Diamond-based X-ray target and preparation method thereof

Abstract

The present application provides a diamond-based X-ray target and a preparation method thereof, relating to the field of X-ray technology, wherein the preparation method comprises: processing a diamond blank based on preset structural features to obtain a diamond body, the diamond body comprising a first surface and multiple second surfaces; fixing the diamond body to an electrode plate so that the electrode plate covers the first surface; using the electrode plate as an electroforming electrode, electroforming a heat dissipation layer on the multiple second surfaces, the thickness of the heat dissipation layer being greater than the thickness of the diamond body, and the diamond body being wrapped in the heat dissipation layer; removing the electrode plate from the first surface; and vacuum plating a target material on the first surface to form a target material layer to obtain an X-ray target. The present application designs a diamond body with a polyhedral structure, combined with a heat dissipation layer wrapped around the diamond body, so that the heat generated by the target material layer on the first surface is conducted to the heat dissipation layer in parallel through the multiple second surfaces of the diamond body, thereby greatly improving the heat dissipation efficiency of the X-ray target.

Description

Technical Field

[0001] The present application relates to the field of X-ray technology, and in particular to a diamond-based X-ray target and a method for preparing the same. Background Art

[0002] X-ray targets are a crucial component of the X-ray source used to generate X-rays in computed tomography (CT). High-power density X-ray sources, a key development direction and benchmark for CT, require a critical issue: heat dissipation. Diamond, due to its high thermal conductivity, is an ideal heat transfer material for X-ray targets.

[0003] Existing techniques create X-ray targets by coating the front surface of a diamond film with an X-ray target material. However, this approach only dissipates heat through the back surface of the diamond film, which is not coated with the target material. This limited heat dissipation area does not address the heat dissipation issues associated with high-power density X-ray sources. Summary of the Invention

[0004] The present application provides a diamond-based X-ray target and a preparation method thereof, which improves the heat dissipation performance of the X-ray target by processing a diamond body having a first surface and multiple second surfaces with a larger area.

[0005] In a first aspect, an embodiment of the present application provides a method for preparing a diamond-based X-ray target, the preparation method comprising: processing a diamond blank based on preset structural features to obtain a diamond body, the diamond body comprising a first surface and multiple second surfaces, the sum of the areas of the multiple second surfaces being greater than the area of ​​the first surface; fixing the diamond body to an electrode plate so that the electrode plate covers the first surface; using the electrode plate as an electroforming electrode, electroforming a heat dissipation layer on the multiple second surfaces, the thickness of the heat dissipation layer being greater than the thickness of the diamond body along the direction from the first surface toward the electrode plate, and the diamond body being wrapped in the heat dissipation layer; removing the electrode plate from the first surface; and plating a target material on the first surface to form a target material layer to obtain an X-ray target.

[0006] In a second aspect, an embodiment of the present application provides a diamond-based X-ray target, comprising a diamond body, a heat dissipation layer and a target material layer, the diamond body comprising a first surface and multiple second surfaces, the sum of the areas of the multiple second surfaces being greater than the area of ​​the first surface; the diamond body can be fixed to an electrode plate, and the electrode plate covers the first surface; the electrode plate is used as an electroforming electrode, and a heat dissipation layer is electroformed on the multiple second surfaces; along the direction from the first surface toward the electrode plate, the thickness of the heat dissipation layer is greater than the thickness of the diamond body, and the diamond body is wrapped in the heat dissipation layer; after the electrode plate is removed from the first surface, the target material layer covers the first surface; wherein the heat generated by the target material layer is conducted to the heat dissipation layer via the multiple second surfaces.

[0007] The above-mentioned diamond-based X-ray target and its preparation method, by designing a diamond body with a polyhedral structure and combining it with a heat dissipation layer wrapped around the diamond body, conducts the heat generated by the target material layer on the first surface to the heat dissipation layer in parallel through multiple second surfaces of the diamond body, thereby greatly improving the heat dissipation efficiency of the X-ray target. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0009] Figure 1 This is a first flow chart of a method for preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0010] Figure 2 This is a second flow chart of the method for preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0011] Figure 3 Schematic diagram of the structure of a diamond-based X-ray target provided in an embodiment of the present application.

