Electrochemical gradient densification-vibration micro-rotation combined conformal polishing ultra-precision manufacturing method and device

Abstract

An electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing method, which utilizes electrochemical gradient thickening phase-induced electrochemical interface reaction to guide the directional movement of charged particles and control the particle aggregation effect of the suspension, and then utilizes a flexible fluid abrasive tool to generate a vertical axis vibration micro-motion force for efficient conformal removal. An electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing device is also provided, which includes a box body, a conformal polishing device, a power supply auxiliary device, an electrochemical gradient thickening polishing processing suspension delivery device, and a polishing auxiliary device. The present application has a wide variety of workpiece processing types, which can greatly improve the shape and surface precision, and can also achieve atomic or near-atomic scale polishing precision.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of ultra-precision polishing, and particularly relates to an electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing method and device. BACKGROUND

[0002] Micro-structured surface is a kind of micro-structured surface with regular periodic arrangement and can perform multiple special functions such as optical, physical and biological. In recent years, due to the rapid development of optical fiber communication and imaging technology industries, micro components with micro-structured optical functional surfaces (also known as micro-structured optical functional components) have been widely used in micro-optoelectronic and communication products, biomedicine, aerospace and intelligent guidance systems due to their small size, light weight and high integration. For example, the roughness of the surface of the micro-prism structure of the single crystal silicon or silicon carbide spherical / aspherical lens substrate commonly used in infrared optical systems, display backlight module, infrared reflection system of aircraft and satellite must reach nanometer level. However, due to the small structure size, low stiffness and high precision requirements, the traditional polishing technology often faces some limitations. In the past few years, many scholars have been exploring ultra-precision polishing methods suitable for micro-structured surfaces. In order to further optimize the manufacturing efficiency of micro-structured array components and solve the problem of uniform processing of the micro-structured micro-groove surface by abrasive flow in the traditional abrasive jet polishing process, the present application proposes an electrochemical gradient thickening-vibration micro-motion composite conformal ultra-precision manufacturing method and device.

[0003] Electrochemical polishing technology is a kind of surface treatment method for dissolving the anode of metal workpiece in a specific electrochemical polishing liquid environment, thereby reducing the surface roughness, improving the brightness and imparting the metal luster. As a means of metal surface treatment, electrochemical polishing has the following advantages: 1) it can effectively reduce the surface roughness, thereby achieving excellent surface polishing effect; 2) the polishing efficiency is very high, and has no direct relationship with the mechanical properties (such as hardness, toughness, strength, etc.) of the treated material; 3) compared with mechanical polishing equipment, the equipment required for polishing shaped parts is more simple and economical. In the polishing process, the workpiece will not be in contact with the tool (cathode), and there will be no cutting force, heat, burr or tool marks of tool wear.

[0004] It is a difficult problem to maintain the rotating stability of impeller blades, rotors, bearings and the like. Vortex phenomenon is prone to occur in rotating parts due to factors such as system structure itself or external severe interference, resulting in reduced service life or damaged structure. However, the present application utilizes this characteristic to realize microstructure nanopolishing technology, utilizes the excitation micro-motion force perpendicular to the axis generated on the smooth rotor mechanism to induce the rotor to form vortex behavior, so as to achieve efficient conformal removal of materials and control of polishing surface precision

[0005] A complex curved surface part multi-degree-of-freedom ultrasonic electrochemical auxiliary polishing equipment and processing method has been disclosed in a published Chinese invention patent (CN117718551A). The equipment includes a bed body and a five-axis linkage system, a spindle system, a measuring system, a chain tool magazine, a numerical control system and a polishing liquid circulating system installed in the bed body. The tool, the workpiece to be processed and the polishing liquid form a closed loop to constitute an electrochemical system. During the processing, the ultrasonic transducer is turned on, and the polishing liquid circulating system sprays the polishing liquid to the processing position. The workpiece being processed loses electrons as an anode, and under the ultrasonic electrochemical mechanical grinding and polishing coupling effect, the surface material of the workpiece to be processed is removed, the complex curved surface part is ultrasonically electrochemically assisted polished, and a workpiece with good surface quality and low surface roughness is obtained. The present application is fully automatic, and the tool path is controlled by the numerical control system. Compared with the traditional mechanical grinding and polishing, the surface roughness and shape accuracy of the processed part are significantly improved. However, the present patent does not involve the recycling and utilization of electrochemical polishing liquid.

[0006] An ultrasonic vibration and electrochemical auxiliary liquid film shearing high-efficiency polishing device and method has been disclosed in a published Chinese invention patent (CN117584024A). The polishing device includes a polishing tank for containing polishing liquid. The bottom of the polishing tank is provided with a polishing disc, and the polishing disc is arranged on a polishing disc driving spindle. An ultrasonic generator is arranged inside the polishing tank below the polishing disc. A workpiece clamping and driving mechanism is arranged above the polishing tank for clamping and driving the workpiece to rotate. The workpiece clamping and driving mechanism is connected with an adjusting mechanism and can move up and down under the driving of the adjusting mechanism. The polishing tank is connected with the negative electrode of a pulse power supply, and the workpiece clamping and driving mechanism is connected with the positive electrode of the pulse power supply, and a closed loop is formed with the polishing liquid in the polishing tank during polishing. The polishing device combines ultrasonic vibration, electrochemical anodic oxidation and liquid film shearing polishing technologies to polish the workpiece, thereby improving the material removal efficiency and processing uniformity of the workpiece. However, the present patent cannot polish small structure parts, and the type of parts and performance are expected to be further improved.

