Three-beam laser scribing and cracking integrated brittle material cutting machine

Abstract

The invention relates to the technical field of laser cutting, in particular to a three-beam laser scribing and cracking integrated brittle material cutting machine which is characterized in that a two-dimensional moving platform is arranged on a base, an upper machining platform and a lower machining platform are vertically arranged on one side of a vertical table at intervals, a scribing laser head is arranged on one side of the bottom end of the upper machining platform, and an upper cracking laser head is arranged on the other side of the bottom end of the upper machining platform; after a workpiece is positioned, a cutting track is set, the scribing laser head scribes according to the cutting track, the upper and lower cracking laser cutting heads emit light simultaneously / singly for cracking, and integration of a scribing procedure of a precrack and a cracking procedure of hot crack processing is realized. According to the laser hot-crack cutting device, the two working procedures of scribing and splitting are free of intermediate links and repeated positioning errors, three hot-crack cutting modes of the front face, the back face and the double faces can be selected, and the problems that when laser hot-crack machining is conducted on brittle materials in the prior art, the deviation between a scribing track and a splitting track is large, the heating mode is single, and machining efficiency is low are solved.

Description

Technical Field

[0001] The invention relates to the field of laser cutting, and in particular to a three-beam laser scribing and cracking integrated brittle material cutting machine. Background Art

[0002] Brittle materials such as advanced ceramics, glass, and silicon-based chip materials have become key materials for the development of high-tech fields. The cutting quality of brittle materials not only affects the R&D cycle and application cost of key equipment, but also has a significant impact on the safety and reliability of the equipment. At present, laser thermal cracking is a new processing method. Studies have found that a guide crack can be prefabricated on the surface of the brittle material, and then a laser power that can obtain better processing quality can be determined. Finally, a reasonable laser scanning speed is determined according to the laser power to obtain the best cutting quality. In the existing technology, most of them first prefabricate a prefabricated crack that runs through the entire cutting path on the laser cutting line, and then manually transfer the ceramic workpiece with the prefabricated initial crack to the laser cutting machine, use a CCD camera to locate the crack groove position, and finally use a laser thermal cracking cutting head to perform splinter cutting. However, the existing technology has the disadvantages of large deviation between the marking trajectory and the splinter trajectory, single heating method, and low processing efficiency, resulting in poor processing quality, high manufacturing cost, and waste of equipment resources. Summary of the invention

[0003] In view of this, the purpose of the present invention is to propose a three-beam laser scoring and cracking integrated brittle material cutting machine to solve the problems of large deviation between the scoring trajectory and the cracking trajectory, single heating method and low processing efficiency during the existing laser thermal cracking processing of brittle materials.

[0004] Based on the above objectives, the present invention provides a three-beam laser scribing and cracking integrated brittle material cutting machine, comprising a base:

[0005] A two-dimensional mobile platform is provided on the base, and a loading platform is connected to the two-dimensional mobile platform, which is used to fix the workpiece and drive the workpiece to move along the X-axis and Y-axis directions;

[0006] A vertical platform is vertically connected to one end of the base, an upper processing platform and a lower processing platform are spaced apart on one side of the vertical platform, a processing position is provided at one end of the loading platform, and the processing position is located between the upper processing platform and the lower processing platform, a scribing laser head is provided on one side of the bottom end of the upper processing platform, an upper split laser head is provided on the other side of the bottom end of the upper processing platform, and a lower split laser head is correspondingly provided on the top of the lower processing platform, the laser beam directions of the upper split laser head and the lower split laser head overlap in opposite directions, the laser beam directions of the upper split laser head and the scribing laser head are parallel in the same direction, and the vertical line segment between the laser beams of the upper split laser head and the scribing laser head is parallel to the X-axis moving direction of the two-dimensional moving platform.

[0007] Preferably, a viewfinder camera is provided at the bottom end of the upper processing platform between the upper splitting laser head and the scribing laser head.

[0008] Preferably, the two-dimensional mobile platform includes a Y-axis slide rail designed along the length direction of the base, an X-axis slide rail is slidably connected to the Y-axis slide rail, and the loading platform is slidably connected to the X-axis slide rail.

[0009] Preferably, a plurality of adsorption holes are arranged on the top surface of the loading platform for adsorbing and fixing the workpiece.

