Door opening mechanism, loading port and front-end module

Abstract

The invention provides a door opening mechanism, a loading port and a front end module, the door opening mechanism comprises a door plate, a first lock cylinder and a second lock cylinder, the first lock cylinder and the second lock cylinder are rotatably arranged on the door plate, the door opening mechanism further comprises a driving part, the driving part is arranged on the door plate, and the driving part is used for driving the first lock cylinder to rotate; the connecting rod assembly is connected with the first lock cylinder and the second lock cylinder so that the first lock cylinder and the second lock cylinder can rotate synchronously. According to the door opening mechanism, due to the fact that the first lock cylinder and the second lock cylinder achieve synchronous rotation through the connecting rod assembly, rigid connection is achieved, compared with the prior art, a tensioning wheel is not needed, slipping can be effectively avoided, the transmission process is stable, reliable and free of blockage, and therefore accurate synchronous rotation between the first lock cylinder and the second lock cylinder is achieved; the unlocking synchronization accuracy of the first lock cylinder and the second lock cylinder is improved, and the vibration value of a machine table is optimized.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a door opening mechanism, a loading port and a front-end module. Background Art

[0002] At present, wafers are formed from single crystal silicon after pulling, cutting and polishing. The main processing of wafers is oxidation, photolithography, etching, deposition, interconnection, packaging, etc. In the wafer manufacturing process, a front opening unified pod is required to transport wafers between various processing steps.

[0003] The front-opening standard wafer box is mainly divided into a box body and a front cover door. The front cover door needs to be separated from the box body before loading and unloading the wafers. There are two lock cylinders on the front cover door, which can be used to lock and separate the front cover door from the box body.

[0004] The front-end module of semiconductor equipment (referred to as front-end module) is used to dock with the process chamber for wafer transfer. The wafers in the open standard wafer box enter the interior of the front-end module through the loading port (LoadPort) of the front-end module.

[0005] The loading port has a door opening component for opening the front cover door, and the door opening component cooperates with the two lock cores of the front cover door to unlock and separate the front cover door from the box body. However, when the door opening component in the prior art cooperates with the two lock cores, the two lock cores cannot be accurately unlocked synchronously, which easily causes the machine to vibrate. Summary of the invention

[0006] The present invention aims to at least solve the problem in the prior art that two lock cores cannot be accurately synchronized, and proposes a door opening mechanism for a loading port, a loading port and a front end module.

[0007] In order to achieve the purpose of the present invention, a door opening mechanism is provided, including: a door panel and a first lock core and a second lock core rotatably arranged on the door panel, the door opening mechanism also includes: a driving member arranged on the door panel, the driving member is used to drive the first lock core to rotate; a connecting rod assembly, respectively connected to the first lock core and the second lock core, so that the first lock core and the second lock core rotate synchronously.

[0008] Optionally, the connecting rod assembly includes: a first connecting rod, which is drivingly connected to the first lock core, and the length direction of the first connecting rod is perpendicular to the rotation axis direction of the first lock core; a second connecting rod, which is drivingly connected to the second lock core, and the length direction of the second connecting rod is perpendicular to the rotation axis direction of the second lock core; a linkage rod, which is pivotally connected to the first connecting rod and the second connecting rod respectively, and when the first lock core rotates, the first connecting rod synchronously drives the second connecting rod to rotate through the linkage rod, so that the first lock core and the second lock core rotate synchronously.

[0009] Optionally, the driving member is drivingly connected to the first connecting rod, and the driving member is used to drive the first connecting rod to rotate around the rotation axis of the first lock core, so that the first connecting rod simultaneously drives the first lock core to rotate and the linkage rod to move.

[0010] Optionally, the first end of the first connecting rod is drivingly cooperated with the driving member, the second end of the first connecting rod is pivotally connected to the linkage rod, the first lock core is connected between the first end and the second end of the first connecting rod, and the rotation axis of the first lock core passes through the first connecting rod.

[0011] Optionally, the driving member includes: a shell connected to the door panel; a driving rod, a first end of which is movably disposed in the shell, and a second end of the driving rod is rotatably connected to the first connecting rod, and the driving rod is extended and retracted by moving relative to the shell to drive the first connecting rod to rotate around the rotation axis of the first lock core.

[0012] Optionally, the shell is rotatably connected to the door panel, and the rotation axis of the shell is parallel to the rotation axis of the first lock core.

[0013] Optionally, the driving rod is arranged in parallel with the linkage rod, and the second end of the driving rod is slidably matched with the first connecting rod in the length direction of the first connecting rod.

[0014] Optionally, the length of the linkage rod is adjustable, and the linkage rod adjusts the angle between the first link rod and the second link rod by changing its own length.

[0015] Optionally, the first lock core and the second lock core both have a first state and a second state; the connecting rod assembly is used to enable the first lock core and the second lock core to switch synchronously between the first state and the second state; the door opening mechanism also includes: a first limit member and a second limit member, the first limit member is arranged on the door panel, the first limit member is used to cooperate with the connecting rod assembly in a limiting manner when the first lock core is in the first state, so as to limit the first lock core from continuing to rotate after switching to the first state; the second limit member is arranged on the door panel, the second limit member is used to cooperate with the connecting rod assembly in a limiting manner when the first lock core is in the second state, so as to limit the first lock core from continuing to rotate after switching to the second state.

[0016] Optionally, the door opening mechanism also includes: a blocking member, which is arranged on the connecting rod assembly; and a detection device, which is arranged on the door panel and corresponds to the position of the blocking member, and is used to detect the position of the blocking member to determine the status of the first lock core and / or the second lock core.

