Beam bunching equipment

Abstract

The invention relates to the technical field of charged particle beam bunching, and provides bunching equipment which comprises a resonance device, a vacuum feed-through, an inductance device and a radio frequency feed-in device, the resonance device comprises a resonance cylinder, a first drift tube and a second drift tube, the resonance cylinder is provided with a resonant cavity, at least part of the first drift tube is located in the resonant cavity, and at least part of the second drift tube is located in the resonant cavity. At least part of the second drift tube is located outside the resonant cavity, and the first drift tube and the second drift tube are arranged at an interval and are both used for conveying belt electron particle beams; the vacuum feed-through is connected with the resonant cylinder; the inductance device comprises an inductance coil, and the inductance coil is electrically connected with the first drift tube through vacuum feed-through; and the radio frequency feed-in device is electrically connected with the inductance coil. The inductance device and the resonance device generate LC resonance, longitudinal compression of charged particle beams is completed, and the beam bunching function is achieved. The inductance device and the resonance device are relatively independent, and the bunching requirements of different frequencies are met on the premise that the overall size of the bunching equipment is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of charged particle beam focusing, and in particular to a focusing device. Background Art

[0002] This section is intended to provide a background or context for the embodiments of the present application. No description herein is admitted to be prior art by virtue of its inclusion in this section.

[0003] With the continuous development of accelerator technology, the demand for charged particle beams with shorter pulse widths is increasing. The buncher is the main optical element for longitudinally modulating particles during the beam pulsing process. The buncher plays a vital role in the longitudinal modulation of the charged particle beam. The buncher compresses the charged particle beam into a bunch with a narrower pulse width to facilitate efficient particle physics research, material science, medical treatment (such as particle therapy for cancer) and ion implantation and other industrial applications. Therefore, it is necessary to provide a bunching device for longitudinally modulating the charged particle beam to meet application requirements. Summary of the invention

[0004] In view of this, an embodiment of the present application hopes to provide a bunching device capable of realizing the longitudinal bunching function of a charged particle beam.

[0005] The present application provides a beam-forming device, including:

[0006] A resonance device, comprising a resonance cylinder, a first drift tube and a second drift tube, wherein the resonance cylinder has a resonance cavity, at least a portion of the first drift tube is located in the resonance cavity, at least a portion of the second drift tube is located outside the resonance cavity, the first drift tube and the second drift tube are arranged at intervals and are both used to transport charged particle beams;

[0007] A vacuum feedthrough connected to the resonant cylinder;

[0008] an inductive device, comprising an inductive coil, wherein the inductive coil is electrically connected to the first drift tube through the vacuum feedthrough;

[0009] A radio frequency feeding device is electrically connected to the inductor coil.

[0010] In some embodiments, the number of the second drift tubes is two, one of which is connected to the front side wall of the resonance cylinder along the longitudinal direction toward the front side, and the other of which is connected to the rear side wall of the resonance cylinder along the longitudinal direction toward the rear side, and the first drift tube is arranged in the resonance cavity and located between the two second drift tubes.

[0011] In some embodiments, the resonance device includes an insulating support member, and the insulating support member connects the resonance cylinder and the first drift tube.

[0012] In some embodiments, the resonant cylinder is grounded, and the second drift tube is electrically connected to the resonant cylinder.

[0013] In some embodiments, the inductor device includes an inductor box and a grounding wire, the inductor coil is located in the inductor box, the inductor box is grounded, and the grounding wire electrically connects the inductor box and the inductor coil.

[0014] In some embodiments, the inductance box has a plurality of connection positions, and the grounding wire is detachably connected to any one of the connection positions.

[0015] In some embodiments, the inductor coil has a plurality of grounding locations, and the grounding wire is detachably connected to any one of the grounding locations.

[0016] In some embodiments, the RF feeding device includes a feeding terminal and a feeding wire, the feeding wire electrically connects the feeding terminal and the inductor, the inductor has a plurality of feeding locations, and the feeding wire is detachably connected to any one of the feeding locations.