[0007] A microarray mold conformal polishing method disclosed in Chinese invention patent (CN115401534B) comprises the following steps: a profiling polishing tool head corresponding to the surface shape of a microarray mold is made, abrasive is added between the profiling polishing tool head and the microarray mold, and the microarray mold or the profiling polishing tool head is vibrated at a certain frequency and amplitude through an XY two-dimensional electric moving table. The abrasive between the profiling polishing tool head and the microarray mold produces micro-cutting effect under the relative pressure and relative movement of the two to remove material, thereby removing defects such as knife marks and scratches on the surface of the micro mold. This method can get rid of the limitation of the extremely small size of the feature points of the microarray mold, polish all feature points on the microarray mold at the same time, has high efficiency, and will not damage the surface shape accuracy of the microarray mold, and can achieve high surface shape accuracy and surface quality. However, this patent does not involve electrochemical polishing, and there is still room for improvement in the efficient grinding and polishing of workpieces. SUMMARY

[0008] In order to overcome the shortcomings of the prior art and solve the problem that micro-structure parts are difficult to conform, the present application provides an electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing method and device, which can greatly improve the shape accuracy and achieve atomic or near-atomic polishing precision.

[0009] The technical scheme adopted by the present application to solve its technical problems is:

[0010] An electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing method utilizes electrochemical gradient thickening phase-induced electrochemical interface reaction to guide the directional motion of charged particles and control the particle aggregation effect of the suspension, and then utilizes a flexible fluid abrasive tool to generate a vertical-axis vibration micro-motion force for efficient conformal removal.

[0011] Further, the electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing method comprises the following steps:

[0012] (1) Place the anode workpiece on the polishing workbench, and connect the anode clamp to the anode workpiece and the cathode clamp to the flexible conformal member;

[0013] (2) Turn on the numerical control device to control the path of the flexible conformal member and the process index, so that the starting point is attached to the anode workpiece;

[0014] (3) Add the electrochemical gradient thickening polishing processing suspension containing nano abrasive particles to the storage tank, start the hydraulic pump, and the electrochemical gradient thickening polishing processing suspension flows into the conformal polishing device along the liquid conveying pipe;

[0015] (4) Turn on the circuit controller and the electrochemical thickening generator, the electrochemical gradient thickening phase induces electrochemical interface reaction to guide the directional movement of charged particles and control the particle aggregation effect of the suspension, and the flexible conformal member forms a flexible "fluid abrasive tool" through rheological behavior of the liquid flow;

[0016] (5) Turn on the main shaft box, and generate a vertical excitation micro-motion force on the rotating flexible "fluid abrasive tool", the excitation micro-motion force induces the flexible "fluid abrasive tool" to form a whirling behavior, resulting in an excitation micro-motion polishing liquid regulation dynamic mechanism, which promotes the flexible fluid micro-vibration to facilitate the residence and dynamic trajectory behavior of the flexible "fluid abrasive tool" of the micro-abrasive particles, and in the excitation micro-motion complex action area, the material is efficiently removed and the polishing surface precision is regulated.

[0017] Further, in the (1), the flexible conformal member is provided with a rotor in the inner cavity and a stator at the eccentric position of the outer cavity, and a certain air tightness is maintained; the flexible conformal member deforms according to the shape of the target anode workpiece to highly adhere to the surface of the anode workpiece, and when the flexible conformal member rotates with the rotating shaft, the flexible conformal member generates a vertical excitation micro-motion force, the excitation micro-motion force induces the flexible conformal member to form a whirling behavior, thereby efficiently removing the material in a conformal manner.

[0018] Further, in the (4), the electrochemical gradient thickening phase is a porous microsphere particle, and when the porous microsphere particle is mixed into the electrochemical gradient thickening polishing processing suspension to generate a slow chemical reaction to generate a negatively charged particle, at this time, the negatively charged particle induces the aggregation effect of the positively charged metal nano abrasive particles.

[0019] Preferably, the electrochemical gradient thickening or gradient dilution is realized by the relative quantity ratio of the electrochemical gradient thickening phase and the electrochemical gradient thickening polishing processing suspension.

[0020] The electrochemical gradient thickening phase is a carboxylate, a carbonate, a sulfite, or an amino acid salt, etc.

[0021] In the (3), the nano abrasive particles include one or more than two of nano diamond, cubic boron oxide, boron carbide, silicon carbide, silicon nitride, silicon oxide, gallium oxide, iron oxide, magnesium oxide, lithium fluoride, graphite, or Al2O3.

[0022] In the (3), the electrochemical gradient thickening polishing processing suspension includes an acidic, neutral or alkaline polishing liquid; for processing silicon-based materials or alloy materials, an acidic electrochemical polishing liquid is used, which includes a phosphoric acid system, a sulfuric acid system, a perchloric acid system, a phosphoric acid-sulfuric acid system, and various additives; the electrochemical thickening is mixed with a slow-release substance particle, i.e. a liquid flow property regulation particle, which regulates the contact structure surface property of the liquid flow.

[0023] The slow-release material particles are sodium polyacrylate, polyvinyl alcohol or polyurethane thickening agent, etc.

