A surface oxidation device and method capable of improving sputtering efficiency

Abstract

The present invention relates to the technical field of magnetron sputtering coating, and particularly relates to a surface oxidation device and method capable of improving sputtering efficiency, including a control box, and further including a rotary coating assembly, which includes a placement rack rotatably installed at the center of the coating box, and a plurality of substrates are placed at equal angles on the placement rack; a sputtering mechanism, which includes sputtering boxes fixedly installed on both sides of the coating box, a cylindrical target is rotatably installed in the sputtering box, and two gas charging pipes are rotatably installed in the sputtering box. The sputtering mechanism further includes an angle adjustment assembly, which is used to detect the radius of the cylindrical target and adjust the gas outlet angle of the gas charging pipe according to the detected radius. By means of the angle adjustment assembly, the real-time radius of the cylindrical target is monitored, and the angle of the gas charging pipe is adjusted according to this radius, so that the angle at which argon ions impact the target is maintained at a certain angle, improving the sputtering efficiency of the target. In addition, a gas collection box is used for gas collection, and the gas flow is used to accelerate the target particles, further improving the sputtering efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetron sputtering coating, and particularly relates to a surface oxidation device and method that can improve sputtering efficiency. Background Art

[0002] Magnetron sputtering coating is a physical vapor deposition (PVD) technology, and its working principle is based on the process of ions bombarding the target and depositing on the substrate to form a thin film. In magnetron sputtering coating, by introducing a magnetic field, electrons move along a spiral orbit in the magnetic field, increasing the collision probability with gas molecules, thereby increasing the plasma density and sputtering efficiency.

[0003] The influencing factors include the atomic number of the target, the type of incident ions, the incident ion angle, and the target temperature, etc. For example, the sputtering yield increases periodically with the increase of the atomic number of the target, increases with the increase of the incident ion angle, reaches the maximum at 70 degrees to 80 degrees, and the sputtering yield decreases sharply when the angle continues to increase. The existing target will be gradually consumed during the coating process, but the incident angle of argon gas remains unchanged, resulting in the incident ion angle not being able to ensure continuous optimal state. Summary of the Invention

[0004] In view of the above-mentioned drawbacks of the prior art, the present invention provides a surface oxidation device and method that can improve sputtering efficiency, which can effectively solve the problem that the incident particle angle changes after the target is consumed in the prior art.

[0005] To achieve the above object, the present invention is realized through the following technical solutions:

[0006] The present invention provides a surface oxidation device that can improve sputtering efficiency, including a control box and a coating box installed on the control box, and further includes:

[0007] A rotating coating assembly, including a placement rack rotatably installed at the center of the coating box, and a plurality of substrates are placed on the placement rack at equal angles;

[0008] A sputtering mechanism, including sputtering boxes fixedly installed on both sides of the coating box, a cylindrical target is rotatably installed in the sputtering box, two gas charging pipes are rotatably installed in the sputtering box, and the gas charging pipes are symmetrically arranged on both sides of the cylindrical target. The sputtering mechanism further includes an angle adjustment component, which is used to detect the radius of the cylindrical target and adjust the gas outlet angle of the gas charging pipe according to the measured radius, and the gas outlet angle range is from 70 degrees to 80 degrees;

[0009] A fixed rod is fixedly installed in the sputtering box, and a limiting frame is slidably installed at both ends of the fixed rod. The cylindrical target is clamped between the two limiting frames;

[0010] The bottom of the charging tube is fixedly connected with a gear, and a rack adapted to the gear is slidably installed in the sputtering box. The angle of the charging tube is changed by sliding the rack;

[0011] A second piston tube is fixedly installed in the sputtering box, and a second piston rod is movably inserted in the second piston tube. The rack and the second piston rod are fixedly connected. A first piston tube is fixedly installed on the fixed rod, and a first piston rod is movably inserted in the first piston tube. A rotating frame is arranged on the first piston rod, and a detection roller is rotatably installed on the rotating frame and is in full contact with the cylindrical target. A first connecting pipe is connected between the first piston tube and the second piston tube. A return spring is sleeved on the first piston rod;

[0012] Wherein, a transmission assembly for synchronous driving is arranged between the placement rack and the cylindrical target.

[0013] Further, receiving grooves are respectively formed on the outer walls of the two limiting frames close to each other. Elastic rods are installed in the two receiving grooves, and clamping plates are installed at the ends of the elastic rods.

