Mounting structure of wafer turntable bottom measurement sensor

Abstract

The invention discloses a mounting structure for a bottom measuring sensor of a wafer turntable, which comprises a bottom plate, an upper disc is rotatably mounted on the bottom plate, a containing groove corresponding to the bottom measuring sensor is formed in the upper disc, a mounting base is mounted in the containing groove, a sensor driving cylinder is vertically inserted into the mounting base, and a sensor is mounted on the sensor driving cylinder. The upper surface of the mounting base is a reference surface, the bottom of the sensor driving air cylinder is in contact with the reference surface, the mounting base is provided with an airflow channel communicated with the sensor driving air cylinder, the airflow channel is communicated with an air cylinder driving air source, and the sensor driving air cylinder is provided with a bottom measuring sensor in a lifting mode. The sensor driving air cylinder is further provided with a sensor wire harness connected with a bottom measuring sensor, and the upper disc is provided with an auxiliary fixing device for assisting the sensor driving air cylinder in vertical installation and stabilization. The mounting structure can ensure that the mounting precision is higher when the bottom measuring sensor is mounted, the mounting difficulty is effectively reduced, and later overhaul and maintenance are facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, and in particular to a mounting structure of a bottom measuring sensor for a wafer turntable. Background Art

[0002] A wafer refers to a silicon chip used in the manufacture of silicon semiconductor integrated circuits. It is round in shape, and the wafer needs to be placed on a wafer turntable. The wafer needs to be etched multiple times during photolithography. A bottom sensor is needed on the wafer turntable to determine whether the wafer is placed back accurately and to determine the subsequent processing height to ensure accurate and stable processing. The bottom sensor is installed inside the wafer turntable, with the bottom of the wafer turntable as a reference. Currently, the bottom sensor includes a sensor head and a cylinder for driving the sensor head to rise and fall. An airflow interface is connected to the cylinder, and then the cylinder is directly fixed to the bottom of the wafer turntable. The installation and fixation are relatively cumbersome, and when the cylinder or sensor head needs to be replaced, the air pipe on the airflow interface needs to be unplugged one by one. The disassembly is also very cumbersome, and the bottom of the cylinder cannot effectively ensure that the installation is flush, affecting the accuracy of the bottom measurement. Summary of the invention

[0003] The technical problem to be solved by the present invention is: a mounting structure for a wafer turntable bottom measuring sensor, which can ensure higher mounting accuracy of the bottom measuring sensor, effectively reduce the difficulty of installation, and facilitate subsequent inspection and maintenance.

[0004] In order to solve the above technical problems, the technical solution of the present invention is: a mounting structure of a bottom measuring sensor of a wafer turntable, comprising a base plate, an upper disc is rotatably mounted on the base plate, the upper disc is provided with a receiving groove corresponding to the bottom measuring sensor, a mounting base is mounted in the receiving groove, a sensor driving cylinder is vertically inserted and mounted on the mounting base, the upper surface of the mounting base is a reference plane, the bottom of the sensor driving cylinder is in contact with the reference plane, an air flow channel connected to the sensor driving cylinder is provided on the mounting base, the air flow channel is connected to a cylinder driving air source, a bottom measuring sensor is lifted and mounted on the sensor driving cylinder, the sensor driving cylinder is also provided with a sensor wiring harness connected to the bottom measuring sensor, and an auxiliary fixing device is provided on the upper disc to assist the sensor driving cylinder in vertically mounting stability.

[0005] As a preferred solution, an insertion port is provided on the mounting base, a pipe protrusion inserted into the insertion is provided on the bottom of the sensor driving cylinder, a sealing groove is provided on the edge of the insertion port on the upper end surface of the mounting base, a sealing ring is provided in the sealing groove, and the bottom of the sensor driving cylinder and the mounting base are sealed by squeezing the sealing ring.

