A composite material large-amount microporous abrasive floating spindle

Abstract

The present invention discloses a composite material super-large microporous abrasive polishing air-floating spindle, which includes a water-cooled motor, an air-floating bearing, and a water-gas switch. When liquid flows into the water inlet pipe, it allows the first micro-switch to be triggered, and the first micro-switch controls the opening of the pneumatic diaphragm valve of the air inlet pipe. Through the above water-gas switch, the working sequence of the water inlet pipe and the air inlet pipe can be adjusted, so as to avoid the rotation of the motor rotor of the water-cooled motor when the water inlet pipe does not intake water, thereby ensuring that the thrust bearing pad made of graphene bronze composite super-large microporous material necessarily forms an air film during operation, and further ensuring its service life and the process quality of wafer thinning.

Description

Technical Field

[0001] The present invention relates to the field of integrated circuit manufacturing, and particularly to a composite material ultra-micro pore type polishing air-floating spindle for a wafer thinning and grinding device in semiconductor processing. Background Art

[0002] A polishing air-floating spindle is an advanced technology in the field of high-speed precision machining. It mainly consists of a motor, an air-floating bearing, a grinding wheel connecting member, etc. The motor rotor and the air-floating bearing are connected by screws, and an integrated design is adopted to increase the stability of the two. Since the kinematic viscosity of the gas is low, when the spindle rotates at high speed, compressed gas forms a gas film with a certain thickness between the upper and lower thrusts of the bearing and the graphite material, and the friction coefficient is low, making it have the advantages of high precision, low heat generation, no wear, no pollution, etc.

[0003] A thinning machine is a device commonly used for ultra-high precision grinding / thinning of semiconductor materials. Before the integrated circuit wafer is packaged, the wafer thinning machine is responsible for removing the redundant substrate material behind the wafer to reach the required thickness under working conditions. This step helps to reduce the packaging difficulty, improve the chip heat dissipation efficiency, reduce internal stress, improve electrical performance, etc. The air-floating spindle, as the core component of the wafer thinning machine, consists of a water-cooled motor and an air-floating bearing, and drives the air-floating bearing to rotate through the motor, playing a crucial role in the wafer thinning process.

[0004] Suppose the air-floating bearing uses a gasket of graphene bronze composite material with ultra-micro pores. Although it can achieve a thinner thickness, higher strength, better air permeability, etc., if it starts to rotate without ventilation, it will undoubtedly cause irreversible damage to the gasket.

[0005] In the above air-floating spindle, usually a water circuit is required to cool the water-cooled motor and an air circuit is required to form a gas film for the air-floating bearing. However, in actual operation, often due to the misoperation of workers, the water circuit is not opened first and then the air circuit, or the water circuit is not opened at all and only the air circuit is opened to start wafer grinding / thinning, which will also cause great damage to the life of the thinning machine spindle and the quality of wafer processing.

[0006] Therefore, there is an urgent need for a graphene bronze composite material that can optimize the polishing air-floating spindle to prepare an ultra-micro pore type polishing air-floating spindle. Summary of the Invention

[0007] In view of the above problems, the present invention provides a composite material ultra-micro pore type polishing air-floating spindle. To achieve the above object, the present invention provides the following technical solutions:

[0008] A composite material ultra-micro pore type polishing air-floating spindle, comprising

[0009] A water-cooled motor, one end of a water chamber formed by a motor cooling sleeve and a stator outer shaft sleeve is communicated with a water inlet pipe, and the other end is communicated with a water outlet pipe;

[0010] An air floating bearing, including a thrust bearing seat and a thrust bearing pad, an air path is formed between the thrust bearing seat and the thrust bearing pad and a support shaft of the water-cooled motor, one end of the air path is communicated with an air inlet pipe, and the other end of the air path is communicated with an air outlet pipe;

[0011] A water-gas switch, when a liquid flows into the water inlet pipe, it allows to trigger a first micro switch, and the first micro switch controls the opening of a pneumatic diaphragm valve of the air inlet pipe; and when no liquid flows into the water inlet pipe, the water-gas switch does not allow to trigger the first micro switch and triggers a second micro switch, and the second micro switch controls the closing of the pneumatic diaphragm valve of the air inlet pipe and the motor rotor of the water-cooled motor.

