Inspection instrument and inspection method for tiny particles on flat surface

Abstract

The invention discloses a flat surface tiny particulate matter inspection instrument and inspection method. The inspection instrument comprises a machine shell, a plane mirror adjusting mechanism, a laser emission assembly, an acceleration gear mechanism, a lifting mechanism, a concave lens loading mechanism, an inner gear ring transmission assembly, an optical device and a photosensitive screen. The laser emitting assembly comprises a laser light source and an inner gear ring; the concave lens loading mechanism is a connecting rod mechanism which moves through the downward pressing or jacking action of the lifting mechanism; the acceleration gear mechanism and the lifting mechanism are in transmission connection through the inner gear ring transmission assembly. The optical device comprises a parabolic mirror, a convex lens, a concave lens and three plane mirrors; the plane mirror adjusting mechanism enables the two plane mirrors to be always parallel and adjustable through gears and racks. The laser light source can be driven by the motor to rotate, so that incident laser can irradiate from one side of the parabolic mirror to the other side of the parabolic mirror, and tiny particles existing on the flat surface are detected and positioned one by one during the period; the instrument has the advantages of simple structure, short detection and positioning time and high reliability.

Description

Technical Field

[0001] The invention relates to the field of plane micro-particle detection and positioning, and in particular to a flat surface micro-particle inspection instrument and an inspection method. Background Art

[0002] Before processing on large, medium or small flat surfaces, it is usually necessary to ensure that there are no tiny particles on the flat surface to avoid failure of various operations to be performed on the flat surface, such as attaching a film on the plane to prevent the film from protruding due to tiny particles; therefore, after cleaning the flat surface in advance, it is very necessary to detect and locate the tiny particles that may remain on the ground.

[0003] There are usually some tiny particles on the flat surface that are close to the color or stripes of the flat surface and are difficult to find, or tiny particles that are difficult to find due to the large site; the tiny particle detection and positioning instrument on the flat surface can detect and locate these tiny particles on the flat surface, thereby eliminating the functional impact or loss of operations to be performed on the plane due to the presence of tiny particles.

[0004] Existing tiny particle detection and positioning instruments lack instruments for detection on flat surfaces, and the technical level is not mature enough. In most flat surface cleaning situations, operators clean the flat surface once and then use the naked eye to determine whether there are any tiny particles remaining on the ground. Summary of the invention

[0005] In order to overcome the gaps in the prior art, the purpose of the present invention is to provide a detection and positioning instrument and inspection method for tiny particles on a flat ground, which can detect and locate uncleaned tiny particles on a flat ground of any shape in a rectangular area, so as to fill the technical gap.

[0006] To this end, the present invention proposes a flat surface micro-particle inspection instrument, including a housing and a photosensitive screen for detecting laser signals and responsible for data calculation and processing, and also includes:

[0007] A laser emission assembly, comprising a rotating mechanism and a laser emitter;

[0008] An optical device group, which includes a first plane mirror, a second plane mirror, a parabolic mirror, a third plane mirror and a convex lens in sequence along the laser path, and also includes a concave lens selectively inserted behind the convex lens;

[0009] A plane mirror adjustment mechanism is connected to the first plane mirror and the second plane mirror which are arranged parallel to each other and drives the two plane mirrors to rotate synchronously;

[0010] The concave lens loading mechanism comprises a slide rail slider and a screw nut seat and a screw 1 that cooperate with each other, wherein the concave lens is fixedly connected to the slide rail slider and then floatingly connected to the screw nut seat;

[0011] The acceleration gear mechanism and the inner gear ring transmission assembly are arranged between the rotating mechanism and the lead screw and have a fixed transmission ratio so that the concave lens is always located directly above the output light path;

[0012] A lifting mechanism, fixedly connected to the slide rail and slider, and driving the concave lens to be withdrawn from the optical path or loaded into the optical path;

[0013] The photosensitive screen has a central processing module and a photosensitive surface perpendicular to the output light path. The central processing module is respectively connected to the laser emission component, the plane mirror adjustment mechanism, and the lifting mechanism through signals to control their operations.

[0014] As a preferred technical solution of the present invention, the rotating mechanism includes servo motor No. 2, No. 4 gear and an inner gear ring, the laser transmitter is mounted on the inner gear ring, the No. 4 gear is mounted on the motor shaft of servo motor No. 2, and the inner gear ring is meshed with the No. 4 gear for transmission;

[0015] The acceleration gear mechanism comprises a bevel gear shaft, a first-stage gear set meshing with the inner gear ring, a bevel gear shaft connected to the input end of the inner gear ring transmission assembly, and the lead screw 1 is connected to the output end of the inner gear ring transmission assembly.

[0016] As a preferred technical solution of the present invention, the concave lens loading mechanism includes a slide rail, a slide rail slider and a multi-link assembly; the rotating mechanism drives the lead screw nut seat to move horizontally on the lead screw, and the concave lens is connected to the lead screw nut seat through the slide rail slider and the multi-link assembly, and moves synchronously on the slide rail with the slide rail slider, and both ends of the slide rail are connected to the lifting mechanism.

[0017] As a preferred technical solution of the present invention, the lead screw 1 is a variable pitch lead screw, and the pitch of the lead screw 1 gradually increases from the middle to both ends. When the laser emitted by the laser transmitter is output through a convex lens, the concave lens is located directly above the output laser light path.

[0018] As a preferred technical solution of the present invention, the lifting mechanism includes an L-shaped slide, a second wedge block, a first wedge block, a steering gear, a lifting slider and a lifting guide plate;

[0019] The output shaft of the servo cooperates with the arc groove on the No. 1 wedge block and drives the No. 1 wedge block to move left and right along the horizontal slide of the L-shaped slide, thereby driving the No. 2 wedge block to be lifted up or pressed down along the vertical slide of the L-shaped slide;

[0020] One end of the slide rail is connected to the second wedge block, and the other end of the slide rail is connected to the lifting slider arranged in the lifting guide plate; thereby, the lifting and lowering of the concave lens is achieved by rotating the servo; wherein the servo is communicatively connected to the central processing module.

