Gate valve

Abstract

The present invention provides a gate valve that reduces generation of particles and deterioration of a seal member by causing the seal member disposed on a valve body to abut against an opening surface from a vertical direction without performing a swinging operation of the valve body with respect to an opening of a processing portion. This gate valve is provided with: a moving body that operates integrally with a valve body; and a switching mechanism that moves the moving body in each of a vertical direction with respect to the opening surface and an intersecting direction intersecting the vertical direction, the switching mechanism being provided with: a first operation mechanism that moves in the intersecting direction and moves the moving body in the intersecting direction; and a second operation mechanism that moves the moving body in the vertical direction, the operation of the second operation mechanism including an operation in which the first operation mechanism additionally moves in the intersecting direction from a state in which the movement of the moving body in the intersecting direction is restricted.

Description

Technical Field

[0001] The present invention relates to a gate valve which seals an opening communicating with a processing part of a processing device that performs vacuum processing. Background Art

[0002] Conventionally, various gate valves have been proposed for sealing an opening communicating with a processing device such as a chamber for processing electronic components such as semiconductor wafers and liquid crystal substrates or a vacuum loadlock device.

[0003] The valve body of the opening of the on-off valve is swung by a link mechanism so that it is tightly pressed against the opening surface where the opening is formed when the valve is closed, thereby maintaining the airtight state in the processing device.

[0004] For example, Patent Document 1 discloses a gate valve comprising: a swing frame rotatably connected to the front end of an arm constituting a connecting rod mechanism via a pivot point in the middle; and a valve body connected to the upper end of the swing frame. By swinging the swing frame via the pivot point, the valve body performs approach and separation actions at a specified offset angle relative to an opening peripheral surface of an opening that is an opening connected to a processing portion.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: International Publication No. 2000 / 075542 Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, according to the above-mentioned conventional gate valve, since the valve body is moved at a predetermined deviation angle relative to the opening surface when the valve is closed, the sealing member formed of an elastic material such as rubber provided on the valve body slides relative to the opening surface. In addition, the sliding of the sealing member relative to the opening surface generates a shear force in a direction parallel to the opening surface on the sealing member. Thus, the friction force or shear force generated by the sliding of the sealing member when the valve is closed may cause the generation of particles or the deterioration of the sealing member (deterioration of the sealing performance).

[0010] An object of the present invention is to provide a gate valve which does not perform a swinging action of the valve body with respect to an opening surface formed with an opening connected to a processing portion, but realizes separate movements of in-and-out movements to a position relative to the opening and of approaches to or separations from the opening surface. By making a sealing component arranged on the valve body abut against the opening surface from a vertical direction, the generation of particles caused by sliding or the deterioration of the sealing component caused by shear force can be reduced.

[0011] Technical solutions to solve problems

[0012] In order to solve the problem of the above-mentioned shell, the present invention relates to a gate valve, which seals the opening by pressing a valve body having a sealing component onto an opening surface formed with an opening connected to a processing part of a processing device performing vacuum processing, and comprises: a movable body, which moves integrally with the valve body; a conversion mechanism, which causes the movable body to move in each direction, a vertical direction relative to the opening surface and a cross direction intersecting the vertical direction; and a transmission mechanism, which transmits power from a driving source to the conversion mechanism, the conversion mechanism comprising: a first action mechanism, which moves in the cross direction and causes the movable body to move in the cross direction; and a second action mechanism, which causes the movable body to move in the vertical direction, the action of the second action mechanism including: an action of the first action mechanism adding movement to the cross direction starting from a state in which the movement of the movable body in the cross direction is restricted.

[0013] In addition, the present invention relates to a gate valve, which seals an opening by pressing a valve body having a sealing member against an opening surface formed with an opening communicating with a processing section of a processing device performing a vacuum treatment, and comprises: a housing; a vertical movable body, which is held on the housing and can move in a vertical direction relative to the opening surface; and a vertical motion mechanism, which is arranged between the housing and the vertical movable body, wherein the vertical movable body comprises: a movable body, which moves integrally with the valve body; a lifting body, which moves together with the movable body in a cross direction intersecting with the vertical direction; a driving source, which moves the lifting body in the cross direction; and a lifting motion mechanism, which is arranged between the lifting body and the movable body, the lifting body being configured to be movable in the cross direction in a first motion region in which the lifting motion mechanism moves together with the movable body in the cross direction and in a second motion region in which the vertical motion mechanism is actuated in a state in which the movement of the movable body in the cross direction is restricted and the lifting body is further moved in the cross direction, and the vertical motion mechanism moves the vertical movable body in the vertical direction as the lifting body moves in the cross direction in the second motion region.

[0014] Effects of the Invention

[0015] According to the present invention, in a gate valve, generation of particles and degradation of a sealing member can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a perspective view showing the external appearance of a semiconductor manufacturing apparatus including a gate valve according to an embodiment of the present invention.

[0017] Figure 2 It is a perspective view of the appearance of a gate valve according to an embodiment of the present invention.

[0018] Figure 3 It is a perspective view showing the internal structure of a gate valve according to one embodiment of the present invention.

[0019] Figure 4 It is an exploded perspective view showing the internal structure of a gate valve according to an embodiment of the present invention.

[0020] Figure 5 It is a partially enlarged perspective view showing the internal structure of a gate valve according to an embodiment of the present invention.

[0021] Figure 6 This is a front view showing the internal structure of a gate valve according to an embodiment of the present invention.

[0022] Figure 7 This is a front view showing the structure of a vertically movable body of a gate valve according to an embodiment of the present invention.

[0023] Figure 8 This is a front view showing the internal structure of a gate valve according to an embodiment of the present invention.

[0024] Fig. 9 This is a front view showing the internal structure of a gate valve according to an embodiment of the present invention.

[0025] Fig.10 It is a side view showing the internal structure of a gate valve according to one embodiment of the present invention.

[0026] Fig.11 It is a side view showing the internal structure of a gate valve according to one embodiment of the present invention.

[0027] Fig.12 It is a side view showing the internal structure of a gate valve according to one embodiment of the present invention.

[0028] Fig.13 This is a front view showing another structural example of the support structure of the guide member according to one embodiment of the present invention.

[0029] Fig.14 It is a partially enlarged side sectional view showing the internal structure of a gate valve according to an embodiment of the present invention. DETAILED DESCRIPTION

[0030] In the following, the embodiment of the gate valve of the present invention is described in detail with reference to the accompanying drawings. In addition, in the following description, unless the viewing direction is specifically determined, the closed side ( Fig.10 The left side in the figure is called the front side or the front side, and the opposite side ( Fig.10 The right side in the figure is called the rear side or back side. Fig. 9 The left and right sides of Fig. 9The upper side in is called the upper side or upper surface side. Fig. 9 The lower side in is called the lower side or bottom side.

[0031] [1.General structure of gate valve]

[0032] The gate valve A of this embodiment has a mechanism for opening and closing the valve body 23 that seals the opening A10 by pressing against the opening surface A100 of the opening A10 connected to the processing part of the processing device that performs vacuum processing. Figure 1 As shown, the gate valve A is provided between a vacuum preparation device B for increasing the vacuum degree to a predetermined value and a processing device C for processing wafers in a vacuum as a processing device used for semiconductor manufacturing.

[0033] like Figure 1 and Figure 2 As shown in (a) of FIG. 1 , the gate valve A of the present embodiment is a so-called angle gate valve including a valve box A1 for accommodating a valve body 23 and a housing 1 connected to the valve box A1 at the bottom.

[0034] The valve box A1 has openings A10 and A10' corresponding to the opening B10 of the vacuum preparation device B and the opening C10 of the processing device C and communicating with the processing parts of the devices B and C. The housing 1 accommodates a valve body actuating mechanism that operates the valve body 23 to open and close the openings A10 and A10'.

[0035] The gate valve A moves the valve body 23 in the vertical direction to the opening surface of the opening A10 which is the wafer loading and unloading port. Fig.14 As shown in FIG. 1 , a sealing member 23a made of an elastic material of a valve body 23 described later is pressed and flattened on the opening surface A100. Thus, the opening A10 is sealed. In the gate valve A, the opening A10 connected to the opening B10 of the vacuum preparation device B is as shown in FIG. Figure 2 As shown in (a), it is formed by penetrating the front surface of the valve box A1 with a hole having a horizontal rectangular shape when viewed from the front.

[0036] In addition, if Figure 2 As shown in (b), the gate valve A may also be a so-called gate valve of the discharge valve box A1. In this case, the gate valve A is configured to move the valve body 23 in the vertical direction relative to the opening B10 of the vacuum preparation device B or the opening C10 of the processing device C to approach or separate.

[0037] The valve body 23 is a plate-shaped member of a horizontally rectangular shape that is slightly larger than the openings A10, B10, and C10. The valve body 23 has one plate surface as a contact surface that contacts the outer peripheral edge surface of the opening surface forming the openings A10, B10, and C10. Figure 2 (b) Figure 4 and Fig.14As shown, a sealing member 23 a made of an elastic material is attached to the abutting surface of the valve body 23 .