[0010] Preferably, a switching shaft is rotatably connected inside the upper processing platform, and the switching shaft passes downward through the bottom end of the upper processing platform and is respectively connected to cross bars on both sides, and a light shielding plate is connected to one end of the cross bar. The switching shaft is rotated to drive the light shielding plate to shield the light output part of the upper split laser head or the marking laser head.

[0011] Preferably, an opening is provided at the side end of the vertical table, which is located below the upper split laser head and the marking laser head. An arc-shaped slide is provided in the vertical table, and both ends of the arc-shaped slide lead to the opening. An arc-shaped tube is slidably connected in the arc-shaped slide, and exhaust holes are provided on the sides of both ends of the arc-shaped tube. An exhaust pipe is externally connected to the arc-shaped tube for exhausting air outwards. A switching shaft is located on the top side of the upper processing platform and is connected to a horizontal shaft. One end of the horizontal shaft extends into the vertical table and is connected to a vertical shaft. The bottom end of the vertical shaft is connected to the arc-shaped tube. By rotating the switching shaft, the arc-shaped tube is driven to slide against the arc-shaped slide, so that when one end of the arc-shaped tube passes through the opening, the arc-shaped tube at the other end passes into the opening, so that the exhaust hole at this end is against the arc-shaped slide and is in a closed state, and the light emitting part of the upper split laser head or the marking laser head at the same end is blocked by the sunshade.

[0012] Preferably, the cross bar is rotatably connected to the bottom end of the switching shaft.

[0013] Preferably, the air extraction holes are located at both ends of the arc tube on one side facing the light emitting direction.

[0014] The beneficial effects of the present invention are as follows: a two-dimensional mobile platform is arranged on the base, a loading platform is connected to the two-dimensional mobile platform, which is used to fix the workpiece and drive the workpiece to move along the X-axis and Y-axis directions; a vertical platform is vertically connected to one end of the base; an upper processing platform and a lower processing platform are arranged at intervals on one side of the vertical platform; a scribing laser head is arranged on one side of the bottom end of the upper processing platform, an upper splitting laser head is arranged on the other side of the bottom end of the upper processing platform, and a lower splitting laser head is arranged on the top of the lower processing platform. After the workpiece is positioned, the cutting trajectory is set, and the scribing of the scribing station is performed. The laser head marks along the cutting trajectory, and the upper and lower laser cutting heads at the splitting station emit light simultaneously / singlely for splitting, realizing the integration of the marking process of pre-cracks and the splitting process of thermal cracking processing, so that the two processes of marking and splitting have no intermediate links and no repeated positioning errors. When splitting, single-beam laser splitting or double-beam laser splitting can be selected. One device can simultaneously realize three thermal splitting cutting methods: front side, back side and double side, solving the problems of large deviation between the marking trajectory and the splitting trajectory, single heating method and low processing efficiency in the existing laser thermal cracking processing of brittle materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic diagram of the overall structure of the brittle material cutting machine of the present invention;

[0017] Figure 2 It is a side structural schematic diagram of the brittle material cutting machine of the present invention;

[0018] Figure 3 It is a schematic diagram of the top view of the loading platform of the present invention;

[0019] Figure 4 It is a schematic diagram of the top view structure of the scribing laser head and the upper splitting laser head during the splitting operation of the present invention;

[0020] Figure 5 It is a schematic diagram of the structure when the switching shaft of the present invention starts to rotate;

[0021] Figure 6 It is a schematic diagram of the top view of the structure of the scribing laser head and the upper splitting laser head during the scribing operation of the present invention.

[0022] The markings in the figure are:

[0023] 1. Base; 2. Two-dimensional mobile platform; 21. Y-axis slide rail; 22. X-axis slide plate; 3. Loading platform; 31. Processing position; 4. Vertical platform; 41. Opening; 42. Arc slide; 5. Upper processing platform; 6. Lower processing platform; 7. Scribing laser head; 8. Upper lobe laser head; 9. Lower lobe laser head; 10. Viewfinder camera; 11. Switching shaft; 12. Crossbar; 13. Shading plate; 14. Arc tube; 141. Exhaust hole; 15. Horizontal axis; 16. Vertical axis. DETAILED DESCRIPTION