[0024] An electrochemical gradient thickening-vibration micro-motion composite conformal polishing ultra-precision manufacturing device, comprising a box, a conformal polishing device, a power supply auxiliary device, an electrochemical gradient thickening polishing processing suspension delivery device and a polishing auxiliary device, the conformal polishing device is located at the middle end of the box; the power supply auxiliary device is located at the left end of the box; the electrochemical gradient thickening polishing processing suspension delivery device is located at the right end of the box; the polishing auxiliary device is located inside the box.

[0025] The conformal polishing device comprises, from top to bottom, a spindle box, a spindle, an electrochemical gradient thickening polishing processing suspension flow channel, a current delivery channel, an electrochemical thickening generator, a connecting shaft, a rotating shaft, a flexible conformal component and a detector, the upper end of the spindle is connected to the spindle box, the lower end of the spindle is connected to the electrochemical thickening generator, the electrochemical gradient thickening polishing processing suspension flow channel and the current delivery channel are arranged at the spindle, the connecting shaft connects the electrochemical thickening generator and the rotating shaft, the flexible conformal component and the detector are installed at the rotating shaft.

[0026] Further, the flexible conformal component has a rotor in the inner cavity and a stator at the eccentric position of the outer cavity, and has a certain air tightness.

[0027] The power supply auxiliary device comprises a high-voltage power supply, an anode clamp, a cathode clamp, a circuit protection device, a transformer and a circuit controller, the anode of the power supply is connected to the anode workpiece through the circuit protection device, the cathode of the power supply is connected to the flexible conformal component through the transformer, and the circuit controller is responsible for controlling the circuit power supply and the current.

[0028] The electrochemical gradient thickening polishing processing suspension delivery device comprises a liquid delivery pipe, a hydraulic pump, a storage tank and a recovery tank, the electrochemical gradient thickening polishing processing suspension liquid flows through the liquid delivery pipe, the hydraulic pump, the conformal polishing device and the inner cavity of the flexible conformal component in sequence, and then flows into the recovery tank through the through hole of the polishing workbench, so as to complete the electrochemical polishing liquid delivery and recovery.

[0029] The polishing auxiliary device comprises a numerical control device, a landing gear, a moving frame, a slide, an x-axis guide rail, a y-axis guide rail, a z-axis guide rail, an anode workpiece, a clamp and a polishing workbench, the landing gear, the moving frame and the slide are connected to each other through the x-axis guide rail, the y-axis guide rail or the z-axis guide rail, the numerical control device controls the movement thereof, the z-axis guide rail on the slide is connected to the conformal polishing device, the lower end of the conformal polishing device is the polishing workbench, the clamp is arranged on the polishing workbench, and the anode workpiece is arranged at the clamp.

[0030] The electrochemical thickening generator can realize the controllable gradient change of the viscosity of the electrochemical gradient thickening polishing processing suspension, and realizes the optimal viscosity threshold effective control of rheological property, and achieves the timely rigidity stability of the flexible fluid tool.

[0031] The numerical control device can not only adjust the degrees of freedom of the conformal polishing system, but also control the conformal path and process indexes, controllably adjust the removal track and residence state parameters, actively adjust the surface fitting and deterministic material removal, further improve the precision of the large-area microstructure surface of the workpiece, and achieve the shape preserving effect.

[0032] The detector can timely track the material removal process, timely feedback when over-polishing or under-polishing occurs, and prevent damage to the microstructure caused by processing errors.

[0033] The polishing workbench is provided with a clamp for fixing the anode workpiece. The polishing workbench is provided with a through hole, so that the electrochemical gradient thickening polishing processing suspension can flow into the recovery tank after processing.

[0034] The main shaft is provided with an electrochemical gradient thickening polishing processing suspension flow channel and a current conveying channel, and the electrochemical gradient thickening polishing processing suspension can flow into the conformal polishing system through the electrochemical gradient thickening polishing processing suspension flow channel, and the cathode clamp can be conveyed to the connected flexible conformal member through the current conveying channel.

[0035] The anode workpiece is a single crystal silicon or silicon carbide spherical / aspherical lens substrate material of an infrared optical system, a micro sensing component, a stainless steel micro gear bolt nut, etc.

[0036] The commonly used high-voltage power supply for electrochemical processing is a silicon rectifier power supply and a thyristor rectifier power supply. The circuit protection device is effective to prevent damage caused by short circuit or excessive current of the circuit.

[0037] The beneficial effects of the present application mainly include:

[0038] 1. Rich types of processed workpieces. The device involved in the present application can process different types of workpieces, such as microarray parts, micro sensing parts, micro gear bolt nut basic parts, etc.

[0039] 2. The excitation micro-vibration structure is arranged in the polishing fluid tool inner cavity. A smooth rotor is arranged in the outer cavity, and an eccentric stator is arranged. Force analysis or dynamic distribution is generated on the smooth rotor mechanism to generate excitation micro-vibration force perpendicular to the axis. The excitation micro-vibration force induces the rotor to form vortex behavior, causes the excitation micro-vibration polishing liquid regulation dynamics mechanism, and promotes the flexible fluid micro-vibration to facilitate the residence and dynamic trajectory behavior of the flexible "fluid tool" of the micro-abrasive. In the excitation micro-vibration complex action area, the material efficient conformal removal and the regulation polishing surface precision are achieved. The electrochemical thickening and the integration of temperature-sensitive or slow-release physical particles (i.e. liquid flow property regulation particles) regulate the liquid flow contact structure surface affinity characteristics

[0040] 3. The numerical control system advantage. The polishing system can be regulated in the x-axis, y-axis, and z-axis three-dimensional space, and can be regulated for different sizes of parts. It is compatible with various parts processing. In addition, the control as-path and process index can controllably adjust the removal trajectory and residence state parameters, actively adjust the surface coincidence, and determine the material removal, further improving the surface precision of the large-area microstructure of the workpiece.