[0012] According to an embodiment of the present invention, the water-gas switch includes a first guide rail, a first swing rod, a second swing rod, a first slider, a first contact, a first micro switch, a second micro switch, a second slider, and a check valve; the first guide rail is fixed to the water inlet pipe, the first guide rail is hinged with the first swing rod, the first swing rod is hinged to the second swing rod, a waist-shaped hole is provided in the second swing rod, a retaining pin moving along the waist-shaped hole is arranged in the waist-shaped hole, the retaining pin is fixed to the first slider, the first slider moves along the first swing rod, the first slider is fixed to the first contact, and the first contact can be lapped with the first micro switch or the second micro switch;

[0013] Both the first swing rod and the first slider can be limit lapped with the second slider. When the second slider is limit lapped with the first swing rod, the first swing rod cannot swing; when the second slider is limit lapped with the first slider, the first contact of the first slider is only limit lapped with the second micro switch;

[0014] Wherein, a sealing ball of the check valve of the water inlet pipe is made of a magnet, the second slider is made of iron, and the sealing ball can attract the second slider to a position where it is not limit lapped with the first swing rod and the first slider when there is water flow; the sealing ball can attract the second slider to a position where it is limit lapped with the first swing rod and the first slider when there is no water flow;

[0015] Wherein, the first micro switch is communicatively connected with the pneumatic diaphragm valve of the air inlet pipe. When the first contact is lapped with the first micro switch, the pneumatic diaphragm valve opens; the second micro switch is communicatively connected with the pneumatic diaphragm valve of the air inlet pipe and a control module of the water-cooled motor. When the first contact is lapped with the second micro switch, the pneumatic diaphragm valve closes, and the motor rotor of the water-cooled motor closes.

[0016] According to an embodiment of the present invention, the water-gas switch further includes a third microswitch, a fourth microswitch, a fixed rod, a limit seat, a limit hole, and a limit block; one end of the first guide rail is fixed to one end of the fixed rod, a third microswitch is fixed to one end of the fixed rod, a fourth microswitch is fixed to the other end of the fixed rod, and both the third microswitch and the fourth microswitch can be lapped with the first swing rod; the first guide rail is fixed to the limit seat, the limit seat is provided with a limit hole, and a first slider moving along it is arranged in the limit hole;

[0017] The first swing rod is fixed with a limit block, and the limit block can be limit-lapped with the side of the second swing rod close to the second slider;

[0018] The third microswitch is communicatively connected to the control module of the water-cooled motor. When the first swing rod is lapped with the third microswitch, the control module of the water-cooled motor controls the motor rotor to rotate;

[0019] The fourth microswitch is communicatively connected to the control module of the water-cooled motor. When the first swing rod is lapped with the fourth microswitch, the control module of the water-cooled motor controls the motor rotor not to rotate.

[0020] According to an embodiment of the present invention, the fourth microswitch is provided with a magnet, and the second swing rod can be attracted by the fourth microswitch with a magnet.

[0021] According to an embodiment of the present invention, the one-way valve includes a frustum cylinder, a sealing ball, a spring, and a support block; the outer edge of the frustum cylinder is hermetically fixed to the inner circumferential surface of the water inlet pipe, the sealing ball can be hermetically attached to the inner surface of the frustum cylinder, one end of the sealing ball is fixed to one end of the spring, the other end of the spring is fixedly connected to the support block, and the support block is fixed to the inner circumferential surface of the water inlet pipe.

[0022] According to an embodiment of the present invention, the sealing ball is eccentrically provided with a ball hole, a guide rod moving along it is arranged in the ball hole, and the guide rod is fixed to the support block.

[0023] According to an embodiment of the present invention, the composite material massive microporous type grinding and polishing air-floating spindle selects graphene and bronze composite materials, and can be a grinding and polishing air-floating spindle with better stability performance.

[0024] According to an embodiment of the present invention, the water inlet pipe is made of plastic or a PVC pipe.

[0025] According to an embodiment of the present invention, the first swing rod is provided with a second guide rail, the second guide rail is a dovetail guide rail, and a first slider with a dovetail cross-section moving along it is arranged on the second guide rail.

[0026] According to an embodiment of the present invention, a dovetail groove is provided below the first guide rail, and the second slider is dovetail-shaped with a cross-section matching that of the dovetail groove.

[0027] According to an embodiment of the present invention, the thrust bearing seat and the support shaft of the motor rotor are made of graphene bronze composite material.