[0014] Further, two shunt pipes are inserted and connected to the top wall of the sputtering box. The two shunt pipes are respectively connected to the two charging tubes. The two shunt pipes on the same sputtering box are jointly connected to a main pipe, and the main pipe is externally connected to an argon gas supply assembly.

[0015] Further, the transmission assembly includes a driving motor fixedly installed in the control box. A main shaft is fixedly installed on the output shaft of the driving motor. The top of the main shaft penetrates through the coating box and is fixedly connected to the bottom wall of the placement rack. A transmission shaft is fixedly connected to the bottom of the limiting frame at the bottom end of the sputtering box, and the transmission shaft respectively penetrates through the outer walls of the sputtering box and the control box. Second transmission discs are respectively arranged on the two transmission shafts. Two first transmission discs are installed on the main shaft. The two first transmission discs and the two second transmission discs are horizontally corresponding and level. A transmission belt is sleeved between the horizontally level first transmission disc and the second transmission disc.

[0016] Further, an inflation box is arranged on the outer wall of the sputtering box. A gas collection box is fixedly installed on the control box. The gas collection box is communicated with the inflation box, and a pressure relief valve is arranged at the communication part. A cam is arranged on the transmission shaft. A third piston tube is fixedly installed in the control box. A third piston rod is movably inserted at one end of the third piston tube close to the cam, and a transmission plate is fixedly installed at the end of the third piston rod. The transmission plate is slidably connected with the cam. An air outlet pipe is connected between the third piston tube and the gas collection box. An air suction pipe is connected between the third piston tube and the coating box, and one-way valves are arranged on both the air suction pipe and the air outlet pipe.

[0017] Further, an oxidation device is provided on one side of the coating chamber, an upper cover is movably installed on the top of the coating chamber, and a vacuum device is connected to one side of the coating chamber.

[0018] A method for a surface oxidation device that can improve sputtering efficiency includes the following steps:

[0019] S1: Preheat the substrate. After preheating, place the substrate on the placement rack. At the same time, install a cylindrical target in the sputtering chamber, and start the vacuum device to evacuate the inside of the coating chamber.

[0020] S2: Start the drive motor. Through the transmission component, the placement rack and the cylindrical target rotate simultaneously. At this time, add argon gas into the sputtering chamber through the argon gas supply component, and start the oxidation device.

[0021] S3: The drive motor drives the cam to rotate, drives the third piston rod to slide back and forth in the third piston tube through the transmission plate, and uses the change in air pressure to extract the argon gas in the coating chamber and send it to the gas collection box until the pressure relief valve is broken through. The argon gas in the gas collection box is filled into the sputtering chamber from the inflation box, and the airflow is used to accelerate the sputtering speed of the substrate particles.

[0022] S4: The cylindrical target is gradually consumed. The detection roller is always pressed against the outer wall of the cylindrical target under the action of the return spring. When the size of the cylindrical target gradually becomes smaller, the first piston rod gradually extends out of the first piston tube, thereby driving the gear to rotate by pneumatic transmission, and then driving the gas filling pipe to rotate, so as to adjust the angle of the argon gas impacting the cylindrical target.

[0023] The technical solution provided by the present invention has the following beneficial effects compared with the known prior art:

[0024] The angle adjustment component is used to monitor the real-time radius of the cylindrical target, and the angle of the gas filling pipe is adjusted according to this radius, so that the angle of the argon ions impacting on the cylindrical target is maintained at a certain angle, improving the sputtering efficiency of the cylindrical target. In addition, the gas collection box is used for gas collection, and the airflow is used to accelerate the target particles, further improving the sputtering efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 It is the overall schematic diagram of the present invention;

[0027] Figure 2 isFigure 1 Cross-sectional view;

[0028] Figure 3 Schematic structural diagram of the coating chamber part;

[0029] Figure 4 Schematic structural diagram of the transmission component part;

[0030] Figure 5 Schematic structural diagram of the sputtering mechanism part;

[0031] Figure 6 is Figure 5 Enlarged view of the structure of part B in

[0032] Figure 7 Schematic structural diagram of the angle adjustment component part;

[0033] Figure 8 is Figure 7 Enlarged view of the structure of part A in

[0034] Figure 9 State diagram when the third piston rod moves into the third piston tube;

[0035] Figure 10 State diagram when the third piston rod moves out of the third piston tube;

[0036] Figure 11 State diagram of the movement of the first piston rod, second piston rod, gear and rack when the cylindrical target becomes thinner.