[0038] The sealing member 23a is, for example, an annular (endless) member having a circular cross-sectional shape. Fig.14 As shown in (a) to (c) of FIG. 14 , the sealing member 23a is provided on the peripheral groove 23b formed on the abutting surface of the valve body 23 along the outer edge of the valve body 23 in a manner that protrudes a predetermined height from the abutting surface of the valve body 23 toward the opening surface A100. In addition, the sealing member 23a is pressed and flattened against the opening surface A100 by the vertical movement of the valve body 23 at the closed position P3 described later.

[0039] Here, the vertical direction in which the valve body 23 moves refers to, Figure 11-12 , Fig.14 (b) and Fig.14 As shown in (c), while maintaining the plate surface of the valve body 23 parallel to the opening surface A100, the valve body 23 is moved in the direction facing the opening surface A100, between the facing position P2 and the closed position P3 described later, so that the valve body 23 approaches or moves away from the opening surface A100. The vertical direction in which the valve body 23 of this embodiment moves is the horizontal direction (front-rear direction) perpendicular to the opening surface A100 as a vertical plane.

[0040] In addition, if Figure 10-11 , Fig.14 (a) and Fig.14 As shown in (b), the cross direction of the movement of the valve body 23 refers to the direction that crosses the vertical direction when viewed from the side of the gate valve A, and is the direction in which the valve body 23 approaches or leaves the opening surface A100 between the open position P1 and the opposite position P2 described later in the height direction of the opening surface A100, with the position of the opening A10 of the opening surface A100 as a reference. The cross direction of the movement of the valve body 23 in this embodiment is the vertical direction (the direction orthogonal to the up-down direction and the horizontal direction) parallel to the opening surface A100 as the vertical plane. However, the cross direction of the movement of the valve body 23 may also be an inclined direction that is inclined relative to the vertical direction.

[0041] The valve body 23 of the gate valve A of this embodiment moves with the position of the opening surface A100 as a reference, and approaches or separates from the opening surface A100 or maintains a certain distance from the opening surface A100. Specifically, the valve body actuation mechanism housed in the housing 1 is configured to describe a right-angle movement trajectory of the valve body 23 consisting of the vertical direction and the directions orthogonal thereto.

[0042] In other words, the closing direction of the valve body 23 closing the opening A10 is the direction in which the valve body 23 approaches the opening surface A100 in each direction of the cross direction and the vertical direction. In addition, the opening direction of the valve body 23 opening the opening A10 is the direction in which the valve body 23 moves away from the opening surface A100 in each direction of the cross direction and the vertical direction.

[0043] like Figure 3 and Figure 4 As shown, the housing 1 includes a lower side wall 10, an upper side wall 11, a left side wall 12 and a right side wall 12, and is formed into a square box shape with a hollow interior. A support frame through hole 10a is formed in the central portion of the lower side wall 10 for inserting a drive source support frame 72 supporting the drive source 3. In addition, a shaft through hole 11a is formed in the central portion of the upper side wall 11 of the housing 1 for inserting a valve body shaft 24 connected to the valve body 23. The shaft through hole 11a is formed to maintain a certain gap between the valve body shaft 24 so that the valve body shaft 24 can move in the vertical direction and the cross direction.

[0044] A valve body actuation mechanism is accommodated in the housing 1 , and the valve body actuation mechanism moves the valve body 23 in directions perpendicular to and intersecting the opening surface A100 of the opening A10 via the valve body shaft 24 .

[0045] like Figure 3 to Figure 6 As shown, the gate valve A has a movable body 2 which is a valve body actuating mechanism housed inside a shell 1 and moves integrally with the valve body 23, a conversion mechanism which moves the movable body 2 in directions perpendicular to the opening surface A100 and in directions intersecting the perpendicular direction, and a transmission mechanism 4 which transmits power from a driving source 3 to the conversion mechanism.

[0046] The conversion mechanism has a first action mechanism 5 that moves in the cross direction and causes the moving body 2 to move in the cross direction, and a second action mechanism 6 that causes the moving body 2 to move in the vertical direction. In addition, the conversion mechanism does not necessarily need to cause the moving body 2 to move vertically. That is, as described above, the conversion mechanism causes the moving body 2 to move in the cross direction and the vertical direction respectively through the actions of the first action mechanism 5 and the second action mechanism 6, but if the valve body 23 can be vertically approached or separated from the opening surface A100 of the opening A10 by the moving body 2, then even if the trajectory of the moving body 2 moving in the cross direction is not orthogonal to the trajectory of the moving body 2 moving in the vertical direction, it does not deviate from the technical concept of the present invention.

[0047] It should be particularly noted that the gate valve A of the present invention includes an operation of the second operating mechanism 6 including an operation of additionally moving the moving body 2 in the intersecting direction from a state where the movement in the intersecting direction is restricted to the first operating mechanism 5 .

[0048] The gate valve A, which makes the movement direction of the valve body 23 independent and staged by the first actuating mechanism 5 and the second actuating mechanism 6, comprises: a housing 1 equipped with the second actuating mechanism 6; and a guide member 7 which is restricted by the housing 1 from moving in the intersecting direction and is arranged to be movable in the vertical direction together with the moving body 2. That is, the second actuating mechanism 6 is arranged at a predetermined position which is irrelevant to the movement of the moving body 2 in the intersecting direction.

[0049] like Figure 6 As shown, the second motion mechanism 6 includes: a support portion 92 supported by the housing 1, an engaging portion 90 engaged with the guide member 7, and an input portion 91 engaged with or disengaged from the first motion mechanism 5. The guide member 7 includes a first engaging member 77 engaged with the engaging portion 90 of the second motion mechanism 6. The first motion mechanism 5 includes a second engaging member 53 engaged with the input portion 91 of the second motion mechanism 6.

[0050] In particular, Figure 10 to Figure 12 As shown, the second action mechanism 6 of the present embodiment is composed of a link mechanism 60 , which has a vertical link portion 61 including an engagement portion 90 and a transmission link portion 62 including an input portion 91 .

[0051] The second motion mechanism 6 converts the stress of the additional movement of the first motion mechanism 5 in the cross direction, which is input from the first motion mechanism 5 to the input portion 91 , into a movement stress in the vertical direction via the transmission link portion 62 and the vertical link portion 61 .

[0052] The vertical movement stress converted by the second actuating mechanism 6 is transmitted to the guide member 7 via the engagement portion 90 of the vertical link portion 61, and the guide member 7 moves vertically together with the moving body 2. As the moving body 2 moves vertically, the valve body 23 opens and closes.

[0053] By means of the valve body actuating mechanism arranged on the housing 1, the valve body 23 is Figure 6 and Figure 8 to Figure 12 As shown in FIG. 1 , the valve body 23 is configured to be movable between an open position P1 accommodated in the lower part of the valve box A1, an opposing position P2 facing the opening surface A100 of the opening A10 formed in the upper part of the valve box A1 and separated from the opening A10, and a closed position P3 facing the opening surface A100 of the opening A10 formed in the upper part of the valve box A1 and in close contact with the peripheral edge of the opening A10. When the valve body 23 is located at the closed position P3, the opening A10 is closed, and when it is located at the open position P1, the opening A10 is opened.

[0054] In addition, if Figure 10 to Figure 12As shown, the first actuating mechanism 5 moves the movable body 2 that moves integrally with the valve body 23 by operating in the first operating region R1 and the second operating region R2, thereby moving the valve body 23 to the open position P1, the facing position P2 and the closed position P3.

[0055] The first operating region R1 is a region where the first operating mechanism 5 performs a first operation to move the valve body 23 (movable body 2) between the open position P1 and the facing position P2. The second operating region R2 is a region where the first operating mechanism 5 performs a second operation to move the valve body 23 between the facing position P2 and the closed position P3.

[0056] Specifically, the first operation region R1 is when the first operation mechanism 5 moves in the intersecting direction until the second engaging member 53 provided on the lifting body 50 described later as the first operation mechanism 5 contacts the engaging portion 90 of the second operation mechanism 6. The first operation of the first operation mechanism 5 is an operation in which the lifting body 50 moves in the first operation region R1, and is an operation in which the moving body 2 moves in the intersecting direction. Through the first operation, the valve body 23 connected to the moving body 2 moves back and forth between the open position P1 and the facing position P2.

[0057] The second action region R2 is an area where the second engaging member 53 provided on the first action mechanism 5 moves the first action mechanism 5 in the cross direction while maintaining the state of contact with the input portion 91. The second action of the first action mechanism 5 is an action in which the first action mechanism 5 moves within the second action region R2, and is an action to actuate the second action mechanism 6. Through the second action, the valve body 23 connected to the moving body 2 moves back and forth between the closed position P3 and the facing position P2. In addition, in the second action, the second action mechanism 6 moves the moving body 2 in the vertical direction, but unlike the first action, does not move the moving body 2 in the cross direction.