[0021] As a preferred technical solution of the present invention, the inner gear ring transmission assembly is located on one side of the cavity in the housing, and the inner gear ring transmission assembly includes a baffle, a second inner gear ring, a fifth gear and a sixth gear;

[0022] The position of the No. 2 inner gear ring is limited by a baffle, several bearings and several limiting sheet metals; the No. 5 gear and the No. 6 gear are respectively meshed with the No. 2 inner gear ring, wherein the No. 6 gear is connected to the lead screw 1; the No. 5 gear is connected to the output end of the acceleration gear mechanism.

[0023] As a preferred technical solution of the present invention, the acceleration gear mechanism also includes a second-stage gear set, a third-stage gear set and a spur-bevel gear; the small tooth portion at the upper end of the first-stage gear set is meshed with the first inner gear ring, the large teeth at the lower end of the first-stage gear set are meshed with the small teeth at the upper end of the second-stage gear set for transmission, the large teeth at the lower end of the second-stage gear set are meshed with the small teeth at the upper end of the third-stage gear set for transmission, the third-stage gear set is meshed with the spur teeth at the upper end of the spur-bevel gear for transmission, and the spur-bevel gear is meshed with the bevel gear shaft for transmission.

[0024] As a preferred technical solution of the present invention, the plane mirror adjustment mechanism includes a linear drive mechanism and a gear rack mechanism, the linear drive mechanism has a slider and a vertically arranged slide bar; the gear rack mechanism includes a rack 1 and a rack 2 installed on both sides of the slider, a No. 1 gear meshed with the rack 1 is provided on the outer side of the rack 1, and a No. 2 gear and a No. 3 gear are provided on the outer side of the rack 2, and the three are meshed in sequence; and the No. 1 plane mirror is fixedly connected to the first rotating shaft where the No. 1 gear is located, and the No. 2 plane mirror is fixedly connected to the second rotating shaft where the No. 3 gear is located;

[0025] The linear drive mechanism also has a ball nut and a servo motor with a second lead screw, the second lead screw cooperates with the ball nut, and the right end face of the ball nut is fixedly connected with a connecting rod 1; the second connecting rod is connected to the first connecting rod through a first rotating pin, and the other end of the second connecting rod is connected to the slider through a second rotating pin.

[0026] As a preferred technical solution of the present invention, a casing compass slot is provided on the casing for installing a compass, and a photosensitive screen compass slot is also provided on the photosensitive screen; the photosensitive screen is also provided with a radio signal transmitter, a liquid crystal display, a photosensitive screen start button, a continue working button and millimeter scale lines.

[0027] The present invention also proposes a flat surface tiny particle inspection instrument and inspection method, comprising the following steps:

[0028] S1: Start the device and use the photosensitive screen and laser ranging module to measure the distance;

[0029] S2: Use the plane mirror adjustment mechanism to adjust the position of the plane mirror so that the laser emitted by the laser transmitter is always within the detection area;

[0030] S3: The laser transmitter is reset to the initial position, and then the laser transmitter runs at a certain speed to scan the detection area;

[0031] S4: Determine whether the laser on the photosensitive screen is abnormal. When the laser on the photosensitive screen is abnormal, the photosensitive screen records the Y-direction coordinate value and the rotation angle value of the laser emitter;

[0032] S5: The photosensitive screen controls the laser transmitter to rotate to the position of the recorded angle value through wireless communication;

[0033] S6: The photosensitive screen controls the lifting mechanism through wireless communication to load the concave lens into the optical path;

[0034] S7: Calculate the X-axis position of the micro-particles, and then display the X-axis coordinates of the micro-particles on the LCD screen;

[0035] S8: The operator cleans the micro particles and manually confirms that step S4 again determines whether the laser on the photosensitive screen is abnormal;

[0036] S9: Repeat steps S5 to S8 to search for and clean the remaining micro particles until all the micro particles are cleaned.

[0037] The flat surface tiny particle inspection instrument provided by the present invention can quickly and efficiently detect and locate tiny particles existing on the flat ground, and can promptly remind the operator to accurately remove tiny particles on the flat ground when a tiny particle is found on the flat ground, thereby greatly improving the cleaning effect of the flat surface; the present invention has the advantages of simple structure, short detection and positioning time, and high reliability.

[0038] In addition to the above-described purposes, features and advantages, the present application also has other purposes, features and advantages. The present application will be further described in detail with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The drawings constituting part of the present application are used to provide a further understanding of the present application. The exemplary embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0040] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0041] Figure 2It is a structural schematic diagram of the housing and related mechanisms of the present invention;

[0042] Figure 3 A schematic structural diagram of the photosensitive screen of the present invention;

[0043] Figure 4 , 5 It is a structural schematic diagram of the plane mirror adjustment mechanism of the present invention;

[0044] Figure 6 It is a schematic diagram of the structure of the acceleration gear mechanism of the present invention;

[0045] Figure 7 It is a schematic diagram of the structure of the laser emission assembly of the present invention;

[0046] Figure 8 It is a structural schematic diagram of the concave lens loading mechanism of the present invention;

[0047] Fig. 9 It is a structural schematic diagram of the lifting mechanism of the present invention;

[0048] Fig.10 It is a structural schematic diagram of the internal gear ring transmission assembly of the present invention;

[0049] Fig.11 is a cross-sectional view of a portion of the optical element and housing of the present invention;

[0050] Fig.12 It is the optical principle front view of the present invention;

[0051] Fig.13 The optical principle of the present invention is viewed from above Figure 1 ;

[0052] Fig.14 The optical principle of the present invention is viewed from above Figure 2 ;

[0053] Fig.15 It is a structural schematic diagram of the coordinate axis of the present invention;

[0054] Fig.16 It is a structural schematic diagram of the start button of the present invention;

[0055] FIG17 is a flowchart of the present invention;

[0056] Fig.18 It is a flow chart of the steps of the method for inspecting tiny particles on a flat surface of the present invention;