[0017] According to a second aspect of the present invention, a loading port is also disclosed, comprising: a main frame and the above-mentioned door opening mechanism, wherein the door opening mechanism is liftably arranged on the main frame.

[0018] The door opening mechanism of the present invention adopts a connecting rod assembly between the first lock core and the second lock core to achieve synchronous rotation, which is a rigid connection. Compared with the related technology that uses a synchronous belt, there will be no problem of the synchronous belt becoming loose. Therefore, slipping can be effectively avoided, thereby achieving precise synchronous rotation between the first lock core and the second lock core, improving the unlocking synchronization accuracy of the first lock core and the second lock core, and optimizing the machine vibration value. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a semiconductor process equipment in the related art;

[0020] Figure 2 It is a structural schematic diagram of a loading port in the related art;

[0021] Figure 3 A three-dimensional diagram of a door opening component in the related art;

[0022] Figure 4 It is a structural schematic diagram of a door opening component in the related art;

[0023] Figure 5 It is a structural schematic diagram of a door opening component according to an embodiment of the present invention;

[0024] Figure 6 It is a schematic structural diagram of a connecting rod assembly and a driving member of a door opening component according to an embodiment of the present invention;

[0025] Figure 7 A schematic diagram of a first lock core of a door opening component in an embodiment of the present invention in a first state;

[0026] Figure 8 It is a schematic diagram of a first lock core of a door opening component in an embodiment of the present invention being between a first state and a second state;

[0027] Fig. 9 A schematic diagram of a first lock core of a door opening component in an embodiment of the present invention being in a second state;

[0028] Fig.10 A schematic structural diagram of a door opening component according to another embodiment of the present invention;

[0029] Fig.11 A schematic structural diagram of a second connecting rod and a shielding member of a door opening component according to an embodiment of the present invention;

[0030] Fig.12 It is an assembly diagram of the first lock core and the second bearing of an embodiment of the present invention;

[0031] List of reference numerals:

[0032] 10. Door panel; 20. First lock core; 21. First main body; 22. First rotating part;

[0033] 221, limiting boss; 23, first plug-in portion; 30, second lock core; 31, second main body;

[0034] 32. second rotating part; 33. second plug-in part; 40. driving member; 41. housing; 42. driving rod; 421. third through hole; 422. connecting shaft; 43. third connecting bolt; 44. fixing nail; 45. speed regulating valve; 50. connecting rod assembly; 51. first connecting rod; 511. waist-shaped hole; 52. second connecting rod; 53. linkage rod; 531. rod body; 532. first adjusting block; 5321. first through hole; 533. second adjusting block; 5331. second through hole; 54. first connecting bolt; 55. second connecting bolt; 56. first bearing; 561. gasket part; 562. sleeve part; 60. second bearing; 61. inner ring; 62. outer ring; 70. fixing bolt; 81. first limiter; 82. second limiter; 83. fixing seat; 91. shielding member; 92. detection device. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the technical solution of the present invention, the door opening mechanism, loading port and front-end module provided by the present invention are described in detail below with reference to the accompanying drawings.

[0036] At present, wafers are formed from single crystal silicon after pulling, cutting and polishing. The main processing of wafers is oxidation, photolithography, etching, deposition, interconnection, packaging, etc. In the wafer manufacturing process, a front opening unified pod is required to transport wafers between various processing steps.

[0037] like Figure 1 As shown, the front-opening standard wafer box 10' is mainly divided into a box body 11' and a front cover door 12'. The front cover door 12' needs to be separated from the box body 11' before loading and unloading the wafers. The front cover door 12' has two lock cores, which realize the locking and separation between the front cover door 12' and the box body 11'.

[0038] like Figure 1 As shown, the front-end module of the semiconductor process equipment is used to dock with the process chamber 40', and the wafers in the front-opening standard wafer box 10' enter the interior of the machine platform 30' of the front-end module through the loading port 20' (Load Port) of the front-end module.

[0039] The overhead hoist transport can realize the automatic transport of the front-opening standard wafer box 10' between processes. The loading port 20' can identify the front-opening standard wafer box 10' delivered by the overhead hoist transport. After a series of positioning and detection actions, the internal robot 31' of the machine 30' of the front-end module transfers the wafer to the process chamber 40' for process processing.

[0040] like Figure 2 and Figure 3 As shown, the loading port 20' is installed on the machine 30' of the front-end module, and its function is to complete the front-end module internal manipulator 31' before and after wafer taking detection and door opening and closing action. The loading port 20' is mainly divided into a main frame 21', a mobile platform 22', a door opening component 23', and a lifting device 24'. The main frame 21' mainly supports, fixes, and installs components and accessories. The mobile platform 22' mainly fixes, detects, clamps, and performs Y-axis movement on the front-opening standard wafer box 10'. The door opening component 23' performs positioning, adsorption, unlocking, and other processing on the front-opening standard wafer box 10'. The lifting device 24' mainly realizes the up and down movement of the door opening component 23'. When the door opening component 23' separates the front cover door 12' from the box body 11', the front cover door 12' is moved to the bottom of the box body 11' by descending, thereby exposing the opening of the box body 11', which is convenient for the manipulator 31' to take and place wafers.