[0028] Advantages of the present invention:

[0029] The present invention provides a composite material ultra-high microporous abrasive polishing air-floating spindle, which can adjust the working sequence of the water inlet pipe and the air inlet pipe through a water-gas switch, so as to avoid the rotation of the motor rotor of the water-cooled motor when the water inlet pipe does not supply water, or the continuous intake of gas by the air inlet pipe, resulting in waste of gas. Moreover, when the water inlet pipe supplies water, it is only allowed to open the air inlet pipe to intake air and rotate the motor rotor of the water-cooled motor, so as to ensure that an air film is necessarily formed when the thrust bearing pad made of graphene bronze composite material is working, thereby ensuring its working life and the quality of wafer thinning. Description of the Drawings

[0030] Figure 1 is the front view sectional view of the composite material ultra-high microporous abrasive polishing air-floating spindle of the present invention;

[0031] Figure 2 is Figure 1 the partial enlarged view of the first posture of

[0032] Figure 3 is Figure 1 the partial enlarged view of the second posture of

[0033] Figure 4 is Figure 1 the partial enlarged view of the third posture of

[0034] Figure 5 is Figure 2 the deformation schematic diagram of

[0035] Figure 6 is Figure 3 the deformation schematic diagram of

[0036] Figure 7 is Figure 4 the deformation schematic diagram of Detailed Embodiments

[0037] The following will further elaborate on the present invention in conjunction with the drawings. It should be understood that the following embodiments are only for illustrative and explanatory purposes of the present invention, and should not be construed as limiting the protection scope of the present invention. All technologies implemented based on the above content of the present invention are covered within the scope of protection intended by the present invention.

[0038] As Figures 1 - 7As shown in the figure, the composite material large - volume microporous abrasive polishing air - floating spindle includes a water - cooled motor, an air - floating bearing, and a water - air switch 500. One end of the water storage chamber 121 formed by the motor cooling sleeve 120 and the stator outer shaft sleeve 130 of the water - cooled motor is connected to the water inlet pipe 310, and the other end is connected to the water outlet pipe 320. An air path 141 is formed between the thrust bearing seat 140 and the thrust bearing pad 150 of the air - floating bearing and the support shaft 230 of the water - cooled motor. One end of the air path 141 is connected to the air inlet pipe 410, and the other end of the air path 141 is connected to the air outlet pipe 420.

[0039] The water - air switch 500 allows the first micro - switch 513 to be triggered when liquid flows into the water inlet pipe 310. The first micro - switch 513 controls the pneumatic diaphragm valve 311 of the air inlet pipe 410 to open. And when no liquid flows into the water inlet pipe 310, the water - air switch 500 does not allow the first micro - switch 513 to be triggered, but triggers the second micro - switch 514. The second micro - switch 514 controls the closing of the pneumatic diaphragm valve 311 of the air inlet pipe 410 and the motor rotor 210 of the water - cooled motor.

[0040] Specifically refer to Figure 1 and Figure 2 In the present invention, through the above - mentioned water - air switch 500, the working sequence of the water inlet pipe 310 and the air inlet pipe 410 can be adjusted, so as to avoid the motor rotor 210 of the water - cooled motor rotating when the water inlet pipe 310 is not filled with water, or the air inlet pipe 410 continuously admitting air and wasting gas. And when water flows into the water inlet pipe 310, it is only allowed to open the air inlet pipe 410 to admit air and the motor rotor 210 of the water - cooled motor to rotate, so as to ensure that when the thrust bearing pad 150 made of graphene - bronze composite material is working, an air film is necessarily formed to ensure its working life and the quality of wafer thinning.

[0041] Specifically, the present invention further includes a non - rotating cover plate 110, a motor cooling sleeve 120, a stator outer shaft sleeve 130, a thrust bearing seat 140, a thrust bearing pad 150, a water inlet pipe 310, a water outlet pipe 320, an air inlet pipe 410, an air outlet pipe 420, a water - air switch 500, a pneumatic diaphragm valve 311, and a motor stator 111. The above - mentioned structures form the stator of the spindle.

[0042] Specifically, the present invention further includes a rotatable motor rotor 210, an upper thrust disk 220, a support shaft 230, a lower thrust disk 240, a grinding wheel connection disk 250, a front end cover 260, and a front end plug 270. The above - mentioned structures form the rotor of the spindle.

[0043] As a simple connection method, the stators are fixed to each other, and the rotors are fixed to each other.