[0017] In some embodiments, the vacuum feedthrough includes a connector and a conductive column, the conductive column is sealed and penetrates the connector, the connector is connected to the resonant cylinder, and the conductive column is electrically connected to the inductor coil and the first drift tube.

[0018] In some embodiments, the inductive device is located above the resonant device.

[0019] The bunching device provided in the embodiment of the present application, on the one hand, the RF feed device is used to generate microwave RF power, the inductor device and the resonant device generate LC resonance, and a potential difference is generated between the first drift tube and the second drift tube. The direction of the potential difference changes periodically with the input microwave RF power, so as to accelerate and decelerate the charged particle beam, complete the longitudinal compression of the charged particle beam, and realize the bunching function. On the other hand, the inductor coil is arranged outside the resonant cylinder, and the electrical connection between the first drift tube and the inductor coil is realized by vacuum feedthrough to avoid affecting the vacuum state of the resonant cavity. In this way, the inductor device and the resonant device are relatively independent, and the inductor device and the resonant device are arranged in a distributed manner, which can reduce the volume of the resonant cylinder and complete the bunching requirements of different frequencies under the premise of reducing the overall size of the bunching device. On the other hand, since the inductor coil and the resonant cylinder are independent of each other, when the inductor coil cannot meet the demand or is damaged due to long-term use, only the inductor coil can be disassembled and replaced, without destroying the vacuum of the system and reprocessing the overall bunching device, which simplifies the maintenance process and reduces the maintenance cost, and also reserves sufficient space and possibility for future equipment upgrades. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the structure of a beam-forming device provided in some embodiments of the present application;

[0021] Figure 2 for Figure 1 Schematic cross-sectional view along the AA direction;

[0022] Figure 3 for Figure 1 A schematic diagram of another perspective of the beam-forming device shown;

[0023] Figure 4 for Figure 3 Schematic cross-sectional view in the middle BB direction;

[0024] Figure 5 for Figure 1 Schematic diagram of an exploded view of the bunching device shown.

[0025] Description of Reference Numerals

[0026] 1. Resonance device; 11. Resonance cylinder; 11a. Resonance cavity; 111. Front side wall; 112. Rear side wall; 113. Annular side wall; 114. Connecting pipe; 1141. Flange; 12. First drift tube; 13. Second drift tube; 14. Conductive rod; 2. Vacuum feedthrough; 21. Connector; 22. Conductive column; 23. Protective cover; 3. Inductance device; 31. Inductance coil; 32. Inductance box; 33. Grounding wire; 34. Insulation seat; 34a. Wire hole; 341. Rod body; 4. RF feeding device; 41. Feeding wire; 5. Insulation support. DETAILED DESCRIPTION

[0027] The following is a further detailed description of the implementation of the present application in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present application but cannot be used to limit the scope of the present application.

[0028] The various specific technical features and embodiments described in the specific implementation methods can be combined in any suitable manner without contradiction. For example, different implementation methods can be formed by combining different specific technical features / embodiments. In order to avoid unnecessary repetition, the various possible combinations of the specific technical features / embodiments in this application are no longer described separately. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. The application is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0029] It should be noted that, in the embodiments of the present application, “multiple” includes two and more than two.

[0030] In the related art, the buncher has only one RF resonant cavity, and the resonant frequency is adjusted on the RF resonant cavity. When this single-cavity resonant buncher operates at a lower resonant frequency, the volume of the RF resonant cavity is large, which is not conducive to processing, assembly and operation. In addition, due to the limitation of the action time of electronic devices, it is difficult to directly pressurize and bunch the drift tube of the buncher through a high-frequency AC power supply.

[0031] See also Figures 1 to 5 The embodiment of the present application provides a bunching device, which includes a resonance device 1, a vacuum feedthrough 2, an inductance device 3 and a radio frequency feedthrough device 4. The inductance device 3 includes an inductance coil 31.