[0041] When in use, the overhead lifting vehicle delivers the front-opening standard wafer box 10', which has completed the previous process, to the mobile platform 22'. After the mobile platform 22' positions, detects, reads RFID and clamps the front-opening standard wafer box 10', it moves the front-opening standard wafer box 10' to the specified position along the Y-axis. When the front-opening standard wafer box 10' moves to the specified position, the door opening component 23' begins to open the door of the front-opening standard wafer box 10'. The Y-axis movement makes the front-opening standard wafer box 10' approach the door opening component 23'. When the sensor senses that the front-opening standard wafer box 10' is close to the door opening component 23', the suction cup begins to adsorb. After the machine receives the vacuum adsorption signal, the unlocking mechanism opens the door of the front-opening standard wafer box 10' and inserts the two lock cores into the lock holes of the front cover door 12' for synchronous rotation of 90°. After the front cover door 12' is rotated into place, After separating from the box body 11', the sensor transmits a completion signal and starts to detect the stacking, tilting, slot crossing, thick wafers and other information of the wafers inside the front-opening standard wafer box 10'. After the detection is correct, the robot starts to take the wafers and places the wafers on the process machine for process processing. After the process processing is completed, the robot 31' puts the wafers back into the front-opening standard wafer box 10', and the door opening component 23' starts to rise to close the door of the front-opening standard wafer box 10'. The Y-axis retreats to the waiting position for the overhead lifting vehicle, completing all the actions of the loading port 20'.

[0042] In such Figure 4 In the related art shown, the door opening component 23' is composed of a door plate 231', a suction cup 232', an unlocking lock cylinder 233', a cylinder 234', a synchronous pulley 235', a synchronous belt 236', a tensioning wheel 237', a bearing assembly, a sensor, etc. In other words, Figure 4 The door opening component 23' in the embodiment is improved by using the original two cylinders 234' to respectively control the corresponding unlocking lock cores 233' so as to use one cylinder 234' to cooperate with the synchronous pulley 235', the synchronous belt 236', the tensioning wheel 237' and other components to realize the synchronous rotation of the lock cores of the two front cover doors 12'.

[0043] However, when the door opening component 23' is unlocked or locked, the degree of synchronization of the two unlocking lock cylinders 233' is closely related to the tension of the synchronous belt 236'. Therefore, in order to ensure the tension of the synchronous belt 236', the tensioning wheel 237' needs to be adjusted regularly, which increases the maintenance cost. Moreover, if the maintenance is not timely, the synchronous belt 236' will become loose, and the synchronous belt wheel 235' and the synchronous belt 236' will easily slip, thereby affecting the synchronization accuracy of the two unlocking lock cylinders 233' and causing the machine to vibrate.

[0044] It should be noted that after the wafers are processed, they are stored in a front opening wafer shipping box. The front opening wafer shipping box is similar in structure to the front opening standard wafer box 10', and can also be opened by the door opening component 23', and has the same problems as above.

[0045] In order to solve the above problems, Figures 5 to 9 As shown, the present invention discloses a door opening mechanism for a loading port, comprising: a door panel 10 , a first lock core 20 , a second lock core 30 , a driving member 40 and a connecting rod assembly 50 .

[0046] The first lock core 20 and the second lock core 30 are both rotatably disposed on the door panel 10. The driving member 40 is disposed on the door panel 10, and the driving member 40 is used to drive the first lock core 20 to rotate; the connecting rod assembly 50 is respectively connected to the first lock core 20 and the second lock core 30, so that the first lock core 20 and the second lock core 30 rotate synchronously.

[0047] It is understandable that the first lock core 20 and the second lock core 30 both have a first state and a second state, wherein the first state is a state in which the box body 11' and the front cover door 12' of the front-opening standard wafer box are unlocked, and the second state is a state in which the box body 11' and the front cover door 12' are locked.

[0048] When in use, the driving member 40 drives the first lock core 20 to rotate, so that the first lock core 20 switches between the first state and the second state. At the same time, due to the existence of the connecting rod assembly 50, the first lock core 20 rotates synchronously with the second lock core 30, so the second lock core 30 also switches synchronously between the first state and the second state. That is to say, when the first lock core 20 switches from the first state to the second state, the second lock core 30 also switches from the first state to the second state synchronously; when the first lock core 20 switches from the second state to the first state, the second lock core 30 also switches from the second state to the first state synchronously. Since the connecting rod assembly 50 is used between the first lock core 20 and the second lock core 30 to achieve synchronous rotation, it is a rigid connection, so there is no need for a tension wheel, which can effectively avoid slipping, so that the first lock core 20 and the second lock core 30 can achieve precise synchronous rotation.

[0049] It should be noted that, in this embodiment, the first state is a state where the box body 11' and the front cover door 12' of the front-opening standard wafer box are unlocked, and the second state is a state where the box body 11' and the front cover door 12' are locked. However, this is not restrictive, and in some other embodiments not shown in the figure, the first state may also be a state where the box body 11' and the front cover door 12' are locked, and the second state may be a state where the box body 11' and the front cover door 12' are unlocked.

[0050] The door opening mechanism of the present invention uses a connecting rod assembly 50 to achieve synchronous rotation between the first lock core 20 and the second lock core 30, which is a rigid connection. Compared with the method of using a synchronous belt in the related art, there is no problem of the synchronous belt becoming loose. Therefore, slipping can be effectively avoided, thereby achieving precise synchronous rotation between the first lock core 20 and the second lock core 30, improving the unlocking synchronization accuracy of the first lock core 20 and the second lock core 30, and optimizing the machine vibration value.

[0051] In addition, since there is no synchronous belt, there is no need to regularly adjust the tensioner, which reduces maintenance costs.