[0044] The connection relationship and positional relationship between the above - mentioned stator and rotor are as follows:

[0045] AsFigure 1 and Figure 2 As shown in Figure 2 , the cover plate 110 is fixed to the frame. The outer edge of the cover plate 110 is coaxially and hermetically fixed to the motor cooling sleeve 120. The stator outer shaft sleeve 130 with a gap is coaxially sleeved on the motor cooling sleeve 120. The upper edges of the cover plate 110 and the stator outer shaft sleeve 130 are hermetically fixed. The lower part of the stator outer shaft sleeve 130 is hermetically fixed to the lower end of the motor cooling sleeve 120. The motor cooling sleeve 120 is provided with a water inlet hole communicating with the water inlet pipe 310, and the motor cooling sleeve 120 is also provided with a water outlet hole communicating with the water outlet pipe 320. A water storage chamber 121 is formed between the water inlet hole and the water outlet hole.

[0046] Specifically, the cover plate 110 or the stator outer shaft sleeve 130 is fixed to the motor stator 111. The stator outer shaft sleeve 130 is coaxially fixed to the thrust bearing seat 140. A thrust bearing pad 150 is provided between the stator outer shaft sleeve 130 and the thrust bearing seat 140, and the thrust bearing seat 140 is provided with a plurality of air passages 141, and the air passages 141 can communicate with the fiber holes of the thrust bearing pad 150.

[0047] Among them, the cover plate 110 is connected to the motor rotor 210 by bearings. The motor rotor 210 and the upper thrust plate 220 are coaxially fixed by bolts. The upper thrust plate 220 and the support shaft 230 are coaxially fixed by bolts. The support shaft 230 and the thrust bearing seat 140 achieve the effects of reducing friction and blowing away particulate matter through the air film of the air passage 141. The support shaft 230 and the lower thrust plate 240 are coaxially fixed by bolts. The lower thrust plate 240 is coaxially fixed to the grinding wheel connecting disc 250. The grinding wheel connecting disc 250 and the front end cover 260 are coaxially fixed by bolts. The front end cover 260 is fixed to the front end plug 270. Among them, the thrust bearing seat 140 can also be fixed to the frame. The water-cooled motor of the present invention reduces friction through the above-mentioned aerostatic bearing.

[0048] As Figures 2 - 4 shown in Figures 2 - 4 , in some embodiments, the water-gas switch 500 includes a first guide rail 510, a first swing rod 520, a second swing rod 521, a first slider 511, a first contact 512, a first microswitch 513, a second microswitch 514, a second slider 530 and a one-way valve 600; the first guide rail 510 is fixed to the water inlet pipe 310, the first guide rail 510 is hinged with a first swing rod 520, the first swing rod 520 is hinged to the second swing rod 521, a waist-shaped hole 522 is provided on the second swing rod 521, a pin 523 moving along it is provided in the waist-shaped hole 522, the pin 523 is fixed to the first slider 511, the first slider 511 moves along the first swing rod 520, the first slider 511 is fixed to the first contact 512, and the first contact 512 can be lapped with the first microswitch 513 or the second microswitch 514.

[0049] Specifically, both the first swing rod 520 and the first slider 511 can be limitedly lapped with the second slider 530. When the second slider 530 is limitedly lapped with the first swing rod 520, the first swing rod 520 cannot swing; when the second slider 530 is limitedly lapped with the first slider 511, the first contact 512 of the first slider 511 is only limitedly lapped with the second microswitch 514. Among them, it should be explained that Figure 2 、 3 The stroke of can be longer, that is,[ Figure 2 、 3 The sealing ball 620 of can always attract the rightmost side of the second slider 530, and its relative position remains unchanged all the time.

[0050] Among them, the sealing ball 620 of the one-way valve 600 of the water inlet pipe 310 is made of a magnet, and the designated position of the second slider 530 is made of iron or entirely made of iron. The sealing ball 620 can attract the second slider 530 to a position where it is not limitedly lapped with the first swing rod 520 and the first slider 511 when there is water flow; the sealing ball 620 can attract the second slider 530 to a position where it is limitedly lapped with the first swing rod 520 and the first slider 511 when there is no water flow.

[0051] Specifically, the first microswitch 513 is communicatively connected to the pneumatic diaphragm valve 311 of the air inlet pipe 410. When the first contact 512 is lapped with the first microswitch 513, the pneumatic diaphragm valve 311 opens; the second microswitch 514 is communicatively connected to the pneumatic diaphragm valve 311 of the air inlet pipe 410 and the control module of the water-cooled motor. When the first contact 512 is lapped with the second microswitch 514, the pneumatic diaphragm valve closes, and the motor rotor 210 of the water-cooled motor closes.