[0041] 4. The surface precision is extremely high. Under the action of the electrochemical thickening generator, a specific electrochemical gradient thickening effect is generated, and the "flexibility" characteristics of the fluid tool are further regulated in the excitation micro-vibration area. The fluid tool liquid flow is weakly rigid rheological and forms a flexible "fluid abrasive tool" at the right time. When the as-path device controls the dynamic movement of the workpiece and the flexible fluid tool (fluid abrasive tool), the flexible fluid-contact structure surface affinity characteristics are regulated to facilitate the large-area contact of the micro-abrasive with the structure surface of the target workpiece, and the micro-abrasive efficiently removes the material.

[0042] 5. The polishing equipment required by the present application is relatively low. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 It is an electrochemical gradient thickening-excitation micro-vibration composite conformal polishing ultra-precision manufacturing device schematic diagram.

[0044] Figure 2 It is an electrochemical gradient thickening-excitation micro-vibration composite conformal polishing ultra-precision manufacturing device polishing method schematic diagram.

[0045] Figure 3 It is an electrochemical gradient thickening polishing processing suspension gradient thickening mechanism schematic diagram.

[0046] Figure 4 It is an electrochemical gradient thickening-excitation micro-vibration composite conformal polishing ultra-precision manufacturing device polishing auxiliary device schematic diagram.

[0047] Figure 5 It is an anode workpiece schematic diagram, wherein (a) represents a microlens structure, (b) represents a microlens structure, (c) represents a cylindrical array microstructure, and (d) represents a tetrahedron array microstructure.

[0048] Wherein, 1, box; 2, circuit controller; 3, landing gear; 4, slide; 5, z-axis guide rail; 6, x-axis guide rail; 7, moving frame; 8, numerical control device; 9, infusion tube; 10, hydraulic pump; 11, storage tank; 12, y-axis guide rail; 13, recovery tank; 14, anode workpiece; 15, polishing workbench; 16, electrochemical thickening generator; 17, circuit protection device; 18, high-voltage power supply; 19, transformer; 20, main shaft box; 21, main shaft; 22, electrochemical gradient thickening polishing processing suspension flow channel; 23, current delivery channel; 24, connecting shaft; 25, rotating shaft; 26, flexible conformal component; 27, detector; 28, electrochemical gradient thickening phase; 29, nano abrasive particles; 30, stator; 31, rotor; 32, excitation; 33, aggregation effect; 34, vortex. DETAILED DESCRIPTION

[0049] The application will be further described below with reference to the accompanying drawings.

[0050] Referring to Figures 1-5 An electrochemical gradient thickening-excitation micro-motion composite conformal polishing ultra-precision manufacturing method, which utilizes an electrochemical gradient thickening phase 28 to induce an electrochemical interface reaction to guide the directional motion of charged particles and control the particle aggregation effect of the suspension, and then utilizes a flexible fluid abrasive tool to generate excitation micro-motion force perpendicular to the axis to achieve efficient conformal removal. This method can greatly improve the shape precision and achieve atomic or near-atomic scale polishing precision.

[0051] An electrochemical gradient thickening-excitation micro-motion composite conformal polishing ultra-precision manufacturing device, which comprises a box 1, a conformal polishing device, a power supply auxiliary device, an electrochemical gradient thickening polishing processing suspension delivery device, and a polishing auxiliary device. The conformal polishing device comprises, from top to bottom, a main shaft box 20, a main shaft 21, an electrochemical gradient thickening polishing processing suspension flow channel 22, a current delivery channel 23, an electrochemical thickening generator 16, a connecting shaft 24, a rotating shaft 25, a flexible conformal component 26, and a detector 27, and the conformal polishing device is located at the middle end of the box 1. The power supply auxiliary device comprises a high-voltage power supply 18, an anode clamp, a cathode clamp, a circuit protection device 17, a transformer 19, and a circuit controller 2, and the power supply auxiliary device is located at the left end of the box 1. The electrochemical gradient thickening polishing processing suspension delivery device comprises an infusion tube 9, a hydraulic pump 10, a storage tank 11, and a recovery tank 13, and the electrochemical gradient thickening polishing processing suspension delivery device is located at the right end of the box 1. The polishing auxiliary device comprises a numerical control device 8, a landing gear 3, a moving frame 7, a slide 4, an x-axis guide rail 6, a y-axis guide rail 12, a z-axis guide rail 5, an anode workpiece 14, a clamp, and a polishing workbench 15, and the polishing device is located inside the box 1.