[0037] The reference numerals in the figure respectively represent: 1. Control box; 2. Coating chamber; 201. Placing rack; 202. Substrate; 3. Upper cover; 4. Oxidation device; 5. Sputtering chamber; 6. Cylindrical target; 7. Inflation pipe; 8. Shunt pipe; 9. Main air pipe; 10. Limit rack; 11. Clamping plate; 12. Elastic rod; 13. Main shaft; 14. Transmission shaft; 15. First transmission disc; 16. Second transmission disc; 17. Driving motor; 18. Fixed rod; 19. First piston tube; 20. First piston rod; 21. Detection roller; 22. Second piston tube; 23. Second piston rod; 24. Rack; 25. Gear; 26. First connecting pipe; 27. Gas collecting box; 28. Inflation box; 29. Cam; 30. Third piston tube; 31. Transmission plate; 32. Suction pipe; 33. Exhaust pipe; 34. Vacuum device. Specific implementation mode

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0039] The following further describes the present invention with reference to embodiments.

[0040] Embodiment: Refer to Figures 1 - 3 , a surface oxidation device and method capable of improving sputtering efficiency, including a control box 1 and a coating box 2 installed on the control box 1, further including a rotary coating assembly, including a placement rack 201 rotatably installed at the center of the coating box 2, a plurality of substrates 202 are equiangularly placed on the placement rack 201, an oxidation device 4 is provided on one side of the coating box 2, an upper cover 3 is movably installed on the top of the coating box 2, and a vacuum device 34 is connected to one side of the coating box 2. Among them, a positive current is provided at the placement rack 201 here, and a negative current is lapped at the position of the subsequent cylindrical target 6, and the setting of the magnetic field and so on are all conventional settings of existing sputtering coating machines, and will not be elaborated here too much.

[0041] Refer to Figures 4 - 8 , to improve the sputtering efficiency by adjusting the angle of argon gas inlet in real time, for which a sputtering mechanism is provided, including sputtering boxes 5 fixedly installed on both sides of the coating box 2, a cylindrical target 6 is rotatably installed in the sputtering box 5, a fixed rod 18 is fixedly installed in the sputtering box 5, and both ends of the fixed rod 18 are slidably installed with limit frames 10, as Figure 7As shown in the figure, the fixed rod 18 is in the shape of an I-beam. Both its upper and lower ends are installed on the side wall of the limit frame 10 in the way of sliders and chutes, so that the limit frame 10 can rotate. The cylindrical target 6 is clamped between the two limit frames 10. Receiving grooves are provided on the outer walls of the two limit frames 10 close to each other. Elastic rods 12 are installed in both receiving grooves. Clamping plates 11 are installed at the ends of the elastic rods 12. Two gas charging pipes 7 are rotatably installed in the sputtering box 5, and the gas charging pipes 7 are symmetrically arranged on both sides of the cylindrical target 6. Two shunt pipes 8 are inserted into the top wall of the sputtering box 5 and connected to the two gas charging pipes 7 respectively. The two shunt pipes 8 on the same sputtering box 5 are jointly connected to a main gas pipe 9. The main gas pipe 9 is externally connected to an argon gas supply assembly. The sputtering mechanism further includes an angle adjustment assembly, which is used to detect the radius of the cylindrical target 6 and adjust the gas outlet angle of the gas charging pipe 7 according to the detected radius, and the gas outlet angle range is between 70 degrees and 80 degrees. The bottom of the gas charging pipe 7 is fixedly connected with a gear 25. A rack 24 adapted to the gear 25 is slidably installed in the sputtering box 5. By sliding the rack 24, the angle of the gas charging pipe 7 is changed. A second piston pipe 22 is fixedly installed in the sputtering box 5, and a second piston rod 23 is movably inserted into the second piston pipe 22. The rack 24 and the second piston rod 23 are fixedly connected. A first piston pipe 19 is fixedly installed on the fixed rod 18. A first piston rod 20 is movably inserted into the first piston pipe 19. A rotating frame is provided on the first piston rod 20. A detection roller 21 is rotatably installed on the rotating frame, and the detection roller 21 is in full contact with the cylindrical target 6. A first connecting pipe 26 is connected between the first piston pipe 19 and the second piston pipe 22. A return spring is sleeved on the first piston rod 20.