[0032] The resonance device 1 includes a resonance cylinder 11, a first drift tube 12, and a second drift tube 13. The resonance cylinder 11 has a resonance cavity 11a. At least part of the first drift tube 12 is located in the resonance cavity 11a. At least part of the second drift tube 13 is located outside the resonance cavity 11a. The first drift tube 12 and the second drift tube 13 are arranged at intervals and are both used to transport charged particle beams. Specifically, the resonance cavity 11a is in a vacuum state, the first drift tube 12 and the second drift tube 13 are arranged at intervals in the longitudinal direction, and the first drift tube 12 and the second drift tube 13 transport the charged particle beam in the longitudinal direction.

[0033] It should be noted that the longitudinal direction is the moving direction of the charged particle beam. It can be understood that the axial directions of the first drift tube 12 , the second drift tube 13 and the resonance cylinder 11 can be consistent with the longitudinal direction.

[0034] The vacuum feedthrough 2 is connected to the resonant cylinder 11. The inductor 31 is electrically connected to the first drift tube 12 via the vacuum feedthrough 2. The radio frequency feedthrough device 4 is electrically connected to the inductor 31.

[0035] The vacuum feedthrough 2 is a device capable of transmitting electric energy between the vacuum resonant cavity 11a and the inductor 31. The vacuum feedthrough 2 can ensure the sealing of the resonant cavity 11a.

[0036] The inductor 31 is electrically connected to the first drift tube 12 through the vacuum feedthrough 2. The vacuum feedthrough 2 ensures the isolation between the vacuum space of the resonant cavity 11a and the external atmosphere, and keeps the resonant cavity 11a in a vacuum state. The inductor 31 is located outside the resonant cavity 11a, and the voltage of the inductor 31 is transmitted to the first drift tube 12 through the vacuum feedthrough 2.

[0037] The RF feedthrough device 4 is used to generate microwave RF power. The microwave RF power is transmitted to the inductor 31 and is transmitted through the inductor 31 turn by turn to complete the boosting, and then is transmitted to the first drift tube 12 through the vacuum feedthrough 2.

[0038] It can be understood that the inductor 31, the first drift tube 12 and the second drift tube 13 are all capable of conducting electricity and are made of conductive materials, for example, the inductor 31, the first drift tube 12 and the second drift tube 13 are all made of metal materials.

[0039] The bunching device provided in the embodiment of the present application, on the one hand, the RF feed device 4 is used to generate microwave RF power, the inductor device 3 and the resonant device 1 generate LC resonance, and a potential difference is generated between the first drift tube 12 and the second drift tube 13, and the direction of the potential difference changes periodically with the input microwave RF power, so as to accelerate and decelerate the charged particle beam, complete the longitudinal compression of the charged particle beam, and realize the bunching function. On the other hand, the inductor coil 31 is arranged outside the resonant cylinder 11, and the vacuum feedthrough 2 is used to realize the electrical connection between the first drift tube 12 and the inductor coil 31 to avoid affecting the vacuum state of the resonant cavity 11a. In this way, the inductor device 3 and the resonant device 1 are relatively independent, and the inductor device 3 and the resonant device 1 are arranged in a distributed manner, which can reduce the volume of the resonant cylinder 11 and meet the bunching requirements of different frequencies under the premise of reducing the overall size of the bunching device. On the other hand, since the inductor coil 31 and the resonance tube 11 are independent of each other, when the inductor coil 31 cannot meet the demand or is damaged due to long-term use, only the inductor coil 31 can be removed and replaced without destroying the system vacuum and reprocessing the entire bunching equipment, which simplifies the maintenance process and reduces maintenance costs, while also reserving sufficient space and possibilities for future equipment upgrades.

[0040] In some embodiments, the bunching device includes a particle beam generator, which is used to generate a charged particle beam. The particle beam generator can be connected to one of the second drift tubes 13. The charged particle beam emitted by the particle beam generator enters the second drift tube 13 connected to it, and then is compressed and bunched longitudinally by the bunching equipment.

[0041] In some embodiments, the charged particle beam may be an electron beam, and the particle beam generating device may be an electron gun.

[0042] In some embodiments, the charged particle beam may be an ion beam, and the particle beam generating device may be an ion source.

