Precision machining tool and machining method for side face of ultrathin element

Abstract

The invention relates to an ultrathin component side face precision machining clamping tool and machining method.The clamping tool comprises a workpiece disc, a supporting frame, a tool mounting plate and a component positioning plate, a component penetrating hole is formed in the center of the workpiece disc, and the supporting frame is arranged on the workpiece disc and located on the periphery of the component penetrating hole; the tool mounting plate is arranged on the support frame in a sliding manner, and is vertical to the workpiece disc; the element positioning plate is arranged on the tool mounting plate in parallel, and a floating pressure adjusting mechanism is arranged between the upper end of the element positioning plate and the supporting frame. According to the method, the perpendicularity of the machined side face and the large face and the perpendicularity of the two adjacent side faces of the ultrathin element can be within 2 micrometers, it can be guaranteed that the relative relation of the perpendicularity of the machined side face and the large face is not changed in the machining process, and a reliable foundation is provided for subsequent assembly and use of the element; error accumulation and performance reduction caused by perpendicularity deviation are reduced, and the flatness of the machined side face of the ultra-thin element reaches the submicron level.

Description

Technical Field

[0001] The invention relates to the technical field of workpiece grinding, and in particular to a clamping tool and a processing method for precision machining of the side surface of an ultra-thin component. Background Art

[0002] With the rapid development of modern science and technology, especially in the fields of microelectronics, optics and precision machinery, ultra-thin components are increasingly used. These components usually have extremely high precision requirements, especially in the processing of their sides, which need to achieve sub-micron flatness and micron verticality. However, existing processing technology faces many challenges when processing the sides of ultra-thin components.

[0003] Difficulty in controlling flatness: Traditional processing methods have difficulty achieving submicron-level flatness requirements when processing the sides of ultra-thin components. Due to the extremely small thickness of the components, deformation is prone to occur during processing, resulting in substandard flatness.

[0004] Verticality is difficult to ensure: The verticality of the side surface of ultra-thin components to the large surface and adjacent side surfaces is extremely high, usually within 2 microns. However, existing processing equipment and processes are insufficient in maintaining such high-precision verticality. During the processing, the relative position of the components is prone to change, resulting in verticality deviation.

[0005] Stability issues during processing: Due to the fragile structure of ultra-thin components, they are easily affected by external factors during processing, such as vibration, temperature changes, etc. These factors will lead to unstable processing accuracy, thus affecting the quality and performance of the product.

[0006] Complex tooling design: In order to meet high-precision processing requirements, existing tooling designs often require complex structures and high-precision components, which not only increases manufacturing costs, but also makes debugging and maintenance during the processing more difficult. Summary of the invention

[0007] To this end, the technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide a clamping tool and processing method for precision machining of the side of an ultra-thin component, so that the flatness of the microwave component during the machining process is significantly improved, meeting the needs of high-precision applications.

[0008] In the first aspect, in order to solve the above technical problems, the present invention provides a clamping tool for precision machining of the side of ultra-thin components, comprising: a workpiece disk, a support frame, a tool mounting plate and a component positioning plate, wherein the workpiece disk is provided with a component through hole at the center, the support frame is arranged on the workpiece disk and is located at the periphery of the component through hole; the tool mounting plate is slidably arranged on the support frame and is kept vertically with the workpiece disk; the component positioning plate is arranged parallel to the tool mounting plate; the component positioning plate is used to install ultra-thin components, and a floating pressure regulating mechanism is arranged between the upper end of the component positioning plate and the support frame. When the tool mounting plate moves up and down along the support frame, the component positioning plate drives the ultra-thin components to achieve synchronous up and down floating.

[0009] In one embodiment of the present invention, the support frame includes a bottom plate, a top plate and guide columns, the bottom plate is arranged on the workpiece disk, the top plate and the bottom plate are connected by guide columns, and the guide columns are kept vertical to the workpiece disk.

[0010] In one embodiment of the present invention, the tooling installation plates include two, which are arranged opposite to each other on the support frame, and both ends of each of the tooling installation plates are slidably connected to the guide column through a linear bearing.

[0011] In one embodiment of the present invention, a pressing plate is provided on the tooling installation plate, and the pressing plate is connected to the component positioning plate via a fastener to press the component positioning plate from the top.

