High-precision green sheet scanning method, device and equipment based on probe function

Abstract

The present disclosure provides a high-precision wafer scanning method, device and equipment based on probe function. The method comprises: initializing the controller parameters and driver parameters, and determining the preset position interval of the wafer; the driver receives the control instruction of the controller, and scans the wafer through the motor driven sensor based on the control instruction; in the preset position interval, in response to the jump signal generated when the sensor scans the wafer, the probe function of the driver is triggered, the driver latches the position parameter of the current motor, or in response to the maintenance signal when the sensor does not scan the wafer, the driver latches the position parameter of the current preset position interval, and continues to drive the motor to drive the sensor to scan the wafer by wafer; the controller reads the position parameter of the motor and / or the position parameter of the preset position interval from the driver, thereby determining whether the wafer exists in the preset position interval in the warehouse and recording the accurate position of the wafer when it exists. The present disclosure improves the scanning accuracy of the wafer.

Description

Technical Field

[0001] This disclosure relates to the field of integrated circuit technology, and more specifically, to a high-precision wafer scanning method, apparatus, storage medium, and electronic device based on probe functionality. Background Technology

[0002] After being manufactured using a lithography machine, the resulting 8 / 12-inch wafers are placed in a wafer tray for further testing. Since the wafers are stored in the tray, when a tray of wafers is placed on a probe station for testing, a device is first needed to scan and identify the number of wafers in the tray and the position of each wafer to accurately acquire the wafers.

[0003] However, in existing technologies, the scanning device is controlled by a host computer on the probe stage, and the position of the material is read by the host computer. After the host computer obtains the position parameters of the current material, it sends a control command to scan the next material. This scanning method greatly reduces the material scanning efficiency and scanning accuracy.

[0004] Therefore, this disclosure provides a high-precision material scanning method, apparatus, storage medium, and electronic device based on probe function to solve one of the above-mentioned technical problems. Summary of the Invention

[0005] The purpose of this disclosure is to provide a high-precision material scanning method, apparatus, storage medium, and electronic device based on probe functionality, which can solve at least one of the aforementioned technical problems. The specific solution is as follows:

[0006] According to specific embodiments of this disclosure, this disclosure provides a high-precision material scanning method based on probe functionality, including:

[0007] Initialize controller and driver parameters to determine the preset position range of the material;

[0008] The driver receives control commands from the controller and, based on the control commands, drives the sensor via a motor to scan the material sheet;

[0009] Within the preset position range, in response to the jump signal generated when the sensor scans a piece, the probe function of the driver is triggered, and the driver latches the current position parameters of the motor; or, in response to the hold signal when the sensor does not scan a piece, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan piece by piece.

[0010] The controller reads the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the material piece exists in the preset position range in the hopper and recording the precise position of the material piece when it exists.

[0011] In some embodiments, the triggering of the driver's probe function in response to a jump signal generated when the sensor scans the material sheet, wherein the driver latches the current position parameters of the motor, including:

[0012] The sensor is electrically connected to the driver, which has a register. In response to a jump signal generated when the sensor scans a piece of material, the driver triggers a probe function and latches the current position parameters of the motor into the register.

[0013] In some embodiments, the driver latches the current position parameters of the motor into the register, including:

[0014] The driver only latches the current position parameters of the motor into the register. When the driver receives the next transition signal from the sensor, the current position parameters of the motor are refreshed.

[0015] In some embodiments, the driver latches the current position parameters of the motor into the register, including:

[0016] The driver latches the current position parameters of the motor into the register, which is configured to latch the position parameters of multiple motors and is used to store the position parameters of all the material pieces scanned by the sensors received by the driver.

[0017] In some embodiments, the scanning period of the sensor is less than or equal to 16 μs, the scanning speed of the sensor is less than or equal to 100 mm / s, and the scanning error of the sensor is less than or equal to 1.6 μm.

[0018] In some embodiments, the sampling frequency of the driver is greater than or equal to 8 kHz, and the scanning error of the driver is less than or equal to 12.5 μm.

[0019] In some embodiments, the scanning error of the high-precision sheet scanning method based on probe function is less than or equal to 14.1 μm.

[0020] In some embodiments, the method further includes: calculating the thickness of the sheet based on the current position parameters of the motor latched by the driver.