[0052] In the present invention, the one-way valve 600 made of the above-mentioned magnet is used as a trigger for whether there is water flow in the water inlet pipe 310, and its moving position is transmitted to the second slider 530 outside the water inlet pipe 310 in the form of magnetic attraction, so as to ensure that the sealing performance of the water inlet pipe 310 is not damaged, and keep the particulate matter in the water inlet pipe low and the cleanliness high. And, when the second slider 530 driven by the one-way valve 600 moves horizontally in a relatively stable position such as Figure 3 It can maintain a good latching posture both when being limitedly latched and not latched, so as to realize that only when the water inlet pipe 310 is flowing with water, the pneumatic diaphragm valve of the air inlet pipe 410 can be opened, avoiding opening the motor rotor 210 in a state of not flowing with water or not ventilated, so as to avoid irreversible damage to the radial bearing 231 and thrust bearing pad 150 made of graphene bronze composite material, and also avoid wasting relatively clean gas by opening the air inlet pipe 410 prematurely.

[0053] Preferably, the water inlet pipe 310 is made of plastic or a PVC pipe.

[0054] Specifically, a second guide rail is provided on the first swing rod 520. The second guide rail is a dovetail guide rail, and a first slider 511 with a dovetail cross-section that moves along it is provided on the second guide rail.

[0055] See Figure 3 As shown, the lower surface of the first guide rail 510 is used for lateral guidance, and the first guide rail can serve as the base for other parts.

[0056] According to the present invention, a handle is fixed to the second swing rod 521, and the user only needs to operate the swing of the second swing rod 521 to operate the air inlet pipe 410, the water inlet pipe 310, and the motor rotor 210.

[0057] In an embodiment of the present invention, see Figures 2 - 4 As shown, the water-air switch 500 further includes a third micro switch 541, a fourth micro switch 542, a fixing rod 543, a limit seat 544, a limit hole 545, and a limit block 546; one end of the first guide rail 510 is fixed to the fixing rod 543. A third micro switch 541 is fixed to one end of the fixing rod 543, and a fourth micro switch 542 is fixed to the other end of the fixing rod 543. Both the third micro switch 541 and the fourth micro switch 542 can be lapped with the first swing rod 520. The first guide rail 510 is fixed to the limit seat 544, and a limit hole 545 is opened on the limit seat 544. The first slider 511 that moves along it is provided in the limit hole 545.

[0058] Specifically, a limit block 546 is fixed to the first swing rod 520, and the limit block 546 can be lapped with the side of the second swing rod 521 close to the second slider 530 for limiting.

[0059] Among them, the third micro switch 541 is communicatively connected to the control module of the water-cooled motor. When the first swing rod 520 is lapped with the third micro switch 541, the control module of the water-cooled motor controls the motor rotor 210 to rotate.

[0060] Among them, the fourth micro switch 542 is communicatively connected to the control module of the water-cooled motor. When the first swing rod 520 is lapped with the fourth micro switch 542, the control module of the water-cooled motor controls the motor rotor 210 not to rotate.

[0061] The present invention controls the rotation of the motor rotor 210 through the third microswitch 541 and the fourth microswitch 542. In a relatively mechanical form, its rotation can be restricted on the premise of whether the intake pipe 410 and the water inlet pipe 310 are opened, so as to prevent the motor rotor 210 from working first when the intake pipe 410 and the water inlet pipe 310 are not working, and cause irreversible damage to the radial bearing 231 and the thrust bearing pad 150 made of graphene bronze composite material when the air film is not formed. Moreover, when the first slider 511 is inserted into the limit seat 544 and the limit hole 545, the first swing rod 520 cannot be rotated to the third microswitch 541 by the further rotation of the second swing rod 521, which can better prove that when the water inlet pipe 310 and the intake pipe 410 are not ventilated, the rotation of the motor rotor 210 cannot be started due to the limit overlap of the first swing rod 520 and the second swing rod 521 by the second slider 530.

[0062] It should be noted that when the first slider 511 is inserted into the limit hole 545 of the limit seat 544, the first swing rod 520 can only overlap with the fourth microswitch 542, so as to prevent the motor rotor 210 from rotating. In addition, in an implementable manner, the fourth microswitch 542 can be communicatively connected to the brake 160. When the first swing rod 520 overlaps with the fourth microswitch 542, the brake 160 brakes the motor rotor 210, or rather, the brake 160 brakes the lower thrust plate 240.

[0063] When the first swing rod 520 is in limit overlap with the third microswitch 541, the maximum rotation angle of the first swing rod 520 is also limited by the fixed rod 543 and the third microswitch 541, so as to limit the maximum rotation angle of the second swing rod 521 through the limit block 546, enabling better operability when the user swings the second swing rod 521 through the handle.