[0052] like Figure 6 and Figure 7 As shown, the connecting rod assembly 50 includes: a first connecting rod 51, a second connecting rod 52 and a linkage rod 53. The first connecting rod 51 is drivingly connected to the first lock core 20, and the length direction of the first connecting rod 51 is perpendicular to the rotation axis direction of the first lock core 20; the second connecting rod 52 is drivingly connected to the second lock core 30, and the length direction of the second connecting rod 52 is perpendicular to the rotation axis direction of the second lock core 30; the linkage rod 53 is pivotally connected to the first connecting rod 51 and the second connecting rod 52 respectively, and when the first lock core 20 rotates, the first connecting rod 51 synchronously drives the second connecting rod 52 to rotate through the linkage rod 53, so that the first lock core 20 and the second lock core 30 rotate synchronously.

[0053] For example, Figure 6 As shown, the two ends of the linkage rod 53 are connected to the first link rod 51 and the second link rod 52 respectively through the first connection bolt 54 and the second connection bolt 55. Among them, the linkage rod 53 and the first link rod 51 are pivotally connected with the first connection bolt 54 as the pivot axis, and the linkage rod 53 and the second link rod 52 are pivotally connected with the second connection bolt 55 as the pivot axis. When the first link rod 51 rotates, the second link rod 52 is driven to rotate synchronously through the linkage rod 53, thereby realizing the synchronous rotation of the first lock core 20 and the second lock core 30. Since the first link rod 51, the second link rod 52 and the linkage rod 53 are all rigid structures, accurate transmission can be achieved, so that the first lock core 20 and the second lock core 30 rotate accurately and synchronously, thereby improving the unlocking synchronization accuracy of the first lock core 20 and the second lock core 30, and optimizing the vibration value of the machine.

[0054] It should be noted that, in the door opening mechanism of the present invention, the driving member 40 can be directly connected to the first lock core 20, so as to realize the driving rotation of the first lock core 20. The driving member 40 can also be connected to the first connecting rod 51 and drive the first lock core 20 to rotate through the first connecting rod 51. In other words, under the premise of not violating the inventive concept and inventive principle of the present invention, no matter what method is adopted, as long as the first lock core 20 is finally rotated by the driving member 40, it is within the protection scope of the present invention.

[0055] Exemplarily, the driving member 40 is drivingly connected to the first connecting rod 51, and the driving member 40 is used to drive the first connecting rod 51 to rotate around the rotation axis of the first lock core 20, so that the first connecting rod 51 simultaneously drives the first lock core 20 to rotate and the linkage rod 53 to move. Through the driving connection between the driving member 40 and the first connecting rod 51, the first connecting rod 51 can drive the first lock core 20 to rotate, and can also drive the second connecting rod 52 to rotate through the linkage rod 53, thereby realizing the synchronous rotation of the first lock core 20 and the second lock core 30, which is a typical one-item-for-multiple-purposes, while ensuring the driving effect, simplifying the structure of the door opening mechanism, thereby saving assembly space.

[0056] Furthermore, the first end of the first connecting rod 51 is driven and cooperated with the driving member 40, and the second end is pivotally connected to the linkage rod 53. The first lock core 20 is connected between the first end and the second end of the first connecting rod 51, and the rotation axis of the first lock core 20 passes through the first connecting rod 51.

[0057] like Figure 6 As shown, the first connecting rod 51 is passed through the first lock core 20, and the length direction of the first connecting rod 51 is perpendicular to the rotation axis of the first lock core 20. The first end and the second end of the first connecting rod 51 are both provided with screw holes, the screw hole at the first end of the first connecting rod 51 is used for driving connection with the driving member 40, and the screw hole at the second end of the first connecting rod 51 is used for pivoting connection with the first end of the linkage rod 53.

[0058] like Figure 6 As shown, the driving member 40 includes: a housing 41 and a driving rod 42. The housing 41 is connected to the door panel 10; the driving rod 42 is arranged in parallel with the linkage rod 53, the first end of the driving rod 42 is movably arranged in the housing 41, and the second end of the driving rod 42 is rotatably connected to the first connecting rod 51. The driving rod 42 is extended and retracted by moving relative to the housing 41 to drive the first connecting rod 51 to rotate around the rotation axis of the first lock cylinder 20.

[0059] For example, Figure 6 As shown, the driving member 40 further includes a fixing nail 44. The housing 41 is connected to the door panel 10 via the fixing nail 44. The driving member 40 is a cylinder, and a piston is disposed in the housing 41. The piston divides the interior of the housing 41 into a first cavity and a second cavity. The first end of the driving rod 42 is located in the first cavity and connected to the piston. When in use, the piston drives the driving rod 42 to extend by injecting compressed air into the second cavity, and the piston drives the driving rod 42 to contract by injecting compressed air into the first cavity, so as to drive the first connecting rod 51 to rotate.

[0060] In such Figure 6In the illustrated embodiment, the driving member 40 also includes: a speed regulating valve 45. In this embodiment, there are two speed regulating valves 45, which are respectively connected to the first cavity and the second cavity, and are used to adjust the flow rate of the gas entering the first cavity and the second cavity to control the rotation speed of the unlocking linkage mechanism, thereby adjusting the unlocking rhythm of the machine.

[0061] like Figure 6 As shown, in this embodiment, a third through hole 421 is provided at the second end of the driving rod 42, and a rotatable third connecting bolt 43 is provided in the third through hole 421. The third connecting bolt 43 is threadedly connected to the screw hole at the first end of the first connecting rod 51, thereby realizing a pivotal connection between the driving rod 42 and the first connecting rod 51.