[0006] As a preferred solution, the auxiliary fixing device includes an auxiliary rod vertically fixedly mounted on the upper disc, and a fixing clamping block that clamps each other is provided between the auxiliary rod and the sensor driving cylinder.

[0007] As a preferred solution, the auxiliary fixing device also includes an auxiliary positioning piece, which is provided with an inner positioning sleeve portion sleeved on the auxiliary rod and an outer positioning sleeve portion sleeved on the sensor driving cylinder, and the fixing clamp block is located above the auxiliary positioning piece.

[0008] As a preferred solution, a limiting step is provided on the auxiliary rod, and the inner positioning sleeve abuts against the limiting step.

[0009] As a preferred solution, the accommodating groove is a straight line hole, and a mounting pad that cooperates with the straight line hole is provided under the mounting base. The mounting pad is installed in the straight line hole, and the mounting base and the mounting pad are detachably fixed, and the outlet of the airflow channel is arranged on the side of the mounting base.

[0010] As a preferred solution, the number of the bottom measuring sensors is three and they are evenly distributed around the circumference, the number of the corresponding sensor driving cylinders is also three, and the auxiliary positioning member also includes a connecting rod portion that connects the outer positioning sleeve portions in sequence.

[0011] After adopting the above technical scheme, the effect of the present invention is as follows: since the installation structure of the wafer turntable bottom measuring sensor includes a bottom plate, an upper disc is rotatably installed on the bottom plate, a receiving groove corresponding to the bottom measuring sensor is provided on the upper disc, a mounting base is installed in the receiving groove, a sensor driving cylinder is vertically inserted and installed on the mounting base, the upper surface of the mounting base is a reference surface, the bottom of the sensor driving cylinder contacts the reference surface, an air flow channel connected to the sensor driving cylinder is provided on the mounting base, the air flow channel is connected to the cylinder driving air source, a bottom measuring sensor is lifted and installed on the sensor driving cylinder, a sensor harness connected to the bottom measuring sensor is also provided on the sensor driving cylinder, and an auxiliary fixing device for assisting the sensor driving cylinder to be stably installed vertically is provided on the upper disc; inserting the sensor driving cylinder into the mounting base can ensure that it can be effectively connected to the air flow channel, and the installation is convenient, and the mounting base is installed in the receiving groove, which can ensure stable installation, and the height is ensured to be flush with this as a reference, and then the sensor driving cylinder is ensured to be stably lifted and lowered by the auxiliary fixing device, and the bottom measuring sensor can be effectively detected by the sensor harness, thereby improving the use effect.

[0012] Furthermore, since an insertion port is provided on the mounting base, a pipe protrusion inserted into the insertion port is provided at the bottom of the sensor driving cylinder, a sealing groove is provided at the edge of the insertion port on the upper end surface of the mounting base, and a sealing ring is provided in the sealing groove. The bottom of the sensor driving cylinder and the mounting base are sealed by squeezing the sealing ring; the connection or disconnection with the airflow channel can be completed by inserting or pulling out the pipe protrusion, and the sealing ring can effectively improve the sealing effect, making the sensor driving cylinder more stable.

[0013] Furthermore, since the auxiliary fixing device includes an auxiliary rod vertically fixedly installed on the upper disc, a fixed clamping block that clamps each other is provided between the auxiliary rod and the sensor driving cylinder; the fixed clamping block can enable the sensor driving cylinder to be effectively fixed vertically by relying on the auxiliary rod, thus ensuring a firm installation and stable lifting and lowering.

[0014] Since the auxiliary fixing device also includes an auxiliary positioning piece, the auxiliary positioning piece is provided with an inner positioning sleeve portion sleeved on the auxiliary rod and an outer positioning sleeve portion sleeved on the sensor driving cylinder, and the fixed clamp block is located above the auxiliary positioning piece; the auxiliary positioning piece can effectively ensure that the sensor driving cylinder can accurately cooperate with the auxiliary rod and be inserted into the mounting base, and can make the sensor driving cylinder and the auxiliary rod effectively cooperate in parallel, ensuring that the sensor driving cylinder can drive the bottom measuring sensor to rise and fall accurately and stably.