[0064] When the first slider 511 is located in the limit hole 545, the small swing and vibration of the second swing rod 521 will not affect the normal operation of the whole system. Moreover, in order to ensure a certain time interval between the working sequences of first allowing the water inlet pipe 310 to intake water, the intake pipe 410 to intake air, and the motor rotor 210 of the water-cooled motor to rotate, so as to give time for the gas and water to fill the chamber, the time of the whole swing process of the second swing rod 521 can be used as the time for the gas and water to fill the chamber.

[0065] When the water inlet pipe 310 intakes water, it is only allowed to open the intake pipe 410 to intake air and the motor rotor 210 of the water-cooled motor to rotate, so as to ensure that when the thrust bearing pad 150 made of graphene bronze composite material is working, an air film will necessarily be formed to ensure its working life and the quality of wafer thinning.

[0066] In some embodiments, refer toFigures 2 - 4 The fourth microswitch 542 is provided with a magnet, and the second swing rod 521 can be attracted by the fourth microswitch 542 with a magnet. Through the fourth microswitch with a magnetic attraction function, the present invention can limit the initial positions of the first swing rod 520 and the second swing rod 521 when the user does not operate the second swing rod 521.

[0067] See Figures 2 - 4 As shown, the one-way valve 600 includes a frustum cylinder 610, a sealing ball 620, a spring 630, and a support block 640; the outer edge of the frustum cylinder 610 is hermetically fixed to the inner circumferential surface of the water inlet pipe 310, the sealing ball 620 can be hermetically attached to the inner surface of the frustum cylinder 610, one end of the sealing ball 620 is fixed to the spring 630, the other end of the spring 630 is fixedly connected to the support block 640, and the support block 640 is fixed to the inner circumferential surface of the water inlet pipe 310.

[0068] In the present invention, the sealing ball 620 made of a magnet is used as the moving point of the one-way valve 600. When there is water flow, the second slider 530 is attracted by the movement of the sealing ball 620 not to be limited and overlapped with the first swing rod 520 and the second swing rod 521. Thus, only when the water inlet pipe 310 is opened, the air inlet pipe 410 and the motor rotor 210 can be gradually opened.

[0069] It should be noted that the above Figures 2 - 4 is only for conveniently showing the relative relationship between the one-way valve 600 and the second slider 530, and the one-way valve 600 is arranged above and below the second slider 530. In this case, the one-way valve 600 is also staggered from the first swing rod 520 and the second swing rod 521 in the front and back directions to avoid mutual interference of the movement of parts. The arrangement manner of the one-way valve 600 and the water inlet pipe 310 of the present invention can also be Figures 5 - 7 the same, directly arranged in the front and back directions, which can compress the overall structure of the parts of the present invention and will not cause mutual interference of the movement of parts.

[0070] See Figures 2 - 4 As shown, the sealing ball 620 is eccentrically provided with a ball hole 650, and a guide rod 660 moving along it is arranged in the ball hole 650, and the guide rod 660 is fixed to the support block 640.

[0071] Through the above guide rod 660 and ball hole 650, the present invention can ensure that the sealing ball 620 never rotates and will not generate a repulsive force between the second slider 530 and the sealing ball 620 after magnetization.

[0072] See Figures 2 - 4 As shown, the water inlet pipe 310 is made of plastic or a PVC pipe. Using the above materials for the water inlet pipe 310 can avoid the magnetic property of the one-way valve 600 from being shielded.

[0073] In some embodiments, referring to Figures 2 - 4 , a second guide rail is provided on the first swing rod 520. The second guide rail is a dovetail guide rail, and a first slider 511 with a dovetail cross-section that moves along it is provided on the second guide rail. By the above method, the present invention can avoid the connection failure between the first slider 511 and the first swing rod 520.

[0074] In some embodiments, referring to Figure 2 、 3 、4, a dovetail groove is opened below the first guide rail 510, and the second slider 530 is in a dovetail shape with a cross-section matching the dovetail groove. By the above method, the present invention can avoid the connection failure between the second slider 530 and the first guide rail 510 and increase the limiting force of its limiting connection.

[0075] In some embodiments, referring to Figure 2 、 3 、4, the thrust bearing seat 140 and the support shaft 230 of the motor rotor 210 are made of graphene bronze composite material.