[0062] In this embodiment, the housing 41 is rotatably connected to the door panel 10, and the rotation axis of the housing 41 is parallel to the rotation axis of the first lock core 20. During the extension and retraction process, the driving rod 42 not only drives the first connecting rod 51 to drive the first lock core 20 to rotate around the rotation axis of the first lock core 20, but also drives the housing 41 to rotate, thereby preventing the first connecting rod 51 and the driving rod 42 from getting stuck.

[0063] Specifically, in Figure 7 In the illustrated embodiment, the shell 41 is a cylindrical structure, the first end and the second end of which are both closed ends, the fixing nail 41 is penetrated through the first end of the shell 41 in a direction perpendicular to the door panel 10, and the driving rod 42 is penetrated through the second end of the shell 41 along the axis of the shell 41 and is sealed with the second end of the shell 41.

[0064] like Figure 7 and Figure 8 As shown, the shell 41 and the fixing nail 44 can rotate relative to each other, and the fixing nail 44 is fixedly connected to the door panel 10. In other words, the shell 41 can rotate relative to the door panel 10 with the fixing nail 44 as the axis, and because the fixing nail 44 is perpendicular to the door panel 10, the rotation axis of the shell 41 is parallel to the rotation axis of the first lock core 20.

[0065] like Figure 7 As shown in FIG. 1 , when the driving rod 42 is retracted, the axis of the housing 41 is parallel to the linkage rod 53, and when the driving rod 42 is extended, the driving rod 42 drives the first link 51 to move in a direction parallel to the linkage rod 53. Figure 7 The first lock core 20 rotates counterclockwise. At this time, as the first connecting rod 51 rotates counterclockwise, Figure 7 The driving rod 42 drives the housing 41 to rotate, so that the angle of the housing 41 is no longer parallel to the linkage rod 53, but is like Figure 8As shown in the figure, an angle is formed, so that the driving rod 42 can continue to extend and push the first connecting rod 51 to continue to rotate counterclockwise. If the housing 41 cannot rotate, the first connecting rod 51 and the driving rod 42 will be stuck, and the driving cooperation between the driving rod 42 and the first connecting rod 51 cannot be achieved.

[0066] like Figures 7 to 9 As shown, the first lock core 20 and the second lock core 30 both have Figure 7 The first state shown and Fig. 9 The second state shown; the first lock core 20 and the second lock core 30 are switched between their respective first and second states by rotation, and the connecting rod assembly 50 is used to synchronize the switching of the first lock core 20 and the second lock core 30 between the first state and the second state.

[0067] It should be noted that, in this embodiment, the driving member 40 prevents the driving rod 42 and the first connecting rod 51 from getting stuck by the rotatable housing 41, but this is not restrictive. Fig.10 In another embodiment shown, a door opening mechanism is also disclosed, and its structure is basically the same as that of the present embodiment, except that, in this other embodiment, the shell 41 is fixedly connected to the door panel 10, the driving rod 42 and the connecting rod 53 are arranged in parallel, and the first end of the driving rod 42 is slidably matched with the first connecting rod 51 in the length direction of the first connecting rod 51.

[0068] Specifically, in Fig.10 In the illustrated embodiment, the fixing nail 44 is relatively fixed to the housing 41, and therefore, the housing 41 is fixedly connected to the door panel 10. In contrast, a waist-shaped hole 511 extending along the length direction is provided at the first end of the first connecting rod 51, and a connecting shaft 422 is provided at the second end of the driving rod 42. The connecting shaft 422 is located in the waist-shaped hole 511 and slides along the length direction of the waist-shaped hole 511. When the driving rod 42 drives the first connecting rod 51 to rotate, the connecting shaft 422 slides in the waist-shaped hole 511, thereby preventing the driving rod 42 and the first connecting rod 51 from getting stuck.

[0069] In addition, since the shell 41 of the cylinder adopts a cylindrical structure, the overall size can be reduced and space can be saved.

[0070] In such Figure 5 and Figure 6 In the illustrated embodiment, the length of the linkage rod 53 is adjustable, and the linkage rod 53 adjusts the angle between the first link 51 and the second link 52 by changing its own length. It should be noted that in this embodiment, the length of the linkage rod 53 is adjustable, which means that the length of the linkage rod 53 can be adjusted in the assembly and maintenance state, and after the assembly and maintenance are completed, when the linkage assembly 50 drives the first lock cylinder 20 and the second lock cylinder 30 to synchronously switch between the first state and the second state, the length of the linkage rod 53 remains unchanged.

[0071] Specifically, the linkage rod 53 includes a rod body 531, a first adjustment block 532, and a second adjustment block 533. External threads in opposite directions are arranged at both ends of the first rod body 531, and the first adjustment block 532 and the second adjustment block 533 are respectively threadedly connected to the two ends of the first rod body 531. The first rod body 531 can adjust the distance between the first adjustment block 532 and the second adjustment block 533 by rotating.

