hinge, and the support seat 13 is connected to the Z-axis compensation piezoelectric positioning table 2.

[0036] In this embodiment, reference Figure 3As shown, the guide input unit includes a guide leaf spring beam 21, an input rod 22, and a straight leaf hinge 23, and the primary amplification unit includes an amplification lever 31, a fulcrum hinge 32, and an output hinge 33. The guide leaf spring beams 21 are respectively arranged at both ends of the input rod 22, and the straight leaf hinges 23 are respectively arranged on both sides of the input rod 22 facing the piezoelectric ceramic, and the straight leaf hinges 23 on both sides are respectively connected to the amplification lever 31 of the primary amplification unit, and the amplification lever 31 is connected to the steering rod 41 in the displacement steering unit through the primary output hinge 33, and is connected to the first base 14 through the fulcrum hinge 32, and the fulcrum hinge 32 is arranged opposite to the primary output hinge 33; The steering rod 41 is L-shaped, the shorter side of the steering rod is connected to the primary output hinge 33, the primary output hinge 33 is specifically an arc-shaped hinge, the outer side of the longer side of the steering rod is provided with a steering fulcrum hinge 42, the steering fulcrum hinge 42 is connected to the first base 14, the inner sides of the longer sides of the two steering rods are respectively connected to the secondary amplification units, and the middle of the secondary amplification units on both sides is provided with a decoupling unit, and the decoupling unit specifically includes an output rod 61. It can be understood that the guide input unit is provided on the inner side of the decoupling unit and is spaced apart from the decoupling unit.

[0037] It is easy to understand that a piezoelectric ceramic (piezoelectric ceramic driver) is placed between the input rod 22 of the guide input unit and the first base 14 of the XY parallel piezoelectric positioning stage 1, and ball heads are specifically attached to both ends of the piezoelectric ceramic so that both ends of the piezoelectric ceramic are spherical. Figure 4 As shown, the input rod 22 of the guide input unit is provided with a conical limiting hole 71 on one side facing the straight leaf hinge 23, which is used to match the ball heads at both ends of the piezoelectric ceramics. The input rod 22 contacts the ball heads at one end of the X-direction piezoelectric ceramics P1 and the Y-direction piezoelectric ceramics P2 through the conical limiting hole 71 thereon, and the ball heads at the other ends of the X-direction piezoelectric ceramics P1 and the Y-direction piezoelectric ceramics P2 contact and provide pre-tightening through pre-tightening screws, which are installed at the pre-tightening threaded holes 72. The first base 14 is provided with pre-tightening threaded holes 72 on both sides of the shorter side of the steering rod 41. Among them, the contact mode between the conical limiting hole 71 and the piezoelectric ceramic ball head can effectively eliminate the component force in the vertical driving direction generated by the installation of the piezoelectric ceramics, and can effectively reduce the parasitic of the flexible mechanism caused by the assembly error. At the same time, the driving amplifier module 11 adopts a symmetrical design, which can ensure symmetrical and stable output on both sides of the mechanism.

[0038] Among them, a straight leaf hinge 23 is arranged on one side of the amplifying lever 31, and a fulcrum hinge 32 and an output hinge 33 are arranged on the other side. The straight leaf hinge 23 has good guiding performance and certain torsional performance and is relatively flexible.

[0039] It is easy to understand that the primary amplifying unit adopts the lever principle to amplify the input displacement, wherein the fulcrum of the amplifying lever 31 is the fulcrum hinge of the primary amplifying unit, and the output end of the amplifying lever 31 is the primary output hinge 33 of the primary amplifying unit. The fulcrum hinge 32 and the primary output hinge 33 are both arc-shaped hinges with good rotation performance. The main movement direction of the primary amplifying unit is the same as the direction of the X-axis piezoelectric ceramic P1 or the Y-axis piezoelectric ceramic P2. Due to the inherent characteristics of the integrated flexible mechanism and the inevitable result of the lever principle, the amplifying lever 31 will produce a slight rotation, and the arc-shaped hinge solves this problem better. The length of the amplifying lever 31 of the primary amplifying unit or the relative positions of the fulcrum hinge 32 and the primary output hinge 33 are adjusted to adjust the amplification ratio of the primary amplifying unit. The change in the amplification ratio will affect the output and output stiffness of the primary amplifying unit.

[0040] In addition, by adjusting the length of the steering rod 41, the position of the steering fulcrum hinge 42 and the relative position of the primary output hinge 33 of the primary amplification unit, the displacement amplification ratio of the displacement steering unit can be changed, which will also affect the input and output stiffness of the displacement steering unit.