[0012] In one embodiment of the present invention, a floating pressure adjustment mechanism is provided between the upper end of the component positioning plate and the support frame.

[0013] In one embodiment of the present invention, the floating pressure adjustment mechanism includes an adjustment screw and a spring, wherein the adjustment screw is arranged between the tooling mounting plate and the top plate, and the spring is arranged on the outside of the adjustment screw.

[0014] In one embodiment of the present invention, the component positioning plate includes a substrate, a pad, a positioning block and a pressure strip, the pad is arranged on the surface of the substrate, a positioning block is provided on one side of the substrate, and the pressure strip and the positioning block are connected by fasteners for fixing the processed ultra-thin component on the pad.

[0015] In one embodiment of the present invention, a first locking and fixing device is provided on the substrate on the opposite side of the positioning block, which is used to press the ultra-thin element to be processed from the side; a gasket is also provided on the positioning block, and the gasket corresponds one-to-one to the first locking and fixing device.

[0016] In one embodiment of the present invention, a second locking device is further provided on the base plate for pressing the ultra-thin element to be processed from the top.

[0017] In one embodiment of the present invention, the first locking and fixing device and the second locking and fixing device include a top screw fixing block and a tightening screw, the top screw fixing block is arranged on the component positioning plate, and the tightening screw is arranged on the top screw fixing block.

[0018] In a second aspect, in order to achieve the above technical problem, the present invention provides a method for precision machining of the side surface of an ultra-thin component, which is implemented by using the ultra-thin component side precision machining clamping tooling described in the first aspect, and the specific steps are as follows: (1) placing the ultra-thin workpiece to be processed on the component positioning plate; (2) The ultra-thin component is fixed by means of a pressure strip, a first locking and fixing device, and a second locking and fixing device to ensure that the verticality between the processed side surface of the ultra-thin workpiece and the large surface and the two adjacent side surfaces is within 2 microns; (3) Align the side to be processed of the ultra-thin workpiece with the polishing tool; (4) The floating pressure of the tooling mounting plate is adjusted through the floating pressure adjustment mechanism to ensure that the ultra-thin components are subjected to appropriate clamping force during processing; (5) Polishing the side to be processed of the ultra-thin workpiece by a polishing tool; (6) During the processing of the ultra-thin workpiece, the workpiece mounting plate moves up and down along the support frame, thereby driving the component positioning plate and the ultra-thin workpiece mounted thereon to float up and down synchronously, so that the polishing tool maintains a constant cutting force during the processing; (7) After processing is completed, remove the processed ultra-thin workpiece.

[0019] The above technical solution of the present invention has the following beneficial effects compared with the prior art: The ultra-thin component side precision machining clamping tool described in the present invention can ensure that the perpendicularity of the processed side surface and the large surface and two adjacent side surfaces of the ultra-thin component is within 2 microns, and can ensure that the relative relationship between the perpendicularity of the processed side surface and the large surface does not change during the machining process. This high-precision verticality control provides a reliable basis for the subsequent assembly and use of the component, reduces the error accumulation and performance degradation caused by verticality deviation, and makes the flatness of the processed side surface of the ultra-thin component reach the sub-micron level. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein Figure 1It is a schematic diagram of the structure of the clamping tool for precision machining of the side of an ultra-thin component in a preferred embodiment of the present invention; Figure 2 It is a structural schematic diagram of the component positioning plate of the present invention; Explanation of the reference numerals in the specification: 1. workpiece plate; 2. support frame; 21. bottom plate; 22. top plate; 23. guide column; 3. tooling mounting plate; 4. component positioning plate; 6. floating pressure adjustment mechanism; 7. first locking and fixing device; 8. second locking device; 9. linear bearing. DETAILED DESCRIPTION

[0021] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention. Embodiment 1

[0022] Reference Figure 1-2 As shown, the present invention provides a clamping tool for precision machining of the side of ultra-thin components, comprising: a workpiece disk 1, a support frame 2, a tool mounting plate 3 and a component positioning plate 4, wherein a component through hole 11 is provided at the center of the workpiece disk 1, and the support frame 2 is arranged on the workpiece disk 1 and is located at the periphery of the component through hole 11; the tool mounting plate 3 is slidably arranged on the support frame 2 and is kept vertically with the workpiece disk 1; the component positioning plate 4 is arranged parallel to the tool mounting plate 3; the component positioning plate 4 is used to install ultra-thin components; a floating pressure regulating mechanism 6 is arranged between the upper end of the component positioning plate 4 and the support frame 2. When the tool mounting plate 3 moves up and down along the support frame 2, the component positioning plate 4 drives the ultra-thin components to achieve synchronous up and down floating.