[0072] like Figure 6 As shown, the first adjustment block 532 forms the first end of the linkage rod 53, a first through hole 5321 is provided on the first adjustment block 532, and the first connecting bolt 54 is rotatably inserted into the first through hole 5321 and is threadedly connected to the second end of the first connecting rod 51. The second adjustment block 533 forms the second end of the linkage rod 53, a second through hole 5331 is provided on the second adjustment block 533, and the second connecting bolt 55 is rotatably inserted into the second through hole 5331 and is threadedly connected to the second end of the second connecting rod 52, and the first end of the second connecting rod 52 is fixedly connected to the second lock core 30. During assembly and maintenance, the distance between the first adjustment block 532 and the second adjustment block 533 can be adjusted by rotating the rod body 531, that is, the first adjustment block 532 and the second adjustment block 533 can be moved closer to or farther from each other by rotating the rod body 531. Since the first adjustment block 532 is pivotally connected to the second end of the first connecting rod 51, and the second adjustment block 533 is pivotally connected to the second end of the second connecting rod 52, when the first adjustment block 532 and the second adjustment block 533 approach and move away from each other, the second ends of the first connecting rod 51 and the second ends of the second connecting rod 52 will also be driven to approach and move away from each other. Since the first connecting rod 51 rotates around the first lock core 20 and the second connecting rod 52 rotates around the second lock core 30, it is possible to adjust the angle between the first connecting rod 51 and the second connecting rod 52, so that the first connecting rod 51 drives the first lock core 20 to rotate, and the second connecting rod 52 drives the second lock core 30 to rotate. In other words, the rotation angle of the first lock core 20 and the second lock core 30 can be adjusted within a certain range by rotating the rod body 531, so that the angles of the first lock core 20 and the second lock core 30 in the first state or the second state are consistent, thereby ensuring that the first lock core 20 and the second lock core 30 can be inserted into the corresponding front cover door 12' lock core at one time, reducing the number of vibrations.

[0073] The connecting rod assembly 50 further includes a first bearing 56 , which is disposed between the linkage rod 53 and the first connecting rod 51 and between the linkage rod 53 and the second connecting rod 52 .

[0074] Specifically, if Figure 6As shown, there are multiple first bearings 56, which are respectively arranged between the first end of the linkage rod 53 and the second end of the first connecting rod 51, between the second end of the linkage rod 53 and the second end of the second connecting rod 52, and between the first end of the first connecting rod 51 and the second end of the driving rod 42.

[0075] In addition, in order to further reduce friction, the first bearing 56 is also arranged between the nut of the first connecting bolt 54 and the first end of the linkage rod 53, between the nut of the second connecting bolt 55 and the second end of the linkage rod 53, and between the nut of the third connecting bolt 43 and the second end of the driving rod 42.

[0076] Taking the first end of the linkage rod 53 as an example, the first bearing 56 includes: a gasket portion 561 and a sleeve portion 562. The gasket portion 561 is provided with a center hole, and the sleeve portion 562 is connected to the gasket portion 561 and communicates with the center hole. The first bearings 56 are respectively provided at the first end of the linkage rod 53, that is, on both sides of the through hole of the first adjustment block 532. The sleeve portion 562 of each first bearing 56 is inserted into the through hole, and the gasket portion 561 is attached to both sides of the first adjustment block 532. After the first connecting rod 51, the first connecting bolt 54 and the first adjusting block 532 are assembled, a sleeve portion 562 is provided between the outer peripheral wall of the first connecting bolt 54 and the inner peripheral wall of the through hole, thereby avoiding friction between the first connecting bolt 54 and the inner wall of the through hole, and a gasket portion 561 is provided between the nut of the first connecting bolt 54 and the first adjusting block 532, and between the first connecting rod 51 and the first adjusting block 532, thereby avoiding friction between the nut of the first connecting bolt 54 and the first adjusting block 532, and between the first connecting rod 51 and the first adjusting block 532. The assembly method of the first bearing 56 between the second connecting rod 52 and the second end of the linkage rod 53, and the assembly method of the first bearing 56 between the first connecting rod 51 and the driving rod 42 are similar to the method between the linkage rod 53 and the first connecting rod 51, so they are not repeated here.

[0077] In the present embodiment, the first bearing 56 is a sliding bearing and is made of plastic. For example: polytetrafluoroethylene, modified polyoxymethylene, etc. Polytetrafluoroethylene (PTFE), also known as Teflon, is a high molecular polymer obtained by polymerization of tetrafluoroethylene as a monomer. It has excellent heat resistance and cold resistance and can be used for a long time at -180 to 260°C. This material is resistant to acids and alkalis, and to various organic solvents, and is almost insoluble in all solvents. At the same time, polytetrafluoroethylene has the characteristics of high temperature resistance and a very low friction coefficient. The use of polytetrafluoroethylene can effectively reduce the friction between the connecting rod assemblies 50, and avoid particle precipitation, effectively preventing wafer contamination.

[0078] It should be noted that, in the present embodiment, the first bearing 56 is a sliding bearing and is made of plastic, but this is not restrictive. In some other embodiments not shown in the figure, the first bearing 56 may also be other sliding bearings, such as rubber, hardwood, and carbon-graphite.

[0079] It should also be noted that, in this embodiment, the first bearing 56 is respectively arranged between the first end of the linkage rod 53 and the second end of the first connecting rod 51, between the second end of the linkage rod 53 and the second end of the second connecting rod 52, and between the first end of the first connecting rod 51 and the second end of the driving rod 42. The first bearing 56 is also arranged between the nut of the first connecting bolt 54 and the first end of the linkage rod 53, between the nut of the second connecting bolt 55 and the second end of the linkage rod 53, and between the nut of the third connecting bolt 43 and the second end of the driving rod 42. However, this is not restrictive, and in some other embodiments not shown in the figure, it is also feasible that the first bearing 56 is only arranged in a part of the above positions.