[0012] Figure 4 This is the first schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0013] Figure 5 This is a second schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0014] Figure 6 This is a third schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0015] Figure 7 This is a fourth schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0016] Figure 8 This is a fifth schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0017] Figure 9 This is a sixth schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0018] Explanation of the numbers in the figure: 100-X-ray target; 200-cutting body; 1-diamond body; 10-diamond blank; 11-first surface; 12-second surface; 2-heat dissipation layer; 3-target material layer; 4-electrode plate; 5-prefabricated solution; Y-direction of the first surface toward the electrode plate; W1-thickness of the diamond body; W2-thickness of the heat dissipation layer.

[0019] The realization of the objectives, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of this application more clear, the present application is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0021] The terms "first," "second," "third," "fourth," and so forth (if any) in the specification and claims of this application and in the accompanying drawings are used to distinguish similar items and are not necessarily used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate; in other words, the described embodiments may be implemented in a sequence other than that shown or described herein. Furthermore, the terms "including" and "having," and any variations thereof, may also encompass other contexts. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or apparatus.

[0022] It should be noted that the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include one or more of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0023] Please see Figure 1 , which is a flow chart of a method for preparing a diamond-based X-ray target provided in an embodiment of the present application. The present application provides a method for preparing a diamond-based X-ray target. The preparation method includes steps S101-S105.

[0024] Step S101 : processing a diamond blank to obtain a diamond body based on preset structural features.

[0025] In step S101, a diamond body 1 includes a first surface 11 and multiple second surfaces 12. The first surface 11 can be used for coating a target material to form an X-ray target 100. The second surfaces 12 are used to conduct heat generated by the X-ray target 100. The sum of the areas of the multiple second surfaces 12 is greater than the area of ​​the first surface 11. The preset structural features are the expected three-dimensional structure of the diamond body 1. These preset structural features include, but are not limited to, the shape and number of faces of the diamond body 1, the shape and area of ​​each face, and the expected first and second surfaces 11 and 12 on each face. Specifically, in this application, the preset structural features include the shape and number of faces of the diamond body 1, as well as the shape and area of ​​the first surface 11. The shape of the first surface 11 includes, but is not limited to, a hexagon, an octagon, etc. More specifically, this application does not limit the shape of the second surface 12, and the number of faces of the second surface 12 and the area of ​​each second surface 12 are both related to the area of ​​the first surface 11 to reflect the heat dissipation performance of the X-ray target 100.

[0026] Furthermore, the area of ​​each second surface 12 is greater than the area of ​​the first surface 11. The first surface 11 and the plurality of second surfaces 12 are sequentially connected, so that the diamond body 1 has an enclosed polyhedron structure. In this application, the diamond blank 10 is mechanically ground to achieve processing. Based on the preset structural features, the first surface 11 is machined on the diamond body 1, and the plurality of second surfaces 12 of sufficient size are machined corresponding to the first surface 11.

[0027] Step S102 : fixing the diamond body to the electrode plate so that the electrode plate covers the first surface.

[0028] In step S102, the material of the electrode plate 4 is at least one of titanium, platinum, nickel, or a corresponding alloy thereof. Specifically, in this embodiment, the material of the electrode plate 4 is titanium. The present application arranges the first surface 11 of the diamond body 1 relative to the electrode plate 4 so that the first surface 11 is covered by the electrode plate 4. This ensures that when the heat dissipation layer 2 is subsequently electroformed on the plurality of second surfaces 12, the heat dissipation layer 2 does not cover the first surface 11 and occupy the target material space.