[0023] By setting the workpiece disk 1, the support frame 2, the tooling installation plate 3 and the component positioning plate 4, and enabling the tooling installation plate 3 to be lifted and lowered along the support frame, the component positioning plate 4 and the ultra-thin components installed thereon can be driven to achieve synchronous up and down floating. This structural design can effectively control the position change of the ultra-thin components during the processing process, improve the processing accuracy, ensure that the verticality of the side of the ultra-thin component to the large surface and the adjacent side meets the high-precision requirements, meet the processing standards of sub-micron level flatness and micron level verticality, provide a reliable foundation for subsequent assembly and use, and reduce error accumulation and performance degradation. Driven by the workpiece mounting plate 3, the component positioning plate 4 realizes the up and down floating of the workpiece, which can ensure that the polishing tool always maintains the best contact with the processed surface, thereby obtaining a high-quality processing effect.

[0024] The support frame 2 includes a bottom plate 21, a top plate 22 and a guide column 23, wherein the bottom plate 21 is arranged on the workpiece disk 1, and the top plate 22 and the bottom plate 21 are connected by the guide column 23, and the guide column 23 maintains a vertical state with the workpiece disk 1. This structural design enables the support frame 2 to have good stability and rigidity, and can provide stable support and precise guidance for the tooling mounting plate 3, ensuring that the tooling mounting plate maintains a vertical state during the lifting process, thereby ensuring the verticality and position accuracy of the component positioning plate 4 and the ultra-thin component, further improving the processing quality and reducing the processing error.

[0025] In this embodiment, the tooling installation plates 3 include two, which are relatively arranged on the support frame 2, and the two ends of each tooling installation plate 3 are slidably connected to the guide column 23 through linear bearings 9. The design of the linear bearings 9 enables the tooling installation plate 3 to smoothly and flexibly move up and down along the guide column 23. Since the use of the linear bearings 9 reduces the friction force, the stability and accuracy of the movement are improved, which is conducive to accurately controlling the up and down movement of the component positioning plate 4 and the ultra-thin component, ensuring the stable position of the component during the processing, reducing the processing error caused by unstable movement, and improving the processing efficiency and quality.

[0026] In addition, a pressing plate is provided on the tooling installation plate 3, and the pressing plate is connected to the component positioning plate 4 through fasteners to press the component positioning plate 4 from the top. This structural design can effectively fix the component positioning plate 4 to prevent it from loosening or shifting during processing, ensure the stable installation of the ultra-thin component on the component positioning plate 4, improve the stability during processing, avoid processing errors caused by the instability of the component positioning plate 4, and ensure processing accuracy and quality.

[0027] The floating pressure regulating mechanism 6 includes an adjusting screw and a spring, wherein the adjusting screw is arranged between the tooling mounting plate 3 and the top plate 22, and the spring is arranged on the outside of the adjusting screw. The pressure regulating mechanism 6 can adjust the pressure between the tooling mounting plate 3 and the support frame 2 according to the processing requirements. This design enables the tooling to adapt to ultra-thin components of different thicknesses and materials. By adjusting the pressure, it is ensured that the components are subjected to appropriate clamping force during the processing to prevent the components from being deformed or damaged. At the same time, the stability and processing accuracy of the components are ensured, and the applicability and flexibility of the tooling are improved. When adjusting the pressure, the pressure between the component positioning plate 4 and the support frame 2 can be accurately controlled by rotating the adjusting screw. The setting of the spring can provide a stable elastic force, making the pressure regulation smoother, which is conducive to adapting to the pressure requirements under different processing conditions and ensuring the stability and processing quality of ultra-thin components during the processing.