[0043] It should be noted that, according to the type and operating frequency of the charged particle beam, the resonant cavity 11a can be designed and the required distributed capacitance value C can be obtained. The corresponding required distributed inductance value L is obtained according to the matching calculation, and the number of turns and wire diameter of the inductor 31 are designed accordingly according to the distributed inductance value L, so that the bunching device can form LC resonance and produce the longitudinal modulation effect of the charged particle beam.

[0044] In some embodiments, the second drift tube 13 may be connected to the longitudinal side wall of the resonance cylinder 11. Exemplarily, the second drift tube 13 may be welded or integrally formed with the longitudinal side wall of the resonance cylinder 11. The space inside the second drift tube 13 is connected to the resonance cavity 11a, and the space inside the second drift tube 13 is used to transport the charged particle beam.

[0045] In some embodiments, one end of the second drift tube 13 may be connected to the outer surface of the longitudinal side wall of the resonance cylinder 11. That is, the entire structure of the second drift tube 13 is located outside the resonance cavity 11a.

[0046] For some examples, see Figures 4 to 5 One end of the second drift tube 13 can be inserted into the resonance cavity 11a, and the other end of the second drift tube 13 is located outside the resonance cavity 11a. In other words, part of the structure of the second drift tube 13 is located outside the resonance cavity 11a, and the other part of the structure of the second drift tube 13 is located inside the resonance cavity 11a.

[0047] For some examples, see Figures 1 to 5 There are two second drift tubes 13, one of which is connected to the front side wall 111 of the resonance cylinder 11 along the longitudinal direction toward the front side, and the other second drift tube 13 is connected to the rear side wall 112 of the resonance cylinder 11 along the longitudinal direction toward the rear side. The first drift tube 12 is arranged in the resonance cavity 11a and is located between the two second drift tubes 13.

[0048] The front side and the rear side are opposite sides in the longitudinal direction.

[0049] The front side wall 111 and the rear side wall 112 are two opposite side walls of the resonance cylinder 11 along the longitudinal direction.

[0050] The first drift tube 12 may be suspended in the resonance cylinder 11 . Specifically, the entire structure of the first drift tube 12 is located in the resonance cylinder 11 , and the first drift tube 12 is not in direct contact with the resonance cylinder 11 .

[0051] As an example, the first drift tube 12 may be located at the center of the resonant cavity 11a, and the axis of the first drift tube 12 and the axis of the resonant cavity 11a are both longitudinally aligned and coincident, that is, the first drift tube 12 and the resonant cavity 11a are coaxial.

[0052] For ease of description, the second drift tube 13 arranged on the front side wall 111 is defined as a front drift tube, and the second drift tube 13 arranged on the rear side wall 112 is defined as a rear drift tube. The front drift tube, the first drift tube 12 and the rear drift tube are spaced apart in the longitudinal direction. When the RF feeding device 4 feeds microwave RF power, a first potential difference is formed in the gap between the front drift tube and the first drift tube 12, and a second potential difference is formed in the gap between the rear drift tube and the first drift tube 12. The directions of the first potential difference and the second potential difference are opposite.

[0053] In this embodiment, the first potential difference and the second potential difference are in opposite directions, the front particles moving to the gap between the front drift tube and the first drift tube 12 are decelerated, and the rear particles moving to the gap between the rear drift tube and the first drift tube 12 are accelerated, thereby realizing the longitudinal bunching of the charged particle beam. With this design, the longitudinal dimension of the resonance cylinder 11 can be relatively small, and the bunching device can be applied to the case of low resonance frequency, meet the demand for low-frequency bunching, broaden the scope of application, and enhance the versatility and adaptability of the bunching device.

[0054] For some examples, see Figures 2 to 5 The resonance device 1 includes an insulating support 5 , which connects the resonance cylinder 11 and the first drift tube 12 .

[0055] The insulating support member 5 is a non-conductive structural member.