[0080] like Figure 6 as well as Fig.11 and Fig.12 As shown, the door opening mechanism further includes: a second bearing 60. The second bearing 60 is disposed between the door plate 10 and the first lock core 20 and between the door plate 10 and the second lock core 30.

[0081] The second bearing 60 is multiple, such as Figure 6 As shown, the first lock core 20 includes: a first main body 21, a first rotating part 22 and a first plug-in part 23. The first main body 21 is cylindrical, the first connecting rod 51 is perpendicular to the axis of the first main body 21 and is inserted into the first main body 21, the first connecting rod 51 is fixedly connected to the first main body 21, the first main body 21 has a first end and a second end axially, the first plug-in part 23 is located at the first end of the first main body 21, the first rotating part 22 is cylindrical, and is connected to the second end of the first main body 21. The second bearing 60 is sleeved on the first rotating part 22. A first mounting hole is provided on the door panel 10, and the first rotating part 22 is rotatably provided in the first mounting hole through the first bearing 56, so as to realize rotation.

[0082] like Fig.11As shown, the second lock core 30 includes: a second main body 31, a second rotating part 32 and a second plug-in part 33. The second main body 31 is cylindrical, the first end of the second connecting rod 52 is perpendicular to the axis of the second main body 31 and is fixedly connected to the side wall of the second main body 31, the second main body 31 axially has a first end and a second end, the second plug-in part 33 is located at the first end of the second main body 31, and the second rotating part 32 is cylindrical and connected to the second end of the second main body 31. The second bearing 60 is sleeved on the second rotating part 32. The door panel 10 is provided with a second mounting hole, and the second rotating part 32 is rotatably arranged in the second mounting hole through the second bearing 60, so as to realize rotation.

[0083] By providing the second bearing 60 , the sliding friction between the first lock core 20 and the door panel 10 can be converted into rolling friction, thereby reducing friction, while also reducing particle precipitation and the risk of wafer contamination.

[0084] It should be noted that, in this embodiment, the second bearing 60 is disposed between the door panel 10 and the first lock core 20 and the second lock core 30. However, this is not restrictive, and in some other embodiments not shown in the figure, the second bearing 60 may also be disposed between the door panel 10 and the first lock core 20 or between the door panel 10 and the second lock core 30, which is also feasible.

[0085] like Fig.12 As shown, taking the assembly method of the first lock core 20 and the second bearing 60 as an example, the second bearing 60 includes: an inner ring 61 and an outer ring 62. The first rotating part 22 of the first lock core 20 is provided with a screw hole, and a limiting boss 221 is provided on the first rotating part 22. After the second bearing 60 is sleeved on the first rotating part 22, the second bearing 60 is fixed on the first rotating part 22 by the fixing bolt 70. Exemplarily, the height of the limiting boss 221 and the size of the nut of the fixing bolt 70 match the size of the inner ring 61, so that after the fixing bolt 70 is fixed, the nut of the fixing bolt 70 and the limiting boss 221 only clamp and fix the inner ring 61 of the second bearing 60. The assembly method of the second lock core 30 and the second bearing 60 is the same as that of the first lock core 20, so it is not repeated.

[0086] like Figure 5 As shown, the door opening mechanism further includes: a first limiter 81, a second limiter 82 and a fixing seat 83. The first limiter 81 is provided on the door panel 10, and is used to limit the first lock core 20 and the connecting rod assembly 50 when the first lock core 20 is in the first state, so as to limit the first lock core 20 from continuing to rotate after switching to the first state; the second limiter 82 is provided on the door panel 10, and is used to limit the first lock core 20 and the connecting rod assembly 50 when the first lock core 20 is in the second state, so as to limit the first lock core 20 from continuing to rotate after switching to the second state.

[0087] For example, Figure 5 As shown, the fixing seat 83 is fixedly connected to the door panel 10 and is located on the side of the first mounting hole away from the second mounting hole. The fixing seat 83 has a first mounting surface and a second mounting surface, both of which face the first mounting hole, and the first mounting surface and the second mounting surface form an L-shaped structure. The first limiting member 81 and the second limiting member 82 are located on the first mounting surface and the second mounting surface respectively. Figure 7 As shown, when the first lock is in the first state, the driving rod 42 is retracted, the second end of the first connecting rod 51 is located at the position of the first limiting member 81, and the portion between the second end of the first connecting rod 51 and the first lock core 20 abuts against the first limiting member 81 to achieve limiting cooperation, thereby preventing the first lock core 20 from continuing to rotate after turning to the first state. Fig. 9 As shown, when the first lock core 20 is in the second state, the driving rod 42 is extended, the first end of the first connecting rod 51 is located at the position of the second limiting member 82, and the portion between the first end of the first connecting rod 51 and the first lock core 20 abuts against the second limiting member 82 to achieve limiting cooperation, preventing the first lock core 20 from continuing to rotate after turning to the second state. By providing the first limiting portion and the second limiting portion, the first lock core 20 can be prevented from rotating excessively, so that the rotation positions of the first lock core 20 and the second lock core 30 are more accurate.

[0088] In addition, the height of the first limit member 81 and the second limit member 82 are adjustable. By adjusting the height of the first limit member 81 and the second limit member 82, the position of the first lock core 20 in the first state and the second state can be adjusted according to actual conditions, thereby adjusting the rotation accuracy.