[0041] Specifically, the secondary amplification unit includes an input hinge 51 connected to the longer inner side surface of the steering rod, the input hinge 51 is connected to the amplification input rod 52, and a secondary output hinge 53 is arranged at the other end of the amplification input rod 52. Two amplification input rods 52 are arranged on each side of the decoupling unit. By adjusting the relative positions of the input hinge 51 and the secondary output hinge 53 of the secondary amplification unit and the amplification input rod 52 of the secondary amplification unit, the displacement amplification ratio of the secondary amplification unit can be changed, and the output and output stiffness of the secondary amplification unit can be affected at the same time. By changing the upper and lower positions of the input hinge 51 and the secondary output hinge 53 of the secondary amplification unit, the movement direction of the secondary amplification unit can be changed. When the input hinge 51 is located below the secondary output hinge 53, the composite bridge mechanism is a convex structure, the composite bridge mechanism is pulled, and the output rod 61 produces a downward movement, and vice versa.

[0042] In addition, the external decoupling module 12 is connected to the Z-axis compensating piezoelectric positioning table 2 through a straight-leaf hinge 121 to complete the transmission of the main motion and decouple the parallel motion. Leaf spring hinges 122 are respectively arranged on both sides of the external decoupling module 12. The leaf spring hinges 122 ensure the stability of the output of the support seat 13 and further reduce the generation of coupling errors.

[0043] It should be additionally explained that the secondary output hinge 53 and the input hinge 51 are both existing hinges.

[0044] refer to Figure 5 and Figure 6As shown, the Z-axis compensation piezoelectric positioning table 2 includes a second base 81, which is installed at the support base 13. The second base 81 is an inverted T-shaped structure. The two sides of the vertical section of the second base 81 are respectively provided with return hinges 82, and the mover 83 is supported by the return hinges 82 on both sides. The second base 81, the return hinge 82 and the mover 83 are made into one body. The side and top of the second base 81 are respectively provided with threaded holes 84 for connection with the packaging board. The top of the second base 81 The side is hollow, and the mover 83 is an inverted T-shaped member. The top of the mover 83 extends out from the hollow of the second base 81. The surface of the mover 83 is provided with a threaded hole 84 for connection with the optical device. The return hinges on both sides of the mover 83 serve as the guide mechanism of the Z-axis compensation piezoelectric positioning stage 2 to ensure the stable output of the mover 83. The return hinge 82 has the advantages of compactness, good single-axis drive guiding performance, and high natural frequency, providing better dynamic performance for the Z-axis compensation piezoelectric positioning stage; The second base 81 is provided with a recess 85 at the lower part of the mover 83, the Z-direction piezoelectric ceramic is located between the bottom of the recess 85 and the mover 83, the upper end of the Z-direction piezoelectric ceramic is directly combined with the mover 83, the mover 83 is provided with a conical groove for matching with the ball head structure of the Z-direction piezoelectric ceramic, and the Z-direction piezoelectric ceramic is installed at the second base 81 by a pre-tightening screw, which can ensure that the Z-direction piezoelectric ceramic is subjected to uniform force and eliminate the influence of installation errors as much as possible; During operation, when the XY parallel piezoelectric positioning stage 1 generates out-of-plane parasitics, the Z-axis compensation piezoelectric positioning stage 2 outputs displacement to the mover 83 through the Z-direction piezoelectric ceramics. The out-of-plane parasitics of the XY parallel piezoelectric positioning stage 1 are compensated to achieve the focusing of the optical rangefinder; at the same time, in order to meet the precision requirements of optical devices such as light source focusing on the Z-axis, the Z-axis compensation piezoelectric positioning stage 2 can drive the mover to complete the Z-direction adjustment work.

[0045] This embodiment also provides a working method of a focusing platform for an optical rangefinder, including the following contents: The first base 14 is connected to the X-axis positioning stage, the Y-axis positioning stage, and the support seat 13 as a whole. The support seat 13 is connected to the Z-axis compensation piezoelectric positioning stage 2. The two sides of the Z-axis compensation piezoelectric positioning stage 2 are respectively provided with return hinges 82; For the compensation of the parasitic outside the surface of the XY parallel piezoelectric positioning stage 1, the Z-axis compensation piezoelectric positioning stage 2 compensates the parasitic outside the surface of the XY parallel piezoelectric positioning stage 1, thereby realizing the adjustment of the flatness of the XY parallel piezoelectric positioning stage 1; The X-axis piezoelectric ceramic P1 and the Y-axis piezoelectric ceramic P2 in the XY parallel piezoelectric positioning stage 1 respectively drive the support seat 13 to move, and the support seat 13 supports the measuring mechanism of the optical rangefinder through the Z-axis compensation piezoelectric positioning stage 2. The focusing of the optical rangefinder is achieved through the movement of the XY parallel piezoelectric positioning stage 1 and the Z-axis compensation piezoelectric positioning stage 2.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A focusing platform for an optical rangefinder, characterized in that: The invention comprises an XY parallel piezoelectric positioning table, which comprises a first base. The first base is hollow, an X-axis positioning table is arranged in the first direction at the hollow part of the first base, and a Y-axis positioning table is arranged in the second direction, both the X-axis positioning table and the Y-axis positioning table are connected to a support seat, an external decoupling module is arranged on the other side of the X-axis positioning table and the Y-axis positioning table of the first base, the external decoupling module is connected to the support seat, piezoelectric ceramics are arranged on the X-axis positioning table and the Y-axis positioning table respectively, both ends of the piezoelectric ceramics are spherical, the support seat is connected to the Z-axis compensation piezoelectric positioning table, return hinges are arranged on both sides of the Z-axis compensation piezoelectric positioning table as the guiding mechanism of the Z-axis compensation piezoelectric positioning table, and the flatness adjustment of the XY parallel piezoelectric positioning table is realized by compensating the external parasitic of the XY parallel piezoelectric positioning table surface through the Z-axis compensation piezoelectric positioning table.