[0052] The profile-following polishing device sequentially comprises a spindle box 20, a spindle 21, an electrochemical gradient thickening polishing processing suspension flow channel 22, an electric current delivery channel 23, an electrochemical thickening generator 16, a connecting shaft 24, a rotating shaft 25, a flexible profile-following member 26 and a detector 27 from top to bottom, and the profile-following polishing device is located at the middle end of the box body 1; the upper end of the spindle 21 is connected with the spindle box 20, and the lower end is connected with the electrochemical thickening generator 16; the electrochemical gradient thickening polishing processing suspension flow channel 22 and the electric current delivery channel 23 are arranged at the spindle 21; the connecting shaft 24 connects the electrochemical thickening generator 16 and the rotating shaft 25; the flexible profile-following member 26 and the detector 27 are arranged at the rotating shaft 25.

[0053] The electrochemical thickening generator 16 can realize that the viscosity of the electrochemical gradient thickening polishing processing suspension presents a controllable gradient change, is thickened in a gradient manner, effectively controls the rheological property at an optimal viscosity threshold, and achieves the timely rigidity stability of the flexible fluid tool.

[0054] The flexible profile-following member 26 is provided with a rotor in the inner cavity and a stator at the eccentric position of the outer cavity, and has a certain air tightness. The flexible profile-following member 26 can be deformed according to the shape of the target anode workpiece 14 to highly adhere to the surface of the anode 14 workpiece. When the flexible profile-following member 26 rotates with the rotating shaft 25, the flexible profile-following member 26 generates a vertical-axis excitation micro-motion force, the excitation micro-motion force induces the flexible profile-following member 26 to form a whirling behavior, and the material is efficiently removed in a high-precision shape.

[0055] The detector 27 can timely track the material removal process, timely feedback when over-polishing or under-polishing occurs, and prevent damage to the microstructure caused by processing errors.

[0056] The spindle 21 is provided with the electrochemical gradient thickening polishing processing suspension flow channel 22 and the electric current delivery channel 23, the electrochemical gradient thickening polishing processing suspension can flow into the profile-following polishing system through the electrochemical gradient thickening polishing processing suspension flow channel 22, and the cathode clamp can be connected with the flexible profile-following member 26 through the electric current delivery channel.

[0057] The power supply auxiliary device comprises a high-voltage power supply 18, an anode clamp, a cathode clamp, a circuit protection device 17, a transformer 19 and a circuit controller 2, and the power supply auxiliary device is located at the left end of the box body 1; the anode of the power supply is connected with the anode workpiece 14 through the circuit protection device 17, the cathode of the power supply is connected with the flexible profile-following member 26 through the transformer 19, and the circuit controller 2 is responsible for controlling the circuit power supply and the electric current.

[0058] The high-voltage power supply 18 is a silicon rectifier power supply and a thyristor rectifier power supply. The circuit protection device 17 is effective in preventing damage caused by short circuit or excessive current in the circuit.

[0059] The electrochemical gradient thickening polishing processing suspension liquid delivery device includes a liquid delivery pipe 9, a hydraulic pump 10, a storage tank 11 and a recovery tank 13, and is located at the right end of the box body 1; the electrochemical gradient thickening polishing processing suspension liquid flows through the liquid delivery pipe 9, sequentially passes through the hydraulic pump 10, the conformal polishing device and reaches the inner cavity of the flexible conformal member 26, and then flows into the recovery tank 13 through the through hole of the polishing workbench 15, so as to complete the electrochemical polishing liquid delivery and recovery.

[0060] In the embodiment, the electrochemical gradient thickening polishing processing suspension liquid contains nano abrasive particles 29, and the nano abrasive particles 29 include one or more of nano diamond, cubic boron oxide, boron carbide, silicon carbide, silicon nitride, silicon oxide, gallium oxide, iron oxide, magnesium oxide, lithium fluoride, graphite and Al2O3.

[0061] The electrochemical gradient thickening polishing processing suspension liquid generally includes acidic, neutral and alkaline polishing liquids. For processing silicon-based materials or alloy materials, the acidic electrochemical polishing liquid is mainly used, which includes phosphoric acid, sulfuric acid, perchloric acid, phosphoric acid-sulfuric acid and various additives.

[0062] The electrochemical gradient thickening polishing processing suspension liquid of the embodiment includes the following components with the following mass percentages: in the ultrapure water at 25℃, nano abrasive particles, a pH adjusting agent, a slow-release physicochemical particle, an oxidizing agent and an electrochemical gradient thickening phase (ferrous sulfate, sodium sulfite, etc.) are added to prepare the polishing processing suspension liquid. The mass fraction of the nano abrasive particles is between 7% and 20%, the mass fraction of the pH adjusting agent is between 0.05% and 1.0%, the mass fraction of the slow-release physicochemical particle is between 0.05% and 1.0%, the mass fraction of the oxidizing agent is between 0.05% and 0.1%, and the mass fraction of the electrochemical gradient thickening phase is between 1% and 10%.

[0063] The polishing auxiliary device includes a numerical control device 8, a landing gear 3, a moving frame 7, a slide 4, an x-axis guide rail 6, a y-axis guide rail 12, a z-axis guide rail 5, an anode workpiece 14, a clamp and a polishing workbench 15, and is located in the box body 1; the landing gear 3, the moving frame 7 and the slide 4 are connected with each other through the x-axis guide rail 6, the y-axis guide rail 12 or the z-axis guide rail 5, and the numerical control device 8 controls the movement thereof; the z-axis guide rail 5 on the slide 4 is connected with the conformal polishing device, the lower end of the conformal polishing device is the polishing workbench 15, the polishing workbench 15 is provided with the clamp, and the clamp is provided with the anode workpiece.