[0057] Description of Reference Numerals

[0058] 1. Plane mirror adjustment mechanism; 2. Acceleration gear mechanism; 3. Laser emission assembly; 4. Concave lens loading mechanism; 5. Lifting mechanism; 6. Internal gear transmission assembly; 7. Optical device group; 8. Casing; 9. Photosensitive screen;

[0059] 101, supporting sheet metal; 102, servo motor; 103, ball nut; 104, lead screw 2; 105, connecting rod 1; 106, rotating pin 1; 107, connecting rod 2; 108, slider; 109, rotating pin 2; 110, rack 2; 111, rack 1; 112, slider; 113, gear No. 1; 114, bearing 1; 115, bearing 2; 116, gear No. 2; 117, gear No. 3; 118, gear mounting seat; 119, first rotating shaft; 120, second rotating shaft;

[0060] 201, first stage gear set; 202, second stage gear set; 203, third stage gear set; 204, spur-bevel gear; 205, bevel gear shaft;

[0061] 301, light shield No. 1; 302, gear No. 4; 303, inner gear ring; 304, laser transmitter; 305, supporting sheet metal No. 2; 306, light shield No. 2; 307, servo motor No. 2;

[0062] 401, guide rod; 402, lead screw 1; 403, slide rail; 404, lead screw nut seat; 405, No. 2 connecting rod; 406, No. 2 parallel connecting rod; 407, No. 3 connecting rod; 408, No. 4 parallel connecting rod; 409, No. 4 connecting rod; 411, slide rail slider; 412, laser ranging module;

[0063] 501, L-shaped slide; 502, wedge block No. 2; 503, wedge block No. 1; 504, servo; 505, lifting slide block; 506, lifting guide plate;

[0064] 601, baffle; 602, bearing No. 3; 603, gear No. 5; 604, bearing No. 4; 605, bearing No. 5; 606, stopper sheet metal No. 2; 607, bearing No. 6; 608, gear No. 6; 609, inner gear No. 2; 610, stopper sheet metal No. 1;

[0065] 701, concave lens; 702, convex lens; 703, plane mirror; 704, plane mirror No. 1; 705, plane mirror No. 2; 706, parabolic mirror; 801, compass slot of the casing; 802, start button;

[0066] 901. Compass slot on photosensitive screen; 902. Central processing module; 903. Radio signal transmitter; 904. Photosensitive surface; 905. Liquid crystal display; 906. Start button on photosensitive screen; 907. Continue working button; 908. Millimeter scale line. DETAILED DESCRIPTION

[0067] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0068] like Figure 1 to Figure 1 As shown in FIG. 7 , the flat surface micro-particle inspection instrument of the present invention comprises: a housing 8, a plane mirror adjustment mechanism 1 near the inner wall of the right end of the housing 8, an acceleration gear mechanism 2 located in the middle of the entire housing 8, a laser emitting assembly 3 also located in the middle of the entire housing 8, a concave lens loading mechanism 4 located at the lower end of the laser emitting assembly 3, a lifting mechanism 5 located at the left end of the concave lens loading mechanism 4, an inner gear ring transmission assembly 6 for transmission connection between the acceleration gear mechanism 2 and the concave lens loading mechanism 4, and an optical device group 7; and also includes a photosensitive screen 9 for detecting laser signals and responsible for data calculation and processing. Among them, the optical device group 7 includes a plane mirror No. 1 704, a plane mirror No. 2 705, a parabolic mirror 706, a plane mirror No. 3 703 and a convex lens 702 in sequence along the path where the laser passes, and also includes a selectively inserted concave lens 701.

[0069] Specifically, the housing 8 serves to limit the working positions of the plane mirror adjustment mechanism 1, the laser emitting assembly 3, the lifting mechanism 5, the inner ring gear transmission assembly 6, and the optical device group 7; the housing 8 includes a start button 802, and the start button 802 can turn the mechanism in the housing 8 on or off.

[0070] The housing is provided with a housing compass slot 801 for installing a compass, and the photosensitive screen 9 is also provided with a photosensitive screen compass slot 901 to achieve the same purpose as the housing compass slot 801. The laser can be vertically irradiated on the photosensitive screen 9 by the directions of the compass installed in the housing compass slot 801 and the compass installed in the photosensitive screen compass slot 901.

[0071] like Figure 4 and Figure 5 As shown, the plane mirror adjustment mechanism 1 occupies the two sides and the middle position of the flat surface micro-particle inspection instrument, and the laser beam emitted by the laser light source is irradiated on the parabolic mirror through two parallel plane mirrors. The plane mirror adjustment mechanism 1 includes a linear drive mechanism and a gear rack mechanism, and the linear drive mechanism includes a slider 108 and a vertically arranged slide bar 112.

[0072] The linear drive mechanism also has a ball nut 103 and a servo motor 102 with a lead screw 104, the lead screw 104 cooperates with the ball nut 103, and the servo motor 102 is fixedly connected to the inner wall of the upper end of the casing 8 by a supporting sheet metal 101; the connecting rod 105 is fixedly connected to the right end face of the ball nut 103; the connecting rod 107 is connected to the connecting rod 105 through a turn pin 106, and the other end of the connecting rod 107 is connected to the slider 108 through a turn pin 109; the slider 108 is installed on the slide bar 112 and moves up and down along the slide bar 112 under the drive of the servo motor 102.

[0073] The rack and pinion mechanism includes a rack 111 and a rack 2 110 installed on both sides of the slider 108, a number one gear 113 meshes with the rack 1 111, the number one gear 113 is installed on a first rotating shaft 119, and the first rotating shaft 119 is rotatably connected to the housing 8 through a bearing 114; a number one plane mirror 704 is fixedly connected to the first rotating shaft 119 where the number one gear 113 is located; a number two gear 116 meshes with the rack 2 110, and a number three gear 117 of the same size is added to the outer side of the number two gear 116, the number three gear 117 meshes with the number two gear 116, and the number two gear 116 is limited by a gear mounting seat 118, and the number two plane mirror 705 is fixedly connected to the second rotating shaft 120 where the number three gear 117 is located; the end of the second rotating shaft 120 is rotatably connected to the housing 8 through a bearing 2 115.