[0058] That is, the first actuating mechanism 5 performs the first action in the first action region R1 to move the movable body 2 in the intersecting direction, and after positioning the valve body 23 from the open position P1 to the opposite position P2, performs the second action in the second action region R2 to perform an additional movement in the intersecting direction different from the first action. The second actuating mechanism 6 moves the movable body 2 in the vertical direction with the additional movement in the intersecting direction in the second action in the second action region R2 of the first actuating mechanism 5, and positions the valve body 23 from the opposite position P2 to the closed position P3, thereby achieving a tight seal of the opening A10 of the treatment portion.

[0059] The valve body actuation mechanism of the gate valve A of this embodiment has two movement mechanism systems, namely, a valve body cross movement mechanism system for adjusting the movement position of the valve body 23 in the cross direction and a valve body vertical movement mechanism system for adjusting the movement position of the valve body 23 in the vertical direction, for the opening surface A100 connected to the processing unit. Each system will be described in detail below.

[0060] [2. Valve body cross movement mechanism system]

[0061] The valve body cross movement mechanism system is held on the housing 1, as shown in FIG. Figure 8 As shown, the vertical movable body A2 includes a movable body 2 capable of moving in a direction intersecting with the opening surface A100 and a first action mechanism 5. In addition, in the following, since the vertical movable body A2 basically has the same structure symmetrically when viewed from the front, the same symbol is marked and the description is omitted unless the structure is particularly described.

[0062] like Figure 8 As shown, the vertical moving body A2 is composed of a moving body 2, a first action mechanism 5 that moves together with the moving body 2 in an intersecting direction intersecting the vertical direction, a driving source 3 that moves the first action mechanism 5 in the intersecting direction, a transmission mechanism 4 that transmits power from the driving source 3 to the first action mechanism 5, a lifting action mechanism 8 that is arranged between the moving body 2 and the first action mechanism 5 and moves the moving body 2 in the intersecting direction as the first action mechanism 5 moves, and a guide component 7 that accommodates them integrally so that they can be moved in the vertical direction.

[0063] The vertical moving body A2 has a restriction member 74 for restricting the movement of the moving body 2 in the intersecting direction in the second operation region R2 and a first engagement member 77 for engaging with a vertical operation mechanism A3 described later.

[0064] The guide member 7 functions as a substantial frame that accommodates the lifting slider 20 as the moving body 2 and the lifting body 50 as the first actuating mechanism 5 and moves the valve body 23 in the cross direction. The guide member 7 is a substantially square box-shaped member that is smaller than the housing 1 and is hollow inside, and is supported in the housing 1 so as to be movable in the vertical direction.

[0065] The guide member 7 itself does not move in the cross direction, but moves in the vertical direction with the valve body 23 (together with the valve body 23) through the vertical action mechanism A3 in the valve body vertical movement mechanism system described later. Since the guide member 7 moves in the vertical direction through the valve body vertical movement mechanism system described later, the valve body cross movement mechanism system can be called a vertical movement body A2.

[0066] The guide member 7 includes a lower wall 70 , a guide rod 76 provided at a predetermined position of the lower wall 70 and guiding the lift slider 20 and the lift body 50 in the intersecting direction, and a first engagement member 77 engaged with the engagement portion 90 of the second actuating mechanism 6 .

[0067] The guide member 7 of this embodiment is formed in a U-shape which is open upward when viewed from the front, and has a pair of side walls, namely, a left side wall 71 and a right side wall 71, which are erected at the left and right ends of the lower side wall 70. The left side wall 71 and the right side wall 71 respectively have a front surface portion, a rear surface portion, and side portions on the left and right outer sides, and these surfaces form a bent plate-shaped column portion with a substantially U-shaped cross-sectional shape with the left and right inner sides being open. If there is a guiding function in the intersecting direction of the moving body 2 and the first action mechanism 5 based on the guide rod 76 provided on the lower side wall 70, the left side wall 71 and the right side wall 71 are not necessary structures. In addition, in the lower half of the left side wall 71 and the right side wall 71 of the guide member 7 of this embodiment, a vertical hole 73 in the shape of a vertical rectangular window is formed to insert the left and right ends of the lifting body 50 as the first action mechanism 5. The vertical hole 73 is formed in the side portions of the left side wall 71 and the right side wall 71, respectively.

[0068] Below the guide member 7, a motor 30 is provided as a driving source 3. The motor 30 is connected to the transmission mechanism 4 via a coupling 31 and an output shaft. The transmission mechanism 4 is composed of a so-called ball screw 40, which has a threaded shaft 41 connected to the output shaft of the motor 30 via a coupling 31, and a ball nut 42 that moves in a cross direction along the threaded shaft 41. In addition, the driving source 3 may also be a pressure device (such as air, oil pressure) using a fluid as another embodiment, or a linear actuator using a magnetic force, etc. In addition, the transmission mechanism 4 only needs to move the first action mechanism 5 in the cross direction.

[0069] like Figure 6-7 As shown, the threaded shaft 41 is inserted into a through hole 70a formed in the center of the lower side wall 70 of the guide member 7. Figure 3 As shown, the ball nut 42 is connected to the threaded shaft 41 protruding upward from the lower side wall 70 toward the guide member 7 through the through hole 70a so as to be movable in the cross direction (up and down direction). In addition, the ball nut 42 is connected to the lifting body 50 as the first action mechanism 5, and moves in the cross direction integrally with the lifting body 50.

[0070] A driving source support frame 72 is provided at the lower peripheral edge of the through hole 70 a of the lower side wall 70 . The driving source support frame 72 supports the motor 30 and the coupling 31 suspended below the guide member 7 with the output shaft directed upward.

[0071] The driving source support frame 72 is as follows Figure 6 to Figure 8As shown, there are four support frame parts 72a vertically provided at positions corresponding to the four corners of the rectangular shape at a certain interval on the periphery of the through hole 70a on the bottom surface of the lower side wall 70, and a frame base plate 72b provided between the lower parts of the four support frame parts 72a. On the frame base plate 72b, the motor 30 is mounted on the lower side, and the coupling 31 is mounted on the upper surface side.

[0072] In addition, if Figure 3 As shown, a support frame through hole 10a is formed in the central part of the lower side wall 10 of the housing 1, in which the drive source support frame 72, the motor 30 and the coupling 31 are arranged inside. A certain gap is maintained between the support frame through hole 10a and the drive source support frame 72 so that the drive source support frame 72 can move in the vertical direction. In this way, the drive source 3 is supported by the guide member 7 in a state where the self-rotation is restricted through the drive source support frame 72.

[0073] The guide rod 76 is a component that allows the moving body 2 to be inserted into the first motion mechanism 5 from the upper side and guides the moving body 2 and the first motion mechanism 5 in the intersecting direction. Figure 2 and Figure 3 As shown, the guide rod 76 is erected on the lower side wall 70 of the guide member 7. The guide rod 76 of this embodiment is formed to have substantially the same vertical length as the left side wall 71 and the right side wall 71, and is erected on both sides of the threaded shaft 41.

[0074] The lifting slider 20 as the moving body 2 and the lifting body 50 as the first actuating mechanism 5 are formed with guide rod through holes 21 and 51 through which the pair of left and right guide rods 76 are inserted. As a result, the movement of the moving body 2 and the first actuating mechanism 5 in the vertical direction (front-back direction) and the left-right direction is restricted, and the rotation of the ball nut 42 along with the movement of the ball screw 40 in the direction intersecting the ball nut 42 is restricted.

[0075] Furthermore, the guide rod 76 includes a restriction member 74 for restricting movement of the movable body 2 in the intersecting direction in the second operation region R2. The restriction member 74 is fixed to the upper end portion of the guide rod 76.

[0076] Specifically, a pair of left and right guide rods 76 have limiting components 74 on the left guide rod 76 and the right guide rod 76, respectively, with the threaded shaft 41 as the center. The limiting component 74 is a component that is square in shape when viewed from above, and has a horizontal upper surface and lower surface. The limiting component 74 is set in a manner that the upper end of the left side wall 71 and the right side wall 71 are fitted relative to the U-shaped shape of each side wall when viewed from above. The limiting component 74 on the left side is respectively fixed to the upper end of the left side wall 71 of the guide component 7 and the upper end of the left guide rod 76. The limiting component 74 on the right side is respectively fixed to the upper end of the right side wall 71 of the guide component 7 and the upper end of the right guide rod 76. As a result, the upper surfaces of the left and right sides of the mobile body 2 abut against the lower surface of the limiting component 74, and the position of the mobile body 2 in the cross direction is determined.

[0077] That is, Figure 6 and Figure 7 As shown, the rising end position of the movable body 2 restricted by the limiting component 74 to move in the cross direction (up and down direction) is the opposite position P2 where the valve body 23 connected to the movable body 2 via the valve body shaft 24 protrudes upward in the valve box A1 and faces the opening surface A100.

[0078] The first engaging member 77 is disposed on the left and right outer sides of the guide rod 76. The first engaging member 77 of this embodiment is disposed on the front side of the outer upper portion of the left side wall 71 and the right side wall 71, but the first engaging member 77 may also be disposed on the limiting member 74 disposed on the upper end of the guide rod 76.