[0021] This disclosure also provides a high-precision sheet scanning device based on probe functionality, comprising:

[0022] The initialization unit is configured to initialize controller and driver parameters and determine the preset position range of the material.

[0023] The scanning unit is configured such that the driver receives control commands from the controller, and based on the control commands, drives the sensor via a motor to scan the material sheet;

[0024] The latching unit is configured to, in response to a jump signal generated when the sensor scans a piece of material within the preset position range, trigger the probe function of the driver, and the driver latches the current position parameters of the motor; or, in response to a hold signal when the sensor does not scan a piece of material, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan piece by piece.

[0025] The reading unit is configured to allow the controller to read the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the material piece exists in the preset position range in the hopper and recording the precise position of the material piece when it exists.

[0026] This disclosure also provides a computer-readable storage medium having a computer program stored thereon, characterized in that the program, when executed by a processor, implements the method described in any of the preceding embodiments.

[0027] This disclosure also provides an electronic device, including:

[0028] One or more processors;

[0029] A storage device for storing one or more programs, which, when executed by the one or more processors, cause the one or more processors to perform the method as described in any of the preceding methods.

[0030] Compared with the prior art, the above-described solutions of this disclosure have at least the following beneficial effects:

[0031] This disclosure provides a high-precision sheet scanning method based on probe functionality. By setting a latch register in the driver and electrically connecting the sensor to the driver, the driver can respond promptly to the transition signal generated when the sensor scans a sheet and promptly latch the current position parameters of the motor. Since it does not need to wait for the host computer to read the position parameters before proceeding with subsequent scanning, but instead directly continues to drive the motor to drive the sensor for sheet-by-sheet scanning, the sheet scanning efficiency is improved. Simultaneously, the driver's timely response to the sensor's transition signal and timely latching of the motor position parameters reduces scanning errors and improves scanning accuracy. Attached Figure Description

[0032] Figure 1A flowchart of a high-precision sheet scanning method based on probe functionality according to an embodiment of the present disclosure is shown;

[0033] Figure 2 The experimental results of a high-precision sheet scanning method based on probe functionality according to an embodiment of the present disclosure are shown in the figure.

[0034] Figure 3 A schematic diagram of a high-precision sheet scanning device based on probe functionality according to an embodiment of the present disclosure is shown.

[0035] Figure 4 A structural diagram of an electronic device according to an embodiment of the present disclosure is shown. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of this disclosure clearer, the disclosure will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0037] The terminology used in the embodiments of this disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of this disclosure. The singular forms “a,” “the,” and “the” as used in the embodiments of this disclosure and the appended claims are also intended to include the plural forms, and “multiple” generally includes at least two unless the context clearly indicates otherwise.

[0038] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0039] It should be understood that although the terms first, second, third, etc., may be used to describe embodiments of this disclosure, these descriptions should not be limited to these terms. These terms are only used to distinguish the descriptions. For example, first may also be referred to as second without departing from the scope of embodiments of this disclosure, and similarly, second may also be referred to as first.

[0040] Depending on the context, the words “if” or “suppose” as used here can be interpreted as “when” or “in response to determination” or “in response to detection.” Similarly, depending on the context, the phrases “if determination” or “if detection (of the stated condition or event)” can be interpreted as “when determination” or “in response to determination” or “when detection (of the stated condition or event)” or “in response to detection (of the stated condition or event).”

[0041] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or device that includes said element.

[0042] It should be noted that any symbols and / or numbers present in the specification that are not marked in the accompanying drawings are not reference numerals.

[0043] In related technologies, sensor signals are connected to controllers. After the controller detects the signal, it uploads the detection signal to the host computer, which then determines whether the material piece exists. If the material piece exists, the host computer sends a command to the controller to obtain the current position parameters of the motor, thereby obtaining the position information of the material piece to record the current position of the material piece. Then, a control command is sent to the controller, which controls the driver to drive the motor for the next scan.

[0044] This method is relatively easy to implement, but since the entire process is controlled by the host computer, it takes about 20ms from the time the controller detects the sensor to the time the host computer reacts and obtains the motor's position information through instructions. The entire detection process is quite time-consuming. From the time the sensor scans the material to the time the current position information is obtained, about 20ms have already passed. At this time, the obtained position will have an error of about 20ms, resulting in inaccurate material position and causing damage to the material during subsequent material handling.