[0074] The plane mirror adjustment mechanism 1 occupies the two sides and the middle position of the flat surface micro-particle inspection instrument. The laser beam emitted by the laser light source is irradiated on the parabolic mirror through two parallel plane mirrors. When the plane mirror needs to be adjusted, it is only necessary to make the servo motor 102 rotate back and forth within a certain angle range; the working effect of the plane mirror adjustment mechanism 1 is to cooperate with the plane mirror 703 so that the laser emitted from the housing is within a limited range in the vertical direction.

[0075] Specifically, the laser emitting assembly 3 is located at the upper end of the internal cavity of the casing, and is used to emit a parallel laser beam with a certain diameter. It also serves as a power source for the acceleration gear mechanism 2, the concave lens loading mechanism 4 and the inner ring gear transmission assembly 6 to output power.

[0076] like Figure 2 , Figure 6 to Figure 11 As shown, the laser emitting assembly 3 is transmission-connected with the acceleration gear mechanism 2, and the inner ring gear transmission assembly 6 is transmission-connected with the acceleration gear mechanism 2 and the concave lens loading mechanism 4 respectively.

[0077] The laser emitting assembly 3 includes a rotating mechanism and a laser emitter 304; the rotating mechanism includes a servo motor 2 307, a fourth gear 302, an inner gear ring 303 and a second supporting sheet metal 305; the fourth gear 302 is installed on the motor shaft of the servo motor 2 307, and the inner gear ring 303 is respectively meshed with the fourth gear 302 and the first-stage gear set 201 in the acceleration gear mechanism 2; the acceleration gear mechanism 2 is then connected to the concave lens loading mechanism 4; at the same time, the lifting mechanism 5 is connected to one end of the concave lens loading mechanism 4.

[0078] The servo motor 2 307 is a power source, so that the inner gear ring 303 and the lead screw 1 402 in the concave lens loading mechanism 4 have a certain transmission ratio, ensuring that when the laser is emitted outward from the housing 8, the concave lens 701 is always located at the upper end of the optical path, making it convenient for the concave lens 701 to load or withdraw from the optical path at any time.

[0079] The No. 2 supporting sheet metal 305 fastens the servo motor No. 2 307; the No. 2 supporting sheet metal 305 is fastened together by the No. 1 light baffle 301 and the No. 2 light baffle 306; the housing 8 fastens the No. 1 light baffle 301 and the No. 2 light baffle 306; the laser emitting assembly 3 is driven by the servo motor No. 2 307 to directly rotate the No. 4 gear 302, the No. 4 gear 302 is meshed with the No. 1 inner gear ring 303, and the laser emitter 304 is fastened to the No. 1 inner gear ring 303 to move.

[0080] The laser emitter 304 always emits laser during the working cycle of the flat surface fine particle inspection instrument. The laser emitted by the laser emitter 304 is refracted by the No. 1 plane mirror 704 and the No. 2 plane mirror 705 and irradiated on the parabolic mirror 706. Then, through the focusing effect of the parabolic mirror 706, the laser refracted by the No. 1 plane mirror 704 and the No. 2 plane mirror 705 is always refracted through a certain focal point. Since the convex lens 702 and the parabolic mirror 706 are cofocal, the laser is refracted by the No. 3 plane mirror 703 and then experiences the refraction effect of the convex lens 702, so that the originally emitted laser is parallel at every moment during the working cycle of the quasi-flat surface fine particle inspection instrument.

[0081] like Figure 2 , Figure 6 As shown, the acceleration gear mechanism 2 is fastened to the second supporting sheet metal 305; the acceleration gear mechanism 2 transmits power from the laser emitting assembly 3 to the inner ring gear transmission assembly 6 by meshing with the inner ring gear in the laser emitting assembly 3, and then the inner ring gear transmission assembly 6 transmits the power to the concave lens loading mechanism 4.

[0082] The acceleration gear mechanism 2 includes a first-stage gear set 201, a second-stage gear set 202, a third-stage gear set 203, a spur-bevel gear 204 and a bevel gear shaft 205; the small teeth on the upper end of the first-stage gear set 201 mesh with the first inner gear ring 303, the large teeth on the lower end of the first-stage gear set 201 mesh with the small teeth on the upper end of the second-stage gear set 202, the large teeth on the lower end of the second-stage gear set 202 mesh with the small teeth on the upper end of the third-stage gear set 203, and the third-stage gear set 203 meshes with the small teeth on the upper end of the third-stage gear set 204. The gear set 203 is meshed with the spur teeth on the upper end of the spur-bevel gear 204 for transmission, and the spur-bevel gear 204 is meshed with the bevel gear shaft 205 for transmission; the first-stage gear set 201 serves as the input end of the gear set, and the bevel gear shaft 205 serves as the output end of the gear set, so that the gear set can transmit the rotational speed of the No. 1 internal gear ring 303 in the laser emitting assembly 3 to the bevel gear shaft 205 at a certain transmission ratio, and output it to the No. 5 gear 603 of the internal gear ring transmission assembly 6 at a certain high rotational speed.

[0083] The inner ring gear transmission assembly 6 is located on one side of the cavity in the casing, and the inner ring gear transmission assembly 6 includes a baffle 601, a No. 2 inner ring gear 609, a No. 5 gear 603, a No. 6 gear 608, a number of bearings and a number of limiting sheet metals; the several bearings include a No. 3 bearing 602, a No. 4 bearing 604, a No. 5 bearing 605 and a No. 6 bearing 607; the limiting sheet metal includes a No. 1 limiting sheet metal 610 and a No. 2 limiting sheet metal 606.

[0084] The baffle 601 serves as the main body of the inner gear ring transmission assembly 6; the baffle 601 is fastened by the casing 8; the position of the second inner gear ring 609 is limited by the baffle 601, the third bearing 602, the fourth bearing 604, the fifth bearing 605, the sixth bearing 607 and the first limiting sheet metal 610 and the second limiting sheet metal 606.