[0015] Furthermore, since the auxiliary rod is provided with a limiting step, the inner positioning sleeve abuts against the limiting step; the auxiliary positioning member can be effectively limited at a certain height, ensuring that the mutual restraint is stable and reliable.

[0016] Since the accommodating groove is a straight bar hole, a mounting pad that cooperates with the straight bar hole is provided under the mounting base, and the mounting pad is installed in the straight bar hole. The mounting base and the mounting pad are detachably fixed, and the outlet of the airflow channel is arranged on the side of the mounting base; the mounting pad is first fixedly installed in the straight bar hole, and then the mounting base is installed on the mounting pad to ensure leakage of the airflow channel on the mounting base, which is convenient for connection.

[0017] Since there are three bottom measuring sensors and they are evenly distributed around the circumference, the corresponding number of sensor driving cylinders is also three. The auxiliary positioning component also includes a connecting rod portion that connects the outer positioning sleeve portions in sequence. In this way, the auxiliary positioning component can ensure that the corresponding sensor driving cylinder and the corresponding auxiliary rod are effectively arranged in parallel, and can also make the three sensor driving cylinders restrain each other, thereby facilitating installation and improving the use effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0019] Figure 1 is a stereogram of an embodiment of the present invention;

[0020] Figure 2 is a schematic structural diagram of an embodiment of the present invention;

[0021] Figure 3 It is a schematic diagram of the structure of the mounting base and the sensor driving cylinder according to an embodiment of the present invention;

[0022] Figure 4 is a schematic structural diagram of an upper disk in an embodiment of the present invention;

[0023] Figure 5 is a schematic structural diagram of an auxiliary positioning member according to an embodiment of the present invention;

[0024] In the attached drawings: 1. bottom plate; 2. upper disc; 3. receiving groove; 4. mounting base; 5. sensor driving cylinder; 6. air flow channel; 7. bottom measuring sensor; 8. sensor harness; 9. insertion port; 10. pipe protrusion; 11. sealing groove; 12. auxiliary rod; 13. fixing clamp block; 14. limiting step; 15. auxiliary positioning piece; 151. inner positioning sleeve; 152. outer positioning sleeve; 16. connecting rod; 17. mounting pad; 18. semicircular groove. DETAILED DESCRIPTION

[0025] The present invention is further described in detail below through specific examples.

[0026] like Figures 1 to 5 As shown, a mounting structure of a wafer turntable bottom measuring sensor comprises a bottom plate 1, an upper disc 2 is rotatably mounted at the bottom of the bottom plate 1, a receiving groove 3 corresponding to a bottom measuring sensor 7 is arranged on the upper disc 2, a mounting base 4 is mounted in the receiving groove 3, a sensor driving cylinder 5 is vertically inserted and mounted on the mounting base 4, the upper surface of the mounting base 4 is a reference surface, the bottom of the sensor driving cylinder 5 contacts the reference surface, an air flow channel 6 connected to the sensor driving cylinder 5 is arranged on the mounting base 4, the air flow channel 6 is connected to the cylinder driving air source, and the sensor driving cylinder 5 is lifted and lowered. There is a bottom measuring sensor 7, and the sensor driving cylinder 5 is also provided with a sensor harness 8 connected to the bottom measuring sensor 7. The upper disc 2 is provided with an auxiliary fixing device for assisting the sensor driving cylinder 5 to be installed vertically and stably; inserting the sensor driving cylinder 5 into the mounting base 4 can ensure that it can be effectively connected with the airflow channel 6, and the installation is convenient, and the mounting base 4 is installed in the accommodating groove 3 to ensure stable installation. This is used as a benchmark to ensure that the installation can be effectively vertical and the measurement is accurate. Then, the auxiliary fixing device is used to ensure that the sensor driving cylinder 5 can be stably raised and lowered, and the sensor harness 8 is used to enable the bottom measuring sensor 7 to be effectively detected, thereby improving the use effect.