[0064] The numerical control device 8 can not only adjust the freedom of the conformal polishing system, but also control the conformal path and process index, controllably adjust the removal trajectory and residence state parameters, actively adjust the surface fitting, determine the material removal, further improve the precision of the large-area microstructure surface of the workpiece, and achieve the shape preserving effect.

[0065] The polishing workbench 15 is provided with a clamp for fixing the anode workpiece 14. The polishing workbench 15 is provided with a through hole, so that the electrochemical gradient thickening polishing machining suspension solution after processing flows into the recovery tank 13.

[0066] The anode workpiece 14 is a single crystal silicon or silicon carbide lens substrate material, a micro sensor component, a stainless steel micro gear bolt nut, etc. of an infrared optical system.

[0067] An electrochemical gradient thickening-vibrational micro motion composite conformal polishing ultra-precision manufacturing method, comprising the following steps:

[0068] (1) placing the anode workpiece 14 on the polishing workbench 15, and connecting the anode clamp to the anode workpiece 14 and the cathode clamp to the flexible conformal member 26;

[0069] (2) turning on the numerical control device 8, controlling the path and process index of the flexible conformal member 26, and making the starting point fit on the anode workpiece 14;

[0070] (3) adding the electrochemical gradient thickening polishing machining suspension solution containing nano abrasive particles 29 into the storage tank 11, and turning on the hydraulic pump 10, so that the electrochemical gradient thickening polishing machining suspension solution flows into the conformal polishing device along the liquid delivery pipe 9;

[0071] (4) turning on the circuit controller 2 and the electrochemical thickening generator 16, the electrochemical gradient thickening phase 28 induces the electrochemical interface reaction to guide the directional motion of the charged particles and control the particle aggregation effect of the suspension solution, and the flexible conformal member 26 is rheologically weakly rigid to form a flexible "fluid abrasive tool";

[0072] (5) turning on the spindle box 20, generating a vertical excitation micro motion force on the rotating flexible "fluid abrasive tool", the excitation micro motion force induces the flexible "fluid abrasive tool" to form a vortex behavior, resulting in an excitation micro motion polishing liquid regulation dynamics mechanism, promoting the flexible fluid micro vibration to facilitate the residence and dynamic trajectory behavior of the flexible "fluid abrasive tool" of the micro abrasive particles, in the excitation micro motion composite action area, achieving efficient conformal material removal and regulating polishing surface precision, thereby realizing the electrochemical gradient thickening-excitation micro motion composite conformal ultra-precision manufacturing new method.

[0073] Example 1

[0074] The present application is used for processing silicon carbide micro-lens structures with the size of: the processing structure period is designed as 1.5 mm, and the height is designed as 0.5 mm Figure 5 a). The method and the device can make the surface roughness of the silicon carbide micro-lens structure be less than 2 nm, and the shape precision be less than 200 nm.

[0075] The electrochemical gradient thickening-vibrational micro-motion composite conformal polishing ultra-precision manufacturing comprises the following steps:

[0076] (1) the micro-lens workpiece is placed on the polishing workbench 15, and the anode clamp is connected to the micro-lens workpiece, and the cathode clamp is connected to the flexible conformal component 26;

[0077] (2) the numerical control device 8 is started, the path of the flexible conformal component 26 and the process index are controlled, so that the starting point is attached to the micro-lens workpiece;

[0078] (3) the electrochemical gradient thickening polishing processing suspension containing nano abrasive particles 29 is added to the storage tank 11, the hydraulic pump 10 is started, and the electrochemical gradient thickening polishing processing suspension flows into the conformal polishing device along the liquid conveying pipe 9;

[0079] (4) the circuit controller 2 and the electrochemical thickening generator 16 are started, the electrochemical gradient thickening phase 28 induces the electrochemical interface reaction to guide the directional motion of the charged particles and control the particle aggregation effect of the suspension, and the flexible conformal component 26 is rheologically formed into a flexible "fluid abrasive tool" in time;

[0080] (5) the main shaft box 20 is started, the vertical excitation micro-motion force is generated on the rotating flexible "fluid abrasive tool", the excitation micro-motion force induces the flexible "fluid abrasive tool" to form a vortex behavior, causes the excitation micro-motion polishing liquid to regulate the dynamic mechanism, promotes the flexible fluid micro-vibration to facilitate the residence and dynamic trajectory behavior of the flexible "fluid abrasive tool" of the micro abrasive particles, in the excitation micro-motion composite action area, the material efficient conformal removal and the polishing surface precision regulation are achieved, so that the new method of electrochemical gradient thickening-excitation micro-motion composite conformal ultra-precision manufacturing is realized.

[0081] Example 2

[0082] The present application is used for processing silicon carbide micro-lens structures with the size of: the processing structure period is designed as 1.5 mm, and the height is designed as 0.5 mm Figure 5 b). The method and the device can make the surface roughness of the silicon carbide micro-lens structure be less than 2 nm, and the shape precision be less than 200 nm.