[0024] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0025] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0026] like Figure 1 , Figure 2 , Figure 3 As shown, a three-beam laser scribing and cracking integrated brittle material cutting machine comprises a base 1, a two-dimensional moving platform 2 is provided on the base 1, a loading platform 3 is connected to the two-dimensional moving platform 2, and is used to fix the workpiece and drive the workpiece to move along the X-axis and Y-axis directions, a vertical platform 4 is vertically connected to one end of the base 1, an upper processing platform 5 and a lower processing platform 6 are provided at intervals on one side of the vertical platform 4, a processing position 31 is provided at one end of the loading platform 3, and the processing position 31 is located between the upper processing platform 5 and the lower processing platform 6, a scribing laser head 7 is provided on one side of the bottom end of the upper processing platform 5, an upper splitting laser head 8 is provided on the other side of the bottom end of the upper processing platform 5, and a lower splitting laser head 9 is correspondingly provided on the top of the lower processing platform 6, the laser beam directions of the upper splitting laser head 8 and the lower splitting laser head 9 are reversely overlapped, the laser beam directions of the upper splitting laser head 8 and the scribing laser head 7 are parallel in the same direction, and the vertical line segment between the laser beams of the upper splitting laser head 8 and the scribing laser head 7 is parallel to the X-axis moving direction of the two-dimensional moving platform 2.

[0027] The present invention is based on the existing process and equipment for cutting brittle materials by laser thermal cracking method, and includes a base 1, a two-dimensional mobile platform 2 is provided on the base 1, and a loading platform 3 is connected to the two-dimensional mobile platform 2. Specifically, the two-dimensional mobile platform 2 includes a Y-axis slide rail 21 designed along the length direction of the base 1, and an X-axis slide plate 22 is slidably connected to the Y-axis slide rail 21. The loading platform 3 is slidably connected to the X-axis slide plate 22. A plurality of adsorption holes are arranged on the top surface of the loading platform 3 for adsorbing and fixing the workpiece and driving the workpiece to move along the X-axis and Y-axis directions. A vertical table 4 is vertically connected to one end of the base 1. An upper processing platform 5 and a lower processing platform 6 are provided at intervals on one side of the vertical platform 4. A processing position 31 is provided at one end of the loading platform 3. The processing position 31 is located between the upper processing platform 5 and the lower processing platform 6. A scribing laser head 7 is provided on one side of the bottom end of the upper processing platform 5. An upper split laser head 8 is provided on the other side of the bottom end of the upper processing platform 5. A lower split laser head 9 is provided on the top of the lower processing platform 6. The laser beam directions of the upper split laser head 8 and the lower split laser head 9 overlap in opposite directions. The laser beam directions of the upper split laser head 8 and the scribing laser head 7 are parallel in the same direction. The vertical line segment between the laser beams of the laser head 7 is parallel to the X-axis moving direction of the two-dimensional moving platform 2. The bottom end of the upper processing platform 5 is located between the upper split laser head 8 and the scribing laser head 7, and a viewfinder camera 10 is provided. Specifically, the viewfinder camera 10 can adopt the existing paraxial CCD with a pixel of 1200W and a field of view of 5*7mm. The single-head laser of the scribing station can adopt a 30W optical fiber imported IPG laser and is connected to the scribing laser head 7. The double-head laser of the split station can adopt a 500W domestic optical fiber laser and is respectively connected to the upper split laser The upper and lower laser heads 8 and the lower and upper splitting laser heads 9 have a maximum cutting speed of 300 mm / s. Each laser is equipped with a chiller for cooling. The scribing station adopts a single optical path design, and the splitting station adopts a double optical path design. The two-dimensional mobile platform 2 adopts the existing cross two-dimensional platform, and the cutting format is 500 mm*300 mm. The parameters such as the movement mode can be visually programmed, and a display for configuration adjustment can be separately provided on the base 1. At the same time, the equipment is independently equipped with two fans, one for connecting the loading platform 3 to adsorb the workpiece, and the other for sucking the smoke generated during the processing.