[0079] like Figure 5 , Figure 10 to Figure 12 As shown in FIG. 1 , the first engaging member 77 is a first bearing body 770 having a longitudinal groove 770a opened at the top. A first engaging shaft 900 serving as the engaging portion 90 of the second actuating mechanism 6 is inserted into the longitudinal groove 770a. Figure 5 As shown, the first bearing body 770 has a longitudinal groove portion 770b opened downward on the lower side. The longitudinal groove portion 770b is formed to be symmetrical with the longitudinal groove portion 770a on the upper side. Therefore, when the first bearing body 770 is worn out due to repeated use, the frequency of replacement with a new first bearing body 770 can be reduced by replacing the left and right first bearing bodies 770 upside down. When the left and right first bearing bodies 770 are replaced by being reversed upside down, the first engaging shaft 900 as the engaging portion 90 of the second action mechanism 6 is inserted into the longitudinal groove portion 770b.

[0080] The first bearing body 770 supports the first engaging shaft 900 which is displaced as the link mechanism 60 moves so as to be able to slide in the vertical direction in the longitudinal groove portion 770a. Figure 8 to Figure 10As shown, each left side wall 71 and right side wall 71 of the guide member 7 is connected to the rear side of the outer upper portion with a link limiting member 78 that abuts against the rear end of the active link body 620 of the link mechanism 60 to limit the swing range of the link body.

[0081] like Figure 6 As shown, such a guide member 7 is supported from the upper and lower sides in a manner that allows movement in the vertical direction while limiting movement in the cross direction by an upper support portion 75 and a lower support portion 75 in the housing 1. The upper support portion 75 and the lower support portion 75 have the same structure and are provided on the diagonal line of the rectangular outer shape of the guide member 7 when viewed from the front.

[0082] like Figure 6 and Figure 7 As shown, the upper support portion 75 is composed of a support shaft 75a protruding from the upper side wall 11 of the housing 1, and a boss 75b protruding from the upper end of the guide member 7 and slidingly engaged with the support shaft 75a and moving in the vertical direction around the support shaft 75a. Similarly, the lower support portion 75 is composed of a support shaft 75a protruding from the lower side wall 10 of the housing 1 and a boss 75b protruding from the lower end of the guide member 7. The vertical moving body A2 is supported by the upper support portion 75 and the lower support portion 75 so as to be movable in the vertical direction relative to the housing 1.

[0083] The structure for supporting the guide member 7 in the housing 1 is not limited to the supporting structure of the upper supporting portion 75 and the lower supporting portion 75. As the supporting structure of the guide member 7 in the housing 1, for example Fig.13 As shown, a structure including a pair of left and right sliding mechanism parts 175 may also be used. Each sliding mechanism part 175 is provided on the upper side of the left and right restricting member 74 constituting the upper end part of the guide member 7.

[0084] The sliding mechanism 175 forms a rail structure with the vertical direction as the sliding direction, and includes a linear guide 176 fixed to the lower surface 11b of the upper side wall 11 by bolts or the like, and a slider 177 slidably engaged with the linear guide 176. The linear guide 176 extends in the vertical direction. The slider 177 is fixed to the upper end surface 7a of the guide member 7 (for example, the upper surface of the limiting member 74) by bolts or the like, and becomes a part that moves integrally with the guide member 7.

[0085] The slider 177 is a sliding member having a dimension shorter than the linear guide 176 in the extension direction of the linear guide 176, and has an engagement groove 177a that engages the lower portion of the linear guide 176. The linear guide 176 has grooves 176a along the sliding direction on the left and right side surfaces, and the slider 177 engages with the linear guide 176 in a state where the left and right opening edges on the upper side of the engagement groove 177a are respectively engaged with the left and right grooves 176a of the linear guide 176. By such an engagement method between the linear guide 176 and the slider 177, the movement of the slider 177 in the vertical direction relative to the linear guide 176 is restricted, that is, the movement of the guide member 7 in the vertical direction relative to the upper side wall 11 is restricted.

[0086] In this way, the guide member 7 can also be supported in the housing 1 so as to be slidable in the vertical direction relative to the upper side wall 11 constituting the housing 1 by the left and right sliding mechanism parts 175. According to the support structure of the guide member 7 by the left and right sliding mechanism parts 175, since the downward movement of the guide member 7 relative to the upper side wall 11 is restricted, the guide member 7 can be suspended and supported relative to the upper side wall 11. As a result, as the support structure of the guide member 7, it is unnecessary to use, for example, Fig. 9 The support portion 75 shown in FIG. 1 is provided between the guide member 7 and the lower side wall 10 of the housing 1. In addition, the structure of the sliding mechanism portion 175 may also be the same as that of the lower side support portion 75 shown in FIG. Fig.13 The structure shown is a structure that is reversed up and down, that is, a linear guide 176 is provided on the upper end surface 7 a side of the guide member 7, and a slider 177 is provided on the upper side wall 11 side.

[0087] The lifting slider 20 as the moving body 2 functions as a substantial operating base, and is subjected to the moving stress of the valve body 23 in the vertical direction and the cross direction of the first operating mechanism 5 and the second operating mechanism 6, so as to move the valve body 23 in the closing direction and the opening direction. The lifting slider 20 is a member having a box-shaped outer shape, and is connected to the valve body 23 via the valve body shaft 24. The lifting slider 20 is accommodated in the guide member 7 at a position (upper position) closer to the valve body 23 than the lifting body 50 in the cross direction, and is provided so as to be guided and moved in the cross direction (upward and downward direction).

[0088] A screw shaft insertion hole 22 for inserting the screw shaft 41 is formed in the central portion of the lifting slider 20. Figure 3 to Figure 7 As shown, the upper surface of the lifting slider 20 forms a flat surface, and a valve body shaft 24 connected to the valve body 23 is uprightly arranged in the central part of the lifting slider 20, and the left and right side parts (the upper surfaces of the left and right upper corners) are used as abutment surfaces abutting against the limiting component 74.

[0089] The valve body shaft 24 of this embodiment is axially arranged on the same axis as the axial direction of the threaded shaft 41, and is connected to the lifting slider 20 at the lower end. As a result, the movement stress in the cross direction from the transmission mechanism 4 is reliably transmitted to the valve body 23 connected to the upper end of the valve body shaft 24, achieving precise movement.

[0090] The lifting body 50 as the first motion mechanism 5 first receives the moving stress of the driving source 3 in the cross direction transmitted from the transmission mechanism 4 and moves, and then plays the function of transmitting the moving stress to the moving body 2 and the second motion mechanism 6. The lifting body 50 is configured to be able to move in the cross direction in the first motion region R1 where it moves in the cross direction together with the moving body 2 via the lifting motion mechanism 8 and in the second motion region R2 where it moves in the cross direction further by operating the vertical motion mechanism described later in a state where the movement of the moving body 2 in the cross direction is restricted. That is, as described above, the lifting body 50 moves in the cross direction along the threaded shaft 41 together with the ball nut 42, and moves back and forth between the first motion region R1 and the second motion region R2.

[0091] The lifting body 50 is a square plate-shaped member, connected to the lifting slider 20 via the lifting action mechanism 8, and connected to the transmission mechanism 4. The lifting body 50 is accommodated in the guide member 7 at a position (lower position) closer to the driving source 3 than the lifting slider 20 in the cross direction, and guides the movement in the cross direction (up and down direction). The lifting body 50 is arranged below the lifting slider 20 as the moving body 2. The ball nut 42 as the transmission mechanism 4 accommodated in the guide member 7 is integrally mounted on the lifting body 50.

[0092] like Figure 7 As shown, the lifting body 50 has a nut fitting hole 54 through which the ball nut 42 that moves in a direction intersecting the threaded shaft 41 is fitted. The lifting body 50 fixes the ball nut 42 to the nut fitting hole 54 and can move integrally with the ball nut 42 that moves along the threaded shaft 41.

[0093] In addition, if Figures 4 to 7 As shown in FIG. 1 , the lifting body 50 is formed to have a left-right width slightly longer than the left-right width of the lifting slider 20. The side ends 52 of the lifting body 50 in the left-right direction are located outside the left and right walls 71 through the longitudinal holes 73 formed in the lower halves of the left and right walls 71, respectively. That is, the lifting body 50 makes the left and right side ends 52 protrude from the longitudinal holes 73 to the left and right outer sides of the left and right walls 71, 71.

[0094] like Figure 7 to Figure 12As shown, a second bearing body 530 is connected to the side end 52 of the lifting body 50 as a second engaging member 53. The second bearing body 530 has an insertion groove 530a that receives and guides the second engaging shaft 910 as the input part 91 at the lower end of the link mechanism 60.

[0095] The second bearing body 530, for the embedded groove portion 530a, uses the second engaging shaft 910 arranged at the lower end of the active connecting rod body 620 located at the lower end of the connecting rod mechanism 60 as a contact, and uses each connecting rod body constituting the connecting rod mechanism 60 as a cam follower, that is, the so-called cam groove.

[0096] like Fig.10 As shown, the insertion groove 530a is a substantially L-shaped horizontal groove formed on the left and right side end surfaces of the lifting body 50, and an entry port 530e is formed at the upper end of one side of the L-shaped path. The entry port 530e is a portion that receives the second engaging shaft 910 set at the lower end of the link mechanism 60 described later, and opens upward.