2. The focusing platform for an optical rangefinder according to claim 1, characterized in that: The structures of the X-axis positioning stage and the Y-axis positioning stage are the same, and both include a driving amplifier module. The driving amplifier module includes a guide input unit, a primary amplification unit, a displacement steering unit, a secondary amplification unit, an output unit and a decoupling unit connected in sequence. The vertical upward displacement is converted into a horizontal displacement for output through the displacement steering unit, and the decoupling unit is connected to the Z-axis compensation piezoelectric positioning stage.

3. The focusing platform for an optical rangefinder according to claim 2, characterized in that: The guide input unit includes an input rod, and guide leaf spring beams are respectively arranged at both ends of the input rod. The side of the guide leaf spring beam away from the support seat is movably connected to the first-level amplification unit. The first-level amplification unit includes an amplification lever, and the amplification lever is connected to the displacement steering unit through a first-level output hinge.

4. The focusing platform for an optical rangefinder according to claim 3, characterized in that: A straight leaf hinge is arranged on one side of the amplifying lever facing the supporting seat, the primary output hinge is arranged on the other side of the amplifying lever, and a fulcrum hinge connected to the first base is also arranged, and the fulcrum hinge is arranged opposite to the primary output hinge.

5. The focusing platform for an optical rangefinder according to claim 2, characterized in that: The displacement steering units are arranged at two locations, and the two displacement steering units are arranged opposite to each other. The displacement steering units include a steering rod, which is L-shaped. A steering fulcrum hinge is arranged on the outer side of the longer side of the steering rod, and the steering fulcrum hinge is connected to the first base. The inner sides of the longer sides of the two steering rods are respectively connected to the secondary amplification units, and the decoupling unit is arranged in the middle of the secondary amplification units on both sides.

6. The focusing platform for an optical rangefinder according to claim 2, characterized in that: A conical limiting hole is arranged on one side of the guide input unit away from the support seat, one end of the piezoelectric ceramic contacts the conical limiting hole, and the other end is fixedly connected to the first base.

7. The focusing platform for an optical rangefinder according to claim 2, characterized in that: The decoupling unit comprises an output rod connected to the support seat via a leaf spring hinge; Leaf spring type hinges are respectively arranged on opposite sides of the external decoupling module to be connected with the first base.

8. The focusing platform for an optical rangefinder according to claim 2, characterized in that: The secondary amplification unit comprises an amplification input rod, one side of which is connected to the displacement steering unit via an input hinge, and the other side of which is connected to the decoupling unit via a secondary output hinge.

9. The focusing platform for an optical rangefinder according to claim 1, characterized in that: The Z-axis compensating piezoelectric positioning platform includes a second base, which is installed on the supporting base. The second base supports the mover through the return hinge. Z-direction piezoelectric ceramics are arranged between the second base and the mover, and the mover is connected to the optical device of the optical rangefinder.

10. A working method of a focusing platform for an optical rangefinder according to any one of claims 1 to 9, characterized in that: It includes the following: The first base is connected with the X-axis positioning table, the Y-axis positioning table and the support seat as a whole, the support seat is connected with the Z-axis compensation piezoelectric positioning table, and return hinges are respectively arranged on both sides of the Z-axis compensation piezoelectric positioning table; For the compensation of the external parasitics of the XY parallel piezoelectric positioning table, the Z-axis compensation piezoelectric positioning table can be used to compensate for the external parasitics of the XY parallel piezoelectric positioning table, so as to adjust the flatness of the XY parallel piezoelectric positioning table. The piezoelectric ceramic movement drives the support seat to move, thereby achieving the focusing of the optical rangefinder.

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