[0089] like Figure 5 As shown, the door opening mechanism further includes: a shielding member 91 and a detection device 92. The shielding member 91 is arranged on the connecting rod assembly 50; the detection device 92 is arranged on the door panel 10 and corresponds to the position of the shielding member 91, and is used to detect the position of the shielding member 91 to determine the state of the first lock cylinder 20 and / or the second lock cylinder 30. Fig.11 As shown, the shielding member 91 is fixedly connected to the second connecting rod 52, and there are two detection devices 92, which are respectively fixedly connected to the door panel 10. Figure 7 As shown, when the second lock core 30 is in the first state, the shielding member 91 shields one of the detection devices 92, as shown in FIG. Fig. 9 As shown, when the second lock core 30 is in the second state, the shielding member 91 shields another detection device 92, thereby realizing the detection of the states of the first lock core 20 and the second lock core 30. Exemplarily, the detection device 92 is a photoelectric sensor.

[0090] According to a second aspect of the invention, a loading port is also disclosed, comprising: a main frame and the above-mentioned door opening mechanism, wherein the door opening mechanism is liftably arranged on the main frame.

[0091] According to the third aspect of the invention, a front-end module is also disclosed, including: a machine body and the above-mentioned loading port, wherein the loading port is arranged on the machine body.

[0092] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A door opening mechanism for a loading port, comprising: A door panel (10) and a first lock core (20) and a second lock core (30) rotatably arranged on the door panel (10), wherein the door opening mechanism further comprises: A driving member (40) is arranged on the door panel (10), and the driving member (40) is used to drive the first lock core (20) to rotate; The connecting rod assembly (50) is respectively connected to the first lock core (20) and the second lock core (30) so that the first lock core (20) and the second lock core (30) can rotate synchronously.

2. The door opening mechanism according to claim 1, characterized in that: The connecting rod assembly (50) comprises: A first connecting rod (51) is drivingly connected to the first lock core (20), and the length direction of the first connecting rod (51) is perpendicular to the rotation axis direction of the first lock core (20); A second connecting rod (52) is drivingly connected to the second lock core (30), and the length direction of the second connecting rod (52) is perpendicular to the rotation axis direction of the second lock core (30); The linkage rod (53) is pivotally connected to the first link (51) and the second link (52), respectively. When the first lock core (20) rotates, the first link (51) synchronously drives the second link (52) to rotate through the linkage rod (53), so that the first lock core (20) and the second lock core (30) rotate synchronously.

3. The door opening mechanism according to claim 2, characterized in that: The driving member (40) is drivingly connected to the first connecting rod (51), and the driving member (40) is used to drive the first connecting rod (51) to rotate around the rotation axis of the first lock core (20), so that the first connecting rod (51) simultaneously drives the first lock core (20) to rotate and the linkage rod (53) to move.

4. The door opening mechanism according to claim 3, characterized in that: The first end of the first connecting rod (51) is drivingly engaged with the driving member (40), the second end of the first connecting rod (51) is pivotally connected to the linkage rod (53), the first lock core (20) is connected between the first end and the second end of the first connecting rod (51), and the rotation axis of the first lock core (20) passes through the first connecting rod (51).

5. The door opening mechanism according to claim 4, characterized in that: The driving member (40) comprises: A housing (41) connected to the door panel (10); A driving rod (42) has a first end movably disposed in the housing (41), and a second end of the driving rod (42) is rotatably connected to the first connecting rod (51). The driving rod (42) is telescopically movable by moving relative to the housing (41) to drive the first connecting rod (51) to rotate around the rotation axis of the first lock core (20).

6. The door opening mechanism according to claim 5, characterized in that: The housing (41) is rotatably connected to the door panel (10), and the rotation axis of the housing (41) is parallel to the rotation axis of the first lock core (20).

7. The door opening mechanism according to claim 5, characterized in that: The driving rod (42) and the linkage rod (53) are arranged in parallel, and the second end of the driving rod (42) is slidably matched with the first connecting rod (51) in the length direction of the first connecting rod (51).

8. The door opening mechanism according to claim 2, characterized in that: The length of the linkage rod (53) is adjustable, and the linkage rod (53) adjusts the angle between the first link rod (51) and the second link rod (52) by changing its own length.

9. The door opening mechanism according to claim 1, characterized in that: The first lock core (20) and the second lock core (30) both have a first state and a second state; the connecting rod assembly (50) is used to enable the first lock core (20) and the second lock core (30) to switch synchronously between the first state and the second state; The door opening mechanism further comprises: a first position limiting member (81) and a second position limiting member (82), wherein the first position limiting member (81) is arranged on the door panel (10), and the first position limiting member (81) is used to cooperate with the connecting rod assembly (50) in a position limiting manner when the first lock core (20) is in the first state, so as to limit the first lock core (20) from continuing to rotate after switching to the first state; the second position limiting member (82) is arranged on the door panel (10), and the second position limiting member (82) is used to cooperate with the connecting rod assembly (50) in a position limiting manner when the first lock core (20) is in the second state, so as to limit the first lock core (20) from continuing to rotate after switching to the second state.

10. The door opening mechanism according to claim 9, characterized in that: The door opening mechanism also includes: A shielding member (91) is arranged on the connecting rod assembly (50); A detection device (92) is arranged on the door panel (10) and corresponds to the position of the shielding member (91), and is used to detect the position of the shielding member (91) to determine the state of the first lock core (20) and / or the second lock core (30).

11. A loading port, characterized in that: include: A main body frame and a door opening mechanism according to any one of claims 1 to 10, wherein the door opening mechanism is liftably arranged on the main body frame.

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