[0085] The fifth gear 603 and the sixth gear 608 are respectively meshed with the second inner gear ring 609, wherein the fifth gear 603 is fastened to the lead screw 402 of the concave lens loading mechanism 4; the fifth gear 603 serves as the input end of the inner gear ring transmission assembly 6, and the sixth gear 608 serves as the output end of the inner gear ring transmission assembly 6; so that the bevel gear shaft 205 is indirectly connected to the lead screw 402 in transmission.

[0086] Since the number of teeth of gear No. 6 608 is less than that of gear No. 5 603, the operating speed at the output end in the inner ring gear transmission assembly 6 is greater than the operating speed at the input end; the outer surface of the No. 2 inner ring gear 609 in the inner ring gear transmission assembly 6 is designed to exceed the outer surface boundary of the housing 8, so that the rotation of the laser emitter 304 can be manually controlled or the state of the transmission inner ring gear can be observed.

[0087] like Figure 8As shown, the concave lens loading mechanism 4 includes a guide rod 401, a lead screw 402, a slide rail 403, a lead screw nut seat 404, a multi-link assembly, a slide rail slider 411 and a laser ranging module 412; wherein the multi-link assembly includes a second link 405, a second parallel link 406, a third link 407, a fourth link 409 and a fourth parallel link 408.

[0088] The concave lens loading mechanism 4 drives the screw nut seat 404 to move forward and backward along the screw direction through the screw 1 402, and is guided by the guide rod 401 at the same time. The screw nut seat 404 transmits the power of moving forward and backward along the screw 1 402 to the slide block 411 through the No. 2 connecting rod 405, the No. 2 parallel connecting rod 406, the No. 3 connecting rod 407, the No. 4 connecting rod 409, and the No. 4 parallel connecting rod 408. The slide block 411 slides on the slide rail 403. The lower end of the slide block 411 is fastened with the concave lens 701, and the laser ranging module 412 is fixedly connected to the rear end face of the slide block 411; the laser ranging module 412 is for measuring the distance between the convex lens 702 and the photosensitive screen 9.

[0089] Among them, since the movement mode of the laser emitter 304 is left and right swinging, when the laser emitter 304 swings with the inner gear ring 303, the moving speed of the light on the plane mirror No. 1 704 is variable, so the lead screw 402 is a variable pitch lead screw, and the pitch of the lead screw 402 gradually increases from the middle to the two ends; when the laser emitted by the laser emitter 304 is output through the convex lens 702, the concave lens 701 is just above the output laser light path.

[0090] like Fig. 9 As shown, the lifting mechanism 5 includes an L-shaped slide 501, a second wedge block 502, a first wedge block 503, a steering gear 504, a lifting slider 505 and a lifting guide plate 506; an arc groove is provided on the first wedge block 503, and the output shaft of the steering gear 504 cooperates with the arc groove on the first wedge block 503 to drive the first wedge block 503 to move left and right along the lower edge of the L-shaped slide 501.

[0091] The lifting mechanism 5 controls the rotation of the servo 504 according to the shadow information fed back by the photosensitive screen 9. The servo 504 drives the No. 1 wedge block 503 to move left and right along the horizontal slide of the L-shaped slide 501 through the arc groove. The No. 1 wedge block 503 then drives the No. 2 wedge block 502 to lift or press down along the vertical slide of the L-shaped slide 501; the No. 2 wedge block 502 drives the slide rail 403 to move up and down with the same amplitude during the process of lifting or sliding down along the upper end slide of the L-shaped slide 501; the other end of the slide rail 403 is connected to the lifting slider 505, and the lifting slider can only move up and down in the lifting guide plate 506; the servo 504, L-shaped slide 501, and lifting guide plate 506 of the lifting mechanism 5 are fixedly connected to the casing 8.

[0092] like Fig. 9 As shown, the lifting mechanism 5 drives the No. 1 wedge block 503 to move left and right along the lower edge of the L-shaped slide groove 501 through the servo 504. When the No. 1 wedge block 503 moves left and right, the No. 2 wedge block 502 is lifted up or slides down in the vertical direction at the same time; the No. 2 wedge block 502 is fixedly connected to the slide rail 403; combined with the screw nut seat 404, the multi-link assembly and the slide rail slider 411 included in the concave lens loading mechanism 4, the loading or withdrawal of the concave lens 701 from the optical path can be realized.

[0093] The lifting mechanism 5 can be linked with the laser emitting assembly 3, the acceleration gear mechanism 2, and the inner ring gear transmission assembly 6 to achieve that when it is necessary to load a concave lens 701 in the laser light path, when the laser emitted by the laser emitter 304 is output through the convex lens 702, the slide rail slider 411 is just above the output laser light path; the function of the concave lens 701 is to diverge the laser that has been output through the convex lens 702; the light path is parallel everywhere at any time; and the width of the concave lens 701 is slightly larger than the diameter of the parallel light beam emitted by the laser emitter 304.

[0094] like Figure 1 and Figure 3 As shown, the photosensitive screen 9 has the photosensitive screen compass groove 901 on the top, and the casing 8 has the casing compass groove 801 on the top, wherein the installed compass serves as a placement indicator to ensure that the laser emitted from the casing 8 is vertically irradiated on the photosensitive screen 9.

[0095] The photosensitive screen 9 also includes a radio signal transmitter 903, a central processing module 902, a photosensitive surface 904, a liquid crystal display screen 905, a photosensitive screen start button 906, a continue working button 907 and a millimeter scale line 908; wherein the photosensitive surface 904 records the interference of the laser light path and feeds it back to the central processing module 902, and the central processing module 902 starts to calculate and control the various mechanisms in the housing 8 by controlling the radio signal transmitter 903. At the same time, the central processing module 902 displays the information and coordinates of the tiny particles detected and located on the flat surface on the liquid crystal display screen 905.

[0096] The photosensitive screen 9 calculates and processes the shielding conditions of the irradiated laser, and controls the above-mentioned mechanism to adjust and operate through radio signals, and displays the information and coordinates of the tiny particles existing on the plane on the liquid crystal display thereon.