[0056] In this embodiment, the insulating support member 5 can provide a supporting force for the first drift tube 12 to suspend the first drift tube 12 in the resonant cavity 11 a.

[0057] The insulating support member 5 may be made of insulating material, for example, the insulating support member 5 may be made of plastic.

[0058] For some examples, see Figures 4 to 5 The insulating support 5 connects the lower part of the first drift tube 12 and the bottom of the resonance cylinder 11 .

[0059] Exemplarily, there may be one or more insulating support members 5. Multiple insulating support members 5 may be arranged at intervals. Multiple insulating support members 5 may support different positions of the first drift tube 12 to provide stable support for the first drift tube 12, and the size of a single insulating support member 5 may be smaller.

[0060] In some embodiments, the insulating support member 5 may be a plate-shaped structure, for example, two insulating support members 5 may be spaced apart in the longitudinal direction.

[0061] For some examples, see Figures 1 to 5 , the resonance cylinder 11 is grounded, and the second drift tube 13 is electrically connected to the resonance cylinder 11. Specifically, the second drift tube 13 and the resonance cylinder 11 are both grounded. That is, the second drift tube 13 is grounded through the resonance cylinder 11.

[0062] It can be understood that the resonance cylinder 11 is conductive and is made of conductive material, for example, the resonance cylinder 11 is made of metal material.

[0063] In this embodiment, the second drift tube 13 and the resonance cylinder 11 are both grounded, the potential of the second drift tube 13 and the resonance cylinder 11 is always zero, and two gaps between the two second drift tubes 13 and the first drift tube 12 respectively generate two potential differences, and the directions of the two potential differences will change periodically with the input microwave radio frequency power.

[0064] For some examples, see Figures 1 to 5 The inductor device 3 includes an inductor box 32 and a grounding wire 33 . The inductor coil 31 is located in the inductor box 32 . The inductor box 32 is grounded. The grounding wire 33 electrically connects the inductor box 32 and the inductor coil 31 .

[0065] In this embodiment, the inductor box 32 provides protection for the inductor coil 31 and the grounding wire 33. The inductor coil 31 is grounded through the grounding wire 33 and the inductor box 32 to form an electrical loop.

[0066] In some embodiments, the inductor box 32 has a plurality of connection positions, and the grounding wire 33 is detachably connected to any one of the connection positions.

[0067] In this embodiment, the grounding wire 33 is electrically connected to different connection positions to adjust the distributed inductance value L, thereby achieving adjustment of the resonant frequency.

[0068] The detachable connection method is not limited. For example, the grounding wire 33 can be detachably connected to any connection position of the inductor box 32 by a fastener. As an example, the grounding wire 33 has a grounding end, and the fastener can be inserted into the hole of the grounding end to detachably fix the grounding wire 33 to the inductor box 32.

[0069] Fasteners include, but are not limited to, screws or bolts.

[0070] In some embodiments, the inductor box 32 includes a top plate, four side plates and a bottom plate, the top plate and the bottom plate are arranged opposite to each other in the up-down direction, and the top plate, the four side plates and the bottom plate are arranged together to form a hexahedral structure. The top plate, the four side plates and the bottom plate can respectively form at least one connection position.

[0071] Exemplarily, the top plate, the four side plates and the bottom plate can each form a connection position, so the inductance box 32 has 6 connection positions, and the grounding wire 33 can be detachably connected to any one of the 6 connection positions.

[0072] It can be understood that the top plate, the four side plates and the bottom plate can respectively form a plurality of connection positions, so the inductor box 32 has more than 6 connection positions.

[0073] In this embodiment, the top plate, four side plates and the bottom plate can form more than 6 connection positions. When the resonant frequency needs to be adjusted, the connection position connected to the grounding wire 33 can be changed. For example, the grounding wire 33 can be electrically connected to any one of the top plate, four side plates and the bottom plate to achieve resonant frequency adjustment.

[0074] In some embodiments, the inductor 31 has a plurality of grounding locations, and the grounding wire 33 is detachably connected to any one of the grounding locations.