[0076] Wherein, a radial bearing 231 is further provided between the thrust bearing seat 140 and the support shaft 230, and the radial bearing 231 is fixed to the thrust bearing seat 140. The thrust bearing seat 140 can be a single-layer ring-shaped or cylindrical structure. The radial bearing 231 and the thrust bearing pad 150 are made of graphene bronze composite material. Of course, they can also be made of rubber, plastic, resin or graphite.

[0077] Specifically, the radial bearing 231 and the thrust bearing pad 150 adopt graphene / bronze composite material, which is prepared by a two-step chemical vapor deposition method of high-purity 5-8μm bronze powder and C 2 H 2 (acetylene gas) at low temperature of 200°C and high-temperature cracking. The obtained metal-based massive microporous material can be made thinner, stronger and have better air permeability compared with graphite.

[0078] The advantages of the composite material massive microporous abrasive floating spindle are as follows: adopting a massive microporous metal-based thrust bearing pad, the air permeability area of the air floating bearing is wider, avoiding the situation of spindle seizure caused by small hole blockage; compared with the small-hole throttling graphite, the massive microporous material cancels the surface grooving processing technology, avoiding self-excited vibration caused by air vortex in the groove and poor exhaust; the massive microporous metal-based material has higher strength than graphite, preventing the surface particles of the bearing pad from falling off and scratching or even seizing the upper and lower thrust surfaces.

[0079] The grinding and polishing air-floating spindle adopts a large amount of microporous graphene / bronze composite material. The sintering process of the large amount of microporous graphene / bronze composite material is as follows: First, uniformly load bronze powder (high purity, particle size of 5-8 μm) into a cylindrical mold, and then perform cold isostatic pressing at 150 MPa for 10 minutes to obtain a three-dimensional large amount of microporous bronze blank with a certain air permeability. Then, pass a certain flow rate of C2H2 (acetylene gas) as a carbon source in a high-temperature tube furnace, and obtain three-dimensional continuous graphene on the surface of the skeleton of the large amount of microporous bronze through a two-step chemical vapor deposition method (chemical vapor deposition at a low temperature of 200 °C for a certain time to obtain hydrogenated graphite, and then high-temperature pyrolysis to convert hydrogenated graphite into graphene). At the same time as the high-temperature pyrolysis of hydrogenated graphite, the bronze powder body undergoes a sintering phenomenon to form a continuous skeleton, thereby obtaining a graphene / bronze-based large amount of microporous composite material with a certain strength.

[0080] The embodiments described above are only used to describe the preferred embodiments of the present invention, and do not limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations and improvements made by those of ordinary skill in the art to the technical solutions of the present invention shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A composite material massive microporous polishing air flotation spindle, characterized in that: include A water-cooled motor, wherein a water tank (121) formed by a motor cooling jacket (120) and a stator outer shaft sleeve (130) has one end in communication with a water inlet pipe (310) and the other end in communication with a water outlet pipe (320); An air bearing, comprising a thrust bearing seat (140) and a thrust bearing pad (150), wherein an air path (141) is formed between the thrust bearing seat (140) and the thrust bearing pad (150) and a support shaft (230) of a water-cooled motor, one end of the air path is in communication with an air inlet pipe (410), and the other end of the air path (141) is in communication with an air outlet pipe (420); A water-gas switch (500) is allowed to actuate a first micro switch (513) when liquid flows into the water inlet pipe (310), and the first micro switch (513) controls the opening of a pneumatic diaphragm valve (311) of the air inlet pipe (410); and when liquid does not flow into the water inlet pipe (310), the water-gas switch (500) is not allowed to actuate the first micro switch (513) and actuates a second micro switch (514), and the second micro switch (514) controls the closing of the pneumatic diaphragm valve (311) of the air inlet pipe (410) and the motor rotor (210) of the water-cooled motor; The water and gas switch (500) comprises a first guide rail (510), a first swing arm (520), a second swing arm (521), a first slider (511), a first contact (512), a first micro switch (513), a second micro switch (514), a second slider (530), and a one-way valve (600); the first guide rail (510) is fixed to the water inlet pipe (310); the first guide rail (510) is hingedly connected to the first swing arm (520); the first swing arm (520) and the second slider (530) are hingedly connected to the first contact (512); The two swing rods (521) are hingedly connected, the second swing rod (521) is provided with a waist-shaped hole (522), a latch (523) moving along the waist-shaped hole (522) is provided inside the waist-shaped hole (522), the latch (523) is fixed to the first slider (511), the first slider (511) moves along the first swing rod (520), the first slider (511) is fixed to the first contact (512), and the first contact can overlap with the first micro switch (513) or the second micro switch (514); The first swing rod (520) and the first slider (511) are both capable of overlapping with the second slider (530) in a limited position; when the second slider (530) overlaps with the first swing rod (520), the first swing rod (520) cannot swing; when the second slider (530) overlaps with the first slider (511), the first contact (512) of the first slider (511) only overlaps with the second micro switch (514); The sealing ball (620) of the one-way valve (600) of the water inlet pipe (310) is made of a magnet, and the second slider (530) is made of iron; the sealing ball (620) can attract the second slider (530) to a position where it is not overlapped with the first swing rod (520) and the first slider (511) when there is water flow; and the sealing ball (620) can attract the second slider (530) to a position where it is overlapped with the first swing rod (520) and the first slider (511) when there is no water flow; The first micro switch (513) is communicatively connected with the pneumatic diaphragm valve (311) of the air intake pipe (410); when the first contact (512) is connected to the first micro switch (513), the pneumatic diaphragm valve (311) is opened; the second micro switch (514) is communicatively connected with the pneumatic diaphragm valve (311) of the air intake pipe (410) and the control module of the water-cooled motor; when the first contact (512) is connected to the second micro switch (514), the pneumatic diaphragm valve is closed, and the motor rotor (210) of the water-cooled motor is closed.