[0027] In this embodiment, an insertion port 9 is provided on the mounting base 4, and a pipe protrusion 10 inserted into the insertion port 9 is provided at the bottom of the sensor driving cylinder 5. A sealing groove 11 is provided on the upper end surface of the mounting base 4 at the edge of the insertion port 9, and a sealing ring is provided in the sealing groove 11. The bottom of the sensor driving cylinder 5 and the mounting base 4 are sealed by squeezing the sealing ring; the connection or disconnection with the airflow channel 6 can be completed by inserting or pulling out the pipe protrusion 10, and the sealing ring can effectively improve the sealing effect, making the sensor driving cylinder 5 more stable.

[0028] like Figure 2 As shown, the auxiliary fixing device includes an auxiliary rod 12 vertically fixedly installed on the upper disc 2, and a fixed clamping block 13 that clamps each other is provided between the auxiliary rod 12 and the sensor driving cylinder 5; there are three accommodating grooves 3 on the upper disc 2, so there are three mounting bases 4 corresponding to the three accommodating grooves 3 respectively, so each mounting base 4 is inserted and installed with the sensor driving cylinder 5, and then the auxiliary rod 12 is arranged in parallel with the sensor driving cylinder 5, and then the sensor driving cylinder 5 can be effectively fixed with the auxiliary rod 12 as a reference through the fixed clamping block 13, and the fixed clamping block 13 has a simple structure and is easy to use; the fixed clamping block 13 is two fixed half clamping blocks set in a mirror image, and a semicircular groove 18 is provided on the fixed half clamping block that fits the auxiliary rod 12 and the sensor driving cylinder 5, so that the semicircular grooves 18 on the two fixed half clamping blocks form a whole circular groove to fix the auxiliary rod 12 and the sensor driving cylinder 5.

[0029] like Figure 5 As shown, the auxiliary fixing device also includes an auxiliary positioning member 15, on which an inner positioning sleeve 151 sleeved on the auxiliary rod 12 and an outer positioning sleeve 152 sleeved on the sensor driving cylinder 5 are provided, and the fixing clamp 13 is located above the auxiliary positioning member 15; first, the auxiliary positioning member 15 is sleeved on the sensor driving cylinder 5, and then the inner positioning sleeve 151 of the auxiliary positioning member 15 is sleeved on the auxiliary rod 12, and then the sensor driving cylinder 5 is inserted into the mounting base 4, completing the matching between the sensor driving cylinder 5 and the mounting base 4, and then fixing the fixing clamp 13 on the auxiliary positioning member 15 to further ensure stable fixation, and make the sensor driving cylinder 5 effectively pressed on the mounting base 4.

[0030] like Figure 2 As shown, the auxiliary rod is provided with a limiting step 14, and the inner positioning sleeve 151 abuts against the limiting step 14; the limiting step 14 clamps the inner positioning sleeve 151, so as to ensure that the auxiliary positioning member 15 will not fall, thereby limiting the auxiliary rod 12 and the sensor driving cylinder 5 at a certain height, so that the sensor driving cylinder 5 can be installed more accurately, and the constraint is stable and reliable.

[0031] Furthermore, the accommodating groove 3 is a straight bar hole, and a mounting pad 17 that cooperates with the straight bar hole is provided under the mounting base 4. The mounting pad 17 is installed in the straight bar hole, and the mounting base 4 and the mounting pad 17 are detachable and fixed. The outlet of the airflow channel 6 is set on the side of the mounting base 4; the mounting pad 17 is first fixedly installed in the straight bar hole, and then the mounting base 4 is installed on the mounting pad 17 to ensure the leakage of the airflow channel 6 on the mounting base 4, which is convenient for connection and replacement, thereby improving convenience.