[0075] In this embodiment, the grounding wire 33 is electrically connected to different grounding locations of the inductor 31 , and the resonant frequency can be adjusted by adjusting the distributed inductance value L.

[0076] The detachable connection mode of the grounding wire 33 is not limited. For example, the end of the grounding wire 33 can be wound and connected with different parts of the inductor 31 .

[0077] In some embodiments, the inductor 31 includes a plurality of turns, and each turn has at least one grounding portion.

[0078] Exemplarily, the inductor 31 includes 4 turns of coil, each turn of coil has a grounding portion, and the inductor 31 has 4 grounding portions, and the grounding wire 33 can be detachably connected to any one of the 4 grounding portions.

[0079] It is understandable that each coil turn can form a plurality of grounding locations. Taking a coil with four turns as an example, the inductor coil 31 has more than four grounding locations.

[0080] It should be noted that the inductor 31 may also include 2 turns, 3 turns, 5 turns or more turns. The conductive wire is spirally wound to form the inductor 31 .

[0081] In this embodiment, the inductor coil 31 includes a plurality of turns of coils, each turn of the coil has at least one grounding portion. When the resonant frequency needs to be adjusted, the grounding portion connected to the grounding wire 33 can be changed. For example, the grounding wire 33 can be electrically connected to the grounding portion of any one of the plurality of turns of coils, thereby changing the number of turns of the coils through which the microwave RF power flows, thereby achieving resonant frequency adjustment.

[0082] For some examples, see Figures 1 to 5 The RF feeding device 4 includes a feeding terminal and a feeding wire 41. The feeding wire 41 is electrically connected to the feeding terminal and the inductor 31. The inductor 31 has multiple feeding locations, and the feeding wire 41 is detachably connected to any one of the feeding locations.

[0083] In this embodiment, microwave RF power is transmitted to the inductor 31 through the feeding terminal and the feeding wire 41. The feeding wire 41 is electrically connected to different feeding parts, which can change the path of the microwave RF power flowing through the inductor 31, realize the adjustment of the coupling degree, and achieve impedance matching.

[0084] The detachable connection mode of the feeding wire 41 is not limited. For example, the end of the feeding wire 41 can be wound and connected with different parts of the inductor 31 .

[0085] In some embodiments, the inductor 31 includes a plurality of turns of coil, and each turn of coil has at least one feeding point.

[0086] Exemplarily, the inductor 31 includes 4 turns of coil, each turn of coil forms a feeding location, and the inductor 31 has 4 feeding locations, and the feeding wire 41 can be detachably connected to any one of the 4 feeding locations.

[0087] It is understandable that each coil turn can form a plurality of feeding locations. Taking a coil with four turns as an example, the inductor coil 31 has more than four feeding locations.

[0088] It should be noted that the inductor 31 may also include 2 turns, 3 turns, 5 turns or more turns of the coil.

[0089] In this embodiment, the inductor coil 31 includes a plurality of turns of coils, each turn of the coil has at least one feeding portion. When the coupling degree needs to be adjusted, the feeding portion connected to the feeding wire 41 can be changed. For example, the feeding wire 41 can be electrically connected to the feeding portion of any one of the plurality of turns of coils, thereby changing the number of turns of the coils through which the microwave radio frequency power flows, thereby achieving coupling degree adjustment.

[0090] For some examples, see Figures 2 to 5 The inductor device 3 includes an insulating seat 34 , which is disposed in the inductor box 32 , and the inductor coil 31 is fixed on the insulating seat 34 .

[0091] As an example, the insulating base 34 connects the top plate and the bottom plate of the inductor box 32 .

[0092] In this embodiment, the insulating seat 34 serves to fix and support the inductor 31 .

[0093] The insulating seat 34 can be made of insulating materials. For example, the insulating seat 34 can be made of materials such as plastic.

[0094] For some examples, see Figures 2 to 5 , the axis of the inductor 31 may extend in the up-down direction. That is, the inductor 31 is spirally wound around the axis extending in the up-down direction.