[0028] The component positioning plate 4 includes a base plate 41, a pad 42, a positioning block 43 and a pressure strip 44. The pad 42 is arranged on the surface of the base plate 41. A positioning block 43 is arranged on one side of the base plate 41. The pressure strip 44 is connected to the positioning block 43 through fasteners to fix the processed ultra-thin component on the pad 42. This structural design can effectively fix the ultra-thin component and ensure its stability and position accuracy during the processing. The arrangement of the pad 42 and the positioning block 43 can provide good support and positioning for the ultra-thin component. The use of the pressure strip 44 can further enhance the fixing effect of the component, prevent the ultra-thin component from shifting or deforming during the processing, and improve the processing accuracy and quality.

[0029] A first locking and fixing device 7 is also provided on the substrate 41 at the opposite side of the positioning block 43, which is used to press the ultra-thin component to be processed from the side; a gasket 45 is also provided on the positioning block 43, and the gasket 45 corresponds to the first locking and fixing device 7 one by one. The first locking and fixing device 7 can further fix the ultra-thin component from the side to ensure its stability during the processing and prevent the ultra-thin component from lateral movement or tilting. The provision of the gasket 45 can protect the surface of the component and avoid damage to the component due to the pressing of the first locking and fixing device 7, thereby improving the protection of the tooling and the processing accuracy.

[0030] The substrate 41 is also provided with a second locking device 8, which is used to press the ultra-thin component to be processed from the top. This design can further fix the ultra-thin component from the top, ensure its stability during processing, prevent the ultra-thin component from moving or vibrating in the vertical direction, and cooperate with the second locking and fixing device 8 on the side to form an all-round fixing effect, improve the stability and processing accuracy of the ultra-thin component, and reduce the processing error caused by the displacement of the ultra-thin component.

[0031] In this embodiment, the first locking and fixing device 7 and the second locking and fixing device 8 include a top screw fixing block and a top screw, wherein the top screw fixing block is arranged on the component positioning plate 4, and the top screw is arranged on the top screw fixing block. By adjusting the depth of the top screw in the top screw fixing block, the side and top of the ultra-thin component can be locked. This structural design makes the locking and fixing more flexible and accurate, and can be adjusted according to the actual situation of the ultra-thin component, so as to ensure the stability and position accuracy of the component during the processing, and improve the applicability and processing quality of the tooling.

[0032] The ultra-thin component side precision machining clamping tooling based on the above-mentioned structure, after the ultra-thin component is installed in place on the component positioning plate, not only the perpendicularity of the processed side surface and the two adjacent side surfaces is guaranteed, but also the perpendicularity of the processed side surface and the large surface can be guaranteed, and the relative relationship does not change during the processing; and the overall movement direction of the component positioning plate 4 on the support frame 2 is parallel to the direction of the large surface and the two adjacent side surfaces. Through this high-precision flatness control, the processing quality of ultra-thin components can be significantly improved to meet the needs of high-precision applications, and can adapt to ultra-thin components of different thicknesses and materials, as well as different processing conditions and requirements. This flexibility and adaptability enables the tooling to be quickly adjusted to the optimal state during the processing, reducing the processing time loss caused by tooling adjustment and improving processing efficiency. Embodiment 2

[0033] In a second aspect, in order to achieve the above technical problem, the present invention provides a method for precision machining of the side surface of an ultra-thin component, which is implemented by using the ultra-thin component side precision machining clamping tooling described in the first aspect, and the specific steps are as follows: (1) Placing the ultra-thin workpiece to be processed on the component positioning plate 4; (2) The ultra-thin component is fixed by means of the pressure strip 44, the first locking and fixing device 7 and the second locking and fixing device 8 to ensure that the verticality between the processed side surface of the ultra-thin workpiece and the large surface and the two adjacent side surfaces is within 2 microns; (3) Align the side to be processed of the ultra-thin workpiece with the polishing tool; (4) The floating pressure of the tooling mounting plate 3 is adjusted by the floating pressure adjustment mechanism 6 to ensure that the ultra-thin components are subjected to appropriate clamping force during the processing; (5) Polishing the side to be processed of the ultra-thin workpiece by a polishing tool; (6) During the processing of the ultra-thin workpiece, the workpiece mounting plate 3 moves up and down along the support frame 2, thereby driving the component positioning plate 4 and the ultra-thin workpiece mounted thereon to float up and down synchronously, so that the polishing tool maintains a constant cutting force during the processing; (7) After processing is completed, remove the processed ultra-thin workpiece.