[0097] like Figure 1 and Figure 3As shown, the laser emitting side of the housing 8 is placed parallel to the photosensitive surface 904; the plane range of the photosensitive surface 904 is larger than the side curved projection area of ​​the convex lens 702, so when placed, the photosensitive surface needs to completely cover the area that the laser can irradiate; the area between the laser emitting side of the housing 8 and the photosensitive surface 904 is the area to be measured. The coordinate axes of the instrument are shown as follows Fig.15 As shown, the X-axis and Y-axis directions are shown.

[0098] The millimeter scale line 908 serves to assist the operator in finding the tiny particles on the ground by comparing the coordinates; the photosensitive screen 9 feeds back the obstruction of the irradiated laser to the central processing module 902 through the photosensitive surface 904 for calculation and processing, and at the same time transmits a radio signal through the radio signal transmitter 903 to control the adjustment and operation of the above-mentioned mechanism and display the information and coordinates of the tiny particles on the plane on the liquid crystal display 905 thereon; the photosensitive screen start button 906 serves to turn on or off the photosensitive screen, and the continue working button 907 is a component for continuing to operate. After the operator determines that the tiny particles detected and located by the instrument have been cleaned up, the continue working button 907 applies to the central processing module 902 to allow the relevant mechanism in the housing 8 to continue to operate.

[0099] The working process of the flat surface fine particle inspection instrument of the present invention is briefly described below in conjunction with Figure 17.

[0100] First, the operator uses the housing compass slot 801 and the photosensitive screen compass slot 901 to press Figure 1 After the arrangement is completed, the operator presses the start button 802 and the photosensitive screen start button 906 on the housing 8 and the photosensitive screen 9. After the start, the plane mirror adjustment mechanism 1, the laser transmitter 304 and the laser distance measurement module 412 start working first.

[0101] Then, when the plane mirror adjustment mechanism 1 and the laser emitter 304 jointly with the photosensitive screen 9 confirm that the incident laser is in the detection area, the plane mirror adjustment mechanism 1 stops working and stops moving; when the laser ranging module 412 returns accurate data, the laser ranging module 412 stops working.

[0102] Then, the laser emitting assembly 3 uses the servo motor 2 307 to quickly reset the laser emitter 304 to the starting position. After the laser emitter 304 is reset to the starting position, the servo motor 2 307 starts to rotate at a certain speed and direction.

[0103] When the servo motor 2 307 starts to rotate, the lead screw 1 402 directly ensures a fixed transmission ratio between the servo motor 2 307 and the lead screw 1 402 through the joint acceleration effect of the acceleration gear mechanism 2 and the inner ring gear transmission assembly 6, and at the same time indirectly ensures that the concave lens 701 can always be located directly above the emitted laser beam, making it convenient for the concave lens to load or withdraw from the optical path.

[0104] During the period from when the servo motor 2 307 moves from the initial position to when the laser beam emitted exceeds the photosensitive range of the photosensitive surface 904, if no abnormality occurs to the laser incident on the photosensitive surface 904, the LCD screen 905 on the photosensitive screen 9 will display "No tiny particles are detected in this area".

[0105] If the laser incident on the photosensitive surface is abnormal, the photosensitive screen 9 controls the mechanism in the housing 8 through the central processing module 902 and the radio signal transmitter 903 to continue to move until the laser incident on the photosensitive surface returns to normal. In this process, the rotation angle data of the servo motor 2 307 is recorded, and at the same time, the liquid crystal display screen 905 thereon displays "there are tiny particles in this area" and displays the Y-axis coordinate of the tiny particles;

[0106] Then, the central processing module 902 controls the servo motor 2 through the radio signal transmitter 903 to rotate the laser transmitter 304 to the recorded median angle, and then the central processing module 902 controls the lifting mechanism 5 through the radio signal transmitter 903 to load the concave lens 701 into the optical path, and waits for the recorded laser beam to be scattered by the concave lens 701 and incident on the photosensitive surface 904. After calculating the X-axis position of the micro-particle, the X-axis coordinate of the tiny particle is displayed on the liquid crystal display 905.

[0107] At this time, all the mechanisms in the casing 8 stop moving. The operator needs to clean up the tiny particles at the coordinate position and then press the continue working button 907 on the photosensitive screen 9. The relevant mechanisms in the casing 8 will continue to operate until an abnormality occurs in the laser incident on the photosensitive surface or the next abnormality occurs in the laser incident on the photosensitive surface.

[0108] Finally, the detection and positioning functions of tiny particles on the flat surface are completed.

[0109] It should be noted that the standby included in the figure means that all mechanisms stop running and only the photosensitive screen remains in a responsive state.

[0110] In combination with the working process of the flat surface micro-particle inspection instrument, the present invention also proposes a flat surface micro-particle inspection method, comprising the following steps:

[0111] S1: Start the device and use the photosensitive screen and laser ranging module to measure the distance;

[0112] S2: Use the plane mirror adjustment mechanism to adjust the position of the plane mirror so that the laser emitted by the laser transmitter is always within the detection area;

[0113] S3: The laser transmitter is reset to the initial position, and then the laser transmitter runs at a certain speed to scan the detection area;

[0114] S4: Determine whether the laser on the photosensitive screen is abnormal. When the laser on the photosensitive screen is abnormal, the photosensitive screen records the Y-direction coordinate value and the rotation angle value of the laser emitter;

[0115] S5: The photosensitive screen controls the laser transmitter to rotate to the position of the recorded angle value through wireless communication;

[0116] S6: The photosensitive screen controls the lifting mechanism through wireless communication to load the concave lens into the optical path;

[0117] S7: Calculate the X-axis position of the micro-particles, and then display the X-axis coordinates of the micro-particles on the LCD screen;

[0118] S8: The operator cleans the micro particles and manually confirms that step S4 again determines whether the laser on the photosensitive screen is abnormal;

[0119] S9: Repeat steps S5 to S8 to search for and clean the remaining micro particles until all the micro particles are cleaned.

[0120] The working principle of the flat surface fine particle inspection instrument and inspection method of the present invention is briefly described below in conjunction with the accompanying drawings.