[0095] For some examples, see Figures 2 to 5 The insulating seat 34 forms a plurality of wire holes 34 a spaced apart in the up-down direction, and the coils of the inductor 31 are passed through the wire holes 34 a.

[0096] As an example, the insulating seat 34 may include two rods 341, the rods 341 form an open slot, and the open slots of the two rods 341 are relatively spliced ​​to form the wire hole 34a. Each turn of the inductor 31 can be placed in the open slot of one of the rods 341, and then the open slot of the other rod 341 is installed on the inductor 31. In this way, the insulating seat 34 and the inductor 31 are assembled, and the operation is simple.

[0097] In this embodiment, the insulating seat 34 can support the multiple turns of the inductor 31 and prevent the inductor 31 from shaking.

[0098] The number of the insulating seats 34 is not limited. For example, the number of the insulating seats 34 can be one or more. For example, two insulating seats 34 can be arranged relatively spaced apart to support different positions of the inductor 31 .

[0099] For some examples, see Figures 1 to 5 The vacuum feedthrough 2 includes a connector 21 and a conductive column 22. The conductive column 22 is sealed and penetrates the connector 21. The connector 21 is connected to the resonant cylinder 11. The conductive column 22 is electrically connected to the inductor coil 31 and the first drift tube 12. In this way, the vacuum feedthrough 2 separates the vacuum and the atmosphere through the connector 21, and transmits the bunching voltage through the conductive column 22.

[0100] For some examples, see Figures 1 to 5 The resonant cylinder 11 includes an annular side wall 113 and a pipe 114. The front side wall 111 and the rear side wall 112 are arranged at intervals in the longitudinal direction. The annular side wall 113 is located between the front side wall 111 and the rear side wall 112 and connects the front side wall 111 and the rear side wall 112. The front side wall 111, the rear side wall 112 and the annular side wall 113 jointly define a resonant cavity 11a. The pipe 114 is connected to the outside of the annular side wall 113 and communicates with the resonant cavity 11a. The pipe 114 has a port, and the connector 21 closes the port of the pipe 114. The connector 21 can play the role of sealing and closing the port of the pipe 114 to keep the resonant cavity 11a in a vacuum state.

[0101] The connection method between the front side wall 111, the annular side wall 113 and the rear side wall 112 of the resonance cylinder 11 is not limited. For example, the front side wall 111 and the annular side wall 113 can be welded or connected by fasteners. The rear side wall 112 and the annular side wall 113 can be welded or connected by fasteners.

[0102] For some examples, see Figures 1 to 5The pipe 114 has a flange 1141, and the connector 21 is connected to the flange 1141 by a fastener. The fastener may be, for example, a screw or a bolt. When the vacuum feedthrough 2 and the resonant cylinder 11 need to be disassembled, the fastener may be removed first to separate the flange 1141 and the connector 21.

[0103] For some examples, see Figures 1 to 5 The resonance device 1 includes a conductive rod 14, one end of which is electrically connected to the first drift tube 12, and the other end of which is detachably connected to the conductive column 22. The conductive rod 14 is conducive to shortening the length of the guide column, which is not only convenient for realizing the electrical connection between the conductive column 22 and the first drift tube 12, but also convenient for separating the conductive column 22 from the conductive rod 14 when the vacuum feedthrough 2 and the resonance cylinder 11 need to be disassembled, thereby separating the resonance cylinder 11 from the vacuum feedthrough 2.

[0104] The conductive rod 14 and the conductive column 22 may be made of the same material or different materials. For example, the guide rod and the conductive column 22 may both be made of conductive metal material.

[0105] The shape of the connector 21 is not limited. For example, the connector 21 is generally in a plate-like structure. In this way, it is convenient to connect the connector 21 to the flange 1141. For example, the connector 21 can be in a circular, elliptical or polygonal shape, and the shape of the connector 21 can be the same as that of the flange 1141.

[0106] In some embodiments, the vacuum feedthrough 2 includes a seal, the connector 21 has a through hole, the conductive column 22 is inserted into the through hole, and the seal seals a gap between the hole wall of the through hole and the conductive column 22 .