[0028] When in operation, the workpiece is manually loaded onto the loading platform 3, such as Figure 3As shown, the processing position 31 can be designed as an upper and lower through-hole type, so that the part to be processed of the workpiece is aligned with the processing position 31, the workpiece is adsorbed and fixed, and after the workpiece is positioned, the cutting trajectory is set, and the scribing laser head 7 of the slicing station scribes according to the cutting trajectory, and the upper and lower laser cutting heads of the splitting station emit light simultaneously / single (the laser and the pre-scribing are on the same side for front processing, and vice versa, for reverse processing) to split, visually observe the product, and after confirming that the cutting is completed, the platform returns to the initial position; because the upper slicing laser head 8 and the scribing laser head 7 are in the same direction and parallel, that is, there is only an X-axis orientation The deviation on the X-axis direction is eliminated to form a single processing trajectory. The slicing trajectory is equivalent to the slicing trajectory minus the deviation in the X-axis direction, thereby realizing the integration of the scribing process of prefabricated cracks and the slicing process of thermal cracking processing, so that the two processes of scribing and slicing have no intermediate links and no repeated positioning errors. When slicing, single-beam laser slicing or double-beam laser slicing can be selected. One device can simultaneously realize three thermal cracking cutting methods: front side, back side and double side, which solves the problems of large deviation between the scribing trajectory and the slicing trajectory, single heating method and low processing efficiency in the existing laser thermal cracking processing of brittle materials.

[0029] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, a switching shaft 11 is rotatably connected inside the upper processing platform 5, and the switching shaft 11 passes downward through the bottom end of the upper processing platform 5 and is respectively connected to cross bars 12 on both sides, and a light shielding plate 13 is connected to one end of the cross bar 12. The switching shaft 11 is rotated to drive the light shielding plate 13 to shield the light emitting part of the upper split laser head 8 or the marking laser head 7.

[0030] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, an opening 41 is provided at the side end of the vertical platform 4 located below the upper split laser head 8 and the scribing laser head 7, and an arc-shaped slide 42 is provided inside the vertical platform 4. Both ends of the arc-shaped slide 42 lead to the opening 41. An arc-shaped tube 14 is slidably connected inside the arc-shaped slide 42. Both ends of the arc-shaped tube 14 are provided with exhaust holes 141. An exhaust pipe is externally connected to the arc-shaped tube 14. Specifically, the exhaust pipe can be connected to the middle position of the arc-shaped tube 14 and connected to the fan. , used for exhausting air outward, the switching shaft 11 is located in the upper processing platform 5, and the top side thereof is connected to the horizontal shaft 15, one end of the horizontal shaft 15 extends into the vertical platform 4, and is connected to the vertical shaft 16, and the bottom end of the vertical shaft 16 is connected to the arc tube 14, and the arc tube 14 is driven to slide in the arc slide 42 by rotating the switching shaft 11, so that when one end of the arc tube 14 passes through the opening 41, the arc tube 14 at the other end passes through the opening 41, for example Figure 4 As shown, the right end of the arc tube 14 passes through the opening 41, and the left end passes through the opening 41, so that the air extraction hole 141 at the left end is against the arc slide 42 and is in a closed state, and the light emitting part of the scribing laser head 7 at the same end is blocked by the shading plate 13. When scribing is required, Figure 5 As shown, the switching shaft 11 starts to rotate until it turns to Figure 6 In the state shown, at this time, the left end of the arc tube 14 passes through the opening 41, and the right end passes through the opening 41, so that the exhaust hole 141 at the right end abuts against the arc slide 42 and is in a closed state, and the light-emitting part of the upper split laser head 8 at the same end is blocked by the shading plate 13, thereby, when switching to different scribing or splitting states, the smoke extraction treatment at the corresponding scribing position or splitting position is automatically turned on, and at the same time, the smoke suction port at the adjacent position is closed, and the light-emitting part of the adjacent position is closed by the shading plate 13, which has the effect of closed protection, and in the dynamic process of closure, the light-emitting part and the suction part are equivalent to being scraped and cleaned, which further maintains cleanliness and avoids clogging by smoke and dust.

[0031] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, the cross bar 12 is rotatably connected to the bottom end of the switching shaft 11, that is, the cross bar 12 can freely rotate around the axial direction of the switching shaft 11, thereby, the angle orientation of the shading plates 13 on both sides can be freely adjusted. If necessary, for example, when the cutting equipment is not used for a long time, it can be rotated so that the shading plates 13 on both sides simultaneously shield the light emitting parts of the upper split laser head 8 or the marking laser head 7, so as to achieve a closed protection effect.