[0083] The electrochemical gradient thickening-vibrational micro-motion composite conformal polishing ultra-precision manufacturing comprises the following steps:

[0084] (1) Put the micro-prism workpiece on the polishing workbench 15, and connect the anode clamp to the micro-prism workpiece and the cathode clamp to the flexible conformal member 26;

[0085] (2) Turn on the numerical control device 8 to control the path of the flexible conformal member 26 and the process index, so that the starting point is attached to the micro-prism workpiece;

[0086] (3) Add the electrochemical gradient thickening polishing processing suspension containing nano abrasive particles 29 to the storage tank 11, and turn on the hydraulic pump 10, so that the electrochemical gradient thickening polishing processing suspension flows into the conformal polishing device along the liquid delivery pipe 9;

[0087] (4) Turn on the circuit controller 2 and the electrochemical thickening generator 16, and the electrochemical gradient thickening phase 28 induces the directional movement of charged particles and controls the particle aggregation effect of the suspension, and the flexible conformal member 26 is rheologically weakly rigid to form a flexible "fluid abrasive tool";

[0088] (5) Turn on the spindle box 20, and the rotating flexible "fluid abrasive tool" generates a vertical excitation micro-motion force, which induces the flexible "fluid abrasive tool" to form a whirling behavior, resulting in an excitation micro-motion polishing liquid regulation dynamic mechanism, which promotes the flexible fluid micro-vibration to facilitate the residence and dynamic trajectory behavior of the flexible "fluid abrasive tool" of the micro-abrasive particles, and in the excitation micro-motion complex action area, the material is efficiently removed and the polishing shape precision is regulated, thereby realizing the electrochemical gradient thickening-excitation micro-motion complex conformal ultra-precision manufacturing new method.

[0089] Example 3

[0090] The present application is used for processing a single crystal silicon cylindrical array microstructure with a size of: the processing structure period is designed to be 1.8 mm, and the height is designed to be 0.4 mm Figure 5 c). The method and device can make the surface roughness Ra of the single crystal silicon cylindrical array microstructure be less than 2.3 nm, and the shape precision PV be less than 200 nm.

[0091] The electrochemical gradient thickening-excitation micro-motion complex conformal polishing ultra-precision manufacturing includes the following steps:

[0092] (1) Put the cylindrical array microstructure workpiece on the polishing workbench 15, and connect the anode clamp to the cylindrical array microstructure workpiece and the cathode clamp to the flexible conformal member 26;

[0093] (2) Turn on the numerical control device 8 to control the path of the flexible conformal member 26 and the process index, so that the starting point is attached to the cylindrical array microstructure workpiece;

[0094] (3) The electrochemical gradient thickening polishing processing suspension containing nano abrasive particles 29 is added into the storage tank 11, the hydraulic pump 10 is started, and the electrochemical gradient thickening polishing processing suspension flows into the conformal polishing device along the liquid delivery pipe 9;

[0095] (4) The circuit controller 2 and the electrochemical thickening generator 16 are started, the electrochemical gradient thickening phase 28 induces electrochemical interface reaction to guide the directional movement of charged particles and control the particle aggregation effect of the suspension, the flexible conformal member 26 flows and weakly rheologically forms a flexible "fluid abrasive tool";

[0096] (5) The main shaft box 20 is started, the vertical exciting micro-motion force is generated on the rotating flexible "fluid abrasive tool", the exciting micro-motion force induces the flexible "fluid abrasive tool" to form vortex behavior, causes the exciting micro-motion polishing liquid to regulate the dynamic mechanism, promotes the flexible fluid micro-vibration to facilitate the residence and dynamic trajectory behavior of the micro-abrasive flexible "fluid abrasive tool", in the exciting micro-motion complex action area, the material efficient conformal removal and the polishing shape precision regulation are achieved, so as to realize the electrochemical gradient thickening-exciting micro-motion complex conformal ultra-precision manufacturing new method.

[0097] The content described in the embodiments of the present specification is only a list of implementation forms of the inventive concept, and is only used for the purpose of description. The protection scope of the present application should not be regarded as being limited to the specific forms stated in the present embodiments, and the protection scope of the present application also extends to the equivalent technical means that can be thought of by those skilled in the art according to the inventive concept.

Claims

1. An electrochemical gradient densification-vibration micro-rotation composite conformal polishing ultra-precision manufacturing method, characterized in that, The charged particles are guided to move directionally and the particle aggregation effect of the suspension is controlled by using electrochemical gradient thickening phase to induce electrochemical interface reaction, and then the flexible fluid abrasive tool is used to generate exciting micro-motion power perpendicular to the axis to remove the material efficiently and conformably. The electrochemical gradient thickening-exciting micro-motion composite conformal polishing ultra-precision manufacturing method comprises the following steps: (1) The anode workpiece is placed on the polishing workbench, and the anode clamp is connected to the anode workpiece, and the cathode clamp is connected to the flexible conformal member of the conformal polishing device, the inner cavity of the flexible conformal member is provided with a rotor, and the outer cavity is provided with a stator at the eccentric position, and a certain air tightness is maintained; the flexible conformal member deforms according to the shape of the target anode workpiece to highly adhere to the surface of the anode workpiece, and when the flexible conformal member rotates with the rotating shaft, the flexible conformal member generates exciting micro-motion power perpendicular to the axis, the exciting micro-motion power induces the flexible conformal member to form vortex behavior, thereby efficiently removing the material conformally; (2) The numerical control device is turned on to control the path of the flexible conformal member and the process index, so that the starting point adheres to the anode workpiece; (3) The electrochemical gradient thickening polishing processing suspension containing nano abrasive particles is added to the storage tank, and the hydraulic pump is turned on, and the electrochemical gradient thickening polishing processing suspension flows into the conformal polishing device along the liquid conveying pipe; (4) The circuit controller and the electrochemical thickening generator are turned on, the electrochemical gradient thickening phase induces electrochemical interface reaction to guide the directional movement of the charged particles and control the particle aggregation effect of the suspension, and the flexible conformal member flows to form a flexible "fluid abrasive tool" with weak rheological property; (5) The spindle box is turned on, the rotating flexible "fluid abrasive tool" generates exciting micro-motion power perpendicular to the axis, the exciting micro-motion power induces the flexible "fluid abrasive tool" to form vortex behavior, resulting in exciting micro-motion polishing liquid regulation dynamics mechanism, promoting the flexible fluid micro-vibration to facilitate the residence and dynamic trajectory behavior of the flexible "fluid abrasive tool" of the micro-abrasive particles, and achieving efficient conformal material removal and regulation of polishing surface precision in the exciting micro-motion composite action area.