[0045] This disclosure provides a high-precision sheet scanning method based on probe functionality, comprising: initializing controller parameters and driver parameters to determine a preset position range for the sheet; the driver receiving control commands from the controller and, based on the control commands, driving a sensor via a motor to scan the sheet; within the preset position range, in response to a jump signal generated when the sensor scans a sheet, triggering the probe function of the driver, the driver latches the current position parameters of the motor, or, in response to a hold signal when the sensor does not scan a sheet, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan sheet by sheet; the controller reads the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the sheet exists in the preset position range in the hopper and recording the precise position of the sheet when it exists.

[0046] This disclosure improves scanning efficiency by incorporating a latch register in the driver and electrically connecting the sensor to the driver. This allows the driver to respond promptly to the transition signal generated when the sensor scans a piece of material and to latch the current position parameters of the motor. Since subsequent scanning does not require waiting for the host computer to read the position parameters, but instead directly continues driving the motor to drive the sensor for piece-by-piece scanning, the scanning efficiency of the pieces is improved. Simultaneously, the driver's timely response to the sensor's transition signal and timely latching of the motor position parameters reduces scanning errors and improves scanning accuracy.

[0047] The optional embodiments of this disclosure are described in detail below with reference to the accompanying drawings.

[0048] like Figure 1 As shown in the specific embodiments of this disclosure, this disclosure provides a high-precision material scanning method based on probe function, including the following method steps:

[0049] Step S102: Initialize controller parameters and driver parameters, and determine the preset position range of the material;

[0050] Step S104: The driver receives a control command from the controller and scans the material sheet by driving the sensor through the motor based on the control command;

[0051] Step S106: In the preset position range, in response to the jump signal generated when the sensor scans a piece, the probe function of the driver is triggered and the driver latches the current position parameters of the motor; or, in response to the hold signal when the sensor does not scan a piece, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan piece by piece.

[0052] Step S108: The controller reads the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the material piece exists in the preset position range in the hopper and recording the precise position of the material piece when it exists.

[0053] In step S102, at the initial stage of material piece position detection, it is necessary to initialize the controller parameters and driver parameters, including but not limited to clearing the driver registers and configuring driver instructions, so that the motor runs to a safe position and is ready for scanning. As an example, the detector is aligned with the position of the first material piece, and the starting position parameters are determined. Since the distance between the material pieces is fixed, and the size of the material box and the number of material pieces are known in advance, the preset position interval of each material piece can be calculated. For example, if the size of the material box is 20cm and the number of material pieces is 100, then there will be one material piece every 2mm interval. After determining the starting position parameters, the start and end position parameters of the preset position interval can be determined, and the preset position intervals can be numbered 1, 2, ..., 100 from top to bottom.

[0054] Optionally, before the driver receives control commands from the controller, it needs to perform initialization checks on the material box structure and the status of the material pieces. These initialization checks may include, for example, checks on the safety of the material pieces, including but not limited to whether the material pieces are stably positioned within the hopper, and whether opening the hopper door will cause the material pieces to slide out of the hopper. If there is a risk of sliding out, an alarm will be triggered and operation will stop immediately. Optionally, a through-beam fiber optic sensor can be installed on the hopper door; if a material piece slides out, this sensor will be triggered to sound an alarm.

[0055] In step S104, the driver receives a control command from the controller, which is a command to start / stop the operation of the drive motor. Based on the control command, the driver drives the lifting mechanism via the motor and drives the sensor mechanically connected to the motor to scan the material sheet piece by piece. The sensor can be an infrared or other band optical sensor. Optionally, a fast-response sensor is used, with a sensor cycle period of 16μs and a maximum scanning speed of 100mm / s. That is, when the sensor detects a material sheet, the maximum time interval between the sensor scanning and the transmission to the driver is 1.6μm, which also means the maximum error is 1.6μm.