[0121] First, the casing and the photosensitive screen are placed in parallel relative to each other on a flat ground with the compass mounted on the casing and the compass pointer on the photosensitive screen in the direction of each other. The area between the casing and the photosensitive screen is the area to be tested. The machine is turned on. At this time, the laser light source is reset at a certain angle through the servo motor, and the laser ranging module starts to measure the distance between the convex lens and the photosensitive surface, and then the laser light source is turned on. At this time, the photosensitive screen starts to process the laser signal. At the same time, the servo motor in the plane mirror adjustment mechanism starts to rotate back and forth within a certain rotation angle and fine-tune the rotation angle through the signal fed back by the photosensitive screen, so that the detection area can finally detect tiny particles in a rectangular area. Then the servo motor in the plane mirror adjustment mechanism keeps running back and forth at high speed within this fine-tuned rotation angle. At this time, the servo motor in the laser transmitter starts to rotate slowly from the initial angle, thereby driving the slider and the concave lens in the concave lens loading mechanism to run quickly.

[0122] If the servo motor has not stopped during the entire workflow, the photosensitive screen will feedback through the LCD screen that it has not detected any tiny particles in the area.

[0123] If the photosensitive screen detects an abnormal laser signal during the entire workflow, the photosensitive screen will first feedback that there are tiny particles at that location and give the distance of the tiny particles along the normal direction of the side of the casing. Then the photosensitive screen will give the servo motor in the laser transmitter a command to continue running until the laser can be irradiated on the photosensitive screen again - in this process, the rotation angle of the servo motor in the laser transmitter is recorded. Then the photosensitive screen will give the steering gear in the lifting mechanism a running command to make the concave lens fall and load in the optical path. Then the photosensitive screen will give the servo motor in the laser transmitter a command to set to the midpoint value within the abnormal angle it records, so that the photosensitive screen can calculate the specific position of the tiny particles. After the specific position is obtained, the photosensitive screen will give a pause command to all the mechanisms in the casing and display the information and coordinates of the tiny particles on the plane on the LCD until the tiny particles are cleared. After the personnel start the instrument again, the mechanisms in the casing cooperate with the photosensitive screen to complete the detection and positioning procedures of the tiny particles in the remaining space.

[0124] The flat surface tiny particle inspection instrument provided by the present invention accelerates the lead screw together through the acceleration gear mechanism and the transmission inner gear ring, so that the concave lens in the concave lens loading mechanism can always be located directly above the output light path, making it easy for the concave lens in the concave lens loading mechanism to be withdrawn from the light path or loaded into the light path.

[0125] The photosensitive screen feeds back the blocking of the laser irradiated on its photosensitive surface and is analyzed and processed by the central processing module as follows: when the concave lens in the concave lens loading mechanism is not loaded into the light path, the light path emitted from the convex lens is parallel everywhere in the spatial position of each time period; therefore, when there are tiny particles in the rectangular area to be detected, the laser cannot irradiate the photosensitive surface or the light path is disordered due to the presence of the tiny particles. At this time, the servo motor in the laser transmitter continues to run until the laser can be irradiated on the photosensitive surface normally again. At this time, the photosensitive screen sends an operation signal to the servo in the lifting mechanism and sends a signal to the laser emitter at the same time. The servo motor in the device issues a command to rotate back and forth within a certain angle. When the servo in the lifting mechanism is operated, the second wedge block in the lifting mechanism falls down. At this time, the concave lens in the concave lens loading mechanism is loaded into the light path, so that the original light path is scattered in the spatial position of each time period. Therefore, the light path changes from the original rectangular detection area to a fan-shaped detection area; therefore, by comparing the area where the laser fails to hit the photosensitive surface normally without loading the concave lens and after loading the concave lens, the photosensitive surface feeds back the data of the area to the central processing module for calculation to obtain the specific position of the tiny particles, thereby completing the positioning function.

[0126] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A flat surface micro-particle inspection instrument, characterized in that: The invention comprises a housing (8) and a photosensitive screen (9) for detecting laser signals and responsible for data calculation and processing, and also comprises: A laser emitting assembly (3), comprising a rotating mechanism and a laser emitter (304); An optical device group (7), which includes a first plane mirror (704), a second plane mirror (705), a parabolic mirror (706), a third plane mirror (703) and a convex lens (702) in sequence along the laser path, and also includes a concave lens (701) selectively inserted behind the convex lens (702); The plane mirror adjustment mechanism (1) is respectively connected to the first plane mirror (704) and the second plane mirror (705) which are arranged parallel to each other, and drives the two to rotate synchronously; The concave lens loading mechanism (4) comprises a slide rail slider (411) and a screw nut seat (404) and a screw (402) that cooperate with each other, wherein the concave lens (701) is fixedly connected to the slide rail slider (411) and then floatingly connected to the screw nut seat (404); An acceleration gear mechanism (2) and an inner gear ring transmission assembly (6) are arranged between the rotating mechanism and the lead screw (402) and have a fixed transmission ratio so that the concave lens (701) is always located directly above the output light path; A lifting mechanism (5) is fixedly connected to the slide rail slider (411) and drives the concave lens (701) to be withdrawn from the optical path or loaded into the optical path; The photosensitive screen (9) comprises a central processing module 902 and a photosensitive surface (904) perpendicular to the output light path. The central processing module (902) is respectively connected to the laser emission component (3), the plane mirror adjustment mechanism (1), and the lifting mechanism (5) via signals and controls their operation.

2. The flat surface micro-particle inspection instrument according to claim 1, characterized in that: The rotating mechanism comprises a servo motor 2 (307), a fourth gear (302) and an inner gear ring (303), the laser emitter (304) is mounted on the inner gear ring (303), the fourth gear (302) is mounted on the motor shaft of the servo motor 2 (307), and the inner gear ring (303) and the fourth gear (302) are meshed for transmission; The acceleration gear mechanism (2) comprises a bevel gear shaft (205), a first-stage gear set (201) meshing with the inner gear ring (303), the bevel gear shaft (205) connected to the input end of the inner gear ring transmission component (6), and the lead screw (402) connected to the output end of the inner gear ring transmission component (6).