2. The electrochemical gradient densification-vibratory micromotion combined conformal polishing super-precision manufacturing method according to claim 1, wherein, In the step (4), the electrochemical gradient thickening phase is a porous microsphere particle, when the porous microsphere particle is mixed into the electrochemical gradient thickening polishing processing suspension to generate a slow chemical reaction to generate negatively charged particles, at this time, the negatively charged particles induce the aggregation effect of the positively charged metal nano abrasive particles.

3. The electrochemical gradient densification-vibratory micromotion combined conformal polishing super-precision manufacturing method according to claim 1, wherein, In the step (3), the nano abrasive particles include one or more than two kinds of mixture of nano diamond, cubic boron oxide, boron carbide, silicon carbide, silicon nitride, silicon oxide, gallium oxide, iron oxide, magnesium oxide, lithium fluoride, graphite or Al2O3.

4. The electrochemical gradient densification-vibratory micromotion combined conformal polishing super-precision manufacturing method according to claim 1, wherein, In the step (3), the electrochemical gradient thickening polishing processing suspension includes acidic, neutral or alkaline polishing liquid; for processing silicon-based materials or alloy materials, an acidic electrochemical polishing liquid is used, which includes phosphoric acid system, sulfuric acid system, perchloric acid system, phosphoric acid-sulfuric acid system, and various additives; the electrochemical thickening is mixed with slow-release substance particles, that is, the liquid flow property is adjusted to control the surface wettability of the contact structure.

5. An electrochemical gradient thickening-vibration micro-motion combined conformal polishing ultra-precision manufacturing device for realizing the electrochemical gradient thickening-vibration micro-motion combined conformal polishing ultra-precision manufacturing method according to claim 1, characterized in that, The utility model relates to a box, along with the polishing device, power supply auxiliary device, electrochemical gradient thickening polishing processing suspension delivery device and polishing auxiliary device, the polishing device is located in the middle end of the box, the power supply auxiliary device is located in the left end of the box, the electrochemical gradient thickening polishing processing suspension delivery device is located in the right end of the box, and the polishing auxiliary device is located in the inside of the box. The polishing device comprises a main shaft box, a main shaft, an electrochemical gradient thickening polishing processing suspension flow channel, a current delivery channel, an electrochemical thickening generator, a connecting shaft, a rotating shaft, a flexible along-with component and a detector from top to bottom.

6. The electrochemical gradient densification-vibration micro-oscillation combined conformal polishing and ultra-precision manufacturing device of claim 5, wherein, The power supply auxiliary device comprises a high-voltage power supply, an anode clamp, a cathode clamp, a circuit protection device, a transformer and a circuit controller, the anode of the power supply is connected with the anode workpiece through the circuit protection device, the cathode of the power supply is connected with the flexible along-with component through the transformer, and the circuit controller is responsible for controlling the circuit power supply and the current.

7. The electrochemical gradient densification-vibration micro-oscillation combined conformal polishing ultra-precision manufacturing device according to claim 5 or 6, characterized in that, The electrochemical gradient thickening polishing processing suspension delivery device comprises a liquid delivery pipe, a hydraulic pump, a storage tank and a recovery tank, and the electrochemical gradient thickening polishing processing suspension liquid flows through the liquid delivery pipe, the hydraulic pump, the along-with polishing device and the flexible along-with component in sequence, and then flows into the recovery tank through the through hole of the polishing workbench to complete electrochemical polishing liquid delivery and recovery.

8. The electrochemical gradient densification-vibration micro-oscillation combined conformal polishing ultra-precision manufacturing device according to claim 5 or 6, characterized in that, The polishing auxiliary device comprises a numerical control device, a landing gear, a moving frame, a slide, an x-axis guide rail, a y-axis guide rail, a z-axis guide rail, an anode workpiece, a clamp and a polishing workbench, the landing gear, the moving frame and the slide are connected with each other through the x-axis guide rail, the y-axis guide rail or the z-axis guide rail, the numerical control device controls the movement, the z-axis guide rail on the slide is connected with the along-with polishing device, the lower end of the along-with polishing device is the polishing workbench, the clamp is arranged on the polishing workbench, and the anode workpiece is arranged on the clamp.

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