[0097] Specifically, the second bearing body 530 has a lower groove wall 530b protruding outward from the left and right side end surfaces of the lifting body 50 and extending in the front-to-back direction, a short upper groove wall 530c extending in the front-to-back direction above the lower groove wall 530b, and a longitudinal groove wall 530d connecting the lower groove wall 530b and the front end of the upper groove wall 530c. The longitudinal groove wall 530d is a portion connecting the lower groove wall 530b and the upper groove wall 530c. The second bearing body 530 forms a space portion surrounded by these walls (530b, 530c, 530d) in an insertion groove portion 530a having an inlet port 530e opened upward at the upper rear end. Thus, the second bearing body 530 has an insertion groove portion 530a formed by the lower groove wall 530b, the upper groove wall 530c, and the longitudinal groove wall 530d. The insertion groove portion 530a has an inlet port 530e opened at the upper side.

[0098] The upper groove wall 530c is shorter in the front-rear direction than the lower groove wall 530b. In the vertical view of the insertion groove portion 530a, the area where the upper groove wall 530c and the lower groove wall 530b do not overlap becomes the formation area of ​​the entry port 530e.

[0099] In addition, the second bearing body 530 may also include a guide groove wall 530f erected on the rear side of the lower groove wall 530b. The guide groove wall 530f is a curved surface portion that is R-shaped when viewed from the side and is configured to restrict the second engaging shaft 910 that enters the embedded groove portion 530a from moving backward ( Fig.10 ) to the right, causing it to move forward ( Fig.10 in the left direction).

[0100] like Fig.10 and Fig.11 In other words, the active link body 620 in the link mechanism 60 makes the input portion 91 face the inlet 530 when the lift body 50 is in the first operating region R1.

[0101] The first operating region R1 of the lifter 50 of the present embodiment thus constructed is the lower region of the region where the lifter 50 moves in the vertical direction in the axial direction of the screw shaft 41. The second operating region R2 is the upper region of the region where the lifter 50 moves in the vertical direction in the axial direction of the screw shaft 41.

[0102] Specifically, the first operation region R1 is a region in which the lifting body 50 moves in the vertical direction until the second bearing body 530 as the second engaging member 53 connected to the lifting body 50 contacts the second engaging shaft 910 as the input portion 91. In addition, the second operation region R2 is a region in which the lifting body 50 moves in the vertical direction while maintaining the state in which the second bearing body 530 as the second engaging member 53 connected to the lifting body 50 contacts the second engaging shaft 910 as the input portion 91.

[0103] In addition, a lifting mechanism 8 is provided between the first action mechanism 5 and the moving body 2. Specifically, the lifting mechanism 8 is an elastic body 80, such as a compression coil spring. A plurality of elastic bodies 80 are sandwiched between the lower surface of the lifting slider 20 and the upper surface of the lifting body 50. In other words, Figures 4 to 12 As shown, the lift slider 20 and the lift body 50 are connected to each other via an elastic body 80 serving as a lift action mechanism 8 .

[0104] Two elastic bodies 80 are provided in the lifting slider 20 and the lifting body 50 at positions that are point-symmetrical with respect to the axis center of the threaded shaft 41. Figure 4 As shown, the elastic body 80 is externally embedded in the guide rod 81 extending between the lifting slider 20 and the lifting body 50, and always applies force to the lifting slider 20 upward on the lifting body 50. In addition, as another example, the elastic body 80 can also be a plurality of coil springs externally mounted on the guide rod 81.

[0105] The lifting slider 20 and the lifting body 50 constructed as described above are accommodated in the guide member 7, and do not follow the screw rotation of the ball screw 40 but rotate together and move in the up-down direction. That is, in the vertical moving body A2 as the valve body cross moving mechanism system, as shown in FIG. Figure 4 to Figure 7 As shown, as the electric motor 30 serving as the driving source 3 is driven, its power is transmitted to the ball screw 40 serving as the transmission mechanism 4 .

[0106] Specifically, the threaded shaft 41 connected to the output shaft of the motor 30 via the coupling 31 is driven to rotate, and the screwed ball nut 42 moves in the vertical direction. As the ball nut 42 moves in the vertical direction, the lifting body 50 provided integrally with the ball nut 42 begins to move in the vertical direction, and its moving stress is transmitted to the lifting slider 20 as the moving body 2 located above via the elastic body 80 as the lifting action mechanism 8. That is, the lifting body 50 moves in the vertical direction together with the lifting slider 20 through the ball screw 40 via the elastic body 80 maintained in the extended state.

[0107] In this way, the elastic body 80 is provided so as to move integrally with the lifting slider 20 and the lifting body 50 in a direction perpendicular to the intersecting direction. By adopting such an integrally moving structure, for example, when moving in the vertical direction, it is possible to prevent the elastic body 80 from buckling and deforming. In addition, since the sliding of the contact portion between the elastic body 80 and the lifting slider 20 and the contact portion between the elastic body 80 and the lifting body 50 is reduced, the generation of particles can be reduced.

[0108] When the lifting slider 20 stops at the rising end position abutting against the limiting member 74, as shown in FIG. Figure 8 and Fig.11 As shown, the valve body 23 projects upward in the valve box A1 and is located at a position P2 facing the opening A10 at a certain distance.

[0109] That is, the lift slider 20 moves back and forth between the open position P1 and the facing position P2 by the first motion of the lift body 50 in the first motion region R1. In other words, the lift slider 20 moves vertically while being located at the bottom and in contact with the restricting member 74.

[0110] In this way, the vertical moving body A2 moves the lifting body 50 and the lifting slider 20 in the cross direction through the rotation of the ball screw 40, so that the up and down position of the valve body 23 can be operated. That is, if the threaded shaft 41 connected to the output shaft is rotated by the action of the motor 30, the lifting slider 20 moves along the threaded shaft 41, and the valve body shaft 24 connected to the lifting slider 20 is also moved, and the valve body 23 is moved in the cross direction for position adjustment, and the height position of the valve body 23 is adjusted to reliably correspond to the opening A10 of the valve box A1.

[0111] In addition, the lifting body 50 performs the second action in the second action region R2, the valve body vertical movement mechanism system described later is operated, the lifting slider 20 moves vertically together with the valve body 23, and the valve body 23 approaches or moves away from the opening A10. The second action of the lifting body 50 is to deform the elastic body 80 into an extended state or a contracted state relative to the lifting slider 20 stopped at the ascending end position, and at the same time, to move the lifting body 50 away from or close to the lifting slider 20.

[0112] [3. Valve body vertical movement mechanism system]

[0113] Next, the valve body vertical movement mechanism system is described in detail. The valve body vertical movement mechanism system includes a vertical action mechanism A3 provided between the housing 1 and the vertical movement body A2 in addition to the vertical movement body A2 as the valve body cross movement mechanism system. In addition, since the vertical action mechanism A3 basically has the same structure in a bilaterally symmetrical manner when viewed from the front, the same reference numerals are used and the description thereof is omitted unless otherwise specifically described.

[0114] like Fig. 9 and Fig.12 As shown, the vertical motion mechanism A3 moves the vertical movable body A2 in the vertical direction as the lifting body 50 as the first motion mechanism 5 performs the second motion in the second motion region R2, that is, moves in the intersecting direction.

[0115] The vertical action mechanism A3 is constructed as the above-mentioned second action mechanism 6, having a pair of link mechanisms 60 clamped between the shell 1 and the guide component 7 and swinging, so that the vertical movable body A2 as a whole is in the vertical direction of the shell 1, even if the movable body 2 having the valve body 23 is displaced in the vertical direction together with the guide component 7.

[0116] like Figure 10 to Figure 12 As shown, the link mechanism 60 is composed of a plurality of link bodies connected so as to be relatively rotatable. The plurality of link bodies include: a supporting link body 611 rotatably supported by a shaft on the housing 1 at one end; a driven link body 610 rotatably connected to the supporting link body 611 at one end and engaged with the first engaging member 77 at the other end; and an active link body 620 connected to at least one of the supporting link body 611 and the driven link body 610 at one end.

[0117] The link mechanism 60 moves the moving body 2 from the cross direction to the vertical direction via the driven link body 610 and the supporting link body 611. Specifically, in the second action region R2, the link mechanism 60 displaces the active link body 620 via the second engaging member 53 of the lifting body 50 in the first action mechanism 5, thereby displacing the supporting link body 611 and the driven link body 610, and moving the moving body 2 to the vertical direction.

[0118] like Figure 10 to Figure 12 As shown, there are two forms of shape displacement of the supporting link body 611 and the driven link body 610 in the link mechanism 60: a bent form T1 in which the supporting link body 611 and the driven link body 610 intersect in a manner of protruding downward, and a straight form T2 in which the supporting link body 611 and the driven link body 610 are arranged in a straight line in the vertical direction. That is, in the link mechanism 60, the shape formed by the supporting link body 611 and the driven link body 610 includes the bent form T1 and the straight form T2.