[0034] Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.

Claims

1. A clamping tool for precision machining of the side of an ultra-thin component, characterized in that: include: A workpiece disk, a support frame, a tooling mounting plate and a component positioning plate, wherein a component through-hole is provided at the center of the workpiece disk, the support frame is arranged on the workpiece disk and is located at the periphery of the component through-hole; the tooling mounting plate is slidably arranged on the support frame and keeps a vertical state with the workpiece disk; the component positioning plate is arranged parallel to the tooling mounting plate; the component positioning plate is used for installing ultra-thin components; a floating pressure regulating mechanism is provided between the upper end of the component positioning plate and the support frame; when the tooling mounting plate moves up and down along the support frame, the component positioning plate drives the ultra-thin components to achieve synchronous up and down floating.

2. The ultra-thin component side precision machining clamping tool according to claim 1, characterized in that: The support frame includes a bottom plate, a top plate and guide columns. The bottom plate is arranged on the workpiece disk. The top plate and the bottom plate are connected by guide columns, and the guide columns are kept vertical to the workpiece disk.

3. The ultra-thin component side precision machining clamping tool according to claim 2, characterized in that: The tooling installation plates include two plates which are arranged opposite to each other on the support frame, and both ends of each tooling installation plate are slidably connected to the guide column via a linear bearing.

4. The ultra-thin component side precision machining clamping tool according to claim 3, characterized in that: A pressing plate is provided on the tooling installation plate, and the pressing plate is connected to the component positioning plate through a fastener to press the component positioning plate from the top.

5. The ultra-thin component side precision machining clamping tool according to claim 1, characterized in that: The floating pressure regulating mechanism comprises an adjusting screw and a spring. The adjusting screw is arranged between the tooling mounting plate and the top plate, and the spring is arranged on the outside of the adjusting screw.

6. The ultra-thin component side precision machining clamping tool according to claim 1, characterized in that: The component positioning plate includes a base plate, a pad, a positioning block and a pressure strip. The pad is arranged on the surface of the base plate. A positioning block is provided on one side of the base plate. The pressure strip and the positioning block are connected with fasteners to fix the processed ultra-thin element on the pad.

7. The ultra-thin component side precision machining clamping tool according to claim 6, characterized in that: A first locking and fixing device is also provided on the substrate at the opposite side of the positioning block, which is used to press the ultra-thin element to be processed from the side; a gasket is also provided on the positioning block, and the gasket corresponds to the first locking and fixing device one by one.

8. The ultra-thin component side precision machining clamping tool according to claim 6, characterized in that: The base plate is also provided with a second locking device for pressing the ultra-thin component to be processed from the top.

9. The ultra-thin component side precision machining clamping tool according to claim 8, characterized in that: The first locking and fixing device and the second locking and fixing device include a top screw fixing block and a top screw. The top screw fixing block is arranged on the component positioning plate, and the top screw is arranged on the top screw fixing block.

10. A method for precision machining of the side surface of an ultra-thin component, implemented by using the ultra-thin component side surface precision machining clamping tool as claimed in any one of claims 1 to 9, characterized in that: The specific steps are as follows: (1) placing the ultra-thin workpiece to be processed on the component positioning plate; (2) The ultra-thin component is fixed by means of a pressure strip, a first locking and fixing device, and a second locking and fixing device to ensure that the verticality between the processed side surface of the ultra-thin workpiece and the large surface and the two adjacent side surfaces is within 2 microns; (3) Align the side to be processed of the ultra-thin workpiece with the polishing tool; (4) The floating pressure of the tooling mounting plate is adjusted through the floating pressure adjustment mechanism to ensure that the ultra-thin components are subjected to appropriate clamping force during processing; (5) Polishing the side to be processed of the ultra-thin workpiece by a polishing tool; (6) During the processing of the ultra-thin workpiece, the workpiece mounting plate moves up and down along the support frame, thereby driving the component positioning plate and the ultra-thin workpiece mounted thereon to float up and down synchronously, so that the polishing tool maintains a constant cutting force during the processing; (7) After processing is completed, remove the processed ultra-thin workpiece.

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