[0029] In step S103 , the electrode plate is used as an electroforming electrode to electroform a heat dissipation layer on the plurality of second surfaces.

[0030] In step S103, along the direction Y from the first surface toward the electrode plate, the thickness W2 of the heat dissipation layer is greater than the thickness W1 of the diamond body. More specifically, the thickness of the heat dissipation layer 2 is much greater than the thickness of the diamond body 1, so that the diamond body 1 is completely encapsulated by the heat dissipation layer 2. The material used for the heat dissipation layer 2 should have good thermal conductivity. The material of the heat dissipation layer 2 is at least one of copper, silver, graphite, etc., or their corresponding alloys. Specifically, in this embodiment, the material of the heat dissipation layer 2 is copper. In other words, the electrode plate and the heat dissipation layer are made of different materials.

[0031] In the present application, the heat dissipation layer 2 can be closely bonded to the multiple second surfaces 12 when electroforming the multiple second surfaces 12. The X-ray target 100 can form a continuous heat-conducting structure with the diamond body 1 via the multiple second surfaces 12, effectively conducting heat from the X-ray target 100 away from the heat dissipation layer 2 through the second surfaces 12, thereby ensuring stable and continuous heat dissipation from the X-ray target 100. In other words, the present application directly bonds the heat dissipation layer 2 to the second surfaces 12 of the diamond body 1 through electroforming, resulting in a dense and uniform coverage of the heat dissipation layer 2 on the second surfaces 12. This ensures that there are no gaps between the heat dissipation layer 2 and the multiple second surfaces 12 of the diamond body 1, significantly improving the thermal conductivity efficiency of the X-ray target 100.

[0032] Step S104: removing the electrode plate from the first surface.

[0033] In step S104, the electrode plate 4 is removed from the first surface 11 by being immersed in a prefabricated solution 5. The prefabricated solution only acts on the electrode plate 4 but not on the heat dissipation layer 2. The effects of the prefabricated solution 5 include chemical reaction and / or corrosion to selectively remove specific materials. For example, the electrode plate 4 is made of a first material and the heat dissipation layer 2 is made of a second material. The first material is one of materials such as titanium, platinum, nickel, or their corresponding alloys, and the second material is one of materials such as copper, silver, graphite, or their corresponding alloys. When the first material is titanium and the second material is copper, the prefabricated solution 5 is a hydrofluoric acid solution. When the electrode plate 4 is immersed in the hydrofluoric acid solution, the hydrofluoric acid will chemically react with the titanium and consume the electrode plate 4, thereby removing the electrode plate 4 from the first surface 11. It can be understood that since the materials of the electrode plate 4 and the heat dissipation layer 2 are different, the electrode plate 4 can be selectively removed by using different prefabricated solutions 5. Since the heat dissipation layer 2 is fixed to the plurality of second surfaces 12 by electroforming, and the prefabricated solution 5 does not act on the heat dissipation layer 2, when the electrode plate 4 is removed through the prefabricated solution 5, the heat dissipation layer 2 can still remain free of peeling or damage, thereby ensuring the structural integrity of the heat dissipation layer 2.

[0034] Step S105 , coating a target material on the first surface to form a target material layer to obtain an X-ray target.

[0035] In step S105, when the electrode plate 4 is removed from the first surface 11, the first surface 11 is exposed to the heat dissipation layer 2. A target layer 3 is formed on the first surface 11 by vacuum coating. The target layer 3 is made of at least one of tungsten, copper, aluminum, molybdenum, and gold. Specifically, in the present application, the target layer 3 is made of tungsten. The target layer 3 also covers the side of the heat dissipation layer 2 closest to the first surface 11.

[0036] Please see Figure 2 , which is a second flow chart of the method for preparing a diamond-based X-ray target provided in an embodiment of the present application. Before removing the electrode plate from the first surface, the preparation method further includes step S201.