[0119] The bent shape T1 of the supporting link body 611 and the driven link body 610 causes the valve body 23 to leave the opening surface A100 and open the opening A10. The straight shape T2 of the supporting link body 611 and the driven link body 610 causes the valve body 23 to be in close contact with the opening surface A100 and close the opening A10.

[0120] The straight line form T2 is not necessarily limited to the state where the supporting link body 611 and the driven link body 610 are arranged in a straight line. For example, as long as the engaging portion 90 (first engaging axis 900) moves in the vertical direction, the straight line form T2 may also be a form where the supporting link body 611 and the driven link body 610 are slightly bent (including any one of a form where the upper side is slightly bent as the protruding side and a form where the lower side is slightly bent as the protruding side). In addition, in the straight line form T2 where the upper side is bent as the protruding side, if the movement of the lifting body 50 in the cross direction is restricted, even if an external force is applied to move the valve body 23 in the vertical direction, the closed state of the opening A10 described later will not be released.

[0121] Such shape displacement of the supporting link body 611 and the driven link body 610 is performed by the movement of the first motion mechanism 5 in the cross direction of the second motion region R2. That is, in the second motion region R2, the lifting body 50 makes the link mechanism 60 bend in the shape T1 by engaging the upper groove wall 530c of the second bearing body 530 with the active link body 620, and makes the link mechanism 60 be straight in the shape T2 by engaging the lower groove wall 530b of the second bearing body 530 with the active link body 620.

[0122] The structure of the link mechanism 60 is described in more detail below. The plurality of link bodies constituting the link mechanism 60 are connected to each other via a plurality of swing pivots including an engagement portion 90 and an input portion 91 so as to be relatively rotatable, and are held on the left side wall 12 and the right side wall 12 of the housing 1 via a plurality of housing pivots serving as support portions 92.

[0123] The housing pivots as the support portion 92 are located on the left side wall 12 and the right side wall 12 of the housing 1, and are composed of three parts: an upper housing pivot 920 located at the upper part and the front side, an intermediate housing pivot 921 located at the middle part and the rear side, and a lower housing pivot 922 located at the lower part and the front side. In this way, the support portion 92 is composed of a plurality of housing pivots, and the link mechanism 60 as the second action mechanism 6 is held at a predetermined position (location) on the left side wall 12 and the right side wall 12 of the housing 1.

[0124] The swing pivot support shaft including the locking portion 90 and the input portion 91 is composed of four components: a first locking shaft 900 that moves the lifting slider 20 in a vertical direction at a position below the upper shell pivot 920, an intermediate swing pivot 930 between the first locking shaft 900 and the intermediate shell pivot 921, a lower swing pivot support shaft 931 that is below the intermediate swing pivot 930 and rearward of the lower shell pivot 922, and a second locking shaft 910 located at the lower end of the connecting rod mechanism 60.

[0125] That is, the engaging portion 90 is composed of a first engaging shaft 900 engaged with the first bearing body 770 of the first engaging member 77 as the vertical moving body A2. In addition, the input portion 91 is composed of a second engaging shaft 910 engaged with the second engaging member 53, i.e., the second bearing body 530, of the lifting body 50 of the first action mechanism 5 as the vertical moving body A2.

[0126] The driven link body 610 and the supporting link body 611 constitute a vertical link part 61 including the engaging part 90 in the link mechanism 60. Specifically, the vertical link part 61 is constituted by the driven link body 610 sandwiched between the first engaging shaft 900 at one end and the swing pivot at the other end, the supporting link body 611 sandwiched between the swing pivot at the other end of the driven link body 610 and the housing pivot, and the upper swing link body 612 sandwiched between the first engaging shaft 900 at one end of the driven link body 610 and the housing pivot at the other end. That is, the driven link body 610 has the first engaging shaft 900 at one end, and the end is constituted as the engaging part 90.

[0127] The active link body 620 constitutes the transmission link part 62 including the input part 91 in the link mechanism 60. Specifically, the transmission link part 62 is composed of at least the active link body 620 connected to the driven link body 610 or the supporting link body 611 via a swing pivot at one end, and an intermediate swing link body 621 sandwiched between the swing pivot at the middle part of the active link body 620 and the housing pivot at the other end.

[0128] The active link body 620 has a second engagement shaft 910 at the other end thereof that engages with or disengages from the lifting body 50, and the end is configured as an input portion 91 that engages with the lifting body 50. Fig.10As shown, when the lifting body 50 is in the first operation region R1, the active link body 620 makes the input portion 91 face the inlet 530e. The active link body 620 inserts the second engagement shaft 910 at the end into the insertion groove 530a of the second bearing body 530 of the lifting body 50.

[0129] The second engagement shaft 910 can be freely inserted into and removed from the insertion groove portion 530 a of the second bearing body 530 of the lifting body 50 protruding from the vertical hole 73 of the guide member 7 .

[0130] One end of the active link body 620 is swingably pivoted on the intermediate swing pivot 930 connecting the driven link body 610 and the supporting link body 611. That is, the driven link body 610, the supporting link body 611 and the active link body 620 are swingably (rotatably) connected to each other around the common intermediate swing pivot 930.

[0131] The active link body 620 is the longest link body in the link mechanism 60, and is pivotally supported at one end by the intermediate swing pivot 930. Figure 10 to Figure 12 As shown, the other end is located as the lowermost end of the link mechanism 60 and is located on the upper side of the vertical hole 73 provided in the lower half of the left and right walls 71 of the guide member 7 .

[0132] The active link body 620 pivotally supports the other end of the intermediate swing link body 621 in a swingable manner via a lower swing pivot 931 provided in the middle of the active link body 620 .

[0133] The intermediate swing link body 621 specifies the swing direction and swing range of other link bodies in the link mechanism 60. Figure 10 to Figure 12 As shown, the intermediate swing link body 621 functions as a limiting link for reliably reproducing the bending form T1 and the straight form T2 by regulating the posture of the active link body 620 to a tilted form T3 corresponding to the bending form T1 for opening the opening A10 and a raised form T4 corresponding to the straight form T2 for closing the opening A10.

[0134] The driven link body 610, the supporting link body 611 and the upper swing link body 612 as the link body, the upper housing pivot 920, the intermediate housing pivot 921, the first engaging shaft 900 and the intermediate swing pivot 930 as the pivot constitute the vertical link part 61 as a unit. Figure 10 to Figure 12 As shown, the vertical link portion 61 moves the vertical moving body A2 in the vertical direction by changing the postures of the driven link body 610 and the supporting link body 611 between the bent state T1 and the straight state T2.

[0135] The active link body 620 as a link body, the intermediate swing link body 621, the lower housing pivot 922 as a pivot, the intermediate swing pivot 930, the lower swing pivot 931 and the second engagement shaft 910 constitute a transmission link portion 62 as a unit. The transmission link portion 62 transmits the input from the lifting body 50 to the vertical link portion 61 to change the posture of the vertical link portion 61.

[0136] That is, Figure 10 to Figure 12 As shown, the vertical link portion 61 composed of the driven link body 610 and the supporting link body 611 connected via the intermediate swing pivot 930 is displaced into a straight line (changed in shape) by the force input to the transmission link portion 62 composed of the lower swing pivot 931 connected via the intermediate swing pivot 930. When the vertical link portion 61 is displaced into a straight line, the lifting slider 20 connected to the link mechanism 60 via the guide member 7 moves in the vertical direction (forward) together with the guide member 7. When the lifting slider 20 moves in the vertical direction, the valve body 23 connected to the lifting slider 20 moves in the vertical direction, so that the opening A10 is closed by the valve body 23.

[0137] In other words, the connecting rod mechanism 60 serving as the second action mechanism 6 maintains the bent shape T1 during the movement of the first action mechanism 5 in the first action area R1 in the cross direction, so that the valve body 23 leaves the opening surface A100 and the opening A10 becomes an open state. It becomes a straight line shape T2 only when the first action mechanism 5 in the second action area moves additionally in the cross direction to overcome the action force of the elastic body 80, so that the valve body 23 approaches the opening surface A100 and the opening A10 becomes a closed state.

[0138] Thus, compared with the valve body actuation structure using the conventional link mechanism, the gate valve A has a link mechanism 60 as the second actuation mechanism 6 that does not move with the movement of the valve body 23 in the cross direction, and a link mechanism 60 is provided on the housing 1 at a position different from the lifting slider 20 as the moving body 2 and the lifting body 50 as the first actuation mechanism 5. The link mechanism 60 is independent of the upward and downward movement of the moving body 2 and is provided on the housing 1 at a predetermined position different from the lifting body 50. Therefore, it is possible to realize a simple and reliable movement in the vertical direction of the valve body, and it is possible to minimize failures and wear damage of the sliding part of the link.

[0139] The vertical motion mechanism A3 is based on the link mechanism 60 as the second motion mechanism 6. The link mechanism 60 connects the driven link body 610 that moves the valve body 23 in the vertical direction to the supporting link body 611 via the intermediate swing pivot 930, and moves the driven link body 610 by displacing the intermediate swing pivot 930. That is, a complex link mechanism is not required, and the movement of the valve body 23 in the vertical direction can be realized with the minimum structure that enables the link mechanism to be established.