3. The flat surface micro-particle inspection instrument according to claim 2, characterized in that: The concave lens loading mechanism (4) comprises a slide rail (403), a slide rail slider (411) and a multi-link assembly; the rotating mechanism drives the screw nut seat (404) to move horizontally on the lead screw (402); the concave lens (701) is connected to the screw nut seat (404) via the slide rail slider (411) and the multi-link assembly, and moves synchronously with the slide rail slider (411) on the slide rail (403); and both ends of the slide rail (403) are connected to the lifting mechanism (5).

4. The flat surface micro-particle inspection instrument according to claim 3, characterized in that: The lead screw 1 (402) is a variable pitch lead screw, and the pitch of the lead screw 1 (402) gradually increases from the middle to both ends. When the laser emitted by the laser emitter (304) is output through the convex lens (702), the concave lens (701) is located just above the output laser light path.

5. The flat surface micro-particle inspection instrument according to claim 3, characterized in that: The lifting mechanism (5) comprises an L-shaped slide groove (501), a second wedge block (502), a first wedge block (503), a steering gear (504), a lifting slider (505) and a lifting guide plate (506); The output shaft of the steering gear (504) cooperates with the arc groove on the first wedge block (503) and drives the first wedge block (503) to move left and right along the horizontal groove of the L-shaped groove (501), thereby driving the second wedge block (502) to be lifted up or pressed down along the vertical groove of the L-shaped groove (501); One end of the slide rail (403) is connected to the second wedge block (502), and the other end of the slide rail (403) is connected to the lifting slider (505) arranged in the lifting guide plate (506); thereby, the lifting and lowering of the concave lens (701) is realized by the rotation of the steering gear (504); wherein the steering gear (504) is communicatively connected to the central processing module (902).

6. The flat surface micro-particle inspection instrument according to claim 2, characterized in that: The inner gear ring transmission assembly (6) is located at one side of the cavity in the housing, and the inner gear ring transmission assembly (6) comprises a baffle (601), a second inner gear ring (609), a fifth gear (603) and a sixth gear (608); The position of the second inner gear ring (609) is jointly limited by a baffle (601), a plurality of bearings and a plurality of limit sheet metals; the fifth gear (603) and the sixth gear (608) are respectively meshed with the second inner gear ring (609), wherein the sixth gear (608) is connected to the lead screw 1 (402); the fifth gear (603) is connected to the output end of the acceleration gear mechanism (2).

7. The flat surface micro-particle inspection instrument according to claim 2, characterized in that: The acceleration gear mechanism (2) further comprises a second-stage gear set (202), a third-stage gear set (203) and a spur-bevel gear (204); the small teeth on the upper end of the first-stage gear set (201) mesh with the first inner gear ring (303), the large teeth on the lower end of the first-stage gear set (201) mesh with the small teeth on the upper end of the second-stage gear set (202) for transmission, the large teeth on the lower end of the second-stage gear set (202) mesh with the small teeth on the upper end of the third-stage gear set (203) for transmission, the third-stage gear set (203) meshes with the spur teeth on the upper end of the spur-bevel gear (204) for transmission, and the spur-bevel gear (204) meshes with the bevel gear shaft (205) for transmission.

8. The flat surface micro-particle inspection instrument according to claim 1, characterized in that: The plane mirror adjustment mechanism (1) comprises a linear drive mechanism and a gear rack mechanism, wherein the linear drive mechanism comprises a slider (108) and a vertically arranged slide bar (112); the gear rack mechanism comprises a rack 1 (111) and a rack 2 (110) mounted on both sides of the slider (108); a first gear (113) meshing with the rack 1 (111) is disposed on the outer side of the rack 1 (111); a second gear (116) and a third gear (117) are disposed on the outer side of the rack 2 (110), and the three gears are meshed in sequence; and the first plane mirror (704) is fixedly connected to a first rotating shaft (119) where the first gear (113) is located, and the second plane mirror (705) is fixedly connected to a second rotating shaft (120) where the third gear (117) is located; The linear drive mechanism also comprises a ball nut (103) and a servo motor (102) with a second lead screw (104), the second lead screw (104) cooperates with the ball nut (103), and a connecting rod (105) is fixedly connected to the right end surface of the ball nut (103); the second connecting rod (107) is connected to the first connecting rod (105) through a first rotating pin (106), and the other end of the second connecting rod (107) is connected to a slider (108) through a second rotating pin (109).

9. The flat surface micro-particle inspection instrument according to claim 1, characterized in that: The housing (8) is provided with a housing compass slot (801) for installing a compass, and the photosensitive screen (9) is also provided with a photosensitive screen compass slot (901); the photosensitive screen (9) is also provided with a radio signal transmitter (903), a liquid crystal display screen (905), a photosensitive screen start button (906), a continue working button (907) and millimeter scale lines (908).

10. A method for testing flat surface micro-particles, based on the flat surface micro-particle testing instrument according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1: Start the device and use the photosensitive screen and laser ranging module to measure the distance; S2: Use the plane mirror adjustment mechanism to adjust the position of the plane mirror so that the laser emitted by the laser transmitter is always within the detection area; S3: The laser transmitter is reset to the initial position, and then the laser transmitter runs at a certain speed to scan the detection area; S4: Determine whether the laser on the photosensitive screen is abnormal. When the laser on the photosensitive screen is abnormal, the photosensitive screen records the Y-direction coordinate value and the rotation angle value of the laser emitter; S5: The photosensitive screen controls the laser transmitter to rotate to the position of the recorded angle value through wireless communication; S6: The photosensitive screen controls the lifting mechanism through wireless communication to load the concave lens into the optical path; S7: Calculate the X-axis position of the micro-particles, and then display the X-axis coordinates of the micro-particles on the LCD screen; S8: The operator cleans the micro particles and manually confirms that step S4 again determines whether the laser on the photosensitive screen is abnormal; S9: Repeat steps S5 to S8 to search for and clean the remaining micro particles until all the micro particles are cleaned.

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