[0056] In some embodiments, the sensor is electrically connected to the driver, and the driver has a register. In step S106, during the process of the sensor scanning the sheet piece by piece, when a sheet piece is scanned, at a certain preset position interval, such as preset position interval 20, the sensor generates a transition signal, for example, changing from a low-level signal 0 to a high-level signal 1, and transmits this transition signal to the driver in real time, triggering the probe function of the driver. In response to the transition signal generated when the sensor scans the sheet piece, the driver captures the current position parameter of the motor in real time, such as A1, and latches the current position parameter of the motor into the register. Optionally, the sensor may also generate a high-to-low transition signal, for example, changing from a high-level signal 1 to a low-level signal 0. In response to this transition signal, the driver also captures the current position parameter of the motor in real time, such as A2, and latches the current position parameter of the motor into the register. The thickness of the sheet piece can be determined by the position parameter A1 and the position parameter A2.

[0057] Optionally, in response to the sustain signal when the sensor does not scan a piece, for example, if the sensor is currently in a low-level 0 sustain signal in the preset position interval of ground 22, it indicates that there is no piece at that position. The driver latches the position parameters of the current preset position interval, thereby determining whether the piece exists at a certain position in the hopper.

[0058] Triggering the probe function of the driver refers to whether the driver senses the transition signal of the sensor. If the transition signal is sensed, whether it is from 0 to 1 or from 1 to 0, the probe function of the driver will be triggered, and the driver will immediately lock the position information of the motor.

[0059] The driver drives the motor to drive the sensor to scan piece by piece. The driver has a high-speed probe function with a position sampling frequency of 8KHz, that is, a sampling period of 0.125ms. In other words, under the condition that the motor drives the load to rotate at 100mm / s, the maximum error of the driver itself is 12.5μm.

[0060] The maximum error of the combined sensor scanning and transmission to the driver is 1.6 μm, the maximum error of the driver itself is 12.5 μm, and the maximum error of the scanning method disclosed herein is 14.1 μm. This accuracy is far higher than the thickness of the sheet material of 500 micrometers.

[0061] like Figure 2As shown in Table 1, experiments were conducted based on the high-precision material scanning method based on probe function described above. The data were obtained using the same scanning speed of 100 mm / s, with three repeated scanning operations. Each column of data represents the position parameter information of one scan, as shown in Table 1. From the three experimental data, it can be seen that the maximum error among all data is at position 22, with an error of 13 μm, which is almost consistent with the error value of 14.1 μm calculated above. Therefore, the accuracy of the scanning method described in this disclosure is further verified through experiments.

[0062] Table 1 List of material position parameters for three tests

[0063]

[0064]

[0065] In some embodiments, the register can only latch the current position parameters of the motor. When the driver receives the next transition signal from the sensor, it acquires the position parameters of the motor corresponding to the next transition signal in real time and refreshes the position parameters in the register. At this time, since the previous position parameter has already been read by the host computer in real time, overwriting the previous position parameter will not affect the detection of the material position.

[0066] In this embodiment, the host computer and the controller can only exchange instructions and read data. The controller can exchange control information with each driver, such as sending pulse signals, analog ±V signals, PWM signals, etc. to the drivers, and can also receive feedback signals from the encoders from the drivers.

[0067] In some embodiments, the register is configured to latch multiple position parameters of the motor. When the driver receives the next transition signal from the sensor, it acquires the position parameter of the motor corresponding to the next transition signal in real time and stores the position parameter in another location in the register without overwriting the previous position parameter. This allows the previous position parameter to be read in real time without affecting the latching of subsequent position parameters. This improves the lifespan of the position parameters, enabling the host computer to read all position parameters stored in the register during idle time, thus improving the efficiency of the host computer.

[0068] In step S108, the controller can read the position parameters of the motor and / or the position parameters of the preset position range from the driver according to the register settings and the priority level of its own task, thereby determining whether the piece exists in the preset position range in the hopper and recording the precise position of the piece when it exists. The controller can obtain the position parameters and quantity of the piece in the hopper as needed when the sensor has finally traversed the hopper or in real time, providing accurate scanning data for subsequent piece grabbing.

[0069] In summary, this disclosure, by setting a latch register in the driver and electrically connecting the sensor to the driver, enables the driver to respond promptly to the jump signal generated when the sensor scans the material sheet and promptly latch the current position parameters of the motor. Since it does not need to wait for the host computer to read the position parameters before proceeding with subsequent scanning, but instead directly continues to drive the motor to drive the sensor to scan each material sheet, the scanning efficiency of the material sheets is improved. Simultaneously, the driver's timely response to the sensor's jump signal and timely latching of the motor position parameters reduces scanning errors and improves scanning accuracy. Furthermore, based on the above hardware foundation and the condition of rapid response, this disclosure also implements the function of testing the thickness of the material sheets, which can check whether two material sheets are placed overlapping or whether the material sheets are inserted obliquely into the hopper.