[0140] [4. Valve body closing operation]

[0141] Next, the closing action of the valve body 23 for closing the opening A10 will be described. Figure 6 , Figure 8 , Fig.10 and Fig.11 As shown, as the first operation in the first operation region R1 , when the lift body 50 moves in the intersecting direction, the valve body 23 is positioned from the open position P1 to the facing position P2 .

[0142] When the lifting body 50 performs the second action in the second action area R2, Fig.11 As shown in FIG. 1 , the second engagement shaft 910 is inserted into the insertion groove 530a. If the lifting body 50 is further moved in the intersecting direction in this state, Fig.12 As shown, the active link body 620 pushes the intermediate swing pivot 930 upward, and a straight line shape T2 of the driven link body 610 and the supporting link body 611 appears. That is, by pushing the intermediate swing pivot 930 upward by the active link body 620, the shape formed by the driven link body 610 and the supporting link body 611 changes from the bent shape T1 to the straight line shape T2.

[0143] The displacement of the driven link body 610 and the supporting link body 611 to the straight shape T2 induces the lifting slider 20 to move in the vertical direction via the first bearing body 770 that supports the first engaging shaft 900 of the driven link body 610, so that the lifting slider 20 moves in the vertical direction together with the guide component 7.

[0144] At the same time, Fig.11 and Fig.12 As shown, the valve body 23 moves vertically from the facing position P2 to the closed position P3 via the valve body shaft 24 connected to the lifting slider 20. In this way, the valve body 23 performs a tight closing operation of the opening A10 of the gate valve A.

[0145] Specifically, the lifting body 50 that moves in the vertical direction by the ball screw 40 moves the lifting slider 20 located above it until it contacts the limiting member 74. During this period, the elastic body 80 connecting the lifting body 50 and the lifting slider 20 maintains a substantially extended state. In addition, the second engaging shaft 910 as the movement input part 91 is located directly above the entrance 530e of the insertion groove 530a in the second bearing body 530 as the lower second engaging member 53 in the bending state T1 of the link mechanism 60.

[0146] like Figure 10 to Figure 12As shown, when the lifting body 50 moves the lifting slider 20 to the limiting component 74 while moving in the cross direction in the first action area R1 as a first action, the elastic body 80 sandwiched between the lifting slider 20 is caused to shrink and deform against the elastic stress, while an additional movement to a further cross direction is performed in the second action area R2 as a second action.

[0147] By performing the second action of the lifting body 50 , the embedding groove 530 a of the second bearing body 530 approaches the lower end of the active link body 620 , and the second engaging shaft 910 of the active link body 620 enters the embedding groove 530 a from the entry port 530 e .

[0148] The second engaging shaft 910 inserted into the embedded groove 530a is guided by the lower groove wall 530b and the guide groove wall 530f of the second bearing body 530 as the lifting body 50 moves further, and approaches the longitudinal groove wall 530d. Since the swing range of the active link body 620 is limited by the intermediate swing link body 621, according to the movement of the second engaging shaft 910, Fig.11 and Fig.12 As shown, the posture changes from the inclined posture T3 to the upright posture T4.

[0149] At the same time, the driven link body 610 and the supporting link body 611 are pushed up by the active link body 620 via the intermediate swing pivot 930, thereby changing from the bent state T1 with the lower side as the protruding side to the straight state T2. The first engaging shaft 900 at one end of the driven link body 610 moves in the vertical direction with the intermediate housing pivot 921 at one end of the supporting link body 611 as the starting point.

[0150] As a result, the first engaging shaft 900 moving in the vertical direction presses the front groove wall of the longitudinal groove portion 770a of the first bearing body 770, and moves the lifting slider 20 in the vertical direction together with the guide member 7. Therefore, the valve body 23 connected to the lifting slider 20 moves in the vertical direction to the closed position P3 from the opposite position P2 facing the opening A10 so as to approach the opening surface A100, thereby Fig. 9 and Fig.12 As shown, the opening A10 is closed.

[0151] In the closed state of the opening A10 formed by the valve body 23, the driven link body 610 and the supporting link body 611 of the link mechanism 60 are always urged upward by the active link body 620 via the intermediate swing pivot 930. Therefore, even when an external force causes the valve body 23 to move away from the opening A10, the straight line shape T2 is maintained and the valve body 23 is kept in a crimped state to the opening A10.

[0152] Specifically, the link mechanism 60 functions as a toggle mechanism. The larger the angle formed by the driven link body 610, one end of which is connected to the moving object (for example, the vertical moving body A2), and the supporting link body 611, one end of which is rotatably supported on the housing 1 and the other end of which is connected to the driven link body 610, the larger the output for moving the vertical moving body A2 relative to the magnitude of the force input from the intermediate swing pivot 930.

[0153] Even when the link mechanism 60 is actuated with a relatively small force, the valve body 23 can be strongly pressed against the opening A10. That is, even when the gate valve A uses a driving source 3 with a small output, the valve body 23 can be strongly pressed against the opening A10 by the action of the link mechanism 60, thereby achieving a tight closure. Therefore, the action of the link mechanism 60 can move the valve body 23 in the vertical direction with a small action force, thereby saving energy consumption.

[0154] In addition, when the valve body 23 closes the opening A10, since the driven connecting rod body 610 and the supporting connecting rod body 611 are in a straight line shape T2, even if an external force causing the valve body 23 to leave the opening A10 acts due to unintentional contact, the valve body 23 can maintain the state of closing the opening A10.

[0155] Specifically, when an external force acts on the valve body 23, a force to move in the vertical direction is applied to the first engaging shaft 900 via the lifting slider 20 connected to the valve body 23. However, since the force is received by the supporting link body 611 whose one end is fixed to the housing 1 via the driven link body 610, the driven link body 610 and the supporting link body 611 do not shift from the straight state T2 to the bent state T1 with the protruding side toward the lower side. Therefore, the pressure-contact state of the valve body 23 to the opening A10 can be maintained.

[0156] That is, without a special locking mechanism, the valve body locking that maintains the tightly closed state of the opening A10 of the valve body 23 can be achieved by the straight line shape T2 of the driven link body 610 and the supporting link body 611 of the link mechanism 60. Therefore, by making the driven link body 610 and the supporting link body 611 straight, the sealing state of the opening A10 of the valve body 23 can be maintained, and energy for maintaining the sealing state is not required, which can prevent useless energy consumption.

[0157] [5. Opening action of the valve body]

[0158] Next, the opening operation of the valve body 23 for opening the opening A10 will be described. As described above, in the closed state of the opening A10 formed by the valve body 23, as shown in FIG. Figure 8 , Fig. 9 , Fig.11 and Fig.12As shown, as the lifting body 50 moves in the second action area R2 in the direction crossing away from the valve body 23, the valve body 23 moves from the closed position P3 to the opposite position P2. That is, as the lifting body 50 moves in the second action, the second engaging shaft 910 of the link mechanism 60 that enters the embedded groove 530a engages with the upper groove wall 530c of the embedded groove 530a, descends and moves backward, thereby leaving the longitudinal groove wall 530d.

[0159] In addition, if Fig.11 and Fig.12 As shown, the active link body 620 moves from the upright posture T4 to the inclined posture T3 according to the movement of the second engaging shaft 910. At the same time, the driven link body 610 and the supporting link body 611 are pulled downward by the active link body 620 via the intermediate swing pivot 930, as shown in FIG. Fig.10 and Fig.11 As shown, the position is changed from the straight state T2 to the bent state T1. That is, by using the active link body 620 whose posture is changed from the upright posture T4 to the inclined posture T3, the intermediate swing pivot 930 is pulled downward, so that the shape formed by the driven link body 610 and the supporting link body 611 is changed from the straight state T2 to the bent state T1. In addition, the first engaging shaft 900 at one end of the driven link body 610 moves in the vertical direction with the intermediate housing pivot 921 at one end of the supporting link body 611 as the starting point.

[0160] As a result, the first engaging shaft 900 moving in the vertical direction presses the rear groove wall of the longitudinal groove portion 770a of the first bearing body 770, and moves the lifting slider 20 in the vertical direction together with the guide member 7. Therefore, the valve body 23 connected to the lifting slider 20 moves in the vertical direction away from the opening A10, so that the opening A10 is opened.

[0161] Finally, the lifting body 50 moves in the intersecting direction in the first action area R1 in such a way that the lifting slider 20 is separated from the opening surface A100 via the elastic body 80. Figure 6 and Fig.10 As shown, the valve body 23 is positioned from the face-to-face position P2 to the open position P1, so that the opening A10 is in an open state.