[0107] For some examples, see Figures 2 to 5 The vacuum feedthrough 2 includes a protective cover 23, the protective cover 23 connects the connector 21 and the inductor box, and a portion of the conductive column 22 is located in the protective cover 23. The protective cover 23 not only facilitates the connection between the vacuum feedthrough 2 and the inductor box, but also protects the conductive column 22.

[0108] The connection method between the protective cover 23 and the connecting member 21 includes but is not limited to a detachable connection or a non-detachable connection.

[0109] The connection mode between the protective cover 23 and the inductance box includes but is not limited to a detachable connection or a non-detachable connection.

[0110] Unless otherwise stated in the embodiments of the present application, detachable connections include but are not limited to snap connections, screw connections or bolt connections, etc. Non-detachable connections include but are not limited to welding, riveting or bonding, etc.

[0111] For some examples, see Figures 1 to 4, the inductor 3 is located above the resonant device 1. The operation and maintenance frequency of the inductor coil 31 and other structural parts is relatively high. The inductor 3 is located above the resonant device 1. The position of the inductor 3 is relatively high, which is convenient for operators to operate and maintain the inductor 3 and reduces the probability of operators bending over to work.

[0112] In the description of this specification, the description with reference to the terms "an embodiment", "some embodiments" and "exemplary" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0113] The various embodiments / implementations provided in this application can be combined with each other without causing any contradiction. The above description is only a preferred embodiment of this application and is not intended to limit this application. For those skilled in the art, this application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included in the protection scope of this application.

Claims

1. A beam-forming device, characterized in that: include: A resonance device, comprising a resonance cylinder, a first drift tube and a second drift tube, wherein the resonance cylinder has a resonance cavity, at least a portion of the first drift tube is located in the resonance cavity, at least a portion of the second drift tube is located outside the resonance cavity, the first drift tube and the second drift tube are arranged at intervals and are both used to transport charged particle beams; A vacuum feedthrough connected to the resonant cylinder; an inductive device, comprising an inductive coil, wherein the inductive coil is electrically connected to the first drift tube through the vacuum feedthrough; A radio frequency feeding device is electrically connected to the inductor coil.

2. The bunching device according to claim 1, characterized in that: There are two second drift tubes, one of which is connected to the front side wall of the resonance cylinder along the longitudinal direction toward the front side, and the other of which is connected to the rear side wall of the resonance cylinder along the longitudinal direction toward the rear side. The first drift tube is arranged in the resonance cavity and is located between the two second drift tubes.

3. The bunching device according to claim 2, characterized in that: The resonance device comprises an insulating support member, and the insulating support member connects the resonance cylinder and the first drift tube.

4. The bunching device according to claim 2, characterized in that: The resonance cylinder is grounded, and the second drift tube is electrically connected to the resonance cylinder.

5. The bunching device according to claim 1, characterized in that: The inductor device comprises an inductor box and a grounding wire. The inductor coil is located in the inductor box. The inductor box is grounded. The grounding wire electrically connects the inductor box and the inductor coil.

6. The bunching device according to claim 5, characterized in that: The inductance box has a plurality of connection positions, and the grounding wire is detachably connected to any one of the connection positions.

7. The bunching device according to claim 5, characterized in that: The inductor coil has a plurality of grounding locations, and the grounding wire is detachably connected to any one of the grounding locations.

8. The bunching device according to claim 1, characterized in that: The RF feeding device comprises a feeding terminal and a feeding wire, wherein the feeding wire electrically connects the feeding terminal and the inductor coil, the inductor coil has a plurality of feeding locations, and the feeding wire is detachably connected to any one of the feeding locations.

9. The bunching device according to any one of claims 1 to 8, characterized in that: The vacuum feedthrough includes a connector and a conductive column. The conductive column is sealed and penetrates the connector. The connector is connected to the resonant cylinder. The conductive column is electrically connected to the inductor coil and the first drift tube.

10. The bunching device according to any one of claims 1 to 8, characterized in that: The inductive device is located above the resonant device.

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