[0037] Step S201 : Based on the preset shape of the X-ray target, the diamond body, the electrode plate and the heat dissipation layer are cut to obtain the cut diamond body, the electrode plate and the heat dissipation layer, thereby forming a cut body.

[0038] In step S201, the diamond body, electrode plate, and heat dissipation layer are cut by mechanical processing, so that the diamond body, electrode plate, and heat dissipation layer retain the corresponding shapes of the first surface 11 and the plurality of second surfaces 12, while also making the heat dissipation layer 2 and the electrode plate 4 respectively adapt to the expected three-dimensional structural features of the X-ray target 100 to form a cut body 200. This allows the electrode plate 4 to be removed from the first surface by subsequently immersing the cut body 200 in the prefabricated solution 5.

[0039] Please see Figure 3 The present application also provides a diamond-based X-ray target 100. X-ray target 100 includes a diamond body 1, a heat dissipation layer 2, and a target material layer 3. The diamond body 1 includes a first surface 11 and multiple second surfaces 12. The sum of the areas of the multiple second surfaces 12 is greater than the area of ​​the first surface 11. The diamond body 1 can be fixed to an electrode plate 4, with the electrode plate 4 covering the first surface 11. The heat dissipation layer 2 is electroformed on the multiple second surfaces 12, using the electrode plate 4 as an electroforming electrode. Along a direction Y from the first surface toward the electrode plate, the thickness W2 of the heat dissipation layer is greater than the thickness W1 of the diamond body, and the diamond body 1 is wrapped around the heat dissipation layer 2. After the electrode plate 4 is removed from the first surface 11, the target material layer 3 covers the first surface 11. The heat generated by the target material layer 3 is conducted to the heat dissipation layer 2 via the multiple second surfaces 12. The target material layer 3 also covers the side of the heat dissipation layer 2 closest to the first surface 11. The diamond-based X-ray target 100 of the present application is prepared using a method for preparing a diamond-based X-ray target. The preparation method has been described in detail above and will not be repeated here.

[0040] The following will describe the preparation process of the diamond-based X-ray target 100 with reference to the accompanying drawings.

[0041] like Figure 4-Figure 9 As shown, Figure 4-Figure 9 A schematic diagram illustrating the preparation of a diamond-based X-ray target is shown. First, based on preset structural features, a diamond blank 10 is mechanically ground to obtain a first surface 11 and multiple second surfaces 12 of a diamond body 1. The diamond body 1 is then attached to an electrode plate 4 by gluing, so that the electrode plate 4 covers the first surface 11. A heat dissipation layer 2 is then electroformed on the multiple second surfaces 12, using the electrode plate 4 as an electroforming electrode. Next, based on the preset shape of the X-ray target 100, the diamond body 1, electrode plate 4, and heat dissipation layer 2 are cut to obtain a cut body 200. The electrode plate 4 is then removed from the first surface 11 by immersing the cut body 200 in a prefabricated solution 5. Finally, a target material is vacuum-plated on the first surface 11 to form a target material layer 3, resulting in the X-ray target 100.

[0042] The area of ​​the first surface 11 is 0.5-25 square millimeters. The preset structural feature is that the shape of the first surface 11 is hexagonal. The material of the electrode plate 4 is titanium. The thickness of the electrode plate 4 is 0.1-0.5 mm. The area of ​​the side of the electrode plate 4 facing the first surface 11 is 5-500 square millimeters. The material of the heat dissipation layer 2 is copper. The thickness W2 of the heat dissipation layer is 4-50 mm to fully wrap the diamond body 1. The material of the target layer 3 can be a metal material such as tungsten, copper, aluminum, molybdenum, gold, etc. The thickness of the target layer 3 is 0.5-50 microns.

[0043] In the above embodiment, by designing a diamond body with a polyhedral structure and combining it with a heat dissipation layer wrapped around the diamond body, the heat generated by the target material layer on the first surface is conducted in parallel to the heat dissipation layer through multiple second surfaces of the diamond body, thereby greatly improving the heat dissipation efficiency of the X-ray target.