[0162] In this way, the gate valve A of this embodiment implements the closing action of the valve body 23 which is set to "the valve body 23 approaches the opening A10 in the cross direction → the valve body 23 approaches the opening A10 in the vertical direction → the closed state of the opening A10" in the order of "the moving body of the valve body cross movement mechanism system in the cross direction → the movement of the vertical moving body A2 of the vertical action mechanism A3 of the valve body vertical movement mechanism system in the vertical direction" or the opening action of the valve body 23 which is set to "the valve body 23 moves away from the opening A10 in the vertical direction → the valve body 23 moves away from the opening A10 in the cross direction → the open state of the opening A10" in the order of "the moving body of the valve body cross movement mechanism system in the cross direction → the movement of the vertical moving body A2 of the vertical action mechanism A3 of the valve body vertical movement mechanism system in the vertical direction".

[0163] In particular, the connecting rod mechanism 60 of the present embodiment is configured such that the active connecting rod body 620 engages with the lifting body 50, and the driven connecting rod body 610 and the supporting connecting rod body 611 are shifted into a straight shape T2 or a bent shape T1 via the intermediate swing pivot 930, thereby enabling the lifting slider 20 to move in a vertical direction, that is, the valve body 23 to move toward or away from the opening A10 of the valve box A1 in a vertical direction.

[0164] As described above, according to the gate valve A of this embodiment, the movement in the cross direction and the vertical direction are systematically separated by a combination of a simple mechanism of a vertical movable body A2 and a vertical action mechanism A3, thereby realizing a phased and separate movement of the valve body 23, and suppressing the wear and damage of the sealing component 23a, thereby being able to tightly close the opening A10 of the valve box A1 connected to the opening B10 of the vacuum preparation device B and the opening C10 of the processing device C.

[0165] In addition, the above embodiment is an example of the present invention, and the present invention is not limited to the above embodiment. Therefore, even outside the above embodiment, various changes can be made according to the design, etc. as long as they do not deviate from the technical concept of the present invention. In addition, the effects recorded in the present disclosure are only illustrative and not limiting, and other effects may also be present.

[0166] Description of Reference Numerals

[0167] A gate valve, A1 valve box, A2 vertical moving body, A3 vertical action mechanism, 1 shell, 10 lower side wall, 11 upper side wall, 12 left side wall or right side wall, 2 moving body, 20 lifting slider, 21 guide rod through hole, 22 threaded shaft insertion hole, 3 driving source, 30 motor, 31 coupling, 4 transmission mechanism, 40 ball screw, 41 threaded shaft, 42 ball nut, 5 first action mechanism, 50 lifting body, 51 guide rod through hole, 52 side end, 53 second engaging part, 530 second bearing body, 54 nut fitting hole, 6 second action mechanism, 60 connecting rod mechanism, 61 vertical connecting rod part, 610 driven connecting rod body, 611 supporting connecting rod body, 612 Upper swing link body, 62 transmission link part, 620 active link body, 621 intermediate swing link body, 7 guide part, 70 lower side wall, 71 left side wall or right side wall, 72 driving source support frame, 73 longitudinal hole, 74 limiting part, 75 upper side support part or lower side support part, 76 guide rod, 77 first engaging part, 770 first bearing body, 8 lifting action mechanism, 80 elastic body, 81 guide rod, 90 engaging part, 900 first engaging shaft, 91 input part, 910 second engaging shaft, 92 supporting part, 920 upper shell pivot, 921 intermediate shell pivot, 922 lower shell pivot, 930 intermediate swing pivot, 931 lower swing pivot

Claims

1. A gate valve that seals an opening by pressing a valve body having a sealing member against an opening surface having an opening communicating with a processing portion of a processing device that performs a vacuum process, wherein: have: a moving body that moves integrally with the valve body; a conversion mechanism that moves the movable body in each of a vertical direction relative to the opening surface and a cross direction intersecting the vertical direction; and a transmission mechanism that transmits power from a driving source to the conversion mechanism, The conversion mechanism comprises: A first action mechanism, which moves in the intersection direction and causes the moving body to move in the intersection direction; as well as a second action mechanism, which moves the moving body in the vertical direction; The operation of the second operating mechanism includes an operation of the first operating mechanism causing additional movement in the intersecting direction, starting from a state in which the movement of the movable body in the intersecting direction is restricted.

2. The gate valve according to claim 1, characterized in that: The second actuating mechanism is provided at a predetermined position that is not related to the movement of the moving body in the intersecting direction.

3. The gate valve according to claim 1 or 2, characterized in that: have: a housing provided with the second actuating mechanism; and a guide member, which is arranged to be restricted by the housing to move in the intersecting direction and is capable of moving in the vertical direction together with the moving body, The second action mechanism comprises: a supporting portion supported by the housing; an engaging portion engaged with the guide component; and An input part is engaged with or disengaged from the first action mechanism.

4. The gate valve according to claim 3, characterized in that: The second action mechanism is a link mechanism, and has a vertical link portion including the engaging portion and a transmission link portion including the input portion. The transmission link portion transmits the force input from the first actuating mechanism to the input portion to the vertical link portion.

5. The gate valve according to claim 4, characterized in that: The moving body is provided on the guide member so as to be guided and movable in the up-down direction, which is the intersecting direction. The first action mechanism is a lifting body that moves the moving body in the vertical direction within the guide member. The link mechanism as the second action mechanism is configured to move the moving body together with the guide member in the vertical direction. The link mechanism is independent of the movement of the moving body in the up-down direction and is provided at a different, predetermined position from that of the lifting body.

6. The gate valve according to claim 5, characterized in that: The link mechanism includes a swing pivot that relatively rotatably connects a plurality of link bodies. The support portion includes a plurality of housing pivots pivotally supported on the housing. The engaging portion includes a first engaging shaft engaged with the guide member, The vertical link portion includes a driven link body sandwiched between the first engaging shaft at one end and a swing pivot at the other end, and a supporting link body sandwiched between the swing pivot at the other end of the driven link body and the housing pivot. The transmission link portion has at least one active link body connected to the driven link body or the supporting link body via a swing pivot at one end thereof. The active link body includes a second engagement shaft as the input portion at the other end thereof, which is engaged with or disengaged from the lifting body, and is engaged with the lifting body to follow the additional movement of the lifting body in the up-and-down direction.

7. The gate valve according to claim 4, characterized in that: The link mechanism moves the moving body from the intersecting direction to the perpendicular direction via the driven link body and the supporting link body.

8. A gate valve that seals an opening by pressing a valve body having a sealing member against an opening surface having an opening communicating with a processing section of a processing device that performs a vacuum process, wherein: have: case; a vertical moving body, which is held on the housing and is movable in a vertical direction relative to the opening surface; and A vertical action mechanism is arranged between the housing and the vertical moving body. The vertical moving body has: a moving body that moves integrally with the valve body; a lifting body that moves together with the moving body in a direction intersecting the vertical direction; a driving source that moves the lifting body in the intersecting direction; and A lifting mechanism is provided between the lifting body and the moving body. The lifting body is configured to be movable in the intersecting direction in a first motion region in which the lifting body moves in the intersecting direction together with the moving body via the lifting motion mechanism and in a second motion region in which the vertical motion mechanism is actuated in a state in which the moving body is restricted from moving in the intersecting direction and further moves in the intersecting direction, The vertical motion mechanism moves the vertical movable body in the vertical direction as the lifting body moves in the intersecting direction in the second motion area.

9. The gate valve according to claim 8, characterized in that: The vertical moving body has: a limiting member that limits movement of the moving body in the intersecting direction in the second action area; and A first engaging member is engaged with the vertical action mechanism, The vertical action mechanism is a linkage mechanism and has: A supporting connecting rod body, one end of which is rotatably supported by the housing shaft; A driven connecting rod body, which is relatively rotatably connected to the supporting connecting rod body at one end and is engaged with the first engaging portion at the other end; and The active connecting rod body has one end connected to at least one of the supporting connecting rod body and the driven connecting rod body. The lifting body has a second engaging member engaged with the active connecting rod body. The link mechanism displaces the active link body via the second engagement member in the second operating range, thereby performing morphological displacement of the support link body and the driven link body.

10. The gate valve according to claim 9, characterized in that: The shape displacement of the supporting connecting rod body and the driven connecting rod body of the connecting rod mechanism includes the following two shapes: A bent shape that intersects the supporting link body and the driven link body in a manner that the supporting link body and the driven link body protrude downward; and The supporting connecting rod body and the driven connecting rod body are arranged in a straight line in the vertical direction. The moving body In the bent state of the link mechanism, the valve body is separated from the opening surface to open the opening, and in the straight state of the link mechanism, the valve body is in close contact with the opening surface to close the opening.

11. The gate valve according to claim 10, characterized in that: The second engaging member has an insertion groove portion formed by a lower groove wall extending in the vertical direction, an upper groove wall extending in the vertical direction and shorter than the lower groove wall, and a longitudinal groove wall connecting the lower groove wall and the upper groove wall. The embedding groove has an entrance opening opened at the upper side. In the second action range, the lifting body causes the upper groove wall to engage with the active link body so that the link mechanism is in the bent state, and causes the lower groove wall to engage with the active link body so that the link mechanism is in the straight state.

12. The gate valve according to claim 11, characterized in that: The active link body has an input portion at the other end thereof that engages with or disengages from the second engagement member. The input unit is positioned opposite to the entrance when the lift body is located in the first operation area.

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