[0032] In this embodiment, the number of the bottom measuring sensors 7 is three and they are evenly distributed around the circumference, the number of the corresponding sensor driving cylinders 5 is also three, and the auxiliary positioning member 15 also includes a connecting rod portion 16 that connects the outer positioning sleeve portion 152 in sequence; in this way, the auxiliary positioning member 15 forms a whole, which constrains the three bottom measuring sensors 7. In this way, the auxiliary positioning member 15 can ensure that the corresponding sensor driving cylinder 5 and the corresponding auxiliary rod 12 are effectively arranged in parallel, and at the same time, the three sensor driving cylinders 5 can restrict each other, further improving the installation accuracy, and the three sensor driving cylinders 5 can be inserted into the corresponding mounting base 4 at the same time, which is convenient for installation and improves the use effect.

[0033] The above-described embodiments are merely descriptions of preferred implementations of the present invention and are not intended to limit the scope of the present invention. Various modifications and alterations to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the scope of protection defined by the claims of the present invention.

Claims

1. A wafer turntable bottom measuring sensor installation structure, comprising a bottom plate, on which an upper disc is rotatably mounted, characterized in that: The upper disc is provided with a receiving groove corresponding to the bottom measuring sensor, and a mounting base is installed in the receiving groove. A sensor driving cylinder is vertically inserted and installed on the mounting base. The upper surface of the mounting base is a reference surface, and the bottom of the sensor driving cylinder is in contact with the reference surface. The upper surface of the mounting base is a reference surface, and the bottom of the sensor driving cylinder is in contact with the reference surface. The mounting base is provided with an air flow channel connected with the sensor driving cylinder, and the air flow channel is connected with the cylinder driving air source. The bottom measuring sensor is installed in a lifting manner on the sensor driving cylinder. The sensor driving cylinder is also provided with a sensor wiring harness connected to the bottom measuring sensor. The upper disc is provided with an auxiliary fixing device to assist the sensor driving cylinder in vertically installing stably.

2. The installation structure of the wafer turntable bottom measuring sensor as claimed in claim 1, characterized in that: An insertion port is provided on the mounting base, a pipe protrusion inserted into the insertion port is provided on the bottom of the sensor driving cylinder, a sealing groove is provided on the edge of the insertion port on the upper end surface of the mounting base, a sealing ring is provided in the sealing groove, and the bottom of the sensor driving cylinder and the mounting base are sealed by squeezing the sealing ring.

3. The installation structure of the wafer turntable bottom measuring sensor as claimed in claim 2, characterized in that: The auxiliary fixing device comprises an auxiliary rod which is vertically fixedly mounted on the upper disc, and a fixing clamping block which clamps each other is arranged between the auxiliary rod and the sensor driving cylinder.

4. The installation structure of the wafer turntable bottom measuring sensor as claimed in claim 3, characterized in that: The auxiliary fixing device also includes an auxiliary positioning piece, on which an inner positioning sleeve portion sleeved on the auxiliary rod and an outer positioning sleeve portion sleeved on the sensor driving cylinder are arranged, and the fixing clamp block is located above the auxiliary positioning piece.

5. The installation structure of the wafer turntable bottom measuring sensor as claimed in claim 4, characterized in that: The auxiliary rod is provided with a limiting step, and the inner positioning sleeve is against the limiting step.

6. The installation structure of the wafer turntable bottom measuring sensor as claimed in claim 1, characterized in that: The accommodating groove is a straight line hole, and a mounting pad that cooperates with the straight line hole is provided under the mounting base. The mounting pad is installed in the straight line hole. The mounting base and the mounting pad are detachably fixed, and the outlet of the airflow channel is arranged on the side of the mounting base.

7. The installation structure of the wafer turntable bottom measuring sensor as claimed in claim 5, characterized in that: The number of the bottom measuring sensors is three and they are evenly distributed around the circumference, the number of the corresponding sensor driving cylinders is also three, and the auxiliary positioning member also includes a connecting rod portion that sequentially connects the outer positioning sleeve portions.

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