[0070] This disclosure also provides apparatus embodiments that follow the above embodiments, for implementing the method steps described in the above embodiments. The interpretation of the same names is the same as that in the above embodiments, and they have the same technical effects as those in the above embodiments, so they will not be repeated here.

[0071] like Figure 3 As shown, this disclosure also provides a high-precision sheet scanning device based on probe functionality, comprising:

[0072] The initialization unit 302 is configured to initialize the controller parameters and driver parameters, and determine the preset position range of the material piece;

[0073] The scanning unit 304 is configured to receive control commands from the controller and scan the material sheet by driving the sensor through a motor based on the control commands;

[0074] The latching unit 306 is configured to, in response to a jump signal generated when the sensor scans a piece of material within the preset position range, trigger the probe function of the driver and latch the current position parameters of the motor; or, in response to a hold signal when the sensor does not scan a piece of material, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan piece by piece.

[0075] The reading unit 308 is configured to allow the controller to read the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the material piece exists in the preset position range in the hopper and recording the precise position of the material piece when it exists.

[0076] like Figure 4 As shown, this embodiment provides an electronic device, which includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, which are executed by the at least one processor to enable the at least one processor to perform the method steps described in the above embodiment.

[0077] This disclosure provides a non-volatile computer storage medium storing computer-executable instructions that can perform the steps described in the above embodiments.

[0078] The following is for reference. Figure 4 The diagram illustrates a structural schematic of an electronic device suitable for implementing embodiments of the present disclosure. The terminal devices in the embodiments of the present disclosure may include, but are not limited to, mobile terminals such as mobile phones, laptops, digital broadcast receivers, PDAs (personal digital assistants), PADs (tablet computers), PMPs (portable multimedia players), in-vehicle terminals (e.g., in-vehicle navigation terminals), and fixed terminals such as digital TVs and desktop computers. Figure 4 The electronic device shown is merely an example and should not be construed as limiting the functionality and scope of the embodiments disclosed herein.

[0079] like Figure 4 As shown, the electronic device may include a processing unit (e.g., a central processing unit, a graphics processing unit, etc.) 401, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 402 or a program loaded from a storage device 408 into a random access memory (RAM) 403. The RAM 403 also stores various programs and data required for the operation of the electronic device. The processing unit 401, ROM 402, and RAM 403 are interconnected via a bus 404. An input / output (I / O) interface 405 is also connected to the bus 404.

[0080] Typically, the following devices can be connected to I / O interface 405: input devices 406 including, for example, touchscreens, touchpads, keyboards, mice, cameras, microphones, accelerometers, gyroscopes, etc.; output devices 407 including, for example, liquid crystal displays (LCDs), speakers, vibrators, etc.; storage devices 408 including, for example, magnetic tapes, hard disks, etc.; and communication devices 409. Communication device 409 allows electronic devices to communicate wirelessly or wiredly with other devices to exchange data. Although Figure 4 Electronic devices with various devices are shown, but it should be understood that it is not required to implement or have all of the devices shown. More or fewer devices may be implemented or have instead.

[0081] In particular, according to embodiments of this disclosure, the processes described above with reference to the flowcharts can be implemented as computer software programs. For example, embodiments of this disclosure include a computer program product comprising a computer program carried on a computer-readable medium, the computer program containing program code for performing the methods shown in the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network via a communication device 409, or installed from a storage device 408, or installed from a ROM 402. When the computer program is executed by the processing device 401, it performs the functions defined in the methods of embodiments of this disclosure.