[0042] In this solution, the target is cylindrical, and two gas charging pipes 7 are symmetrically arranged to impact the cylindrical target 6 from two complementary angles, improving the sputtering efficiency. In addition, as the cylindrical target 6 is continuously consumed and gradually becomes thinner (the size becomes smaller), in order to monitor the size of the cylindrical target 6 in real time, a detection roller 21 is provided. As Figure 7 shown, the detection roller 21 is rotatably installed at the end of the first piston rod 20. Under the elastic extrusion of the return spring, the detection roller 21 can be in full contact with the cylindrical target 6, and at the same time, it will not affect the normal rotation of the cylindrical target 6. When the cylindrical target 6 gradually becomes thinner, the first piston rod 20 gradually moves outward from the first piston pipe 19. During the moving process, the air pressure inside the first piston pipe 19 will be changed. When the cylindrical target 6 becomes thinner, the first piston rod 20 moves outward from the first piston pipe 19. As Figure 7 and Figure 11 shown, at this time, the first piston pipe 19 will extract the air in the two second piston pipes 22 through the first connecting pipe 26, so that the second piston rod 23 moves into the second piston pipe 22, thereby driving the rack 24 to slide as shown in Figure 11 shown, driving the gear 25 to rotate. The rotation directions of the two gears 25 are asFigure 11 As shown, it further drives the gas charging pipe 7 to rotate, thereby changing the gas outlet angle of the gas charging pipe 7, that is, the angle of the incident ions, so as to control the incident ions to be in the optimal angle ( Figure 11 The angle marked in is the incident angle).

[0043] It should be noted that the transmission ratio of the gear 25 and the rack 24 and the displacement ratio of the first piston rod 20 and the second piston rod 23 can be adjusted to control the adjustment accuracy.

[0044] As Figure 4 , Figure 9 and Figure 10 shown, a transmission assembly for synchronous drive is provided between the placement rack 201 and the cylindrical target 6. The transmission assembly includes a drive motor 17 fixedly installed in the control box 1. A main shaft 13 is fixedly installed on the output shaft of the drive motor 17. The top of the main shaft 13 penetrates through the coating chamber 2 and is fixedly connected to the bottom wall of the placement rack 201. The bottom of the limit frame 10 at the bottom end of the sputtering chamber 5 is fixedly connected with a transmission shaft 14, and the transmission shaft 14 penetrates through the outer walls of the sputtering chamber 5 and the control box 1 respectively. Second transmission discs 16 are respectively provided on the two transmission shafts 14. Two first transmission discs 15 are installed on the main shaft 13. The two first transmission discs 15 and the two second transmission discs 16 are horizontally corresponding and level with each other, and a transmission belt is sleeved between the first transmission disc 15 and the second transmission disc 16 that are horizontally level. An air charging box 28 is provided on the outer wall of the sputtering chamber 5. A gas collecting box 27 is fixedly installed on the control box 1. The gas collecting box 27 is communicated with the air charging box 28, and a pressure relief valve is provided at the communication part. A cam 29 is provided on the transmission shaft 14. A third piston tube 30 is fixedly installed in the control box 1. A third piston rod is movably inserted into one end of the third piston tube 30 close to the cam 29, and a transmission plate 31 is fixedly installed at the end of the third piston rod. The transmission plate 31 is slidably connected with the cam 29. An air outlet pipe 33 is connected between the third piston tube 30 and the gas collecting box 27. An air suction pipe 32 is connected between the third piston tube 30 and the coating chamber 2, and one-way valves are provided on both the air suction pipe 32 and the air outlet pipe 33.

[0045] As Figure 4 shown, the drive motor 17 drives the main shaft 13 to rotate. The main shaft 13 drives the two transmission shafts 14 to rotate through the transmission between the two groups of first transmission discs 15 and second transmission discs 16, so as to realize the synchronous rotation of the substrate 202 on the placement rack 201 and the cylindrical target 6.