2. The composite material massive microporous polishing air-floating spindle according to claim 1 is characterized in that: The water and gas switch (500) further comprises a third micro switch (541), a fourth micro switch (542), a fixing rod (543), a limiting seat (544), a limiting hole (545), and a limiting block (546); the first guide rail (510) is fixed to one end of the fixing rod (543); the third micro switch (541) is fixed to one end of the fixing rod (543); the fourth micro switch (542) is fixed to the other end of the fixing rod (543); and both the third micro switch (541) and the fourth micro switch (542) can overlap with the first swing rod (520); The first guide rail (510) is fixed to the limiting seat (544); the limiting seat (544) is provided with a limiting hole (545); and a first sliding block (511) is provided in the limiting hole (545) for movement along the limiting hole; The first swing rod (520) is fixed with a limiting block (546), and the limiting block (546) can overlap with a side of the second swing rod (521) close to the second sliding block (530). The third micro switch (541) is in communication connection with a control module of the water-cooled motor, and when the first swing rod (520) is connected to the third micro switch (541), the control module of the water-cooled motor controls the motor rotor (210) to rotate; The fourth micro switch (542) is communicatively connected to a control module of the water-cooled motor, and when the first swing arm (520) is connected to the fourth micro switch (542), the control module of the water-cooled motor controls the motor rotor (210) to not rotate.

3. The composite material massive microporous polishing air flotation spindle according to claim 2, characterized in that: The fourth micro switch (542) is provided with a magnet, and the second rocker (521) can be attracted by the fourth micro switch (542) with the magnet.

4. The composite material massive microporous polishing air-floating spindle according to claim 3, characterized in that: The one-way valve (600) comprises a conical cylinder (610), a sealing ball (620), a spring (630), and a support block (640); the outer edge of the conical cylinder (610) is sealed and fixed to the inner circumferential surface of the water inlet pipe (310); the sealing ball (620) can be sealed and fitted to the inner surface of the conical cylinder (610); the sealing ball (620) is fixed to one end of the spring (630); the other end of the spring (630) is fixedly connected to the support block (640); and the support block (640) is fixed to the inner circumferential surface of the water inlet pipe (310).

5. The composite material massive microporous polishing air-floating spindle according to claim 4, characterized in that: The sealing ball (620) is eccentrically provided with a ball hole (650), and a guide rod (660) is provided in the ball hole (650) to move along the ball hole, and the guide rod (660) is fixed to the support block (640).

6. The composite material massive microporous polishing air-floating spindle according to claim 1, characterized in that: The first swing rod (520) is provided with a second guide rail, the second guide rail is a dovetail-shaped guide rail, and the second guide rail is provided with a first sliding block (511) with a dovetail-shaped cross section that moves along the second guide rail.

7. The composite material massive microporous polishing air-floating spindle according to claim 1, characterized in that: A dovetail-shaped groove is provided below the first guide rail (510), and the second sliding block (530) is dovetail-shaped with a cross section matching the dovetail-shaped groove.

8. The composite material massive microporous polishing air-floating spindle according to claim 1, characterized in that: The water inlet pipe (310) is made of a plastic pipe.

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