[0082] It should be noted that the computer-readable medium described in this disclosure can be a computer-readable signal medium or a computer-readable storage medium, or any combination thereof. A computer-readable storage medium can be, for example,—but not limited to—an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples of a computer-readable storage medium may include, but are not limited to: an electrical connection having one or more wires, a portable computer disk, a hard disk, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage device, magnetic storage device, or any suitable combination thereof. In this disclosure, a computer-readable storage medium can be any tangible medium containing or storing a program that can be used by or in connection with an instruction execution system, apparatus, or device. In this disclosure, a computer-readable signal medium can include a data signal propagated in baseband or as part of a carrier wave, carrying computer-readable program code. Such propagated data signals can take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A computer-readable signal medium can be any computer-readable medium other than a computer-readable storage medium, which can send, propagate, or transmit a program for use by or in connection with an instruction execution system, apparatus, or device. The program code contained on the computer-readable medium can be transmitted using any suitable medium, including but not limited to: wires, optical fibers, RF (radio frequency), etc., or any suitable combination thereof.

[0083] The aforementioned computer-readable medium may be included in the aforementioned electronic device; or it may exist independently and not assembled into the electronic device.

[0084] Computer program code for performing the operations of this disclosure can be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, and C++, and conventional procedural programming languages ​​such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer via any type of network—including a local area network (LAN) or a wide area network (WAN)—or can be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0085] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this disclosure. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0086] The units described in the embodiments of this disclosure can be implemented in software or hardware. The names of the units are not, in some cases, intended to limit the specific unit.

Claims

1. A high-precision material scanning method based on probe function, characterized in that, include: Initialize controller and driver parameters to determine the preset position range of the material; The driver receives control commands from the controller and, based on the control commands, drives a sensor via a motor to scan the material sheet. The sensor is electrically connected to the driver. Within the preset position range, in response to the jump signal generated when the sensor scans a piece, the probe function of the driver is triggered, and the driver latches the current position parameters of the motor. In response to the hold signal when the sensor does not scan a piece, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan piece by piece. The controller reads the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the material piece exists in the preset position range in the hopper and recording the precise position of the material piece when it exists.

2. The method according to claim 1, characterized in that, The actuator triggers the probe function in response to the jump signal generated when the sensor scans the material piece. The actuator latches the current position parameters of the motor, including: The driver has a register that, in response to a jump signal generated when the sensor scans the material, triggers the probe function of the driver, and the driver latches the current position parameters of the motor into the register.

3. The method according to claim 2, characterized in that, The driver latches the current position parameters of the motor into the register, including: The driver only latches the current position parameters of the motor into the register. When the driver receives the next transition signal from the sensor, the current position parameters of the motor are refreshed.

4. The method according to claim 2, characterized in that, The driver latches the current position parameters of the motor into the register, including: The driver latches the current position parameters of the motor into the register, which is configured to latch the position parameters of multiple motors and is used to store the position parameters of all the material pieces scanned by the sensors received by the driver.

5. The method according to claim 1, characterized in that, The scanning period of the sensor is less than or equal to 16 μs, the scanning speed of the sensor is less than or equal to 100 mm / s, and the scanning error of the sensor is less than or equal to 1.6 μm.

6. The method according to claim 5, characterized in that, The sampling frequency of the driver is greater than or equal to 8KHz, and the scanning error of the driver is less than or equal to 12.5μm.

7. The method according to claim 6, characterized in that, The scanning error of the high-precision sheet scanning method based on probe function is less than or equal to 14.1 μm.

8. The method according to claim 1, characterized in that, Also includes: The thickness of the sheet is calculated based on the current position parameters of the motor latched by the driver.

9. A high-precision material scanning device based on probe function, characterized in that, include: The initialization unit is configured to initialize controller and driver parameters and determine the preset position range of the material. The scanning unit is configured such that the driver receives control commands from the controller, and based on the control commands, drives a sensor via a motor to scan the material sheet, wherein the sensor is electrically connected to the driver; The latching unit is configured to, in response to a jump signal generated when the sensor scans a piece of material within the preset position range, trigger the probe function of the driver, and the driver latches the current position parameters of the motor; in response to a hold signal when the sensor does not scan a piece of material, the driver latches the position parameters of the current preset position range and continues to drive the motor to drive the sensor to scan piece by piece. The reading unit is configured to allow the controller to read the position parameters of the motor and / or the position parameters of the preset position range from the driver, thereby determining whether the material piece exists in the preset position range in the hopper and recording the precise position of the material piece when it exists.

10. An electronic device, characterized in that, include: One or more processors; A storage device for storing one or more programs, which, when executed by one or more processors, cause the one or more processors to implement the method as described in any one of claims 1 to 8.

Images