[0046] At the same time, as Figure 5 and Figure 6 shown, when the transmission shaft 14 rotates, it will drive the cam 29 to rotate. When the cam 29 rotates, it will reciprocally push and pull the transmission plate 31. The transmission plate 31 drives the third piston rod to perform a reciprocating linear motion. As Figure 9 and Figure 10As shown, when the third piston rod moves into the third piston tube 30, the third piston tube 30 will extract the gas in the coating chamber 2 through the suction pipe 32. When the third piston rod moves outside the third piston tube 30, the gas in the third piston tube 30 will enter the gas collecting box 27 through the air outlet pipe 33. As the gas in the gas collecting box 27 continuously increases, the internal pressure continuously increases. After breaking through the pressure relief valve, the gas quickly enters the inflation box 28. The inflation box 28 is connected to the sputtering chamber 5, and the accumulated gas rushes into the sputtering chamber 5. The air flow guides the free target particles to the substrate 202, improving the sputtering efficiency. It should be noted that a chute is provided on the side wall of the cam 29, and a slider adapted to the chute is provided on the transmission plate 31, that is, the cam 29 and the transmission plate 31 are slidably connected. When the cam 29 rotates, the reciprocating linear motion of the transmission plate 31 is realized.

[0047] A method for a surface oxidation device that can improve sputtering efficiency includes the following steps:

[0048] S1: Preheat the substrate 202. After preheating, place the substrate 202 on the placement rack 201. At the same time, install the cylindrical target 6 in the sputtering chamber 5, and start the vacuum device 34 to extract the vacuum inside the coating chamber 2;

[0049] S2: Start the drive motor 17, and through the transmission component, make the placement rack 201 and the cylindrical target 6 rotate simultaneously. At this time, add argon gas into the sputtering chamber 5 through the argon gas supply component, and start the oxidation device 4;

[0050] S3: The drive motor 17 drives the cam 29 to rotate, drives the third piston rod to reciprocate in the third piston tube 30 through the transmission plate 31, and uses the change in air pressure to extract the argon gas in the coating chamber 2 and send it to the gas collecting box 27 until the pressure relief valve is broken through. The argon gas in the gas collecting box 27 is filled into the sputtering chamber 5 from the inflation box 28, and the air flow is used to accelerate the sputtering speed of the substrate particles;

[0051] S4: The cylindrical target 6 is gradually consumed. The detection roller 21 is always pressed against the outer wall of the cylindrical target 6 under the action of the return spring. When the size of the cylindrical target 6 gradually becomes smaller, the first piston rod 20 gradually extends out of the first piston tube 19, thereby driving the gear 25 to rotate by pneumatic transmission, and then driving the gas charging pipe 7 to rotate, so as to adjust the angle of the argon gas impacting the cylindrical target 6.

[0052] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements will not make the essence of the corresponding technical solutions deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A surface oxidation device capable of improving sputtering efficiency, comprising a control box (1) and a coating box (2) mounted on the control box (1), characterized in that: Also includes: A rotary coating assembly, comprising a placement rack (201) rotatably mounted at the center of a coating box (2), wherein a plurality of substrates (202) are placed at equal angles on the placement rack (201); A sputtering mechanism, comprising a sputtering box (5) fixedly mounted on both sides of a coating box (2), a cylindrical target (6) being rotatably mounted in the sputtering box (5), two gas charging tubes (7) being rotatably mounted in the sputtering box (5), and the gas charging tubes (7) being symmetrically arranged on both sides of the cylindrical target (6), and the sputtering mechanism further comprising an angle adjustment component, which is used to detect the radius of the cylindrical target (6) and adjust the gas outlet angle of the gas charging tube (7) according to the measured radius, and the gas outlet angle ranges from 70 degrees to 80 degrees; A fixing rod (18) is fixedly installed in the sputtering box (5), and limiting frames (10) are slidably installed at both ends of the fixing rod (18), and the cylindrical target material (6) is clamped between the two limiting frames (10); A gear (25) is fixedly connected to the bottom of the inflation tube (7), and a rack (24) adapted to the gear (25) is slidably mounted in the sputtering box (5), so that the angle of the inflation tube (7) can be changed by sliding the rack (24); A second piston tube (22) is fixedly installed in the sputtering box (5), and a second piston rod (23) is movably inserted in the second piston tube (22); the rack (24) and the second piston rod (23) are fixedly connected; a first piston tube (19) is fixedly installed on the fixed rod (18); a first piston rod (20) is movably inserted in the first piston tube (19); a rotating frame is provided on the first piston rod (20); a detection roller (21) is rotatably installed on the rotating frame, and the detection roller (21) is in full contact with the cylindrical target material (6); a first connecting tube (26) is connected between the first piston tube (19) and the second piston tube (22); and a return spring is sleeved on the first piston rod (20); Wherein, a transmission component for synchronous driving is provided between the placement rack (201) and the cylindrical target material (6).