[0044] Obviously, those skilled in the art may make various modifications and variations to this application without departing from the spirit and scope of this application. Thus, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application is intended to include such modifications and variations.

[0045] It should be understood that although the steps in the flowcharts of the accompanying drawings are shown in sequence as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some of the steps in the flowcharts of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily executed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be executed in turn or alternately with other steps or at least a portion of the sub-steps or stages of other steps.

[0046] The above examples are merely preferred embodiments of the present application and are not intended to limit the scope of the present application. Therefore, equivalent changes made according to the claims of the present application are still within the scope of the present application.

Claims

1. A method for preparing a diamond-based X-ray target, characterized in that: The preparation method comprises: Based on the preset structural features, a diamond blank is processed to obtain a diamond body, wherein the diamond body has an enclosed polyhedron structure, the diamond body includes a first surface and a plurality of second surfaces, the sum of the areas of the plurality of second surfaces is greater than the area of ​​the first surface, and the plurality of second surfaces are planes of the diamond body in a plurality of different directions; fixing the diamond body to an electrode plate so that the electrode plate covers the first surface; Using the electrode plate as an electroforming electrode, electroforming a heat dissipation layer on the plurality of second surfaces, wherein the thickness of the heat dissipation layer is greater than the thickness of the diamond body along the direction from the first surface toward the electrode plate, and the diamond body is wrapped in the heat dissipation layer, and the material of the heat dissipation layer is at least one of copper and a copper alloy; removing the electrode plate from the first surface; A target material is plated on the first surface to form a target material layer to obtain an X-ray target.

2. The preparation method according to claim 1, wherein The preset structural features include the shape and number of faces of the diamond body, and the shape and area of ​​the first surface.

3. The preparation method according to claim 1, wherein The area of ​​each second surface is larger than the area of ​​the first surface.

4. The preparation method according to claim 1, wherein Before removing the electrode plate from the first surface, the preparation method further includes: Based on the preset shape of the X-ray target, the diamond body, the electrode plate and the heat dissipation layer are cut to obtain a cut diamond body, an electrode plate and a heat dissipation layer to form a cut body.

5. The preparation method according to claim 4, wherein The electrode plate and the heat dissipation layer are made of different materials; the electrode plate is removed from the first surface by immersing the cut body in a prefabricated solution, and the prefabricated solution only acts on the electrode plate but not on the heat dissipation layer. The effects of the prefabricated solution include chemical reaction and / or corrosion.

6. The preparation method according to claim 5, wherein The electrode plate is made of titanium, and the prefabricated solution is a hydrofluoric acid solution.

7. The preparation method according to claim 1, wherein When the electrode plate is removed from the first surface, the first surface is exposed to the heat dissipation layer.

8. A diamond-based X-ray target, characterized in that The X-ray target comprises: A diamond body having a closed polyhedral structure, the diamond body comprising a first surface and a plurality of second surfaces, the sum of the areas of the plurality of second surfaces being greater than the area of ​​the first surface; the plurality of second surfaces being planes of the diamond body in a plurality of different directions; the diamond body being fixed to an electrode plate so that the electrode plate covers the first surface; a heat dissipation layer, formed on the plurality of second surfaces by electroforming using the electrode plate as an electroforming electrode; the heat dissipation layer having a thickness greater than that of the diamond body along the direction from the first surface toward the electrode plate, and the diamond body being wrapped around the heat dissipation layer, and the heat dissipation layer being made of copper or a copper alloy; a target material layer covering the first surface after the electrode plate is removed from the first surface; The heat generated by the target layer is conducted to the heat dissipation layer through the plurality of second surfaces.

9. The X-ray target according to claim 8, wherein The area of ​​each second surface is larger than the area of ​​the first surface.

10. The X-ray target according to claim 8, wherein The target material layer also covers a side of the heat dissipation layer close to the first surface.

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