[0032] More preferably, another shading plate 13 may be connected through a connecting rod below the shading plate 13 on the side close to the upper-slice laser head 8 to synchronously shield the lower-slice laser head 9 .

[0033] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, the exhaust holes 141 are located at the two ends of the arc tube 14 on one side facing the light emitting direction, so as to achieve a more efficient effect of exhausting smoke and dust.

[0034] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

Claims

1. A three-beam laser scribing and cracking integrated brittle material cutting machine, comprising a base (1), characterized in that: The base (1) is provided with a two-dimensional mobile platform (2), and the two-dimensional mobile platform (2) is connected to a loading platform (3) for fixing a workpiece and driving the workpiece to move along the X-axis and Y-axis directions; The upper end of the base (1) is vertically connected to a vertical platform (4), and an upper processing platform (5) and a lower processing platform (6) are arranged at intervals on one side of the vertical platform (4). A processing position (31) is arranged at one end of the loading platform (3), and the processing position (31) is located between the upper processing platform (5) and the lower processing platform (6). A scribing laser head (7) is arranged on one side of the bottom end of the upper processing platform (5), and an upper split laser head (8) is arranged on the other side of the bottom end of the upper processing platform (5). A lower split laser head (9) is correspondingly arranged on the top of the lower processing platform (6). The directions of the laser beams of the upper split laser head (8) and the lower split laser head (9) are oppositely overlapped, and the directions of the laser beams of the upper split laser head (8) and the scribing laser head (7) are parallel in the same direction, and the vertical line segment between the laser beams of the upper split laser head (8) and the scribing laser head (7) is parallel to the X-axis moving direction of the two-dimensional moving platform (2).

2. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 1, characterized in that: A viewfinder camera (10) is provided at the bottom end of the upper processing platform (5) between the upper splitting laser head (8) and the scribing laser head (7).

3. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 1, characterized in that: The two-dimensional mobile platform (2) comprises a Y-axis slide rail (21) designed along the length direction of the base (1), an X-axis slide plate (22) is slidably connected to the Y-axis slide rail (21), and the loading platform (3) is slidably connected to the X-axis slide plate (22).

4. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 1, characterized in that: A plurality of adsorption holes are arranged on the top surface of the loading platform (3) for adsorbing and fixing the workpiece.

5. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 1, characterized in that: A switching shaft (11) is rotatably connected inside the upper processing platform (5), and the switching shaft (11) passes downward through the bottom of the upper processing platform (5) and is respectively connected to cross bars (12) on both sides, and one end of the cross bar (12) is connected to a light shielding plate (13), which is rotated by the switching shaft (11) to drive the light shielding plate (13) to shield the light output portion of the upper split laser head (8) or the scribing laser head (7).

6. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 5, characterized in that: The side end of the vertical platform (4) is provided with an opening (41) located below the upper splitting laser head (8) and the scribing laser head (7). The vertical platform (4) is provided with an arc-shaped slideway (42). Both ends of the arc-shaped slideway (42) lead to the opening (41). An arc-shaped tube (14) is slidably connected in the arc-shaped slideway (42). Both ends of the arc-shaped tube (14) are provided with exhaust holes (141). The arc-shaped tube (14) is externally connected with an exhaust pipe for exhausting air. The switching shaft (11) is located on the top side of the upper processing platform (5) and is connected with a transverse shaft (15). The transverse shaft (141) is provided on the top side of the switching shaft (11). 5) extends into the vertical platform (4) and is connected to a vertical shaft (16). The bottom end of the vertical shaft (16) is connected to the arc tube (14). The arc tube (14) is driven to slide in the arc slideway (42) by the rotation of the switching shaft (11), so that when one end of the arc tube (14) passes through the opening (41), the arc tube (14) at the other end passes into the opening (41), so that the air extraction hole (141) at this end is pressed against the arc slideway (42) and is in a closed state, and the light emitting portion of the upper split laser head (8) or the scribing laser head (7) at the same end is shielded by the light shielding plate (13).

7. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 6, characterized in that: The cross bar (12) is rotatably connected to the bottom end of the switching shaft (11).

8. The three-beam laser scribing and splitting integrated brittle material cutting machine according to claim 6, characterized in that: The air extraction holes (141) are located at two ends of the arc tube (14) on one side facing the light emitting direction.

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