2. A surface oxidation device capable of improving sputtering efficiency according to claim 1, characterized in that: A receiving groove is provided on the outer wall of the two limiting frames (10) on the adjacent side, and an elastic rod (12) is installed in each of the two receiving grooves, and a clamping plate (11) is installed at the end of the elastic rod (12).

3. A surface oxidation device capable of improving sputtering efficiency according to claim 2, characterized in that: The top wall of the sputtering box (5) is provided with two shunt pipes (8) connected thereto, the two shunt pipes (8) being connected to the two gas charging pipes (7) in a one-to-one correspondence, the two shunt pipes (8) located on the same sputtering box (5) being commonly connected to a main gas pipe (9), the main gas pipe (9) being externally connected to an argon gas supply assembly.

4. A surface oxidation device capable of improving sputtering efficiency according to claim 3, characterized in that: The transmission assembly comprises a driving motor (17) fixedly mounted in the control box (1), a main shaft (13) fixedly mounted on the output shaft of the driving motor (17), the top of the main shaft (13) passing through the coating box (2) and fixedly connected to the bottom wall of the placement frame (201), a transmission shaft (14) fixedly connected to the bottom of the limiting frame (10) located at the bottom end of the sputtering box (5), and the transmission shaft (14) respectively passes through the outer walls of the sputtering box (5) and the control box (1), two second transmission disks (16) are respectively provided on the two transmission shafts (14), two first transmission disks (15) are installed on the main shaft (13), the two first transmission disks (15) and the two second transmission disks (16) are aligned one by one in horizontal position, and a transmission belt is sleeved between the first transmission disks (15) and the second transmission disks (16) aligned in horizontal position.

5. A surface oxidation device capable of improving sputtering efficiency according to claim 4, characterized in that: An air charging box (28) is provided on the outer wall of the sputtering box (5), an air collecting box (27) is fixedly installed on the control box (1), the air collecting box (27) and the air charging box (28) are connected, and a pressure relief valve is provided at the connecting point, a cam (29) is provided on the transmission shaft (14), a third piston tube (30) is fixedly installed in the control box (1), a third piston rod is movably inserted at one end of the third piston tube (30) close to the cam (29), and a transmission plate (31) is fixedly installed at the end of the third piston rod, the transmission plate (31) and the cam (29) are slidably connected, an air outlet pipe (33) is connected between the third piston tube (30) and the air collecting box (27), an air intake pipe (32) is connected between the third piston tube (30) and the coating box (2), and both the air intake pipe (32) and the air outlet pipe (33) are provided with a one-way valve.

6. A surface oxidation device capable of improving sputtering efficiency according to claim 5, characterized in that: An oxidation device (4) is provided on one side of the coating box (2), an upper cover (3) is movably mounted on the top of the coating box (2), and a vacuum device (34) is connected to one side of the coating box (2).

7. A method for a surface oxidation device capable of improving sputtering efficiency as claimed in claim 6, characterized in that: The following steps are involved: S1: preheating the substrate (202), placing the substrate (202) on a placement rack (201) after preheating, installing a cylindrical target (6) in a sputtering box (5), and starting a vacuum device (34) to draw a vacuum inside the coating box (2); S2: starting the driving motor (17), causing the placement rack (201) and the cylindrical target (6) to rotate simultaneously through the transmission assembly, at which time argon is added to the sputtering box (5) through the argon gas supply assembly, and the oxidation device (4) is started; S3: The driving motor (17) drives the cam (29) to rotate, and drives the third piston rod to slide back and forth in the third piston tube (30) through the transmission plate (31). The argon gas in the coating box (2) is extracted and sent to the gas collecting box (27) by utilizing the change in air pressure until the pressure relief valve is broken. The argon gas in the gas collecting box (27) is charged into the sputtering box (5) from the gas charging box (28), and the sputtering speed of the substrate particles is accelerated by utilizing the air flow; S4: The cylindrical target (6) is gradually consumed, and the detection roller (21) is always pressed against the outer wall of the cylindrical target (6) under the action of the return spring. When the size of the cylindrical target (6) gradually decreases, the first piston rod (20) gradually extends out of the first piston tube (19), thereby utilizing the pneumatic transmission to drive the gear (25) to rotate, thereby driving the inflation tube (7) to rotate, thereby adjusting the angle at which the argon gas impacts the cylindrical target (6).

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